Laser-based processing technology for special-shaped micro-hole spinneret

Abstract

The invention relates to the field of laser micromachining technology, and discloses a laser-based special-shaped micro-hole spinneret processing process, which includes the following steps: S1, preparing a workpiece and a nanostructure coating; S2, using a nanophotonic lens to control the wavefront of the laser beam; S3, using a tunable nano-laser source to adjust the laser wavelength according to material characteristics; S4, using an adaptive optical component to adjust the laser wavefront in real time; S5, controlling the arrangement of nanomaterials through an electric field; S6, real-time monitoring of key parameters in the micro-hole processing process. By applying nanophotonic lenses, adaptive optical components, tunable nano-laser sources, intelligent adaptive control systems and electric field-assisted technologies, the problems of inaccurate laser beam focusing, poor material adaptability, untimely parameter adjustment and insufficient nano-material arrangement accuracy existing in traditional laser micromachining technologies are solved, the processing accuracy and stability are significantly improved, and the application range of materials is expanded.

Description

Technical Field

[0001] The invention relates to the technical field of laser micro-machining, in particular to a laser-based processing technology for a special-shaped micro-hole spinneret. Background Art

[0002] Laser micromachining technology plays an important role in modern manufacturing and is widely used in high-tech fields such as microelectronics, medical devices, aerospace, and precision optics. Its core advantage is that it can process materials in a high-precision, non-contact manner, which is particularly critical in micro-nano manufacturing. The high precision of laser micromachining enables it to achieve precise processing of micropores, microgrooves, and microstructures on various materials, thereby meeting the growing demand of modern industry for tiny and complex structures.

[0003] However, the main problem of traditional laser micromachining technology is poor material adaptability. Different materials have significant differences in their absorption characteristics of lasers, and traditional lasers usually have fixed wavelengths, which limits their application in multi-material systems. Especially when processing metals, non-metals and composite materials, fixed-wavelength laser sources cannot adapt to the different absorption characteristics of these materials, resulting in low processing efficiency or even inability to achieve effective processing. This limitation greatly weakens the application potential of laser micromachining technology in composite materials and multilayer structures.

[0004] In order to solve the above-mentioned material adaptability problem and improve processing efficiency, the present invention proposes a laser-based special-shaped micro-hole spinneret processing technology. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a laser-based special-shaped micro-hole spinneret processing technology, which solves the problem of poor material adaptability in traditional laser micro-processing technology.

[0006] To achieve the above objectives, the present invention is implemented by the following technical scheme: A laser-based special-shaped micro-hole spinneret processing process comprises the following steps:

[0007] S1, preparation of workpiece and nanostructured coating;

[0008] S2, using nanophotonics lens to control the wavefront of laser beam;

[0009] S3, using a tunable nano-laser source to adjust the laser wavelength according to the material properties;

[0010] S4, using adaptive optical components to adjust the laser wavefront in real time;

[0011] S5. Control the arrangement of nanomaterials by electric field;

[0012] S6, real-time monitoring of key parameters in micro-hole processing;

[0013] S7, dynamically adjust laser parameters through intelligent adaptive control system;

[0014] S8. Perform post-processing and quality inspection.

[0015] Preferably, the specific implementation steps of the nanostructure coating in step S1 are: coating a nanopore or nanocolumn array structure on the surface of the workpiece by chemical vapor deposition or sol-gel method, and the coating thickness is controlled to be 20nm-200nm.

[0016] Preferably, the size of the nanopore is 10nm-100nm, and the height of the nanocolumn is 50nm-500nm.

[0017] Preferably, the nanophotonic lens in step S2 is selected from the group consisting of a nanograting, a surface plasmon resonance structure, a microlens array and a liquid crystal modulator.

[0018] Preferably, the specific implementation steps of the wavefront control in step S2 are:

[0019] Material optical property evaluation: Analyze the optical properties of the workpiece material, including absorption spectrum and reflection spectrum. Use a spectrometer to measure the light absorption and reflection properties of the material in the wavelength range of 200nm-2000nm, determine the absorption peak and absorption bandwidth of the material, and select the wavelength that can most effectively absorb laser energy.

[0020] Wavelength selection and adjustment: According to the optical absorption characteristics of the material, select a tunable laser source that can cover a wide wavelength range of 200nm-2000nm;

[0021] Use quantum dot lasers or fiber lasers to achieve wavelength tuning of laser sources;

[0022] Real-time wavelength adjustment: During the processing, the laser wavelength is dynamically adjusted according to the material surface status and processing progress through real-time monitoring and feedback system;

[0023] Quantum dot laser: The wavelength of quantum dot laser can be adjusted by controlling temperature, electric field or magnetic field;

[0024] Fiber laser: The wavelength of fiber laser can be tuned by stretching or compressing the fiber and adjusting the concentration of doping materials;

[0025] Laser power adjustment: according to the absorption characteristics of the material and processing requirements, set the initial laser power range between 0.1W-10W;

[0026] Dynamic power control: During the processing, the laser power is adjusted in real time using a high-frequency power modulator;

[0027] Pulse duration: The selected pulse duration range is 10fs-1ns;

[0028] Pulse frequency adjustment: Set the pulse frequency range to 10Hz-1MHz.

[0029] Preferably, the adaptive optical component in step S4 is a deformable mirror or a liquid crystal phase modulator.

[0030] Preferably, the real-time wavefront monitoring and control in step S4 specifically includes the following steps:

[0031] Installing an optical interferometer: installing an optical interferometer at an appropriate position in the laser light path, configured to monitor the wavefront change after passing through the adaptive optical component;

[0032] Wavefront data acquisition: The interferometer collects wavefront data, uses dedicated software to analyze the interference pattern, and generates wavefront distortion data in real time;

[0033] Data transmission and processing: The wavefront data collected by the interferometer is transmitted to the adaptive optical control system through a high-speed data interface, and the processing unit in the control system analyzes the wavefront data in real time;

[0034] Real-time adjustment of adaptive optical components: According to the analysis results of the processing unit, the shape of the reflective surface of the deformable mirror or the voltage distribution of the liquid crystal phase modulator is adjusted in real time;

[0035] For deformable mirrors, the actions of each actuator are precisely controlled to achieve fine-tuning of the mirror shape;

[0036] For liquid crystal phase modulators, the voltage of each pixel is precisely adjusted to change its optical phase;

[0037] Achieve closed-loop control: real-time adjustment—wavefront monitoring—data feedback—adjustment again.

[0038] Preferably, in step S5, the power plant controlling the arrangement of nanomaterials specifically comprises the following steps:

[0039] Arrangement observation and adjustment: Use an optical microscope or electron microscope to observe the orientation and arrangement density of nanomaterials under the action of an electric field in real time;

[0040] According to the observation results, the electric field strength and frequency are adjusted;

[0041] Fixation method: After the arrangement is completed, the arrangement of the nanomaterials is fixed by heat treatment, light curing or chemical cross-linking;

[0042] Electric field removal: After the fixation process is completed, gradually reduce the electric field strength to zero.

[0043] Preferably, the intelligent adaptive control system in step S7 includes:

[0044] Data acquisition and transmission module, which is used to collect processing parameter data in real time and transmit it quickly;

[0045] Data processing and analysis module, which is used to process and analyze the collected data and identify key parameter changes and anomalies;

[0046] Prediction and decision module, which is used to predict problems and formulate laser parameter adjustment plans based on analytical data;

[0047] A control interface module, which is used to convert the adjustment scheme into a control signal and transmit it to the laser device;

[0048] Feedback and closed-loop control module, which is used to monitor and automatically adjust laser parameters;

[0049] The user interface and monitoring module is used to provide a visual interface to display data and status and allow manual adjustment.

[0050] Preferably, the feedback and closed-loop control module includes:

[0051] A feedback signal processing unit, which is used to process feedback data and provide support for control decisions;

[0052] Real-time control algorithms that calculate and implement laser parameter adjustments to optimize processing in response to real-time changes.

[0053] The present invention provides a laser-based special-shaped micro-hole spinneret processing technology, which has the following beneficial effects:

[0054] 1. The present invention realizes precise wavefront control and real-time adjustment by applying nanophotonic lenses and adaptive optical components, effectively solving the problems of inaccurate laser beam focusing and wavefront distortion, significantly improving the focusing accuracy and stability of the laser beam, and being able to process microholes with smaller size and more complex shape.

[0055] 2. The present invention uses a tunable nano-laser source to adjust the laser wavelength according to the optical properties of different materials, so that the process can be adapted to various materials, including different metals, non-metals and composite materials, solving the problem of insufficient material adaptability and greatly expanding the application scope of the process.

[0056] 3. The present invention uses an intelligent adaptive control system to monitor and adjust laser processing parameters, such as power, pulse frequency, etc. in real time. In particular, the feedback and closed-loop control module can automatically optimize the processing parameters according to real-time feedback data to ensure the dynamic stability and accuracy of the processing process, thus solving the problem of untimely and inaccurate parameter adjustment during the processing process.

[0057] 4. The present invention solves the problems of nanomaterial arrangement accuracy and functionalized microstructure manufacturing by controlling the arrangement and orientation of nanomaterials through electric field-assisted technology, which is beneficial to the manufacture of microstructures with specific optical, electrical or mechanical properties and improves product performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 is a flow chart of the process of the present invention;

[0059] Figure 2 It is a framework diagram of the system of the present invention;

[0060] Figure 3 It is a framework diagram of the feedback and closed-loop control module of the present invention. DETAILED DESCRIPTION

[0061] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0062] Please see attached Figure 1 The embodiment of the present invention provides a laser-based special-shaped micro-hole spinneret processing process, comprising the following steps:

[0063] S1, preparation of workpiece and nanostructured coating;

[0064] S2, using nanophotonics lens to control the wavefront of laser beam;

[0065] S3, using a tunable nano-laser source to adjust the laser wavelength according to the material properties;

[0066] S4, using adaptive optical components to adjust the laser wavefront in real time;

[0067] S5. Control the arrangement of nanomaterials by electric field;

[0068] S6, real-time monitoring of key parameters in micro-hole processing;

[0069] S7, dynamically adjust laser parameters through intelligent adaptive control system;

[0070] S8. Perform post-processing and quality inspection.

[0071] The specific implementation steps of the nanostructure coating in step S1 are: coating a nanopore or nanocolumn array structure on the surface of the workpiece by chemical vapor deposition or sol-gel method, and the coating thickness is controlled to be 20nm-200nm.

[0072] The size of the nanopores is 10nm-100nm, and the height of the nanopillars is 50nm-500nm.

[0073] In step S2, the nanophotonic lens is selected from one of a nanograting, a surface plasmon resonance structure, a microlens array and a liquid crystal modulator.

[0074] The specific implementation steps of wavefront control in step S2 are:

[0075] Material optical property evaluation: Analyze the optical properties of the workpiece material, including absorption spectrum and reflection spectrum. Use a spectrometer to measure the light absorption and reflection properties of the material in the wavelength range of 200nm-2000nm, determine the absorption peak and absorption bandwidth of the material, and select the wavelength that can most effectively absorb laser energy.

[0076] Wavelength selection and adjustment: According to the optical absorption characteristics of the material, select a tunable laser source that can cover a wide wavelength range of 200nm-2000nm;

[0077] Use quantum dot lasers or fiber lasers to achieve wavelength tuning of laser sources;

[0078] Real-time wavelength adjustment: During the processing, the laser wavelength is dynamically adjusted according to the material surface status and processing progress through real-time monitoring and feedback system;

[0079] Quantum dot laser: The wavelength of quantum dot laser can be adjusted by controlling temperature, electric field or magnetic field;

[0080] Fiber laser: The wavelength of fiber laser can be tuned by stretching or compressing the fiber and adjusting the concentration of doping materials;

[0081] Laser power adjustment: according to the absorption characteristics of the material and processing requirements, set the initial laser power range between 0.1W-10W;

[0082] Dynamic power control: During the processing, the laser power is adjusted in real time using a high-frequency power modulator;

[0083] Pulse duration: The selected pulse duration range is 10fs-1ns;

[0084] Pulse frequency adjustment: Set the pulse frequency range to 10Hz-1 MHz.

[0085] In step S4, the adaptive optical component is a deformable mirror or a liquid crystal phase modulator.

[0086] The real-time wavefront monitoring and control in step S4 specifically includes the following steps:

[0087] Installing an optical interferometer: installing an optical interferometer at an appropriate position in the laser light path, configured to monitor the wavefront change after passing through the adaptive optical component;

[0088] Wavefront data acquisition: The interferometer collects wavefront data, uses dedicated software to analyze the interference pattern, and generates wavefront distortion data in real time;

[0089] Data transmission and processing: The wavefront data collected by the interferometer is transmitted to the adaptive optical control system through a high-speed data interface, and the processing unit in the control system analyzes the wavefront data in real time;

[0090] Real-time adjustment of adaptive optical components: According to the analysis results of the processing unit, the shape of the reflective surface of the deformable mirror or the voltage distribution of the liquid crystal phase modulator is adjusted in real time;

[0091] For deformable mirrors, the actions of each actuator are precisely controlled to achieve fine-tuning of the mirror shape;

[0092] For liquid crystal phase modulators, the voltage of each pixel is precisely adjusted to change its optical phase;

[0093] Achieve closed-loop control: real-time adjustment—wavefront monitoring—data feedback—adjustment again.

[0094] In step S5, the power plant controls the arrangement of nanomaterials, including the following steps:

[0095] Arrangement observation and adjustment: Use an optical microscope or electron microscope to observe the orientation and arrangement density of nanomaterials under the action of an electric field in real time;

[0096] According to the observation results, the electric field strength and frequency are adjusted;

[0097] Fixation method: After the arrangement is completed, the arrangement of the nanomaterials is fixed by heat treatment, light curing or chemical cross-linking;

[0098] Electric field removal: After the fixation process is completed, gradually reduce the electric field strength to zero.

[0099] Please see attached Figure 2 , the intelligent adaptive control system in step S7 includes:

[0100] Data acquisition and transmission module, which is used to collect processing parameter data in real time and transmit it quickly;

[0101] Data processing and analysis module, which is used to process and analyze the collected data and identify key parameter changes and anomalies;

[0102] Prediction and decision module, which is used to predict problems and formulate laser parameter adjustment plans based on analytical data;

[0103] A control interface module, which is used to convert the adjustment scheme into a control signal and transmit it to the laser device;

[0104] Feedback and closed-loop control module, which is used to monitor and automatically adjust laser parameters;

[0105] The user interface and monitoring module is used to provide a visual interface to display data and status and allow manual adjustment.

[0106] Please see attached Figure 3 , the feedback and closed-loop control modules include:

[0107] A feedback signal processing unit, which is used to process feedback data and provide support for control decisions;

[0108] Real-time control algorithms that calculate and implement laser parameter adjustments to optimize processing in response to real-time changes.

[0109] Embodiment 1:

[0110] S1: The workpiece surface is coated with a nanopore array structure with a thickness of 50 nm and a nanopore size of 20 nm;

[0111] S2: Using surface plasmon resonance structures as nanophotonic lenses for wavefront manipulation.

[0112] S3: Using quantum dot laser, the initial setting wavelength is 450nm, power is 2W, pulse duration is 100fs, and frequency is 100kHz.

[0113] S4: Using a deformable mirror as an adaptive optical component for real-time wavefront adjustment.

[0114] S5: The electric field strength is set to 10 V / μm and the frequency is set to 200 Hz to adjust the arrangement of the nanomaterials.

[0115] S6: Use optical microscopy to monitor micropore size and shape.

[0116] S7: Intelligent adaptive control system adjusts laser power and frequency according to feedback data.

[0117] S8: Surface treatment is performed using plasma cleaning after completion.

[0118] Summary: This embodiment provides a basic laser-based special-shaped micro-hole spinneret processing technology, which is suitable for micro-hole processing of simple structures.

[0119] Example 2: Expanding material adaptability

[0120] S1: The workpiece surface is coated with a nanocolumn array structure with a thickness of 100 nm and a nanocolumn height of 200 nm.

[0121] S2: Using microlens arrays as nanophotonic lenses.

[0122] S3: Uses a fiber laser with an initial setting wavelength of 1064nm, power of 3W, pulse duration of 500fs, and frequency of 500kHz.

[0123] S4: Real-time wavefront adjustment using a liquid crystal phase modulator.

[0124] S5: The electric field strength is set to 20 V / μm and the frequency is 500 Hz to control the directional arrangement of nanomaterials.

[0125] S6: Monitoring microwell shape and surface quality using confocal laser microscopy.

[0126] S7: Intelligent adaptive control system adjusts the laser wavelength to adapt to changes in material properties.

[0127] S8: Perform UV light curing to fix the arrangement of nanomaterials.

[0128] Summary: This embodiment expands the material adaptability based on the basic process, uses fiber laser and liquid crystal phase modulator, and adapts to a wider range of material types.

[0129] Example 3: Dynamic wavefront control and multi-point processing

[0130] S1: The workpiece surface is coated with a hybrid nanopore and nanopillar array structure with a thickness of 150 nm, a nanopore size of 30 nm, and a nanopillar height of 300 nm.

[0131] S2: Using nanogratings as nanophotonic lenses to achieve dynamic wavefront manipulation.

[0132] S3: Using quantum dot laser, the initial wavelength is set to 520nm, the power is 5W, the pulse duration is 200fs, and the frequency is 250kHz.

[0133] S4: The deformable mirror is combined with a liquid crystal phase modulator to achieve multi-point focusing and real-time wavefront adjustment.

[0134] S5: The electric field strength is set to 30 V / μm and the frequency is 700 Hz to achieve multi-directional nanomaterial arrangement.

[0135] S6: Optical interferometer monitoring of microhole depth and surface uniformity.

[0136] S7: The intelligent system adjusts the laser focus position through real-time wavefront data to achieve multi-point processing.

[0137] S8: Fix the nanomaterial arrangement using chemical cross-linking methods.

[0138] Summary: This embodiment further develops the wavefront control technology, realizes multi-point focusing and multi-directional nanomaterial arrangement, and is suitable for more complex microstructure processing.

[0139] Example 4: High-precision nanomaterial control

[0140] S1: The workpiece surface is coated with a high-density nanopore array structure with a thickness of 200 nm and a nanopore size of 50 nm.

[0141] S2: Use surface plasmon resonance structures in combination with microlens arrays to optimize wavefront control.

[0142] S3: uses a fiber laser with an initial wavelength of 800nm, a power of 4W, a pulse duration of 300fs, and a frequency of 600kHz.

[0143] S4: Adaptive optical components use high-precision liquid crystal phase modulators to improve control accuracy.

[0144] S5: The electric field strength is set to 50 V / μm and the frequency is 800 Hz to precisely control the arrangement of nanomaterials.

[0145] S6: Real-time monitoring of nanostructure formation using scanning electron microscopy.

[0146] S7: Intelligent system regulates laser pulse duration and power to ensure nanostructure precision.

[0147] S8: After plasma cleaning, the photosensitive polymer is cured.

[0148] Summary: This embodiment focuses on improving the arrangement accuracy and stability of nanomaterials, and is suitable for the manufacture of high-precision microstructures and functionalized materials.

[0149] Example 5: Fully automated and adaptive optimization

[0150] S1: The workpiece surface is coated with a mixed high-density nanopore and nanopillar array structure with a thickness of 250nm, the nanopore size is 80nm, and the nanopillar height is 400nm.

[0151] S2: Use advanced nano-gratings and liquid crystal modulators to achieve dynamic wavefront real-time control.

[0152] S3: Using quantum dot laser, the initial wavelength is set to 660nm, the power is 6W, the pulse duration is 400fs, and the frequency is 700kHz.

[0153] S4: The adaptive optics component uses a multi-layer deformable mirror system to adjust multiple focal points in real time.

[0154] S5: The electric field strength is set to 70 V / μm and the frequency is 1 kHz to control the precise orientation of the nanomaterials.

[0155] S6: Monitoring the three-dimensional morphology of nanostructures using high-resolution atomic force microscopy.

[0156] S7: The intelligent adaptive control system integrates multi-source data to automatically optimize laser parameters, including wavelength, power, pulse characteristics, etc., to achieve fully automated operation.

[0157] S8: Fix the nanostructure using high temperature heat treatment and finally test the functionality of the nanostructure.

[0158] Summary: This embodiment achieves full automation and adaptive optimization, and can automatically adjust and optimize processing parameters to ensure efficient and high-precision manufacturing of complex microstructures.

[0159] Summary:

[0160] The five embodiments gradually deepen the basic process, expand the material adaptability, enhance the wavefront control and multi-point processing capabilities, accurately control the arrangement of nanomaterials, and finally achieve full automation and adaptive optimization. Each embodiment gradually improves the complexity and precision of the process, covering application scenarios from simple to complex microstructure processing, and improves the adaptability, precision and efficiency of the entire process.

[0161] In order to fully verify the effectiveness and practical application value of the laser-based special-shaped micro-hole spinneret processing technology of the present invention, four main experimental parts were designed. Each experimental part not only verifies the advantages of a single technology, but also explores the influence of different technology combinations on the processing effect. The experiment includes the measurement and comparison of multiple parameters such as laser beam focusing accuracy, material removal rate, processing speed, energy consumption, system response time, and physical properties of materials. Through these experiments, the differences between the various indicators of the technology of the present invention and the traditional process can be systematically evaluated.

[0162] Experimental part 1: It mainly focuses on the effect of nanophotonics lens and adaptive optical components in improving laser beam focusing accuracy and wavefront control. By comparing the traditional process group, single photonics lens group, single adaptive optical component group and embodiment group, the influence of these technologies on micro-hole processing accuracy and surface quality is revealed.

[0163] Experimental Part 2: It focuses on the adaptability and efficiency of materials in multi-material systems. By using tunable laser sources and adaptive optical components, the effects of these technologies on the processing efficiency and energy consumption of different materials are verified. This part of the experiment covers metals, non-metals and composite materials, aiming to comprehensively evaluate the diversity and adaptability of the process.

[0164] Experimental Part 3: The design focus is on the dynamic response capability of the intelligent adaptive control system. We will compare the response time and processing consistency of the intelligent control system, traditional electronic control system and partially automated control system to verify the superiority of the intelligent adaptive control system in improving the stability and accuracy of the machining process.

[0165] Experimental Part 4: Explore the application of electric field-assisted technology in nanomaterial arrangement and its impact on material properties. By comparing the implementation group, single electric field technology group, partial electric field control group and traditional process group, the contribution of electric field-assisted technology to the consistency of nanostructure arrangement and the improvement of material functionality is evaluated.

[0166] Experimental Part 1: Laser Beam Focusing Accuracy and Wavefront Control

[0167] Experimental purpose: To verify the role of nanophotonics lenses and adaptive optical components in improving laser beam focusing accuracy and wavefront control.

[0168] Experimental groups:

[0169] Embodiment group: Use nanophotonics lenses and adaptive optics components.

[0170] Traditional process group: no nanophotonics lenses and adaptive optics components.

[0171] Single photonic lens set: only nanophotonic lenses are used without adaptive optics components.

[0172] Single adaptive optics component group: only adaptive optics components are used without nanophotonics lenses.

[0173] Test materials: SS304 (stainless steel), SiO 2 (Glass)

[0174] Measurement parameters:

[0175] Laser beam focusing accuracy (μm)

[0176] Micropore shape complexity (shape deviation %)

[0177] Surface roughness(nm)

[0178] Experimental steps:

[0179] Prepare the workpiece and standardize its surface.

[0180] Each group was laser processed separately.

[0181] The size, shape deviation and surface roughness of the micropores are measured using a high-precision microscope.

[0182] Table 1:

[0183]

[0184] Summary: Experimental part 1 verifies the effect of nanophotonics lens and adaptive optical components in improving laser beam focusing accuracy and wavefront control. Experimental data show that the focusing accuracy and shape control ability of the embodiment group are significantly better than those of the other control groups. Specifically, the embodiment group has a better focusing accuracy and shape control ability in SS304 and SiO 2 The focusing accuracy of the laser beam on the material reached 0.5μm and 0.3μm, respectively. In comparison, the focusing accuracy of the conventional process group was 2.0μm and 1.0μm, respectively. Although the single photonic lens group and the single adaptive optical component group have improved, they still cannot reach the accuracy level of the embodiment group. In addition, the micropore shape complexity and surface roughness of the embodiment group are also better than those of other groups, indicating the important role of nanophotonic lenses and adaptive optical components in the processing of complex microstructures.

[0185] Experimental Part 2: Material Adaptability and Efficiency in Multi-Material Systems

[0186] Experimental purpose: To evaluate the adaptability and processing efficiency of tunable laser sources and adaptive optical components for different materials.

[0187] Experimental groups:

[0188] Embodiment group: Using a tunable laser source and adaptive optical components.

[0189] Traditional process group: using a fixed wavelength laser source and no adaptive optical components.

[0190] Single tunable laser source group: Use only tunable laser source.

[0191] Single AO Group: Use only adaptive optics.

[0192] Test material: Ti 6 Al 4 V (titanium alloy), Al 2 O 3 (ceramics), carbon fiber composites

[0193] Measurement parameters:

[0194] Material removal rate (μmμ / s)

[0195] Processing speed (mmμ / s)

[0196] Energy consumption (J / μmμ)

[0197] Experimental steps:

[0198] Preparation of workpieces of different materials.

[0199] Each experimental group was processed using the set laser parameters.

[0200] Measure material removal rate, machining speed and energy consumption.

[0201] Table 2:

[0202]

[0203]

[0204] Summary: Experimental part 2 demonstrates the adaptability and processing efficiency of tunable laser sources and adaptive optical components in multi-material systems. The experimental results show that the embodiment group has good performance in Ti 6 Al 4 V.Al 2 O 3 The material removal rate and processing speed on the Al and carbon fiber composite materials are significantly higher than those of the other groups. 2 O 3 The removal rate on the surface reached 75μmμ / s, which is significantly better than the 50μmμ / s of the traditional process group and the 60μmμ / s of the single technology group. In terms of energy consumption, the embodiment group also showed lower energy consumption, especially on high hardness materials, which shows that the tunable laser source and adaptive optical components can effectively improve processing efficiency and reduce energy consumption. In addition, the improvement of material adaptability enables the embodiment group to adapt to more diverse material processing needs.

[0205] Experimental Part 3: Dynamic Response Capability of Intelligent Adaptive Control Systems

[0206] Experimental purpose: To compare the response speed and optimization capability of the intelligent adaptive control system and the traditional control system during the machining process.

[0207] Experimental groups:

[0208] Embodiment group: Using intelligent adaptive control system.

[0209] Traditional electronic control system group: using traditional manual adjustment and preset parameter control system.

[0210] Partially automated control group: Uses partially automated control systems with basic automatic parameter adjustment functions.

[0211] Traditional process group: completely manual control, no automatic adjustment function.

[0212] Test material: SS304 (stainless steel), Ti 6 Al 4 V(Titanium alloy)

[0213] Measurement parameters:

[0214] System response time (ms)

[0215] Processing consistency (micropore size standard deviation)

[0216] Experimental steps:

[0217] Prepare the workpiece and treat its surface.

[0218] Each group uses its own control system for processing.

[0219] Measure system response time and process consistency.

[0220] Table 3:

[0221]

[0222] Summary: Experimental part 3 verifies the response speed and optimization ability of the intelligent adaptive control system during the processing. The data show that the system response time of the embodiment group is significantly better than that of other groups, and SS304 and Ti 6 Al 4 The response times on the V material were 50ms and 45ms, respectively, while those of the conventional electronic control system group were 200ms and 180ms, respectively. This shows that the intelligent adaptive control system can quickly respond to changes in parameters during processing and ensure the consistency of processing. In addition, the processing consistency (micropore size standard deviation) of the embodiment group is also significantly better than that of other groups, indicating the excellent performance of the intelligent control system in improving processing stability and precision.

[0223] Experimental Part 4: Application of Electric Field Assisted Technology in Nanomaterial Arrangement

[0224] Experimental purpose: To verify the application of electric field-assisted technology in high-precision arrangement of nanomaterials and its influence on material properties.

[0225] Experimental groups:

[0226] Example group: Nanomaterial arrangement using electric field assisted technology.

[0227] Traditional process group: no electric field assisted technology.

[0228] Single electric field technology group: only uses electric field assisted technology without combining other innovative technologies.

[0229] Partial electric field control group: using partial electric field auxiliary technology, the electric field strength and frequency are not as good as those of the embodiment group.

[0230] Test material: Ti 6 Al 4 V(Titanium alloy)

[0231] Measurement parameters:

[0232] Nanostructure alignment quality (alignment consistency %)

[0233] Material properties after processing (such as hardness, conductivity, etc.)

[0234] Experimental steps:

[0235] Prepare the workpiece and coat the surface with nanomaterials.

[0236] Each group uses its own technical solution for processing.

[0237] Measure nanostructure alignment and material properties.

[0238] Table 4:

[0239]

[0240] Summary: Experimental part 4 discusses the application of electric field assisted technology in nanomaterial arrangement and its influence on material properties. Experimental data show that the embodiment group has 6 Al 4 The consistency of the nanostructure arrangement on the V material reached 99%, which was significantly better than the arrangement consistency of the traditional process group and the single electric field technology group. Further performance tests showed that the hardness and conductivity of the material in the embodiment group using the electric field assisted technology were also significantly improved. For example, Ti 6 Al 4 The hardness of V material is increased to 350HV and the conductivity is increased to 1.5×10 6 This shows that the electric field-assisted technology not only improves the arrangement accuracy of the nanostructure, but also enhances the physical properties of the material, which has significant application value.

[0241] Summary:

[0242] Through the comparison of the above four experimental parts, the significant advantages of the present invention in various key technical indicators are clarified:

[0243] Wavefront control and focusing accuracy: This invention effectively improves the laser focusing accuracy, especially in the processing of complex shapes.

[0244] Material adaptability and processing efficiency: The combination of a tunable laser source and adaptive optical components enables the present invention to efficiently process a variety of materials with low energy consumption and high speed.

[0245] Responsiveness of intelligent control systems: Intelligent adaptive control systems significantly improve the consistency and stability of processing, and the response time is much better than traditional control systems.

[0246] Electric field-assisted nanomaterial arrangement: This invention significantly improves the arrangement consistency and functional performance of nanomaterials.

[0247] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. Laser-based special-shaped micro-hole spinneret processing technology, characterized in that: The following steps are involved: S1, preparation of workpiece and nanostructured coating; S2, using nanophotonics lens to control the wavefront of laser beam; S3, using a tunable nano-laser source to adjust the laser wavelength according to the material properties; S4, using adaptive optical components to adjust the laser wavefront in real time; S5. Control the arrangement of nanomaterials by electric field; The electric field control of the arrangement of nanomaterials in step S5 specifically includes the following steps: Arrangement observation and adjustment: Use an optical microscope or electron microscope to observe the orientation and arrangement density of nanomaterials under the action of an electric field in real time; According to the observation results, the electric field strength and frequency are adjusted; Fixation method: After the arrangement is completed, the arrangement of the nanomaterials is fixed by heat treatment, light curing or chemical cross-linking; Electric field removal: After the fixation process is completed, gradually reduce the electric field strength to zero; S6, real-time monitoring of key parameters in micro-hole processing; S7, dynamically adjust laser parameters through intelligent adaptive control system; S8. Perform post-processing and quality inspection.

2. The laser-based special-shaped micro-hole spinneret processing process according to claim 1, characterized in that: The specific implementation steps of the nanostructure coating in step S1 are: coating a nanopore or nanocolumn array structure on the surface of the workpiece by chemical vapor deposition or sol-gel method, and the coating thickness is controlled to be 20nm-200nm.

3. The laser-based special-shaped micro-hole spinneret processing process according to claim 2, characterized in that: The size of the nanopore is 10nm-100nm, and the height of the nanocolumn is 50nm-500nm.

4. The laser-based special-shaped micro-hole spinneret processing process according to claim 1, characterized in that: In the step S2, the nanophotonic lens is selected from one of a nanograting, a surface plasmon resonance structure, a microlens array and a liquid crystal modulator.

5. The laser-based special-shaped micro-hole spinneret processing process according to claim 1, characterized in that: The specific implementation steps of adjusting the laser wavelength according to the material characteristics in step S3 are: Material optical property evaluation: Analyze the optical properties of the workpiece material, including absorption spectrum and reflection spectrum. Use a spectrometer to measure the light absorption and reflection properties of the material in the wavelength range of 200nm-2000nm, determine the absorption peak and absorption bandwidth of the material, and select the wavelength that can most effectively absorb laser energy. Wavelength selection and adjustment: According to the optical absorption characteristics of the material, select a tunable laser source that can cover a wide wavelength range of 200nm-2000nm; Use quantum dot lasers or fiber lasers to achieve wavelength tuning of laser sources; Real-time wavelength adjustment: During the processing, the laser wavelength is dynamically adjusted according to the material surface status and processing progress through real-time monitoring and feedback system; Quantum dot laser: The wavelength of quantum dot laser can be adjusted by controlling temperature, electric field or magnetic field; Fiber laser: The wavelength of fiber laser can be tuned by stretching or compressing the fiber and adjusting the concentration of doping materials. Laser power adjustment: according to the absorption characteristics of the material and processing requirements, set the initial laser power range between 0.1W-10W; Dynamic power control: During the processing, the laser power is adjusted in real time using a high-frequency power modulator; Pulse duration: The selected pulse duration range is 10fs-1ns; Pulse frequency adjustment: Set the pulse frequency range to 10Hz-1MHz.

6. The laser-based special-shaped micro-hole spinneret processing process according to claim 1, characterized in that: In step S4, the adaptive optical component is a deformable mirror or a liquid crystal phase modulator.

7. The laser-based special-shaped micro-hole spinneret processing process according to claim 1, characterized in that: The real-time adjustment of the laser wavefront in step S4 specifically includes the following steps: Installing an optical interferometer: installing an optical interferometer at an appropriate position in the laser light path, configured to monitor the wavefront change after passing through the adaptive optical component; Wavefront data acquisition: The interferometer collects wavefront data, uses dedicated software to analyze the interference pattern, and generates wavefront distortion data in real time; Data transmission and processing: The wavefront data collected by the interferometer is transmitted to the adaptive optical control system through a high-speed data interface, and the processing unit in the control system analyzes the wavefront data in real time; Real-time adjustment of adaptive optical components: According to the analysis results of the processing unit, the shape of the reflective surface of the deformable mirror or the voltage distribution of the liquid crystal phase modulator is adjusted in real time; For deformable mirrors, the actions of each actuator are precisely controlled to achieve fine-tuning of the mirror shape; For liquid crystal phase modulators, the voltage of each pixel is precisely adjusted to change its optical phase; Achieve closed-loop control: real-time adjustment—wavefront monitoring—data feedback—adjustment again.

8. The laser-based special-shaped micro-hole spinneret processing process according to claim 1, characterized in that: The intelligent adaptive control system in step S7 includes: Data acquisition and transmission module, which is used to collect processing parameter data in real time and transmit it quickly; Data processing and analysis module, which is used to process and analyze the collected data and identify key parameter changes and anomalies; Prediction and decision module, which is used to predict problems and formulate laser parameter adjustment plans based on analytical data; A control interface module, which is used to convert the adjustment scheme into a control signal and transmit it to the laser device; Feedback and closed-loop control module, which is used to monitor and automatically adjust laser parameters; The user interface and monitoring module is used to provide a visual interface to display data and status and allow manual adjustment.

9. The laser-based special-shaped micro-hole spinneret processing process according to claim 8, characterized in that: The feedback and closed-loop control module includes: A feedback signal processing unit, which is used to process feedback data and provide support for control decisions; Real-time control algorithms that calculate and implement laser parameter adjustments to optimize processing in response to real-time changes.

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