A cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment and method

Abstract

The present invention discloses a cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment and method. The equipment includes a front rotating conveyor table, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber, a rear rotating conveyor table and a cyclic conveyor table which are cyclically arranged. Transmission components for workpiece trolleys are respectively provided at the bottoms of the vacuum chambers, and vacuum valves are respectively provided between the vacuum chambers. The first vacuum chamber and the third vacuum chamber are connected in parallel to a first vacuum pumping unit, and the second vacuum chamber is connected to a second vacuum pumping unit. The method is that the workpiece is placed on the workpiece trolley and is successively sent into the first vacuum chamber, the second vacuum chamber and the third vacuum chamber by the front rotating conveyor table, coating is carried out in the second vacuum chamber, after the coating is completed, it is sent out by the rear rotating conveyor table and is sent back to the front rotating conveyor table through the cyclic conveyor table, and then cyclically enters the next coating operation. The equipment of the present invention has a simple and compact structure and can realize rapid cyclic coating of workpieces.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and particularly relates to a cyclic three-vacuum-chamber rapid magnetron coating device and method. Background Art

[0002] In the technical field of vacuum coating, traditional vacuum coating devices mostly adopt a single-furnace structure form or a structure form of multiple coating chambers connected in series.

[0003] However, it is found in actual production that the vacuum coating device with a single-furnace structure form has only one vacuum chamber. After each coating is completed, the furnace body is filled with air again. Since the opening time of the vacuum chamber door varies each time, it is easy to affect the atmosphere change in the vacuum chamber, resulting in a large fluctuation in the vacuum degree in the furnace body. Eventually, the film layer performance of the workpieces processed in each furnace will be different, and the film layer quality of the workpieces is inconsistent. At the same time, its coating efficiency is also low.

[0004] In the vacuum coating device with multiple coating chambers connected in series, the workpieces are usually coated layer by layer through each coating chamber to make the film layer thickness gradually meet the process requirements. This type of vacuum coating device has various forms and most of them are relatively mature, but the device is usually relatively large, occupies a large space, and the device cost is also high, which is not conducive to the control of production costs. Summary of the Invention

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a cyclic three-vacuum-chamber rapid magnetron coating device, which has a simple and compact structure and can realize rapid cyclic coating of workpieces.

[0006] Another purpose of the present invention is to provide a cyclic three-vacuum-chamber rapid magnetron coating method implemented by the above coating device.

[0007] The technical solution of the present invention is as follows: A cyclic three-vacuum chamber rapid magnetron sputtering coating equipment, which includes a front rotating conveyor table, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber, a rear rotating conveyor table and a cyclic conveyor table arranged in sequence along the conveying direction of the workpiece and the workpiece trolley. The bottoms of the first vacuum chamber, the second vacuum chamber and the third vacuum chamber are respectively provided with transmission components for the workpiece trolley. Vacuum valves are respectively arranged between the first vacuum chamber and the front rotating conveyor table, between the first vacuum chamber and the second vacuum chamber, between the second vacuum chamber and the third vacuum chamber, and between the third vacuum chamber and the rear rotating conveyor table. The first vacuum chamber is a front transition chamber, the second vacuum chamber is a coating chamber, and the third vacuum chamber is a rear transition chamber. The first vacuum chamber and the third vacuum chamber are connected in parallel to the first vacuum pumping unit, and the second vacuum chamber is connected to the second vacuum pumping unit. Among them, the front rotating conveyor table and the rear rotating conveyor table can respectively rotate 180° (the specific rotating structure can adopt the existing rotating table structure on the market), so as to form a cyclic conveying mechanism with the cyclic conveyor table and the conveying components at the bottoms of each vacuum chamber. As the coating chamber, the second vacuum chamber has different vacuum requirements from the front transition chamber and the rear transition chamber. Therefore, the second vacuum chamber is connected to a separate set of vacuum pumping units (i.e., the above-mentioned second vacuum pumping unit), and the first vacuum chamber and the third vacuum chamber are connected in parallel and then jointly connected to another set of vacuum pumping units (i.e., the above-mentioned first vacuum pumping unit). The first vacuum pumping unit includes a first Roots pump and a first mechanical pump connected to each other. Coarse pumping valves are respectively arranged on the pipelines connecting the first vacuum chamber and the second vacuum chamber. The second vacuum pumping unit includes a second Roots pump and a second mechanical pump connected to each other. Its pipelines are respectively connected to both ends of the third vacuum chamber, and molecular pumps and pumping valves are respectively arranged on the pipelines at both ends of the third vacuum chamber.

[0008] The vacuum valve between the first vacuum chamber and the front rotating conveyor table is arranged outside the first vacuum chamber (i.e., the atmospheric side), and the vacuum valves between the first vacuum chamber and the second vacuum chamber, and between the second vacuum chamber and the third vacuum chamber are respectively arranged on the inner sides of both ends of the second vacuum chamber (i.e., the high-vacuum side). The vacuum valve between the third vacuum chamber and the rear rotating conveyor table is arranged outside the third vacuum chamber (i.e., the atmospheric side). This setting method avoids setting vacuum valves in the first vacuum chamber and the third vacuum chamber, can effectively reduce the volume of the first vacuum chamber and the third vacuum chamber, shorten the pumping time, and achieve the purpose of efficient pumping.

[0009] The vacuum valve includes a valve plate, a valve plate pressing plate, a balance compression spring, a support screw, a valve hinge, a valve shaft and a first power driving mechanism. The valve plate and the valve plate pressing plate are connected by a support screw, and a balance compression spring is sleeved on the support screw. Valve hinges are respectively arranged at the upper and lower ends of the valve plate pressing plate. One end of each valve hinge is connected to the valve shaft, and one end of the valve shaft is connected to a first power driving mechanism.

[0010] Both ends of the valve shaft are respectively provided with support seats. The valve shaft is arranged parallel to the valve plate. The upper and lower ends of the valve shaft are respectively installed through the support seats. The first power driving mechanism includes a connected first servo motor and a first reduction box. The output shaft of the first reduction box is connected to one end of the valve shaft.

[0011] On the side of the valve plate facing away from the valve pressure plate (i.e., the side where the valve plate is in contact with the side wall of the vacuum chamber), there is a groove. A valve seal ring is arranged in the groove, and the cross-section of the valve seal ring is in a tip shape.

[0012] In the above vacuum valve structure, since the time taken for the vacuum valve to open or close accounts for a relatively small part of the entire coating process cycle and rapid opening and closing are required, through the above structural design, the reliability and stability of the vacuum valve can be ensured. Among them, the power driving mechanism adopts the method of a servo motor plus a reduction box. This driving method can achieve the rapid opening and closing of the vacuum valve, and its opening and closing time can be shortened to within 0.2 - 0.3 seconds; a spring is arranged between the valve plate and the valve pressure plate to balance the valve plate and play a shock-absorbing role. The use of a tip-shaped seal ring can achieve a faster sealing effect, which is better than the sealing effect of the traditional circular cross-section seal ring. In addition, among the four vacuum valves, for the two vacuum valves located on the atmospheric side, due to the pressure of the atmospheric pressure when closing, a servo motor (or torque motor) with a relatively small power plus a reduction box can be used to achieve its power driving; while for the two vacuum valves located on the high-vacuum side, since the second vacuum chamber still needs to maintain a vacuum state when the first vacuum chamber and the third vacuum chamber are put into the atmosphere, under the influence of the atmospheric pressure, these two vacuum valves usually require a greater torque to press the valve plate tightly. Therefore, a servo motor (or torque motor) with a relatively large power plus a reduction box needs to be selected to achieve its power driving.

[0013] A planar target is arranged in the second vacuum chamber. The planar target includes a target material, a target seat, a magnetic conductive plate, and a magnet. The target material is locked and installed on the target seat through fixing screws. The magnet is installed in the target seat through the magnetic conductive plate. A water cooling system is arranged in the target seat. A number of heat dissipation grooves are distributed on the surface of the target material facing the water cooling system. In order to achieve rapid coating, the power of the planar target needs to be turned up relatively high to increase the power. However, when the planar target is working, the working current is relatively large, and the heat generation of the target material will be very large, which easily affects the normal progress of the coating process. Therefore, by adding heat dissipation grooves on the target material, the cooling area of the target material can be increased. Compared with the existing planar target, the cooling area of this target material can be increased by at least six times, so as to achieve the purpose of turning up the power of the planar target to achieve rapid coating. Among them, the specific setting method of the water cooling system is the same as that of the existing planar target, and the installation method of the magnet and the magnetic conductive plate in the target seat is also the same as that of the existing planar target. In addition, a target material seal ring is also arranged on the contact surface between the target material and the target seat.

[0014] In the second vacuum chamber, a baffle is further provided on the outer periphery of the planar target. The outer periphery of the workpiece is the coating area, and the part of the baffle corresponding to the coating area is in an open shape. Among them, on both sides of the baffle, the side where the planar target is located is the target side, and the coating area on the outer periphery of the workpiece is the pumping side. Since the channel formed at the open-shaped part is relatively small, it is generally set to only allow the workpiece trolley to pass through. In this way, the working pressure on the target side is greater than that on the pumping side, and the air flow moves towards the pumping side. In addition, when the vacuum valves at both ends in the second vacuum chamber are fully opened, the working pressure in the first vacuum chamber and the third vacuum chamber is greater than that on the pumping side in the second vacuum chamber. The residual gases (such as air, O2, water vapor, etc.) in the first vacuum chamber and the third vacuum chamber will also flow towards the pumping side in the second vacuum chamber. At this time, these gases are pumped away by the molecular pump for pumping, ensuring that the gas inside the planar target on the target side is all argon, and guaranteeing the purity of the magnetron target coating layer.

[0015] The workpiece trolley includes a trolley body, trolley guide rails, and trolley drive wheels; the drive assembly of the workpiece trolley adopts a screw rotation drive method, and the drive assembly includes a drive screw and a second power drive mechanism; the workpieces are arranged side by side on the trolley body, trolley guide rails are provided at the bottom of the trolley body, and a number of trolley drive wheels are provided at the bottom of the trolley guide rails. The trolley drive wheels are matched with the drive screw, and one end of the drive screw is connected with the second power drive mechanism.

[0016] The second power drive mechanism includes a second servo motor, a second reduction gearbox, a magnetic fluid seal seat, a drive seal support seat, a driving synchronous pulley, a synchronous belt, and a driven synchronous pulley. The output shaft of the second servo motor is connected with the second reduction gearbox, the output shaft of the second reduction gearbox is connected with the driving synchronous pulley, the driving synchronous pulley is connected with the driven synchronous pulley through the synchronous belt, the driven synchronous pulley is connected with one end of the drive screw, the driving synchronous pulley is arranged inside the drive seal support seat, and the second reduction gearbox is also connected with the drive seal support seat through the magnetic fluid seal seat.

[0017] In the above workpiece trolley and its drive assembly, a servo motor plus a reduction gearbox is also used as its power drive mechanism. Using the functional characteristics of the servo motor, the transmission is smoothly accelerated (S curve) to the maximum speed and then smoothly decelerated (S curve) to drive the workpiece trolley, enabling the workpiece trolley to achieve rapid and stable movement operations within 0.5 seconds. At the same time, in order to ensure the synchronization of independent transmissions between the two drive assemblies during the movement process, an absolute encoder can also be installed on the drive screw to ensure the positioning accuracy of the front and rear transmissions.

[0018] The present invention realizes a cyclic three-vacuum-chamber rapid magnetron sputtering coating method through the above-mentioned coating equipment, specifically as follows: The workpiece is placed on the workpiece trolley. The front rotating transmission table rotates the workpiece trolley to the front end of the first vacuum chamber. After filling the first vacuum chamber with air, the vacuum valve between the first vacuum chamber and the front rotating conveyor is opened. After the workpiece trolley enters the first vacuum chamber, the first vacuum pumping unit is used to pump the first vacuum chamber. When the vacuum degree of the first vacuum chamber reaches the set value, the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly opened. The workpiece trolley enters the second vacuum chamber, and the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly closed. The workpiece is rapidly coated in the second vacuum chamber. After the coating is completed, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly opened. After the workpiece trolley enters the third vacuum chamber, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly closed. After filling the third vacuum chamber with air, the vacuum valve between the third vacuum chamber and the rear rotating conveyor is opened. The workpiece trolley is sent out by the rear rotating conveyor and sent back to the front rotating conveyor through the circulating conveyor to enter the next coating operation in a cycle.

[0019] The present invention has the following beneficial effects compared with the prior art:

[0020] In this cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment and method, by setting a cyclic three-vacuum-chamber structure and improving the vacuum valves between the vacuum chambers, planar targets in the coating chamber, etc., rapid cyclic coating of workpieces is realized, the coating efficiency is improved, and at the same time, the equipment structure is simplified, making the overall structure of the equipment simple and compact, which is beneficial to the control of production costs.

[0021] In this cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment, the vacuum valve can be quickly opened and closed, and its opening and closing time can be shortened to within 0.2 - 0.3 seconds. A spring is arranged between the valve plate and the valve pressing plate to balance the valve plate and play a shock-absorbing role. The use of a tip-shaped sealing ring can achieve a faster sealing effect, which is better than the sealing effect of the traditional circular cross-section sealing ring.

[0022] In the coating chamber of this cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment, a high-power planar target can be used. By adding heat dissipation grooves on the target material, the cooling area of the target material can be increased. Compared with the existing planar target, the cooling area of this target material can be increased by at least six times, so as to achieve the purpose of quickly coating by turning up the power of the planar target. At the same time, by arranging a baffle around the planar target and leaving an opening only at the place corresponding to the coating area on the outer periphery of the workpiece, it is beneficial to quickly pump the vacuum, and it also ensures that the gas inside the planar target on the target side is all argon, ensuring the purity of the magnetron sputtering coating layer. Description of the Drawings

[0023] Figure 1This is a schematic diagram of the planar distribution principle of the cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment.

[0024] Figure 2 This is a schematic diagram of the overall structure of the cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment.

[0025] Figure 3 This is a top view of the three-vacuum chamber.

[0026] Figure 4 This is a schematic diagram of the structure when the vacuum valve is open.

[0027] Figure 5 This is a schematic diagram of the structure when the vacuum valve is closed.

[0028] Figure 6 This is a cross-sectional view of the valve seal ring.

[0029] Figure 7 This is a cross-sectional view of the planar target.

[0030] Figure 8 This is a schematic diagram of the structure when a baffle is arranged on the periphery of the planar target.

[0031] Figure 9 This is a schematic diagram of the workpiece trolley and the transmission assembly.

[0032] Figure 10 This is a plan view of the workpiece trolley and the transmission assembly.

[0033] In the above figures, the components indicated by the respective reference numerals are as follows: 1 is a front rotating transfer table, 2 is a first vacuum chamber, 3 is a second vacuum chamber, 4 is a third vacuum chamber, 5 is a rear rotating transfer table, 6 is a circulating transfer table, 7 is a workpiece, 8 is a workpiece trolley, 8-1 is the trolley body, 8-2 is the trolley guide rail, 8-3 is the trolley driving wheel, 9 is a transmission assembly, 9-1 is a driving screw, 9-2 is a bearing seat, 9-3 is a second servo motor, 9-4 is a second reduction gearbox, 9-5 is a magneto-rheological fluid seal seat, 9-6 is a transmission seal support seat, 9-7 is a driving synchronous pulley, 9-8 is a synchronous belt, 9-9 is a driven synchronous pulley, 10 is a vacuum valve, 10-1 is a valve plate, 10-2 is a valve pressing plate, 10-3 is a balancing compression spring, 10-4 is a support screw, 10-5 is a valve hinge, 10-6 is a valve shaft, 10-7 is a support seat, 10-8 is a first servo motor, 10-9 is a first reduction gearbox, 10-10 is a valve seal ring, 11 is a first vacuum pumping unit, 11-1 is a first Roots pump, 11-2 is a first mechanical pump, 11-3 is a rough pumping valve, 12 is a second vacuum pumping unit, 12-1 is a second Roots pump, 12-2 is a second mechanical pump, 12-3 is a molecular pump, 12-4 is an air extraction valve, 13 is a planar target, 13-1 is a target material, 13-2 is a target seat, 13-3 is a magnetic conductive plate, 13-4 is a magnet, 13-5 is a fixing screw, 13-6 is a heat dissipation groove, 13-7 is a target material seal ring, 14 is a baffle plate. Detailed implementation manners

[0034] The present invention will be further described in detail below in conjunction with embodiments, but the implementation manners of the present invention are not limited thereto.

[0035] Embodiment

[0036] This embodiment provides a circulating three-vacuum-chamber rapid magnetron sputtering coating equipment and method.

[0037] As Figure 1 or Figure 2As shown in the figure, the cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment includes a front rotary transfer table 1, a first vacuum chamber 2, a second vacuum chamber 3, a third vacuum chamber 4, a rear rotary transfer table 5, and a cyclic transfer table 6 arranged in sequence along the conveying direction of the workpiece 7 and the workpiece trolley 8. Transmission components 9 for the workpiece trolley are respectively provided at the bottoms of the first vacuum chamber, the second vacuum chamber, and the third vacuum chamber. Vacuum valves 10 are respectively provided between the first vacuum chamber and the front rotary transfer table, between the first vacuum chamber and the second vacuum chamber, between the second vacuum chamber and the third vacuum chamber, and between the third vacuum chamber and the rear rotary transfer table. The first vacuum chamber is a front transition chamber, the second vacuum chamber is a coating chamber, and the third vacuum chamber is a rear transition chamber. The first vacuum chamber and the third vacuum chamber are connected in parallel to a first vacuum pumping unit 11, and the second vacuum chamber is connected to a second vacuum pumping unit 12. Among them, the front rotary transfer table and the rear rotary transfer table can respectively perform 180° rotation (the specific rotation structure can adopt the existing rotary table structure on the market), so as to form a cyclic transfer mechanism with the cyclic transfer table and the transfer components at the bottoms of each vacuum chamber. As the coating chamber, the second vacuum chamber has different vacuum requirements from the front transition chamber and the rear transition chamber. Therefore, the second vacuum chamber is connected to a separate set of vacuum pumping units (i.e., the above-mentioned second vacuum pumping unit), and the first vacuum chamber and the third vacuum chamber are connected in parallel and then jointly connected to another set of vacuum pumping units (i.e., the above-mentioned first vacuum pumping unit). The first vacuum pumping unit includes a connected first Roots pump 11-1 and a first mechanical pump 11-2, and rough pumping valves 11-3 are respectively provided on the pipelines connecting the first vacuum chamber and the second vacuum chamber. The second vacuum pumping unit includes a connected second Roots pump 12-1 and a second mechanical pump 12-2, and its pipelines are respectively connected to both ends of the third vacuum chamber, and molecular pumps 12-3 and pumping valves 12-4 are respectively provided on the pipelines at both ends of the third vacuum chamber. As Figure 3 shown, the vacuum valve between the first vacuum chamber and the front rotary transfer table is arranged outside the first vacuum chamber (i.e., the atmosphere side), and the vacuum valves between the first vacuum chamber and the second vacuum chamber and between the second vacuum chamber and the third vacuum chamber are respectively arranged inside both ends of the second vacuum chamber (i.e., the high vacuum side), and the vacuum valve between the third vacuum chamber and the rear rotary transfer table is arranged outside the third vacuum chamber (i.e., the atmosphere side). This setting method avoids setting vacuum valves in the first vacuum chamber and the third vacuum chamber, can effectively reduce the volume of the first vacuum chamber and the third vacuum chamber, shorten the pumping time, and achieve the purpose of efficient pumping.

[0038] As Figure 4 or Figure 5As shown in the figure, the vacuum valve includes a valve plate 10-1, a valve plate pressing plate 10-2, a balance compression spring 10-3, a support screw 10-4, a valve hinge 10-5, a valve shaft 10-6, and a first power driving mechanism. The valve plate and the valve plate pressing plate are connected by the support screw, and the balance compression spring is sleeved on the support screw. Valve hinges are provided at the upper and lower ends of the valve plate pressing plate. One end of each valve hinge is connected to the valve shaft, and one end of the valve shaft is connected to the first power driving mechanism. Support seats 10-7 are respectively provided at both ends of the valve shaft. The valve shaft is arranged parallel to the valve plate, and the upper and lower ends of the valve shaft are respectively installed through the support seats. The first power driving mechanism includes a connected first servo motor 10-8 and a first reduction gearbox 10-9. The output shaft of the first reduction gearbox is connected to one end of the valve shaft. A groove is provided on the side of the valve plate facing away from the valve plate pressing plate (i.e., the side where the valve plate is in contact with the side wall of the vacuum chamber), and a valve seal ring 10-10 is provided in the groove. As Figure 6 shown, the cross-section of the valve seal ring is in a tip shape. In the above vacuum valve structure, since the time taken for the vacuum valve to open or close accounts for a relatively small part of the entire coating process cycle, rapid opening and closing need to be achieved. Therefore, through the above structural design, the reliability and stability of the vacuum valve can be ensured. Among them, the power driving mechanism adopts the method of a servo motor plus a reduction gearbox. This driving method can achieve the rapid opening and closing of the vacuum valve, and its opening and closing time can be shortened to within 0.2 - 0.3 seconds; a spring is provided between the valve plate and the valve plate pressing plate to balance the valve plate and play a shock-absorbing role. The use of a tip-shaped seal ring can achieve a faster sealing effect, which is better than the sealing effect of a traditional circular cross-section seal ring. In addition, among the four vacuum valves, for the two vacuum valves located on the atmosphere side, due to the pressure of the atmospheric pressure when closing, a servo motor (or torque motor) with a relatively small power plus a reduction gearbox can be used to achieve their power driving; while for the two vacuum valves located on the high vacuum side, since the second vacuum chamber still needs to maintain a vacuum state when the first vacuum chamber and the third vacuum chamber are put into the atmosphere, under the influence of the atmospheric pressure, these two vacuum valves usually require a greater torque to press the valve plate tightly. Therefore, a servo motor (or torque motor) with a larger power plus a reduction gearbox needs to be selected to achieve their power driving.

[0039] A planar target 13 is provided in the second vacuum chamber. As Figure 7As shown in the figure, the planar target includes a target 13-1, a target seat 13-2, a magnetic conductive plate 13-3, and a magnet 13-4. The target is locked and installed on the target seat through fixing screws 13-5. The magnet is installed in the target seat through the magnetic conductive plate. A water cooling system is provided in the target seat. A number of heat dissipation grooves 13-6 are distributed on the side of the target facing the water cooling system. In order to achieve rapid film coating, it is necessary to turn up the power of the planar target to increase the power. However, when the planar target is working, the working current is large, and the heat generated by the target will be very large, which easily affects the normal progress of the film coating process. Therefore, by adding heat dissipation grooves on the target, the cooling area of the target can be increased. Compared with the existing planar target, the cooling area of this target can be increased by at least six times, so as to achieve the purpose of turning up the power of the planar target to achieve rapid film coating. Among them, the specific setting method of the water cooling system is the same as that of the existing planar target, and the installation method of the magnet and the magnetic conductive plate in the target seat is also the same as that of the existing planar target. In addition, a target seal ring 13-7 is also provided on the joint surface between the target and the target seat. As Figure 8 As shown in the figure, in the second vacuum chamber, a baffle 14 is also provided on the outer periphery of the planar target. The outer periphery of the workpiece is the film coating area, and the part of the baffle corresponding to the film coating area is in an open shape. Among them, on both sides of the baffle, the side where the planar target is provided is the target side, and the film coating area on the outer periphery of the workpiece is the pumping side. Since the channel formed at the open-shaped part is small, it is generally set to only allow the workpiece trolley to pass through. In this way, the working pressure on the target side is greater than that on the pumping side, and the air flow moves towards the pumping side; in addition, when the vacuum doors at both ends in the second vacuum chamber are opened wide, the working pressures in the first vacuum chamber and the third vacuum chamber are greater than the pressure on the pumping side in the second vacuum chamber, and the residual gases (such as air, O2, water vapor, etc.) in the first vacuum chamber and the third vacuum chamber will also flow towards the pumping side in the second vacuum chamber. At this time, these gases are pumped away by the molecular pump for pumping, which can ensure that the gas inside the planar target on the target side is all argon, ensuring the purity of the magnetron sputtering coating layer.

[0040] As Figure 9 or Figure 10As shown in the figure, the workpiece trolley includes a trolley body 8-1, a trolley guide rail 8-2 and trolley driving wheels 8-3; the transmission component of the workpiece trolley adopts a screw rotation drive mode, and the transmission component includes a driving screw 9-1 and a second power driving mechanism; the workpieces are arranged side by side on the trolley body, the bottom of the trolley body is provided with a trolley guide rail, and several trolley driving wheels are provided at the bottom of the trolley guide rail. The trolley driving wheels are matched with the driving screw. One end of the driving screw is connected with a second power driving mechanism, and both ends of the driving screw are fixedly installed through bearing seats 9-2. The second power driving mechanism includes a second servo motor 9-3, a second reduction box 9-4, a magneto-rheological fluid seal seat 9-5, a transmission seal support seat 9-6, a driving synchronous pulley 9-7, a synchronous belt 9-8 and a driven synchronous pulley 9-9. The output shaft of the second servo motor is connected with the second reduction box, the output shaft of the second reduction box is connected with the driving synchronous pulley, the driving synchronous pulley is connected with the driven synchronous pulley through the synchronous belt, and the driven synchronous pulley is connected with one end of the driving screw. The driving synchronous pulley is arranged in the transmission seal support seat, and the second reduction box is also connected with the transmission seal support seat through the magneto-rheological fluid seal seat. In the above workpiece trolley and its transmission component, a servo motor plus a reduction box is also used as its power driving mechanism. The function characteristics of the servo motor are used to smoothly increase the speed (S curve) of the transmission to the maximum speed, and then smoothly decelerate (S curve) to drive the workpiece trolley, so that the workpiece trolley can achieve fast and smooth moving operation within 0.5 seconds. At the same time, in order to ensure the synchronization of independent transmission between the two transmission components during the moving process, an absolute encoder can also be installed on the driving screw to ensure the positioning accuracy of the front and rear transmissions.

[0041] In this embodiment, a cyclic three-vacuum chamber rapid magnetron sputtering coating method is realized through the above coating equipment. Specifically, the workpiece is arranged on the workpiece trolley. The front rotating transmission table rotates the workpiece trolley to the front end of the first vacuum chamber. After filling the first vacuum chamber with air, the vacuum valve between the first vacuum chamber and the front rotating transfer table is opened. After the workpiece trolley enters the first vacuum chamber, the first vacuum pumping unit is used to pump the first vacuum chamber. When the vacuum degree of the first vacuum chamber reaches the set value, the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly opened. The workpiece trolley enters the second vacuum chamber, and the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly closed. The workpiece is rapidly coated in the second vacuum chamber; after the coating is completed, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly opened. After the workpiece trolley enters the third vacuum chamber, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly closed. After filling the third vacuum chamber with air, the vacuum valve between the third vacuum chamber and the rear rotating transfer table is opened. The workpiece trolley is sent out by the rear rotating transfer table and sent back to the front rotating transfer table through the circulating transfer table, and enters the next coating operation in a cycle.

[0042] As described above, the present invention can be preferably implemented. The above embodiments are only preferred embodiments of the present invention and are not used to limit the scope of implementation of the present invention; that is, all equivalent changes and modifications made according to the content of the present invention are covered by the scope claimed by the claims of the present invention.

Claims

1. A cyclic three-vacuum-chamber rapid magnetron sputtering coating device, characterized in that, It includes a front rotating transfer table, a first vacuum chamber, a second vacuum chamber, a third vacuum chamber, a rear rotating transfer table and a circulating transfer table arranged in sequence along the conveying direction of the workpiece and the workpiece trolley. The bottom parts of the first vacuum chamber, the second vacuum chamber and the third vacuum chamber are respectively provided with driving components of the workpiece trolley. Vacuum valves are respectively arranged between the first vacuum chamber and the front rotating transfer table, between the first vacuum chamber and the second vacuum chamber, between the second vacuum chamber and the third vacuum chamber, and between the third vacuum chamber and the rear rotating transfer table. The first vacuum chamber is a front transition chamber, the second vacuum chamber is a coating chamber, the third vacuum chamber is a rear transition chamber. The first vacuum chamber and the third vacuum chamber are connected in parallel to the first vacuum pumping unit, and the second vacuum chamber is connected to the second vacuum pumping unit. The vacuum valve includes a valve plate, a valve plate pressing plate, a balance compression spring, a supporting screw, a valve hinge, a valve shaft and a first power driving mechanism. The valve plate and the valve plate pressing plate are connected through the supporting screw. The balance compression spring is sleeved on the supporting screw. Valve hinges are respectively arranged at the upper and lower ends of the valve plate pressing plate. One end of each valve hinge is connected to the valve shaft, and one end of the valve shaft is connected with the first power driving mechanism. A groove is arranged on the side of the valve plate facing away from the valve plate pressing plate, and a valve seal ring is arranged in the groove. The cross section of the valve seal ring is in a tip shape. A planar target is arranged in the second vacuum chamber. The planar target includes a target material, a target seat, a magnetic conductive plate and a magnet. The target material is locked and installed on the target seat through fixing screws. The magnet is installed in the target seat through the magnetic conductive plate. A water cooling system is arranged in the target seat, and a plurality of heat dissipation grooves are distributed on the side of the target material facing the water cooling system. In the second vacuum chamber, a baffle is further arranged on the outer periphery of the planar target. The outer periphery of the workpiece is a coating area, and the part of the baffle corresponding to the coating area is in an open shape. The workpiece trolley includes a trolley body, trolley guide rails and trolley driving wheels. The driving component of the workpiece trolley adopts a screw rotation driving mode. The driving component includes a driving screw and a second power driving mechanism. The workpieces are arranged side by side on the trolley body. Trolley guide rails are arranged at the bottom of the trolley body. A plurality of trolley driving wheels are arranged at the bottom of the trolley guide rails. The trolley driving wheels are matched with the driving screw, and one end of the driving screw is connected with the second power driving mechanism.

2. The rapid magnetron sputtering coating equipment with a cyclic three-vacuum chamber according to claim 1, characterized in that The vacuum valve between the first vacuum chamber and the front rotating transfer table is arranged outside the first vacuum chamber. The vacuum valves between the first vacuum chamber and the second vacuum chamber and between the second vacuum chamber and the third vacuum chamber are respectively arranged on the inner sides of the two ends of the second vacuum chamber. The vacuum valve between the third vacuum chamber and the rear rotating transfer table is arranged outside the third vacuum chamber.

3. The cyclic three-vacuum-chamber rapid magnetron sputtering coating equipment according to claim 1, characterized in that, Support seats are respectively arranged at the two ends of the valve shaft. The valve shaft is arranged parallel to the valve plate. The upper and lower ends of the valve shaft are respectively installed through the support seats. The first power driving mechanism includes a connected first servo motor and a first reduction gearbox. The output shaft of the first reduction gearbox is connected to one end of the valve shaft.

4. The rapid magnetron sputtering coating equipment with a cyclic three-vacuum chamber according to claim 1, characterized in that The second power driving mechanism includes a second servo motor, a second speed reducer, a magneto-fluid sealing seat, a transmission sealing support seat, a driving synchronous pulley, a synchronous belt and a driven synchronous pulley. The output shaft of the second servo motor is connected to the second speed reducer, the output shaft of the second speed reducer is connected to the driving synchronous pulley, the driving synchronous pulley is connected to the driven synchronous pulley through the synchronous belt, one end of the driven synchronous pulley is connected to the driving screw, the driving synchronous pulley is arranged in the transmission sealing support seat, and the second speed reducer and the transmission sealing support seat are also connected through the magneto-fluid sealing seat.

5. A cyclic three-vacuum chamber rapid magnetron sputtering coating method implemented by the coating equipment according to any one of claims 1 to 4, characterized in that, The workpiece is arranged on the workpiece trolley. The front rotating transmission table rotates the workpiece trolley to the front end of the first vacuum chamber. After filling the first vacuum chamber with air, the vacuum valve between the first vacuum chamber and the front rotating transmission table is opened. After the workpiece trolley enters the first vacuum chamber, the first vacuum pumping unit is used to pump the first vacuum chamber. When the vacuum degree of the first vacuum chamber reaches the set value, the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly opened, the workpiece trolley enters the second vacuum chamber, and the vacuum valve between the second vacuum chamber and the first vacuum chamber is quickly closed. The workpiece is quickly coated in the second vacuum chamber; after the coating is completed, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly opened. After the workpiece trolley enters the third vacuum chamber, the vacuum valve between the second vacuum chamber and the third vacuum chamber is quickly closed. After filling the third vacuum chamber with air, the vacuum valve between the third vacuum chamber and the rear rotating transmission table is opened, the workpiece trolley is sent out by the rear rotating transmission table, and is sent back to the front rotating transmission table through the circulating transmission table to cycle into the next coating operation.

Images