Silicon wafer sorting equipment and control system thereof

Abstract

The present invention discloses a silicon wafer sorting device and its control system. A support bar fixed to a frame assembly is arranged above the trolley assembly. The support bar is equipped with material boxes symmetrically arranged on both sides of the synchronous belt assembly. A suction cup assembly corresponding to the material box is connected to the bottom of the walking arm. The input end of the synchronous belt assembly is connected to the conveying assembly through a turntable mechanism. An upper paper material box assembly is arranged on the side of the input end of the synchronous belt assembly. The upper paper material box assembly provides isolation paper for separating silicon wafers in the material box. The double-guide rail synchronous belt assembly of the present invention conveys silicon wafers, and the double walking arm structure is used to deliver silicon wafers for boxing, which greatly improves the efficiency of silicon wafer boxing. At the same time, the newly added upper paper material box assembly places isolation paper on the surface of each silicon wafer to avoid adhesion of silicon wafers in the material box. The full and empty material boxes are recycled through the trolley assembly, realizing continuous production of wafer flow, boxing, full material box transfer, and empty material box reflow with the entire equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer sorting, and in particular to silicon wafer sorting equipment and a control system thereof. Background Art

[0002] As an important industrial raw material, silicon wafers are widely used in the production of solar cells, circuit boards and other products. Therefore, the quality of silicon wafers needs to be strictly controlled before they are produced and shipped to ensure the quality of solar cells, circuit boards and other products made from silicon wafers.

[0003] Traditional silicon wafer sorting machines can usually only complete single-row conveying, and there is no automatic continuous operation between the conveying and detection links, resulting in low production efficiency. In the prior art, a Chinese patent document with publication number CN115565922A proposes an automatic alternating double-track sorting and loading machine for silicon wafers. Two parallel monorail conveyors are used on the operating table. One end of the two monorail conveyors is provided with a set of main loading frames and auxiliary loading frames in relative positions. The main loading frames and the auxiliary loading frames are both equipped with flower baskets for loading silicon wafers, and the operating table is also equipped with a flip assembly for driving the two sets of main loading frames and auxiliary loading frames to rotate independently. However, in the actual production process, the stacked silicon wafer material box is more efficient than the insert-type silicon wafer material box. The insert-type material box needs to be positioned during the boxing process, which affects the efficiency, and the material box recovery after the boxing is completed is troublesome, and it is impossible to form a continuous production of wafer flow, boxing, full material box transfer, and empty material box reflow with the entire equipment. Summary of the invention

[0004] According to the technical problems to be solved, a silicon wafer sorting equipment and a control system are provided to automatically sort and unload silicon wafers that have completed solar energy simulation tests according to their grades. All mechanical motion structures of the whole machine are driven by motors or electric cylinders controlled by PLC and circuit systems. Each action is orderly and smooth, accurate and fast, easy to operate, safe and stable.

[0005] To achieve the above-mentioned purpose, the present invention discloses a silicon wafer sorting equipment, comprising two parallel synchronous belt assemblies arranged in a frame assembly, wherein walking arms and trolley assemblies are respectively arranged on the upper and lower sides of the synchronous belt assembly, a support bar fixed to the frame assembly is arranged above the trolley assembly, and material boxes symmetrically arranged on both sides of the synchronous belt assembly are installed on the support bar, a suction cup assembly corresponding to the material box is connected to the bottom of the walking arm, the input end of the synchronous belt assembly is connected to the conveying assembly through a turntable mechanism, an upper paper material box assembly is arranged on the side of the input end of the synchronous belt assembly, isolation paper is provided in the upper paper material box assembly for separating silicon wafers in the material box, a paper picking module assembly installed on the frame assembly is arranged correspondingly above the upper paper material box assembly, and a material box transfer machine is arranged at the end of the synchronous belt assembly.

[0006] Furthermore, a rotating assembly is provided at the input end of the conveying assembly. The conveying assembly is composed of double guide rails arranged in parallel and are used to convey silicon wafers. A single double guide rail is composed of at least three groups of long guide rails, each group of long guide rails is driven by a separate stepper motor. A splint support installed on the frame assembly is provided at the center of the conveying assembly. Optoelectronic components are installed on the top of the splint support corresponding to the double guide rails, and splint fixing columns are provided on both sides of the long guide rails under the splint support.

[0007] Furthermore, the upper paper box assembly is composed of at least three groups of material box lifting assemblies, the material box lifting assembly includes a drawer-type paper box arranged perpendicular to the synchronous belt upper assembly and a lifting platform arranged on the top of the drawer-type paper box, the drawer-type paper box is provided with two groups of paper outlets on the top, the lifting platform includes a bottom plate installed on the drawer-type paper box, an upper paper box is arranged at the position of the bottom plate corresponding to the paper outlet, the upper paper box is sleeved on a limit rod vertically fixed to the bottom plate, baffle bars are arranged around the upper paper box, wear-resistant tape is arranged on the surface of the baffle bars, blowing nozzles facing the center of the upper paper box are respectively installed at the corners of the upper paper box, and an electric cylinder driven by a servo motor is arranged at the bottom of the material box lifting assembly.

[0008] Furthermore, at least three groups of upper paper box assemblies are arranged, and a paper picking module assembly is arranged on the top of each group of upper paper box assemblies. The paper picking module assembly includes a paper picking module that is perpendicular to the synchronous belt assembly and arranged above the upper paper box assembly, and the side of the paper picking module is movably connected with a paper picking assembly corresponding to the upper paper box. The paper picking assembly includes two connecting plates connected to the output end of the cylinder, four vacuum accordion suction nozzles are installed on each connecting plate, and a blowing pipe buffer bracket is installed on the side of the vacuum accordion suction nozzle.

[0009] Furthermore, guide wheels are installed on the side and top of the belt of the synchronous belt assembly, and a block structure for placing silicon wafers is provided on the belt surface of the synchronous belt assembly.

[0010] Furthermore, the trolley assembly includes an X-axis module located at the bottom of the frame assembly and arranged in the same direction as the synchronous belt assembly, an X-axis drag chain is installed on the side of the X-axis module, a Y-axis module perpendicular to the X-axis module is arranged on the top of the X-axis module, a Y-axis drag chain and a Y-axis guide rail are installed on both sides of the Y-axis module, the side of the Y-axis module is connected to the movable end of the X-axis drag chain, a Z-axis module is installed on the top of the Y-axis module, a conveying base plate parallel to the X-axis module is installed on the top of the Z-axis module, and a material box is placed on the conveying base plate.

[0011] Furthermore, the walking arm includes a material picking module arranged vertically with the synchronous belt assembly, two sets of synchronous belts are vertically installed in the material picking module, and slide rail assemblies are arranged between the belts of the synchronous belts and are respectively connected to the first walking arm assembly and the second walking arm assembly, and the tops of the first walking arm assembly and the second walking arm assembly are respectively connected to the movable ends of two parallel drag chains arranged on the top of the material picking module through drag chain fixing plates, the bottom of the slide rail assembly is installed in cooperation with the synchronous belt through a belt pressure plate, and the side of the slide rail assembly is connected to the suction cup assembly through a fixing plate.

[0012] The present invention also discloses a control system for silicon wafer sorting equipment, comprising the following steps:

[0013] S1, the conveying component is tape-out, the rotating component absorbs the silicon wafer to complete the reversing action, and at the same time triggers the double rail movement and the board request signal of the conveying component. After the double rail completes the action, the board request signal is reset to complete the tape-out;

[0014] S2, the photoelectric component at the clamp support detects the position of the silicon wafer, triggers the clamp fixing column in the open state to center the silicon wafer, and the double guide rails transport the silicon wafer forward and move it to the synchronous belt assembly through the turntable mechanism;

[0015] S3. The sensor at the suction cup at the bottom of the walking arm simultaneously detects whether the silicon wafer and the material box on the synchronous belt assembly are in place. If the requirements are met, the walking arm is triggered to absorb the silicon wafer and move to the top of the specified material box. The suction cup breaks the vacuum, the material box is counted, and if the material box is full, the material box is marked, triggering the walking arm to reset;

[0016] S4. When the trolley assembly detects the full material box marking signal, it moves to the specified full material box coordinate position through the X-axis module and the Y-axis module, and the Z-axis module is lifted. After it is in place, the full material box is removed, and the full material box moves to the waiting position and the empty material box is placed. After the action is completed, the X-axis module and the Y-axis module of the trolley assembly are triggered to move to the interface position of the material box transfer machine. The conveying base plate feeds the full material box into the material box transfer machine. After the silicon wafers in the full material box are taken away, the empty material box flows back to the conveying base plate.

[0017] Compared with the prior art, the present invention has the following beneficial effects: the present invention discloses a silicon wafer sorting device and its control system, a double-guide rail synchronous belt assembly for conveying silicon wafers, and a double walking arm structure for delivering silicon wafers for boxing, which greatly improves the efficiency of silicon wafer boxing. At the same time, the newly added upper paper box assembly places isolation paper on the surface of each silicon wafer to avoid adhesion of silicon wafers in the box, and the recycling of full and empty boxes is achieved through the trolley assembly, thereby realizing continuous production of wafer flow, boxing, full box transfer, and empty box reflow with the entire equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0019] Figure 1 The figure is a schematic diagram of the overall structure of the present invention without the frame assembly.

[0020] Figure 2 It is a schematic diagram of the conveying component of the present invention.

[0021] Figure 3 It is a schematic diagram of the splint support of the present invention.

[0022] Figure 4 It is a schematic diagram of a synchronous belt assembly of the present invention.

[0023] Figure 5 It is a schematic diagram of the installation position of the upper paper material box assembly and the paper taking module assembly of the present invention.

[0024] Figure 6 It is a schematic diagram of the upper paper material box assembly of the present invention.

[0025] Figure 7 It is a schematic diagram of the paper picking assembly of the present invention.

[0026] Figure 8 It is a schematic diagram of the walking arm of the present invention.

[0027] Fig. 9 It is a schematic diagram of the trolley assembly of the present invention.

[0028] Fig.10 It is a schematic diagram of a material box of the present invention.

[0029] Fig.11 It is a flow chart of the control system of the present invention.

[0030] Fig.12 It is a flow chart of the wafer taping action of the present invention.

[0031] Fig.13 It is a flow chart of the splint action of the present invention.

[0032] Fig.14 It is a flow chart of the walking arm action of the present invention.

[0033] Fig.15 It is a flow chart of the trolley action of the present invention.

[0034] In the figure: 1 is a conveying assembly; 11 is a rotating assembly; 12 is a double guide rail; 13 is a clamping plate support; 131 is a clamping plate fixing column; 14 is a photoelectric assembly; 2 is a turntable mechanism; 3 is a synchronous belt assembly; 31 is a guide wheel; 32 is a block structure; 4 is an upper paper box assembly; 41 is a drawer-type paper box; 42 is a bottom plate; 43 is an upper paper box; 44 is a limit rod; 45 is a stop bar assembly; 46 is an air blowing nozzle; 47 is an electric cylinder; 5 is a paper taking module assembly; 51 is a paper taking module; 52 is a paper taking assembly; 521 is a cylinder; 5 22 is a connecting plate; 523 is a vacuum accordion nozzle; 524 is a blowing pipe buffer bracket; 6 is a walking arm; 61 is a material taking module; 62 is a synchronous belt; 63 is a slide rail assembly; 64 is a first walking arm assembly; 65 is a second walking arm assembly; 66 is a drag chain; 67 is a suction cup assembly; 7 is a trolley assembly; 71 is an X-axis module; 72 is an X-axis drag chain; 73 is a Y-axis module; 74 is a Y-axis drag chain; 75 is a Z-axis module; 76 is a conveying bottom plate; 8 is a support bar; 9 is a material box; 91 is a material box body; 92 is an inner sleeve. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] An embodiment of the present invention, as Figure 1 and Fig.11 As shown, a support bar 8 fixed to the frame assembly is arranged above the trolley assembly 7, and material boxes 9 symmetrically arranged on both sides of the synchronous belt assembly 3 are installed on the support bar 8. A suction cup assembly 67 corresponding to the material box 9 is connected to the bottom of the walking arm 6. The input end of the synchronous belt assembly 3 is connected to the conveying assembly 1 through the turntable mechanism 2. The turntable mechanism 2 simultaneously sucks up the silicon wafers on the double guide rails 12 of the conveying assembly 1, and then rotates and sends them to the block structure 32 of the synchronous belt assembly 3 to improve efficiency. An upper paper box assembly 4 is arranged on the side of the input end of the synchronous belt assembly 3. The upper paper box assembly 4 provides isolation paper for separating the silicon wafers in the box 9. Correspondingly, a paper picking module assembly 5 installed on the frame assembly is arranged above, and a material box transfer machine is arranged at the end of the synchronous belt assembly 3. As a preferred embodiment of the present application, 20 groups of walking arms 6 are arranged, and three rows of material boxes 9 are arranged on both sides of the synchronous belt assembly 3. This equipment can simultaneously perform box loading operations on 120 material boxes 9, which greatly improves the box loading efficiency of silicon wafers. At the same time, the newly added upper paper material box assembly places isolation paper on the surface of each silicon wafer to avoid adhesion of silicon wafers in the material box. The full material box and the empty material box are recycled through the trolley assembly, realizing continuous production of wafer flow, box loading, full material box transfer, and empty material box return with the entire equipment.

[0037] like Figure 2 As shown, a rotating assembly 11 is provided at the input end of the conveying assembly 1. The conveying assembly 1 is composed of double guide rails 12 arranged in parallel, both of which are used to convey silicon wafers. A single double guide rail 12 is composed of at least three groups of long guide rails, each of which is driven by a separate stepper motor. A clamping plate support 13 installed on the frame assembly is provided at the center of the conveying assembly 1. A photoelectric assembly 14 is installed on the top of the clamping plate support 13 corresponding to the double guide rail 12. Fig.12 As shown, during the wafer taping process, the sensor determines whether there is a silicon wafer in the upstream and conveying component 1, and the control system determines the uniqueness of the current silicon wafer ID. The suction cup of the rotating component displaces the silicon wafer and places it on the double guide rail 12, and at the same time triggers the movement of the conveying component 1 pulley and the board request signal. The upstream continues to transport the silicon wafer to the conveying component. After the belt shaft completes the action, the board request signal is reset to complete the wafer taping action. Figure 3 As shown, under the clamping plate support 13, clamping plate fixing columns 131 are arranged on both sides of the long guide rail, and rubber wheels are arranged at the bottom of the clamping plate fixing columns 131, which are in flexible contact with the silicon wafer to avoid damage to the silicon wafer during the positioning process. Fig.13 As shown, first the control system puts the clamp fixing column 131 in the open position. After the silicon wafer that has completed the wafer taping reaches the clamp support 13 position, it is clamped by the fixing columns 131 on both sides to ensure centered transportation. If the centering is not completed, the manual speed regulation of the long guide rail is triggered to achieve secondary positioning.

[0038] like Figure 5 and Figure 6 As shown, the upper paper material box assembly 4 is composed of at least three groups of material box lifting assemblies, the material box lifting assembly includes a drawer-type paper material box 41 arranged perpendicular to the synchronous belt assembly 3 and a lifting platform arranged on the top of the drawer-type paper material box 41, the top of the drawer-type paper material box 41 is provided with two groups of paper outlets, the lifting platform includes a bottom plate 42 installed on the drawer-type paper material box 41, the bottom plate 42 is provided with an upper paper box 43 at the position corresponding to the paper outlet, the two groups of paper outlets correspond to the two groups of upper paper boxes 43, and the two silicon wafers on the synchronous belt assembly 3 can be placed for isolation paper at the same time. The upper paper box 43 is sleeved on a limit rod 44 vertically fixed to the bottom plate 42. The upper paper box 43 is provided with a stop bar assembly 45 on all sides. The surface of the stop bar assembly 45 is provided with a wear-resistant tape. The corners of the upper paper box 43 are respectively provided with air blowing nozzles 46 facing the center of the upper paper box 43 to prevent the isolation paper from sticking together. The bottom of the material box lifting assembly is provided with a servo motor driven electric cylinder 47, wherein each material box lifting assembly is provided with a height detection light sensor on the side to monitor the paper rising height of the isolation paper, and start to absorb the isolation paper after sensing. The specific structure is as follows Figure 5 As shown in the figure, it is a horizontal detection light. In addition, a paper detection light sensor is installed on the side opposite to the height detection light sensor to generate an inclined detection light to detect whether the isolation paper has been taken out. The specific position is as follows Figure 6shown.

[0039] like Figure 1 and Figure 7 As shown, at least three groups of upper paper box assemblies 4 are arranged, and a paper picking module assembly 5 is arranged on the top of each group of upper paper box assemblies 4. The paper picking module assembly 5 includes a paper picking module 51 which is perpendicular to the synchronous belt assembly 3 and arranged above the upper paper box assembly 4. A synchronous belt and a slide rail inside the synchronous belt are arranged in the paper picking module 51. A slider meshing with the inner belt teeth of the synchronous belt is installed on the slide rail. The horizontal movement of the paper picking assembly is realized by rotating the synchronous belt. The side of the paper picking module 51 is movably connected with a paper picking assembly 52 arranged corresponding to the upper paper box 43. The paper picking assembly 5 includes two connecting plates 522 connected to the output end of the cylinder 521, and four vacuum accordion suction nozzles 523 are installed on each connecting plate 522. A blowing pipe buffer bracket 524 is installed on the side of the vacuum accordion suction nozzle 523 to adsorb and place the isolation paper in the upper paper box 43 on the silicon wafer surface corresponding to the synchronous belt assembly 3, so as to ensure that the silicon wafers in the material box 9 are separated in the subsequent box loading operation and will not stick together.

[0040] like Figure 4 As shown, guide wheels 31 are installed on the side and top of the belt of the synchronous belt assembly 3 to clamp the belt of the synchronous belt assembly 3 to prevent it from jumping up and down and running left and right. A block structure 32 for placing silicon wafers is provided on the belt surface of the synchronous belt assembly 3 to confine the silicon wafers and the isolation paper therein.

[0041] like Figure 8 As shown, the walking arm 6 includes a material taking module 61 vertically arranged with the synchronous belt assembly 3, two sets of synchronous belts 62 are vertically installed in the material taking module 61, and a slide rail assembly 63 is arranged between the belts of the synchronous belt 62, which are respectively connected with the first walking arm assembly 64 and the second walking arm assembly 65, and the tops of the first walking arm assembly 64 and the second walking arm assembly 65 are respectively connected with the movable ends of two parallel drag chains 66 arranged on the top of the material taking module 61 through drag chain fixing plates, and the bottom of the slide rail assembly 63 is installed with the synchronous belt 62 through a belt pressure plate, and the side of the slide rail assembly 63 is connected with the suction cup assembly 67 through a fixing plate, and the suction cup assembly 67 adopts a non-contact Bernoulli suction cup structure. A material box sensor is also arranged on the side of the suction cup assembly 67 for detecting the position of the material box, and the two sets of walking arms respectively pack the material boxes 9 on both sides of the synchronous belt assembly 3 to improve efficiency. Fig.14 As shown, the control system determines whether there is silicon wafer memory on the synchronous belt assembly 3 corresponding to the walking arm and whether the Liaohe level of the walking arm is consistent with the current silicon wafer level. If the above conditions are met and the Liaohe quantity is not in a full box state, the suction cup assembly 67 under the walking arm is triggered to suck the wafer, and the control system continues to identify that the silicon wafer level on the walking arm suction cup is consistent with the box level. The walking arm moves to the top of the corresponding box, the suction cup breaks the vacuum and puts the silicon wafer into the box, the box starts counting, and the walking arm resets. If the box is full, the current box is marked.

[0042] like Fig. 9 As shown, the trolley assembly 7 includes an X-axis module 71 located at the bottom of the frame assembly and arranged in the same direction as the synchronous belt assembly 3, an X-axis drag chain 72 is installed on the side of the X-axis module 71, a Y-axis module 73 perpendicular to the X-axis module 71 is arranged on the top of the X-axis module 71, a Y-axis drag chain 74 and a Y-axis guide rail are installed on both sides of the Y-axis module 73, the side of the Y-axis module 73 is connected to the movable end of the X-axis drag chain 72, a Z-axis module 75 is installed on the top of the Y-axis module 73, and a conveying bottom plate 76 arranged parallel to the X-axis module 71 is installed on the top of the Z-axis module 75, a material box 9 is placed on the conveying bottom plate 76, wherein a baffle is arranged on the left side of the conveying bottom plate 76 as a waiting position for a full material box, as shown in FIG. Fig.15 As shown, when there is a full box mark on the material box at the position of the upper support bar 8, the control system recognizes the signal, the trolley moves to the specified position through the XY module, the Z-axis module is lifted, and the reader writes the material box data to the material box chip, which triggers the Z-axis module to descend, so that the full material box falls on the conveying base plate and moves to the waiting position. The empty material box is lifted to the support bar position by the Z-axis module. After the empty material box is loaded, the trolley moves to the position of the material box transfer machine to send the full material box into the material box transfer machine. After the transfer machine reads the material box information and takes out the silicon wafer, the empty material box flows back to the conveying base plate through the empty material box track of the transfer machine.

[0043] like Fig.10 As shown, the material box 9 includes a material box body 91 and an inner liner 92 arranged in the material box body 91 to prevent the silicon wafers from being damaged during packaging. Both the inner liner 92 and the material box body 91 are provided with anti-fool marks.

[0044] Several points that need to be explained are: First, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, and can be mechanical or electrical connections, or internal connectivity between two elements, or direct connections. "Up", "down", "left", "right", etc. are only used to indicate relative position relationships. When the absolute position of the object being described changes, the relative position relationship may change; secondly, in this article, relational terms such as first and second, etc. are only used to distinguish one entity from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities.

[0045] The above examples are merely illustrative of the present invention and do not constitute a limitation on the protection scope of the present invention. All designs that are the same or similar to the present invention belong to the protection scope of the present invention.

Claims

1. A silicon wafer sorting device, comprising two synchronous belt assemblies (3) arranged in parallel in a frame assembly, wherein a walking arm (6) and a trolley assembly (7) are respectively arranged on the upper and lower sides of the synchronous belt assembly (3), characterized in that: A support bar (8) fixed to the frame assembly is arranged above the trolley assembly (7), and material boxes (9) symmetrically arranged on both sides of the synchronous belt assembly (3) are installed on the support bar (8). A suction cup assembly (67) corresponding to the material box (9) is connected to the bottom of the walking arm (6). The input end of the synchronous belt assembly (3) is connected to the conveying assembly (1) through a turntable mechanism (2). The input end of the conveying assembly (1) is provided with a rotating assembly (11). The conveying assembly (1) is composed of double guide rails (12) arranged in parallel and used for conveying silicon wafers. Each double guide rail (12) is composed of at least three groups of long guide rails, and each group of long guide rails is composed of a separate step. The conveying assembly (1) is driven by a motor, a clamping plate support (13) mounted on a frame assembly is arranged at the center of the conveying assembly (1), a photoelectric assembly (14) is mounted on the top of the clamping plate support (13) corresponding to the double guide rails (12), clamping plate fixing columns (131) are arranged on both sides of the long guide rails below the clamping plate support (13), an upper paper material box assembly (4) is arranged on the side of the input end of the synchronous belt assembly (3), isolation paper is provided in the upper paper material box assembly (4) for separating silicon wafers in the material box (9), a paper picking module assembly (5) mounted on the frame assembly is arranged above the upper paper material box assembly (4), and a material box transfer machine is arranged at the end of the synchronous belt assembly (3).

2. A silicon wafer sorting device according to claim 1, characterized in that: The upper paper material box assembly (4) is composed of at least three groups of material box lifting assemblies. The material box lifting assembly comprises a drawer-type paper material box (41) arranged perpendicular to the synchronous belt assembly (3) and a lifting platform arranged on the top of the drawer-type paper material box (41). The top of the drawer-type paper material box (41) is provided with two groups of paper outlets. The lifting platform comprises a bottom plate (42) mounted on the drawer-type paper material box (41). An upper paper box (43) is arranged at a position of the bottom plate (42) corresponding to the paper outlet. The upper paper box (43) is sleeved on a limit rod (44) vertically fixed to the bottom plate (42). Baffle bar assemblies (45) are arranged around the upper paper box (43). The surface of the baffle bar assemblies (45) is provided with wear-resistant adhesive tape. Blowing nozzles (46) facing the center of the upper paper box (43) are respectively installed at the corners of the upper paper box (43). An electric cylinder (47) driven by a servo motor is arranged at the bottom of the material box lifting assembly.

3. A silicon wafer sorting device according to claim 2, characterized in that: At least three groups of upper paper material box assemblies (4) are provided, and a paper picking module assembly (5) is correspondingly provided on the top of each group of upper paper material box assemblies (4). The paper picking module assembly (5) comprises a paper picking module (51) which is perpendicular to the synchronous belt assembly and arranged above the upper paper material box assembly (4), and a paper picking assembly (52) corresponding to the upper paper box (43) is movably connected to the side of the paper picking module (51). The paper picking assembly (52) comprises two connecting plates (522) connected to the output end of the cylinder (521), and four vacuum accordion suction nozzles (523) are installed on each connecting plate (522). A blowing pipe buffer bracket (524) is installed on the side of the vacuum accordion suction nozzle (523).

4. A silicon wafer sorting device according to claim 1, characterized in that: Guide wheels (31) are installed on the belt side and top of the synchronous belt assembly (3), and a block structure (32) for placing silicon wafers is provided on the belt surface of the synchronous belt assembly (3).

5. A silicon wafer sorting device according to claim 1, characterized in that: The trolley assembly (7) comprises an X-axis module (71) located at the bottom of the frame assembly and arranged in the same direction as the synchronous belt assembly (3); an X-axis drag chain (72) is installed on the side of the X-axis module (71); a Y-axis module (73) perpendicular to the X-axis module (71) is installed on the top of the X-axis module (71); a Y-axis drag chain (74) and a Y-axis guide rail are installed on both sides of the Y-axis module (73); a side of the Y-axis module (73) is connected to the movable end of the X-axis drag chain (72); a Z-axis module (75) is installed on the top of the Y-axis module (73); a conveying bottom plate (76) arranged parallel to the X-axis module (71) is installed on the top of the Z-axis module (75); a material box (9) is placed on the conveying bottom plate (76).

6. A silicon wafer sorting device according to claim 1, characterized in that: The walking arm (6) comprises a material taking module (61) vertically arranged with the synchronous belt assembly (3), two sets of synchronous belts (62) are vertically installed in the material taking module (61), a slide rail assembly (63) is arranged between the belts of the synchronous belt (62) and is respectively connected with the first walking arm assembly (64) and the second walking arm assembly (65), the top of the first walking arm assembly (64) and the second walking arm assembly (65) are respectively connected with the movable ends of two parallel drag chains (66) arranged at the top of the material taking module (61) through a drag chain fixing plate, the bottom of the slide rail assembly (63) is installed in cooperation with the synchronous belt (62) through a belt pressing plate, and the side of the slide rail assembly (63) is connected with the suction cup assembly (67) through a fixing plate.

7. A control system for silicon wafer sorting equipment, characterized in that: The following steps are involved: S1, the conveying component is tape-out, the rotating component absorbs the silicon wafer to complete the reversing action, and at the same time triggers the double rail movement and the board request signal of the conveying component. After the double rail completes the action, the board request signal is reset to complete the tape-out; S2, the photoelectric component at the clamp support detects the position of the silicon wafer, triggers the clamp fixing column in the open state to center the silicon wafer, and the double guide rails transport the silicon wafer forward and move it to the synchronous belt assembly through the turntable mechanism; S3. The sensor at the suction cup at the bottom of the walking arm simultaneously detects whether the silicon wafer and the material box on the synchronous belt assembly are in place. If the requirements are met, the walking arm is triggered to absorb the silicon wafer and move to the top of the specified material box. The suction cup breaks the vacuum, the material box is counted, and if the material box is full, the material box is marked, triggering the walking arm to reset; S4. When the trolley assembly detects the full material box marking signal, it moves to the specified full material box coordinate position through the X-axis module and the Y-axis module, and the Z-axis module is lifted. After it is in place, the full material box is removed, and the full material box moves to the waiting position and the empty material box is placed. After the action is completed, the X-axis module and the Y-axis module of the trolley assembly are triggered to move to the interface position of the material box transfer machine. The conveying base plate feeds the full material box into the material box transfer machine. After the silicon wafers in the full material box are taken away, the empty material box flows back to the conveying base plate.

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