A motor-driven graphite disc positioning device and control method thereof

Abstract

The present invention provides a motor-driven graphite disc positioning device and a control method thereof, comprising a box, a positioning mechanism, a clamping mechanism and a control module; the positioning mechanism comprises a first translation component, a motion transmission component and a second translation component; the first translation component can perform reciprocating linear motion along the central axis of the bottom surface of the box; the second translation component is symmetrically arranged on both sides of the motion direction of the first translation component; the motion transmission component is connected to the first translation component and the second translation component, and is used to transmit the reciprocating linear motion of the first translation component to the second translation component; the clamping mechanism is arranged at both ends of the second translation component, and the clamping mechanism can be extended from the side wall of the box under the drive of the second translation component. The motor-driven graphite disc positioning device provided in the present application can realize the automatic positioning and calibration of the graphite disc on the process equipment.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductors, and in particular relates to a graphite disc positioning device driven by a motor. Background Art

[0002] Wafer graphite disk is one of the key materials in the semiconductor field. It is a tool used in chip manufacturing and is often used in process steps such as thin film deposition and etching. It can carry and protect wafers and provide necessary support.

[0003] In the current domestic semiconductor industry, the graphite disks that carry wafers are generally fed manually to process equipment. This method has low efficiency, poor precision, and high labor costs. It cannot adapt to the current future technological development trend of automatic semiconductor handling. Related technical products in the world have related difficulties such as high prices, patent protection, and poor after-sales service.

[0004] At the same time, since the weight of the graphite disk that carries the wafer is generally large, even if there is a device for centering and positioning the wafer in the prior art, it cannot be directly used for positioning the graphite disk.

[0005] The product of the present invention solves the automatic positioning and calibration function of the graphite plate carrying the wafer when feeding the process equipment, and can meet the relevant technical requirements and characteristics. Summary of the invention

[0006] The present invention provides a motor-driven graphite disc positioning device, which can realize automatic positioning and calibration of graphite discs when loading materials on process equipment, thereby solving the above-mentioned technical problems.

[0007] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: In the first aspect of the present invention, there is provided a motor-driven graphite disc positioning device, comprising: a box body, a positioning mechanism, a clamping mechanism and a control module; the positioning mechanism comprises a first translation component, a motion transmission component and a second translation component; the first translation component can perform reciprocating linear motion along the central axis of the bottom surface of the box body; the second translation component is symmetrically arranged on both sides of the movement direction of the first translation component; the motion transmission component is connected to the first translation component and the second translation component, and is used to transmit the reciprocating linear motion of the first translation component to the second translation component, and make the second translation component perform symmetrical reciprocating linear motion along the direction perpendicular to the movement direction of the first translation component; the clamping mechanism is arranged at both ends of the second translation component, and the clamping mechanism can be extended from the side wall of the box body under the drive of the second translation component; the control module is electrically connected to the positioning mechanism, and is used to control the positioning mechanism according to a preset program.

[0008] In some embodiments, the first translation assembly includes a motor, a first slider, and a first slide rail; the first slide rail is fixed to the bottom of the box, and the motor can drive the first slider to slide on the first slide rail.

[0009] In some embodiments, a plurality of fixed burrs are provided at the bottom of the outer wall of the box body for fixing the box body.

[0010] In some embodiments, the second translation assembly includes a second slider and a second slide rail. The second slide rail is symmetrically arranged at the bottom of the box along the movement direction of the first translation assembly. The second slider can slide along the second slide rail. A mounting block is arranged on one side of the second slider close to the first translation assembly.

[0011] In some embodiments, the motion transfer component is a connecting rod, one side of which is rotatably connected to the mounting block, and the other side of which is rotatably connected to the edge of the first sliding block.

[0012] In some embodiments, the clamping mechanism is a clamping finger, and the clamping fingers are installed at both ends of the second translation assembly, and the centers of the clamping ends of the four clamping fingers and the center of the box body are always kept on the same vertical line.

[0013] In some embodiments, the clamping end of the clamping mechanism is provided with a distance sensor for monitoring the distance between the clamping end and the graphite disk.

[0014] In some embodiments, the control module is electrically connected to the distance sensor and the motor, and is used to control the frequency of the motor according to a feedback signal of the distance sensor and a preset program.

[0015] In a second aspect, the present invention also provides a motor-driven graphite disc positioning method, which is used for any of the above-mentioned motor-driven graphite disc positioning devices, based on a distance sensor monitoring the distance between the clamping end and the graphite disc, and using a control module to control the frequency of the motor.

[0016] In some embodiments, the control module controls the frequency of the motor according to the following formula: ;in, represents the frequency control amount of the motor at time t; k, , represents the control coefficient; represents the distance between the clamping end and the graphite disc at time t; It represents the integral of the distance between the clamping end and the graphite disk from the start of control to time t; It represents the differential of the distance between the clamping end and the graphite disk.

[0017] The beneficial effects of the present application are as follows: a motor-driven graphite disc positioning device and a control method thereof provided in the present application have the following beneficial effects: 1. The motor drives the first slider and transmits the motion to the second slider through a connecting rod, so that the second sliders arranged on both sides of the motion direction of the first slider can perform symmetrical reciprocating linear motion in a direction perpendicular to the motion direction of the first slider, so that the center surrounded by the four clamping fingers installed on the second slider and the center of the box body are always kept on the same vertical line, and when the four clamping fingers clamp the graphite disc, the positioning of the graphite disc can correspond to the center of the box body; 2. The control module can control the frequency of the motor according to the feedback signal of the distance sensor and the preset program to reduce the positioning time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of this application.

[0019] Figure 2 This is a top view of this application.

[0020] Explanation of the reference numerals: box body -1; fixed burr -11; first translation assembly -2; motor -21; first slider -22; first slide rail -23; second translation assembly -3; second slider -31; second slide rail -32; mounting block -321; clamping finger -4; connecting rod -5. DETAILED DESCRIPTION

[0021] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0022] In order to more clearly understand the above-mentioned purpose, features and advantages of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and examples. It is to be understood that the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. The specific embodiments described herein are merely used to explain the present application, rather than to limit the present application. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art belong to the scope of protection of the present application.

[0023] It should be noted that, in this document, relational terms such as “first” and “second” are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0024] Figure 1 This is a schematic diagram of the structure of this application.

[0025] Combination Figure 1, a motor-driven graphite disc positioning device, comprising: a box 1, a positioning mechanism, a clamping mechanism and a control module; the positioning mechanism comprises a first translation component 2, a motion transmission component and a second translation component 3; the first translation component 2 can make reciprocating linear motion along the central axis of the bottom surface of the box 1; the second translation component 3 is symmetrically arranged on both sides of the movement direction of the first translation component 2; the motion transmission component is connected with the first translation component 2 and the second translation component 3, and is used to transmit the reciprocating linear motion of the first translation component 2 to the second translation component 3, and make the second translation component 3 make symmetrical reciprocating linear motion along the direction perpendicular to the movement direction of the first translation component 2; the clamping mechanism is arranged at both ends of the second translation component 3, and the clamping mechanism can be extended from the side wall of the box 1 under the drive of the second translation component 3; the control module is electrically connected with the positioning mechanism, and is used to control the positioning mechanism according to a preset program.

[0026] This scheme mainly uses a positioning mechanism to perform centering positioning. Specifically, the positioning mechanism includes a first translation component 2, a motion transmission component and a second translation component 3; wherein, the first translation component 2 can perform reciprocating linear motion along the central axis of the bottom surface of the box body 1, and the second translation component 3 is symmetrically arranged on both sides of the movement direction of the first translation component 2. At the same time, the motion transmission component is connected to the first translation component 2 and the second translation component 3, and the motion transmission component can transmit the reciprocating linear motion of the first translation component 2 to the second translation component 3, and make the second translation component 3 perform symmetrical reciprocating linear motion along the direction perpendicular to the movement direction of the first translation component 2. Since the movement of the first translation component 2 is along the central axis of the bottom surface of the box body 1, and the movement of the second translation component 3 is symmetrical along the movement direction of the first translation component 2, therefore, under the movement of the first translation component 2, the motion is transmitted to the second translation component 3 through the motion transmission component, which can make the second translation components 3 on both sides always use the center of the box body 1 as their movement center when moving, so as to maintain the accuracy of centering positioning. Furthermore, the clamping mechanism is arranged at both ends of the second translation assembly 3, and the clamping mechanism can extend from the side wall of the box body 1 under the drive of the second translation assembly 3, so that the clamping mechanism can clamp the graphite disc with the reciprocating motion of the second translation assembly 3, and can also be adapted to graphite discs of different sizes.

[0027] In addition, since the mass of the graphite disc is relatively large, in order to ensure that the device will not be damaged during the positioning process, the present solution also provides a control module, which is electrically connected to the positioning mechanism and can control the positioning mechanism according to a preset program.

[0028] Combination Figure 2 , that is, a top view of the present application, in some embodiments, the first translation assembly 2 includes a motor 21, a first slider 22 and a first slide rail 23; the first slide rail 23 is fixed to the bottom of the box body 1, and the motor 21 can drive the first slider 22 to slide on the first slide rail 23.

[0029] The first translation assembly 2 of the present solution specifically includes a motor 21, a first slider 22 and a first slide rail 23. The first slide rail 23 is fixed to the bottom of the box 1, and its position can be adaptively selected according to the structure of the first slide rail 23, as long as the motor 21 can drive the first slider 22 to make reciprocating linear motion along the central axis of the bottom surface of the box 1.

[0030] In some embodiments, a plurality of fixing burrs 11 are provided at the bottom of the outer wall of the box body 1 for fixing the box body 1 .

[0031] Specifically, a plurality of fixed burrs 11 are provided on the outer wall of the box body 1 to fix the box body 1, thereby improving the positioning accuracy, which is a conventional choice in the art.

[0032] In some possible embodiments, a box cover is further provided on the top of the box 1.

[0033] In some embodiments, the second translation assembly 3 includes a second slider 31 and a second slide rail 32. The second slide rail 32 is symmetrically arranged at the bottom of the box body 1 along the movement direction of the first translation assembly 2. The second slider 31 can slide along the second slide rail 32. A mounting block 321 is arranged on one side of the second slider 31 close to the first translation assembly 2.

[0034] In some embodiments, the motion transmission component is a connecting rod 5 , one side of the connecting rod 5 is rotatably connected to the mounting block 321 , and the other side of the connecting rod 5 is rotatably connected to the edge of the first sliding block 22 .

[0035] The second translation assembly 3 of this solution specifically includes a second slider 31 and a second slide rail 32. The second slide rail 32 is symmetrically arranged at the bottom of the box body 1 along the movement direction of the first translation assembly 2, and the second slider 31 can slide along the second slide rail 32, so as to ensure that the movement directions of the second translation assemblies 3 on both sides are symmetrical along the movement direction of the first translation assembly 2. In addition, a mounting block 321 is arranged on one side of the second slider 31 close to the first translation assembly 2, and the position of the mounting block 321 is also preferably symmetrically arranged along the movement direction of the first translation assembly 2.

[0036] The motion is then transmitted through a motion transmission component, which in this embodiment is a connecting rod 5. The connecting rod 5 can be rotatably connected to the mounting block 321 at one side and rotatably connected to the edge of the first sliding block 22 at the other side.

[0037] In some embodiments, the clamping mechanism is a clamping finger 4, and the clamping finger 4 is installed at both ends of the second translation assembly 3, and the centers of the clamping ends of the four clamping fingers 4 and the center of the box 1 are always kept on the same vertical line.

[0038] Specifically, the clamping mechanism in this scheme adopts conventional clamping fingers 4, which are installed at both ends of the second translation assembly 3, and the centers of the clamping ends of the four clamping fingers 4 and the center of the box 1 are always kept on the same vertical line to improve the accuracy of centering positioning.

[0039] In some embodiments, the clamping end of the clamping mechanism is provided with a distance sensor for monitoring the distance between the clamping end and the graphite disk.

[0040] In some embodiments, the control module is electrically connected to the distance sensor and the motor 21 , and is used to control the frequency of the motor 21 according to a feedback signal from the distance sensor and a preset program.

[0041] Specifically, since the control module of the present solution controls the frequency of the motor 21 according to the distance signal and the preset program, it is necessary to monitor the distance between the clamping end and the graphite disc through a distance sensor. The distance sensor can be set on the clamping end of the clamping mechanism. When the clamping end is close to the graphite disc, the distance between the two can be monitored.

[0042] In a second aspect, the present application provides a motor-driven graphite disc positioning method, which is used for a motor-driven graphite disc positioning device as described in any of the above items. The method monitors the distance between the clamping end and the graphite disc based on a distance sensor, and uses a control module to control the frequency of the motor 21.

[0043] In some embodiments, the control module controls the frequency of the motor 21 according to the following formula: ;in, represents the frequency control amount of the motor 21 at time t; k, , represents the control coefficient; represents the distance between the clamping end and the graphite disc at time t; It represents the integral of the distance between the clamping end and the graphite disk from the start of control to time t; It represents the differential of the distance between the clamping end and the graphite disk.

[0044] Specifically, since the movement controlled by the motor 21 is a continuous process, the first slider 22 drives the connecting rod 5, thereby driving the second slider 31, and then driving the displacement of the clamping end is also a continuous process. Therefore, this solution adopts a feedback control algorithm to control the frequency of the motor 21. The specific formula is: ;in, represents the frequency control amount of the motor 21 at time t; k, , represents the control coefficient; represents the distance between the clamping end and the graphite disc at time t; It represents the integral of the distance between the clamping end and the graphite disk from the start of control to time t; represents the differential of the distance between the clamping end and the graphite disk. , represents the control coefficient, which can be adjusted according to actual needs. Under the control of this formula, the sensor continuously monitors the distance between the clamping end and the graphite disc. If the distance is large, The control amount is also large. At this time, the frequency of the motor 21 is high and the displacement speed is fast, so that the graphite disc can quickly approach the uncontacted clamping end; when the distance is reduced, The control amount continues to decrease, the frequency of the motor 21 decreases, and the displacement speed continues to slow down. When the clamping end and the graphite disc are completely clamped, the displacement speed is reduced to zero. In this way, it is possible to avoid collision and wear between the graphite disc and the clamping end due to excessive positioning speed, while also ensuring that the positioning time is shortened as much as possible to improve work efficiency.

[0045] Those skilled in the art will appreciate that although some embodiments described herein include certain features included in other embodiments but not other features, the combination of features from different embodiments is meant to be within the scope of the present application and to form different embodiments.

[0046] Those skilled in the art will appreciate that the description of each embodiment has its own emphasis, and for parts not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0047] Although the embodiments of the present application are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations all fall within the scope defined by the attached claims. The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or substitutions within the technical scope disclosed by the present invention, and these modifications or substitutions should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

[0048] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present invention, and these modifications or replacements should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A motor-driven graphite disc positioning device, characterized in that: include: Box body, positioning mechanism, clamping mechanism and control module; The positioning mechanism includes a first translation component, a motion transmission component and a second translation component; the first translation component can perform reciprocating linear motion along the central axis of the bottom surface of the box; The second translation assembly is symmetrically arranged on both sides of the movement direction of the first translation assembly; The motion transmission component is connected to the first translation component and the second translation component, and is used to transmit the reciprocating linear motion of the first translation component to the second translation component, and make the second translation component perform symmetrical reciprocating linear motion along a direction perpendicular to the motion direction of the first translation component; The clamping mechanism is arranged at two ends of the second translation assembly, and the clamping mechanism can extend from the side wall of the box body under the drive of the second translation assembly; The control module is electrically connected to the positioning mechanism and is used to control the positioning mechanism according to a preset program; The first translation assembly includes a motor, a first slider and a first slide rail; the first slide rail is fixed to the bottom of the box, and the motor can drive the first slider to slide on the first slide rail; The second translation assembly includes a second slider and a second slide rail, the second slide rail is symmetrically arranged at the bottom of the box along the movement direction of the first translation assembly, and the second slider can slide along the second slide rail; a mounting block is arranged on one side of the second slider close to the first translation assembly; The motion transmission component is a connecting rod, one side of which is rotatably connected to the mounting block, and the other side of which is rotatably connected to the edge of the first sliding block.

2. A motor-driven graphite disc positioning device according to claim 1, characterized in that: A plurality of fixed burrs are arranged at the bottom of the outer wall of the box body for fixing the box body.

3. The motor-driven graphite disc positioning device according to claim 1, characterized in that: The clamping mechanism is a clamping finger, and the clamping fingers are installed at two ends of the second translation assembly, and the centers of the clamping ends of the four clamping fingers and the center of the box body are always kept on the same vertical line.

4. The motor-driven graphite disc positioning device according to claim 1, characterized in that: The clamping end of the clamping mechanism is provided with a distance sensor for monitoring the distance between the clamping end and the graphite disc.

5. The motor-driven graphite disc positioning device according to claim 4, characterized in that: The control module is electrically connected to the distance sensor and the motor, and is used to control the frequency of the motor according to a feedback signal of the distance sensor and a preset program.

6. A motor-driven graphite disc positioning method, used in a motor-driven graphite disc positioning device according to any one of claims 1 to 5, characterized in that: Based on the distance sensor monitoring the distance between the clamping end and the graphite disk, the control module is used to control the frequency of the motor.

7. A motor-driven graphite disc positioning method according to claim 6, characterized in that: The control module controls the frequency of the motor according to the following formula: ； in, represents the frequency control amount of the motor at time t; k, , represents the control coefficient; represents the distance between the clamping end and the graphite disc at time t; It represents the integral of the distance between the clamping end and the graphite disk from the start of control to time t; It represents the differential of the distance between the clamping end and the graphite disk.

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