Photovoltaic cell coating device

Abstract

The present invention belongs to the field of photovoltaic cell production, and specifically is a photovoltaic cell coating device, including a protective box, a transmission tube is fixedly connected to the outer side of the protective box, the transmission tube is connected to the inside of the protective box, a vacuum pump 1 connected to the inside of the transmission tube is installed on the top of the transmission tube, a tray for transporting a substrate plate is arranged in the transmission tube, an electron beam generator is installed on the outer side of the protective box, the output end of the electron beam generator passes through the inner side of the protective box, a grabbing assembly is arranged on the inner top of the protective box, the grabbing assembly is used to grab the substrate plate transported from the transmission tube, the protective box is provided with a plurality of crucibles, the overall process flow is simple to operate, and the error rate is low, and a vacuum pump 2 is arranged inside the protective box to always keep the vacuum inside the protective box and reduce the influence of the external environment, and the transmission tube is arranged, and the substrate plate is also vacuum-treated before entering, so as to further ensure the coating quality.

Description

Technical Field

[0001] The invention belongs to the field of photovoltaic cell production, in particular to a photovoltaic cell coating device. Background Art

[0002] Photovoltaic cells are a type of photoelectric semiconductor wafer that uses sunlight to generate electricity directly. As long as the illumination meets certain illumination conditions, it can instantly output voltage and generate current in the presence of a circuit. Photovoltaic coating is an important step in the production of photovoltaic cells, and evaporation is the core step of photovoltaic coating, which mainly involves evaporating metals, alloys and other materials to form a thin film deposited on a substrate.

[0003] A patent application with the publication number CN111916530A discloses a mass-produced high-efficiency photovoltaic cell three-in-one coating device. The above coating can be completed by one coating device. It is designed with a furnace tube, and flanges are installed at both ends of the furnace tube. All gases enter the quartz tube through the air inlet holes on the flange, and the quartz tube is sealed from the outside. Cooling water can flow inside the flange to cool the flange and prevent the rubber sealing ring from melting. The air inlet holes are evenly distributed around the flange to ensure uniform gas supply. The coating process is simpler, the production cost is reduced, the coating process does not need to be turned over multiple times, the risk of pollution is reduced, the process stability is higher, the oxidation time is shortened, and the production capacity is greatly improved.

[0004] Traditional coating equipment has relatively simple functions, and the coating process requires operator assistance, which not only takes up a lot of manpower costs, but also has a high probability of error. At the same time, the coating process needs to maintain a vacuum environment. The sealing structure of traditional equipment makes it difficult to ensure that the entire coating process is in a vacuum environment, which can easily lead to reduced coating quality.

[0005] To this end, the present invention provides a photovoltaic cell coating device. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problems is: a photovoltaic cell coating device described in the present invention comprises a protection box, a transmission tube is fixedly connected to the outer side of the protection box, the transmission tube is connected to the inside of the protection box, a vacuum pump connected to the inside of the transmission tube is installed on the top of the transmission tube, a tray for transporting a substrate plate is arranged in the transmission tube, an electron beam generator is installed on the outer side of the protection box, the output end of the electron beam generator passes through the inner side of the protection box, a grabbing assembly is arranged on the inner top of the protection box, the grabbing assembly is used to grab the substrate plate transported from the transmission tube, and the protection box is provided with a plurality of crucibles;

[0008] Place the substrate plate of the photovoltaic cell on the tray from one end of the transmission tube, close one end of the transmission tube, start the vacuum pump one to evacuate the transmission tube, then move the tray, move the substrate plate to the inside of the protective box, grab the substrate plate through the grab assembly, and the electron beam generator emits a high-energy electron beam to heat and vaporize the raw materials placed in the crucible. The vaporized particles move upward and after contacting the substrate plate, the substrate plate can capture the rising particles because the surface of the material has an adsorption effect on the particles themselves. At the same time, since the particles have diffusion properties on the surface, a uniform film will be formed on the bottom of the substrate plate, thereby completing the coating process. The overall process flow is simple to operate and has a low error rate. A vacuum pump two is installed inside the protective box to always keep the vacuum inside the protective box to reduce the impact of the external environment. The transmission tube is set up and the substrate plate is also vacuum-treated before entering to further ensure the coating quality.

[0009] Preferably, a separation frame is fixedly connected to the top of the protective box, and the grabbing assembly includes a plurality of vertically arranged suction cups, a negative pressure pump is fixedly connected between the tops of the plurality of suction cups, a servo motor for driving the negative pressure pump to rotate is fixedly connected to the outer side of the negative pressure pump, an electric telescopic rod for driving the servo motor to lift and lower is fixedly connected to the inner wall of the separation frame, and a separation assembly is arranged at the bottom of the separation frame, and the separation assembly is used to separate and independently separate the space of the frame and the protective box. When the pallet device transports the substrate plate to the protective box, the plurality of suction cups sink under the drive of the electric telescopic rod, and the negative pressure pump is used to transmit negative pressure to the suction cup to suck the substrate plate. After returning to its position, the coating process begins. After the coating is completed, the separation assembly is opened, and the closing assembly is opened first, and at the same time, the servo motor drives the overall suction cup to rotate to transfer the coated substrate plate to the separation frame, and then the separation assembly is closed. In this way, during the process of transferring the substrate plate out, the inside of the protective box always maintains a vacuum environment, thereby reducing the influence of the external environment on the coating process.

[0010] Preferably, a support platform is provided on the inner side of the protective box, and a switching disk is rotatably connected to the top of the support platform. The switching disk is inclined, and a plurality of grooves are provided on the top surface of the switching disk. The plurality of grooves are equidistantly arranged in a ring shape, and a plurality of crucibles are located in the grooves. A driving motor for driving the switching disk to rotate is installed at the bottom of the switching disk. A variety of materials will be used in the coating process. When one material is coated, the driving motor is started to drive the switching disk to rotate, and other crucibles are transferred to the projection position of the electron beam. In this way, the effect of coating multiple materials in turn can be achieved. The inclined switching disk can receive the electron beam at a larger angle, so that the electron beam can fully heat the raw materials inside the crucible from the side.

[0011] Preferably, a sealing platform is fixedly connected to the top of the support platform, and notches are provided at the front and rear ends of the sealing platform. A connecting platform is fixedly connected to the bottom of the support platform, and a bending plate is fixedly connected to the top of the sealing platform. A supply pump is fixedly connected to the outside of the protective box, and the output end of the supply pump is vertically facing the switching disk. The setting of the sealing platform prevents evaporated particles from falling into other crucibles when other crucibles are working, thereby reducing the mutual influence between different materials. The setting of the bending plate and the opening at the rear of the sealing platform prevents the crucible rotated to the rear from contacting the crucible being heated in the front. At the same time, the supply pump at the rear can continuously add raw materials to the crucible from the outside, thereby facilitating the raw material adding process.

[0012] Preferably, the bottom edge of the separation frame is fixedly connected to two symmetrically arranged bottom plates, and the separation assembly includes two moving plates, the moving plates are slidably connected to the top surface of the bottom plate, and the ends of the moving plates are provided with notches that match the outer shape of the suction cup. A screw nut mechanism 1 is installed on the top of the moving plate, and the driving end of the screw nut mechanism 1 is fixedly connected to the separation frame, and the moving end of the screw nut mechanism 1 is fixedly connected to the moving plate. Two upper covers are rotatably connected to the top of the separation frame. When a substrate plate is coated, the screw nut mechanism 1 is started to drive the moving plate to separate. At this time, the two upper covers are in a closed state, and then the servo motor 1 drives the substrate plate and the suction cup 1 to rotate into the separation frame, and then the two moving plates are closed. A vacuum pump 3 is arranged on the inner side of the separation frame, the upper cover is opened, and the coated substrate plate is taken out. After taking out, the upper cover is closed, and the vacuum pump 3 is started to evacuate the inside of the separation frame, and then the moving plate is opened, and the suction cup 1 is rotated to move it into the protection box. Through this arrangement, it can be ensured that the protection box is always kept out of contact with the outside world, further reducing the impact of the external environment.

[0013] Preferably, the vertical cross-section of the transmission tube is elliptical, a sealing valve is installed at one end of the transmission tube close to the protection box, and a sealing cover is rotatably connected to the other end of the transmission tube. A slot is provided on the inner ground of the transmission tube, and the bottom of the tray is slidably engaged with the slot, and a screw nut mechanism 2 is provided in the slot, and the moving end of the screw nut mechanism 2 is fixedly connected to the tray. The sealing cover is opened to place the substrate plate on the tray, and then the sealing cover is closed and the inside of the transmission tube is vacuumed. After the vacuuming is completed, the sealing valve is opened, and the tray is driven by the screw nut mechanism 2 to move the substrate plate into the protection box and grab it by the suction cup 1. The suction cup 1 can be raised and lowered to grab the substrate plate.

[0014] Preferably, the tray device comprises a rotating disk 2 and a rotating disk 1, the rotating disk 2 is located below the rotating disk 1, and servo motors 2 are fixedly connected at both ends of the rotating disk 2, wherein the output end of one servo motor 2 is fixedly connected to the moving end of the screw nut mechanism 2, and the output end of the other servo motor 2 is fixedly connected to the rotating disk 1. The two servo motors 2 on the rotating disk 2 can control the rotating disk 2 to rotate around the center, and can also drive the rotating disk 1 to rotate. This arrangement allows the end of the rotating disk 1 to extend outward to a larger space, which is not only convenient for receiving the substrate plate, but also convenient for sending the substrate plate to the bottom of the suction cup 1. In addition, during the movement of the tray device in the transmission tube, the tray devices can overlap with each other so that the width of the tray device can pass through the transmission tube. The entire tray device is flexible enough to be suitable for various situations.

[0015] Preferably, a support plate is fixedly connected to the end of the rotating disk, and a cleaning assembly is arranged on the top surface of the support plate. The cleaning assembly is used to clean the substrate plate. The support plate is used to receive the substrate plate. During the transfer of the substrate plate, the cleaning assembly can clean the bottom surface of the substrate plate. In this way, after the substrate plate is fixed by the suction cup, the bottom surface is the side to be coated, thereby ensuring the quality of the coating.

[0016] Preferably, an exchange box is fixedly connected to the outside of the transmission tube, a telescopic tube is fixedly connected to the top of the transmission tube, the telescopic tube is located on the outside of the transmission tube and is connected to an electric telescopic rod 2, the exchange box and the telescopic tube are communicated, a docking hole adapted to the telescopic tube is provided on the top surface of the rotating disk 1, a plurality of recovery holes and a plurality of spray holes are provided on the top surface of the support plate, the plurality of spray holes are arranged in a ring shape, and the plurality of recovery holes are located in the annular area surrounded by the plurality of spray holes, when the substrate plate is placed on the support plate, and then as the tray device moves to the bottom of the telescopic tube, the substrate plate is electrically retracted. Rod 2 drives the bottom of the telescopic tube to extend, so that the bottom of the telescopic tube is inserted into the docking hole, and the cleaning liquid in the exchange box is transported to multiple spray holes, and the bottom surface of the substrate plate is cleaned from the outside bottom. During the cleaning process, the used cleaning liquid will be recovered by the recovery hole, and the recovered cleaning liquid will be recovered by the exchange box along the rotating disk 1. Two spaces and two water pumps are provided in the exchange box, and the telescopic tube is divided into two independent pipes for supplying and recovering the cleaning liquid. Through this arrangement, the cleaning effect of the substrate plate is achieved, and the occupied time coincides with the vacuum extraction time, which will not affect the process time of the process.

[0017] Preferably, three suspenders are installed on the edge of the top surface of the support plate, and the suspenders are composed of an electric telescopic rod three, a stepper motor, a bracket and a suction cup two. The electric telescopic rod three is fixedly connected to the support plate, and the top of the electric telescopic rod three is fixedly connected to the stepper motor, the output end of the stepper motor is fixedly connected to the bracket, and the end of the bracket is fixedly connected to the suction cup two, and the suction cup two is vertically downward. When the substrate plate is placed on the support plate, the stepper motor drives the bracket and the suction cup two to rotate, and the electric telescopic rod three sinks to allow the suction cup two to contact and grab the substrate plate, and then the substrate plate is lifted up to allow the cleaning liquid sprayed from below to clean the bottom of the substrate plate more effectively. A notch is provided on the outer edge of the support plate to reduce the leakage of the cleaning liquid from the outside of the support plate. After cleaning, the substrate plate is put down and the suspender returns to its position.

[0018] The beneficial effects of the present invention are as follows:

[0019] 1. The photovoltaic cell coating device described in the present invention, through the arrangement of a transmission tube and a protective box, places the substrate plate of the photovoltaic cell on a tray from one end of the transmission tube, closes one end of the transmission tube, starts a vacuum pump 1 to evacuate the transmission tube, then moves the tray to move the substrate plate to the inside of the protective box, grabs the substrate plate through a grabbing assembly, and an electron beam generator emits a high-energy electron beam to heat and vaporize the raw materials placed in the crucible. The vaporized particles move upward, and after contacting the substrate plate, the substrate plate can capture the rising particles because the surface of the material has an adsorption effect on the particles themselves. At the same time, because the particles have diffusion properties on the surface, a uniform film will be formed on the bottom of the substrate plate, thereby completing the coating process. The overall process flow is simple to operate and has a low error rate. A vacuum pump 2 is arranged inside the protective box to always keep the vacuum inside the protective box to reduce the impact of the external environment. In addition, the transmission tube is arranged, and the substrate plate is also vacuum-treated before entering, further ensuring the coating quality.

[0020] 2. A photovoltaic cell coating device described in the present invention, when the tray device transports the substrate plate to the protective box, multiple suction cups sink under the drive of an electric telescopic rod, and a negative pressure pump is used to transmit negative pressure to the suction cup to suck the substrate plate. After returning to its position, the coating process begins. After the coating is completed, the separation component is opened, and the closing component is opened first. At the same time, a servo motor drives the overall suction cup to rotate, and the coated substrate plate is transferred to the separation frame. After that, the separation component is closed. In this way, during the process of transferring the substrate plate out, the inside of the protective box always maintains a vacuum environment, reducing the impact of the external environment on the coating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention will be further described below in conjunction with the accompanying drawings.

[0022] Figure 1 is a stereogram of the present invention;

[0023] Figure 2 is a cross-sectional view of the protective box of the present invention;

[0024] Figure 3 is a three-dimensional diagram of the support platform and the bending plate of the present invention;

[0025] Figure 4 is a three-dimensional diagram of the switching disk of the present invention;

[0026] Figure 5 is a three-dimensional diagram of a separation frame of the present invention;

[0027] Figure 6 is a cross-sectional view of the transmission tube of the present invention;

[0028] Figure 7 is a three-dimensional diagram of a tray device of the present invention;

[0029] In the figure: 1. protective box; 2. upper cover; 3. electron beam generator; 4. vacuum pump 1; 5. transmission tube; 6. sealing cover; 7. exchange box; 8. separation frame; 9. bending plate; 10. support table; 11. connecting table; 12. supply pump; 13. sealing table; 14. switching plate; 15. crucible; 16. bottom plate; 17. screw nut mechanism 1; 18. negative pressure pump; 19. moving plate; 20. substrate plate; 21. telescopic tube; 22. card slot; 23. tray; 24. support plate; 25. rotating disk 2; 26. rotating disk 1; 27. suction cup 1; 28. levitator; 29. ​​recovery hole; 30. spray hole. DETAILED DESCRIPTION

[0030] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0031] like Figures 1 to 6 As shown, a photovoltaic cell coating device described in an embodiment of the present invention comprises a protective box 1, a transmission tube 5 is fixedly connected to the outer side of the protective box 1, the transmission tube 5 is communicated with the inside of the protective box 1, a vacuum pump 4 connected with the inside of the transmission tube 5 is installed on the top of the transmission tube 5, a tray 23 for transporting a substrate plate 20 is arranged in the transmission tube 5, an electron beam generator 3 is installed on the outer side of the protective box 1, the output end of the electron beam generator 3 passes through the inner side of the protective box 1, a grabbing assembly is arranged on the inner top of the protective box 1, the grabbing assembly is used to grab the substrate plate 20 transported from the transmission tube 5, and the protective box 1 is provided with a plurality of crucibles 15;

[0032] During operation, the substrate plate 20 of the photovoltaic cell is placed on the tray 23 from one end of the transmission tube 5, one end of the transmission tube 5 is closed, and the vacuum pump 4 is started to evacuate the transmission tube 5. Then the tray 23 moves, and the substrate plate 20 is moved to the inside of the protective box 1. The substrate plate 20 is grabbed by the grabbing assembly, and the electron beam generator 3 emits a high-energy electron beam to heat and vaporize the raw materials placed in the crucible 15. The vaporized particles move upward. After contacting the substrate plate 20, the substrate plate 20 can capture the rising particles because the surface of the material has an adsorption effect on the particles themselves. At the same time, because the particles have diffusion properties on the surface, a uniform film will be formed at the bottom of the substrate plate 20, thereby completing the coating process. The overall process flow is simple to operate and has a low error rate. A vacuum pump 2 is arranged inside the protective box 1 to always keep the vacuum inside the protective box 1 to reduce the impact of the external environment. The transmission tube 5 is arranged, and the substrate plate 20 is also vacuum-treated before entering, which further ensures the coating quality.

[0033] like Figures 1 to 6 As shown, a separation frame 8 is fixedly connected to the top of the protection box 1, and the grabbing assembly includes a plurality of vertically arranged suction cups 27, a negative pressure pump 18 is fixedly connected between the tops of the plurality of suction cups 27, a servo motor 1 for driving the negative pressure pump 18 to rotate is fixedly connected to the outer side of the negative pressure pump 18, an electric telescopic rod 1 for driving the servo motor 1 to rise and fall is fixedly connected to the inner wall of the separation frame 8, and a separation assembly is arranged at the bottom of the separation frame 8, and the separation assembly is used to separate and independently separate the space between the frame 8 and the protection box 1;

[0034] During operation, after the tray device 23 transports the substrate plate 20 to the protective box 1, multiple suction cups 27 sink under the drive of the electric telescopic rod 1, and the negative pressure pump 18 is used to transmit negative pressure to the suction cup 27 to suck the substrate plate 20. After returning to its position, the coating process begins. After the coating is completed, the separation component is opened, and the closing component is opened first. At the same time, the servo motor 1 drives the overall suction cup 27 to rotate, and the coated substrate plate 20 is transferred to the separation frame 8. After that, the separation component is closed. In this way, during the process of transferring the substrate plate 20 out, the inside of the protective box 1 always maintains a vacuum environment, reducing the impact of the external environment on the coating process.

[0035] like Figures 1 to 6 As shown, a support platform 10 is provided inside the protective box 1, and a switching disk 14 is rotatably connected to the top of the support platform 10. The switching disk 14 is inclined, and a plurality of grooves are provided on the top surface of the switching disk 14. The plurality of grooves are arranged in an annular shape and at equal intervals. A plurality of crucibles 15 are located in the grooves, and a driving motor for driving the switching disk 14 to rotate is installed at the bottom of the switching disk 14;

[0036] During operation, a variety of materials are used in the coating process. When one material is coated, the drive motor is started to drive the switching disk 14 to rotate, and the other crucibles 15 are transferred to the projection position of the electron beam. In this way, the effect of coating multiple materials in turn can be achieved. The inclined switching disk 14 can receive the electron beam at a larger angle, so that the electron beam can also fully heat the raw materials inside the crucible 15 from the side.

[0037] like Figures 1 to 6 As shown, a sealing platform 13 is fixedly connected to the upper part of the support platform 10, and notches are provided at the front and rear ends of the sealing platform 13. A connecting platform 11 is fixedly connected to the lower part of the support platform 10, and a bending plate 9 is fixedly connected to the upper part of the sealing platform 13. A supply pump 12 is fixedly connected to the outer side of the protection box 1, and the output end of the supply pump 12 is vertically oriented toward the switching disk 14.

[0038] During operation, the setting of the sealing table 13 prevents evaporated particles from falling into other crucibles 15 when other crucibles 15 are working, thereby reducing the mutual influence between different materials. The setting of the bending plate 9 and the opening at the rear of the sealing table 13 prevents the crucible 15 rotating to the rear from contacting the crucible 15 being heated in the front. At the same time, the supply pump 12 at the rear can continuously add raw materials to the crucible 15 from the outside, thereby facilitating the process of adding raw materials.

[0039] like Figures 1 to 6 As shown, the bottom edge of the separation frame 8 is fixedly connected to two symmetrically arranged bottom plates 16, and the separation assembly includes two moving plates 19, which are slidably connected to the top surface of the bottom plate 16, and the end of the moving plate 19 is provided with a notch adapted to the outer shape of the suction cup 27, and a screw nut mechanism 17 is installed on the top of the moving plate 19, and the driving end of the screw nut mechanism 17 is fixedly connected to the separation frame 8, and the moving end of the screw nut mechanism 17 is fixedly connected to the moving plate 19, and the upper part of the separation frame 8 is rotatably connected to two upper covers 2;

[0040] During operation, after a substrate plate 20 is coated, the screw nut mechanism 17 is started to drive the movable plate 19 to separate. At this time, the two upper covers 2 are in a closed state. Then, the servo motor 1 drives the substrate plate 20 and the suction cup 27 to rotate into the separation frame 8. Then, the two movable plates 19 are closed. A vacuum pump 3 is provided on the inner side of the separation frame 8. The upper cover 2 is opened, and the coated substrate plate 20 is taken out. After taking it out, the upper cover 2 is closed, and the vacuum pump 3 is started to evacuate the inside of the separation frame 8. Then, the movable plate 19 is opened, and the suction cup 27 is rotated to move it into the protective box 1. Through this arrangement, it can be ensured that the protective box 1 is always kept out of contact with the outside world, thereby further reducing the impact of the external environment.

[0041] like Figures 1 to 6As shown, the vertical cross section of the transmission pipe 5 is elliptical, a sealing valve is installed at one end of the transmission pipe 5 close to the protection box 1, and a sealing cover 6 is rotatably connected to the other end of the transmission pipe 5. A card slot 22 is provided on the inner ground of the transmission pipe 5, and the bottom of the tray 23 is slidably engaged with the card slot 22. A screw nut mechanism 2 is provided in the card slot 22, and the moving end of the screw nut mechanism 2 is fixedly connected to the tray 23;

[0042] During operation, the sealing cover 6 is opened to place the substrate plate 20 on the tray 23, and then the sealing cover 6 is closed to evacuate the inside of the transmission tube 5. After the evacuation is completed, the sealing valve is opened, and the tray 23 is driven by the screw nut mechanism 2 to move the substrate plate 20 into the protective box 1 and grab it by the suction cup 27. The suction cup 27 can be raised and lowered to grab the substrate plate 20.

[0043] like Figures 5 to 7 As shown, the tray device 23 includes a rotating disk 25 and a rotating disk 1 26, wherein the rotating disk 25 is located below the rotating disk 1 26, and both ends of the rotating disk 25 are fixedly connected with servo motors 2, wherein the output end of one servo motor 2 is fixedly connected to the moving end of the screw nut mechanism 2, and the output end of the other servo motor 2 is fixedly connected to the rotating disk 1 26;

[0044] During operation, the two servo motors 2 on the rotating disk 25 can control the rotating disk 25 to rotate around the center, and can also drive the rotating disk 1 26 to rotate. This arrangement allows the end of the rotating disk 1 26 to extend outward to a larger space, which is not only convenient for receiving the substrate plate 20, but also convenient for the substrate plate 20 to be sent to the bottom of the suction cup 1 27. In addition, during the movement of the tray 23 in the transmission tube 5, the trays 23 can overlap with each other, so that the width of the tray 23 can pass through the transmission tube 5. The entire tray 23 is flexible enough to be suitable for various situations.

[0045] like Figures 5 to 7 As shown, the end of the rotating disk 1 26 is fixedly connected with a support plate 24, and a cleaning component is arranged on the top surface of the support plate 24, and the cleaning component is used to clean the substrate plate 20;

[0046] During operation, the support plate 24 is used to receive the substrate plate 20. During the process of transferring the substrate plate 20, the cleaning component can clean the bottom surface of the substrate plate 20. In this way, after the substrate plate 20 is fixed by the suction cup 27, the bottom surface is the side to be coated, thereby ensuring the quality of the coating.

[0047] like Figures 5 to 7As shown, the outer side of the transmission pipe 5 is fixedly connected with an exchange box 7, and a telescopic pipe 21 is fixedly connected to the top of the transmission pipe 5. The telescopic pipe 21 is located on the outer side of the transmission pipe 5 and is connected with an electric telescopic rod 2. The exchange box 7 is connected with the telescopic pipe 21. A docking hole adapted to the telescopic pipe 21 is provided on the top surface of the rotating disk 1 26. A plurality of recovery holes 29 and a plurality of spray holes 30 are provided on the top surface of the support plate 24. The plurality of spray holes 30 are arranged in a ring shape, and the plurality of recovery holes 29 are located in the annular area surrounded by the plurality of spray holes 30.

[0048] During operation, when the substrate plate 20 is placed on the support plate 24, it is then moved to the bottom of the telescopic tube 21 as the tray device 23 moves. The bottom of the telescopic tube 21 is extended by the electric telescopic rod 2, so that the bottom of the telescopic tube 21 is inserted into the docking hole, and the cleaning liquid in the exchange box 7 is transported to the multiple spray holes 30. The bottom surface of the substrate plate 20 is cleaned from the bottom outside. During the cleaning process, the used cleaning liquid will be recovered by the recovery hole 29, and the recovered cleaning liquid will be recovered by the exchange box 7 along the rotating disk 26. Two spaces and two water pumps are provided in the exchange box 7. The telescopic tube 21 is divided into two independent pipes for supplying and recovering the cleaning liquid. Through this arrangement, the cleaning effect of the substrate plate 20 is achieved, and the occupied time coincides with the vacuuming time, which will not affect the process time of the process.

[0049] like Figures 5 to 7 As shown, three suspenders 28 are installed on the top surface of the support plate 24 near the edge. The suspenders 28 are composed of an electric telescopic rod 3, a stepping motor, a bracket and a suction cup 2. The electric telescopic rod 3 is fixedly connected to the support plate 24, the top of the electric telescopic rod 3 is fixedly connected to the stepping motor, the output end of the stepping motor is fixedly connected to the bracket, the end of the bracket is fixedly connected to the suction cup 2, and the suction cup 2 is vertically downward;

[0050] During operation, when the substrate plate 20 is placed on the support plate 24, the stepper motor drives the bracket and the second suction cup to rotate, and the electric telescopic rod three sinks, allowing the second suction cup to contact and grab the substrate plate 20, and then the substrate plate 20 is lifted up to allow the cleaning liquid sprayed from below to more effectively clean the bottom of the substrate plate 20. The outer edge of the support plate 24 is provided with a groove to reduce the leakage of the cleaning liquid from the outside of the support plate 24. After cleaning, the substrate plate 20 is put down and the suspender 28 returns to its position.

[0051] During operation, the substrate plate 20 of the photovoltaic cell is placed on the tray 23 from one end of the transmission tube 5, one end of the transmission tube 5 is closed, and the vacuum pump 4 is started to evacuate the transmission tube 5. Then the tray 23 moves to move the substrate plate 20 to the inside of the protective box 1, and the substrate plate 20 is grabbed by the grabbing assembly. The electron beam generator 3 emits a high-energy electron beam to heat and vaporize the raw materials placed in the crucible 15. The vaporized particles move upward. After contacting the substrate plate 20, the substrate plate 20 can capture the rising particles because the surface of the material has an adsorption effect on the particles themselves. At the same time, because the particles have diffusion properties on the surface, a uniform film will be formed at the bottom of the substrate plate 20, thereby completing the coating process. The overall process flow is simple to operate and has a low error rate. A vacuum pump 2 is arranged inside the protective box 1 to always keep the vacuum inside the protective box 1 to reduce the impact of the external environment. The transmission tube 5 is arranged, and the substrate plate 20 is also vacuum-treated before entering, which further ensures the coating quality.

[0052] After the tray device 23 transports the substrate plate 20 to the protective box 1, the multiple suction cups 27 sink under the drive of the electric telescopic rod 1, and the negative pressure pump 18 is used to transmit negative pressure to the suction cup 27 to suck the substrate plate 20. After returning to its position, the coating process begins. After the coating is completed, the separation component is opened, and the closing component is opened first. At the same time, the servo motor 1 drives the overall suction cup 27 to rotate, and the coated substrate plate 20 is transferred to the separation frame 8. Then the separation component is closed. In this way, during the process of transferring the substrate plate 20 out, the inside of the protective box 1 always maintains a vacuum environment, reducing the influence of the external environment on the coating process;

[0053] In the coating process, multiple materials are used. When one material is coated, the drive motor is started to drive the switching disk 14 to rotate, and the other crucibles 15 are transferred to the projection position of the electron beam, so that the effect of coating multiple materials in turn can be achieved. The inclined switching disk 14 can receive the electron beam at a larger angle, so that the electron beam can also fully heat the raw materials inside the crucible 15 from the side;

[0054] The setting of the sealing platform 13 prevents the evaporated particles from falling into other crucibles 15 when other crucibles 15 are working, thereby reducing the mutual influence between different materials. The setting of the bending plate 9 and the rear opening of the sealing platform 13 prevents the crucible 15 rotating to the rear from contacting the crucible 15 being heated in the front. At the same time, the supply pump 12 at the rear can continuously add raw materials to the crucible 15 from the outside, thereby facilitating the process of adding raw materials.

[0055] When a substrate plate 20 is coated, the lead screw nut mechanism 17 is started to drive the moving plate 19 to separate. At this time, the two upper covers 2 are in a closed state. Then, the servo motor 1 drives the substrate plate 20 and the suction cup 27 to rotate into the separation frame 8. Then, the two moving plates 19 are closed. A vacuum pump 3 is arranged on the inner side of the separation frame 8. The upper cover 2 is opened, and the coated substrate plate 20 is taken out. After taking it out, the upper cover 2 is closed, and the vacuum pump 3 is started to evacuate the inside of the separation frame 8. Then, the moving plate 19 is opened, and the suction cup 27 is rotated to move it into the protection box 1. Through this arrangement, it can be ensured that the protection box 1 is always kept out of contact with the outside world, further reducing the impact of the external environment.

[0056] The sealing cover 6 is opened to place the substrate plate 20 on the tray 23, and then the sealing cover 6 is closed to evacuate the inside of the transmission tube 5. After the evacuation is completed, the sealing valve is opened, and the tray 23 is driven by the screw nut mechanism 2 to move the substrate plate 20 into the protective box 1 and is grasped by the suction cup 1 27. The suction cup 1 27 can be raised and lowered to grasp the substrate plate 20;

[0057] The two servo motors 2 on the rotating disk 25 can control the rotating disk 25 to rotate around the center, and can also drive the rotating disk 1 26 to rotate. This arrangement allows the end of the rotating disk 1 26 to extend outward to a larger space, which is not only convenient for receiving the substrate plate 20, but also convenient for the substrate plate 20 to be sent under the suction cup 1 27. In addition, during the movement of the tray 23 in the transmission tube 5, the trays 23 can overlap each other, so that the width of the tray 23 can pass through the transmission tube 5. The entire tray 23 is flexible enough and can be applied to various situations.

[0058] The support plate 24 is used to receive the substrate plate 20. During the process of transferring the substrate plate 20, the cleaning assembly can clean the bottom surface of the substrate plate 20. In this way, after the substrate plate 20 is fixed by the suction cup 27, the bottom surface is the side to be coated, thereby ensuring the quality of the coating.

[0059] When the substrate plate 20 is placed on the support plate 24, the tray device 23 moves to the bottom of the telescopic tube 21, and the bottom of the telescopic tube 21 is extended by the electric telescopic rod 2, so that the bottom of the telescopic tube 21 is inserted into the docking hole, and the cleaning liquid in the exchange box 7 is transported to the multiple spray holes 30, and the bottom surface of the substrate plate 20 is cleaned from the bottom of the outer side. During the cleaning process, the used cleaning liquid will be recovered by the recovery hole 29, and the recovered cleaning liquid will be recovered by the exchange box 7 along the rotating disk 1 26. The exchange box 7 is provided with two spaces and two water pumps, and the telescopic tube 21 is divided into two independent pipelines for supplying and recovering the cleaning liquid. Through this arrangement, the cleaning effect of the substrate plate 20 is achieved, and the occupied time coincides with the vacuuming time, which will not affect the process time of the process;

[0060] When the substrate plate 20 is placed on the support plate 24, the stepper motor drives the bracket and the second suction cup to rotate, and the electric telescopic rod three sinks, allowing the second suction cup to contact and grab the substrate plate 20, and then the substrate plate 20 is lifted up to allow the cleaning liquid sprayed from below to clean the bottom of the substrate plate 20 more effectively. The outer edge of the support plate 24 is provided with a groove to reduce the leakage of the cleaning liquid from the outside of the support plate 24. After cleaning, the substrate plate 20 is put down and the suspender 28 returns to its position.

[0061] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A photovoltaic cell coating device, characterized in that: It comprises a protection box (1), the outer side of the protection box (1) is fixedly connected with a transmission tube (5), the transmission tube (5) is connected with the inside of the protection box (1), the top of the transmission tube (5) is equipped with a vacuum pump (4) connected with the inside of the transmission tube (5), the transmission tube (5) is provided with a tray (23) for transporting a substrate plate (20), the outer side of the protection box (1) is equipped with an electron beam generator (3), the output end of the electron beam generator (3) passes through the inner side of the protection box (1), the inner top of the protection box (1) is equipped with a grabbing assembly, the grabbing assembly is used to grab the substrate plate (20) transported from the transmission tube (5), and the protection box (1) is provided with a plurality of crucibles (15); The top of the protective box (1) is fixedly connected to a separation frame (8), the grabbing assembly includes a plurality of vertically arranged suction cups (27), a negative pressure pump (18) is fixedly connected between the tops of the plurality of suction cups (27), a servo motor (18) for driving the negative pressure pump (18) to rotate is fixedly connected to the outer side of the negative pressure pump (18), an electric telescopic rod (10) for driving the servo motor to rise and fall is fixedly connected to the inner wall of the separation frame (8), and a separation assembly is arranged at the bottom of the separation frame (8), the separation assembly is used to separate and independently separate the space between the frame (8) and the protective box (1); A support platform (10) is arranged on the inner side of the protection box (1), a switching disk (14) is rotatably connected to the top of the support platform (10), the switching disk (14) is arranged in an inclined manner, a plurality of grooves are arranged on the top surface of the switching disk (14), the plurality of grooves are arranged in an annular manner and are equidistant, a plurality of crucibles (15) are located in the grooves, and a driving motor for driving the switching disk (14) to rotate is installed at the bottom of the switching disk (14); A sealing platform (13) is fixedly connected above the support platform (10), and notches are provided at the front and rear ends of the sealing platform (13). A connecting platform (11) is fixedly connected below the support platform (10), and a bending plate (9) is fixedly connected above the sealing platform (13). A supply pump (12) is fixedly connected to the outside of the protection box (1), and the output end of the supply pump (12) is vertically oriented toward the switching disk (14); The bottom edge of the separation frame (8) is fixedly connected to two symmetrically arranged bottom plates (16); the separation assembly comprises two movable plates (19); the movable plates (19) are slidably connected to the top surface of the bottom plate (16); the ends of the movable plates (19) are provided with notches adapted to the outer shape of a suction cup (27); a screw nut mechanism (17) is installed on the top of the movable plate (19); the driving end of the screw nut mechanism (17) is fixedly connected to the separation frame (8); the moving end of the screw nut mechanism (17) is fixedly connected to the moving plate (19); and two upper covers (2) are rotatably connected to the top of the separation frame (8).

2. A photovoltaic cell coating device according to claim 1, characterized in that: The vertical cross-section of the transmission pipe (5) is elliptical in shape. A sealing valve is installed at one end of the transmission pipe (5) close to the protection box (1). The other end of the transmission pipe (5) is rotatably connected to a sealing cover (6). A slot (22) is provided on the inner surface of the transmission pipe (5). The bottom of the tray (23) is slidably engaged with the slot (22). A screw nut mechanism 2 is provided in the slot (22). The movable end of the screw nut mechanism 2 is fixedly connected to the tray (23).

3. A photovoltaic cell coating device according to claim 2, characterized in that: The tray device (23) comprises a rotating disk 2 (25) and a rotating disk 1 (26), wherein the rotating disk 2 (25) is located below the rotating disk 1 (26), and both ends of the rotating disk 2 (25) are fixedly connected to servo motors 2, wherein the output end of one servo motor 2 is fixedly connected to the moving end of the screw nut mechanism 2, and the output end of the other servo motor 2 is fixedly connected to the rotating disk 1 (26).

4. A photovoltaic cell coating device according to claim 3, characterized in that: The end of the rotating disk 1 (26) is fixedly connected to a support plate (24), and a cleaning component is arranged on the top surface of the support plate (24), and the cleaning component is used to clean the substrate plate (20).

5. A photovoltaic cell coating device according to claim 4, characterized in that: An exchange box (7) is fixedly connected to the outside of the transmission tube (5), a telescopic tube (21) is fixedly connected to the top of the transmission tube (5), the telescopic tube (21) is located inside the transmission tube (5) and is connected to an electric telescopic rod 2 on the outside, the exchange box (7) and the telescopic tube (21) are in communication, a docking hole adapted to the telescopic tube (21) is provided on the top surface of the rotating disk 1 (26), and a plurality of recovery holes (29) and a plurality of spray holes (30) are provided on the top surface of the support plate (24), the plurality of spray holes (30) are arranged in a ring shape, and the plurality of recovery holes (29) are located in a ring area surrounded by the plurality of spray holes (30).

6. A photovoltaic cell coating device according to claim 5, characterized in that: Three suspenders (28) are installed on the top surface of the support plate (24) near the edge. The suspenders (28) are composed of three electric telescopic rods, a stepping motor, a bracket and two suction cups. The three electric telescopic rods are fixedly connected to the support plate (24). The top of the three electric telescopic rods is fixedly connected to the stepping motor. The output end of the stepping motor is fixedly connected to the bracket. The end of the bracket is fixedly connected to the two suction cups. The two suction cups face vertically downward.

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