Photovoltaic silicon wafer drying equipment

Abstract

The present application relates to a photovoltaic silicon wafer drying device, which belongs to the technical field of semiconductor production equipment. The workbench of the photovoltaic silicon wafer drying device of the present application is divided into a loading station, a drying station and an unloading station, and the transportation device transports the hanging basket between the loading station, the drying station and the unloading station. The transportation device is arranged at the bottom of the workbench and isolated from the top of the workbench to avoid contamination of the top by the transportation device. At the same time, since it is necessary to set up a transportation trough for the support mechanism to pass through and support the movement of the hanging basket, it is necessary to set up a shielding belt of the blocking mechanism to block the bottom of the transportation trough, reduce the outflow of drying gas from the transportation trough, reduce the loss of hot air, and improve the drying effect.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor production equipment, and in particular, relates to a photovoltaic silicon wafer drying device. Background Art

[0002] During the production process, photovoltaic silicon wafers need to be cleaned several times according to the process, and they also need to be dried after each cleaning. Flower baskets are used to load photovoltaic silicon wafers and are often used to process photovoltaic silicon in large quantities. Therefore, photovoltaic silicon wafers need to be installed in flower baskets for cleaning and drying. For example, Chinese invention patent document CN116259564A is a cleaning system for photovoltaic silicon wafers with drying equipment. In this document, a manipulator on a gantry is used to transport the flower basket. Since the manipulator is located at the top, the moving mechanical mechanism is prone to produce debris and contaminate the photovoltaic silicon wafers, and the drying wind is easy to escape from the location where the manipulator is set, resulting in poor drying effect. At the same time, the device cannot perform closed air drying on photovoltaic silicon wafers. Summary of the invention

[0003] The technical problem to be solved by the present invention is to solve the problem of poor drying effect that easily causes pollution to photovoltaic silicon wafers in the prior art, thereby providing a photovoltaic silicon wafer drying device that improves the cleanliness and drying effect of photovoltaic silicon wafers.

[0004] The technical solution adopted by the present invention to solve its technical problem is:

[0005] A photovoltaic silicon wafer drying device, comprising:

[0006] A workbench, wherein the workbench is provided with a loading station, a drying station and an unloading station in sequence; the workbench is provided with a transport trough which passes through the loading station, the drying station and the unloading station, and the workbench at the loading station, the drying station and the unloading station is provided with a hanging basket fixing seat, and the hanging basket fixing seat is used for placing the hanging basket;

[0007] The transport device can transport the hanging basket between the loading station, drying station and unloading station;

[0008] A blowing device is arranged at the drying station, and is used to provide drying air to the drying station;

[0009] The transport device comprises: a transport mechanism, a slide rail arranged under the workbench, a driving member for driving the transport mechanism to move on the slide rail, and a blocking mechanism for blocking the transport slot, the transport mechanism passes through the transport slot and is provided with a transport platform for carrying the hanging basket on the top, the transport platform is located above the workbench, and the transport mechanism can also drive the transport platform to rise and fall so as to place the hanging basket on the transport platform on the hanging basket fixing seat or remove the hanging basket from the hanging basket fixing seat;

[0010] The blocking mechanism includes: a pulley assembly located inside the bottom frame of the loading station and the drying station, and a shielding belt capable of moving on the pulley assembly, wherein the shielding belt is respectively composed of an upper shielding part and a lower shielding part according to being located above and below the pulley assembly, and the upper shielding part can move together with the transport mechanism and is always located below the transport trough.

[0011] Preferably, the photovoltaic silicon wafer drying equipment of the present invention, the transportation mechanism includes a slide table arranged on a slide rail, a lifting drive member arranged on the slide table, a horizontal mounting plate arranged on the lifting drive member, a vertical mounting plate arranged on the horizontal mounting plate and passing through the transport trough, a transport table arranged on the vertical mounting plate and located above the workbench, the vertical mounting plate is provided with a sliding member that can slide freely and is located below the workbench, and the upper shielding portion is connected to both ends of the sliding member.

[0012] Preferably, in the photovoltaic silicon wafer drying equipment of the present invention, a vertical mounting plate is arranged above one side of the horizontal mounting plate, a lower shielding portion passes below the horizontal mounting plate, and the other side is slidably connected to the slide table through a sliding rod below the horizontal mounting plate.

[0013] Preferably, in the photovoltaic silicon wafer drying equipment of the present invention, the pulley assembly includes a mounting seat, a first pulley and a second pulley arranged along the height direction on the mounting seat, and the first pulley and the second pulley are arranged to form a certain distance between the upper shielding part and the lower shielding part, so that necessary mechanical parts can be placed between the upper shielding part and the lower shielding part.

[0014] Preferably, in the photovoltaic silicon wafer drying equipment of the present invention, a support plate is further provided at the bottom of the upper shielding part and / or the lower shielding part to support the upper shielding part and / or the lower shielding part.

[0015] Preferably, in the photovoltaic silicon wafer drying device of the present invention, fixing bars are respectively provided on both sides of the transport platform, and positioning grooves are provided on the fixing bars.

[0016] Preferably, in the photovoltaic silicon wafer drying equipment of the present invention, the top of the hanging basket fixing seat is wavy.

[0017] Preferably, in the photovoltaic silicon wafer drying equipment of the present invention, the hanging basket fixing seat on the drying station is provided with a through hole to form a channel for gas circulation.

[0018] Preferably, the photovoltaic silicon wafer drying equipment of the present invention has an outer cover on the drying station, and lifting doors are provided on both ends of the outer cover along the transport direction of the transport device. When the hanging basket is transported by the transport device and passes through the outer cover, the lifting door is opened, and during the drying process, the lifting door is closed.

[0019] Preferably, in the photovoltaic silicon wafer drying equipment of the present invention, the lifting door is also provided with a through hole for the transport platform to pass through, and a blocking curtain is provided at the through hole.

[0020] The beneficial effects of the present invention are:

[0021] In the photovoltaic silicon wafer drying equipment of the present invention, the workbench is divided into a loading station, a drying station and an unloading station, and the transport device transports the hanging basket between the loading station, the drying station and the unloading station. The transport device is arranged at the bottom of the workbench and isolated from the top of the workbench, so as to avoid the pollution of the top by the transport device (some debris is inevitably generated when the transport device moves). However, this requires the provision of a transport trough for the support mechanism to pass through and support the movement of the hanging basket. Therefore, it is necessary to provide a shielding belt of the blocking mechanism to block the bottom of the transport trough, reduce the outflow of drying gas from the transport trough, reduce the loss of hot air, and improve the drying effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The technical solution of the present application is further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 is a three-dimensional diagram of a photovoltaic silicon wafer drying device according to an embodiment of the present application (the arrow indicates the direction of hot air flow inside);

[0024] Figure 2 is a three-dimensional diagram of a workbench according to an embodiment of the present application;

[0025] Figure 3 is a schematic structural diagram of a shielding component according to an embodiment of the present application;

[0026] Figure 4 is a three-dimensional diagram of a transport mechanism according to an embodiment of the present application;

[0027] Figure 5 is a three-dimensional diagram of a pulley assembly according to an embodiment of the present application;

[0028] Figure 6 It is a three-dimensional enlarged view of a workbench at a drying station in an embodiment of the present application.

[0029] The reference numerals in the figure are:

[0030] 1 Loading station;

[0031] 2 Drying station;

[0032] 3. Unloading station;

[0033] 4. Blowing device;

[0034] 5. Transport device;

[0035] 6 Basket fixing seat;

[0036] 9 hanging basket;

[0037] 10. Workbench;

[0038] 11 transport tank;

[0039] 12. Passing vent;

[0040] 40 upper cover;

[0041] 41 lift door;

[0042] 42 vias;

[0043] 43 lower cover;

[0044] 51 Transportation agencies;

[0045] 52 slide rails;

[0046] 53 driving member;

[0047] 54 pulley assembly;

[0048] 55 occlusion tape;

[0049] 56 support plate;

[0050] 61 through hole;

[0051] 510 slide;

[0052] 511 Transport Station;

[0053] 512 lifting drive parts;

[0054] 513 horizontal mounting plate;

[0055] 514 vertical mounting plate;

[0056] 516 Slide;

[0057] 541 Mounting Block;

[0058] 542 first pulley;

[0059] 543 Second pulley;

[0060] 551 upper shielding part;

[0061] 552 lower shielding part;

[0062] 553 Slide;

[0063] 5111 fixing strip;

[0064] 5112 Positioning slot. DETAILED DESCRIPTION

[0065] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0066] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application. In addition, the terms "first", "second", etc. are used only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, "multiple" means two or more.

[0067] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0068] The technical solution of the present application will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0069] This embodiment provides a photovoltaic silicon wafer drying device, comprising:

[0070] Workbench 10, such as Figure 1 and Figure 2 As shown, the workbench 10 is provided with a loading station 1, a drying station 2 and a unloading station 3 in sequence; a transport trough 11 penetrating the loading station 1, the drying station 2 and the unloading station 3 is provided on the workbench 10, and a hanging basket fixing seat 6 is provided on the workbench 10 at the loading station 1, the drying station 2 and the unloading station 3, and the hanging basket fixing seat 6 is used for placing the hanging basket 9; the workbench 10 is supported by a bottom frame, and the bottom frame is hollow inside;

[0071] The transport device 5 is capable of transporting the hanging basket 9 between the loading station 1, the drying station 2 and the unloading station 3;

[0072] The blowing device 4 is arranged at the drying station 2, and the blowing device 4 is used to provide drying air to the drying station 2; an air outlet 12 is also provided on the workbench 10 at the drying station 2, and the air outlet 12 is located between two hanging basket fixing seats 6 that fix the same hanging basket 9. The existence of the air outlet 12 can make the drying air flow pass from the top to the bottom of the workbench 10, or pass from the bottom to the top of the workbench 10;

[0073] The transport device 5, such as Figure 3 The transport mechanism 51 includes a slide rail 52 disposed below the workbench 10, a driving member 53 for driving the transport mechanism 51 to move on the slide rail 52, and a blocking mechanism for blocking the transport slot 11. The transport mechanism 51 passes through the transport slot 11 and is provided with a transport platform 511 for carrying the hanging basket 9 on the top. The transport platform 511 is located above the workbench 10. The transport mechanism 51 can also drive the transport platform 511 to rise and fall so as to place the hanging basket 9 on the transport platform 511 on the hanging basket fixing seat 6 or remove the hanging basket 9 from the hanging basket fixing seat 6.

[0074] The blocking mechanism includes: a pulley assembly 54 located inside the bottom frame of the loading station 1 and the drying station 2, a shielding belt 55 that can move on the pulley assembly 54, and the shielding belt 55 is respectively an upper shielding part 551 and a lower shielding part 552 according to the position above and below the pulley assembly 54, and the upper shielding part 551 can move together with the transportation mechanism 51 and is always located below the transportation trough 11. The blocking mechanism blocks the bottom of the transportation trough 11, which can reduce the amount of drying air passing through the transportation trough 11, improve the utilization rate of drying air, and reduce energy consumption. Note that the blocking mechanism cannot strictly seal the transportation trough 11.

[0075] In the photovoltaic silicon wafer drying equipment of this embodiment, the workbench 10 is divided into a loading station 1, a drying station 2 and a unloading station 3, and the transport device 5 transports the hanging basket 9 between the loading station 1, the drying station 2 and the unloading station 3. The transport device 5 is arranged at the bottom of the workbench 10 and isolated from the top of the workbench 10, so as to avoid the pollution of the top by the transport device 5 (some debris will inevitably be generated when the transport device 5 moves). However, this requires the provision of a transport trough 11 for the support mechanism to pass through and support the movement of the hanging basket 9. Therefore, a shielding belt 55 of a blocking mechanism needs to be provided to block the bottom of the transport trough 11, reduce the outflow of drying gas from the transport trough 11, reduce the loss of hot air, and improve the drying effect.

[0076] Furthermore, a support plate 56 is also provided at the bottom of the upper shielding portion 551 and / or the lower shielding portion 552 to support the upper shielding portion 551 and / or the lower shielding portion 552 to prevent the upper shielding portion 551 and the lower shielding portion 552 from sagging due to gravity. Especially when the length is long, the middle area of ​​the upper shielding portion 551 and the lower shielding portion 552 has an obvious sagging effect, and the support plate 56 can effectively improve the sagging effect.

[0077] Furthermore, the transport mechanism 51, such as Figure 4 As shown, it includes a slide 510 arranged on a slide rail 52, a lifting drive member 512 arranged on the slide 510, a horizontal mounting plate 513 arranged on the lifting drive member 512, a vertical mounting plate 514 arranged on the horizontal mounting plate 513 and passing through the transport trough 11, and a transport platform 511 arranged on the vertical mounting plate 514 and located above the workbench 10, and a sliding member 553 that can slide freely and is located below the workbench 10 is arranged on the vertical mounting plate 514, and the upper shielding portion 551 is connected to both ends of the sliding member 553, and the upper shielding portion 551 tightens the sliding member 553 so that the sliding member 553 is at a stable height and is not affected by the lifting and lowering of the transport platform 511.

[0078] Furthermore, a vertical mounting plate 514 is arranged above one side of the horizontal mounting plate 513, and a lower shielding portion 552 is passed below the horizontal mounting plate 513. The lower side of the horizontal mounting plate 513 is slidably connected to the slide 510 through a slide bar 516. A linear bearing is arranged on the slide 510, and the top of the slide bar 516 is fixed to the lower side of the vertical mounting plate 514 and extends into the linear bearing. Since installation space needs to be reserved for the lower shielding portion 552, the horizontal mounting plate 513 needs to extend to one side, which leads to unbalanced force. Therefore, the force needs to be balanced by arranging a slide bar 516 on the other side to improve the stability of the movement of the transport platform 511.

[0079] Furthermore, if Figure 5 As shown, the pulley assembly 54 includes a mounting seat 541, a first pulley 542 and a second pulley 543 arranged along the height direction on the mounting seat 541, and the arrangement of the first pulley 542 and the second pulley 543 can form a certain distance between the upper shielding portion 551 and the lower shielding portion 552, so that necessary mechanical components can be placed between the upper shielding portion 551 and the lower shielding portion 552.

[0080] Furthermore, fixing bars 5111 are respectively provided on both sides of the transport platform 511, and positioning grooves 5112 are provided on the fixing bars 5111. The connecting rods on the hanging basket 9 can be placed in the positioning grooves 5112 to fix the fixing bars 5111. The number of positioning grooves 5112 is affected by the cross bar on the hanging basket 9.

[0081] Furthermore, the top of the hanging basket fixing seat 6 is wavy to reduce the contact area with the bottom of the hanging basket 9.

[0082] Furthermore, if Figure 6 As shown, a through hole 61 is provided on the hanging basket fixing seat 6 on the drying station 2 to form a gas circulation channel, so that the air flow can flow from the outside of the hanging basket fixing seat 6 to the inside, enter the air outlet 12 and flow out, thereby preventing water accumulation at the hanging basket fixing seat 6.

[0083] Furthermore, the drying station 2 has an upper outer cover 40, and lifting doors 41 are provided at both ends of the upper outer cover 40 along the transport direction of the transport device 5. When the hanging basket 9 is transported by the transport device 5 and passes through the upper outer cover 40, the lifting door 41 is opened. During the drying process, the lifting door 41 is closed to prevent the loss of drying air.

[0084] Furthermore, the lifting door 41 is provided with a through hole 42 for the transport platform 511 to pass through, and a curtain is provided at the through hole 42. The curtain is flexible. When the transport platform 511 is not transporting the hanging basket 9, it can directly pass through the through hole 42 without opening the lifting door 41, thereby improving the transmission efficiency.

[0085] Specifically, the blowing device 4 includes an upper outer cover 40 arranged above the workbench 10, a lower outer cover 43 arranged below the workbench 10, and a circulating fan; the dry air generated by the circulating fan enters above the workbench 10 through the upper outer cover 40, and then passes through the air outlet 12 on the workbench to enter the lower outer cover 43 and flow back to the circulating fan to form circulating air (a heating device may also be provided to heat the circulating air to keep the circulating air at a certain temperature). The blowing device 4 includes a fan, a heating device, etc., and the hot air is circulated to dry the hanging basket 9 and the photovoltaic silicon wafers loaded thereon. Since it is a prior art, it will not be described here.

[0086] It is worth mentioning that Figure 2 There are two drying stations 2, each of which is divided into two parts, left and right, and each part can be placed with two hanging baskets 9 in front and back. Therefore, there are two transport devices 5, and each transport device 5 can transport two hanging baskets 9. The photovoltaic silicon wafers in the hanging baskets 9 are in a vertical state. An outer cover is set above each drying station 2, and there are four air vents 12 on the workbench 10 of each drying station 2. The two middle air vents 12 can be considered to be the same due to their close distance. Therefore, there are three air duct pipes in the bottom frame to connect the four air vents 12. The airflow above the upper outer cover 40 passes through the hanging basket 9 of the workbench 10, passes through the air vents 12, and is then collected together by the air duct pipe at the bottom.

[0087] In this embodiment, the lifting drive member 512 is a cylinder and the drive member 53 is a motor, but other types of drive members can also be used.

[0088] Based on the above ideal embodiments of this application, the relevant staff can make various changes and modifications without departing from the technical concept of this application through the above description. The technical scope of this application is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A photovoltaic silicon wafer drying device, It is characterized in that include: A workbench (10), wherein a loading station (1), a drying station (2) and a unloading station (3) are arranged on the workbench (10) in sequence; a transport trough (11) is provided on the workbench (10) and passes through the loading station (1), the drying station (2) and the unloading station (3); a hanging basket fixing seat (6) is provided on the workbench (10) at the loading station (1), the drying station (2) and the unloading station (3); the hanging basket fixing seat (6) is used for placing the hanging basket (9); A transport device (5) capable of transporting the hanging basket (9) between the loading station (1), the drying station (2) and the unloading station (3); A blowing device (4) is arranged at the drying station (2), and the blowing device (4) is used to provide drying air to the drying station (2); The transport device (5) comprises: a transport mechanism (51), a slide rail (52) arranged below the workbench (10), a driving member (53) for driving the transport mechanism (51) to move on the slide rail (52), and a blocking mechanism for blocking the transport trough (11); the transport mechanism (51) passes through the transport trough (11) and is provided with a transport platform (511) for carrying a hanging basket (9) on the top; the transport platform (511) is located above the workbench (10); the transport mechanism (51) can also drive the transport platform (511) to rise and fall so as to place the hanging basket (9) on the transport platform (511) onto the hanging basket fixing seat (6) or remove the hanging basket (9) from the hanging basket fixing seat (6); The blocking mechanism comprises: a pulley assembly (54) located inside the bottom frame of the loading station (1) and the drying station (2), and a shielding belt (55) capable of moving on the pulley assembly (54); the shielding belt (55) comprises an upper shielding portion (551) and a lower shielding portion (552) respectively according to being located above and below the pulley assembly (54); the upper shielding portion (551) is capable of moving together with the transport mechanism (51) and is always located below the transport trough (11); The transport mechanism (51) comprises a slide table (510) arranged on a slide rail (52), a lifting drive member (512) arranged on the slide table (510), a horizontal mounting plate (513) arranged on the lifting drive member (512), and a vertical mounting plate (514) arranged on the horizontal mounting plate (513) and passing through a transport trough (11); the transport table (511) is arranged on the vertical mounting plate (514); a sliding member (553) capable of sliding freely and located below the workbench (10) is arranged on the vertical mounting plate (514); and the upper shielding portion (551) is connected to both ends of the sliding member (553).

2. The photovoltaic silicon wafer drying device according to claim 1, It is characterized in that A vertical mounting plate (514) is arranged above one side of the horizontal mounting plate (513), a lower shielding portion (552) passes through the lower side, and the lower side of the other side is slidably connected to the slide platform (510) via a sliding rod (516).

3. The photovoltaic silicon wafer drying device according to claim 2, It is characterized in that The pulley assembly (54) comprises a mounting seat (541), a first pulley (542) and a second pulley (543) arranged on the mounting seat (541) and arranged in a height direction.

4. The photovoltaic silicon wafer drying device according to claim 2, It is characterized in that A support plate (56) is also provided at the bottom of the upper shielding portion (551) and / or the lower shielding portion (552) to support the upper shielding portion (551) and / or the lower shielding portion (552).

5. The photovoltaic silicon wafer drying device according to claim 1, It is characterized in that Fixing bars (5111) are respectively provided on both sides of the transport platform (511), and positioning grooves (5112) are provided on the fixing bars (5111).

6. The photovoltaic silicon wafer drying device according to claim 1, It is characterized in that The top of the hanging basket fixing seat (6) is wavy.

7. The photovoltaic silicon wafer drying device according to claim 1, It is characterized in that The hanging basket fixing seat (6) on the drying station (2) is provided with a through hole (61).

8. The photovoltaic silicon wafer drying device according to claim 1, It is characterized in that The drying station (2) is provided with an upper outer cover (40), and lifting doors (41) are provided at both ends of the upper outer cover (40) along the transport direction of the transport device (5).

9. The photovoltaic silicon wafer drying device according to claim 8, It is characterized in that The lifting door (41) is also provided with a through hole (42) for the transport platform (511) to pass through, and a blocking curtain is provided at the through hole (42).

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