A microscope and Fourier transform infrared spectrometer integrated device

Abstract

The present invention relates to an integrated device of a microscope and a Fourier transform infrared spectrum, the device comprising an FTIR test instrument and a microscope, the FTIR test instrument being connected to the microscope, the microscope comprising a first adjustable aperture, a CCD camera, a lens, a beam splitter, a D-type silver mirror, a microscope body, a first off-axis profile mirror, a microscope objective, an XYZ three-axis electric stage, a second off-axis profile mirror and a second variable aperture; the device combines a high-resolution microscope and an FTIR test instrument, and adopts a shared sample platform and optical path design. This allows the user to easily switch between microscopic imaging and Fourier transform infrared spectrum FTIR analysis modes without moving the sample. The device cannot perform microscopic imaging and Fourier transform infrared spectrum FTIR analysis simultaneously.

Description

Technical Field

[0001] The invention relates to the technical field of combining Fourier transform infrared spectroscopy (FTIR) and microscope, and in particular to a device integrating Fourier transform infrared spectroscopy (FTIR) and microscope. Background Art

[0002] In recent years, although there have been some attempts to combine microscopes with other types of spectrometers, these solutions often have limitations, such as limited analytical capabilities, complex systems, and high costs. For example, some FTIR systems, whose infrared lasers can only detect sample parameters in a specific area and cannot move, are unable to detect samples with high precision. Therefore, the development of an integrated system that can provide both high-resolution microscopic imaging and detailed FTIR spectral analysis is an important development direction for scientific research and industry. Summary of the invention

[0003] In order to solve the above defects and shortcomings in the prior art, the present invention provides.

[0004] In order to solve the above technical problems, the present invention provides an integrated device of microscope and Fourier transform infrared spectrum, the device comprises an FTIR testing instrument and a microscope, the FTIR testing instrument is connected to the microscope, and is characterized in that: the microscope comprises a first adjustable diaphragm, a CCD camera, a lens, a beam splitter, a D-type silver mirror, a microscope body, a first off-axis profile mirror, a microscope objective, an XYZ three-axis electric stage, a second off-axis profile mirror and a second variable diaphragm; a D-type silver mirror is arranged on the upper side of the microscope body, a first variable diaphragm is arranged on the rear side of the D-type silver mirror, a beam splitter is arranged on the upper side of the D-type silver mirror, a lens is arranged on the upper end of the beam splitter, a CCD camera is arranged on the upper side of the lens, a first off-axis profile mirror and a microscope objective are arranged on the lower side of the microscope body, an XYZ three-axis electric stage is arranged below the microscope body, a second off-axis profile mirror is arranged on the lower side of the XYZ three-axis electric stage, and a second variable diaphragm is arranged on the rear side of the second off-axis profile mirror.

[0005] Furthermore, the FTIR testing instrument includes a rectangular shell and a visible light laser, an infrared laser light outlet, a reflector, a third off-axis profile mirror, a fourth off-axis profile mirror, a fifth off-axis profile mirror, a detector light inlet, a first reflector group, and a second reflector group, which are arranged inside the shell. The infrared laser light outlet is arranged on the front side of the visible light laser, the reflector is arranged on the right side of the visible light laser, the third off-axis profile mirror is arranged on the right side of the infrared laser light outlet, the fourth off-axis profile mirror is arranged on the right side of the third off-axis profile mirror, the fifth off-axis profile mirror is arranged on the right side of the fourth off-axis profile mirror, and the detector light inlet is arranged on the right side of the fifth off-axis profile mirror; the first reflector group and the second reflector group are arranged on the shell near the microscope.

[0006] Furthermore, the first reflector group includes a first reflector, a second reflector, and a fifth reflector, and the second reflector group includes a third reflector, a fourth reflector, and a sixth reflector; a fifth reflector is provided on the front side of the third off-axis profile mirror, a second reflector is provided above the fifth reflector, the first reflector and the second reflector are arranged side by side at the same height, a third reflector is provided below the first reflector, a fourth reflector is provided on one side of the third reflector, and a sixth reflector is provided below the fourth reflector.

[0007] Furthermore, the infrared laser emitted from the infrared laser light outlet is vertically reflected by the third off-axis profile mirror, and then sequentially reflected by the fifth reflector, the second reflector and the first reflector to the microscope. After entering the microscope, the infrared laser is vertically reflected by the beam splitter and then passes through the D-type silver mirror to the first off-axis profile mirror or the microscope objective lens to irradiate the sample. After irradiating the sample, the infrared laser is divided into a reflected light path and a transmitted light path.

[0008] Furthermore, the reflected light path is reflected by the sample into the first off-axis profile mirror or the microscope objective, then reflected by the D-type silver mirror to the first adjustable aperture, and then enters the shell through the first through hole on the shell, and then is reflected by the third reflector, the fourth reflector and the sixth reflector in sequence to the fifth off-axis profile mirror to focus into the detector light inlet to the detector to observe and analyze the infrared spectrum.

[0009] Furthermore, the transmitted light path is reflected by the second off-axis profile mirror to the second variable aperture, then enters the housing through the second through hole on the housing, and then is focused by the fourth off-axis profile mirror to enter the detector light entrance to the detector for observation and analysis.

[0010] Furthermore, the visible light laser emits a laser, which is reflected by the reflector, and then reflected by the fifth reflector, the second reflector and the first reflector in sequence to the microscope, and then vertically reflected by the beam splitter, and then passed through the D-type silver mirror to the first off-axis sectioning mirror, and irradiated onto the sample on the XYZ three-axis electric stage.

[0011] Furthermore, the D-shaped silver mirror 5 can be translated and form an angle of 45 degrees with the horizontal plane.

[0012] Furthermore, the beam splitter 4 forms an angle of 45 degrees with the horizontal plane.

[0013] Furthermore, the sample is placed on an XYZ three-axis electric stage, and the Z axis of the XYZ three-axis electric stage is moved to adjust the focal length. When the focal length is adjusted to the focus of the first off-axis profile mirror, the Z axis is fixed, and the X and Y axes are adjusted to observe the sample.

[0014] Beneficial technical effects achieved by the present invention: The present invention can achieve high-resolution microscopic imaging and detailed Fourier transform infrared spectroscopy FTIR analysis on a single platform through a unique optical path design and integrated system. This integrated method significantly improves the accuracy and efficiency of sample analysis and is particularly suitable for comprehensive physical and chemical property analysis of microscopic samples.

[0015] The device combines a high-resolution microscope and an FTIR test instrument, using a shared sample platform and optical path design. This allows the user to easily switch between microscopic imaging and Fourier transform infrared spectroscopy FTIR analysis mode without moving the sample. The device cannot work with microscopic imaging and Fourier transform infrared spectroscopy FTIR analysis at the same time.

[0016] The device uses an optimized optical path design that can effectively combine optical imaging of the microscope with infrared spectroscopy analysis of FTIR. This design uses special optical components and mirrors to ensure the optimization of the optical path in both analysis modes.

[0017] The spatial resolution in conventional FTIR systems is limited, but the present invention significantly improves the resolution of infrared spectroscopy analysis of tiny sample areas by integrating a microscope.

[0018] In traditional FTIR, repositioning the sample may lead to analysis errors. The present invention ensures perfect alignment between microscopic imaging and FTIR analysis by sharing the sample platform, avoiding positioning problems caused by sample movement.

[0019] Traditional FTIR usually requires specific sample preparation methods, while the integrated design of the present invention allows for more diverse sample processing methods, including direct analysis of liquid and solid samples.

[0020] Users can quickly switch between microscopy imaging and FTIR analysis, which improves experimental efficiency and reduces the risk of sample damage caused by operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional schematic diagram of the integrated device of microscope and Fourier transform infrared spectrometer of the present invention;

[0022] Figure 2 It is a front view of the integrated device of microscope and Fourier transform infrared spectrometer of the present invention;

[0023] Figure 3 yes Figure 2 AA profile diagram;

[0024] Figure 4 It is a side view of the integrated device of microscope and Fourier transform infrared spectrometer of the present invention;

[0025] Figure 5 It is a light path structure diagram of the microscope and Fourier transform infrared spectrometer integrated device of the present invention.

[0026] Figure 6 It is a light path diagram of the integrated device of microscope and Fourier transform infrared spectrum of the present invention; DETAILED DESCRIPTION

[0027] The present invention will be further described below in conjunction with specific examples. The following examples are only used to more clearly illustrate the technical solutions of the present invention, and are not intended to limit the scope of protection of the present invention.

[0028] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0029] like Figure 1-5 As shown, a microscope and Fourier transform infrared spectrometer integrated device, the device includes an FTIR testing instrument and a microscope, the FTIR testing instrument 12 is connected to the microscope, and the FTIR testing instrument 12 and the microscope can be detachably connected by bolts or screws.

[0030] The microscope comprises a first adjustable diaphragm 1, a CCD camera 2, a lens 3, a beam splitter 4, a D-type silver mirror 5, a microscope body 6, a first off-axis profile mirror 7, a microscope objective lens 8, an XYZ three-axis electric stage 9, a second off-axis profile mirror 10 and a second variable diaphragm 11; a D-type silver mirror 5 is provided at the upper end of the microscope body 6, a first variable diaphragm 1 is provided at the rear side of the D-type silver mirror 5, a beam splitter 4 is provided at the upper end of the D-type silver mirror 5, a lens 3 is provided at the upper side of the beam splitter 4, a CCD camera 2 is provided at the upper side of the lens 3, a first off-axis profile mirror 7 and a microscope objective lens 8 are provided at the lower side of the microscope body 6, an XYZ three-axis electric stage 9 is provided below the microscope body 6, a second off-axis profile mirror 10 is provided at the lower side of the XYZ three-axis electric stage 9, and a second variable diaphragm 11 is provided at the rear side of the second off-axis profile mirror 10. The first variable diaphragm 1 is vertically fixed to the microscope body through a screw hole, and the size of the reflected light spot can be adjusted. The CCD camera 2 is connected to the microscope through a thread. The lens 3 is fixed by a thread, and the parallel light is focused to the CCD camera 2 for observation. The D-type silver mirror 5 is fixed by a screw hole, a slide rail, etc., and can be translated left and right to form a 45-degree angle with the horizontal plane. The microscope objective lens 8 is threadedly connected to the microscope turntable. The second off-axis profile mirror 10 is fixed by a screw hole and is set at an angle of 45 degrees. The beam splitter 4 and the D-type silver mirror 5 are placed at a 45-degree angle with the horizontal plane, and the laser reaches the microscope body. The visible light laser 13 is located in the housing, and reaches the beam splitter 4 of the microscope through a through hole on a housing. The beam splitter 4 is at a 45-degree angle, and the laser light path is converted by 90 degrees through the beam splitter 4, and then focused on the sample on the XYZ three-axis electric stage 9 after the D-type glasses and the first off-axis profile mirror 7. The sample is placed on the XYZ three-axis electric stage 9, and the Z axis in the XYZ three-axis electric stage 9 moves to adjust the focal length. When the focal length is adjusted to the focus of the first off-axis profile mirror, the Z axis is fixed, and the X-axis and Y-axis are adjusted to observe the sample.

[0031] The FTIR testing instrument 12 includes a rectangular shell and a visible light laser 13, an infrared laser light outlet 14, a reflector 15, a third off-axis profile mirror 16, a fourth off-axis profile mirror 17, a fifth off-axis profile mirror 18, a detector light inlet 19, a first reflector group, and a second reflector group, which are arranged inside the shell. The infrared laser light outlet 14 is arranged on the front side of the visible light laser 13, the reflector 15 is arranged on the right side of the visible light laser 13, the third off-axis profile mirror 16 is arranged on the right side of the infrared laser light outlet 14, the fourth off-axis profile mirror 17 is arranged on the right side of the third off-axis profile mirror 16, the fifth off-axis profile mirror 18 is arranged on the right side of the fourth off-axis profile mirror 17, and the detector light inlet 19 is arranged on the right side of the fifth off-axis profile mirror 18; the first reflector group and the second reflector group are arranged on the shell near the microscope side. In the shell of the FTIR testing instrument 12, the infrared laser is reflected vertically by the third off-axis profile mirror 16 through the infrared laser light outlet 14 into the optical path to obtain parallel light, and the laser is magnified by a certain multiple, and the laser optical path is converted by the first reflector group and the third off-axis profile mirror 16 to guide the laser into the microscope.

[0032] The first reflector group includes a first reflector 20, a second reflector 21, and a fifth reflector 24, and the second reflector group includes a third reflector 22, a fourth reflector 23, and a sixth reflector 25; a fifth reflector 24 is provided on the front side of the third off-axis profile mirror 16, a second reflector 21 is provided above the fifth reflector 24, the first reflector 20 and the second reflector 21 are arranged side by side at the same height, a third reflector 22 is provided below the first reflector 20, a fourth reflector 23 is provided on one side of the third reflector 22, and a sixth reflector 25 is provided below the fourth reflector 23.

[0033] The infrared laser emitted from the infrared laser light outlet 14 is vertically reflected by the third off-axis profile mirror 16, and then sequentially reflected by the fifth reflector 24, the second reflector 21 and the first reflector 20 to the microscope. After entering the microscope, the infrared laser is vertically reflected by the beam splitter 4 and then passes through the D-type silver mirror 5 to the first off-axis profile mirror 7 or the microscope objective 8 to irradiate the sample. After irradiating the sample, the infrared laser is divided into a reflected light path and a transmitted light path.

[0034] The reflected light path is reflected by the sample into the first off-axis profile mirror 7 or the microscope objective lens 8, and then reflected by the D-type silver mirror 5 to the first adjustable aperture 1, and then enters the shell through the first through hole on the shell, and then is reflected by the third reflector 22, the fourth reflector 23 and the sixth reflector 25 in sequence to the fifth off-axis profile mirror 18 to be focused into the detector light inlet 19 to the detector to observe and analyze the infrared spectrum.

[0035] The transmitted light path is reflected by the second off-axis profile mirror 10 to the second variable aperture 11, then enters the housing through the second through hole on the housing, and then is focused by the fourth off-axis profile mirror 17 to enter the detector light inlet 19 to the detector for observation and analysis.

[0036] The visible light laser 13 emits a laser, which is reflected by the reflector 15, and then reflected to the microscope by the fifth reflector 24, the second reflector 21 and the first reflector 20 in sequence, and then vertically reflected by the beam splitter 4, passes through the D-type silver mirror 5 to the first off-axis sectioning mirror 7, and irradiates the sample on the XYZ three-axis electric stage 9.

[0037] The sample is placed on the XYZ three-axis electric stage 9, and the Z axis of the XYZ three-axis electric stage 9 moves to adjust the focal length. When the focal length is adjusted to the first off-axis profile mirror, the Z axis is fixed, and the X and Y axes are adjusted to observe the sample.

[0038] The present invention adopts an optimized optical path design, which can effectively combine the optical imaging of the microscope with the infrared spectrum analysis of FTIR. This design uses special optical elements and reflectors to ensure the optimization of the optical path in the two analysis modes.

[0039] The present invention significantly improves the resolution of infrared spectrum analysis of a tiny sample area by integrating a microscope.

[0040] The present invention ensures perfect alignment between microscopic imaging and FTIR analysis by sharing the sample platform, avoiding positioning problems caused by sample movement.

[0041] The integrated design of the present invention allows for a wider variety of sample processing methods, including direct analysis of liquid and solid samples.

[0042] Users can quickly switch between microscopy imaging and FTIR analysis, which improves experimental efficiency and reduces the risk of sample damage caused by operation.

[0043] The present invention has been disclosed above with preferred embodiments, but they are not intended to limit the present invention. Any technical solutions obtained by adopting equivalent replacement or equivalent transformation solutions fall within the protection scope of the present invention.

Claims

1. A microscope and Fourier transform infrared spectrometer integrated device, the device comprises an FTIR test instrument and a microscope, the FTIR test instrument is connected to the microscope, characterized in that: The microscope comprises a first adjustable diaphragm, a CCD camera, a lens, a beam splitter, a D-type silver mirror, a microscope body, a first off-axis profile mirror, a microscope objective, an XYZ three-axis electric stage, a second off-axis profile mirror and a second variable diaphragm; a D-type silver mirror is arranged on the upper side of the microscope body, a first variable diaphragm is arranged on the rear side of the D-type silver mirror, a beam splitter is arranged on the upper side of the D-type silver mirror, a lens is arranged on the upper end of the beam splitter, a CCD camera is arranged on the upper side of the lens, a first off-axis profile mirror and a microscope objective are arranged on the lower side of the microscope body, an XYZ three-axis electric stage is arranged below the microscope body, a second off-axis profile mirror is arranged on the lower side of the XYZ three-axis electric stage, and a second variable diaphragm is arranged on the rear side of the second off-axis profile mirror; The FTIR testing instrument comprises a rectangular shell and a visible light laser, an infrared laser light outlet, a reflector, a third off-axis profile mirror, a fourth off-axis profile mirror, a fifth off-axis profile mirror, a detector light inlet, a first reflector group, and a second reflector group arranged inside the shell. The infrared laser light outlet is arranged on the front side of the visible light laser, the reflector is arranged on the right side of the visible light laser, the third off-axis profile mirror is arranged on the right side of the infrared laser light outlet, the fourth off-axis profile mirror is arranged on the right side of the third off-axis profile mirror, the fifth off-axis profile mirror is arranged on the right side of the fourth off-axis profile mirror, and the detector light inlet is arranged on the right side of the fifth off-axis profile mirror; the first reflector group and the second reflector group are arranged on the shell near the microscope side; The first reflector group includes a first reflector, a second reflector, and a fifth reflector, and the second reflector group includes a third reflector, a fourth reflector, and a sixth reflector; the fifth reflector is provided on the front side of the third off-axis profile mirror, the second reflector is provided above the fifth reflector, the first reflector and the second reflector are arranged side by side at the same height, the third reflector is provided below the first reflector, the fourth reflector is provided on one side of the third reflector, and the sixth reflector is provided below the fourth reflector; The infrared laser emitted from the infrared laser light outlet is vertically reflected by the third off-axis profile mirror, and then sequentially reflected by the fifth reflector, the second reflector and the first reflector to the microscope. After entering the microscope, the infrared laser is vertically reflected by the beam splitter and then passes through the D-type silver mirror to the first off-axis profile mirror or the microscope objective lens to irradiate the sample. After irradiating the sample, the infrared laser is divided into a reflected light path and a transmitted light path.

2. The integrated device of microscope and Fourier transform infrared spectroscopy according to claim 1, characterized in that: The reflected light path is reflected by the sample into the first off-axis profile mirror or the microscope objective, then reflected by the D-type silver mirror to the first adjustable aperture, and then enters the shell through the first through hole on the shell, and then is reflected by the third reflector, the fourth reflector and the sixth reflector in sequence to the fifth off-axis profile mirror to focus into the detector light inlet to the detector to observe and analyze the infrared spectrum.

3. The integrated device of microscope and Fourier transform infrared spectroscopy according to claim 1, characterized in that: The transmitted light path is reflected by the second off-axis profile mirror to the second variable aperture, then enters the housing through the second through hole on the housing, and then is focused by the fourth off-axis profile mirror to enter the detector light entrance to the detector for observation and analysis.

4. The integrated device of microscope and Fourier transform infrared spectroscopy according to claim 1, characterized in that: The visible light laser emits a laser, which is reflected by the reflector, and then reflected to the microscope by the fifth reflector, the second reflector and the first reflector in sequence, and then vertically reflected by the beam splitter, and then passed through the D-type silver mirror to the first off-axis sectioning mirror, and irradiated onto the sample on the XYZ three-axis electric stage.

5. The integrated device of microscope and Fourier transform infrared spectroscopy according to claim 1, characterized in that: The D-shaped silver mirror can be translated and forms an angle of 45 degrees with the horizontal plane.

6. The microscope and Fourier transform infrared spectrometer integrated device according to claim 1, characterized in that: The beam splitter forms an angle of 45 degrees with the horizontal plane.

7. The integrated device of microscope and Fourier transform infrared spectroscopy according to claim 4, characterized in that: The sample is placed on the XYZ three-axis electric stage. The Z axis of the XYZ three-axis electric stage moves to adjust the focal length. When the focal length is adjusted to the focus of the first off-axis profile mirror, the Z axis is fixed, and the X and Y axes are adjusted to observe the sample.

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