Galvanometer correction method, device, laser processing equipment and storage medium

Abstract

The present invention discloses a galvanometer correction method, device, laser processing equipment and storage medium, comprising obtaining a first distance data set of N*M light spot landing points of a target laser processing equipment in a plane and a corresponding first galvanometer deflection data set; determining a second galvanometer deflection data set from the first galvanometer deflection data set, taking the first galvanometer deflection data set as a node with a known position, taking the second galvanometer deflection data set as a node with a position to be solved, determining the corresponding first natural neighbor point data set and a first weight data set based on a natural neighbor point interpolation method, taking the first distance data set as a node with a known position, performing natural neighbor point interpolation calculation according to the first distance data set, the first natural neighbor point data set and the first weight data set, determining the distance data of the node to be solved, combining the second galvanometer deflection data set and the second distance data set to form a first galvanometer correction table, and the galvanometer component can be corrected by the first galvanometer correction table.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a galvanometer correction method, device, laser processing equipment and storage medium. Background Art

[0002] The galvanometer assembly is one of the components of the laser processing equipment, which is mainly used to change the position of the laser spot so that the laser can scan within a certain area. The galvanometer assembly includes an X-axis galvanometer and a Y-axis galvanometer. The cooperation of the X-axis galvanometer and the Y-axis galvanometer enables the spot to scan within a certain area of ​​the XY plane. However, the galvanometer assembly has scanning distortion, which causes a deviation between the position of the spot and the expected position. Therefore, the galvanometer assembly needs to be corrected. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a galvanometer correction method, device, laser processing equipment and storage medium, which can generate a correction table for correcting the galvanometer assembly through the correction table.

[0004] On the one hand, an embodiment of the present invention provides a galvanometer calibration method, comprising:

[0005] Acquire a first distance data set and a corresponding first galvanometer deflection data set of N*M light spot landing points of a target laser processing device in a plane, wherein the first distance data set and the first galvanometer deflection data set both include X-dimensional data and Y-dimensional data, and N and M are both positive integers;

[0006] respectively determining a first maximum deflection range of X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set;

[0007] Based on a preset granularity, a plurality of node data are determined within the first maximum deflection range and the second maximum deflection range to obtain a second galvanometer deflection data set;

[0008] Based on the natural neighbor interpolation method, determining a first natural neighbor data set and a first weight data set corresponding to the second galvanometer deflection data set according to the first galvanometer deflection data set;

[0009] Perform natural neighbor point interpolation calculation according to the first distance data set, the first natural neighbor point data set, and the first weight data set to determine a second distance data set;

[0010] The second galvanometer deflection data set and the second distance data set are combined into a first galvanometer correction table.

[0011] According to some embodiments of the present invention, obtaining a first distance data set of N*M light spot landing points of a target laser processing device in a plane and a corresponding first galvanometer deflection data set includes:

[0012] Based on the preset deflection interval, the X-axis galvanometer and the Y-axis galvanometer are respectively controlled to deflect sequentially within the preset deflection range, so as to perform laser dotting in the plane to form N*M light spot landing points;

[0013] Record each deflection data of the X-axis galvanometer and the Y-axis galvanometer during the deflection process to obtain the first galvanometer deflection data set;

[0014] Based on the image acquisition method, the X-axis distance and Y-axis distance of each light spot relative to the coordinate origin are obtained and determined according to the image where the light spot falls, so as to obtain the first distance data set.

[0015] According to some embodiments of the present invention, respectively determining a first maximum deflection range of X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set comprises:

[0016] Determining a first minimum value and a first maximum value according to the X-dimensional data of the first galvanometer deflection data set;

[0017] determining a first maximum deflection range according to the first minimum value and the first maximum value;

[0018] Determining a second minimum value and a second maximum value according to the Y dimension data of the first galvanometer deflection data set;

[0019] A second maximum deflection range is determined based on the second minimum value and the second maximum value.

[0020] According to some embodiments of the present invention, determining a plurality of node data within the first maximum deflection range and the second maximum deflection range based on a preset granularity to obtain a second galvanometer deflection data set includes:

[0021] Divide the first maximum deflection range into N*k1 parts to obtain a plurality of first dimension data;

[0022] Divide the second maximum deflection range into M*k2 parts to obtain a plurality of second dimensional data, where k1 and k2 are both positive integers;

[0023] A plurality of node data are determined according to the first dimensional data and the second dimensional data to obtain a second galvanometer deflection data set.

[0024] According to some embodiments of the present invention, the natural neighbor interpolation method is based on the first galvanometer deflection data set to determine the first natural neighbor data set and the first weight data set corresponding to the second galvanometer deflection data set, including:

[0025] Based on the natural neighbor interpolation method, generating a first Voronoi diagram data matrix according to the first galvanometer deflection data set;

[0026] Based on the natural neighbor interpolation method, generating a second Voronoi diagram data matrix according to the second galvanometer deflection data set;

[0027] Insert the second Voronoi diagram data matrix into the first Voronoi diagram data matrix and determine a first natural neighbor data set and a first weight data set.

[0028] According to some embodiments of the present invention, the step of combining the second galvanometer deflection data set and the second distance data set into a first galvanometer correction table further includes:

[0029] respectively determining a first maximum distance range of the X-dimensional data of the first distance data set and a second maximum distance range of the Y-dimensional data of the first distance data set;

[0030] Based on a preset granularity, determining a plurality of node data within the first maximum distance range and the second maximum distance range to obtain a third distance data set;

[0031] Based on the natural neighbor interpolation method, determining a second natural neighbor data set and a second weight data set corresponding to the third distance data set according to the first distance data set;

[0032] Performing natural neighbor point interpolation calculation according to the first galvanometer deflection data set, the second natural neighbor point data set and the second weight data set to determine a third galvanometer deflection data set;

[0033] The third galvanometer deflection data set and the third distance data set are combined into a second galvanometer correction table.

[0034] According to some embodiments of the present invention, the step of combining the third galvanometer deflection data set and the third distance data set into a second galvanometer correction table further includes:

[0035] The accuracy verification is performed according to the first galvanometer correction table and the second galvanometer correction table.

[0036] In a second aspect, an embodiment of the present invention provides a galvanometer correction device, comprising:

[0037] An input module is used to obtain a first distance data set and a corresponding first galvanometer deflection data set of N*M light spot landing points of a target laser processing device in a plane, wherein the first distance data set and the first galvanometer deflection data set both include X-dimensional data and Y-dimensional data, and N and M are both positive integers;

[0038] A first determination module, used to respectively determine a first maximum deflection range of X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set;

[0039] a second determination module, configured to determine a plurality of node data within the first maximum deflection range and the second maximum deflection range based on a preset granularity, to obtain a second galvanometer deflection data set;

[0040] A third determination module is used to determine a first natural neighbor point data set and a first weight data set corresponding to the second galvanometer deflection data set based on the first galvanometer deflection data set based on a natural neighbor point interpolation method;

[0041] a fourth determination module, configured to perform natural neighbor point interpolation calculation according to the first distance data set, the first natural neighbor point data set, and the first weight data set to determine a second distance data set;

[0042] A synthesis module is used to combine the second galvanometer deflection data set and the second distance data set into a first galvanometer correction table.

[0043] In a third aspect, an embodiment of the present invention provides a laser processing device, including a processor and a memory, wherein a correction table is stored in the memory, and the correction table is obtained by the above-mentioned galvanometer correction method.

[0044] In a fourth aspect, an embodiment of the present invention provides a storage medium, wherein a correction table is stored in the storage medium, and the correction table is obtained by the above-mentioned galvanometer correction method.

[0045] The embodiments of the present invention have at least the following beneficial effects:

[0046] The first galvanometer deflection data set is taken as a node with a known position, and the second galvanometer deflection data set is taken as a node with a position to be solved. Based on the natural neighbor interpolation method, the corresponding first natural neighbor data set and the first weight data set are determined. The first distance data set is taken as a node with a known position. Natural neighbor interpolation calculation is performed based on the first distance data set, the first natural neighbor data set and the first weight data set to determine the distance data of the node to be solved. The second galvanometer deflection data set and the second distance data set are combined into a first galvanometer correction table, and the galvanometer assembly can be calibrated by the first galvanometer correction table.

[0047] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0049] Figure 1 A schematic diagram of a galvanometer assembly of a laser processing device according to an embodiment of the present invention;

[0050] Figure 2 A flowchart of the steps of the galvanometer calibration method according to an embodiment of the present invention;

[0051] Figure 3 The Voronoi diagram containing six data points for the related art;

[0052] Figure 4 is a principle block diagram of a galvanometer correction device according to an embodiment of the present invention;

[0053] Figure 5 This is a principle block diagram of the laser processing equipment according to an embodiment of the present invention.

[0054] Reference numerals:

[0055] Galvanometer motor 101 , galvanometer lens 102 , X-axis galvanometer 110 , Y-axis galvanometer 120 , input module 210 , first determination module 220 , second determination module 230 , third determination module 240 , fourth determination module 250 , synthesis module 260 , processor 310 , memory 320 . DETAILED DESCRIPTION

[0056] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0057] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0058] In the description of the present invention, "several" means one or more, "multiple" means more than two, greater than, less than, and exceeding are understood as not including the number itself, and "above", "below", and "within" are understood as including the number itself. If there is a description of "first", "second", etc., it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0059] In the description of the present invention, unless otherwise clearly defined, words such as “setting”, “installation” and “connection” should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above words in the present invention based on the specific content of the technical solution.

[0060] Please refer to Figure 1 The galvanometer assembly of the laser processing equipment drives the galvanometer lens 102 to reflect the laser through the galvanometer motor 101, so that the laser focus is on the XY plane (such as Figure 1 The galvanometer motor 101 is different from ordinary motors. The galvanometer motor 101 has a very small inertia and a very small load during movement. The galvanometer motor 101 is used to drive the galvanometer lens 102 to swing repeatedly within a certain angle range. The working principle of the galvanometer motor 101 is to use an energized coil to generate a torque in a magnetic field to move, but unlike ordinary motors, the rotor of the galvanometer motor 101 is applied with a reset torque through a mechanical torsion spring or electronic control method, and the magnitude of the torque is proportional to the angle at which the rotor deviates from the equilibrium position. When a certain current is passed through the coil and the rotor deflects to a certain angle, the electromagnetic torque is equal to the reset torque. Therefore, the galvanometer motor 101 cannot rotate 360° like an ordinary motor, but can only deflect to a certain angle. The deflection angle is proportional to the current, similar to an ammeter. Therefore, the galvanometer is also called a galvanometer scanning galvanometer, or scanning galvanometer for short.

[0061] The galvanometer assembly in the laser processing equipment usually includes an X-axis galvanometer 110 and a Y-axis galvanometer 120. The cooperation between the X-axis galvanometer 110 and the Y-axis galvanometer 120 enables the light spot to perform scanning movement within a certain area of ​​the XY plane. Generally speaking, the X-axis galvanometer 110 and the Y-axis galvanometer 120 are driven by a galvanometer motor 101 with the same performance. Therefore, the maximum deflection angle of the X-axis galvanometer 110 and the Y-axis galvanometer 120 is the same, and the maximum scanning area of ​​the galvanometer assembly (such as Figure 1The scanning area is usually a square (as shown by the mark F). Ideally, the deflection angle of each precision unit of the galvanometer assembly corresponds to the coordinate position of each precision unit in the square scanning area. However, due to the scanning distortion of the galvanometer assembly, there is a deviation between the position of the laser spot and the expected position, that is, the shape of the maximum scanning area of ​​the galvanometer assembly is a deformed square. Therefore, the galvanometer assembly needs to be calibrated.

[0062] Please refer to Figure 2 This embodiment discloses a galvanometer calibration method, including S100 to S600. It should be noted that the steps in this embodiment are numbered only for the convenience of review and understanding, rather than limiting the execution order of the steps. In practical applications, adaptive adjustments can be made according to the logical relationship between the steps.

[0063] Before describing in detail the various steps of the galvanometer correction method of this embodiment, the inventive concept of this embodiment is first described. The deflection of the galvanometer assembly can control the position of the laser spot in the XY plane. Therefore, regardless of whether the galvanometer assembly has scanning distortion, the deflection angle of the galvanometer assembly and the coordinates of the spot in the XY plane (or the distance relative to the origin) have a mapping relationship, that is, the distance of the spot in the XY plane relative to the origin can be determined by the deflection angle of the galvanometer assembly. Conversely, the deflection angle of the galvanometer assembly can be inferred from the distance of the spot in the XY plane relative to the origin. In this way, the mapping relationship between the deflection angle of the galvanometer assembly and the distance of the spot in the XY plane relative to the origin can be formed into a correction table. Then, when the laser processing equipment is running, when the target position of the spot is known, the deflection angle of the galvanometer assembly corresponding to the target position can be determined by looking up the correction table, ensuring that the deflection of the galvanometer assembly can make the laser spot appear at the target position, thereby achieving the purpose of correcting the galvanometer assembly. Based on this, the correction table becomes a key technology for galvanometer correction. The deflection angle of the galvanometer assembly can be controlled manually, and the laser spot needs to be collected by laser dotting. However, the number of collected spot points is limited, which makes it difficult to meet the calibration accuracy requirements. Therefore, this embodiment determines the galvanometer deflection data with a smaller granularity, and interpolates the distance data of the collected spot points relative to the origin in the XY plane based on the natural neighbor interpolation method to obtain distance data with a smaller granularity, which is conducive to improving the accuracy of the correction table, thereby calibrating the galvanometer assembly.

[0064] The following is a detailed description of each step:

[0065] S100, obtaining a first distance data set and a corresponding first galvanometer deflection data set of N*M light spot landing points of a target laser processing device in a plane, wherein the first distance data set and the first galvanometer deflection data set both include X-dimensional data and Y-dimensional data, and N and M are both positive integers;

[0066] Exemplarily, the target laser processing equipment is the equipment where the galvanometer assembly to be corrected is located, and the galvanometer assembly in the equipment may have scanning distortion or no scanning distortion. The target laser processing equipment generates laser light, and after being reflected by the galvanometer assembly, it can form a light spot landing point in the XY plane. According to actual needs, the position data of N*M light spot landing points in the XY plane can be collected. Usually, the values ​​of N and M are the same. Of course, according to actual application requirements, the values ​​of N and M may be different. The deflection of the galvanometer assembly can control the position of the light spot landing point, and each light spot landing point has a corresponding galvanometer deflection angle, so the first galvanometer deflection data set can be recorded. It is worth mentioning that the larger the values ​​of N and M, the higher the precision and accuracy of the correction table obtained by interpolation compensation (such as the first galvanometer correction table below), but in actual applications, the amount of calculated data needs to be considered to meet the requirements of calculation efficiency. In addition, since the deflection of the galvanometer assembly is controlled by current, the deflection angle of the galvanometer assembly can be indirectly represented by a pulse control signal. For the current of the pulse control signal, bit can be used as the measurement unit of the pulse control signal, and the distance data uses nm (nanometer) as the measurement unit. The example format of the first distance data set and the first galvanometer deflection data set is shown in Table 1:

[0067]

[0068] Table 1

[0069] It should be noted that the deflection angle of the galvanometer assembly is proportional to the current, and therefore the first galvanometer deflection data set can also be converted into data in angle units.

[0070] S200, respectively determining a first maximum deflection range of X-dimensional data of a first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set;

[0071] Exemplarily, the galvanometer assembly repeatedly swings within a certain angle range, and the maximum deflection range can be determined based on the collected first galvanometer deflection data set. Since the galvanometer assembly includes an X-axis galvanometer and a Y-axis galvanometer, the maximum deflection range of the X-axis galvanometer can be determined based on the X-dimensional data of the first galvanometer deflection data set, that is, the first maximum deflection range. Similarly, the maximum deflection range of the Y-axis galvanometer can be determined based on the Y-dimensional data of the second galvanometer deflection data set, that is, the second maximum deflection range.

[0072] S300, based on a preset granularity, determining a plurality of node data within a first maximum deflection range and a second maximum deflection range to obtain a second galvanometer deflection data set;

[0073] Exemplarily, for the galvanometer assembly, regardless of whether there is scanning distortion, the galvanometer assembly can be deflected according to a predetermined step size. The difference is that if there is scanning distortion in the galvanometer assembly, the position of the light spot landing point relative to the origin in the XY plane will be offset at the same deflection angle of the galvanometer assembly. In order to obtain a correction table with a smaller granularity, the first maximum deflection range and the second maximum deflection range can be divided to obtain multiple nodes, and a second galvanometer deflection data set can be obtained based on the node data of the multiple nodes. Among them, the granularity of the second galvanometer deflection data set is smaller than that of the first galvanometer deflection data set. In this embodiment, the granularity is used to characterize the difference between adjacent node data in the same dimension. Assuming that the number of nodes is N'*M', N'>N, M'>M, the format example of the second galvanometer deflection data set is shown in Table 2:

[0074]

[0075] Table 2

[0076] S400, based on a natural neighbor interpolation method, determining a first natural neighbor data set and a first weight data set corresponding to a second galvanometer deflection data set according to a first galvanometer deflection data set;

[0077] For example, the Natural Neighbor Interpolation method is an interpolation method based on the Delaunay triangulation and the Voronoi diagram. The Delaunay triangulation and the Voronoi diagram are dual figures. In each triangle in the Delaunay triangulation, the corresponding perpendicular bisector is drawn for each side to obtain the Voronoi diagram. The Voronoi diagram is a commonly used unstructured network that can divide the plane where the data points are located into several polygons, each of which contains only one data point. Figure 3 As shown in the figure, a Voronoi diagram containing six data points is shown. The dotted line in the figure shows the Delaunay triangulation, and the solid line shows the Voronoi diagram. Each grid unit divided by the diagram is called a Voronoi Cell. In the Voronoi diagram, the neighboring nodes with common edges with the Voronoi Cell corresponding to each node are called natural neighbors (NN). p j The natural neighbors of the unit node are p jNodes with a common boundary p 1. p 2. p 3. p 4. p 5. Among them, the unit node p j is the node to be interpolated and solved, and the natural neighboring points are p 1. p 2. p 3. p 4. p 5 known nodes.

[0078] Returning to this embodiment, the X-dimensional data and the Y-dimensional data of the first galvanometer deflection data set are combined into a data point in the first Voronoi diagram, which is recorded as p i =(XB i , Y.B. i ), i=1, 2, 3, ..., N*M, the X-dimensional data and Y-dimensional data of the second galvanometer deflection data set are combined into a data point in the second Voronoi diagram, denoted as p j =(XB' j , YB' j ), j =1, 2, 3, ..., N'M'. If each data point of the second Voronoi diagram is inserted into the first Voronoi diagram, and the data point in the second Voronoi diagram is p j As the nodes to be interpolated, the data points in the first Voronoi diagram are p i As a known node, then, based on the natural neighbor interpolation method, each data point can be found p j The corresponding natural neighbors p i , natural neighbor p i The number of is multiple, so the first natural neighbor data set and the first weight data set corresponding to the second galvanometer deflection data set can be determined. Among them, the natural neighbor interpolation is based on each natural neighbor point to be interpolated data point p j The contribution rate of the data point is used to calculate the interpolation result of the point. p j There are K natural neighbors of p 1. p 2. .... p K , then the interpolation formula is:

[0079] (1),

[0080] In the formula, f ( p j ) is the point to be inserted p j The interpolation result at f ( p i ) is a natural neighbor p i The value at ω i Represents natural neighbors p i The weight coefficient.

[0081] Taking four natural neighbor points as an example, the format examples of the first natural neighbor point data set and the first weight data set are shown in Table 3. It should be noted that the subscripts of the natural neighbor points in Table 3 are only used as examples and do not represent the order of the data points:

[0082]

[0083] Table 3

[0084] S500, performing natural neighbor point interpolation calculation according to the first distance data set, the first natural neighbor point data set and the first weight data set to determine a second distance data set;

[0085] Exemplarily, as described above, the deflection angle of the galvanometer assembly and the distance of the light spot landing point relative to the origin in the XY plane have a mapping relationship, and the data set of the distance of the light spot landing point relative to the origin in the XY plane is recorded as the second distance data set. The format example of the second distance data set is shown in Table 4, where the data dimension of the second distance data set is the same as the data dimension of the second galvanometer deflection data set, for example, both are N'*M':

[0086]

[0087] Table 4

[0088] The X-dimensional data and Y-dimensional data of the first distance data set are combined into a data point in the third Voronoi diagram, denoted as pl i =(XD i , YD i ), i=1, 2, 3, ..., N*M, the X-dimensional data and Y-dimensional data of the second distance data set are combined into a data point in the fourth Voronoi diagram, denoted as pl j =(XB' j , YB' j ),j =1, 2, 3, ..., N'*M'. Since the deflection angle of the galvanometer assembly and the distance of the light spot relative to the origin in the XY plane have a one-to-one mapping relationship, the data point p j The natural neighbors and corresponding weight coefficients also apply to data points pl j If we insert each data point of the fourth Voronoi diagram into the third Voronoi diagram, and pl j As the nodes to be interpolated, the data points in the third Voronoi diagram pl i As a known node, then at the known data point pl j In the case of the natural neighbors and the corresponding weight coefficients, the above formula (1) is used to calculate the data points pl j By interpolating the X-dimensional data and the Y-dimensional data, the data points to be interpolated can be obtained. pl j The interpolation result of .

[0089] S600 , combining the second galvanometer deflection data set and the second distance data set into a first galvanometer correction table.

[0090] Exemplarily, the format of the first galvanometer correction table is shown in Table 5:

[0091]

[0092] Table 5

[0093] When in use, the first galvanometer correction table is imported into the target laser processing equipment. When the laser processing equipment needs to control the laser spot to fall into the target position (XD', YD'), the deflection data of the galvanometer component is determined in the first galvanometer correction table by looking up the table. Assuming that the target position is determined to correspond to the first in the second distance data set through query, j data, then, it can be determined that the deflection data of the galvanometer assembly is the first j Data (XB min +dX,YB min +dY). In this way, the galvanometer assembly is controlled according to the deflection data obtained, so that the laser spot falls at the target position, thereby realizing the correction of the galvanometer.

[0094] Therefore, the first galvanometer deflection data set is taken as a node with a known position, and the second galvanometer deflection data set is taken as a node with a position to be solved. Based on the natural neighbor interpolation method, the corresponding first natural neighbor data set and the first weight data set are determined. Then, the first distance data set is taken as a node with a known position, and natural neighbor interpolation calculation is performed according to the first distance data set, the first natural neighbor data set and the first weight data set to determine the distance data of the node to be solved. The second galvanometer deflection data set and the second distance data set are combined into a first galvanometer correction table, and the galvanometer assembly can be calibrated by the first galvanometer correction table.

[0095] Step S100, obtaining a first distance data set of N*M light spot landing points of a target laser processing device in a plane and a corresponding first galvanometer deflection data set, including:

[0096] S110, based on a preset deflection interval, respectively controlling the X-axis galvanometer and the Y-axis galvanometer to sequentially deflect within a preset deflection range, so as to perform laser dotting in a plane to form N*M light spot landing points;

[0097] S120, recording each deflection data of the X-axis galvanometer and the Y-axis galvanometer during the deflection process, to obtain a first galvanometer deflection data set;

[0098] S130, based on the image acquisition method, obtain and determine the X-axis distance and Y-axis distance of each light spot relative to the coordinate origin according to the image where the light spot falls, and obtain a first distance data set.

[0099] For example, it is assumed that the maximum deflection angle of the X-axis galvanometer and the Y-axis galvanometer is the same, denoted as R max , in order to facilitate calculation, the deflection interval of the X-axis galvanometer is set to R max / N, set the deflection interval of the X-axis galvanometer to R max / M, regular laser dotting is performed in the plane, and N*M data points can be obtained, where N and M are both positive integers, and the values ​​of N and M can be equal or unequal. Of course, the deflection interval can also be set to a random number, so that irregular laser dotting can be performed in the plane. The deflection data of the X-axis galvanometer and the Y-axis galvanometer are set manually. During the laser dotting process, the target laser processing equipment can record each deflection data of the X-axis galvanometer and the Y-axis galvanometer during the deflection process, such as "X-axis deflection" and "Y-axis deflection" shown in Table 1, so as to obtain the first galvanometer deflection data set. As for the position data of the light spot landing point, it can be obtained by image acquisition. For example, the experimental board is placed in the XY plane, and the target laser processing equipment is controlled to perform laser dotting on the experimental board, so as to obtain N*M light spot landing points, and then the image of the experimental board containing N*M light spot landing points is captured by the camera, and then the captured image is processed and analyzed to remove the position data of the top light spot landing point. The coordinate origin can be customized according to actual needs, for example, set at the center of the galvanometer scanning area, the center of the image, or the upper left corner of the image.

[0100] Step S200, respectively determining a first maximum deflection range of X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set, comprising:

[0101] S210, determining a first minimum value and a first maximum value according to X-dimensional data of the first galvanometer deflection data set;

[0102] S220, determining a first maximum deflection range according to the first minimum value and the first maximum value;

[0103] S230, determining a second minimum value and a second maximum value according to the Y dimension data of the first galvanometer deflection data set;

[0104] S240: Determine a second maximum deflection range according to the second minimum value and the second maximum value.

[0105] For example, the X-dimensional data of the first galvanometer deflection data set is (XB1, XB2, XB3, ... XB N ), the first minimum value is recorded as min1=MIN(XB1, XB2, XB3, ... XB N ), the first maximum value is recorded as max1=MAX(XB1,XB2,XB3,......XB N ), MIN is the minimum value operation, MAX is the maximum value operation, then the first maximum deflection range is [min1, max1]; similarly, let the Y dimension data of the first galvanometer deflection data set be (YB1, YB2, YB3, ... YB N), the first minimum value is recorded as min2=MIN(YB1, YB2, YB3, ... YB N ), the first maximum value is recorded as max2=MAX(YB1, YB2, YB3, ... YB N ), MIN is the minimum value operation, MAX is the maximum value operation, then the first maximum deflection range is [min2, max2]. In some application examples, the deflection data (angle) of the galvanometer motor is symmetrical about the zero point (zero angle). For the convenience of calculation, it is assumed that the maximum positive deflection data of the galvanometer motor is XB max , YB max , then the first maximum deflection range is [-XB max , XB max ], the second maximum deflection range is [-YB max , Y.B. max ].

[0106] Step S300: Based on a preset granularity, a plurality of node data are determined within a first maximum deflection range and a second maximum deflection range to obtain a second galvanometer deflection data set, including:

[0107] S310, dividing the first maximum deflection range into N*k1 parts to obtain a plurality of first dimension data;

[0108] S320, dividing the second maximum deflection range into M*k2 parts, to obtain a plurality of second dimensional data, wherein k1 and k2 are both positive integers;

[0109] S330 , determining a plurality of node data according to the first dimensional data and the second dimensional data to obtain a second galvanometer deflection data set.

[0110] Exemplarily, the first galvanometer deflection data set and the first distance data set are both measured data, but due to the limited measured data, it is difficult to meet the accuracy required for galvanometer correction. Therefore, it is necessary to improve the data accuracy in the correction table, that is, to reduce the granularity. In the process of collecting the first galvanometer deflection data set and the first distance data set, the extreme deflection data of the galvanometer assembly is usually included to obtain a correction table for the complete deflection range. Of course, in some application examples, the maximum value of the deflection data and the minimum value of the deflection data of the galvanometer assembly can be set according to application requirements, and the minimum value and the minimum value of the deflection data are both smaller than the value of the extreme deflection data.

[0111] When the first maximum deflection range and the second maximum deflection range are determined, the first maximum deflection range and the second maximum deflection range can be divided into multiple unit points, and the interval between each unit point is the same. For example, if the first maximum deflection range is [min1, max1], the interval between adjacent unit points in the X dimension is dX=(max1-min1) / (N*k1). Similarly, if the second maximum deflection range is [min2, max2], the interval between adjacent unit points in the Y dimension is dY=(max2-min2) / (M*k2), where the values ​​of k1 and k2 can be equal or different. In this way, the second galvanometer deflection data set obtained after segmentation contains N'*M'=(N*k1)*(M*k2) data, which can reduce the granularity of the deflection data, thereby improving the accuracy of the galvanometer correction.

[0112] Step S400, based on the natural neighbor interpolation method, determining the first natural neighbor data set and the first weight data set corresponding to the second galvanometer deflection data set according to the first galvanometer deflection data set, including:

[0113] S410, generating a first Voronoi diagram data matrix according to the first galvanometer deflection data set based on a natural neighbor interpolation method;

[0114] S420, generating a second Voronoi diagram data matrix based on the second galvanometer deflection data set based on a natural neighbor interpolation method;

[0115] S430, inserting the second Voronoi diagram data matrix into the first Voronoi diagram data matrix and determining a first natural neighbor data set and a first weight data set.

[0116] Exemplarily, as described above, the first galvanometer deflection data set is used as a known node in the Voronoi diagram to generate a first Voronoi diagram data matrix, and the second galvanometer deflection data set is used as a node to be interpolated and solved in the Voronoi diagram to generate a second Voronoi diagram data matrix. The nodes of the second Voronoi diagram data matrix are inserted into the first Voronoi diagram data matrix one by one and the first natural neighbor point data set and the first weight data set are determined. It should be noted that this embodiment is a scene application based on the natural neighbor point interpolation method, rather than improving the algorithm of natural neighbor point interpolation. The algorithm of natural neighbor point interpolation has been fully disclosed in the relevant technology. How to determine the natural neighbor points in the Voronoi diagram and calculate the corresponding weight coefficients is also disclosed in the relevant technology, which will not be described in detail in this embodiment. For example, the idea of ​​determining natural neighboring points can be: connect convex polygons using the slope maximization judgment principle; select an inner point of the convex polygon to construct an initial Delaunay triangulation; insert an inner point and recalculate the Delaunay triangulation using the conditional local optimization principle until the Delaunay triangulation meets the conditions; use the Delaunay triangulation to construct a Voronoi diagram to determine the natural neighboring points of the point to be inserted. Weight coefficient ω i can be determined as follows: take the interpolation point x as a new node and add it to the generated Voronoi diagram (such as the first Voronoi diagram) to obtain a new Voronoi diagram corresponding to the new node. x The total area of ​​the VoronoiCell is S x , then the Voronoi Cell where the new node is located will be divided into K parts by the original VoronoiCells of the natural neighbors of the new node, and the area of ​​each part is s1, s2, ..., s K , the weight coefficient is obtained by dividing the area of ​​each part by the total area, that is, ω i =s i / S x 。

[0117] Step S600, combining the second galvanometer deflection data set and the second distance data set into a first galvanometer correction table, and then further comprising:

[0118] S710, respectively determining a first maximum distance range of X-dimensional data of the first distance data set and a second maximum distance range of Y-dimensional data of the first distance data set;

[0119] S720: Based on a preset granularity, determine a plurality of node data within a first maximum distance range and a second maximum distance range to obtain a third distance data set;

[0120] S730, determining a second natural neighbor point data set and a second weighted data set corresponding to the third distance data set based on the first distance data set based on a natural neighbor point interpolation method;

[0121] S740, performing natural neighbor point interpolation calculation according to the first galvanometer deflection data set, the second natural neighbor point data set, and the second weight data set to determine a third galvanometer deflection data set;

[0122] S750, combining the third galvanometer deflection data set and the third distance data set into a second galvanometer correction table.

[0123] Exemplarily, in order to ensure the accuracy of the first galvanometer correction table obtained by interpolation calculation, the first galvanometer correction table needs to be verified. In this embodiment, the first distance data set and the first galvanometer deflection data set obtained in step S100 are interchanged and steps S200 to S600 are executed to obtain a second galvanometer correction table, wherein the principles of steps S710 to S750 are the same as those of steps S200 to S600, and the contents not involved here can be referred to above. Among them, the granularity of step S720 should be equal to the granularity of step S300 to facilitate subsequent accuracy verification.

[0124] Step S750, combining the third galvanometer deflection data set and the third distance data set into a second galvanometer correction table, and then further comprising:

[0125] S760, perform accuracy verification according to the first galvanometer correction table and the second galvanometer correction table.

[0126] Exemplarily, the corresponding data in the first galvanometer correction table and the second galvanometer correction table can be compared. For example, the difference between each data of the second galvanometer deflection data set and the corresponding data of the third galvanometer deflection data set is calculated one by one. If the calculation result is within a preset threshold range, it means that the accuracy verification has passed. For another example, the X-dimensional data and the Y-dimensional data of the second galvanometer deflection data set are combined into a plurality of first data points, and the X-dimensional data and the Y-dimensional data of the third galvanometer deflection data set are combined into a plurality of second data points. The distance between the plurality of first data points and the corresponding second data points is calculated one by one. If the distance calculation result is within the preset threshold range, it means that the accuracy verification has passed. Otherwise, the data is re-collected for interpolation calculation.

[0127] Please refer to Figure 4 This embodiment provides a galvanometer correction device, including an input module 210, a first determination module 220, a second determination module 230, a third determination module 240, a fourth determination module 250 and a synthesis module 260.

[0128] The input module 210 is used to obtain a first distance data set and a corresponding first galvanometer deflection data set of N*M light spot landing points of the target laser processing equipment in a plane, wherein the first distance data set and the first galvanometer deflection data set both include X-dimensional data and Y-dimensional data, and N and M are both positive integers;

[0129] The first determination module 220 is used to respectively determine a first maximum deflection range of the X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of the Y-dimensional data of the first galvanometer deflection data set;

[0130] The second determination module 230 is used to determine a plurality of node data within a first maximum deflection range and a second maximum deflection range based on a preset granularity, and obtain a second galvanometer deflection data set;

[0131] The third determination module 240 is used to determine the first natural neighbor point data set and the first weight data set corresponding to the second galvanometer deflection data set based on the first galvanometer deflection data set based on the natural neighbor point interpolation method;

[0132] The fourth determination module 250 is used to perform natural neighbor point interpolation calculation according to the first distance data set, the first natural neighbor point data set and the first weight data set to determine the second distance data set;

[0133] The synthesis module 260 is used to combine the second galvanometer deflection data set and the second distance data set into a first galvanometer correction table.

[0134] It should be noted that the inventive concept of the embodiment of the galvanometer correction device is the same as that of the above-mentioned galvanometer correction method embodiment. The contents not involved in the embodiment of the galvanometer correction device can refer to the above-mentioned galvanometer correction method embodiment. Among them, the galvanometer correction device can be a software tool or a tool composed of hardware circuits. The first galvanometer deflection data set is used as a node with a known position, and the second galvanometer deflection data is used as a node with a position to be solved. Based on the natural neighbor interpolation method, the corresponding first natural neighbor data set and the first weight data set are determined. The first distance data set is used as a node with a known position. According to the first distance data set, the first natural neighbor data set and the first weight data set, the natural neighbor interpolation calculation is performed to determine the distance data of the node to be solved. The second galvanometer deflection data set and the second distance data set are combined into a first galvanometer correction table, and the galvanometer assembly can be corrected by the first galvanometer correction table.

[0135] Please refer to Figure 5, this embodiment provides a laser processing device, including a processor 310 and a memory 320, wherein a correction table is stored in the memory 320, and the correction table is obtained by the galvanometer correction method of the above embodiment. It should be noted that the inventive concept of the present laser processing device embodiment is the same as the above galvanometer correction method embodiment, and the contents not involved in the present laser processing device embodiment can refer to the above galvanometer correction method embodiment. The first galvanometer deflection data set is used as a node with a known position, and the second galvanometer deflection data is used as a node with a position to be solved. Based on the natural neighbor interpolation method, the corresponding first natural neighbor data set and the first weight data set are determined, and the first distance data set is used as a node with a known position. According to the first distance data set, the first natural neighbor data set and the first weight data set, the natural neighbor interpolation calculation is performed to determine the distance data of the node to be solved, and the second galvanometer deflection data set and the second distance data set are combined into a first galvanometer correction table, and the galvanometer assembly can be corrected by the first galvanometer correction table.

[0136] An embodiment of the present invention provides a storage medium, in which a correction table is stored. The correction table is obtained by the above-mentioned galvanometer correction method.

[0137] It should be noted that the inventive concept of the present storage medium embodiment is the same as the above-mentioned galvanometer correction method embodiment, and the contents not involved in the present storage medium embodiment can refer to the above-mentioned galvanometer correction method embodiment. The first galvanometer deflection data set is used as a node with a known position, and the second galvanometer deflection data is used as a node with a position to be solved. Based on the natural neighbor interpolation method, the corresponding first natural neighbor data set and the first weight data set are determined, and the first distance data set is used as a node with a known position. Natural neighbor interpolation calculation is performed according to the first distance data set, the first natural neighbor data set and the first weight data set to determine the distance data of the node to be solved. The second galvanometer deflection data set and the second distance data set are combined into a first galvanometer correction table, and the galvanometer assembly can be corrected by the first galvanometer correction table.

[0138] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A galvanometer correction method, It is characterized in that include: Acquire a first distance data set and a corresponding first galvanometer deflection data set of N*M light spot landing points of a target laser processing device in a plane, wherein the first distance data set and the first galvanometer deflection data set both include X-dimensional data and Y-dimensional data, and N and M are both positive integers; The method of obtaining a first distance data set of N*M light spot landing points of a target laser processing device in a plane and a corresponding first galvanometer deflection data set includes: Based on a preset deflection interval, the X-axis galvanometer and the Y-axis galvanometer are respectively controlled to sequentially deflect within a preset deflection range to perform laser dot marking in a plane to form N*M light spot landing points; each deflection data of the X-axis galvanometer and the Y-axis galvanometer during the deflection process is recorded to obtain the first galvanometer deflection data set; based on an image acquisition method, the X-axis distance and the Y-axis distance of each light spot landing point relative to the coordinate origin are obtained and determined according to the image where the light spot landing point is located, to obtain the first distance data set; respectively determining a first maximum deflection range of X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set; Based on a preset granularity, a plurality of node data are determined within the first maximum deflection range and the second maximum deflection range to obtain a second galvanometer deflection data set; wherein the granularity of the second galvanometer deflection data set is smaller than the granularity of the first galvanometer deflection data set; The method of determining a plurality of node data within the first maximum deflection range and the second maximum deflection range based on a preset granularity to obtain a second galvanometer deflection data set includes: dividing the first maximum deflection range into N*k1 parts to obtain a plurality of first dimensional data; dividing the second maximum deflection range into M*k2 parts to obtain a plurality of second dimensional data, wherein k1 and k2 are both positive integers; and determining a plurality of node data according to the first dimensional data and the second dimensional data to obtain a second galvanometer deflection data set; Based on the natural neighbor interpolation method, according to the first galvanometer deflection data set, a first natural neighbor data set and a first weight data set corresponding to the second galvanometer deflection data set are determined; according to the first distance data set, the first natural neighbor data set and the first weight data set, a natural neighbor interpolation calculation is performed to determine the second distance data set; the second galvanometer deflection data set and the second distance data set are combined into a first galvanometer correction table; respectively determining a first maximum distance range of the X-dimensional data of the first distance data set and a second maximum distance range of the Y-dimensional data of the first distance data set; Based on a preset granularity, determining a plurality of node data within the first maximum distance range and the second maximum distance range to obtain a third distance data set; The granularity of the second galvanometer deflection data set is equal to the granularity of the third distance data set; the granularity is used to characterize the difference between adjacent node data in the same dimension; Based on the natural neighbor interpolation method, determining a second natural neighbor data set and a second weight data set corresponding to the third distance data set according to the first distance data set; Performing natural neighbor point interpolation calculation according to the first galvanometer deflection data set, the second natural neighbor point data set and the second weight data set to determine a third galvanometer deflection data set; Combining the third galvanometer deflection data set and the third distance data set into a second galvanometer correction table; The accuracy verification is performed according to the first galvanometer correction table and the second galvanometer correction table.

2. The galvanometer correction method according to claim 1, It is characterized in that The step of respectively determining a first maximum deflection range of X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set comprises: Determining a first minimum value and a first maximum value according to the X-dimensional data of the first galvanometer deflection data set; determining a first maximum deflection range according to the first minimum value and the first maximum value; Determining a second minimum value and a second maximum value according to the Y dimension data of the first galvanometer deflection data set; A second maximum deflection range is determined based on the second minimum value and the second maximum value.

3. The galvanometer correction method according to claim 1, It is characterized in that The method based on the natural neighbor interpolation method, determining the first natural neighbor data set and the first weight data set corresponding to the second galvanometer deflection data set according to the first galvanometer deflection data set, includes: Based on the natural neighbor interpolation method, generating a first Voronoi diagram data matrix according to the first galvanometer deflection data set; Based on the natural neighbor interpolation method, generating a second Voronoi diagram data matrix according to the second galvanometer deflection data set; Insert the second Voronoi diagram data matrix into the first Voronoi diagram data matrix and determine a first natural neighbor data set and a first weight data set.

4. A galvanometer correction device, used to implement the galvanometer correction method according to any one of claims 1 to 3, It is characterized in that include: An input module is used to obtain a first distance data set and a corresponding first galvanometer deflection data set of N*M light spot landing points of a target laser processing device in a plane, wherein the first distance data set and the first galvanometer deflection data set both include X-dimensional data and Y-dimensional data, and N and M are both positive integers; A first determination module, used to respectively determine a first maximum deflection range of X-dimensional data of the first galvanometer deflection data set and a second maximum deflection range of Y-dimensional data of the first galvanometer deflection data set; a second determination module, configured to determine a plurality of node data within the first maximum deflection range and the second maximum deflection range based on a preset granularity, to obtain a second galvanometer deflection data set; A third determination module is used to determine a first natural neighbor point data set and a first weight data set corresponding to the second galvanometer deflection data set based on the first galvanometer deflection data set based on a natural neighbor point interpolation method; a fourth determination module, configured to perform natural neighbor point interpolation calculation according to the first distance data set, the first natural neighbor point data set, and the first weight data set to determine a second distance data set; A synthesis module is used to combine the second galvanometer deflection data set and the second distance data set into a first galvanometer correction table.

5. A laser processing device, comprising a processor and a memory, wherein the memory stores a correction table. It is characterized in that The correction table is obtained by the galvanometer correction method described in any one of claims 1 to 3.

6. A storage medium having a correction table stored therein, It is characterized in that The correction table is obtained by the galvanometer correction method described in any one of claims 1 to 3.

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