A vacuum drying device and inkjet printing system suitable for large-size panels

Abstract

The present application relates to a vacuum drying device and inkjet printing system suitable for large-size panels, comprising: a housing; a vacuum assembly comprising a first vacuum module, wherein a plurality of first connecting ports are evenly arranged on the bottom surface of the housing, and the first vacuum module is connected to the interior of the housing through the plurality of first connecting ports; a carrier plate, which is installed in the housing; a pin assembly comprising a connector and a plurality of pin modules, wherein the plurality of pin modules are evenly installed on the connector at the same horizontal plane, and the plurality of pin modules all pass through the carrier plate; a lifting mechanism comprising a lifting drive assembly and a plurality of ejector rods, wherein the lifting drive assembly is installed on the outer bottom surface of the housing, and the plurality of ejector rods are all installed on the driving end of the lifting drive assembly for lifting and lowering movement, the ejector rods extend into the housing, and the ejector rods are suitable for passing through the connector to support or push the carrier plate. The present application improves the vacuuming efficiency and the uniformity of film formation on the substrate surface.

Description

Technical Field

[0001] The present application relates to the field of vacuum drying technology, and in particular to a vacuum drying device and an inkjet printing system suitable for large-size panels. Background Art

[0002] Inkjet printing is already used in the manufacturing process of existing OLED or QLED devices. Certain functional materials can be printed using inkjet printing, such as the hole injection layer (HIL), hole transport layer (HTL), and light-emitting layer (EML). The same applies to other inkjet-printable functional layers. That is, for existing pixel pits, inkjet printing is used to inject the functional layer material ink into the pixel pits.

[0003] For various factors affecting the efficiency of OLED devices, the uniformity of film formation of each functional layer material is a very important consideration. Generally, vacuum drying equipment is used to dry the substrate to form the film.

[0004] In related technologies, substrates are placed in a closed box and dried by evacuating the box. Specifically, the box is equipped with a carrier plate, an ejector plate, and a lifting mechanism. The top of the box is connected to a pump. Multiple ejector pins on the ejector plate pass through the carrier plate from bottom to top. The lifting mechanism drives the ejector plate up and down. The ejector pins rise to receive the substrates, then descend to place the substrates on the carrier plate to complete loading. The pump can then be turned on to vacuum dry the substrates.

[0005] However, when vacuum drying large-sized substrates, a large-capacity box needs to be arranged accordingly. A lifting mechanism needs to be arranged under the ejector plate in the box, which means that additional installation space needs to be reserved under the ejector plate, further increasing the internal volume of the box. Since the box needs to be vacuumed, the excessive space inside the box will lead to slower vacuuming efficiency on the one hand, and on the other hand, when the solvent on the substrate dries and evaporates, the evaporated solvent will rise. Since the ejector plate and lifting mechanism need to be arranged under the carrier plate in the box, the space below the carrier plate is too large, and the gas in the lower space of the box will also rise, which will interfere with the airflow on the surface of the substrate, affecting the drying consistency of the substrate surface and adversely affecting the film quality. Summary of the Invention

[0006] The embodiments of the present application provide a vacuum drying device and inkjet printing system suitable for large-size panels to solve the technical problems in the related art of low vacuuming efficiency, easily turbulent airflow on the substrate surface, and adverse effects on film quality.

[0007] In a first aspect, a vacuum drying device suitable for large-size panels is provided, comprising:

[0008] Box;

[0009] A vacuum assembly, the vacuum assembly comprising a first vacuum module, a plurality of first communication ports being uniformly opened on the bottom surface of the box, the first vacuum module being in communication with the interior of the box through the plurality of first communication ports;

[0010] A carrying plate, the carrying plate is installed in the box body and is used to carry the substrate;

[0011] An ejector assembly, the ejector assembly comprising a connecting member and a plurality of ejector modules, wherein the plurality of ejector modules are evenly mounted on the connecting member on the same horizontal plane, the connecting member is located below the carrier plate, and the plurality of ejector modules all pass through the carrier plate;

[0012] The lifting mechanism includes a lifting drive assembly and a plurality of ejector rods. The lifting drive assembly is installed on the outer bottom surface of the box body. The plurality of ejector rods are installed on the driving end of the lifting drive assembly for lifting and lowering movement. The ejector rods extend into the box body and are suitable for passing through the connecting member to support or push the supporting plate.

[0013] In some embodiments, the lifting mechanism further includes a plurality of flexible sleeves, wherein the flexible sleeves are provided on the ejection rod, and two ends of the flexible sleeves are respectively sealedly connected to the outer bottom surface of the box body and the driving end of the lifting drive assembly.

[0014] In some embodiments, the lifting drive assembly includes:

[0015] A plurality of mounting seats, wherein the plurality of mounting seats are fixed at intervals on the outer bottom surface of the box body;

[0016] A sliding frame, wherein the sliding frame is lifted and slidably arranged on the plurality of mounting seats, and the plurality of ejector rods are fixed on the sliding frame;

[0017] A plurality of lifting driving members are respectively installed on the plurality of mounting seats and synchronously drive the sliding frame to move up and down.

[0018] In some embodiments, the vacuum assembly further includes a second vacuum module, and a plurality of second communication ports are opened on the side of the box body and / or on the top surface of the box body, and the second vacuum module is connected to the interior of the box body through the plurality of second communication ports.

[0019] In some embodiments, the vacuum drying device for large-size panels further comprises a condensation plate, which is disposed near the inner top surface of the box and is located above the carrying plate;

[0020] The plurality of second communication openings of the box body are all arranged close to the edge of the top surface of the box body, and the plurality of second communication openings are evenly arranged.

[0021] In some embodiments, a passage opening is provided on the side of the box body, and the passage opening and the second communication opening on the side of the box body are respectively located on adjacent sides of the box body; a passage door is hinged at the passage opening of the box body; wherein,

[0022] After the passage door is opened, the inner side surface of the passage door is flush with the bottom surface of the passage opening.

[0023] In some embodiments, the vacuum drying equipment suitable for large-size panels further includes a plurality of slide rail assemblies, wherein the slide rail assemblies include:

[0024] A guide groove is laid on the bottom surface of the box body along the direction toward the passage opening, and a plurality of the guide grooves are arranged side by side;

[0025] A plurality of rollers are mounted on the bottom surface of the connecting member, and the rollers roll in the guide groove; wherein,

[0026] The carrying plate is supported by the connecting member and slides out of the passage opening along with the connecting member.

[0027] In some embodiments, the vacuum drying equipment suitable for large-size panels also includes multiple limiting structures, the limiting structures including limiting columns and limiting holes, the limiting columns and the limiting holes are respectively arranged on the sides of the connecting member and the supporting plate facing each other, the limiting columns are suitable for being inserted into the limiting holes, and the connecting member and the supporting plate form a plug-in fit through the cooperation of the limiting columns and the limiting holes.

[0028] In some embodiments, the vacuum drying equipment for large-size panels further comprises a plurality of support blocks, the top surface of the carrier plate is evenly provided with a plurality of connection structures for mounting the support blocks, and the support blocks are mounted on the carrier plate via the connection structures;

[0029] The condensation plate is detachably connected to the box; wherein,

[0030] The connection between the condensing plate and the box body is released. The condensing plate is supported by the plurality of supporting blocks. The condensing plate, the ejector pin assembly and the supporting plate are slid out of the box body from the passage opening.

[0031] In some embodiments, the vacuum drying equipment suitable for large-size panels further includes a plurality of slide rails, the condensation plate is slidably connected to the box body via the slide rails, and the condensation plate is suitable for sliding out of the box body from the passage opening.

[0032] In some embodiments, baffles are provided on the circumferential side surfaces of the supporting plate, and the height of the baffles is higher than the top surface of the supporting plate.

[0033] In some embodiments, the ejector module includes:

[0034] a magnetic base connected to the connecting member;

[0035] an adjustment seat, the adjustment seat being magnetically connected to the magnetic seat and capable of translating in a horizontal plane relative to the magnetic seat;

[0036] A needle body, the needle body is connected to the adjustment seat; wherein,

[0037] The supporting plate is provided with a plurality of mounting holes for the needle body to pass through, and the position of the adjustment seat is adjusted relative to the magnetic seat so that the needle body can pass through the mounting holes.

[0038] The beneficial effects of the technical solution provided by this application include:

[0039] The embodiment of the present application provides a vacuum drying device suitable for large-sized panels. Since the first vacuum module evacuates air from the box through multiple first connecting ports on the bottom surface of the box, and simultaneously performs vacuuming operations on multiple locations in the box, the airflow in the box will not be concentrated. Even if the box is large in size and has a large internal space, the airflow in each location can still be more uniform when drying the substrate, ensuring better drying consistency at each location of the internal substrate and a more uniform film-forming effect. Due to the use of multi-point air extraction, the air extraction rate is higher and the vacuuming efficiency is higher. In addition, since the air in the box is extracted below the carrier plate, the airflow is not likely to directly act on the surface of the substrate. The airflow on the surface of the substrate is more stable and less prone to turbulence, thereby ensuring the quality of film formation.

[0040] During loading and unloading, the lifting mechanism lowers the carrier plate, creating a gap between the top of the ejector module and the carrier plate. This allows room for an external robot to move, facilitating loading and unloading of substrates. The carrier plate then rises to receive and support the substrate. As you can see, the ejector assembly does not move. Therefore, after loading and supporting the substrate, it does not move with the ejector assembly, minimizing the risk of scratches or even breakage on large substrates.

[0041] Furthermore, the lifting mechanism is located outside the box, meaning only space is required beneath the carrier plate for the connectors of the ejector assembly. This allows for a smaller box design, further improving the efficiency of vacuuming within the box. Furthermore, since the space beneath the carrier plate within the box is reduced, the likelihood of airflow disturbances beneath the carrier plate is reduced, allowing the exhaust airflow to flow more evenly from above the carrier plate to the first connection port. This results in more stable airflow on the substrate surface, resulting in more consistent drying of the substrate surface and higher film quality.

[0042] In a second aspect, an inkjet printing system is provided, comprising the vacuum drying device suitable for large-size panels as described above.

[0043] Another embodiment of the present application provides an inkjet printing system. Since the inkjet printing system includes the above-mentioned vacuum drying equipment suitable for large-size panels, the beneficial effects of the inkjet printing system are consistent with the beneficial effects of the above-mentioned vacuum drying equipment suitable for large-size panels, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0045] Figure 1 A schematic diagram of a vacuum drying device suitable for large-size panels provided in an embodiment of the present application;

[0046] Figure 2 A schematic diagram of another perspective of a vacuum drying device for large-size panels provided in an embodiment of the present application;

[0047] Figure 3 A schematic diagram of a lifting mechanism, ejector assembly, and carrier plate provided in an embodiment of the present application;

[0048] Figure 4 A schematic diagram of a lifting mechanism provided in an embodiment of the present application;

[0049] Figure 5 A schematic diagram of a carrier plate and ejector pin assembly provided in an embodiment of the present application;

[0050] Figure 6 A schematic diagram of a carrier plate and ejector pin assembly from another perspective provided in an embodiment of the present application;

[0051] Figure 7 A schematic diagram of the assembly of a carrier plate and ejector pin assembly provided in an embodiment of the present application;

[0052] Figure 8 A schematic diagram of the auxiliary rail provided in an embodiment of the present application being installed on a box;

[0053] Figure 9 A schematic diagram of a condenser plate provided in an embodiment of the present application being supported by a support block;

[0054] Figure 10 A schematic diagram showing the connection between the condensing plate provided in an embodiment of the present application and the housing by means of a slide rail;

[0055] Figure 11 A schematic diagram of the ejector module provided in an embodiment of the present application.

[0056] In the figure: 1. Box; 101. Passage door; 102. Limit block; 1a. Passage opening; 1b. First communication opening; 1c. Second communication opening; 1d. Observation port; 2. Vacuum assembly; 201. First vacuum module; 202. Second vacuum module; 3. Carrying plate; 301. Baffle; 3a. Mounting hole; 4. Ejector pin assembly; 401. Connector; 402. Ejector pin module; 4021. Magnetic seat; 4022. Adjustment seat; 4023. Needle body; 5. Lifting mechanism; 501. Lifting drive assembly; 5011. Mounting seat; 5012, sliding frame; 5013, lifting drive member; 502, ejector rod; 503, flexible sleeve; 6, condensation plate; 6a, observation hole; 7, slide rail assembly; 701, guide groove; 702, roller; 8, limiting structure; 801, limiting column; 802, limiting hole; 9, support block; 10, connecting structure; 1001, pin hole; 1002, connecting pin; 11, slide rail; 12, visual inspection module; 13, auxiliary rail; 14, alignment structure; 1401, alignment block; 1402, alignment groove. DETAILED DESCRIPTION

[0057] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0058] The embodiment of the present application provides a vacuum drying device and inkjet printing system suitable for large-size panels, which utilizes a first vacuum module to uniformly evacuate the inside of the box from multiple first connecting ports to improve the vacuuming efficiency and ensure the uniformity of the airflow on the surface of the large-size substrate, thereby improving the uniformity of the film formed on the surface of the substrate. In addition, the lifting mechanism is placed outside the box to reduce the required reserved space under the carrier plate in the box, reduce the possibility of airflow turbulence under the carrier plate, ensure the stability of the airflow on the surface of the substrate, improve the uniformity of film formation, reduce the internal space of the box, and improve the vacuuming efficiency. The present application solves the technical problems in the related art of low vacuuming efficiency, easy turbulence of the airflow on the surface of the substrate, and adverse effects on the film quality.

[0059] Reference Figure 1-Figure 3A vacuum drying device suitable for large-size panels includes a housing 1, a vacuum assembly 2, a carrier plate 3, an ejector assembly 4, and a lifting mechanism 5. The vacuum assembly 2 is used to evacuate the interior of the housing 1, the ejector assembly 4 is used to support the substrate, and the lifting mechanism 5 is arranged outside the housing 1 and is used to drive the carrier plate 3 up and down to support the substrate.

[0060] Reference Figure 1-Figure 3 The box 1 is a cube, made of multiple welded plates. A passage opening 1a is provided on the side of the box 1, and a passage door 101 is provided at each passage opening 1a. The passage door 101 is used to open and close the passage opening 1a, and substrates are delivered from the passage opening 1a into the box 1 by an external robot.

[0061] This arrangement facilitates the formation of a large-volume box body 1 by welding multiple plates, and is suitable for the processing of large-sized substrates.

[0062] In some embodiments, passage openings 1a are provided on two opposite sides of the box body 1, and passage doors 101 are provided at the passage openings 1a. The passage openings 1a can be used for loading and unloading substrates or for maintenance inside the box body 1, which is not limited here.

[0063] The arrangement of two opposite channel openings 1a facilitates loading and unloading of substrates. The substrates can be loaded and unloaded respectively from the two channel openings 1a, which results in a better processing rhythm for loading and unloading and improves processing efficiency.

[0064] It should be noted that the vacuum drying equipment in this embodiment is suitable for large-size substrates processed by G6 and G8.5 generation lines. G6 substrates measure 1500×1850mm, while G8.5 substrates measure 2200×2500mm. These larger substrates require a larger housing 1. Furthermore, vacuum drying of substrates makes it more difficult to control the exhaust airflow, and large substrates are more prone to uneven film formation.

[0065] Reference Figure 1-Figure 3 The vacuum assembly 2 includes a first vacuum module 201. The first vacuum module 201 is used to evacuate the interior of the housing 1 from the bottom. By evacuating the interior of the housing 1 from below the carrier plate 3, the exhaust airflow is less likely to directly impact the substrate surface, resulting in a more stable and less turbulent airflow on the substrate surface, ensuring film quality.

[0066] The carrier plate 3 is installed in the box body 1 and placed horizontally in the box body 1. The carrier plate 3 is used to support the substrate, and the substrate is laid flat on the carrier plate 3. The carrier plate 3 evenly supports the substrate to prevent the substrate from being deformed due to uneven force, thereby improving the film quality on the substrate.

[0067] Reference Figure 1-Figure 3The ejector assembly 4 includes a connector 401 and multiple ejector modules 402. The connector 401 is located below the carrier plate 3 and is mounted on the inner bottom surface of the box 1. Multiple ejector modules 402 are evenly mounted on the connector 401 at the same level and pass through the carrier plate 3. The multiple ejector modules 402 are used to provide multi-point support for the substrate. In this embodiment, the connector 401 includes a connecting plate. In other embodiments, the connector 401 may also include a connecting frame.

[0068] Reference Figure 1-Figure 3 The lifting mechanism 5 is installed on the outer bottom surface of the box body 1. The driving end of the lifting mechanism 5 extends into the box body 1 and passes through the connecting piece 401 to support or push the supporting plate 3.

[0069] When loading and unloading substrates, the top surface of the carrier plate 3 is lower than the top of the ejector module 402. The substrate is supported by multiple ejector modules 402, and gaps are left between the multiple ejector modules 402. An external robot is suitable for extending into the gaps between the ejector modules 402, and the external robot carries the substrate from below. The height difference between the top of the ejector module 402 and the carrier plate 3 leaves space for the robot to accommodate. When the substrate is dried, the lifting mechanism 5 drives the carrier plate 3 to rise, so that the top surface of the carrier plate 3 is higher than the top of the ejector module 402, and the carrier plate 3 evenly supports the substrate to ensure that the substrate is evenly supported, the substrate flatness is improved, and the film forming effect is guaranteed.

[0070] Since the ejector assembly 4 does not perform lifting motion, the substrate will not move with the ejector assembly 4 after being loaded and supported by the ejector assembly 4, thereby reducing the risk of scratching or even breaking the large-sized substrate.

[0071] Reference Figure 1-Figure 3 Specifically, the lifting mechanism 5 includes a lifting drive assembly 501 and multiple ejector rods 502. The lifting drive assembly 501 is installed on the outer bottom surface of the box body 1. Multiple ejector rods 502 are all installed on the driving end of the lifting drive assembly 501 for lifting and lowering movement. The ejector rods 502 extend into the box body 1, and the ejector rods 502 are suitable for passing through the connecting piece 401 to support or push the supporting plate 3.

[0072] The plurality of ejector pins 502 are evenly arranged and used to provide multi-point support for the load plate 3. In this embodiment, four ejector pins 502 are provided, and the four ejector pins 502 are respectively arranged near the corners of the bottom surface of the load plate 3. In other embodiments, depending on the size of the load plate 3, multiple ejector pins 502 may be arranged to ensure stable support for the load plate 3.

[0073] With this arrangement, only the ejector rod 502 of the lifting mechanism 5 extends into the housing 1, eliminating the need for additional space within the housing 1 for the lifting mechanism 5. Specifically, only space for the connector 401 of the ejector assembly 4 needs to be reserved below the carrier plate 3. This allows the housing 1 to be designed smaller, improving the efficiency of vacuuming the interior of the housing 1. Furthermore, since the space below the carrier plate 3 within the housing 1 is reduced, the likelihood of airflow disturbances below the carrier plate 3 is reduced, allowing the exhaust airflow to flow more evenly from above the carrier plate 3 to the first vacuum module 201 connected to the bottom of the housing 1. This results in more stable airflow on the substrate surface, resulting in better drying consistency on the substrate surface and higher film quality.

[0074] Reference Figure 1-Figure 3 The lifting mechanism 5 further includes a plurality of flexible sleeves 503, which are sleeved on the ejection rods 502, and the two ends of the flexible sleeves 503 are respectively sealed to the outer bottom surface of the box body 1 and the driving end of the lifting drive assembly 501. In this embodiment, the flexible sleeves 503 include bellows.

[0075] With this arrangement, the flexible sleeve 503 seals the position on the bottom wall of the box body 1 where the ejection rod 502 is inserted, so as to improve the sealing performance of the interior of the box body 1. The flexible sleeve 503 is arranged on the outside of the box body 1, and the flexible sleeve 503 does not occupy the space inside the box body 1, which facilitates the design of a smaller size of the box body 1. Since the flexible sleeve 503 is arranged on the outside of the box body 1, it is more convenient to inspect and repair the flexible sleeve 503. At the same time, since the ejection rod 502 only pushes on the load-bearing plate 3 and is not connected to the load-bearing plate 3, the ejection rod 502 can leave the box body 1. When the lifting mechanism 5 is installed and disassembled, the lifting mechanism 5 is more independent relative to the box body 1, which is convenient for storing and transporting the box body 1 and the lifting mechanism 5 separately, and facilitates the installation and disassembly of the lifting mechanism 5.

[0076] Reference Figure 2-Figure 4 Specifically, the lifting drive assembly 501 includes a sliding frame 5012, a plurality of mounting seats 5011 and a plurality of lifting drive members 5013. The plurality of mounting seats 5011 are fixed at intervals on the outer bottom surface of the box body 1. The sliding frame 5012 is set on the plurality of mounting seats 5011 for lifting and sliding through a guide rail group, and the plurality of ejector rods 502 are all fixed on the sliding frame 5012. The plurality of lifting drive members 5013 are respectively installed on the plurality of mounting seats 5011, and synchronously drive the sliding frame 5012 to rise and fall. In this embodiment, the plurality of mounting seats 5011 are arranged at intervals along a straight line direction. Preferably, the plurality of mounting seats 5011 are arranged at intervals along the length direction of the box body 1.

[0077] With this arrangement, since the carrier plate 3 needs to carry large-sized substrates, the carrier plate 3 itself is relatively large in size and weight. Multiple lifting drive members 5013 synchronously drive the sliding frame 5012 up and down, thereby synchronously driving the lifting and lowering motion of each position of the sliding frame 5012. This ensures that the lifting and lowering strokes of the multiple ejection rods 502 on the sliding frame 5012 are consistent, thereby achieving simultaneous and synchronous ejection of multiple positions of the carrier plate 3. This improves the lifting stability of the carrier plate 3. Moreover, since the carrier plate 3 is evenly supported at multiple points, the flatness of the carrier plate 3 is more easily maintained, ensuring flat and uniform support for the substrates.

[0078] In this embodiment, the lifting drive component 5013 includes a screw mechanism or a linear motor.

[0079] The mounting base 5011 is fixed to the outer bottom surface of the box body 1 by welding or bolts. By placing the sliding frame 5012 and the lifting drive member 5013 on the mounting base 5011 and then installing them on the box body 1, it is easier to install large-sized parts. In addition, the mounting base 5011 is installed on the outer bottom surface of the box body 1, which also facilitates the arrangement of more mounting bases 5011 and lifting drive members 5013.

[0080] Reference Figure 1-Figure 3 , wherein the first vacuum module 201 includes a first pump body, and the first pump body is connected to the bottom surface of the box body 1.

[0081] Reference Figure 1-Figure 3 Specifically, a plurality of first communication ports 1b are uniformly formed on the bottom surface of the box body 1. The first pump body is connected to the plurality of first communication ports 1b through a pipeline and is connected to the interior of the box body 1 to synchronously pump air into the box body 1. In this embodiment, the first pump body includes a dry pump.

[0082] With this arrangement, since the first vacuum module 201 evacuates the interior of the housing 1 through the multiple first connecting ports 1b on the bottom surface of the housing 1, and simultaneously evacuates multiple locations within the housing 1, the exhaust airflow within the housing 1 will not be concentrated. Even if the housing 1 is large in size and has a large internal space, the airflow can still be more uniform throughout the substrate drying process, ensuring better drying consistency across the internal substrate and a more uniform film-forming effect. Due to the use of multiple-point exhaust, the exhaust rate is higher and the vacuuming efficiency is higher. In addition, since the exhaust air within the housing 1 is evacuated below the carrier plate 3, the exhaust airflow is less likely to directly act on the substrate surface, and the airflow on the substrate surface is more stable and less prone to disturbance, thereby ensuring the quality of film formation.

[0083] In other embodiments, multiple first pump bodies may be installed at multiple first communication ports 1 b on the outer bottom surface of the box body 1 to improve the integrity of the entire vacuum drying equipment.

[0084] Furthermore, the vacuum assembly 2 also includes a control module, which is electrically connected to the multiple first pump bodies to adjust the power of the multiple first pump bodies to make the exhaust airflow in the box body 1 more stable.

[0085] Reference Figures 8-10 The vacuum drying apparatus for large-sized panels further includes a condenser plate 6, which is mounted within the housing 1 and positioned near the inner top surface of the housing 1, with a gap between the condenser plate 6 and the inner top surface. The condenser plate 6 is positioned above and parallel to the carrier plate 3. Cooling channels are arranged within the condenser plate 6, which lower the temperature of the condenser plate 6 through liquid cooling, keeping it lower than the temperature of the carrier plate 3.

[0086] This arrangement creates an upward airflow between the carrier plate 3 and the condenser plate 6, as the temperature of the condenser plate 6 is lower than that of the carrier plate 3. As the functional liquid dries to form a film on the substrate surface, the volatilized solvent rises with the upward airflow. This creates a more stable airflow between the substrate on the carrier plate 3 and the condenser plate 6, reducing airflow disturbances. This results in a more uniform airflow across the substrate surface, improved drying consistency, and enhanced film uniformity.

[0087] Reference Figure 1-Figure 3 The vacuum assembly 2 further includes a second vacuum module 202, which includes multiple second pump bodies. Multiple second communication ports 1c are formed on the side surfaces and / or the top surface of the housing 1. The multiple second pump bodies communicate with the interior of the housing 1 through the multiple second communication ports 1c. Specifically, the side surface of the housing 1 having the second communication ports 1c is adjacent to the side surface of the housing 1 having the channel opening 1a.

[0088] In addition, in some embodiments, second communication ports 1 c may be provided on two opposite side surfaces of the box body 1 .

[0089] In this embodiment, the second pump body includes a molecular pump.

[0090] With this arrangement, after the first pump evacuates the interior of the housing 1, the solvent on the substrate surface is essentially evaporated, and the film layer formed after the substrate is dried is reinforced. Multiple second pumps further evacuate the interior of the housing 1, further reducing the vacuum level within the housing 1 to improve film quality.

[0091] Among them, by extracting air from the side of the box body 1, it is more convenient to extract the residual solvent in various places in the box body 1, especially the solvent attached to the condensation plate 6 can be easily extracted by the second pump body, thereby ensuring the cleanliness of the box body 1.

[0092] Vacuuming the chamber 1 from the top facilitates direct vacuuming of the chamber 1 from above the carrier plate 3. Simultaneously evacuating the sides and top of the chamber 1 ensures that the chamber 1 spaces above and below the carrier plate 3 are evacuated. This allows for a more stable and high vacuum level within the chamber 1, thereby stabilizing the film formed on the substrate surface. Furthermore, when evacuating the sides and top of the carrier plate 3, any solvent remaining in the chamber 1 is removed by the evacuation airflow and is less likely to fall back onto the substrate surface, thus ensuring film quality.

[0093] Part of the second pump body can also be connected to the plurality of first connecting ports through a pipeline, so as to further draw a vacuum inside the box body through the bottom of the box body to maintain the airflow state inside the box body.

[0094] Reference Figure 1-Figure 3 Specifically, the multiple second communication ports 1c on the top surface of the housing 1 are all arranged near the edge of the top surface of the housing 1, and the multiple second communication ports 1c are evenly distributed. That is, the multiple second communication ports 1c and the second pump body are all arranged near the edge of the top surface of the housing 1. This allows air to be drawn into the housing 1, avoiding the position of the condensation plate 6. The air extraction position of the second pump body is arranged closer to the edge of the condensation plate 6, so the air extraction flow is more stable and is less likely to cause airflow turbulence in the housing 1. In addition, because the second pump body is more evenly distributed, the air extraction flow generated in the housing 1 is also more uniform.

[0095] In this arrangement, the air in the box body 1 is extracted at the top of the box body 1, so that the air flow inside the box body 1 moves upward, and the volatilized solvent can directly evaporate upward and leave the box body, reducing pollution to the box body 1.

[0096] It should be understood that in some embodiments, the second vacuum module 202 communicates with the interior of the housing 1 through multiple second communication ports 1c on the side or two opposite sides of the housing 1. Specifically, multiple second pump bodies may be separately provided on the side or two opposite sides of the housing 1 and communicate with the interior of the housing 1 through the multiple second communication ports 1c, or the side or two opposite sides of the housing 1 communicate with the interior of the housing 1 through the second pump bodies and pipelines and the multiple second communication ports 1c.

[0097] In some embodiments, the second vacuum module 202 is in communication with the interior of the housing 1 through a plurality of second communication ports 1c on the top surface of the housing 1. Specifically, the top surface of the housing 1 is provided with a plurality of second pump bodies that are respectively connected to the plurality of second communication ports 1c and are in communication with the interior of the housing 1, or the top surface of the housing 1 is provided with a second pump body and a pipeline that are in communication with the interior of the housing 1 through the plurality of second communication ports 1c.

[0098] In some embodiments, the second vacuum module 202 is connected to the interior of the box body 1 through a plurality of first communication ports 1b on the bottom surface of the box body 1. Specifically, the box body 1 can also be connected to the second pump body through the first communication ports 1b and the pipeline alone.

[0099] The above three technical forms of utilizing the second vacuum module 202 to evacuate the inside of the box body 1 can be used in any combination and simultaneously, or used individually, and there is no limitation here.

[0100] Reference Figure 1-Figure 3 Furthermore, the vacuum drying equipment suitable for large-size panels also includes multiple visual inspection modules 12. The top of the housing 1 is provided with multiple observation ports 1d, each sealed with glass. Multiple visual inspection modules 12 are respectively fixed to the observation ports 1d to observe the film formation conditions at various locations on the substrate surface in real time. The visual inspection modules 12 include cameras.

[0101] Furthermore, the visual inspection module 12 is electrically connected to the control module. The control module receives the imaging results of the visual inspection module 12 and adjusts the power of each first pump body and each second pump body accordingly, and adjusts the airflow state on the surface of the substrate in real time to ensure that the airflow is consistent at all parts of the substrate, thereby ensuring that the drying efficiency is consistent at all parts of the substrate.

[0102] It can be understood that the degree of solvent volatilization of the functional liquid on the surface of the substrate is different, and the image of the substrate at that location is also different. Therefore, the degree of volatilization of the functional liquid can be judged by imaging, and whether the drying speed of each location on the substrate is consistent can be judged. The drying degree information of each location on the substrate can be transmitted to the control module, and the control module can adaptively adjust the multiple first pump bodies and the multiple second pump bodies.

[0103] Reference Figure 9 In this embodiment, the surface of the condensation plate 6 is provided with an observation hole 6a at a position corresponding to the observation port 1d in the vertical direction to support the visual inspection module 12 to image the substrate surface.

[0104] Reference Figure 1 、 Figure 5-Figure 7 , wherein the vacuum drying equipment suitable for large-size panels also includes multiple slide rail assemblies 7, and the ejector assembly 4 is slidably arranged on the bottom surface of the box body 1 through the slide rail assembly 7, and the sliding direction of the ejector assembly 4 is toward the channel opening 1a.

[0105] Reference Figure 5-Figure 7 Specifically, the slide rail assembly 7 includes a guide groove 701 and a plurality of rollers 702. The guide grooves 701 of the multiple sets of slide rail assemblies 7 are arranged side by side, and the guide grooves 701 are laid on the inner bottom surface of the box body 1 in the direction toward the passage opening 1a. The plurality of rollers 702 are mounted on the bottom surface of the connector 401, and the plurality of rollers 702 are arranged in a straight line at intervals in the direction toward the passage opening 1a. The rollers 702 are slidably disposed within the guide grooves 701. The connector 401 and the plurality of ejector modules 402 can slide out of the box body 1 through the passage opening 1a by sliding the rollers 702 on the guide grooves 701.

[0106] Furthermore, when the ejector assembly 4 needs to slide out of the box body 1, the ejector rod 502 of the lifting mechanism 5 first descends below the connecting member 401. At this time, the supporting plate 3 descends to be supported by the connecting member 401. By driving the connecting member 401 to slide, the ejector assembly 4 and the supporting plate 3 are allowed to leave the box body 1 through the passage opening 1a together.

[0107] With this arrangement, the ejector assembly 4 and the carrier plate 3 can enter or be removed from the housing 1 together, thereby facilitating the inspection and maintenance of the carrier plate 3 and the ejector assembly 4. If the substrate is too large, it may be damaged during transportation, when the ejector module 402 supports the substrate, or when the substrate is vacuum-dried. Fragments of the damaged substrate will be scattered on the carrier plate 3, making it difficult to clean the substrate fragments inside the housing 1. In this embodiment, the ejector assembly 4 and the carrier plate 3 are removed to facilitate the cleaning of the substrate fragments. Even if the substrate is broken, the cleaning and maintenance of the vacuum drying equipment can still be completed quickly.

[0108] Reference Figure 5-Figure 7 In addition, multiple ejector modules 402 need to pass through the carrier plate 3. The carrier plate 3 is provided with multiple mounting holes 3a for the ejector modules 402 to pass through, and the multiple ejector modules 402 need to pass through the multiple mounting holes 3a on the carrier plate 3 respectively. Therefore, when assembling the carrier plate 3 and the ejector assembly 4, the multiple ejector modules 402 need to be aligned with the multiple mounting holes 3a on the carrier plate 3 respectively. Therefore, the assembly process of the ejector assembly 4 and the carrier plate 3 is relatively cumbersome, and the subsequent inspection of the ejector modules 402 also needs to be inspected one by one. By moving the ejector assembly 4 and the carrier plate 3 out of the box body 1 together, the assembly and inspection of the ejector assembly 4 and the carrier plate 3 are facilitated.

[0109] Reference Figure 2 and Figure 8 Furthermore, the access door 101 is hinged to the housing 1. When the access door 101 is opened, the inner side of the access door 101 is flush with the bottom surface of the access opening 1a. In this embodiment, a limit block 102 is installed on the side of the housing 1 where the access opening 1a is located. When the access door 101 is opened, the outer side of the access door 101 abuts against the limit block 102 to maintain the horizontal state of the access door 101.

[0110] With this arrangement, when the ejector assembly 4 and the supporting plate 3 are slid out of the box body 1, the roller 702 can slide on the access door 101, and the access door 101 supports the ejector assembly 4 and the supporting plate 3 as they slide out of the box body 1. The access door 101 not only does not interfere with the sliding process of the ejector assembly 4, but also assists in supporting the ejector assembly 4 and the supporting plate 3.

[0111] Reference Figure 8The vacuum drying equipment suitable for large-sized panels also includes multiple auxiliary rails 13, which are removably mounted on the housing 1. The length of the auxiliary rails 13 coincides with the length of the guide grooves 701, and the multiple auxiliary rails 13 are all docked with the multiple guide grooves 701. The rollers 702 slide from the guide grooves 701 onto the auxiliary rails 13, facilitating the movement of the entire ejector assembly 4 and the carrier plate 3 to a desired position. The movement path is controllable, facilitating subsequent maintenance.

[0112] Reference Figure 8 Specifically, the vacuum drying equipment suitable for large-size panels also includes multiple sets of alignment structures 14, and multiple auxiliary rails 13 are detachably connected to the box body 1 through multiple alignment structures 14. The alignment structure 14 includes an alignment groove 1402 and an alignment block 1401. The alignment groove 1402 and the alignment block 1401 are plug-in compatible, and the alignment groove 1402 and the alignment block 1401 are respectively arranged on the auxiliary rail 13 and the box body 1. In this embodiment, the alignment groove 1402 is opened in the box body 1, and the alignment block 1401 is installed on the auxiliary rail 13. The auxiliary rail 13 and the box body 1 form a plug-in fit through the cooperation of the alignment groove 1402 and the alignment block 1401. In this embodiment, each auxiliary rail 13 is connected to the alignment block 1401 through multiple sets of alignment structures 14.

[0113] Reference Figure 8 Specifically, the inner bottom wall of the box body 1 and / or the inner side surface of the passage door 101 are provided with an alignment groove 1402. Preferably, the alignment groove 1402 is formed on the inner wall of the passage door 101. The passage door 101 is used to support the auxiliary rail 13. Since the alignment groove 1402 is located on the passage door 101, the subsequent installation and removal of the auxiliary rail 13 is facilitated.

[0114] Reference Figure 7 Furthermore, the vacuum drying device suitable for large-sized panels also includes a plurality of limiting structures 8. The limiting structures 8 include limiting posts 801 and limiting holes 802. The limiting posts 801 and limiting holes 802 are respectively provided on the mutually facing sides of the connector 401 and the carrier plate 3. The limiting posts 801 are adapted to be inserted into the limiting holes 802, and the connector 401 and the carrier plate 3 form a plug-in fit through the cooperation of the limiting posts 801 and the limiting holes 802.

[0115] With this arrangement, the supporting plate 3 and the connecting member 401 are plugged into each other through the limiting holes 802 and the limiting columns 801. When the supporting plate 3 moves with the connecting member 401, the relative lateral movement of the supporting plate 3 and the connecting member 401 in the horizontal plane is restricted, and the supporting plate 3 is not likely to collide with or even damage the ejector module 402.

[0116] Preferably, the end of the limiting post 801 is conical, so that the limiting post 801 can be inserted into the limiting hole 802 .

[0117] In this embodiment, the limiting post 801 is installed on the top surface of the connecting member 401 , and the limiting hole 802 is opened on the bottom surface of the supporting plate 3 .

[0118] Reference Figure 5-Figure 7 , wherein, the circumferential side surfaces of the supporting plate 3 are each provided with a baffle 301 , and the height of the baffle 301 is higher than the top surface of the supporting plate 3 .

[0119] With this arrangement, baffle 301 prevents fragments from scattering when a substrate breaks, concentrating them on carrier plate 3 for easier cleaning. Furthermore, the airflow at the edges of carrier plate 3 is faster than that in the center, and baffle 301 blocks the stronger airflow, resulting in more stable airflow near the substrate on carrier plate 3. Furthermore, since the edges of the substrate are non-printing areas and lack functional liquid, even if the airflow near the inner side of baffle 301 is affected, the film quality on the substrate surface is unlikely to be affected.

[0120] Reference Figure 9 The vacuum drying equipment suitable for large-sized panels further includes a plurality of support blocks 9. Multiple connection structures 10 for mounting the support blocks 9 are evenly distributed on the top surface of the carrier plate 3. The support blocks 9 are mounted to the carrier plate 3 via the connection structures 10. In this embodiment, the multiple connection structures 10 are all located near the edge of the top surface of the carrier plate 3. This means that the support blocks 9 can be removably mounted at the edge of the carrier plate 3.

[0121] Reference Figure 9 In this embodiment, the connecting structure 10 includes a pin hole 1001 and a connecting pin 1002. The pin hole 1001 is provided on the surface of the carrier plate 3. The connecting pin 1002 is connected to the support block 9. The support block 9 is inserted and mounted on the carrier plate 3 through the engagement of the connecting pin 1002 and the pin hole 1001. When the carrier plate 3 is in its lowest position, the top surface of the support block 9 is higher than the top of the ejector module 402.

[0122] The condensation plate 6 is detachably connected to the housing 1. Specifically, the condensation plate 6 is connected to the housing 1 by bolts.

[0123] By releasing the connection between condenser panel 6 and housing 1, condenser panel 6 is supported by the plurality of support blocks 9. Condenser panel 6, ejector pin assembly 4, and carrier plate 3 are then slid out of housing 1 through access opening 1a. Specifically, carrier plate 3 is raised until the support blocks 9 contact condenser panel 6. The connection between condenser panel 6 and housing 1 is then released, allowing condenser panel 6 to rest on the support blocks 9. The carrier plate 3 is then lowered until it is supported by connectors 401. Finally, condenser panel 6, ejector pin assembly 4, and carrier plate 3 are slid out of housing 1 through access opening 1a.

[0124] This arrangement makes it easy to remove the condensing plate 6 from the box body 1 and to maintain the condensing plate 6. In addition, no other tooling is required to install and remove the condensing plate 6, and no space is required in the box body 1 for maintenance tooling, which makes it easy to control the volume in the box body 1.

[0125] Reference Figure 10 In some embodiments, the vacuum drying equipment suitable for large-size panels also includes multiple slide rails 11, and the condensation plate 6 is slidably connected to the box body 1 through the slide rails 11, and the condensation plate 6 is suitable for sliding out of the box body 1 from the channel opening 1a.

[0126] Specifically, two opposite sides of the condensation plate 6 are connected to the housing 1 via slide rails 11. The slide rails 11 are multi-stage to ensure a sufficient sliding stroke while ensuring support strength for the condensation plate 6.

[0127] With this arrangement, the condensation plate 6 can slide out of the housing 1 via the slide rails 11 , so that maintenance of the condensation plate 6 is facilitated.

[0128] Reference Figure 3 and Figure 11 , wherein the ejector module 402 includes a magnetic base 4021, an adjustment base 4022 and a needle body 4023. The magnetic base 4021 is connected to the connector 401. In this embodiment, the magnetic base 4021 is embedded in the connector 401. The adjustment base 4022 is magnetically connected to the magnetic base 4021, and the adjustment base 4022 can be translated in a horizontal plane relative to the magnetic base 4021. In this embodiment, the adjustment base 4022 is made of stainless steel. The needle body 4023 is connected to the adjustment base 4022. In this embodiment, the needle body 4023 is vertically inserted into the adjustment base 4022. The position of the adjustment base 4022 is adjusted relative to the magnetic base 4021 so that the needle body 4023 passes through the mounting hole 3a.

[0129] With this arrangement, since the adjustment base 4022 can translate relative to the magnetic base 4021, the position of the needle bodies 4023 can be flexibly changed when assembling the ejector assembly 4 and the carrier plate 3, ensuring that each needle body 4023 can pass through the corresponding mounting hole 3a, thereby facilitating the assembly of the ejector assembly 4 and the carrier plate 3. Furthermore, the needle bodies 4023 can be removed from the adjustment base 4022 and replaced, thereby facilitating maintenance of the ejector assembly 4.

[0130] The embodiment of the present application provides a vacuum drying device suitable for large-sized panels. Since the first vacuum module 201 evacuates air from the box body 1 through multiple first connecting ports 1b on the bottom surface of the box body 1, and simultaneously performs vacuuming operations on multiple locations within the box body 1, the airflow within the box body 1 will not be concentrated. Even if the box body 1 is large in size and has a large internal space, the airflow at various locations can still be more uniform when drying the substrate, ensuring better drying consistency at various locations within the internal substrate and a more uniform film-forming effect. Due to the use of multi-point air extraction, the air extraction rate is higher and the vacuuming efficiency is higher. In addition, since the air in the box body 1 is extracted below the carrier plate 3, the airflow is not likely to directly act on the surface of the substrate. The airflow on the surface of the substrate is more stable and less prone to turbulence, thereby ensuring the quality of film formation.

[0131] During loading and unloading, the lifting mechanism 5 lowers the carrier plate 3, creating a gap between the top of the ejector module 402 and the carrier plate 3. This allows room for an external robot to move, facilitating loading and unloading of the substrate. The carrier plate 3 then rises to receive and support the substrate. It should be understood that the ejector assembly 4 does not move upward or downward. Therefore, after loading and supporting the substrate, it does not move with the ejector assembly 4, minimizing the risk of scratching or even breaking large substrates.

[0132] Furthermore, the lifting mechanism 5 is arranged outside the housing 1, meaning that only space for the connector 401 of the ejector assembly 4 is required below the carrier plate 3. This allows the housing 1 to be designed to be smaller, further improving the efficiency of vacuuming the interior of the housing 1. Furthermore, since the space below the carrier plate 3 within the housing 1 is reduced, the likelihood of airflow disturbance below the carrier plate 3 is reduced, and the exhaust airflow flows more evenly from above the carrier plate 3 to the first connecting port 1b. This results in more stable airflow on the substrate surface, resulting in better drying consistency on the substrate surface and higher film quality.

[0133] Another embodiment of the present application provides an inkjet printing system, including the vacuum drying device suitable for large-size panels as described above.

[0134] Another embodiment of the present application provides an inkjet printing system. Since the inkjet printing system includes the above-mentioned vacuum drying equipment suitable for large-size panels, the beneficial effects of the inkjet printing system are consistent with the beneficial effects of the above-mentioned vacuum drying equipment suitable for large-size panels, and will not be repeated here.

[0135] In the description of this application, it should be noted that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0136] It should be noted that, in this application, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element.

[0137] The foregoing is merely a list of specific embodiments of the present application, intended to enable those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the broadest scope consistent with the principles and novel features of the present application.

Claims

1. A vacuum drying device suitable for large-size panels, characterized in that: It includes: A box body, wherein a plurality of observation ports are provided on the top of the box body; A vacuum assembly, the vacuum assembly comprising a first vacuum module, a second vacuum module and a control module; a plurality of first communication ports are evenly opened on the bottom surface of the box body, the first vacuum module is in communication with the interior of the box body through the plurality of first communication ports, the first vacuum module comprises a first pump body; a plurality of second communication ports are opened on the side surface of the box body and / or the top surface of the box body, the second vacuum module is in communication with the interior of the box body through the plurality of second communication ports, the second vacuum module comprises a plurality of second pump bodies; the first pump body comprises a dry pump, and the second pump body comprises a molecular pump; A carrying plate, the carrying plate is installed in the box body and is used to carry the substrate; An ejector assembly, the ejector assembly comprising a connecting member and a plurality of ejector modules, wherein the plurality of ejector modules are evenly mounted on the connecting member on the same horizontal plane, the connecting member is located below the carrier plate, and the plurality of ejector modules all pass through the carrier plate; A lifting mechanism, the lifting mechanism comprising a lifting drive assembly and a plurality of ejection rods, the lifting drive assembly being mounted on the outer bottom surface of the box body, the plurality of ejection rods being mounted on the driving end of the lifting drive assembly for lifting and lowering movement, the ejection rods extending into the box body, and the ejection rods being adapted to pass through the connecting member to support or eject the carrying plate; a plurality of visual inspection modules, each of which is fixed at each of the observation ports, and electrically connected to the control module. The control module receives imaging results from the visual inspection modules and adjusts the power of each of the first pump bodies and each of the second pump bodies accordingly; Wherein, after the first pump body performs vacuum treatment on the interior of the box body, the plurality of second pump bodies further perform vacuum treatment on the interior of the box body.

2. The vacuum drying equipment suitable for large-size panels according to claim 1, characterized in that: The lifting mechanism further comprises a plurality of flexible sleeves, which are sleeved on the ejection rods, and the two ends of the flexible sleeves are respectively sealedly connected to the outer bottom surface of the box body and the driving end of the lifting drive assembly.

3. The vacuum drying equipment suitable for large-size panels according to claim 1, characterized in that: The lifting drive assembly includes: A plurality of mounting seats, wherein the plurality of mounting seats are fixed at intervals on the outer bottom surface of the box body; A sliding frame, wherein the sliding frame is lifted and slidably arranged on the plurality of mounting seats, and the plurality of ejector rods are fixed on the sliding frame; A plurality of lifting driving members are respectively installed on the plurality of mounting seats and synchronously drive the sliding frame to move up and down.

4. The vacuum drying equipment suitable for large-size panels according to claim 1, characterized in that: It also includes a condensation plate, which is arranged near the inner top surface of the box body and is located above the carrying plate; The plurality of second communication openings of the box body are all arranged close to the edge of the top surface of the box body, and the plurality of second communication openings are evenly arranged.

5. The vacuum drying equipment suitable for large-size panels according to claim 4, characterized in that: The side of the box body is provided with a passage opening, and the passage opening and the second communication opening on the side of the box body are respectively located on adjacent sides of the box body; a passage door is hinged at the passage opening of the box body; wherein, After the passage door is opened, the inner side surface of the passage door is flush with the bottom surface of the passage opening.

6. The vacuum drying equipment suitable for large-size panels according to claim 5, characterized in that: Also included are a plurality of slide rail assemblies, the slide rail assemblies comprising: A guide groove is laid on the bottom surface of the box body along the direction toward the passage opening, and a plurality of the guide grooves are arranged side by side; A plurality of rollers are mounted on the bottom surface of the connecting member, and the rollers roll in the guide groove; wherein, The carrying plate is supported by the connecting member and slides out of the passage opening along with the connecting member.

7. The vacuum drying equipment suitable for large-size panels according to claim 6, characterized in that: It also includes multiple limiting structures, which include limiting columns and limiting holes. The limiting columns and the limiting holes are respectively arranged on the sides of the connecting member and the supporting plate facing each other. The limiting columns are suitable for being inserted into the limiting holes, and the connecting member and the supporting plate form a plug-in fit through the cooperation of the limiting columns and the limiting holes.

8. The vacuum drying equipment suitable for large-size panels according to claim 6, characterized in that: It also includes a plurality of support blocks, and the top surface of the carrier plate is evenly provided with a plurality of connection structures for mounting the support blocks, and the support blocks are mounted on the carrier plate through the connection structures; The condensation plate is detachably connected to the box; wherein, The connection between the condensing plate and the box body is released. The condensing plate is supported by the plurality of supporting blocks. The condensing plate, the ejector pin assembly and the supporting plate are slid out of the box body from the passage opening.

9. The vacuum drying equipment suitable for large-size panels according to claim 6, characterized in that: It also includes a plurality of slide rails, through which the condensation plate is slidably connected to the box body, and the condensation plate is suitable for sliding out of the box body from the passage opening.

10. The vacuum drying equipment suitable for large-size panels according to claim 1 or 6, characterized in that: The circumferential side surfaces of the supporting plate are each provided with a baffle, and the height of the baffle is higher than the top surface of the supporting plate.

11. The vacuum drying equipment suitable for large-size panels according to claim 1, characterized in that: The ejector module includes: a magnetic base connected to the connecting member; an adjustment seat, the adjustment seat being magnetically connected to the magnetic seat and capable of translating in a horizontal plane relative to the magnetic seat; A needle body, the needle body is connected to the adjustment seat; wherein, The supporting plate is provided with a plurality of mounting holes for the needle body to pass through, and the position of the adjustment seat is adjusted relative to the magnetic seat so that the needle body can pass through the mounting holes.

12. An inkjet printing system, characterized in that: The vacuum drying device according to any one of claims 1 to 11 is suitable for large-size panels.

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