Moveable mirror group, optical element system and lithography system

Abstract

This invention provides a movable lens assembly, an optical element system, and a photolithography system. The first and second lens mounts within the movable lens assembly each include a support assembly, a drive assembly, and a transmission assembly. Both the support and transmission assemblies are equipped with ventilation structures to form a drive gas film, a support gas film, and a centering gas film. Based on the principle of air static pressure, each gas film possesses high rigidity, which not only improves the impact resistance of the movable lens assembly but also enables positional adjustment of the lens structure, improving image quality. Because the centering gas film in the first lens mount is annular and the centering gas film in the second lens mount is spherical, the first lens mount can achieve vertical position adjustment, and the second lens mount can achieve horizontal rotational adjustment. Furthermore, the combination of the first and second lens mounts allows for three degrees of freedom adjustment. In addition, by forming gas films within each contact surface, this invention makes the movable lens assembly operate near-zero wear, effectively mitigating the problem of frictional particle contamination of the lens.

Description

Technical Field

[0001] This invention relates to the field of lithography machine manufacturing technology, and in particular to a movable mirror assembly, an optical element system, and a lithography system. Background Technology

[0002] In the field of photolithography, movable mirror assemblies are used to compensate for imaging errors caused by manufacturing and assembly mistakes. Existing movable mirror assemblies generally consist of a lens, a centering spring, a piezoelectric ceramic motor, a lever mechanism, and preload springs. The lens is supported by three evenly distributed lever mechanisms, forming a three-degree-of-freedom movable mechanism; the piezoelectric ceramic motor contacts the lever mechanism, driving the lens to produce vertical displacement; the lens is connected to the mirror barrel by a centering spring, ensuring the lens remains horizontally centered during vertical displacement; three preload springs are mounted on the lens, corresponding to the support ends of the lever mechanisms, ensuring the movable mirror assembly has a certain degree of vibration and shock resistance.

[0003] However, due to the inherent characteristics of the centering spring, crosstalk occurs between RX, RY, and DZ when adjusting the movable lens assembly, resulting in limited centering capability and affecting adjustment efficiency. Furthermore, the limited contact stress restricts the preset value of the preload spring force, thus limiting the vibration and shock resistance of the movable lens assembly. Additionally, during lens position adjustment, the motor drives the lens assembly via a lever mechanism, inevitably causing particulate contamination of the lenses due to friction between parts.

[0004] Therefore, a new movable mirror assembly is urgently needed to solve the above-mentioned technical problems. Summary of the Invention

[0005] The purpose of this invention is to provide a movable lens assembly, an optical element system, and a photolithography system to solve at least one of the following problems: how to avoid adjustment crosstalk, how to improve adjustment efficiency, how to alleviate friction particle contamination of the lens, how to improve the impact resistance of the movable lens assembly, how to reduce manufacturing costs, and how to improve imaging quality.

[0006] To solve the above-mentioned technical problems, the present invention provides a movable lens assembly, comprising: a lens structure, a first lens mount and / or a second lens mount;

[0007] Both the first lens mount and the second lens mount include a support assembly, a drive assembly, and a transmission assembly. The support assembly supports the lens structure and the drive assembly, and has multiple ventilation structures to form a support air film and a centering air film at the contact surface between the support assembly and the drive assembly. The transmission assembly is connected to the drive assembly and the lens structure, and also has multiple ventilation structures to form a drive air film at the contact surface between the drive assembly and the transmission assembly.

[0008] Wherein, the centering air film of the first lens mount is annular, and the centering air film of the second lens mount is spherical. When the driving component moves, the driving air film pushes the transmission component to move, and the transmission component of the first lens mount can drive the lens structure to move vertically, and the transmission component of the second lens mount can drive the lens structure to rotate horizontally.

[0009] Furthermore, when the movable lens assembly includes the first lens mount and the second lens mount, the lens structure is supported on the support component of the second lens mount, and the support component of the second lens mount is connected to the transmission component of the first lens mount.

[0010] Optionally, in the movable lens assembly, the support component includes a base cover plate and a base; both the base cover plate and the base are annular, and the bottom surface of the base has a first abutment extending outward from the ring and a second abutment extending inward from the ring; the base cover plate is supported on the bottom surface of the first abutment, and the lens structure is disposed on the top surface of the second abutment.

[0011] Optionally, in the movable mirror assembly, the driving component is located on the top surface of the first base, and the ventilation structure is provided in the base cover and the first base to form the supporting air film on the top surface of the first base.

[0012] Optionally, in the movable lens assembly, the second base is provided with the ventilation structure to form the centering air film; wherein, in the first lens mount, the centering air film is located between the inner annular surface of the base and the outer annular surface of the lens structure; in the second lens mount, the centering air film is located between the top surface of the second base and the bottom surface of the lens structure.

[0013] Optionally, in the movable lens assembly, the first lens mount further includes a sealing ring, which is sleeved on the outer surface of the base and forms an inner cavity with the outer surface of the base; wherein the inner cavity is connected to the ventilation structure in the second base of the first lens mount.

[0014] Optionally, in the movable lens assembly, within the second lens mount, the top surface of the second abutment is spherical, and the shape of the bottom surface of the lens structure that contacts the second abutment is adapted to the top surface of the second abutment, so that the centering air film is spherical.

[0015] Optionally, in the movable mirror assembly, within the first mirror mount, the driving assembly includes a driving ring and a first motor; the driving ring is located on the first base, and the first motor is connected to the outer side wall of the driving ring to drive the driving ring to move horizontally.

[0016] Optionally, in the movable lens assembly, within the first lens mount, the transmission assembly includes a transmission ring, a transmission ring cover plate, and a first connecting plate; the transmission ring is located on the drive ring; the transmission ring cover plate is located on the transmission ring and is connected to the transmission ring; one end of the first connecting plate is connected to the transmission ring cover plate, and the other end of the first connecting plate is connected to the lens structure;

[0017] The transmission ring and the transmission ring cover are provided with the ventilation structure so as to form the driving air film at the contact surface between the transmission ring and the drive ring.

[0018] Optionally, in the movable mirror assembly, both the drive ring and the transmission ring are wedge-shaped, and the relative surfaces of the drive ring and the transmission ring are adapted to each other.

[0019] Optionally, in the movable mirror assembly, within the second mirror mount, the drive assembly includes a first drive block, a second drive block, a second motor, and a third motor;

[0020] The first driving block and the second driving block are spaced apart on the first base; the second motor is connected to the outer wall of the first driving block to drive the first driving block to move horizontally; the third motor is connected to the outer wall of the second driving block to drive the second driving block to move horizontally; wherein the moving direction of the first driving block and the moving direction of the second driving block are perpendicular to each other.

[0021] Optionally, in the movable mirror assembly, within the second mirror mount, the transmission assembly includes a first transmission block, a second transmission block, a first transmission block cover plate, a second transmission block cover plate, a second connecting plate, a third connecting plate, a first ball joint, and a second ball joint; wherein,

[0022] The first transmission block is located on the first driving block; the second transmission block is located on the second driving block; the first transmission block cover plate is located on the first transmission block and is connected to the first transmission block; the second transmission block cover plate is located on the second transmission block and is connected to the second transmission block; one end of the second connecting plate is connected to the first transmission block cover plate, and the other end of the second connecting plate is connected to the first ball joint, which is also connected to the lens structure; one end of the third connecting plate is connected to the second transmission block cover plate, and the other end of the third connecting plate is connected to the second ball joint, which is also connected to the lens structure.

[0023] Furthermore, both the first transmission block and the second transmission block are provided with the ventilation structure so as to form the driving air film on the contact surface between the first driving block and the first transmission block and the contact surface between the second driving block and the second transmission block, respectively.

[0024] Optionally, in the movable mirror assembly, along the axial direction of the base, the cross sections of the first driving block, the second driving block, the first transmission block, and the second transmission block are all wedge-shaped, and the relative surfaces of the first driving block and the first transmission block are adapted to each other, as are the relative surfaces of the second driving block and the second transmission block.

[0025] Optionally, in the movable lens assembly, a fixing seat is further provided between the drive assembly and the lens structure within the second lens mount; the fixing seat is annular and located on the base to support the second connecting plate and the third connecting plate.

[0026] Optionally, in the movable mirror assembly, both the first mirror base and the second mirror base are provided with a fixing ring; the fixing ring is located on the top surface of the transmission assembly, and the venting structure is provided inside the fixing ring to form a fixed air film at the contact surface between the fixing ring and the transmission assembly.

[0027] Optionally, in the movable mirror assembly, the ventilation structure includes a connected vent and a throttling slit, and gas sequentially passes through the vent and the throttling slit to form an air film.

[0028] Optionally, in the movable lens assembly, the lens structure includes a lens and a frame; the lens is disposed on the frame, and the frame is disposed on the support assembly of the first lens mount or the support assembly of the second lens mount.

[0029] Optionally, in the movable mirror assembly, when the movable mirror assembly includes a first mirror base and a second mirror base, the movable mirror assembly further includes a connecting ring; the connecting ring is disposed between the transmission component of the first mirror base and the support component of the second mirror base to connect the transmission component of the first mirror base and the support component of the second mirror base.

[0030] Based on the same inventive concept, the present invention also provides an optical element system, including the movable mirror assembly and an air supply device, wherein the air supply device is connected to at least one of the ventilation structures to supply air to all the ventilation structures in the movable mirror assembly.

[0031] Based on the same inventive concept, the present invention also provides a photolithography system, including the aforementioned optical element system.

[0032] In summary, this invention provides a movable lens assembly, an optical element system, and a photolithography system. The first and second lens mounts within the movable lens assembly each include a support assembly, a drive assembly, and a transmission assembly. Both the support assembly and the transmission assembly are equipped with multiple ventilation structures to form a driving air film at the contact surface between the drive assembly and the transmission assembly, a supporting air film at the contact surface between the drive assembly and the support assembly, and a centering air film at the contact surface between the support assembly and the lens structure. Based on the principle of air static pressure, the driving air film, the supporting air film, and the centering air film all possess high rigidity, which not only improves the impact resistance of the movable lens assembly but also enables positional adjustment of the lens structure under the action of the drive assembly and the transmission assembly, thereby improving image quality. Furthermore, because the centering air film in the first lens mount is annular and the centering air film in the second lens mount is spherical, the first lens mount can achieve vertical position adjustment, and the second lens mount can achieve horizontal rotation adjustment. Thus, the combined action of the first and second lens mounts enables three-degree-of-freedom adjustment of the lens structure. In addition, by forming air films within each contact surface, this invention makes the movable lens assembly nearly a zero-wear operating mechanism, effectively mitigating the problem of frictional particle contamination of the lens. Attached Figure Description

[0033] Those skilled in the art will understand that the accompanying drawings are provided to better understand the invention and do not constitute any limitation on the scope of the invention. Wherein:

[0034] Figure 1 This is a schematic diagram of the movable mirror assembly in Embodiment 1 of this specification.

[0035] Figure 2 This is a cross-sectional schematic diagram of the movable mirror assembly in Embodiment 1 of this specification.

[0036] Figure 3 This is a partial cross-sectional view of the first mirror mount in Embodiment 1 of this specification.

[0037] Figure 4 This is a schematic diagram showing the location of the first vent in Embodiment 1 of this specification.

[0038] Figure 5 This is a schematic diagram showing the location of the first throttling gap and the second ventilation structure in Embodiment 1 of this specification.

[0039] Figure 6 This is a schematic diagram showing the location of the third throttling gap in Embodiment 1 of this specification.

[0040] Figure 7 This is a cross-sectional view of the fourth ventilation structure in Embodiment 1 of this specification.

[0041] Figure 8 This is a schematic diagram of the fixing ring in the first mirror mount in Embodiment 1 of this specification.

[0042] Figure 9 This is a schematic diagram of the movable mirror assembly in Embodiment 2 of this specification.

[0043] Figure 10 This is a cross-sectional schematic diagram of the movable mirror assembly in Embodiment 2 of this specification.

[0044] Figure 11 This is a partial cross-sectional view of the second mirror mount in Embodiment 2 of this specification.

[0045] Figure 12 This is a schematic diagram of the support assembly in the second mirror mount in Embodiment 2 of this specification.

[0046] Figure 13 This is a schematic diagram of the structure of the first transmission block in Embodiment 2 of this specification.

[0047] Figure 14 This is a schematic diagram of the fixing ring in the second mirror mount in Embodiment 2 of this specification.

[0048] Figure 15 This is a schematic diagram of the movable mirror assembly in Embodiment 3 of this specification.

[0049] Figure 16 This is a schematic diagram showing the disassembly of the movable mirror assembly in Embodiment 3 of this specification.

[0050] Figure 17 This is a cross-sectional schematic diagram of the movable mirror assembly in Embodiment 3 of this specification.

[0051] Figure 18 This is a cross-sectional schematic diagram of the movable mirror assembly in Embodiment 3 of this specification.

[0052] In the attached image:

[0053] 10-First mirror mount; 101-Support assembly in the first mirror mount; 1011-Base cover plate in the first mirror mount; 1012-Base in the first mirror mount; 1012a-First base in the first mirror mount; 1012b-Second base in the first mirror mount; 102-Drive assembly in the first mirror mount; 1021-First motor; 1022-Drive ring; 103-Transmission assembly in the first mirror mount; 1031-Transmission ring; 1032-Transmission ring cover plate; 1033-First connecting plate; 104-Sealing ring; 105-Fixing ring in the first mirror mount;

[0054] 20-Second mirror mount; 201-Support assembly in the second mirror mount; 2011-Base cover plate in the second mirror mount; 2012-Base in the second mirror mount; 2012a-First base in the second mirror mount; 2012b-Second base in the second mirror mount; 202-Drive assembly in the second mirror mount; 2021-Second motor; 2022-First drive block; 2023-Third motor; 2024-Second drive block; 203-Transmission assembly in the second mirror mount; 2031-First transmission block; 2032-First transmission block cover plate; 2033-Second connecting plate; 2034-First ball joint; 2035-Second transmission block; 2036-Second transmission block cover plate; 2037-Third connecting plate; 2038-Second ball joint; 204-Fixed seat; 205-Fixed ring in the second mirror mount;

[0055] 30 - Connecting ring;

[0056] M1 - Lens structure; M10 - Lens; M11 - Frame;

[0057] C11 - First vent structure; C110 - First vent hole; C111 - First throttling slot; C12 - Second vent structure; C120 - Second vent hole; C121 - Second throttling slot; C13 - Third vent structure; C130 - Third vent hole; C131 - Third throttling slot; C14 - Fourth vent structure; C140 - Fourth vent hole; C141 - Fourth throttling slot;

[0058] C21 - Fifth vent structure; C210 - Fifth vent hole; C211 - Fifth throttling slot; C22 - Sixth vent structure; C220 - Sixth vent hole; C221 - Sixth throttling slot; C23 - Seventh vent structure; C230 - Seventh vent hole; C231 - Seventh throttling slot; C24 - Eighth vent structure; C240 ​​- Eighth vent hole; C241 - Eighth throttling slot;

[0059] G11 - Supporting gas film in the first mirror mount; G12 - Centering gas film in the first mirror mount; G13 - Driving gas film in the first mirror mount; G14 - Fixing gas film in the first mirror mount;

[0060] G21 - Supporting gas film in the second mirror mount; G22 - Centering gas film in the second mirror mount; G23 - Driving gas film in the second mirror mount; G24 - Fixing gas film in the second mirror mount;

[0061] T - Inner cavity; P - The junction of the first and second abutments in the second mirror mount. Detailed Implementation

[0062] To make the objectives, advantages, and features of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clearly illustrate the objectives of the embodiments of the present invention. Furthermore, the structures shown in the drawings are often part of the actual structures. In particular, different figures may emphasize different aspects and sometimes use different scales. It should also be understood that, unless specifically stated or indicated, the terms "first," "second," "third," etc., in the specification are only used to distinguish the various components, elements, steps, etc., in the specification, and are not used to indicate the logical or sequential relationships between the various components, elements, steps, etc.

[0063] In this application specification, the X-axis, Y-axis, and Z-axis directions refer to three perpendicular directions in three-dimensional space, and the vertical and axial directions refer to the Z-direction; the horizontal direction refers to either the X-axis or Y-axis direction; the horizontal plane is a plane coplanar with the X-axis and Y-axis directions; the cross-section is a plane coplanar with the Z-axis and X-axis; and the RX and RY directions refer to the rotational directions along the X-axis and Y-axis directions, respectively; the DZ direction refers to the displacement direction along the Z-axis.

[0064] The movable lens assembly provided by this invention includes: a lens structure, a first lens mount, and / or a second lens mount. Based on this, the specification uses three specific embodiments to exemplarily illustrate the movable lens assembly. In Embodiment 1, the movable lens assembly includes the lens structure and the first lens mount; in Embodiment 2, the movable lens assembly includes the lens structure and the second lens mount; and in Embodiment 3, the movable lens assembly includes the lens structure, the first lens mount, and the second lens mount.

[0065] Example 1

[0066] Please see Figure 1 and Figure 2The movable lens assembly includes a lens structure M1 and a first lens mount 10. The first lens mount 10 supports the lens structure M1 and is adjustable in the vertical direction. The lens structure includes a lens M10 and a frame M11; the lens M10 is disposed on the frame M11 and can be fixedly connected by processes such as bonding or pressing. Preferably, on a horizontal plane, the lens M10 and the frame M11 are circular, and the first lens mount 10 is also correspondingly circular. Further, the first lens mount 10 includes a support assembly 101, a drive assembly 102, and a transmission assembly 103. The support assembly 101 is the basic frame of the first lens mount 10, supporting the lens structure M1 and the drive assembly 102, and indirectly supporting the transmission assembly 103. The drive assembly 102 provides a driving force when adjusting the position of the lens structure M1. The transmission component 103 is used to transmit the force provided by the drive component 102 to the lens structure M1, so as to drive the lens structure M1 to move and realize the position adjustment of the lens structure M1.

[0067] Furthermore, the support assembly 101 includes a base cover plate 1011 and a base 1012. Both the base cover plate 1011 and the base 1012 are annular; preferably, the base cover plate 1011 is a circular ring; the base 1012 is a cylindrical structure. The base 1012 has a first abutment 1012a extending outwards and a second abutment 1012b extending inwards. The base cover plate 1011 rests on the bottom surface of the first abutment 1012a. The lens structure M1 is disposed on the top surface of the second abutment 1012b; that is, the top surface of the second abutment 1012b supports the lens frame M11. It should be noted that the connection between the base cover plate 1011 and the first abutment 1012a is either a fixed connection or a detachable connection. There is no connecting component between the lens structure M1 and the second base 1012b, and the lens structure M1 can be separated from the second base 1012b.

[0068] The driving assembly 102 includes a first motor 1021 and a driving ring 1022. The driving ring 1022 is located on the top surface of the first base 1012a, and its position does not require any connection method to fix it; that is, the driving ring 1022 is movable on the top surface of the first base 1012a. The first motor 1021 is connected to the outer side wall of the driving ring 1022 to drive the driving ring 1022 to move horizontally. The first motor 1021 can be optionally an integrated stepper motor with a ball screw, eliminating the need for an expensive piezoelectric ceramic motor and reducing manufacturing costs. Furthermore, the output end of the first motor 1021 is fixedly connected to the driving ring 1022, so that when the stepper motor rotates, the output end pushes the driving ring 1022, enabling the driving ring 1022 to move along the direction of the ball screw.

[0069] The transmission assembly 103 includes a transmission ring 1031, a transmission ring cover plate 1032, and a first connecting plate 1033. The transmission ring 1031 is located on the drive ring 1022 and is movable relative to the drive ring 1022; the transmission ring cover plate 1032 is located on the transmission ring 1031 and is connected to it; one end of the first connecting plate 1033 is connected to the transmission ring cover plate 1032, and the other end of the first connecting plate 1033 is detachably connected to the mirror frame M11. Preferably, the transmission ring cover plate 1032 is also annular and adapts to the top surface shape of the transmission ring 1031. Furthermore, the transmission ring 1031, the transmission ring cover plate 1032, and the first connecting plate 1033 are fixedly connected to ensure the stability of the force transmitted by the transmission assembly 103. Further, the first connecting plates 1033 are arranged radially along the transmission ring cover plate 1031, and their number is not limited. Preferably, three or more first connecting plates 1033 are provided to ensure a stable connection. When multiple first connecting plates 1033 are provided, the multiple first connecting plates 1033 are evenly distributed along the annular surface of the transmission ring cover plate 1032 to ensure that the lens structure M1 is subjected to uniform force.

[0070] Please see Figures 2 to 5The movable mirror assembly provided in this embodiment is an air-floating movable mirror assembly. Specifically, the base cover plate 1011 and the first base 1012a are provided with the ventilation structure, which is named the first ventilation structure C11 in this embodiment. The first ventilation structure C11 can form a supporting air film G11 on the top surface of the first base 1012a. It should be noted that the ventilation structure refers to a connected vent and a throttling slit, and the gas passes through the vent and the throttling slit in sequence to form an air film. Alternatively, a pressure equalization groove can be provided between the vent and the throttling slit, and the gas passes through the vent, the pressure equalization groove and the throttling slit in sequence to form the air film. The air film has a certain rigidity and can play a supporting role. Based on this, it can be understood that the base cover plate 1011 is attached to the bottom surface of the first base 1012a for the purpose of cooperating with the first base 1012a to form a sealed cavity, i.e., the first ventilation structure C11. Furthermore, in this embodiment, the vent hole and the throttling gap within the first venting structure C11 are respectively named the first vent hole C110 and the first throttling gap C111. For example, in cross-section, the first vent hole C110 is vertically disposed in the base cover plate 1011 and penetrates the base cover plate 1011; the first throttling gap C111 is vertically disposed in the first base 1012a and penetrates the first base 1012a; thus, the first vent hole C110 and the first base 1012a are connected. Optionally, a pressure equalization groove is also provided within the first base 1012a. In a horizontal plane, the first vent hole C110 is a circular hole, and the first throttling gap C111 can extend circumferentially along the base 101. Based on this, when air is introduced into the first vent C110, the gas flows in through the first vent C110 and flows out through the first throttling gap C111, thereby forming the supporting air film G11 between the top surface of the first base 1012a and the bottom surface of the drive ring 1022. The supporting air film G11 serves to support and reduce friction. That is, when the drive ring 1022 moves, the supporting air film G11 not only ensures stable support for the drive ring 1022, but also reduces the frictional force generated between the drive ring 1022 and the first base 1012a, preventing the formation of friction particles that contaminate the lens M10.

[0071] Furthermore, this embodiment does not limit the number of the first ventilation structures C11, but preferably has multiple first ventilation structures C11, and the multiple first ventilation structures C11 are evenly distributed along the circumference of the base cover plate 1011. Figure 4 and Figure 5As shown, there are four first ventilation structures C11, which are evenly distributed on the base 1012 and the base cover plate 1011. Furthermore, this embodiment does not limit the specific number of the first ventilation holes C110 and the first throttling gaps C111 in each first through-hole structure C11. One first ventilation hole C110 can correspond to one or more first throttling gaps C111, or one first throttling gap C111 can correspond to multiple first ventilation holes C110. Also, this embodiment does not limit the specific dimensions of the first ventilation structure C11. For example, the first throttling gap C111 is 3.5 mm long and 0.025 mm wide, forming a supporting air film G11 with a thickness of 0.02 mm.

[0072] Please see Figure 2 , Figure 3 and Figure 5The second base 1012b also contains the aforementioned ventilation structure, which is named the second ventilation structure C12 in this embodiment. The second ventilation structure C12 forms a centering air film G12 between the second base 1012b and the lens structure M1. Exemplarily, the second ventilation structure C12 includes a second ventilation hole C120 and a second throttling gap C121 that are connected. It should be noted that in this embodiment, the portion of the second base 1012b that connects to the first base 1012a has a thickness comparable to that of the first base 1012a. The portion of the second base 1012b near the lens structure M1 has an axially extending body and a radially extending support platform. The second ventilation hole C120 is axially arranged and penetrates the portion of the second base 1012b that connects to the first base 1012a, while the second base 1012b is also close to the body; the second throttling gap C121 is radially arranged and penetrates the body. To form the centering gas film G12, the first lens assembly 10 further includes a sealing ring 104. The sealing ring 104 is fitted onto the outer surface of the body and forms an inner cavity T with the outer surface of the body for gas path sealing. The second vent C120 and the second throttling gap C121 are respectively connected to the inner cavity T, so that gas can flow out sequentially through the second vent C120, the inner cavity T, and the second throttling gap C121, forming the centering gas film G12 between the inner surface of the body of the base 101 and the outer surface of the frame M11 of the lens structure M1. The centering gas film G12 is preferably annular to serve as a centering agent and to reduce friction. That is, when the lens structure M1 moves vertically, the stiffness of the centering gas film G12 can limit the horizontal displacement of the lens structure M1 during vertical movement, thus achieving a centering effect. Meanwhile, when the lens structure M1 moves relative to the body of the base 101, the centering air film G12 can reduce the frictional force between the two and avoid the formation of frictional particles that could contaminate the lens M10.

[0073] Furthermore, this embodiment does not limit the number of the second ventilation structures C12, and may optionally include multiple second ventilation structures C12, which are evenly distributed along the circumference of the second base 1012b. In addition, this embodiment does not limit the specific number of the second ventilation holes C120 and the second throttling gaps C121 in each second through-hole structure C12; one second ventilation hole C120 may correspond to one or more second throttling gaps C121, or one second throttling gap C121 may correspond to multiple second ventilation holes C120. Figure 3 and Figure 5As shown, four second ventilation structures C12 are evenly distributed on the base 101, and one second ventilation hole C120 in the second ventilation structure C12 corresponds to two second throttling gaps C121. Furthermore, this embodiment does not limit the specific dimensions of the second ventilation structure C12. For example, the second throttling gap C121 is 3mm long and 0.05mm wide, forming a centering air film G12 with a thickness of 0.05mm.

[0074] Please see Figure 2 , Figure 3 and Figure 6 The transmission ring 1031 and the transmission ring cover plate 1032 are also provided with the ventilation structure, which is named the third ventilation structure C13 in this embodiment. Exemplarily, the third ventilation structure C13 includes a third ventilation hole C130 and a third throttling gap C131 that are connected. The third ventilation hole C130 is axially disposed in the transmission ring cover plate 1032 and penetrates the transmission ring cover plate 1032. The third throttling gap C131 is axially disposed in the transmission ring 1031 and penetrates the transmission ring 1031. It can be understood that the fixed connection between the transmission ring 1031 and the transmission ring cover plate 1032 ensures better airtightness of the third ventilation structure C13, thereby forming a driving air film G13 between the transmission ring 1031 and the drive ring 1022. Specifically, when gas flows in from the third vent C130 and flows out from the third throttling gap C131, the driving gas film G13 can be formed between the bottom surface of the transmission ring 1031 and the top surface of the drive ring 1022.

[0075] It should be noted that in this embodiment, both the drive ring 1022 and the transmission ring 1031 are wedge-shaped rings, and the relative surface morphologies of the drive ring 1022 and the transmission ring 1031 are matched to make the formed drive air film G13 ring-shaped. Furthermore, from a cross-sectional perspective, the extension direction of the drive air film G13 has a certain angle with the X-axis direction, meaning the drive air film G13 is inclined relative to the horizontal plane. Based on this, when the first motor 1021 pushes the drive ring 1022 horizontally, the drive ring 1022 and the transmission ring 1031 form a wedge-shaped kinematic pair. Under the action of the drive air film G13, the drive air film G13 pushes the transmission ring 1031 vertically, causing the transmission ring 1031 to move vertically accordingly. This movement, through the transmission ring cover plate 1032 and the first connecting plate 1033, drives the lens structure M1 to move vertically, thereby achieving adjustment of the vertical position of the lens structure M1. Furthermore, the driving air film G13 can also reduce the frictional force between the driving ring 1022 and the transmission ring 1031, further preventing the formation of frictional particles that could contaminate the lens M10.

[0076] Furthermore, this embodiment does not limit the number of the third venting structures C13, and may optionally include multiple third venting structures C13, which are evenly distributed along the circumference of the drive ring. In addition, this embodiment does not limit the specific number of the third vent holes C130 and the third throttling gaps C131 in each third through-hole structure C13. One third vent hole C130 may correspond to one or more third throttling gaps C131, or one third throttling gap C131 may correspond to multiple third vent holes C130. Also, this embodiment does not limit the specific dimensions of the third venting structure C13. For example, the third throttling gap C131 has a length of 3.5 mm and a width of 0.025 mm, forming a third supporting air film G13 with a thickness of 0.02 mm.

[0077] Please see Figure 1 , Figure 2 , Figure 3 , Figure 7 and Figure 8 The first mirror mount 10 further includes a fixing ring 105, which is located on the top surface of the first connecting plate 1033. That is, all the first connecting plates 1033 in the transmission assembly 103 jointly support the fixing ring 105. The fixing ring 105 contains the ventilation structure, which is named the fourth ventilation structure C14 in this embodiment. Exemplarily, the fourth ventilation structure C14 includes a fourth ventilation hole C140 and a fourth throttling gap C141 that are connected. The fourth ventilation hole C140 is opened from the end face of the fixing ring 105 and extends towards the bottom surface of the fixing ring 105; the fourth throttling gap C141 is located on the bottom surface of the fixing ring 105 and communicates with the fourth ventilation hole C140. Therefore, when gas flows in from the fourth vent C140 and out from the fourth throttling gap C141, a fixed air film G14 can be formed between the bottom surface of the fixing ring 105 and the top surface of the first connecting plate 1033. The fixed air film G14 can lock the position of the lens structure M1 under large impact loads, maintaining better stability. Compared to the centering spring in the prior art, the fixed air film G14 provided in this embodiment has high rigidity and stronger impact resistance.

[0078] Furthermore, this embodiment does not limit the number of the fourth ventilation structures C14 in the fixing ring 105, nor does it limit the specific number of the fourth ventilation holes C140 and the fourth throttling gaps C141 within each fourth ventilation structure C14. When multiple fourth ventilation structures C14 are provided, they are evenly distributed along the circumference of the fixing ring 105. In addition, this embodiment does not limit the specific dimensions of the fourth ventilation structures C14. For example, the fourth throttling gap C141 is 1 mm long and 0.05 mm wide, forming a fixed air film G14 with a thickness of 0.1 mm.

[0079] As described above, the first lens mount 10 in the movable lens assembly provided in this embodiment can achieve vertical position adjustment of the lens structure M1. For example, when the first motor 1021 pushes the drive ring 1022 along a direction close to its center, the drive air film G13 pushes the transmission ring 1031 along the positive Z-axis; that is, the transmission ring 1031 rises. The rise of the transmission ring 1031 will cause the transmission ring cover plate 1032 and the first connecting plate 1033 to rise. Correspondingly, the first connecting plate 1033 will cause the lens frame M11 to rise, and the lens frame M11 will cause the lens M10 it carries to rise, thereby achieving position adjustment of the lens M10 along the positive Z-axis. Conversely, when the first motor 1021 pushes the drive ring 1022 in a direction away from the center of the drive ring 1022, the drive air film G13 drives the transmission ring 1031 to descend along the negative half-axis of the Z-axis. Then, the transmission ring cover plate 1032 and the first connecting plate 1033 descend synchronously. Correspondingly, the first connecting plate 1033 will drive the frame M11 and the lens M10 to descend, thereby realizing the adjustment of the position of the lens M10 along the negative half-axis of the Z-axis.

[0080] Based on the same inventive concept, this embodiment also provides an optical element system, including the aforementioned movable mirror assembly and a gas supply device. The gas supply device is connected to at least one of the ventilation structures to supply gas to all the ventilation structures in the movable mirror assembly. It is understood that the gas supply to the ventilation structures can be achieved by connecting all the ventilation structures together, so that supplying gas to one ventilation structure can supply gas to all the ventilation structures. Alternatively, each ventilation structure can be connected to the gas supply device, so that the gas supply device supplies gas to each ventilation structure separately. Of course, some ventilation structures can also be connected, while others can be disconnected, so that gas can be supplied to each ventilation structure separately; this embodiment does not specifically limit this approach.

[0081] Based on the same inventive concept, this embodiment also provides a photolithography system, including the aforementioned optical element system.

[0082] In summary, this embodiment provides a movable lens assembly, an optical element system, and a photolithography system. The first lens mount 10 in the movable lens assembly is an air-floating mount. A supporting air film G11 is formed between the base 101 and the drive ring 1022 to ensure stability during position adjustment. A centering air film G12 is formed between the base 101 and the lens structure M1 to prevent horizontal swaying of the lens structure M1 during position adjustment, providing a good centering effect. A driving air film G13 is formed between the drive ring 1022 and the transmission ring 1031 to drive the transmission ring 1031 to move vertically as the drive ring 1022 moves, thereby driving the lens structure M1 to move vertically and achieve position adjustment. Furthermore, a fixing air film G14 is formed between the fixing ring 105 and the first connecting plate 1033 to lock the position of the lens structure M1, further improving the impact resistance of the movable lens assembly. The air film design makes the movable lens assembly operate with near-zero wear, effectively mitigating the problem of friction particles contaminating the lenses.

[0083]

Example 2

[0084] Please see Figure 9 and Figure 10 This embodiment provides a movable lens assembly, including a lens structure M1 and a second lens mount 20. The second lens mount 20 supports the lens structure M1 and is capable of adjusting the position of the lens structure M1 to allow it to rotate along the X-axis and / or along the Y-axis. The technical features of the lens structure M1 are described in Embodiment 1. The second lens mount 20 includes a support component 201, a drive component 202, and a transmission component 203. The support component 201 forms the basic frame of the first lens mount 20, supporting the lens structure M1 and the drive component 202, and indirectly supporting the transmission component 203. The drive component 202 provides a driving force when adjusting the position of the lens structure M1. The transmission component 203 transmits the force provided by the drive component 203 to the lens structure M1, causing it to rotate and thus adjusting its position.

[0085] Furthermore, the support assembly 201 includes a base cover plate 2011 and a base 2012. Both the base cover plate 2011 and the base 2012 are annular. The base 2012 has a first abutment 2012a extending outwards and a second abutment 2012b extending inwards; the base cover plate 2011 is supported by the bottom surface of the first abutment 2012a and the bottom surface of the second base 2012b. The lens structure M1 is disposed on the top surface of the second abutment 2012b; that is, the top surface of the second abutment 2012b supports the lens frame M11. Similar to Embodiment 1, the base cover plate 2011 and the base 2012 are fixedly or detachably connected; the lens frame M11 is movable relative to the second abutment 2012b.

[0086] The drive assembly 202 includes a second motor 2021, a first drive block 2022, a third motor 2023, and a second drive block 2024. The second motor 2021 and the first drive block 2022 form a drive assembly structure; the third motor 2023 and the second drive block 2024 form another drive assembly structure. Further, the first drive block 2022 and the second drive block 2024 are spaced apart on the first base 2012a, meaning that the first drive block 2022 and the second drive block 2024 move in different directions under the drive of the second motor 2021 and the third motor 2023, respectively. Preferably, with a reference to the annular base 201, the radial direction of the first drive block 2022 is perpendicular to the radial direction of the second drive block 2024, and therefore their movement directions are also perpendicular. In other words, the first drive block 2022 can move along the X-axis, and the second drive block 2024 can move along the Y-axis. Furthermore, the second motor 2021 is connected to the outer wall of the first drive block 2022 to drive the first drive block 2022 to move along the X-axis; the third motor 2023 is connected to the outer wall of the second drive block 2024 to drive the second drive block 2024 to move along the Y-axis. The second motor 2021 and the third motor 2023, like the first motor 1022 in Embodiment 1, can both be integrated stepper motors with ball screws, eliminating the need for expensive piezoelectric ceramic motors and reducing manufacturing costs.

[0087] The transmission assembly 203 includes a first transmission block 2031, a first transmission block cover plate 2032, a second connecting plate 2033, a first ball joint 2034, a second transmission block 2035, a second transmission block cover plate 2036, a third connecting plate 2037, and a second ball joint 2038. The first transmission block 2031, the first transmission block cover plate 2032, the second connecting plate 2033, and the first ball joint 2034 form a transmission structure that cooperates with the second motor 2021 and the first drive block 2022. The second transmission block 2035, the second transmission block cover plate 2036, the third connecting plate 2037, and the second ball joint 2038 form another transmission structure that cooperates with the third motor 2023 and the second drive block 2024. Specifically, the first transmission block 2031 is located on the first drive block 2022; the second transmission block 2035 is located on the second drive block 2024. The first transmission block cover plate 2032 is located on the first transmission block 2031 and is fixedly connected to the first transmission block 2031; the second transmission block cover plate 2036 is located on the second transmission block 2035 and is fixedly connected to the second transmission block 2035; one end of the second connecting plate 2033 is connected to the first transmission block cover plate 2032, and the other end of the second connecting plate 2033 is connected to the first ball joint 2034, which is also connected to the lens frame M11 in the lens structure M1; one end of the third connecting plate 2037 is connected to the second transmission block cover plate 2036, and the other end of the third connecting plate 2037 is connected to the second ball joint 2038, which is also connected to the lens frame M11 in the lens structure M1. As can be seen from the above connection relationship, the driving force provided by the first driving block 2022 will be transmitted to the lens structure M1 in sequence through the first transmission block 2031, the first transmission block cover plate 2032, the second connecting plate 2033 and the first ball joint 2034; similarly, the driving force provided by the second driving block 2022 will be transmitted to the lens structure M1 in sequence through the second transmission block 2035, the second transmission block cover plate 2036, the third connecting plate 2037 and the second ball joint 2038.

[0088] Please see Figures 9 to 12Similar to Embodiment 1, the second mirror mount provided in this embodiment is also an air-floating structure. Specifically, the second mirror mount 20 also has ventilation structures between the base cover plate 2011 and the first base 2012a and the second base 2012b, which are named the fifth ventilation structure C21 and the sixth ventilation structure C22 in this embodiment, respectively, to form a supporting air film G21 and a centering air film G22. Specifically, the fifth ventilation structure C21 is provided in the portion of the base 201 covered by the first driving block 2022; and the fifth ventilation structure C21 is provided in the portion of the base 201 covered by the second driving block 2024, and the base cover plate 2011 is in close contact with the first base 2012a to ensure better airtightness, thereby forming the supporting air film G21 between the first base 2012a1 and the first driving block 2022 and the second driving block 2024, respectively. Similarly, the base cover plate 2011 is tightly connected to the second base 2012b to ensure better airtightness, thereby forming the centering air film G22 between the second base 2012b and the bottom surface of the lens frame M11. Since the entire bottom surface of the lens frame M11 in the lens structure M1 is in contact with the second base 2012b, the specific distribution of the sixth ventilation structure C22 is not limited. However, preferably, multiple sixth ventilation structures C22 are provided in the base 201, and the multiple sixth ventilation structures C22 are evenly distributed along the circumference of the base 201 to form a centering air film G22 of uniform thickness between the second base 2012b and the bottom surface of the lens frame M11.

[0089] Furthermore, the fifth ventilation structure C21 includes a connected fifth ventilation hole C210 and a fifth throttling slit C211, enabling the formation of the supporting air film G21 between the top surface of the first base 2012a and the bottom surface of the first driving block 2022, and between the top surface of the first base 2012a and the bottom surface of the second driving block 2024. The supporting air film G21 in this embodiment is the same as the supporting air film G11 in Embodiment 1, both serving to stabilize support and reduce frictional resistance; this can be referred to the description in Embodiment 1. The sixth ventilation structure C22 includes a connected sixth ventilation hole C220 and a sixth throttling slit C221, enabling the formation of the centering air film G22 between the top surface of the second base 2012b and the bottom surface of the frame M11. Please refer to... Figure 11 and Figure 12Unlike Embodiment 1, in this embodiment, the top surface of the second base 2012b is spherical, and the bottom surface of the lens frame M11 is also spherical, with the shape of the bottom surface of the lens frame M11 matching the top surface of the second base 2012b. That is, the bottom surface of the lens frame M11 can fit against the top surface of the second base 2012b, making their contact surface also spherical. Consequently, the centering air film G22 formed on this contact surface is also spherical. It can be understood that the spherical centering air film G22, the second base 2012b, and the lens frame M11 ensure the feasibility of rotating the lens structure M1 horizontally. Therefore, the second lens assembly 20 provided in this embodiment not only enables two-degree-of-freedom position adjustment of the lens structure M1 in both the X-axis and Y-axis rotation but also reduces motion friction, preventing the formation of friction particles that could contaminate the lens M10.

[0090] Based on this, the sixth vent C220 can penetrate vertically through the base cover plate 2011 under the second base 2021b. A pressure equalization groove is provided in the area of ​​the second base 2021b corresponding to the sixth vent C220; alternatively, the pressure equalization groove can be omitted, and the design can be customized according to the gas flow rate and the preset gas film thickness. The sixth throttling slit C221 is disposed in the second base 2012b, and from a cross-sectional view, the sixth throttling slit C221 extends at an inclined angle and penetrates the second base 2012b, allowing gas to flow in through the sixth vent C220 and out through the sixth throttling slit C221 to the contact surface between the second base 2012b and the frame M11, thereby forming the centering gas film G22. Viewed from the circumferential direction of the base 2012, the sixth throttling slit C221 can extend circumferentially to increase the gas outflow and quickly form the centering gas film G22.

[0091] Please see Figure 9 , Figure 10 , Figure 11 and Figure 13The first transmission block 2031 and the second transmission block 2035 are also provided with the ventilation structure, which is named the seventh ventilation structure C23 in this embodiment. Since the structure and arrangement of the seventh ventilation structure C23 in the first transmission block 2031 and the second transmission block 2035 are the same, this embodiment will specifically describe the seventh ventilation structure C23 in the first transmission block 2031 as an example. The seventh ventilation structure C23 includes a seventh ventilation hole C230 and a seventh throttling gap C231. Since the structure of the first transmission block 2031 in this embodiment is different from the structure of the transmission ring 1031 in Embodiment 1, the first transmission block 2031 is an arc-shaped part, while the transmission ring 1031 is a complete annular part. Therefore, the top surface space of the first transmission block 2031 is limited. The seventh ventilation hole C230 is preferably provided on the side of the first transmission block 2031 and extends radially. The seventh throttling gap C231 extends toward the contact surface between the first transmission block 2031 and the first driving block 2022, and connects to the seventh vent C230. Gas can flow in through the seventh vent C230 and out through the seventh throttling gap C231, thereby forming a driving gas film G23 on the contact surface between the first transmission block 2031 and the first driving block 2022. It should be noted that, in cross-section, the first driving block 2022, the second driving block 2024, the first transmission block 2031, and the second transmission block 2035 are all wedge-shaped, and the relative surface morphologies of the first driving block 2022 and the first transmission block 2031 are compatible, as are the relative surface morphologies of the second driving block 2024 and the second transmission block 2035. Therefore, the driving air film G23 between the first driving block 2022 and the first transmission block 2031, and the driving air film G23 between the second driving block 2024 and the second transmission block 2035 are flat, and from the cross-section, the extension direction of the driving air film G23 has a certain angle with the X-axis direction, that is, the driving air film G23 is inclined relative to the horizontal plane.

[0092] Based on this, when the second motor 2021 pushes the first drive block 2022 along the X-axis, the first drive block 2022 and the first transmission block 2031 form a wedge-shaped kinematic pair. Under the action of the driving air film G23 between them, the driving air film G23 pushes the first transmission block 2031 to move vertically, and at the same time drives the first transmission block cover plate 2032 and the second connecting plate 2033 to move vertically. Therefore, the lens structure M1 should also move vertically under the connection, that is, the entire lens structure M1 will be lifted or pressed down. However, since the lens structure M1 is connected by the first ball joint 2034, while the first ball joint 2034 pulls or pushes the lens structure M1 vertically, the lens structure M1 has a tendency to rotate along the X-axis due to the influence of the lens structure M1's own weight. And since the first ball joint 2034 can achieve free rotation at multiple angles, under the action of the first ball joint 2034, the final motion state of the lens structure M1 is rotation along the X-axis. Similarly, when the third motor 2023 pushes the second drive block 2024 along the Y-axis, the second drive block 2024 and the second transmission block 2035 form a wedge-shaped kinematic pair. Under the action of the driving air film G23 between them, the driving air film G23 pushes the second transmission block 2035 to move vertically, and at the same time drives the second transmission block cover plate 2036, the third connecting plate 2037, and the second ball joint 2038 to move, so that the lens structure M1 rotates along the Y-axis under the connection of the second ball joint 2038. Furthermore, the first ball joint 2034 and the second ball joint 2038 can rotate 360 ​​degrees or rotate along the arc of the centering air film G22 to ensure the smooth rotation of the lens structure M1.

[0093] Furthermore, the second motor 2021 and the third motor 2023 can operate synchronously or independently, and can be set according to the adjustment requirements of the lens structure M1. Also, this embodiment does not limit the number of the seventh ventilation structure C23, nor does it limit the specific number of the seventh ventilation holes C230 and the seventh throttling gaps C231 in each of the seventh ventilation structures C23. The design can be customized according to the airflow rate, the dimensions of the first transmission block 2031 and the second transmission block 2035, and the required thickness of the driving air film G23.

[0094] Please see Figure 1 , Figure 10 , Figure 11 and Figure 14The second lens mount 20 further includes a fixing seat 204 and a fixing ring 205. Because the structure of the base 2012 in the second lens mount provided in this embodiment is slightly different from the structure of the base 1012 in the first lens mount provided in Embodiment 1, that is, the base 2012 in the second lens mount in this embodiment is a circular plate shape and does not have a body with axial thickness, the fixing seat 204 needs to be provided on the base 2012 in the second lens mount to fix the positions of the second connecting plate 2033 and the third connecting plate 2037. Specifically, the fixing seat 204 is annular and located at the junction P of the first base 2012a and the second base 2012b, and can separate the driving component 202 in the second lens mount from the lens structure M1 to avoid the driving component 202 directly abutting against the lens structure M1 during movement.

[0095] The fixing ring 205 is disposed on the second connecting plate 2033 and the third connecting plate 2037. The fixing ring 205 in this embodiment has a structure basically the same as the fixing ring 105 in the first lens mount in Embodiment 1, as described in Embodiment 1. However, the ventilation structure disposed within the fixing ring 205 in the second lens mount in this embodiment is only located in the area where the fixing ring 205 contacts the second connecting plate 2033 and the third connecting plate 2037. Its purpose is to form the fixed air film G24 on the top surface of the second connecting plate 2033 and the third connecting plate 2037. The fixed air film G24 can limit the position of the lens structure M1 when it is subjected to a large impact load, thus maintaining better stability. The ventilation structure on the fixing ring 205 is named the eighth ventilation structure C24 in this embodiment. The eighth ventilation structure C24 includes a connected eighth ventilation hole C240 ​​and an eighth throttling gap C241. The eighth vent C240 ​​extends from the top surface of the fixing ring 205 toward its own bottom surface. The eighth throttling gap C241 is vertically disposed on the bottom surface of the fixing ring 205 and communicates with the eighth vent C240, allowing gas to flow in through the eighth vent C240 ​​and out through the eighth throttling gap C241. Therefore, a fixed gas film G24 can be formed between the contact surfaces of the fixing ring 205 and the second connecting plate 2033 and the third connecting plate 2037, respectively.

[0096] Furthermore, since the contact area between the fixing ring 205 and the second connecting plate 2033 and the third connecting plate 2037 is limited, the fixing ring 205 can only provide one or more of the eighth ventilation structures C24 in the area corresponding to the second connecting plate 2033 and the third connecting plate 2037. The number and size of the eighth ventilation holes C240 ​​and the eighth throttling gaps C241 in each eighth ventilation structure C24 can be specifically designed according to the air flow rate and the stiffness of the fixed air film G24. This embodiment does not make specific limitations on this.

[0097] Based on the same inventive concept, this embodiment also provides an optical element system, including the movable mirror assembly and a gas supply device. The gas supply device is connected to at least one of the ventilation structures to supply gas to all the ventilation structures in the movable mirror assembly. The method of supplying gas to the ventilation structures can be referred to the relevant description in Embodiment 1.

[0098] Based on the same inventive concept, this embodiment also provides a photolithography system, including the aforementioned optical element system.

[0099] In summary, this embodiment provides a movable lens assembly, an optical element system, and a photolithography system. The second lens mount 20 in the movable lens assembly is an air-floating mount. The supporting air film G21 formed between the first base 2012a and the first driving block 2022 and the second driving block 2024 ensures stability during position adjustment. The centering air film G22 formed between the second base 2012b and the lens frame M11 ensures that the lens structure M1 can rotate along the X-axis and / or Y-axis without horizontal displacement, providing excellent centering. That is, the movable lens assembly provided in this embodiment can achieve two-degree-of-freedom adjustment of the lens structure M1's rotation along the X-axis and / or Y-axis, compensating for astigmatism and chromatic aberration in the image quality. Furthermore, the driving air film C23 formed between the first driving block 2022 and the first transmission block 2031, and between the second driving block 2024 and the second transmission block 2035, is used to transmit the driving force. The fixing air film G24 between the fixing ring 205 and the second connecting plate 2033 and the third connecting plate 2037 is used to improve the impact resistance of the movable lens assembly. Furthermore, similar to Embodiment 1, the air film arrangement makes the movable lens assembly operate with near-zero wear, effectively mitigating the problem of friction particles contaminating the lenses.

[0100]

Example 3

[0101] Please see Figures 15 to 18This embodiment provides a movable lens assembly, including a lens structure M1, a first lens mount 10, and a second lens mount 20. The lens structure M1 is disposed on the second lens mount 20, and the second lens mount 20 is connected to the first lens mount 10. The lens structure M1, the first lens mount 10, and the second lens assembly 20 can be referred to the descriptions in Embodiments 1 and 2, and will not be repeated here. Further, the movable lens assembly also includes a connecting ring 30. The connecting ring 30 is disposed between the transmission component of the first lens mount 10 and the support component of the second lens mount 20 to connect the transmission component of the first lens mount 10 and the support component of the second lens mount 20. For example, the connecting ring 30 is connected to the first connecting plate 1033 of the first lens mount 10, and the connecting ring 30 is also connected to the base 201 of the second lens mount 20, thereby connecting the first lens mount 10 and the second lens mount 20. Furthermore, the second mirror mount 20 may be stacked on the first mirror mount 10, or the second mirror mount 20 may be embedded in the first mirror mount 10. This embodiment does not specifically limit this.

[0102] Based on this, in the first lens mount 10, when the first motor 1021 drives the drive ring 1022 to move horizontally, the drive air film G13 on the drive ring 1022 drives the transmission ring 1031 to move vertically, and then drives the second lens mount 20 to move vertically through the first connecting plate 1033 and the transmission ring 30, which is equivalent to driving the lens structure M1 to move vertically.

[0103] In the second lens mount 20, when the second motor 2021 drives the first drive block 2022 along the X-axis, the drive air film G23 on the first drive block 2022 sequentially drives the first transmission block 2031, the first transmission block cover plate 2032, the second connecting plate 2033, and the first ball joint 2034 to move, and the first ball joint 2034 drives the lens structure M1 to rotate along the X-axis. When the third motor 2023 drives the second drive block 2024 along the Y-axis, the drive air film G23 on the second drive block 2024 sequentially drives the second transmission block 2035, the second transmission block cover plate 2036, the third connecting plate 2037, and the second ball joint 2038 to move, and the second ball joint 2038 drives the lens structure M1 to rotate along the Y-axis.

[0104] Based on the same inventive concept, this embodiment also provides an optical element system, including the movable mirror assembly and a gas supply device. The gas supply device is connected to at least one of the ventilation structures to supply gas to all the ventilation structures in the movable mirror assembly. The method of supplying gas to the ventilation structures can be referred to the relevant description in Embodiment 1.

[0105] Based on the same inventive concept, this embodiment also provides a photolithography system, including the aforementioned optical element system.

[0106] In summary, this embodiment provides a movable mirror assembly, an optical element system, and a photolithography system. The movable mirror assembly utilizes the first mirror mount 10 to adjust the position of the lens structure M1 along the Z-axis, and the second mirror mount 20 to rotate the lens structure M1 along the X and Y axes. That is, the movable mirror assembly can achieve three-degree-of-freedom position adjustment, resulting in high debugging efficiency. Furthermore, the first motor 1021, the second motor 2021, and the third motor 2023 can operate independently, synchronously, or in pairs synchronously. Therefore, the three-degree-of-freedom position adjustment of the lens structure M1 is decoupled and does not interfere with each other, thereby improving debugging efficiency and ensuring positional accuracy.

[0107] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. Similar or identical parts between embodiments can be referred to mutually. In addition, different parts between embodiments can also be combined with each other, and this invention does not limit this.

[0108] Furthermore, it should be understood that although the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the present invention. For any person skilled in the art, many possible variations and modifications can be made to the technical solutions of the present invention based on the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the scope of protection of the present invention.

Claims

1. A movable mirror assembly, characterized in that, Includes: lens structure, first lens mount and / or second lens mount; Both the first lens mount and the second lens mount include a support assembly, a drive assembly, and a transmission assembly. The support assembly supports the lens structure and the drive assembly, and has multiple ventilation structures to form a support air film and a centering air film at the contact surface between the support assembly and the drive assembly. The transmission assembly is connected to the drive assembly and the lens structure, and also has multiple ventilation structures to form a drive air film at the contact surface between the drive assembly and the transmission assembly. Wherein, the centering air film of the first lens mount is annular, and the centering air film of the second lens mount is spherical. When the driving component moves, the driving air film pushes the transmission component to move, and the transmission component of the first lens mount can drive the lens structure to move vertically, and the transmission component of the second lens mount can drive the lens structure to rotate horizontally. Furthermore, when the movable lens assembly includes the first lens mount and the second lens mount, the lens structure is supported on the support component of the second lens mount, and the support component of the second lens mount is connected to the transmission component of the first lens mount.

2. The movable mirror assembly according to claim 1, characterized in that, The support assembly includes a base cover plate and a base; both the base cover plate and the base are annular, and the bottom surface of the base has a first abutment extending outward from the ring and a second abutment extending inward from the ring; the base cover plate is supported on the bottom surface of the first abutment, and the lens structure is disposed on the top surface of the second abutment.

3. The movable mirror assembly according to claim 2, characterized in that, The drive assembly is located on the top surface of the first base, and the ventilation structure is provided in the base cover and the first base to form the supporting air film on the top surface of the first base.

4. The movable mirror assembly according to claim 2, characterized in that, The second base is provided with the ventilation structure to form the centering air film; wherein, in the first lens mount, the centering air film is located between the inner ring surface of the base and the outer ring surface of the lens structure; in the second lens mount, the centering air film is located between the top surface of the second base and the bottom surface of the lens structure.

5. The movable mirror assembly according to claim 4, characterized in that, The first mirror mount further includes a sealing ring, which is sleeved on the outer surface of the base and forms an inner cavity with the outer surface of the base; wherein the inner cavity is connected to the ventilation structure in the second base of the first mirror mount.

6. The movable mirror assembly according to claim 2, characterized in that, Within the second lens mount, the top surface of the second abutment is spherical and annular, and the shape of the bottom surface of the lens structure that contacts the second abutment is adapted to the top surface of the second abutment, so that the centering air film is spherical and annular.

7. The movable mirror assembly according to claim 2, characterized in that, Within the first mirror mount, the drive assembly includes a drive ring and a first motor; the drive ring is located on the first base, and the first motor is connected to the outer side wall of the drive ring to drive the drive ring to move horizontally.

8. The movable mirror assembly according to claim 7, characterized in that, Within the first lens mount, the transmission assembly includes a transmission ring, a transmission ring cover plate, and a first connecting plate; the transmission ring is located on the drive ring; the transmission ring cover plate is located on the transmission ring and is connected to the transmission ring; one end of the first connecting plate is connected to the transmission ring cover plate, and the other end of the first connecting plate is connected to the lens structure; The transmission ring and the transmission ring cover are provided with the ventilation structure so as to form the driving air film at the contact surface between the transmission ring and the drive ring.

9. The movable mirror assembly according to claim 8, characterized in that, Both the drive ring and the transmission ring are wedge-shaped, and the relative surfaces of the drive ring and the transmission ring are matched.

10. The movable mirror assembly according to claim 2, characterized in that, Within the second mirror mount, the drive assembly includes a first drive block, a second drive block, a second motor, and a third motor; The first driving block and the second driving block are spaced apart on the first base; the second motor is connected to the outer wall of the first driving block to drive the first driving block to move horizontally; the third motor is connected to the outer wall of the second driving block to drive the second driving block to move horizontally; wherein the moving direction of the first driving block and the moving direction of the second driving block are perpendicular to each other.

11. The movable mirror assembly according to claim 10, characterized in that, Within the second mirror mount, the transmission assembly includes a first transmission block, a second transmission block, a first transmission block cover plate, a second transmission block cover plate, a second connecting plate, a third connecting plate, a first ball joint, and a second ball joint; wherein, The first transmission block is located on the first driving block; the second transmission block is located on the second driving block; the first transmission block cover plate is located on the first transmission block and is connected to the first transmission block; the second transmission block cover plate is located on the second transmission block and is connected to the second transmission block; one end of the second connecting plate is connected to the first transmission block cover plate, and the other end of the second connecting plate is connected to the first ball joint, which is also connected to the lens structure; one end of the third connecting plate is connected to the second transmission block cover plate, and the other end of the third connecting plate is connected to the second ball joint, which is also connected to the lens structure. Furthermore, both the first transmission block and the second transmission block are provided with the ventilation structure so as to form the driving air film on the contact surface between the first driving block and the first transmission block and the contact surface between the second driving block and the second transmission block, respectively.

12. The movable mirror assembly according to claim 11, characterized in that, Along the axial direction of the base, the cross sections of the first driving block, the second driving block, the first transmission block, and the second transmission block are all wedge-shaped, and the relative surfaces of the first driving block and the first transmission block are adapted to each other, as are the relative surfaces of the second driving block and the second transmission block.

13. The movable mirror assembly according to claim 11, characterized in that, Within the second lens mount, a fixing seat is also provided between the drive assembly and the lens structure; the fixing seat is annular and located on the base to support the second connecting plate and the third connecting plate.

14. The movable mirror assembly according to claim 1, characterized in that, Both the first mirror mount and the second mirror mount are provided with a fixing ring; the fixing ring is located on the top surface of the transmission assembly, and the venting structure is provided inside the fixing ring to form a fixed air film at the contact surface between the fixing ring and the transmission assembly.

15. The movable mirror assembly according to claim 1, characterized in that, The ventilation structure includes a connected vent and a throttling slit, and gas passes through the vent and the throttling slit in sequence to form an air film.

16. The movable mirror assembly according to claim 1, characterized in that, The lens structure includes a lens and a frame; the lens is disposed on the frame, and the frame is disposed on the support component of the first lens mount or the support component of the second lens mount.

17. The movable mirror assembly according to claim 1, characterized in that, When the movable mirror assembly includes the first mirror base and the second mirror base, the movable mirror assembly further includes a connecting ring; the connecting ring is disposed between the transmission component of the first mirror base and the support component of the second mirror base to connect the transmission component of the first mirror base and the support component of the second mirror base.

18. An optical element system, characterized in that, Includes a movable mirror assembly and an air supply device as described in any one of claims 1 to 17, wherein the air supply device is connected to at least one of the ventilation structures to supply air to all of the ventilation structures in the movable mirror assembly.

19. A photolithography system, characterized in that, Includes the optical element system as described in claim 18.

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