A continuous on-line enrichment analysis device for ODS and fluorinated greenhouse gases

Abstract

The present invention provides a continuous on-line enrichment analysis device for ODS and fluorinated greenhouse gases, which includes a six-way valve 1 and a six-way valve 2, an enrichment trap T1 connected to the six-way valve 1 and an enrichment trap T2 connected to the six-way valve 2. The six-way valve 1 is connected to a NAFION tube through the NAFION tube outlet (1a), and the NAFION tube inlet is the sample gas inlet. The carrier gas inlet (1e) on the six-way valve is connected to the carrier gas. The six-way valve 1 is connected to an MFC through the MFC inlet (2b), and the outlet of the MFC is connected to a sampling pump. The six-way valve 2 is connected to a GCMS through the carrier gas outlet (2d). An anti-CO2 tube and a damping column are connected between the six-way valve 1 and the six-way valve 2. The device of the present invention adopts a two-stage cold trap enrichment method, with high enrichment efficiency. The two enrichment traps are respectively controlled by different refrigerators without interference with each other, ensuring the stability of the analysis process and enabling accurate measurement of ODS and fluorinated greenhouse gases.

Description

Technical Field

[0001] The present invention belongs to the field of environmental monitoring, and particularly relates to a continuous on-line enrichment analysis device for ODS and fluorinated greenhouse gases. Background Art

[0002] Ozone-Depleting Substances (ODS) include six categories of halogenated hydrocarbons: chlorofluorocarbons (CFCs), hydrochlorofluorocarbons (HCFCs), halons, carbon tetrachloride (CCl4), methyl chloroform (CH3CCl3), and methyl bromide (CH3Br), etc. These compounds are mainly produced industrially and are used in fields such as refrigeration, cleaning, and foaming. They can release halogen atoms in the stratosphere, catalyze the photolysis reaction of ozone, reduce the amount of stratospheric ozone, form the Antarctic ozone hole, and cause excessive ultraviolet radiation to reach the Earth's surface, endangering the safety of humans and the Earth's biosphere. In order to protect the human living environment, in 1987, countries around the world jointly signed the Montreal Protocol to restrict the use and emission of ODS globally.

[0003] Fluorinated greenhouse gases, referred to as F-gas, include four of the seven greenhouse gases controlled by the Kyoto Protocol of the United Nations Framework Convention on Climate Change (UNFCCC), namely hydrofluorocarbons (HFCs), perfluorocarbons (PFCs), sulfur hexafluoride (SF6), and nitrogen trifluoride (NF3). Fluorinated greenhouse gases have an extremely high global warming potential (GWP). For example, the GWP100 of NF3 is as high as 15,750, and the GWP100 of SF6 is as high as 23,500. Therefore, although the concentration of fluorinated greenhouse gases in the atmosphere is extremely low, fluorinated greenhouse gases and ODS account for 11% of the radiative forcing of long-lived greenhouse gases and play an important role in global warming.

[0004] Atmospheric concentration monitoring is an important means for evaluating the implementation effectiveness of global environmental conventions such as the Montreal Protocol and the United Nations Framework Convention on Climate Change, as well as for evaluating China's carbon neutrality and greenhouse gas emission reduction effects. The Ecological Environment Monitoring Plan Outline (2020 - 2035) has clearly incorporated the monitoring of fluorinated greenhouse gases such as NF3, SF6, and HCFCs into the overall design of the conventional monitoring system. However, since the content of ODS and fluorinated greenhouse gases in ambient air is at the ppt (one trillionth) level and the atmospheric concentration change range is small, the requirements for the detection limit and accuracy of the analysis and monitoring system are extremely high. Conventional VOC monitoring instruments and methods cannot be used for the analysis of ODS and F-gas. Currently, there is no commercial dedicated on-line monitoring equipment for ODS substances in the atmosphere in the prior art. Summary of the Invention

[0005] In view of the problems existing in the prior art, the technical solutions adopted by the present invention to solve the problems in the prior art are as follows:

[0006] A continuous on-line enrichment analysis device for ODS and fluorinated greenhouse gases, comprising two six-way valves, namely six-way valve 1 and six-way valve 2, an enrichment trap T1 connected to six-way valve 1, and an enrichment trap T2 connected to six-way valve 2. The six-way valve 1 includes six interfaces, namely: NAFION tube outlet 1a, enrichment trap T1 inlet 1f, enrichment trap T1 outlet 1c, CO2 removal tube inlet 1b, damping column inlet 1d, carrier gas inlet 1e; the six-way valve 2 includes six interfaces, namely: CO2 removal tube outlet 2a, enrichment trap T2 inlet 2f, enrichment trap T2 outlet 2c, MFC inlet 2b, carrier gas outlet 2d, damping column outlet 2e; the six-way valve 1 is connected to the NAFION tube through the NAFION tube outlet 1a, the NAFION tube inlet is the sample gas inlet, the carrier gas inlet 1e is connected to the carrier gas, the six-way valve 1 is connected to the MFC (mass flow controller) through the MFC inlet 2b, the outlet of the MFC is connected to the sampling pump, the six-way valve 2 is connected to the GCMS through the carrier gas outlet 2d, and a CO2 removal tube and a damping column are connected between the six-way valve 1 and the six-way valve 2.

[0007] The MFC is a CS200 series thermal mass flowmeter produced by Beijing Sevenstar Huachuang Flowmeter Co., Ltd.; the GCMS is an Agilent 8860-5977 gas chromatography-mass spectrometry instrument; the CO2 removal tube is a glass tube filled with alkali asbestos, and its principle of removing carbon dioxide is that CO2 can quickly react with alkali asbestos to achieve the effect of removing CO2; the damping column is a 0.5-meter-long glass empty column with an inner diameter of 0.32 mm, and its function is to reduce the fluctuation of the gas flow rate in the pipeline caused by the switching of the six-way valve; the sampling pump is a sampling pump of model N86 produced by German company KNF.

[0008] The six-way valve 1 is a two-position six-way valve, that is, it has two connected working states, namely position A and position B. When the six-way valve 1 is in position A: the NAFION tube outlet 1a is communicated with the enrichment trap T1 inlet 1f, the carrier gas inlet 1e is communicated with the damping column inlet 1d, and the enrichment trap T1 outlet 1c is communicated with the CO2 removal tube inlet 1b. When the six-way valve 1 is in position B: the NAFION tube outlet 1a is communicated with the CO2 removal tube inlet 1b, the enrichment trap T1 outlet 1c is communicated with the damping column inlet 1d, and the carrier gas inlet 1e is communicated with the enrichment trap T1 inlet 1f;

[0009] The six-way valve 2 is a two-position six-way valve, that is, it has two connected working states, namely the A position and the B position. When the six-way valve 2 is in the A position: except that the CO2 pipe outlet 2a is connected to the enrichment trap T2 inlet 2f, the damping column outlet 2e is connected to the carrier gas outlet 2d, and the enrichment trap T2 outlet 2c is connected to the MFC inlet 2b. When the six-way valve 2 is in the B position: except that the CO2 pipe outlet 2a is connected to the MFC inlet 2b, the enrichment trap T2 outlet 2c is connected to the carrier gas outlet 2d, and the damping column outlet 2e is connected to the enrichment trap T2 inlet 2f.

[0010] The internal structures of the enrichment trap T1 and the enrichment trap T2 are the same, and both include a refrigeration device, a cold trap cavity, an enrichment tube, a heating device and a thermocouple; the refrigeration device is connected to the cold trap cavity to provide a low-temperature environment for the cold trap cavity. The enrichment tube is placed in the cold trap cavity. The heating device is directly connected to the enrichment tube for quickly heating the enrichment tube. The thermocouple is placed at the connection between the cold trap cavity and the refrigeration device for measuring the temperature inside the cold trap cavity.

[0011] The refrigeration device is a Stirling refrigerator, and the lowest refrigeration temperature can reach -210°C. The heating device is a low-voltage high-current transformer, and the maximum heating power can reach 300w. The thermocouple is a K-type thermocouple, and the temperature measurement range is -300°C to 1000°C; between the refrigeration device and the cold trap cavity, and between the cold trap cavity and the enrichment tube, it is treated with a thermally conductive insulating coating.

[0012] The preset enrichment temperature range of the enrichment trap T2 is -160°C to -190°C, which is used for the capture, focusing and separation of NF3 and CF4. The preset enrichment temperature range of the enrichment trap T1 is -120°C to -150°C, which is used for the capture and focusing of other ODSs and fluorinated greenhouse gases. The temperature setting values of the two enrichment traps are the measured values of the corresponding thermocouples.

[0013] Based on the foregoing analysis method of a continuous on-line enrichment analysis device for ODSs and fluorinated greenhouse gases, it includes the following steps:

[0014] Step 1: Switch the six-way valve 1 to the A position, switch the six-way valve 2 to the A position, preset the enrichment temperature of the enrichment trap T1 to -120°C to -150°C, and preset the enrichment temperature of the enrichment trap T2 to -160°C to -190°C. After the sample gas is dehydrated by the NAFION tube, it is pumped by the sampling pump, and among them, NF3 and CF4 are captured and focused in the enrichment trap T2, and other ODSs and fluorinated greenhouse gases are captured and focused in the enrichment trap T1.

[0015] Specifically, the sample gas sequentially passes through a NAFION tube, the NAFION tube outlet 1a, the enrichment trap T1 inlet 1f, the enrichment trap T1, the enrichment trap T1 outlet 1c, the CO2 removal tube inlet 1b, the CO2 removal tube, the CO2 removal tube outlet 2a, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the MFC inlet 2b, the MFC, and the sampling pump.

[0016] Step 2: Switch the six-way valve 1 to position A and the six-way valve 2 to position B. Heat the enrichment trap T2 to -140 °C. NF3 and CF4 are desorbed and carried by the carrier gas into the GCMS for analysis.

[0017] Specifically, the carrier gas sequentially passes through the carrier gas inlet 1e, the damping column inlet 1d, the damping column, the damping column outlet 2e, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the carrier gas outlet 2d, and the GCMS.

[0018] Step 3: Switch the six-way valve 1 to position B and the six-way valve 2 to position B. Cool the enrichment trap T2 to -160 °C to -190 °C and heat the enrichment trap T1 to 120 °C. Other ODSs and fluorinated greenhouse gases desorbed by heating are carried by the carrier gas into the enrichment trap T2 for focusing.

[0019] Specifically, the carrier gas sequentially passes through the carrier gas inlet 1e, the enrichment trap T1 inlet 1f, the enrichment trap T1, the enrichment trap T1 outlet 1c, the damping column inlet 1d, the damping column, the damping column outlet 2e, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the carrier gas outlet 2d, and the GCMS.

[0020] Step 4: Switch the six-way valve 1 to position A and the six-way valve 2 to position B. Heat the enrichment trap T2 to 120 °C. Other ODSs and fluorinated greenhouse gases are desorbed and carried by the carrier gas into the GCMS for analysis.

[0021] Specifically, the carrier gas sequentially passes through the carrier gas inlet 1e, the damping column inlet 1d, the damping column, the damping column outlet 2e, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the carrier gas outlet 2d, and the GCMS.

[0022] The carrier gas is high-purity helium with a purity of 99.999%, and the sample gas is ambient air.

[0023] The present invention has the following advantages:

[0024] 1. The device of the present invention adopts a two-stage cold trap enrichment method with high enrichment efficiency. Only by sampling 600 ml, accurate and repeated measurement of trace ODSs and fluorinated greenhouse gases in background air can be achieved.

[0025] 2. The enrichment traps T1 and T2 of the device of the present invention are respectively controlled by different refrigerators, and their respective heating and desorption and refrigeration and enrichment processes are not interfered with each other, thus ensuring the stability of the analysis process.

[0026] 3. When sampling with the device of the present invention, when the temperature of the enrichment trap T1 is -120°C to -150°C and the temperature of the enrichment trap T2 is -160°C to -190°C, NF3 and CF4 penetrate through the enrichment trap T1 and are trapped and focused in the enrichment trap T2, and other ODSs and fluorinated greenhouse gases are trapped and focused in the enrichment trap T1. This not only realizes the enrichment and focusing of NF3 and CF4, but also realizes the separation of NF3 and CF4 from complex components, ensuring the sensitivity of the detection of NF3 and CF4 and shortening the peak broadening. Description of the Drawings

[0027] Figure 1 is the structural schematic diagram of the device of the present invention;

[0028] Figure 2 is the gas flow chart A when the device of the present invention is operating;

[0029] Figure 3 is the gas flow chart B when the device of the present invention is operating;

[0030] Figure 4 is the gas flow chart C when the device of the present invention is operating;

[0031] Figure 5 is the gas flow chart D when the device of the present invention is operating. Detailed Embodiments

[0032] The technical solution of the present invention will be further specifically described below through embodiments and in conjunction with the drawings.

[0033] Such as Figure 1As shown in the figure, a continuous on-line enrichment analysis device for ODS and fluorinated greenhouse gases includes two six-way valves, namely six-way valve 1 and six-way valve 2, an enrichment trap T1 connected to six-way valve 1, and an enrichment trap T2 connected to six-way valve 2. Six-way valve 1 includes six interfaces, namely: NAFION tube outlet 1a, enrichment trap T1 inlet 1f, enrichment trap T1 outlet 1c, CO2 removal tube inlet 1b, damping column inlet 1d, carrier gas inlet 1e; Six-way valve 2 includes six interfaces, namely: CO2 removal tube outlet 2a, enrichment trap T2 inlet 2f, enrichment trap T2 outlet 2c, MFC inlet 2b, carrier gas outlet 2d, damping column outlet 2e; Six-way valve 1 is connected to the NAFION tube through the NAFION tube outlet 1a, the NAFION tube inlet is connected to the sample gas, the carrier gas inlet 1e is connected to the carrier gas, the carrier gas outlet 2d is connected to the GCMS, six-way valve 1 is connected to the MFC (mass flow controller) through the MFC inlet 2b, the outlet of the MFC is connected to the sampling pump, six-way valve 2 is connected to the gas chromatography-mass spectrometry (GCMS) through the carrier gas outlet 2d, and a CO2 removal tube and a damping column are connected between six-way valve 1 and six-way valve 2.

[0034] Six-way valve 1 is a two-position six-way valve, that is, it has two connection working states, namely position A and position B. When six-way valve 1 is in position A: the NAFION tube outlet 1a communicates with the enrichment trap T1 inlet 1f, the carrier gas inlet 1e communicates with the damping column inlet 1d, and the enrichment trap T1 outlet 1c communicates with the CO2 removal tube inlet 1b. When six-way valve 1 is in position B: the NAFION tube outlet 1a communicates with the CO2 removal tube inlet 1b, the enrichment trap T1 outlet 1c communicates with the damping column inlet 1d, and the carrier gas inlet 1e communicates with the enrichment trap T1 inlet 1f;

[0035] Six-way valve 2 is a two-position six-way valve, that is, it has two connection working states, namely position A and position B. When six-way valve 2 is in position A: the CO2 removal tube outlet 2a communicates with the enrichment trap T2 inlet 2f, the damping column outlet 2e communicates with the carrier gas outlet 2d, and the enrichment trap T2 outlet 2c communicates with the MFC inlet 2b. When six-way valve 2 is in position B: the CO2 removal tube outlet 2a communicates with the MFC inlet 2b, the enrichment trap T2 outlet 2c communicates with the carrier gas outlet 2d, and the damping column outlet 2e communicates with the enrichment trap T2 inlet 2f.

[0036] The internal structures of enrichment trap T1 and the enrichment trap T2 are the same, and both include a refrigeration device, a cold trap cavity, an enrichment tube, a heating device, and a thermocouple; the refrigeration device is connected to the cold trap cavity to provide a low-temperature environment for the cold trap cavity. The enrichment tube is placed in the cold trap cavity. The heating device is directly connected to the enrichment tube to quickly heat the enrichment tube. The thermocouple is placed at the connection between the cold trap cavity and the refrigeration device to measure the temperature inside the cold trap cavity.

[0037] The refrigeration device is a Stirling refrigerator, and the lowest refrigeration temperature can reach -210°C. The heating device is a low-voltage and high-current transformer, and the maximum heating power can reach 300 W. The thermocouple is a K-type thermocouple, and the temperature measurement range is -300°C to 1000°C; the space between the refrigeration device and the cold trap chamber, and the space between the cold trap chamber and the enrichment tube are treated with a thermally conductive insulating coating.

[0038] The preset enrichment temperature range of the enrichment trap T2 is -160°C to -190°C, which is used for the capture, focusing and separation of NF3 and CF4. The preset enrichment temperature range of the enrichment trap T1 is -120°C to -150°C, which is used for the capture and focusing of other ODSs and fluorinated greenhouse gases.

[0039] Based on the analysis method of the foregoing continuous on-line enrichment analysis device for ODSs and fluorinated greenhouse gases, it specifically includes the following steps:

[0040] Step 1: Switch the six-way valve 1 to position A, switch the six-way valve 2 to position A, the temperature of the enrichment trap T1 is -140°C, and the temperature of the enrichment trap T2 is -180°C. After the sample gas is dehydrated by the NAFION tube, it is extracted by the sampling pump. Among them, NF3 and CF4 are captured and focused in the enrichment trap T2, and other ODSs and fluorinated greenhouse gases are captured and focused in the enrichment trap T1.

[0041] Specifically, as Figure 2 shown: The sample gas sequentially passes through the NAFION tube, the NAFION tube outlet 1a, the enrichment trap T1 inlet 1f, the enrichment trap T1, the enrichment trap T1 outlet 1c, the CO2 removal tube inlet 1b, the CO2 removal tube, the CO2 removal tube outlet 2a, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the MFC inlet 2b, the MFC and the sampling pump.

[0042] Step 2: Switch the six-way valve 1 to position A, switch the six-way valve 2 to position B, heat the enrichment trap T2 to -140°C, NF3 and CF4 are desorbed and carried into the GCMS for analysis by the carrier gas;

[0043] Specifically, as Figure 3 shown: The carrier gas sequentially passes through the carrier gas inlet 1e, the damper column inlet 1d, the damper column, the damper column outlet 2e, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the carrier gas outlet 2d and the GCMS.

[0044] Step 3: Switch the six-way valve 1 to position B, switch the six-way valve 2 to position B, cool the enrichment trap T2 to -180°C, heat the enrichment trap T1 to 120°C, and the other ODSs and fluorinated greenhouse gases desorbed by heating are carried into the enrichment trap T2 by the carrier gas for focusing;

[0045] Specifically, as Figure 4As shown: The carrier gas sequentially passes through the carrier gas inlet 1e, the enrichment trap T1 inlet 1f, the enrichment trap T1, the enrichment trap T1 outlet 1c, the damping column inlet 1d, the damping column, the damping column outlet 2e, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the carrier gas outlet 2d, and the GCMS.

[0046] Step 4: Switch the six-way valve 1 to position A, switch the six-way valve 2 to position B, heat the enrichment trap T2 to 120 °C, and other ODSs and fluorinated greenhouse gases are desorbed and carried into the GCMS for analysis by the carrier gas.

[0047] Specifically, as Figure 5 shown: The carrier gas sequentially passes through the carrier gas inlet 1e, the damping column inlet 1d, the damping column, the damping column outlet 2e, the enrichment trap T2 inlet 2f, the enrichment trap T2, the enrichment trap T2 outlet 2c, the carrier gas outlet 2d, and the GCMS.

[0048] The protection scope of the present invention is not limited to the above embodiments. Obviously, those skilled in the art can make various modifications and deformations to the present invention without departing from the scope and spirit of the present invention. If these modifications and deformations fall within the scope of the claims of the present invention and their equivalent technologies, the intention of the present invention also includes these modifications and deformations.

Claims

1. A continuous online enrichment and analysis device for ODS and fluorinated greenhouse gases, characterized in that: The invention comprises two six-way valves, namely a six-way valve 1 and a six-way valve 2, and an enrichment trap T1 connected to the six-way valve 1 and an enrichment trap T2 connected to the six-way valve 2. The six-way valve 1 comprises six interfaces, namely: a NAFION tube outlet (1a), an enrichment trap T1 inlet (1f), an enrichment trap T1 outlet (1c), a CO2 removal tube inlet (1b), a damping column inlet (1d), and a carrier gas inlet (1e); the six-way valve 2 comprises six interfaces, namely: a CO2 removal tube outlet (2a), an enrichment trap T2 inlet (2f), an enrichment trap T2 outlet (2c), an MFC inlet (2e) b), a carrier gas outlet (2d), and a damping column outlet (2e); the six-way valve 1 is connected to the NAFION tube via the NAFION tube outlet (1a), the NAFION tube inlet is the sample gas inlet, the carrier gas inlet (1e) is connected to the carrier gas, the carrier gas outlet (2d) is connected to the GCMS, the six-way valve 2 is connected to the MFC via the MFC inlet (2b), the MFC outlet is connected to the sampling pump, the six-way valve 2 is connected to the GCMS via the carrier gas outlet (2d), and a CO2 removal tube and a damping column are connected between the six-way valve 1 and the six-way valve 2; The six-way valve 1 is a two-position six-way valve, i.e., it has two connected working states, namely, position A and position B. When the six-way valve 1 is in position A, the NAFION tube outlet (1a) is connected to the enrichment trap T1 inlet (1f), the carrier gas inlet (1e) is connected to the damping column inlet (1d), and the enrichment trap T1 outlet (1c) is connected to the CO2 removal tube inlet (1b). When the six-way valve 1 is in position B, the NAFION tube outlet (1a) is connected to the CO2 removal tube inlet (1b), the enrichment trap T1 outlet (1c) is connected to the damping column inlet (1d), and the carrier gas inlet (1e) is connected to the enrichment trap T1 inlet (1f). The six-way valve 2 is a two-position six-way valve, that is, it has two connected working states, namely position A and position B. When the six-way valve 2 is in position A, the CO2 pipe outlet (2a) is connected to the enrichment trap T2 inlet (2f), the damping column outlet (2e) is connected to the carrier gas outlet (2d), and the enrichment trap T2 outlet (2c) is connected to the MFC inlet (2b). When the six-way valve 2 is in position B, the CO2 pipe outlet (2a) is connected to the MFC inlet (2b), the enrichment trap T2 outlet (2c) is connected to the carrier gas outlet (2d), and the damping column outlet (2e) is connected to the enrichment trap T2 inlet (2f). The enrichment trap T1 and the enrichment trap T2 have the same internal structure, both of which include a refrigeration device, a cold trap cavity, an enrichment tube, a heating device and a thermocouple; the refrigeration device is connected to the cold trap cavity to provide a low-temperature environment for the cold trap cavity, the enrichment tube is placed in the cold trap cavity, the heating device is directly connected to the enrichment tube to quickly heat the enrichment tube, and the thermocouple is placed at the connection between the cold trap cavity and the refrigeration device to measure the temperature inside the cold trap cavity; The enrichment temperature preset range of the enrichment trap T2 is -160°C to -190°C, which is used for the capture, focusing and separation of NF3 and CF4. The enrichment temperature preset range of the enrichment trap T1 is -120°C to -150°C, which is used for the capture and focusing of other ODS and fluorine-containing greenhouse gases.

2. A continuous online enrichment and analysis device for ODS and fluorine-containing greenhouse gases according to claim 1, characterized in that: The refrigeration equipment is a Stirling refrigerator, the heating equipment is a low-voltage high-current transformer, the thermocouple is a K-type thermocouple, and the temperature measurement range is -300°C to 1000°C; a thermal conductive insulating coating is used between the refrigeration equipment and the cold trap cavity, and between the cold trap cavity and the enrichment tube.

3. The continuous online enrichment and analysis device for ODS and fluorine-containing greenhouse gases according to claim 1, characterized in that: The MFC is a CS200 series thermal mass flowmeter produced by Beijing Qixing Huachuang Flowmeter Co., Ltd.; the GCMS is a 8860-5977 gas chromatograph-mass spectrometer produced by Agilent; the CO2 removal tube is a glass tube filled with alkali asbestos; the damping column is a glass empty column with a length of 0.5 meters and an inner diameter of 0.32 mm; the sampling pump is a sampling pump model N86 produced by KNF of Germany.

4. An analysis method using a continuous online enrichment and analysis device for ODS and fluorine-containing greenhouse gases according to any one of claims 1 to 3, characterized in that: The following steps are involved: Step 1. Switch the six-way valve 1 to position A, switch the six-way valve 2 to position A, preset the temperature of the enrichment trap T1 to -120℃~-150℃, and the temperature of the enrichment trap T2 to -160℃~-190℃. After the sample gas is dehydrated by the NAFION tube, it is extracted by the sampling pump, and NF3 and CF4 are captured and focused in the enrichment trap T2, and other ODS and fluorine-containing greenhouse gases are captured and focused in the enrichment trap T1. Step 2: Switch the six-way valve 1 to position A, switch the six-way valve 2 to position B, heat the enrichment trap T2 to -140°C, and NF3 and CF4 are analyzed and carried into GCMS by the carrier gas for analysis; Step 3, the six-way valve 1 is switched to position B, the six-way valve 2 is switched to position B, the enrichment trap T2 is cooled to -160°C to -190°C, the enrichment trap T1 is heated to 120°C, and other ODS and fluorine-containing greenhouse gases analyzed by heating are brought into the enrichment trap T2 by the carrier gas and focused; Step 4: Six-way valve 1 is switched to position A, six-way valve 2 is switched to position B, enrichment trap T2 is heated to 120°C, other ODS and fluorine-containing greenhouse gases are analyzed and carried into GCMS by carrier gas for analysis.

5. The analysis method according to claim 4, characterized in that: The specific flow paths of sample gas and carrier gas in the device are: In step 1, the sample gas passes through the NAFION tube, the NAFION tube outlet (1a), the enrichment trap T1 inlet (1f), the enrichment trap T1, the enrichment trap T1 outlet (1c), the CO2 removal tube inlet (1b), the CO2 removal tube, the CO2 removal tube outlet (2a), the enrichment trap T2 inlet (2f), the enrichment trap T2, the enrichment trap T2 outlet (2c), the MFC inlet (2b), the MFC and the sampling pump in sequence; In step 2, the carrier gas passes through the carrier gas inlet (1e), the damping column inlet (1d), the damping column, the damping column outlet (2e), the enrichment trap T2 inlet (2f), the enrichment trap T2, the enrichment trap T2 outlet (2c), the carrier gas outlet (2d) and the GCMS in sequence; In step 3, the carrier gas passes through the carrier gas inlet (1e), the enrichment trap T1 inlet (1f), the enrichment trap T1, the enrichment trap T1 outlet (1c), the damping column inlet (1d), the damping column, the damping column outlet (2e), the enrichment trap T2 inlet (2f), the enrichment trap T2, the enrichment trap T2 outlet (2c), the carrier gas outlet (2d) and the GCMS in sequence; In step 4, the carrier gas passes through the carrier gas inlet (1e), the damping column inlet (1d), the damping column, the damping column outlet (2e), the enrichment trap T2 inlet (2f), the enrichment trap T2, the enrichment trap T2 outlet (2c), the carrier gas outlet (2d) and the GCMS in sequence.

6. The analysis method according to claim 4, characterized in that: The carrier gas is high-purity helium with a purity of 99.999%, and the sample gas is ambient air.

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