Silicon wafer basket for wafer processing and transportation and use method thereof

Abstract

The invention discloses a silicon wafer basket for wafer processing and transportation and a method for using the same, and particularly relates to the field of silicon wafer carrying baskets. The invention comprises a carrying basket body, a supporting plate is fixedly installed at the bottom of the carrying basket body, a cushioning plate is fixedly installed at the top of the supporting plate, and clamping and pushing mechanisms and positioning mechanisms are arranged on both sides of the cushioning plate. The clamping and pushing mechanisms comprise a rotating rod rotatably installed on the inner wall of the supporting plate, and the rotating rod is arranged in a horizontal state. The invention arranges sliding clamping plates on both sides of the basket, and freely adjusts the distance between the clamping plates on both sides of the basket according to different wafer sizes, so as to facilitate the movement of wafers of different sizes. At the same time, when carrying the wafer, the roller arranged on the supporting plate at the bottom of the wafer is rotated to make the wafer rotate synchronously, so as to facilitate the separation of the contact position between the wafer and the basket for more effective cleaning.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer carrying baskets, and more specifically, to a silicon wafer basket for wafer processing and transportation and a method for using the same. Background Art

[0002] The silicon wafers used to make silicon semiconductor circuits are generally called wafers. They are made by dissolving high-purity polycrystalline silicon and then adding silicon crystal seeds to form cylindrical single crystal silicon. After grinding, polishing, slicing and other operations, they are processed into round silicon wafers. After a series of processing, integrated circuits are formed on the silicon wafers, and after cutting, they become chips. Wafers are widely used in the manufacture of integrated circuits. During the manufacturing process of wafers, the wafers will be cleaned, stored, circulated or transported. The wafer basket is the carrying equipment used for these operations on the wafers. It is generally made of plastic materials such as PTFE and is corrosion-resistant, does not deform after long-term use, and does not contaminate silicon wafers.

[0003] However, most of the silicon wafer baskets in the prior art are fixed structures. When carrying wafers, they can only carry wafers of a specific size. There is no way to adjust the carrying space according to the different sizes of wafers, and thus it is impossible to adapt to different wafers for carrying and moving. At the same time, when carrying wafers, the basket can only keep the wafers stationary. Therefore, during cleaning, since the carried wafers cannot be rotated to adjust their position, it is difficult to effectively clean the position where the wafers contact the basket.

[0004] In view of the above technical defects, a solution is now provided. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a silicon wafer basket for wafer processing and transportation and a method for using the same. The method comprises providing a clamping and pushing mechanism and a positioning mechanism, and then providing sliding clamping plates on both sides of the basket. The distance between the clamping plates on both sides of the basket can be freely adjusted according to different wafer sizes, so as to facilitate the movement of wafers of different sizes. At the same time, a lifting and rotating mechanism is provided, so that when carrying the wafer, the rollers provided on the support plate supporting the bottom of the wafer are rotated, so that the wafers rotate synchronously, which facilitates the separation of the contact position between the wafer and the basket for more effective cleaning, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a silicon wafer basket for wafer processing and transportation, comprising a carrying basket body, a support plate is fixedly installed at the bottom of the carrying basket body, a cushion plate is fixedly installed on the top of the support plate, and a clamping and pushing mechanism and a positioning mechanism are arranged on both sides of the cushion plate;

[0007] The clamping and pushing mechanism includes a rotating rod rotatably mounted on the inner wall of the support plate, the rotating rod is arranged in a horizontal state, rotating disks are fixedly mounted on both sides of the rotating rod, thread grooves are opened on the outer walls of both sides of the rotating rod, and rotating rings are threadedly connected to the outer walls of the thread grooves.

[0008] In a preferred embodiment, sliders are rotatably installed on both sides of the rotating ring, and drag plates are slidably installed on the outer walls of the two sliders. The drag plates are rotatably installed on the bottom of the supporting basket. There are two drag plates, and the two drag plates are symmetrically arranged with each other.

[0009] In a preferred embodiment, the tops of the two pulling plates are respectively hinged with cross plates, the two cross plates are symmetrically arranged, a plurality of telescopic rods are fixedly installed on the tops of the two cross plates, a splint is fixedly installed on the tops of the plurality of telescopic rods, there are two splints, the two splints are arranged parallel to each other, the two splints are slidably installed on the tops of the pad support plates, and a plurality of slots are respectively opened on the outer walls of the two splints.

[0010] In a preferred embodiment, the positioning mechanism includes a slot opened on the top of the support plate, a straight plate is slidably installed on the top of the slot, the straight plate is fixedly installed on the bottom of a clamp, the straight plate is arranged in a horizontal state, a scale groove is opened on the top of the straight plate, a card indicator plate is provided on the top of the scale groove, and the card indicator plate is fixedly installed on the outer wall of another clamp.

[0011] In a preferred embodiment, a lifting and rotating mechanism is provided on both sides of the support plate, and the lifting and rotating mechanism includes support plates fixedly installed on both sides of the support plate, the two support plates are arranged in a parallel state, and the bottoms of the two support plates are rotatably installed with rotating shafts, the two rotating shafts are rotatably installed on the inner wall of the supporting basket body, and the outer walls of the two rotating shafts are fixedly installed with rollers, and the two rollers and the two support plates are arranged parallel to each other.

[0012] In a preferred embodiment, gears are fixedly installed on the outer walls of the two rotating shafts, a tooth plate is meshed on one side of the two gears, the two tooth plates are slidably installed on the inner wall of the supporting basket, support springs are fixedly installed on the bottom of the two tooth plates, and the two support springs are fixedly installed on the inner wall of the supporting basket.

[0013] In a preferred embodiment, a pressure-pull plate is fixedly mounted on the top of the two tooth plates, the two pressure-pull plates are slidably mounted on the outer wall of the supporting basket, and a pressing plate is fixedly mounted on the outer wall of the two pressure-pull plates.

[0014] The present invention also provides a method for using a silicon wafer basket for wafer processing and transportation, comprising the following steps:

[0015] Step 1: The rotating disk is turned to drive the rotating rod to rotate, and then the rotating rod drives the thread groove to rotate synchronously, and the thread groove causes the rotating rings on both sides to move synchronously, that is, the rotating rings on both sides pull the slider to deflect the drag plates on both sides;

[0016] Step 2: The pulling plates on both sides pull the horizontal plate to deflect outwards respectively, and then the horizontal plate drives the multiple telescopic rods to move outwards synchronously, and the telescopic rods extend synchronously, so that the clamping plates on both sides move outwards synchronously, driving the multiple card slots to move away from each other synchronously on the top of the pad support plate;

[0017] Step 3: One clamping plate drives the straight plate to move in the slot, and then the card plate at the bottom of the other clamping plate corresponds to the scale groove on the top of the moving straight plate;

[0018] Step 4: Place the wafer between the two clamping plates, and support the bottom of the wafer between the two clamping plates through the support plates and rollers on both sides;

[0019] Step 5: The pressing plate is pressed down to drive the pressure-pull plate to move downward synchronously, and then the pressure-pull plate drives the tooth plate to move downward synchronously on the carrying basket. The two tooth plates move downward to compress the support spring and drive the gear to rotate, that is, the gear drives the rotating shaft to rotate, that is, the rotating shaft drives the roller to rotate so that the wafer in contact with it is driven to rotate synchronously.

[0020] Technical effects and advantages of the present invention:

[0021] 1. The present invention drives the rotating rod to rotate synchronously by toggling the rotating disk, and the thread groove makes the rotating rings on both sides move synchronously, that is, the rotating rings on both sides pull the sliding blocks to make the drag plates on both sides deflect, and at this time, the drag plates on both sides pull the cross plates to deflect outward, and then the cross plates drive multiple telescopic rods to move outward synchronously and extend synchronously, so that the clamping plates on both sides move outward synchronously, and at this time, the clamping plates on both sides are pulled by the force of pulling to both sides and drive multiple card slots to move away from each other synchronously on the top of the pad support plate, so that the distance between the two clamping plates can be controlled to carry wafers of different sizes, and at the same time, one clamping plate drives the straight plate to move in the slot, and then the card indicator plate at the bottom of the other clamping plate corresponds to the scale groove on the top of the straight plate in motion, that is, the distance between the two clamping plates is directly displayed by the position of the card indicator plate on the straight plate on the scale groove, which is convenient for intuitively understanding the distance between the two clamping plates.

[0022] 2. At the same time, the bottom of the wafer placed between the two clamping plates is supported by the support plates on both sides, that is, the bottom of the wafer is in direct contact with the top of the roller. The pressing plate is pressed down to drive the pressure plate to move the tooth plate downward on the carrier basket. The two tooth plates move downward to compress the support spring and drive the gear to rotate. That is, the gear drives the rotating shaft to rotate, and the rotating shaft drives the roller to rotate so that the wafer in contact with it is driven to rotate synchronously, which is convenient for the wafer to be separated from the position where it was originally in contact with the carrier basket for more effective cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0024] Figure 2 It is a top view of the present invention.

[0025] Figure 3 It is a partial cross-sectional view of the present invention.

[0026] Figure 4 For the present invention Figure 3 A-section structure enlarged view.

[0027] Figure 5 For the present invention Figure 3 Enlarged view of the structure of part B.

[0028] Figure 6 It is a partial cross-sectional view of the lifting and rotating mechanism in the present invention.

[0029] Figure 7 For the present invention Figure 6 Enlarged view of the C structure.

[0030] The accompanying drawings are marked as follows: 1. load-bearing basket; 2. support plate; 3. cushion plate; 4. clamping and pushing mechanism; 41. rotating rod; 42. turntable; 43. threaded groove; 44. swivel; 45. slider; 46. drag plate; 47. cross plate; 48. telescopic rod; 49. clamping plate; 410. slot; 5. positioning mechanism; 51. slot; 52. straight plate; 53. scale groove; 54. indication plate; 6. lifting and turning mechanism; 61. support plate; 62. rotating shaft; 63. roller; 64. gear; 65. toothed plate; 66. supporting spring; 67. pressure-pull plate; 68. pressing plate. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Embodiment 1: Most of the wafer baskets in the prior art are fixed structures. When carrying wafers, they can only carry wafers of a specific size. They cannot be changed accordingly according to the different sizes of wafers to adjust the carrying space, and thus cannot adapt to different wafers for carrying and moving. To solve this problem, the following technical solution is proposed:

[0033] Refer to the instruction manual Figure 1-Figure 7 , a silicon wafer basket for wafer processing and transportation, such as Figure 1 and Figure 2 As shown, it comprises a load-bearing basket body 1, a support plate 2 is fixedly installed at the bottom of the load-bearing basket body 1, a cushion support plate 3 is fixedly installed on the top of the support plate 2, and a clamping and pushing mechanism 4 and a positioning mechanism 5 are arranged on both sides of the cushion support plate 3;

[0034] like Figure 3 and Figure 4 As shown, the clamping and pushing mechanism 4 includes a rotating rod 41 rotatably mounted on the inner wall of the support plate 2. The rotating rod 41 is driven to rotate by turning a turntable 42. The rotating rod 41 is arranged in a horizontal state. Turntables 42 are fixedly mounted on both sides of the rotating rod 41. Thread grooves 43 are provided on the outer walls of both sides of the rotating rod 41. Then, the rotating rod 41 drives the thread grooves 43 to rotate synchronously. The outer wall of the thread groove 43 is threadedly connected with a swivel 44. The thread groove 43 enables the swivel rings 44 on both sides to move synchronously.

[0035] like Figure 3 and Figure 4 As shown, sliders 45 are rotatably installed on both sides of the swivel 44, and drag plates 46 are slidably installed on the outer walls of the two sliders 45. The drag plates 46 are rotatably installed on the bottom of the supporting basket 1. There are two drag plates 46, and the two drag plates 46 are symmetrically arranged with each other, that is, the swivels 44 on both sides pull the sliders 45 to make the drag plates 46 on both sides deflect, so that the drag plates 46 change the inclination angle.

[0036] like Figure 3 and Figure 4 As shown, the tops of the two drag plates 46 are respectively hinged with cross plates 47, so the drag plates 46 on both sides pull the cross plates 47 to offset outwards, and the two cross plates 47 are symmetrically arranged. A plurality of telescopic rods 48 are fixedly installed on the tops of the two cross plates 47, and then the cross plates 47 drive the plurality of telescopic rods 48 to move synchronously to one side, and the telescopic rods 48 are synchronously telescoped, and a splint 49 is fixedly installed on the tops of the plurality of telescopic rods 48. There are two splints 49, and the two splints 49 are arranged parallel to each other. The two splints 49 are slidably installed on the top of the pad support plate 3, and the outer walls of the two splints 49 are respectively provided with a plurality of slots 410, so that the splints 49 on both sides move synchronously to one side, that is, the splints 49 on both sides drive the plurality of slots 410 to move relatively on the top of the pad support plate 3 synchronously.

[0037] like Figure 3 and Figure 5As shown, the positioning mechanism 5 includes a slot 51 opened on the top of the pad support plate 3, and a straight plate 52 is slidably installed on the top of the slot 51, and the straight plate 52 is fixedly installed on the bottom of a clamping plate 49. When the clamping plates 49 on both sides move relatively, one clamping plate 49 drives the straight plate 52 to move in the slot 51, and the straight plate 52 is arranged in a horizontal state. A scale groove 53 is opened on the top of the straight plate 52, and a card indicator plate 54 is provided on the top of the scale groove 53. The card indicator plate 54 is fixedly installed on the outer wall of the other clamping plate 49, and then the card indicator plate 54 at the bottom of the other clamping plate 49 corresponds to the scale groove 53 on the top of the straight plate 52 in motion, that is, the distance between the two clamping plates 49 is directly displayed by the position of the card indicator plate 54 on the straight plate 52 on the scale groove 53, which is convenient for intuitively understanding the distance between the two clamping plates 49.

[0038] In specific implementation, the rotating disk 42 is driven to rotate the rotating rod 41, and then the rotating rod 41 drives the thread groove 43 to rotate synchronously, then the thread groove 43 makes the rotating rings 44 on both sides move synchronously, that is, the rotating rings 44 on both sides pull the slider 45 to make the drag plates 46 on both sides deflect, at this time, the drag plates 46 on both sides pull the cross plate 47 to deflect outward respectively, and then the cross plate 47 drives the multiple telescopic rods 48 to move outward synchronously, then the telescopic rods 48 extend synchronously, so that the clamping plates 49 on both sides move outward synchronously, at this time, the clamping plates 49 on both sides are pulled to both sides by the force, and drive the multiple card slots 410 to move away from each other synchronously on the top of the pad plate 3, so that the distance between the two clamping plates 49 can be controlled to facilitate the carrying of wafers of different sizes;

[0039] At the same time, one clamping plate 49 drives the straight plate 52 to move in the slot 51, and then the indicating plate 54 at the bottom of the other clamping plate 49 corresponds to the scale groove 53 on the top of the moving straight plate 52, that is, the distance between the two clamping plates 49 is directly displayed by the position of the indicating plate 54 on the straight plate 52 on the scale groove 53, which is convenient for intuitively understanding the distance between the two clamping plates 49.

[0040] Embodiment 2: The conventional flower basket can only keep the wafers stationary when carrying the wafers. Therefore, when cleaning, it is difficult to effectively clean the position where the wafers contact the flower basket because the wafers cannot be rotated. To solve this problem, the following technical solution is proposed:

[0041] like Figure 6 and Figure 7As shown, a lifting and rotating mechanism 6 is provided on both sides of the support plate 2, and the lifting and rotating mechanism 6 includes a support plate 61 fixedly installed on both sides of the support plate 2, and the two support plates 61 are arranged in a parallel state, so that the bottom of the wafer placed between the two clamping plates 49 is supported by the support plates 61 on both sides, and the bottom of the two support plates 61 is rotatably installed with a rotating shaft 62, and the two rotating shafts 62 are rotatably installed on the inner wall of the supporting basket body 1, and the outer wall of the two rotating shafts 62 is fixedly installed with a driving roller 63, and the two driving rollers 63 and the two support plates 61 are arranged parallel to each other, that is, the bottom of the wafer is in direct contact with the top of the driving roller 63 on the support plate 61 driven by the rotating shaft 62.

[0042] like Figure 6 and Figure 7 As shown, gears 64 are fixedly installed on the outer walls of the two rotating shafts 62, and a tooth plate 65 is meshed on one side of the two gears 64. The two tooth plates 65 are slidably installed on the inner wall of the supporting basket body 1, and support springs 66 are fixedly installed on the bottom of the two tooth plates 65. The two support springs 66 are fixedly installed on the inner wall of the supporting basket body 1, and then the two tooth plates 65 move downward to compress the support springs 66 and drive the gears 64 to rotate, that is, the gears 64 drive the rotating shaft 62 to rotate.

[0043] like Figure 6 and Figure 7 As shown, a pressure-pull plate 67 is fixedly installed on the top of the two tooth plates 65, and the two pressure-pull plates 67 are slidably installed on the outer wall of the supporting basket body 1. A pressing plate 68 is fixedly installed on the outer wall of the two pressure-pull plates 67. By pressing the pressing plate 68 downward, the pressure-pull plate 67 is driven to move downward synchronously, and then the pressure-pull plate 67 drives the tooth plates 65 to move downward synchronously on the supporting basket body 1.

[0044] In the specific implementation, the bottom of the wafer placed between the two clamping plates 49 is supported by the two side support plates 61, that is, the bottom of the wafer is in direct contact with the top of the roller 63 on the support plate 61 driven by the rotating shaft 62, and the pressing plate 68 is pressed down to drive the pressure plate 67 to move downward synchronously, and then the pressure plate 67 drives the tooth plate 65 to move downward synchronously on the supporting basket 1, and the two tooth plates 65 move downward to compress the support spring 66 and drive the gear 64 to rotate, that is, the gear 64 drives the rotating shaft 62 to rotate, that is, the rotating shaft 62 drives the roller 63 to rotate so that the wafer in contact with it is driven to rotate synchronously, which is convenient for the wafer to be separated from the position where it originally contacted the supporting basket 1 for more effective cleaning, and after releasing the pressing plate 68, the tooth plate 65 is restored by the supporting spring 66 and drives the gear 64 to rotate again, so that the wafer rotates again to return to its original position.

[0045] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0046] Secondly: In the drawings of the embodiments disclosed in the present invention, only the structures related to the embodiments disclosed in the present invention are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

[0047] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon wafer basket for wafer processing and transportation, comprising a carrying basket body (1), a support plate (2) fixedly mounted on the bottom of the carrying basket body (1), and a cushioning plate (3) fixedly mounted on the top of the support plate (2), characterized in that: A clamping and pushing mechanism (4) and a positioning mechanism (5) are provided on both sides of the cushion support plate (3); The clamping and pushing mechanism (4) comprises a rotating rod (41) rotatably mounted on the inner wall of the support plate (2), the rotating rod (41) being arranged in a horizontal state, rotating disks (42) being fixedly mounted on both sides of the rotating rod (41), thread grooves (43) being formed on the outer walls of both sides of the rotating rod (41), and rotating rings (44) being threadedly connected to the outer walls of the thread grooves (43); Slide blocks (45) are rotatably mounted on both sides of the rotating ring (44), and drag plates (46) are slidably mounted on the outer walls of the two slide blocks (45). The drag plates (46) are rotatably mounted on the bottom of the supporting basket (1), and there are two drag plates (46), which are symmetrically arranged with respect to each other; The tops of the two pulling plates (46) are respectively hinged with a transverse plate (47), the two transverse plates (47) are symmetrically arranged, a plurality of telescopic rods (48) are fixedly installed on the tops of the two transverse plates (47), a clamping plate (49) is fixedly installed on the tops of the plurality of telescopic rods (48), there are two clamping plates (49), the two clamping plates (49) are arranged parallel to each other, the two clamping plates (49) are slidably installed on the tops of the pad support plates (3), and the outer walls of the two clamping plates (49) are respectively provided with a plurality of slots (410); The positioning mechanism (5) comprises a slot (51) formed on the top of the pad support plate (3); a straight plate (52) is slidably mounted on the top of the slot (51); the straight plate (52) is fixedly mounted on the bottom of a clamping plate (49); the straight plate (52) is arranged in a horizontal state; a scale groove (53) is formed on the top of the straight plate (52); a card indicating plate (54) is fixedly mounted on the outer wall of another clamping plate (49).

2. The silicon wafer basket for wafer processing and transportation according to claim 1, characterized in that: A lifting and rotating mechanism (6) is provided on both sides of the support plate (2), and the lifting and rotating mechanism (6) comprises a support plate (61) fixedly mounted on both sides of the support plate (2), the two support plates (61) being arranged in a parallel state, a rotating shaft (62) being rotatably mounted on the bottom of the two support plates (61), the two rotating shafts (62) being rotatably mounted on the inner wall of the supporting basket (1), a shifting roller (63) being fixedly mounted on the outer wall of the two rotating shafts (62), and the two shifting rollers (63) and the two support plates (61) being arranged in parallel with each other; Gears (64) are fixedly mounted on the outer walls of the two rotating shafts (62); a toothed plate (65) is meshed on one side of the two gears (64); the two toothed plates (65) are slidably mounted on the inner wall of the carrying basket (1); support springs (66) are fixedly mounted on the bottoms of the two toothed plates (65); and the two support springs (66) are fixedly mounted on the inner wall of the carrying basket (1); A pressure-pull plate (67) is fixedly mounted on the top of the two tooth plates (65); the two pressure-pull plates (67) are slidably mounted on the outer wall of the bearing basket (1); and a pressing plate (68) is fixedly mounted on the outer wall of the two pressure-pull plates (67).

3. A method for using a silicon wafer basket for wafer processing and transportation, using the silicon wafer basket for wafer processing and transportation as claimed in claim 2, characterized in that: The following steps are involved: Step 1: The rotating disk (42) is turned to drive the rotating rod (41) to rotate, and then the rotating rod (41) drives the thread groove (43) to rotate synchronously, and the thread groove (43) causes the rotating rings (44) on both sides to move synchronously, that is, the rotating rings (44) on both sides pull the slider (45) to cause the drag plates (46) on both sides to deflect; Step 2: The pulling plates (46) on both sides respectively pull the horizontal plate (47) to deflect outwards, so that the horizontal plate (47) drives the multiple telescopic rods (48) to move outwards synchronously, and the telescopic rods (48) extend synchronously, so that the clamping plates (49) on both sides move outwards synchronously, driving the multiple card slots (410) to move away from each other synchronously on the top of the pad support plate (3); Step 3: One clamping plate (49) drives the straight plate (52) to move in the slot (51), so that the indicating plate (54) at the bottom of the other clamping plate (49) corresponds to the scale groove (53) at the top of the moving straight plate (52); Step 4: Place a wafer between the two side clamps (49), and support the bottom of the wafer placed between the two clamps (49) through the support plates (61) and the rollers (63) on both sides; Step 5: The pressing plate (68) is pressed downward to drive the pressure plate (67) to move downward synchronously, and then the pressure plate (67) drives the tooth plate (65) to move downward synchronously on the supporting basket (1). The two tooth plates (65) move downward to compress the support spring (66) and drive the gear (64) to rotate, that is, the gear (64) drives the rotating shaft (62) to rotate, that is, the rotating shaft (62) drives the paddle roller (63) to rotate so that the wafer in contact with it is driven to rotate synchronously.

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