Gas supply device and semiconductor process apparatus

Abstract

Embodiments of the present application provide a gas supply device and a semiconductor process equipment, wherein the gas supply device comprises: a gas inlet assembly, a gas outlet assembly and a gas flow adjusting device; the gas inlet assembly is provided with a first gas outlet, the gas outlet assembly is provided with a first gas inlet, the first gas outlet is butted against the first gas inlet, the gas outlet assembly comprises a gas guide plate, the gas guide plate is opposite to the first gas inlet, the gas guide plate is distributed with a plurality of air holes penetrating through the gas guide plate, and the orthographic projection of the first gas outlet on the gas guide plate is located in the central region of the gas guide plate; the gas flow adjusting device comprises a flow guide cover and a driving assembly, the driving assembly is drivingly connected with the flow guide cover, the flow guide cover is arranged at the first gas outlet, and the flow guide cover is provided with a first perforation; and the driving assembly is used for driving the flow guide cover to move towards the direction of being close to or away from the gas guide plate, so as to adjust the distance between the mouth wall of the first gas outlet and the outer side wall of the flow guide cover. The gas supply device is used for supplying process gas to a cavity on demand.

Description

Technical Field

[0001] The present application relates to the field of semiconductor process technology, and in particular to a gas supply device and semiconductor process equipment. Background Art

[0002] During the semiconductor process, it is sometimes necessary to use a gas supply device to deliver process gas into a chamber. For example, during the dry cleaning process, it is necessary to deliver process gas into a chamber where wafers are placed.

[0003] In related technologies, the airflow distribution of the air supply device is generally adjusted by replacing air guide plates with different pore size distributions. Therefore, when the process recipe changes and the amount of air entering the cavity changes, the air guide plates must be replaced accordingly to readjust the airflow distribution of the air supply device. This makes it difficult to adjust the airflow distribution of the air supply device. Summary of the Invention

[0004] Embodiments of the present application provide a gas supply device and semiconductor process equipment to solve the problem of how to improve the convenience of adjusting the airflow distribution of the gas supply device.

[0005] In a first aspect, an embodiment of the present application provides an air supply device.

[0006] The gas supply device provided in the embodiment of the present application is applied to semiconductor process equipment, and the gas supply device includes: an air inlet component, an air outlet component and an air flow regulating device;

[0007] The air inlet assembly is provided with a first air outlet, the air outlet assembly is provided with a first air inlet, the first air outlet is connected to the first air inlet, the air outlet assembly includes an air guide plate, the air guide plate is opposite to the first air inlet, the air guide plate is distributed with a plurality of air vents penetrating the air guide plate, and the orthographic projection of the first air outlet on the air guide plate is located in the central area of ​​the air guide plate;

[0008] The airflow adjustment device includes a deflector cover and a drive assembly, the drive assembly is connected to the deflector cover, the deflector cover is arranged at the first air outlet, and a first through hole is opened on the deflector cover, and the drive assembly is used to drive the deflector cover to move toward or away from the air guide plate to adjust the distance between the mouth wall of the first air outlet and the outer wall of the deflector cover.

[0009] Optionally, the cross-sectional size of the outer side wall of the air deflector gradually increases in the direction toward the air deflector plate, and the cross-sectional size of the inner side wall of the air deflector gradually increases in the direction toward the air deflector plate.

[0010] Optionally, the airflow adjustment device further comprises a first connecting member, a bracket and a second connecting member;

[0011] The driving assembly is connected to the first connecting member,

[0012] In a direction perpendicular to the moving direction of the air deflector, the second connecting member is spaced apart from the first connecting member by a preset distance, one end of the bracket is connected to the first connecting member, and the other end is connected to the second connecting member.

[0013] One end of the second connecting member away from the bracket is connected to the air guide cover.

[0014] Optionally, the air intake assembly includes a first shell and a second shell, the first shell is provided with a second air inlet, and a first cavity is provided between the second air inlet and the first air outlet.

[0015] The second shell is provided with a third air inlet, a second cavity and a second air outlet which are connected in sequence, and the second air outlet is sealedly connected to the second air inlet.

[0016] The bracket is accommodated in the second cavity, and is used to drive the second connecting member to move in the first cavity and the second cavity.

[0017] Optionally, the gas supply device further includes an active gas generating device, the active gas generating device is provided with a third gas outlet, and the third gas outlet is sealedly connected to the third gas inlet.

[0018] Optionally, the air intake assembly further includes an air mixing cylinder, which is disposed in the first cavity, and an air intake cavity is provided between the air mixing cylinder and the first shell.

[0019] The first shell is provided with an air intake passage communicating with the air intake cavity, the mixing cavity is provided in the mixing cylinder, and the side wall of the mixing cylinder is provided with a plurality of second through holes communicating with the air intake cavity and the mixing cavity;

[0020] The second air inlet is communicated with the air mixing chamber, the air mixing chamber is communicated with the first air outlet, and the second connecting member is disposed through the air mixing chamber.

[0021] Optionally, a third through-hole is formed on the second shell at a portion located on the side of the third air inlet, and the third through-hole is communicated with the second cavity;

[0022] The first connecting member extends into the second cavity through the third perforated portion.

[0023] The airflow regulating device further comprises a telescopic sealing sleeve, which is sleeved on the outside of the first connecting member. One end of the telescopic sealing sleeve is sealedly connected to the first connecting member, and the other end is sealedly connected to the second shell.

[0024] Optionally, the driving assembly comprises a rotating rod, an anti-rotation member and a moving member.

[0025] The rotating rod is provided with a first threaded part extending along the axial direction of the rotating rod, and the moving member is provided with a second threaded part, the first threaded part being threadedly connected with the second threaded part.

[0026] The anti-rotation member is fixedly arranged, the moving member is slidably connected with the anti-rotation member, and the moving member can slide along the axial direction of the rotating rod relative to the anti-rotation member.

[0027] The moving member is connected with the first connecting member, and the rotating rod is used to drive the moving member to slide to drive the first connecting member to move under the condition that the rotating rod is driven to rotate.

[0028] Optionally, the driving assembly further comprises a limiting seat, the rotating rod is rotationally connected with the limiting seat, and the rotating rod is limitingly connected with the limiting seat in the axial direction of the rotating rod.

[0029] Optionally, the anti-rotation member comprises a plurality of guide rods extending along the moving direction of the moving member, the moving member is provided with a plurality of sliding holes, each of the guide rods is correspondingly arranged in each of the sliding holes, and the guide rod is slidably matched with the corresponding sliding hole.

[0030] At least one of the guide rods is arranged at a plurality of positions in the moving direction of the moving member.

[0031] Optionally, one end of the bracket close to the first connecting member is threadedly connected with at least three adjusting screws, each of the adjusting screws is threadedly connected with the bracket and abuts against the end surface of the first connecting member.

[0032] The adjusting screws are used to adjust the distance between the part of the bracket provided with the adjusting screws and the end surface of the first connecting member, so as to adjust the inclination angle of the bracket relative to the end surface of the first connecting member.

[0033] In a second aspect, the embodiments of the present application provide a semiconductor process equipment.

[0034] The semiconductor process equipment provided by the embodiments of the present application comprises a cavity and any one of the gas supply devices provided by the embodiments of the present application, and the gas supply device is used to supply gas to the cavity.

[0035] The above at least one technical scheme adopted by the embodiments of the present application can achieve the following beneficial effects:

[0036] In the embodiment of the present application, when the drive assembly drives the air deflector away from the air deflector, the distance between the first air outlet wall and the outer wall of the air deflector decreases. This is equivalent to reducing the opening of the first air inlet, thereby reducing the gas flow rate delivered to the area near the periphery of the air deflector. Correspondingly, the gas flow rate delivered to the central area of ​​the air deflector can be increased.

[0037] When the drive assembly moves the air deflector toward the air deflector, the distance between the first air outlet and the outer wall of the air deflector increases. This effectively increases the opening of the first air inlet, thereby increasing the gas flow rate to the outer area of ​​the air deflector. Correspondingly, the gas flow rate to the central area of ​​the air deflector decreases.

[0038] Thus, the airflow distribution in the central area and the area near the periphery of the air guide plate can be adjusted by driving the air guide cover to move toward or away from the air guide plate, thereby facilitating the adjustment of the airflow distribution delivered by the air supply device to the cavity requiring air supply according to demand. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are only some embodiments recorded in this application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0040] Figure 1 A schematic diagram of an air supply device provided in an embodiment of the present application;

[0041] Figure 2 A front view of an air supply device provided in an embodiment of the present application;

[0042] Figure 3 A cross-sectional view of an air supply device provided in an embodiment of the present application;

[0043] Figure 4 A cross-sectional view of an air supply device provided in an embodiment of the present application, showing a situation in which the air guide cover moves away from the air guide plate to a first preset position;

[0044] Figure 5 A cross-sectional view of an air supply device provided in an embodiment of the present application, showing a situation in which the air guide cover moves toward the air guide plate to a second preset position;

[0045] Figure 6 A schematic diagram of an airflow regulating device provided in an embodiment of the present application;

[0046] Figure 7 A sectional view of an air flow adjusting device provided for an embodiment of the present application;

[0047] Figure 8 A top view of an air flow adjusting device provided for an embodiment of the present application;

[0048] Figure 9 A bottom view of an air flow adjusting device provided for an embodiment of the present application;

[0049] Figure 10 A partial schematic view of region I of the air flow adjusting device shown in FIG. 1; Figure 9 A partial schematic view of region I of the air flow adjusting device shown in FIG. 1; A partial schematic view of region I of the air flow adjusting device shown in FIG. 1;

[0050] A partial schematic view of region I of the air flow adjusting device shown in FIG. 1; Figure 11 A sectional view of a flow guide cover provided for an embodiment of the present application.

[0051] BRIEF DESCRIPTION OF DRAWINGS

[0052] 100 - air supply device; 110 - air inlet assembly; 111 - first air outlet; 112 - first housing; 113 - second housing; 1131 - third air inlet; 1132 - second cavity; 1133 - second air outlet; 1134 - third perforation; 114 - second air inlet; 115 - air mixing cylinder; 116 - air inlet cavity; 117 - air inlet passage; 118 - air mixing cavity; 120 - air outlet assembly; 121 - first air inlet; 122 - air guide plate; 123 - back plate; 124 - expansion opening; 130 - air flow adjusting device; 131 - flow guide cover; 1311 - outer sidewall; 1312 - first perforation; 1313 - inner sidewall; 132 - driving assembly; 1321 - rotating rod; 1322 - rotation preventing member; 1323 - moving member; 1324 - limiting seat; 133 - first connecting member; 134 - bracket; 1341 - adjusting screw; 1342 - fixing bolt; 135 - second connecting member; 136 - telescopic sealing sleeve; 137 - rotating handle; 140 - active gas generating device; 141 - third air outlet. DETAILED DESCRIPTION

[0053] In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described below in conjunction with specific embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0054] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections, indirect connections through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0055] In addition, although the terms used in this application are selected from well-known and commonly used terms, some terms mentioned in the specification of this application may be selected by the applicant at his or her discretion, and their detailed meanings are explained in the relevant parts of the description of this article.

[0056] Furthermore, it is required that the application be understood not only by the actual terms used but also by the meanings connoted by each term.

[0057] The following describes in detail the technical solutions provided by various embodiments of the present application in conjunction with the accompanying drawings.

[0058] The embodiment of the present application provides a gas supply device, which is applied to semiconductor process equipment. Figures 1 to 11 The air supply device 100 provided in the embodiment of the present application may include: an air inlet component 110, an air outlet component 120 and an air flow adjustment device 130.

[0059] refer to Figure 3 The air inlet assembly 110 is provided with a first air outlet 111, and the air outlet assembly 120 is provided with a first air inlet 121. The first air outlet 111 is connected to the first air inlet 121. The air outlet assembly 120 may include an air guide plate 122, which is opposite to the first air inlet 121. The air guide plate 122 has a plurality of air holes extending therethrough. The orthographic projection of the first air outlet 111 on the air guide plate 122 is located in the center area of ​​the air guide plate 122.

[0060] In this way, the gas entering the air inlet assembly 110 can be transported to the air outlet assembly 120 through the first air inlet 121 of the air outlet assembly 120 and output through the air guide plate 122 of the air outlet assembly 120. The air vents on the air guide plate 122 can be arranged as needed. For example, the air vents can be evenly arranged on the air guide plate 122 so that the air supply device 100 can evenly supply gas to the cavity requiring air supply.

[0061] The airflow regulating device 130 may include a deflector 131 and a driving assembly 132. The driving assembly 132 is connected to the deflector 131. The deflector 131 is provided at the first air outlet 111. Figure 8 、 Figure 9 and Figure 11The air guide cover is provided with a first through hole 1312 . The driving assembly 132 is used to drive the air guide cover 131 to move toward or away from the air guide plate 122 to adjust the distance between the wall of the first air outlet 111 and the outer wall 1311 of the air guide cover 131 .

[0062] In the embodiment of the present application, the first through-hole 1312 defined in the air deflector is configured to allow gas on the side of the air deflector facing away from the air deflector plate 122 to be transported through the first through-hole 1312 to the side of the air deflector 131 near the air deflector plate 122. In other words, the first through-hole 1312 communicates with the space enclosed by the inner sidewall. Consequently, gas on the side of the air deflector facing away from the air deflector plate 122 can be transported through the first through-hole 1312 to the side of the air deflector 131 near the air deflector plate 122. Furthermore, the gas can be discharged through the central area of ​​the air deflector plate 122.

[0063] refer to Figure 4 When the drive assembly 132 drives the air deflector 131 away from the air deflector 122, the distance between the first air outlet 111 and the outer wall 1311 of the air deflector 131 decreases. This effectively reduces the opening of the first air inlet 121, thereby reducing the gas flow rate to the area near the periphery of the air deflector 122. Accordingly, the gas flow rate to the central area of ​​the air deflector 122 can be increased.

[0064] refer to Figure 5 When the drive assembly 132 drives the air deflector 131 toward the air deflector plate 122, the distance between the first air outlet 111 and the outer wall 1311 of the air deflector 131 increases. This effectively increases the opening of the first air inlet 121, thereby increasing the gas flow rate to the area near the periphery of the air deflector plate 122. Accordingly, the gas flow rate to the central area of ​​the air deflector plate 122 is reduced.

[0065] In this way, the airflow distribution in the central area and the area near the periphery of the air guide plate 122 can be adjusted by driving the air guide cover 131 to move toward or away from the air guide plate 122. This facilitates adjusting the airflow distribution delivered to the cavity requiring air supply by the air supply device 100 as needed.

[0066] Furthermore, while the air guide plate replacement scheme employed in related art requires opening the cavity during replacement, this process can introduce contaminants from the outside. The air supply device 100 provided in this embodiment of the present application allows the airflow distribution delivered to the cavity requiring air supply to be adjusted as needed without opening the cavity, thus preventing the introduction of contaminants compared to related art solutions.

[0067] For example, in the first process state, the edge area of ​​the cavity requires a smaller gas flow rate, while the middle area of ​​the cavity requires a larger gas flow rate, and the flow guide cover 131 can be driven to move to the first preset position in a direction away from the gas guide plate 122. In the second process state, the edge area of ​​the cavity requires a larger gas flow rate, while the middle area of ​​the cavity requires a smaller gas flow rate, and the flow guide cover 131 can be driven to move to the second preset position in a direction close to the gas guide plate 122.

[0068] Optionally, refer to Figure 11 The first through-hole 1312 can be provided at the end of the air deflector 131 away from the air deflector plate 122. Of course, in other embodiments, the first through-hole 1312 can also be provided on the sidewall of the air deflector 131. The embodiment of the present application does not limit the location of the first through-hole 1312, as long as the first through-hole 1312 can transport gas from the side of the air deflector away from the air deflector plate 122 to the side of the air deflector 131 closer to the air deflector plate 122.

[0069] refer to Figure 11 In the embodiment of the present application, the cross-sectional dimensions of the outer sidewall 1311 of the air deflector 131 gradually increase in the direction toward the air guide plate 122, and the cross-sectional dimensions of the inner sidewall 1313 of the air deflector 131 gradually increase in the direction toward the air guide plate 122. For example, the outer sidewall 1311 of the air deflector 131 may be a tapered surface that is larger at the top and smaller at the bottom, and the inner sidewall 1313 of the air deflector 131 may also be a tapered surface that is larger at the top and smaller at the bottom.

[0070] refer to Figure 6 and Figure 7 In some embodiments, the airflow adjustment device 130 may further include a first connecting member 133 , a bracket 134 , and a second connecting member 135 .

[0071] The drive assembly 132 is connected to the first connector 133. The second connector 135 is spaced a predetermined distance apart from the first connector 133 in a direction perpendicular to the direction of movement of the air scoop 131. A bracket 134 is connected to the first connector 133 at one end and to the second connector 135 at the other end. The end of the second connector 135, distal from the bracket 134, is connected to the air scoop 131. For example, the bracket 134 may extend in a direction perpendicular to the direction of movement of the air scoop 131. The first connector 133 and the second connector 135 may be located on either side of the bracket 134.

[0072] In this way, the driving assembly 132 can be located on the side of the air deflector 131 , which can prevent the driving assembly 132 from blocking the gas passage on the side of the air deflector 131 away from the air guide plate 122 .

[0073] refer to Figure 1 and Figure 3In some embodiments, the air intake assembly 110 may include a first housing 112 and a second housing 113 . The first housing 112 defines a second air inlet 114 , and a first cavity is defined between the second air inlet 114 and the first air outlet 111 .

[0074] refer to Figure 5 The second housing 113 is provided with a third air inlet 1131, a second cavity 1132, and a second air outlet 1133, which are sequentially connected. The second air outlet 1133 is sealed with the second air inlet 114. The bracket 134 is accommodated in the second cavity 1132 and is used to drive the second connecting member 135 to move within the first cavity and the second cavity 1132.

[0075] In this way, the driving assembly 132 can be used to drive the first connecting member 133 to move, and then the first connecting member 133 drives the bracket 134 and the second connecting member 135 to move, and finally drives the air guide cover 131 to move toward or away from the air guide plate 122.

[0076] It should be noted that, illustratively, a first annular groove may be defined on the end surface of the second housing 113 facing the first housing 112, and a first sealing ring may be disposed in the first annular groove. The first sealing ring may be sandwiched between the bottom of the first annular groove and the first housing 112. Thus, by sandwiching the first sealing ring between the second housing 113 and the first housing 112, the second air outlet 1133 can be sealedly connected to the second air inlet 114 of the air intake assembly 110.

[0077] refer to Figure 5 In some embodiments, the gas supply device 100 may further include a reactive gas generator 140. For example, the reactive gas generator 140 may be an RPS (Remote Plasma Source). The reactive gas generator 140 may include a third gas outlet 141 , which is sealedly connected to the third gas inlet 1131 .

[0078] refer to Figure 1 and Figure 5 For example, the third air outlet 141 and the third air inlet 1131 can be sealed by a clamp. For example, the clamp can include a clamp body and a second sealing ring. The clamp body can press the second sealing ring onto the joint between the third air outlet 141 and the third air inlet 1131.

[0079] refer to Figure 4In some embodiments, the air intake assembly 110 may further include an air mixing cylinder 115. The air mixing cylinder 115 is disposed in the first cavity. An air intake chamber 116 is provided between the air mixing cylinder 115 and the first shell 112. The first shell 112 is provided with an air intake channel 117 connected to the air intake chamber 116. An air mixing chamber 118 is provided in the air mixing cylinder 115. The side wall of the air mixing cylinder 115 is provided with a plurality of second through-holes connecting the air intake chamber 116 and the air mixing chamber 118. The second air inlet 114 is connected to the air mixing chamber 118, and the air mixing chamber 118 is connected to the first air outlet 111. The second connecting member 135 is provided in the air mixing chamber 118.

[0080] Thus, for example, the first process gas can be delivered to the reactive gas generator 140, which can deliver the reactive gas containing free radicals to the gas mixing chamber 118. Furthermore, the second process gas can be introduced into the gas inlet chamber 116 via the gas inlet passage 117. The second process gas can be delivered to the gas mixing chamber 118 via the second perforation in the sidewall of the gas mixing cylinder 115. Thus, the reactive gas containing free radicals can be mixed with the second process gas and then output through the gas guide plate 122.

[0081] In some embodiments, the first housing 112 can be formed by splicing a first sub-housing and a second sub-housing, and a third sealing ring can be sandwiched between the first sub-housing and the second sub-housing, so that the first sub-housing and the second sub-housing are sealed together by the third sealing ring. In this way, the mixing cylinder 115 can be easily placed in the first cavity.

[0082] refer to Figure 4 In some embodiments, a third through-hole 1134 is formed in the second housing 113 at a location lateral to the third air inlet 1131 , and the third through-hole 1134 communicates with the second cavity 1132 . The first connecting member 133 partially extends into the second cavity 1132 through the third through-hole 1134 .

[0083] Combine Figure 6 and Figure 7 The airflow adjustment device 130 may include a telescopic sealing sleeve 136 , which is sleeved outside the first connecting member 133 , with one end of the telescopic sealing sleeve 136 sealed to the first connecting member 133 , and the other end of the telescopic sealing sleeve 136 sealed to the second shell 113 .

[0084] For example, the telescopic sealing sleeve 136 may include a sleeve and an end plate that are sealed together. The sleeve is positioned over the first connector 133, with the side of the sleeve facing away from the end plate being sealed to the first connector 133. A second annular groove is defined on the side of the end plate facing away from the sleeve, and a fourth sealing ring may be disposed in the second annular groove. The fourth sealing ring may be sandwiched between the bottom of the second annular groove and the second housing 113. Thus, by sandwiching the fourth sealing ring between the end plate and the second housing 113, the telescopic sealing sleeve 136 and the second housing 113 are sealed together.

[0085] In order to enable those skilled in the art to better understand the solution provided in the embodiments of the present application, a more specific drive component is provided below for reference by those skilled in the art.

[0086] refer to Figure 6 and Figure 7 In some embodiments, the driving assembly 132 may include a rotating rod 1321, an anti-rotation member 1322, and a moving member 1323. The rotating rod 1321 is provided with a first threaded portion extending along its own axial direction, and the moving member 1323 is provided with a second threaded portion, and the first threaded portion is threadedly connected to the second threaded portion. The anti-rotation member 1322 is fixedly arranged. For example, the anti-rotation member 1322 can be fixed to the air intake assembly 110. In the case where the air intake assembly 110 includes a second shell 113, the anti-rotation member 1322 can be fixed to the second shell 113.

[0087] The moving member 1323 is slidably connected to the anti-rotation member 1322. The moving member 1323 can slide relative to the anti-rotation member 1322 along the axis of the rotating rod 1321. The moving member 1323 is connected to the first connecting member 133. When the rotating rod 1321 is subjected to a rotational driving force, the rotating rod 1321 is used to drive the moving member 1323 to slide, thereby driving the first connecting member 133 to move.

[0088] In this way, the moving member 1323 can be driven to move by rotating the rotating rod 1321 , and the moving member 1323 can then be used to drive the air deflector 131 to move.

[0089] refer to Figure 6 and Figure 7 In some embodiments, the drive assembly 132 may further include a limit seat 1324. The rotating rod 1321 is rotatably connected to the limit seat 1324, and the rotating rod 1321 is connected to the limit seat 1324 for limiting its own axial direction. For example, the limit seat 1324 may be fixedly connected to the anti-rotation member 1322. In this way, the limit seat 1324 can be used to limit the rotating rod 1321 during rotation, thereby preventing the rotating rod 1321 from moving along its axial direction during rotation.

[0090] Of course, in other embodiments of the present application, other methods may be used to prevent the rotating rod 1321 from moving along the axis of the rotating rod 1321 during the rotation process, which will not be described in detail here.

[0091] refer to Figure 6In some embodiments, the anti-rotation member 1322 may include multiple guide rods extending along the direction of movement of the movable member 1323. The movable member 1323 is provided with multiple sliding holes, and each guide rod is correspondingly inserted into each sliding hole, and the guide rods slideably engage with the corresponding sliding holes. In this way, the guide rods can be slidably connected to the sliding holes of the movable member 1323 to prevent the movable member 1323 from rotating.

[0092] In some embodiments, at least one guide rod is provided with a plurality of position marks at intervals along the moving direction of the moving member 1323. In this way, it is convenient to judge the displacement of the moving member 1323 by observing the position marks, and thus it is convenient to determine the position of the air deflector 131.

[0093] refer to Figures 6 to 8 In some embodiments, the driving assembly 132 may further include a rotating handle 137, which is connected to the rotating rod 1321. Thus, by driving the rotating handle 137 to rotate, the rotating rod 1321 can be driven to rotate, and finally the air deflector 131 can be driven to move.

[0094] Of course, in other embodiments, the drive assembly 132 may also include a device capable of outputting a linear driving force, such as a linear motor, a pneumatic cylinder, or a hydraulic cylinder. For example, the drive assembly 132 may also include a device capable of outputting a rotational driving force, such as a rotary motor, a pneumatic motor, or a hydraulic motor, and a transmission mechanism capable of converting rotary motion into linear drive, such as a lead screw thread transmission mechanism. The embodiments of the present application do not limit the specific structure of the drive assembly 132; it is sufficient that the drive assembly 132 is capable of driving the air deflector 131 to move.

[0095] refer to Figure 9 and Figure 10 In some embodiments, at least three adjustment screws 1341 are threadedly connected to one end of the bracket 134 near the first connecting member 133. Each adjustment screw 1341 is threadedly connected to the bracket 134 and abuts against the end surface of the first connecting member 133. The adjustment screws 1341 are used to adjust the distance between the portion of the bracket 134 where the adjustment screws 1341 are provided and the end surface of the first connecting member 133, thereby adjusting the inclination angle of the bracket 134 relative to the end surface of the first connecting member 133.

[0096] Thus, for example, the bracket 134 can be adjusted to a horizontal state by screwing the adjustment screw 1341. Furthermore, the bracket 134 can be fixed to the first connecting member 133 using a fixing bolt 1342.

[0097] refer to Figure 3In some embodiments, a back plate 123 is provided on the side of the air outlet assembly 120 facing the air guide plate 122. The first air inlet 121 is provided on the back plate 123. An expansion opening 124 is provided on the side of the back plate 123 facing the air guide plate 122. The sidewalls of the expansion opening 124 surround the periphery of the first air inlet 121, and the opening of the expansion opening 124 gradually increases in size as it moves toward the air guide plate 122. This allows the gas delivered to the air outlet assembly 120 via the first air outlet 111 to be better delivered to the area near the periphery of the air guide plate 122.

[0098] In some embodiments, a third annular groove may be formed on the end surface of the air outlet assembly 120 opposite the air inlet assembly 110, and a fifth sealing ring may be disposed in the third annular groove. The fifth sealing ring may be sandwiched between the bottom of the third annular groove and the air inlet assembly 110. Thus, by sandwiching the fifth sealing ring between the air outlet assembly 120 and the air inlet assembly 110, the air inlet assembly 110 can be sealedly connected to the air inlet assembly 110.

[0099] The embodiment of the present application provides a semiconductor process equipment, which may include a chamber and any one of the gas supply devices 100 provided in the embodiment of the present application, and the gas supply device 100 is used to supply gas to the chamber.

[0100] In this way, the airflow distribution in the central area and the area near the periphery of the air guide plate 122 can be adjusted by driving the air guide cover 131 to move toward or away from the air guide plate 122. This facilitates adjusting the airflow distribution delivered to the cavity by the air supply device 100 as needed.

[0101] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0102] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the embodiments of the present application, and the scope of the embodiments of the present application is defined by the appended claims and their equivalents.

Claims

1. A gas supply device, used in semiconductor process equipment, characterized in that: include: An air inlet assembly (110), an air outlet assembly (120) and an air flow regulating device (130); The air inlet assembly (110) is provided with a first air outlet (111), the air outlet assembly (120) is provided with a first air inlet (121), the first air outlet (111) and the first air inlet (121) are connected to each other, the air outlet assembly (120) comprises an air guide plate (122), the air guide plate (122) is opposite to the first air inlet (121), the air guide plate (122) is distributed with a plurality of air holes penetrating the air guide plate (122), and the orthographic projection of the first air outlet (111) on the air guide plate (122) is located in the central area of ​​the air guide plate (122); The airflow regulating device (130) comprises a deflector (131) and a driving assembly (132), wherein the driving assembly (132) is drivingly connected to the deflector (131), the deflector (131) is arranged at the first air outlet (111), and a first through-hole (1312) is provided on the deflector, and the driving assembly (132) is used to drive the deflector (131) to move toward or away from the air guide plate (122), so as to adjust the distance between the mouth wall of the first air outlet (111) and the outer side wall (1311) of the deflector (131).

2. The air supply device according to claim 1, characterized in that The cross-sectional dimensions of the outer side wall (1311) of the air deflector (131) gradually increase in the direction toward the air deflector plate (122), and the cross-sectional dimensions of the inner side wall (1313) of the air deflector (131) gradually increase in the direction toward the air deflector plate (122).

3. The air supply device according to claim 1, characterized in that The airflow regulating device (130) further includes a first connecting member (133), a bracket (134) and a second connecting member (135); The driving assembly (132) is connected to the first connecting member (133), In a direction perpendicular to the moving direction of the air deflector (131), the second connecting member (135) is spaced apart from the first connecting member (133) by a preset distance, one end of the bracket (134) is connected to the first connecting member (133), and the other end is connected to the second connecting member (135). One end of the second connecting member (135) away from the bracket (134) is connected to the air guide cover (131).

4. The air supply device according to claim 3, characterized in that: The air intake assembly (110) comprises a first shell (112) and a second shell (113), wherein the first shell (112) is provided with a second air intake (114), and a first cavity is provided between the second air intake (114) and the first air outlet (111). The second shell (113) is provided with a third air inlet (1131), a second cavity (1132) and a second air outlet (1133) which are connected in sequence, and the second air outlet (1133) is sealedly connected to the second air inlet (114). The bracket (134) is accommodated in the second cavity (1132), and the bracket (134) is used to drive the second connecting member (135) to move in the first cavity and the second cavity (1132).

5. The air supply device according to claim 4, characterized in that: The gas supply device further comprises an active gas generating device (140), wherein the active gas generating device (140) is provided with a third gas outlet (141), and the third gas outlet (141) is sealedly connected to the third gas inlet (1131).

6. The air supply device according to claim 4, characterized in that The air intake assembly (110) further includes an air mixing cylinder (115), wherein the air mixing cylinder (115) is disposed in the first cavity, and an air intake cavity (116) is provided between the air mixing cylinder (115) and the first housing (112). The first shell (112) is provided with an air intake passage (117) communicating with the air intake chamber (116); a mixing chamber (118) is provided in the mixing cylinder (115); and a side wall of the mixing cylinder (115) is provided with a plurality of second through holes communicating with the air intake chamber (116) and the mixing chamber (118); The second air inlet (114) is in communication with the air mixing chamber (118), the air mixing chamber (118) is in communication with the first air outlet (111), and the second connecting member (135) is disposed through the air mixing chamber (118).

7. The air supply device according to claim 4, characterized in that A third through-hole (1134) is provided on the side of the second shell (113) and the third air inlet (1131), and the third through-hole (1134) is in communication with the second cavity (1132); The first connecting member (133) partially extends into the second cavity (1132) through the third through-hole (1134). The airflow regulating device (130) further comprises a telescopic sealing sleeve (136), which is sleeved outside the first connecting member (133), one end of the telescopic sealing sleeve (136) being sealedly connected to the first connecting member (133), and the other end of the telescopic sealing sleeve (136) being sealedly connected to the second housing (113).

8. The air supply device according to claim 3, characterized in that The driving assembly (132) includes a rotating rod (1321), an anti-rotation component (1322) and a moving component (1323); The rotating rod (1321) is provided with a first threaded portion extending along its own axial direction, and the moving member (1323) is provided with a second threaded portion, and the first threaded portion is threadedly connected to the second threaded portion. The anti-rotation part (1322) is fixedly arranged, the moving part (1323) is slidably connected to the anti-rotation part (1322), and the moving part (1323) can slide relative to the anti-rotation part (1322) along the axis direction of the rotating rod (1321). The moving member (1323) is connected to the first connecting member (133). When the rotating rod (1321) is subjected to a rotational driving force, the rotating rod (1321) is used to drive the moving member (1323) to slide, thereby driving the first connecting member (133) to move.

9. The air supply device according to claim 8, characterized in that: The driving assembly (132) further comprises a limit seat (1324), the rotating rod (1321) is rotatably connected to the limit seat (1324), and the rotating rod (1321) is connected to the limit seat (1324) in an upper limit position in its own axial direction.

10. The air supply device according to claim 8, characterized in that The anti-rotation member (1322) includes a plurality of guide rods extending along the moving direction of the moving member (1323), the moving member (1323) is provided with a plurality of sliding holes, each of the guide rods is correspondingly inserted into each of the sliding holes, and the guide rods are slidably engaged with the corresponding sliding holes; At least one of the guide rods is provided with a plurality of position marks at intervals along the moving direction of the moving member (1323).

11. The air supply device according to claim 3, characterized in that: At least three adjusting screws (1341) are threadedly connected to one end of the bracket (134) close to the first connecting member (133), and each adjusting screw (1341) is threadedly connected to the bracket (134) and abuts against the end surface of the first connecting member (133). The adjusting screw (1341) is used to adjust the distance between the portion of the bracket (134) where the adjusting screw (1341) is provided and the end face of the first connecting member (133), so as to adjust the inclination angle of the bracket (134) relative to the end face of the first connecting member (133).

12. A semiconductor process equipment, characterized in that: It comprises a cavity and the gas supply device according to any one of claims 1 to 11; the gas supply device is used to supply gas to the cavity.

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