A method, device and storage medium for filtering design rule check results

Abstract

A method, device and storage medium for filtering design rule check results, relating to a method for filtering design rule check results, comprising: obtaining an original layout, determining a test structure to be filtered; obtaining a second layout based on the original layout and the test structure to be filtered; the second layout only contains primitives related to the test structure to be filtered; performing design rule checks on the original layout and the second layout respectively, obtaining design rule check result files of the original layout and the second layout; obtaining a filtered result file based on the difference between the design rule check result files of the original layout and the second layout. The present invention can automatically filter design rule check errors generated by test structures, and accurately obtain design rule check errors caused by non-test structures, reducing the time, labor cost and error rate of manual inspection, and will not cause omissions.

Description

Technical Field

[0001] The present application relates to the field of semiconductor integrated circuits, and in particular to a method, device and storage medium for filtering design rule check results. Background Art

[0002] In the semiconductor industry, physical verification of the Graphic Design System (GDS) is an essential part, and one of the directions of physical verification is physical polygon checking: design rule checking (DRC).

[0003] Semiconductor Design Rule Check (DRC) is a key step in the semiconductor design process. It is mainly used to check whether the design meets certain design rules. These rules may include process requirements such as wire spacing and wire width, as well as violations of electrical rules such as short circuits and open circuits. In the semiconductor design process, the application of design rule checking is very important. It can help engineers find possible problems in the design stage, thereby avoiding problems in the manufacturing stage and improving the yield of chips. In general, semiconductors are key materials in electronic devices, and design rule checking is an important technology to ensure the quality of semiconductor design.

[0004] When doing WAT (wafer acceptance test) test structures, HOL (health of line) or OVL structures, many structures that violate the design rule check are often designed to verify process stability or whether the design rule check is reasonable. These structures will generate a large number of design rule check errors. The large number of design rule check errors generated by these test structures will cover up the DRC problems of placement and routing (PR), and ignore the DRC problems between the surrounding graphics and test structures or circuits (IP). These ignored design rule check errors will lead to serious consequences such as peeling (surface effect or interlayer separation phenomenon in semiconductor devices) or circuit failure.

[0005] Therefore, it is necessary to filter out the design rule check errors caused by the tester structure from a large number of design rule check errors, and quickly and accurately obtain the design rule check problems caused by the non-test structure. Summary of the invention

[0006] The present invention can automatically filter the design rule check errors generated by the test structure and accurately obtain the design rule check errors caused by the non-test structure, thereby reducing the time, labor cost and error rate of manual inspection and judgment, and will not cause omissions.

[0007] Other purposes and advantages of the present invention can be further understood from the technical features disclosed in the present invention.

[0008] To achieve one, part, or all of the above purposes or other purposes, in a first aspect, the present invention provides a method, device, and storage medium for filtering design rule check results.

[0009] A method for filtering design rule checking results, comprising:

[0010] Obtain the original layout and determine the test structure to be filtered;

[0011] Based on the original layout and the test structure to be filtered, obtaining a second layout containing only graphics elements related to the test structure to be filtered;

[0012] Performing design rule checks on the original layout and the second layout respectively to obtain a first result file of the design rule check of the original layout and a second result file of the design rule check of the second layout;

[0013] Based on the difference between the first result file and the second result file, a filtered result file is obtained.

[0014] In some of the embodiments, the filtered result file includes other design rule error information after the original layout excludes the test structure to be filtered.

[0015] In some of the embodiments, based on the original layout and the test structure to be filtered, obtaining a second layout containing only graphics elements related to the test structure to be filtered includes:

[0016] Acquire all graphics elements of the test structure to be filtered in the original layout, and delete the graphics elements from the original layout to obtain a first layout;

[0017] A portion of the original layout that is different from the first layout is selected as the second layout.

[0018] In some of the embodiments, obtaining the primitives of all test structures to be filtered in the original layout includes:

[0019] Based on the naming rule of the test structure to be filtered, all primitives and sub-primitives required for the corresponding level of the test structure to be filtered in the original layout are found by matching with primitive names.

[0020] In some of the embodiments, the test structure to be filtered includes at least one of a WAT ​​test structure, a HOL test structure, and an OVL test structure;

[0021] The naming rules of different types of test structures are different.

[0022] In some of the embodiments, the result file of the design rule check includes a summary file and a detailed file;

[0023] The summary file includes summary information of design rule errors found by the design rule check;

[0024] The detailed file includes detailed information of design rule errors found by the design rule check; the detailed information includes location information of the design rule errors;

[0025] The result file of the design rule check of the original layout is the first result file; and the result file of the design rule check of the second layout is the second result file.

[0026] In some of the embodiments, obtaining a filtered result file based on the difference between the first result file and the second result file includes:

[0027] Traversing and comparing the summary files of the original layout and the second layout, obtaining target design rule errors that exist in the summary file of the original layout but do not exist in the summary file of the second layout, extracting detailed information of the target design rule errors based on the detailed file of the original layout and outputting them to the filtered result file;

[0028] The detailed information of the target design rule error includes location information of the target design rule error.

[0029] In some embodiments, obtaining a filtered result file based on the difference between the first result file and the second result file further includes:

[0030] Traversing and comparing the summary files of the original layout and the second layout, obtaining the first design rule errors existing in both the original layout summary file and the second layout summary file, respectively extracting detailed information of the first design rule errors from the detailed file of the original layout and the detailed file of the second layout and comparing them, and outputting the difference parts to the filtered result file;

[0031] The detailed information of the first design rule error includes location information of the first design rule error.

[0032] In a second aspect, the present invention provides a filtering device for design rule checking results, comprising:

[0033] The acquisition module is used for the original layout to determine the test structure to be filtered;

[0034] A filtering module is used to obtain a second layout based on the original layout and the test structure to be filtered; the second layout only contains the relevant graphics elements of the test structure to be filtered; the original layout and the second layout are respectively subjected to design rule checks to obtain a first result file of the design rule check of the original layout and a second result file of the design rule check of the second layout; based on the difference between the first result file and the second result file, a filtered result file is obtained.

[0035] In a third aspect, the present invention provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the method for filtering the design rule check results described in the first aspect.

[0036] Compared with the prior art, the beneficial effects of the present invention mainly include:

[0037] 1. The present invention automatically filters the design rule check errors generated by the test structure by means of script file traversal processing, and accurately obtains the design rule check errors caused by the non-test structure;

[0038] 2. In the face of such a large number of design rule check errors, all design rule check results need to be paid attention to. The automated process does not require manual judgment on whether the design rule check can be ignored, which reduces the time, cost and error rate of manual inspection and judgment, and will not cause omissions.

[0039] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0041] Figure 1 A flowchart of a method for filtering design rule check results provided in Example 1 of the present application.

[0042] Figure 2 This is the original layout provided for Example 1 of this application.

[0043] Figure 3 This is the first layout provided for Example 1 of the present application.

[0044] Figure 4 This is the second layout provided for Example 1 of the present application.

[0045] Figure 5 A schematic diagram of the design rule checking results of the unfiltered original layout provided in Example 1 of the present application.

[0046] Figure 6 This is a schematic diagram of the filtered design rule checking results provided in Example 1 of the present application. DETAILED DESCRIPTION

[0047] The above and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only referenced to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and not to limit the present invention.

[0048] The present invention can automatically filter the design rule check errors generated by the test structure and accurately obtain the design rule check errors caused by the non-test structure, thereby reducing the time, labor cost and error rate of manual inspection and judgment, and will not cause omissions.

[0049] The following will describe the various embodiments of the present application in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that in the various embodiments of the present application, many technical details are provided in order to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solution claimed in the present application can be implemented.

[0050] Example 1

[0051] Figure 1 The figure is a flow chart of a method for filtering design rule checking results provided in Example 1 of the present application.

[0052] like Figure 1 As shown, a method for filtering design rule check results includes:

[0053] Step S1: Obtain the original layout and determine the test structure to be filtered;

[0054] Step S2: Based on the original layout and the test structure to be filtered, a second layout containing only the graphics elements related to the test structure to be filtered is obtained;

[0055] Step S3: performing design rule checks on the original layout and the second layout respectively, obtaining a first result file of the design rule check of the original layout and a second result file of the design rule check of the second layout;

[0056] Step S4: Based on the difference between the first result file and the second result file, a filtered result file is obtained, that is, other design rule error information of the original layout after excluding the test structure to be filtered.

[0057] Figure 2 Shown is the original layout provided in Example 1 of the present application.

[0058] Figure 3 Shown is the first layout provided in Example 1 of the present application.

[0059] Figure 4 Shown is the second layout provided in Example 1 of the present application.

[0060] First obtain Figure 2 The original layout shown in the figure is used, and all the graphics elements of the test structure to be filtered in the original layout are determined, and all the graphics elements of the test structure to be filtered are deleted from the original layout to obtain a first layout; the parts of the original layout that are different from the first layout are selected as a second layout;

[0061] Specifically, according to the naming rules of different types of test structures to be filtered, all primitives and sub-primitives related to the test structure to be filtered are found in the corresponding level of the original layout (GDS) by matching with the primitive (cell) name; all the primitives (cells) related to the test structure to be filtered found in the original layout (GDS) are deleted, and the following is obtained: Figure 3 The first layout (GDS1) shown in FIG. 1 is used to compare the original layout (GDS) and the first layout (GDS1) using a data comparison tool, and the different parts are screened out to obtain the following: Figure 4 The second version (GDS2) is shown.

[0062] The test structure to be filtered in this embodiment includes at least one of a WAT ​​test structure, a HOL test structure, and an OVL test structure; however, in other embodiments, it can also be based on other test structures to be filtered, which is consistent in principle. In this embodiment, different types of test structures have different naming rules, but in other embodiments, the naming rules of the test structure can also be set according to different application scenarios, and this application does not make the above limitation.

[0063] Secondly, the design rule check (DRC) is performed on the original layout (GDS) and the second layout (GDS2), respectively, and a first result file of the design rule check of the original layout and a second result file of the design rule check of the second layout can be obtained respectively.

[0064] Specifically, after performing design rule checking (DRC) on the original layout (GDS) and the second layout (GDS2) respectively, the following will be obtained: the summary file GDS.summary of the original layout (GDS), the detailed file GDS.result of the original layout (GDS), the summary file GDS2.summary of the second layout (GDS2), and the detailed file GDS2.result of the second layout (GDS2).

[0065] The design rule check result files include summary files (.summary) and detailed files (.result).

[0066] Summary file (usually stored as a result file with the suffix .summary), including summary information of design rule errors found by design rule checking;

[0067] Detailed file (generally stored as a result file with the suffix .result), including detailed information on design rule errors found by the design rule check, mainly the location information of the design rule errors, in DB.

[0068] Finally, the summary files GDS.summary and GDS2.summary of the original layout (GDS) and the second layout (GDS2) are traversed and compared. First, the target design rule errors that exist in GDS.summary but not in GDS2.summary are found, and the location information of the target design rule errors is found in the original layout (GDS) detailed file GDS.result, and output to the filtered result file final.result;

[0069] Then find out the first design rule errors that exist in both GDS.summary and GDS2.summary, find the location information of the first design rule error in the original layout (GDS) detailed file GDS.result and put it into the file common1, and find the location information of the first design rule error in the second layout (GDS2) detailed file GDS2.result and put it into the file common2, compare the files common1 and common2 line by line, and output the different parts to the filtered result file final.result.

[0070] The result file final.result after filtering in this application contains other design rule error information excluding the test structure to be filtered, including PR (placing & routing), DRC problems between surrounding graphics and test structures, and caused by circuit IP.

[0071] Figure 5 Shown is a schematic diagram of the design rule checking result of the unfiltered original layout provided in Example 1 of the present application; Figure 6 The figure shows a filtering method using the design rule check results of the present application provided in Example 1 of the present application, a schematic diagram of the design rule check results after filtering, and the test structure to be filtered determined in Example 1 of the present application is within the ellipse.

[0072] It should be noted that the present embodiment realizes automatic filtering out of the design rule error information (DRC error) generated by the test structure by means of a script, and is completely automatically realized by the script; however, in other embodiments, other methods may be adopted to realize automatic filtering out of the design rule error information generated by the test structure according to the requirements of specific application scenarios, and the present application does not make any specific limitation.

[0073] Example 2

[0074] Embodiment 2 of the present application provides a filtering device for design rule check results, including:

[0075] Get module for example Figure 2 The original layout shown determines the test structure to be filtered;

[0076] The filtering module is used to obtain the following information based on the original layout and the test structure to be filtered: Figure 4 The second version shown;

[0077] Example 2 of the present application provides Figure 4 The second layout shown only contains graphics elements related to the structure to be tested; after performing design rule checks on the original layout and the second layout respectively, a first result file of the design rule check of the original layout and a second result file of the design rule check of the second layout are obtained; based on the difference between the first result file and the second result file, a filtered result file is obtained to filter out the design rule error information caused by the test structure.

[0078] Example 3

[0079] Embodiment 3 of the present application provides a computer program product, which includes a computer program stored on a non-transitory computer-readable storage medium, and the computer program includes program instructions. When the program instructions are executed by a computer, the computer can execute the steps of the above-mentioned design rule checking result filtering method.

[0080] Based on such understanding, the technical solution of the present invention, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods of various embodiments of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc. Various media that can store program codes. The above technical solution, or the part that contributes to the prior art, can be embodied in the form of a software product, which can be stored in a computer-readable storage medium, such as ROM / RAM, disk, optical disk, etc., including several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform various embodiments or some parts of the embodiments.

[0081] In summary, the present invention automatically filters the design rule check errors generated by the test structure by means of script file traversal processing, directly finds the design rule check errors caused by non-test structures including PR (placing & routing), surrounding graphics and test structures, and IP, reduces the time for inspection and judgment, labor costs, and the error rate of manual inspection, and will not cause omissions.

[0082] In order to facilitate the description, some common English nouns or letters used in the present invention are only used for exemplary reference rather than restrictive interpretation or specific usage, and the protection scope of the present invention should not be limited by their possible Chinese translations or specific letters.

[0083] It should also be noted that, in this document, relational terms such as "first" and "second" are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

Claims

1. A method for filtering design rule check results, characterized in that: include: Obtain the original layout and determine the test structure to be filtered; Based on the original layout and the test structure to be filtered, obtaining a second layout containing only graphics elements related to the test structure to be filtered; Performing design rule checks on the original layout and the second layout respectively to obtain a first result file of the design rule check of the original layout and a second result file of the design rule check of the second layout; Based on the difference between the first result file and the second result file, a filtered result file is obtained.

2. A method for filtering design rule check results according to claim 1, characterized in that: The filtered result file includes other design rule error information after the original layout excludes the test structure to be filtered.

3. The method for filtering design rule check results according to claim 1, characterized in that: Based on the original layout and the test structure to be filtered, obtaining a second layout containing only graphics elements related to the test structure to be filtered, including: Acquire all graphics elements of the test structure to be filtered in the original layout, and delete the graphics elements from the original layout to obtain a first layout; A portion of the original layout that is different from the first layout is selected as the second layout.

4. The method for filtering design rule check results according to claim 3, characterized in that: Acquiring all the primitives of the test structures to be filtered in the original layout includes: Based on the naming rule of the test structure to be filtered, all primitives and sub-primitives required for the corresponding level of the test structure to be filtered in the original layout are found by matching with primitive names.

5. A method for filtering design rule check results according to claim 4, characterized in that: The test structure to be filtered includes at least one of a WAT ​​test structure, a HOL test structure, and an OVL test structure; The naming rules of different types of test structures are different.

6. The method for filtering design rule check results according to claim 1, characterized in that: The result files of the design rule check include a summary file and a detailed file; The summary file includes summary information of design rule errors found by the design rule check; The detailed file includes detailed information of design rule errors found by the design rule check; the detailed information includes location information of the design rule errors; The result file of the design rule check of the original layout is the first result file; and the result file of the design rule check of the second layout is the second result file.

7. A method for filtering design rule check results according to claim 6, characterized in that: Based on the difference between the first result file and the second result file, a filtered result file is obtained, including: Traversing and comparing the summary files of the original layout and the second layout, obtaining target design rule errors that exist in the summary file of the original layout but do not exist in the summary file of the second layout, extracting detailed information of the target design rule errors based on the detailed file of the original layout and outputting them to the filtered result file; The detailed information of the target design rule error includes location information of the target design rule error.

8. The method for filtering design rule check results according to claim 7, characterized in that: Based on the difference between the first result file and the second result file, a filtered result file is obtained, further comprising: Traversing and comparing the summary files of the original layout and the second layout, obtaining the first design rule errors existing in both the original layout summary file and the second layout summary file, respectively extracting detailed information of the first design rule errors from the detailed file of the original layout and the detailed file of the second layout and comparing them, and outputting the difference parts to the filtered result file; The detailed information of the first design rule error includes location information of the first design rule error.

9. A filtering device for design rule checking results, characterized in that: include: The acquisition module is used for the original layout to determine the test structure to be filtered; A filtering module, used for acquiring a second layout based on the original layout and the test structure to be filtered; The second layout only includes the graphics elements related to the test structure to be filtered; Performing design rule checks on the original layout and the second layout respectively to obtain a first result file of the design rule check of the original layout and a second result file of the design rule check of the second layout; Based on the difference between the first result file and the second result file, a filtered result file is obtained.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the computer program implements the steps of the method for filtering the design rule check result according to any one of claims 1 to 8.

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