Epitaxial wafer carrier with protection function

Abstract

The present invention discloses an epitaxial wafer carrier with a protective function, which relates to the technical field of epitaxial wafer carriers, including an epitaxial wafer box with an opening on the side, and also includes: a sealing door plate, which seals and covers the opening of the epitaxial wafer box; a plurality of first supporting members arranged in an array, which are arranged on the side wall of the epitaxial wafer box and are used to support the epitaxial wafer; a limiting frame, which is movably placed between the first supporting member and the epitaxial wafer box, and can slide between the first supporting member and the epitaxial wafer box to limit the first supporting member; the present invention arranges a first elastic part, when a robot arm places the epitaxial wafer, if the robot arm accidentally touches the first supporting member, due to the arrangement of the first elastic part, only a single first elastic part will be deformed, thereby avoiding the problem of all first supporting members shaking due to accidental touching, thereby improving the protective effect on the epitaxial wafer.

Description

Technical Field

[0001] The present invention relates to the technical field of epitaxial wafer carriers, and in particular to an epitaxial wafer carrier with a protective function. Background Art

[0002] Epitaxial wafers are precision products. After production, epitaxial wafers require special protection during transportation to avoid damage. In the prior art, when transporting epitaxial wafers, most of the transportation methods simply wrap a layer of protective film around the epitaxial wafers and fix them with brackets made of foam material to prevent the epitaxial wafers from being damaged due to collisions. However, this form of protection is less effective. In order to improve the protection of epitaxial wafers, more and more types of special carriers have been designed and put into use.

[0003] For example, the patent with publication number CN206395091U discloses an epitaxial wafer storage box, including a storage box, the storage box including a box body and a box cover, the inner side of the box body is provided with a buffer layer, the inner side of the box body is provided with a partition plate, both sides of the partition plate are provided with a shock-absorbing layer, the partition plate is provided with a wafer taking groove, and the inner side of the box cover is provided with a fixing block, which can not only fix the epitaxial wafer during the transportation of the epitaxial wafer, but also can effectively prevent the damage to the epitaxial wafer caused by vibration during transportation, and it is easy to take and place the epitaxial wafer.

[0004] Although the above patent can provide buffering and shock-absorbing protection for epitaxial wafers, the robotic arm is prone to accidentally touching the epitaxial wafers when placing them, causing the entire epitaxial wafer storage box to vibrate, making the epitaxial wafers easily damaged.

[0005] Therefore, it is necessary for the present invention to propose an epitaxial wafer carrier with a protective function to solve the above-mentioned problem. Summary of the invention

[0006] The purpose of the present invention is to provide an epitaxial wafer carrier with a protective function to solve the problem proposed in the above background technology that the robot arm is prone to accidentally touch the epitaxial wafer when placing it, causing the entire epitaxial wafer storage box to vibrate and the epitaxial wafer to be easily damaged.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an epitaxial wafer carrier with a protective function, including an epitaxial wafer box with an opening on the side, and also including: a sealing door plate, which seals and covers the opening of the epitaxial wafer box; a plurality of first supporting members arranged in an array, which are arranged on the side wall of the epitaxial wafer box and are used to support the epitaxial wafer; a limiting frame, which is movably placed between the first supporting member and the epitaxial wafer box, and can slide between the first supporting member and the epitaxial wafer box to limit the first supporting member; a sliding rod, which is arranged on the limiting frame and passes through the epitaxial wafer box and is sealed and slidably connected with the epitaxial wafer box; a conical A locking sleeve, which is sleeved on one end of the sliding rod located outside the epitaxial wafer box and is connected to the side wall of the epitaxial wafer box through a fixing member; a locking member, which is sleeved on the outside of the conical locking sleeve and can be locked together with the conical locking sleeve by pressing the locking member; a snap-fit ​​sleeve, which is located on the side of the locking member away from the conical locking sleeve and can be snap-fitted with the locking member, is connected to the epitaxial wafer box through the first elastic member, and is also connected to the epitaxial wafer box through the elastic layer. When the locking member is snap-fitted with the snap-fit ​​sleeve and the locking member is locked together with the conical locking sleeve, the snap-fit ​​sleeve can be separated from the locking member under the elastic force of the first elastic member.

[0008] As a preferred technical solution of the present invention, the first supporting member includes a first elastic portion connected to the side wall of the epitaxial wafer box; the first supporting portion is arranged on a side of the first elastic portion away from the epitaxial wafer box.

[0009] As a preferred technical solution of the present invention, the limit frame includes two symmetrically arranged vertical rods; a connecting rod, which is used to connect the two vertical rods, and a peripheral side wall thereof is connected to the sliding rod.

[0010] As a preferred technical solution of the present invention, the locking member includes an annular portion that is snap-fitted with the snap-fit ​​sleeve; a second elastic portion, which is arranged at one end of the annular portion close to the conical locking sleeve, and the number of the second elastic portion is two and they are symmetrically arranged, and the second elastic portion is parallel to the generatrix of the conical locking sleeve; a barb, which is arranged at one end of the second elastic portion away from the annular portion, and is locked with the conical locking sleeve, so that the locking member and the conical locking sleeve are locked as a whole.

[0011] As a preferred technical solution of the present invention, it also includes a base, which is detachably connected to the bottom of the epitaxial wafer box; a through hole, which is opened on the base, and the number is at least four; a top column, which is placed at the bottom of the epitaxial wafer box; an externally threaded tube, which is placed in the through hole and communicated with the inner cavity of the epitaxial wafer box, a part of the externally threaded tube is provided with an exhaust valve, and the remaining part of the externally threaded tube is provided with a protective gas inlet valve; a threaded sleeve, which is placed in the through hole and rotatably connected to the through hole, and is threadedly matched with the externally threaded tube.

[0012] As a preferred technical solution of the present invention, it also includes a crane docking joint, which is arranged on the top of the epitaxial wafer box and is detachably connected to the epitaxial wafer box, and is used for docking with the transport crane; reinforcing ribs, which are placed on the top of the epitaxial wafer box and have multiple numbers.

[0013] As a preferred technical solution of the present invention, it also includes two handles, which are symmetrically arranged on both sides of the epitaxial wafer box.

[0014] As a preferred technical solution of the present invention, a door frame is provided at the opening of the epitaxial wafer box, and a flange is provided on the inner wall thereof; a sealing door panel is placed in the door frame and sealed with the door frame; a door lock mechanism is provided in two groups in a linear array and is placed on the sealing door panel; a linkage mechanism is placed between the two groups of the door lock mechanisms and is used for linkage of the two groups of the door lock mechanisms.

[0015] As a preferred technical solution of the present invention, the door lock mechanism includes two lock openings symmetrically opened on the door frame; a lock plate, which is placed on the sealed door panel and can cooperate with the lock opening for locking, and is slidably connected to the sealed door panel with upper and lower limit positions; a turntable, which is rotatably connected to the sealed door panel via a rotating shaft; two arc grooves, which are opened on the turntable in a circular array; and a fixed column, which is placed in the arc groove.

[0016] As a preferred technical solution of the present invention, the linkage mechanism includes a first gear rotatably connected to the sealing door panel; and two second gears, which are meshed with the first gear and coaxially connected to the turntable.

[0017] Technical effects and advantages of the present invention:

[0018] 1. The present invention cooperates with each other among the first supporting member, the limiting frame, the sliding rod, the conical locking sleeve, the locking member and the snap sleeve. When the sealed door panel is installed, the snap sleeve is pressed, and the locking member moves and drives the locking member toward the locking member. When the locking member moves to contact the side wall of the conical locking sleeve, the side wall corresponding to the generatrix of the conical locking sleeve pushes the first elastic part to undergo elastic deformation, so that the barb and the conical locking sleeve are locked as a whole to avoid shaking.

[0019] 2. The present invention cooperates with each other among the first supporting member, the limit frame, the sliding rod, the conical locking sleeve, the locking member and the snap-fitting sleeve. After the locking member and the conical locking sleeve are locked as one, the snap-fitting sleeve is released and is no longer pressed. Under the elastic force of the first elastic member, the snap-fitting sleeve is pushed to separate from the annular portion to prepare for the subsequent operation.

[0020] 3. The present invention cooperates with the first supporting member, the limiting frame, the sliding rod, the conical locking sleeve, the locking member and the snap sleeve. When the vacuum is drawn on the vacuum packaging belt, the vacuum packaging belt generates a vacuum and draws negative pressure. The vacuum packaging belt squeezes the snap sleeve and moves toward the locking member, so that the first elastic member is always in a compressed state. During transportation, if the vacuum packaging belt is damaged, the vacuum packaging belt is connected to the atmosphere and the vacuum packaging belt no longer compresses the first elastic member. Under the elastic force of the first elastic member, the snap sleeve returns to its original state, thereby serving as a warning that the packaging bag is damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0022] Figure 2 It is an exploded schematic diagram of the connection parts between the base and the epitaxial wafer box of the present invention.

[0023] Figure 3 It is a schematic diagram of the explosion of the epitaxial wafer box and the sealing door panel in the present invention.

[0024] Figure 4 It is a schematic diagram of the door lock mechanism structure in the present invention.

[0025] Figure 5 For the present invention Figure 4 Front view of the structure.

[0026] Figure 6 It is a schematic plan view of the overall structure of the present invention.

[0027] Figure 7 It is a schematic diagram of the connection between the conical locking sleeve, the fixing member, the locking member, the clamping sleeve, the first elastic member and the elastic layer structure in the present invention.

[0028] Figure 8 It is a schematic diagram of the clamping sleeve, locking member and fixing member in the present invention.

[0029] In the figure: 1, epitaxial wafer box; 2, sealing door plate; 3, first supporting member; 301, first elastic part; 302, first supporting part; 4, limiting frame; 401, vertical rod; 402, connecting rod; 5, conical locking sleeve; 6, fixing member; 7, locking member; 701, annular part; 702, second elastic part; 703, barb; 8, clamping sleeve; 9, first elastic member; 10, elastic layer; 11, sliding rod; 12. Base; 13. Top column; 14. Externally threaded pipe; 15. Threaded sleeve; 16. Exhaust valve; 17. Shielding gas inlet valve; 18. Overhead crane joint; 19. Door frame; 20. Door lock mechanism; 2001. Locking mouth; 2002. Locking plate; 2003. Turntable; 2004. Arc groove; 2005. Fixed column; 21. Linkage mechanism; 2101. First gear; 2102. Second gear. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] The present invention provides Figures 1 to 8 The epitaxial wafer carrier with protective function shown in the figure includes an epitaxial wafer box 1 with an opening on the side, and also includes: a sealing door plate 2, which seals and covers the opening of the epitaxial wafer box 1; the present invention arranges the epitaxial wafer box 1 and the sealing door plate 2, and the epitaxial wafer box 1 and the sealing door plate 2 form a closed space for accommodating epitaxial wafers.

[0032] A plurality of first supporting members 3 arranged in an array are disposed on the side wall of the epitaxial wafer box 1 and are used for supporting the epitaxial wafer.

[0033] Specifically, the first supporting member 3 includes a first elastic portion 301 connected to the side wall of the epitaxial wafer box 1; and a first supporting portion 302, which is arranged on the side of the first elastic portion 301 away from the epitaxial wafer box 1. The present invention provides the first elastic portion 301, and when the robot arm places the epitaxial wafer, if the robot arm accidentally touches the first supporting member 3, only a single first elastic portion 301 will be deformed due to the provision of the first elastic portion 301, thereby avoiding the shaking of the remaining first supporting members 3 caused by one being touched as in the prior art; the present invention supports the epitaxial wafer by providing the first supporting portion 302.

[0034] The limiting frame 4 is movably placed between the first supporting member 3 and the epitaxial wafer box 1, and can slide between the first supporting member 3 and the epitaxial wafer box 1 to limit the first supporting member 3. By setting the limiting frame 4, the present invention can limit the first supporting member 3 by adjusting the position of the limiting frame 4 after packaging and before transportation, and prevent the first supporting member 3 from shaking during transportation, which may cause friction damage between the epitaxial wafer and the first supporting member 3.

[0035] The slide bar 11 is arranged on the limiting frame 4 and penetrates the epitaxial wafer box 1 and is sealed and slidably connected with the epitaxial wafer box 1. In the present invention, the slide bar 11 penetrates the epitaxial wafer box 1 so that the slide bar 11 can only slide along the length direction of the slide bar 11.

[0036] Specifically, the limit frame 4 includes two symmetrically arranged vertical rods 401; the present invention pushes the limit frame 4 to make the vertical rods 401 conflict with the first supporting member 3, thereby limiting the first supporting member 3 and preventing the first supporting member 3 from shaking and causing damage to the epitaxial wafer.

[0037] The connecting rod 402 is used to connect the two vertical rods 401, and the peripheral side wall thereof is connected to the sliding rod 11; the present invention sets the sliding rod 11, and by pushing the sliding rod 11, the sliding of the sliding rod 11 can drive the limit frame 4 to move, thereby realizing the position adjustment of the limit frame 4, and then realizing the limitation of the first supporting member 3.

[0038] The conical locking sleeve 5 is sleeved on one end of the slide bar 11 outside the epitaxial wafer box 1 and is connected to the side wall of the epitaxial wafer box 1 through the fixing member 6 .

[0039] The locking member 7 is sleeved outside the conical locking sleeve 5. By pressing the locking member 7, it can be locked with the conical locking sleeve 5 as a whole.

[0040] Specifically, the locking member 7 includes an annular portion 701 that is engaged with the snap-fit ​​sleeve 8. The present invention provides an annular portion 701 for engaging with the snap-fit ​​sleeve 8. A snap-fit ​​groove is provided at one end of the annular portion 701 away from the conical locking sleeve 5, and a protrusion that cooperates with the snap-fit ​​groove is provided on the outer wall of the snap-fit ​​sleeve 8.

[0041] The second elastic portion 702 is arranged at one end of the annular portion 701 close to the conical locking sleeve 5. There are two of them and they are symmetrically arranged. The second elastic portion 702 is parallel to the generatrix of the conical locking sleeve 5. The present invention arranges them to be parallel so that the locking member 7 and the conical locking sleeve 5 can match each other after being locked.

[0042] The barb 703 is disposed at one end of the second elastic portion 702 away from the annular portion 701 and is locked with the conical locking sleeve 5 so that the locking member 7 and the conical locking sleeve 5 are locked as a whole.

[0043] The snap-fit ​​sleeve 8 is located on the side of the locking member 7 away from the conical locking sleeve 5, and can be snap-fitted with the locking member 7. It is connected to the epitaxial wafer box 1 through the first elastic member 9, and is also connected to the epitaxial wafer box 1 through the elastic layer 10. When the locking member 7 is snap-fitted with the snap-fit ​​sleeve 8, and the locking member 7 and the conical locking sleeve 5 are locked as a whole, the snap-fit ​​sleeve 8 can be separated from the locking member 7 under the elastic force of the first elastic member 9.

[0044] When the sealing door panel 2 is installed, by pressing the snap-fit ​​sleeve 8, after overcoming the elastic force of the first elastic member 9, the snap-fit ​​sleeve 8 will be pushed to move toward the conical locking sleeve 5. Since the snap-fit ​​sleeve 8 and the locking member 7 are locked as a whole at this time, the snap-fit ​​sleeve 8 moves and drives the locking member 7 toward the locking member 7. When the locking member 7 moves to contact the side wall of the conical locking sleeve 5, under the action of the side wall corresponding to the busbar of the conical locking sleeve 5, the second elastic part 702 will be pushed to undergo elastic deformation. When it is pushed to the end where the hook 703 is located at the connection between the conical locking sleeve 5 and the fixing member 6, under the action of the elastic force of the second elastic part 702, the hook 703 and the conical locking sleeve 5 are locked as a whole.

[0045] Then release the clamping sleeve 8 and stop pressing it. Under the elastic force of the first elastic member 9, the clamping sleeve 8 is pushed to move away from the locking member 7. Since the locking member 7 is locked with the conical locking sleeve 5 as a whole and the conical locking sleeve 5 is connected to the epitaxial wafer box 1, under the elastic force of the first elastic member 9, the clamping sleeve 8 is pushed to separate from the annular portion 701.

[0046] Usually, after the epitaxial wafer box 1 is sealed, a layer of vacuum packaging tape is often arranged on the outer surface of the epitaxial wafer box 1, and then the vacuum packaging tape is vacuumed. Since the vacuum packaging tape generates vacuum and draws negative pressure, the vacuum packaging tape will squeeze the clamping sleeve 8 to move toward the locking member 7, so that the first elastic member 9 is always in a compressed state. During transportation, if the vacuum packaging tape is damaged, since the vacuum packaging tape is connected to the atmosphere, the vacuum packaging tape will no longer compress the first elastic member 9. Under the elastic force of the first elastic member 9, the clamping sleeve 8 will return to its original state, thereby serving as a warning that the packaging bag is damaged.

[0047] The invention also includes a base 12, which is detachably connected to the bottom of the epitaxial wafer box 1; the present invention supports the bottom of the epitaxial wafer box 1 by setting the base 12. A through hole is opened on the base 12, and the number of the through holes is at least four; a top column 13 is placed at the bottom of the epitaxial wafer box 1; an external threaded tube 14 is placed in the through hole and communicated with the inner cavity of the epitaxial wafer box 1, a part of the external threaded tube 14 is provided with an exhaust valve 16, and the remaining part of the external threaded tube 14 is provided with a protective gas inlet valve 17; a threaded sleeve 15 is placed in the through hole and rotatably connected to the through hole, and is threadedly connected to the external threaded tube 14; the present invention is used to discharge the gas in the epitaxial wafer box 1 by setting the exhaust valve 16, and is used to inject protective gas into the epitaxial wafer box 1 by setting the protective gas inlet valve 17.

[0048] It also includes a crane docking joint 18, which is arranged on the top of the epitaxial wafer box 1 and is detachably connected to the epitaxial wafer box 1, and is used for docking with a transport crane; the present invention fixes the crane docking joint 18 to the top of the epitaxial wafer box 1 by bolts, thereby facilitating the replacement and maintenance of the crane docking joint 18; reinforcing ribs are arranged on the top of the epitaxial wafer box 1, and there are multiple reinforcing ribs; the present invention avoids deformation of the epitaxial wafer box 1 by arranging reinforcing ribs.

[0049] It also includes two handles, which are symmetrically arranged on both sides of the epitaxial wafer box 1; the present invention facilitates the movement of the epitaxial wafer box 1 by arranging the handles.

[0050] A door frame 19 is provided at the opening of the epitaxial wafer box 1, and a flange is provided on the inner wall thereof.

[0051] The sealed door panel 2 is placed in the door frame 19 and is sealed with the door frame 19 .

[0052] The door lock mechanism 20 is provided in two groups in a linear array and is placed on the sealing door plate 2. The present invention uses the door lock mechanism 20 to lock the sealing door plate 2 and the epitaxial wafer box 1 into one body.

[0053] The linkage mechanism 21 is disposed between the two door lock mechanisms 20 and is used for linkage of the two door lock mechanisms 20 . The present invention provides the linkage mechanism 21 so that the two door lock mechanisms 20 can be opened and closed simultaneously.

[0054] Further, specifically, the door lock mechanism 20 includes two locks 2001 symmetrically opened on the door frame 19; a lock plate 2002, which is placed on the sealed door panel 2 and can be locked with the locks 2001, and is slidably connected to the sealed door panel 2 in an upper and lower limit position; a rotating disk 2003, which is rotatably connected to the sealed door panel 2 through a rotating shaft; two arc grooves 2004, which are arranged in a circular array on the rotating disk 2003; and a fixed column 2005, which is placed in the arc groove 2004. The present invention realizes locking and unlocking by mutual cooperation among the locks 2001, the lock plate 2002, the rotating disk 2003, the arc groove 2004 and the fixed column 2005, etc., so that the rotating disk 2003 rotates, and under the action of the arc groove 2004, the fixed column 2005 slides along the length direction of the lock plate 2002.

[0055] Further, specifically, the linkage mechanism 21 includes a first gear 2101 rotatably connected to the sealing door panel 2; two second gears 2102 are meshed with the first gear 2101 and coaxially connected to the turntable 2003. The present invention rotates the first gear 2101, and the first gear 2101 rotates to rotate the second gear 2102, and the second gear 2102 rotates to drive the first gear 2101 to rotate, and the first gear 2101 rotates to drive the turntable 2003 to rotate. The turntable 2003 rotates, and under the action of the arc groove 2004, the fixed column 2005 slides along the length direction of the lock plate 2002, and finally realizes linkage locking or unlocking.

[0056] When placing the epitaxial wafer into the epitaxial wafer box 1, the present invention arranges a first elastic portion 301. When the robot arm drives the epitaxial wafer to move and places the epitaxial wafer in the epitaxial wafer box 1, if the robot arm mistakenly touches other first supporting members 3 due to recognition accuracy problems or other faults, since the first elastic portion 301 is an elastic portion, it will only cause the first supporting member 3 that is mistakenly touched to shake, and will not mistakenly touch one of the first supporting members 3 as in the prior art, causing all the first supporting members 3 in the entire epitaxial wafer box 1 to shake.

[0057] After the epitaxial wafers are placed, the sealing door plate 2 is covered on the opening of the epitaxial wafer box 1 , and the door lock mechanism 20 is locked with the epitaxial wafer box 1 through the linkage mechanism 21 , so as to achieve sealing between the sealing door plate 2 and the epitaxial wafer box 1 .

[0058] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An epitaxial wafer carrier with a protective function, comprising an epitaxial wafer box (1) with an opening on the side, characterized in that: Also includes: A sealing door plate (2) which seals and covers the opening of the epitaxial wafer box (1); A plurality of first supporting members (3) arranged in an array, which are arranged on the side wall of the epitaxial wafer box (1) and are used to support the epitaxial wafer; a limiting frame (4), which is movably disposed between the first supporting member (3) and the epitaxial wafer box (1), and is capable of sliding between the first supporting member (3) and the epitaxial wafer box (1), and is capable of limiting the position of the first supporting member (3); A sliding rod (11), which is arranged on the limiting frame (4) and passes through the epitaxial wafer box (1) and is sealed and slidably connected to the epitaxial wafer box (1); A conical locking sleeve (5), which is sleeved on one end of the slide bar (11) located outside the epitaxial wafer box (1) and is connected to the side wall of the epitaxial wafer box (1) via a fixing member (6); A locking member (7) is sleeved outside the conical locking sleeve (5), and when the locking member (7) is pressed, it can be locked together with the conical locking sleeve (5); a snap-fit ​​sleeve (8), which is located on a side of the locking member (7) away from the conical locking sleeve (5), and can be snap-fitted with the locking member (7); it is connected to the epitaxial wafer box (1) via a first elastic member (9); and it is also connected to the epitaxial wafer box (1) via an elastic layer (10); when the locking member (7) and the snap-fit ​​sleeve (8) are snap-fitted, and the locking member (7) and the conical locking sleeve (5) are locked as a whole, the snap-fit ​​sleeve (8) can be separated from the locking member (7) under the elastic force of the first elastic member (9); The locking member (7) comprises a circular ring portion (701) that is snap-fitted with the snap-fit ​​sleeve (8); A second elastic portion (702) is arranged at one end of the annular portion (701) close to the conical locking sleeve (5), and there are two of them, which are symmetrically arranged, and the second elastic portion (702) is parallel to the generatrix of the conical locking sleeve (5); a barb (703) disposed at one end of the second elastic portion (702) away from the annular portion (701), and engaging with the conical locking sleeve (5) to lock the locking member (7) and the conical locking sleeve (5) together; The first supporting member (3) comprises a first elastic portion (301) connected to a side wall of the epitaxial wafer box (1); A first supporting portion (302) arranged on a side of the first elastic portion (301) facing away from the epitaxial wafer box (1); The limiting frame (4) comprises two symmetrically arranged vertical rods (401); A connecting rod (402) is used to connect the two vertical rods (401), wherein the peripheral side wall thereof is connected to the sliding rod (11).

2. The epitaxial wafer carrier with protection function according to claim 1, characterized in that: It also includes a base (12) which is detachably connected to the bottom of the epitaxial wafer box (1); through holes, which are opened on the base (12), and the number of through holes is at least four; A top column (13) placed at the bottom of the epitaxial wafer box (1); An externally threaded tube (14) is placed in the through hole and communicates with the inner cavity of the epitaxial wafer box (1), a portion of the externally threaded tube (14) is provided with an exhaust valve (16), and a remaining portion of the externally threaded tube (14) is provided with a protective gas inlet valve (17); A threaded sleeve (15) is disposed in the through hole and rotatably connected to the through hole, and is threadably connected to the externally threaded tube (14).

3. The epitaxial wafer carrier with protection function according to claim 1, characterized in that: It also includes a crane docking joint (18), which is arranged on the top of the epitaxial wafer box (1) and is detachably connected to the epitaxial wafer box (1), and is used for docking with the transport crane; A reinforcing rib is disposed on the top of the epitaxial wafer box (1), and there are a plurality of reinforcing ribs.

4. The epitaxial wafer carrier with protection function according to claim 1, characterized in that: It also includes two handles, which are symmetrically arranged on both sides of the epitaxial wafer box (1).

5. The epitaxial wafer carrier with protection function according to claim 1, characterized in that: The epitaxial wafer box (1) is provided with a door frame (19) at the opening, and a flange is provided on the inner wall thereof; A sealed door panel (2) is placed in the door frame (19) and is in sealing cooperation with the door frame (19); Door lock mechanisms (20), which are in two groups and arranged in a linear array and are placed on the sealed door panel (2); A linkage mechanism (21) is disposed between the two sets of door lock mechanisms (20) and is used for linkage of the two sets of door lock mechanisms (20).

6. The epitaxial wafer carrier with protection function according to claim 5, characterized in that: The door lock mechanism (20) comprises two lock openings (2001) symmetrically arranged on the door frame (19); A lock plate (2002) is placed on the sealing door plate (2), which can cooperate with the lock port (2001) for locking, and is slidably connected to the sealing door plate (2) in an upper and lower limit position; A rotating disk (2003) is rotatably connected to the sealing door panel (2) via a rotating shaft; There are two arc-shaped grooves (2004), and the two arc-shaped grooves (2004) are arranged in a circular array on the rotating disk (2003); A fixed column (2005) is placed in the arc-shaped groove (2004).

7. The epitaxial wafer carrier with protection function according to claim 6, characterized in that: The linkage mechanism (21) comprises a first gear (2101) rotatably connected to the sealing door panel (2); The second gears (2102), which are two in number, are meshed with the first gears (2101) and are coaxially connected to the rotating disk (2003).

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