An outer rotor motor vacuum robot

Abstract

The present invention relates to the field of wafer transfer robots, and in particular to an outer rotor motor vacuum robot, comprising a stator mounting seat, a first stator and a second stator, which are coaxially arranged and fixedly connected sequentially from bottom to top, a first rotor and a second rotor, which are rotatably sleeved on the outsides of the first stator and the second stator, respectively; and a cooling system, the cooling system comprising: an outer spacer sleeve, which is fixedly connected to the stator mounting seat and sleeved on the outsides of the first stator and the second stator, and an inner spacer sleeve, which is fixedly connected to the stator mounting seat and inserted on the insides of the first stator and the second stator. The embodiment of the present invention utilizes the outer spacer sleeve and the inner spacer sleeve to form a liquid inlet flow channel and a liquid outlet flow channel on the outside and inside of the first stator and the second stator, respectively, without arranging a liquid cooling pipe inside the stator assembly.

Description

Technical Field

[0001] The invention relates to the field of wafer transfer robots, and in particular to an outer rotor motor vacuum robot. Background Art

[0002] In the front-end chip processing technology, wafers need to be transported to different process equipment by wafer handling robots in a high vacuum clean environment. Frog hands, as a commonly used wafer transfer robot, are widely used in the wafer transfer process between different wafer processes. The robot arm connected by the frog hand shaft system is mainly driven by the inner rotor motor, with efficient and precise motion characteristics. For the front-end process wafer factory, the outer rotor structure can use the axial space to optimize the motor winding to increase the motor torque, so that the motor torsional torque is increased without changing the radial size of the plane space. Therefore, the pursuit of smaller plane space and stronger performance of wafer handling equipment, the use of outer rotor motors is the current development trend of robots.

[0003] Since the stator winding of the outer rotor motor is difficult to effectively exchange heat with the vacuum environment in a compact space, the heat accumulation of the stator assembly can easily cause the equipment to lose accuracy. However, laying liquid cooling pipes inside the compact stator assembly requires bypassing the stator wire group. Therefore, using liquid cooling pipes to wrap around the stator assembly is not only complicated in pipe laying, but also limits the heat exchange of the liquid cooling pipes in order to bypass the wire group. Summary of the invention

[0004] The object of the present invention is to provide an outer rotor motor vacuum robot to solve the problem that it is difficult to lay liquid cooling pipes inside a stator assembly with a compact space.

[0005] In order to solve the above technical problems, the present invention specifically provides the following technical solutions:

[0006] A vacuum robot with an outer rotor motor comprises: a mechanical arm, comprising a first rotating part and a second rotating part which are coaxially arranged and used to receive the drive of a power source to perform a rotational action, and a driven mechanical arm which is transmission-connected to the first rotating part and the second rotating part; a rotation drive device, comprising a stator mounting seat, a first stator and a second stator which are coaxially arranged and fixedly connected in sequence from bottom to top, and a first rotor and a second rotor which are rotatably sleeved on the outer sides of the first stator and the second stator respectively, a rotor connecting seat being sleeved on the outer side of the stator mounting seat, the rotor connecting seat being fixedly connected to the first rotor, and being connected and resting on the top end of the stator mounting seat through a first bearing, the second rotor being connected and resting on the top end of the rotor connecting seat through a second bearing, so that the rotor connecting seat can rotate relative to the second rotor, wherein the first rotor is fixedly connected to the first rotating part through the rotor connecting seat, The second rotor is fixedly connected to the second rotating part; a cooling system is installed on the stator mounting seat; wherein the cooling system includes: an outer isolation sleeve, fixedly connected to the stator mounting seat and sleeved on the outer sides of the first stator and the second stator, thereby forming a cylindrical liquid inlet flow channel on the outer sides of the first stator and the second stator; an inner isolation sleeve, fixedly connected to the stator mounting seat and inserted into the inner sides of the first stator and the second stator, thereby forming a cylindrical liquid outlet flow channel on the inner sides of the first stator and the second stator; a built-in heat exchanger, integrated in the stator mounting seat, connected to the liquid outlet flow channel through a first solenoid valve; a circulating pump, one end of which is connected to the built-in heat exchanger through a third solenoid valve, and the other end of which is connected to the liquid inlet flow channel, and when the first solenoid valve and the third solenoid valve are opened, the circulating pump and the built-in heat exchanger form a built-in cooling system for heat exchange with the first stator and the second stator.

[0007] Furthermore, the cooling system also includes an external radiator, which is connected to the liquid outlet channel through a second solenoid valve, and one end of the circulating pump is connected to the external radiator through a fourth solenoid valve. When the second solenoid valve and the fourth solenoid valve are opened, the circulating pump and the external radiator form an external cooling system for heat exchange with the first stator and the second stator.

[0008] Furthermore, the installation gaps between the outer isolation sleeve, the inner isolation sleeve and the stator mounting seat are sealed by a stator sealing ring, and a liquid inlet connected to a liquid inlet pipe and a liquid outlet connected to a liquid outlet pipe are formed on the stator mounting seat.

[0009] Furthermore, the built-in heat exchanger includes: a heat exchange pipe, which is coiled at the bottom of the stator mounting seat, one end of which is connected to the liquid outlet channel through the first solenoid valve, and the other end of which is connected to the circulation pump through the third solenoid valve.

[0010] Furthermore, the built-in heat exchanger also includes: heat dissipation fins, which are mounted on the outer side of the stator mounting seat and are used to passively exchange heat with the atmosphere to reduce the temperature of the stator mounting seat.

[0011] Furthermore, it also includes: a lifting drive device, which is transmission-connected to the stator mounting seat and is used to drive the stator mounting seat to move in the vertical direction; a stand, which is used to fix the lifting drive device; wherein the lifting drive device includes: an electric screw slide, which is fixedly connected to the stand and transmission-connected to the stator mounting seat, and is used to drive the stator mounting seat to rise and fall; a telescopic bellows, one end of which is fixedly connected to the stator mounting seat, and the other end of which is fixedly connected to the stand, and is telescopic and retractable with the rising and falling of the stator mounting seat.

[0012] Furthermore, the electric screw slide includes: a guide rail, which is vertically arranged and fixedly connected to the inner side of the platform; a slider, which is attached to the guide rail and can slide vertically along the guide rail; a lifting nut, which is detachably connected to the stator mounting seat through a lifting push block; a screw rod, which is vertically arranged and spirally connected to the lifting nut; and a motor, which is fixedly connected to the inside of the platform and transmission-connected to the screw rod, and is used to drive the screw rod to rotate so that the lifting nut drives the stator mounting seat to rise and fall vertically along the guide rail.

[0013] Furthermore, the screw rod is wrapped by the inner isolation sleeve, and as the stator mounting seat moves up and down, the screw rod and the inner isolation sleeve move axially relative to each other and never contact each other.

[0014] Furthermore, the second bearing is covered with a labyrinth sealing ring, which includes: a first follower tooth, which is in the shape of a circular ring, is coaxially fixedly connected to the first rotating part, and covers the top of the second bearing, and has a first tooth extending upward; a second follower tooth, which is in the shape of a circular ring, is coaxially fixedly connected to the second rotating part, and covers the top of the first follower tooth, and has a second tooth extending downward; the first tooth and the second tooth are both in the shape of a plurality of concentric circular rings, the first tooth and the second tooth are respectively inserted into each other's tooth grooves, and the gap between the first follower tooth and the second follower tooth forms a labyrinth sealing structure, and the first follower tooth and the second follower tooth do not contact each other during relative rotation.

[0015] Furthermore, the distance between the tooth top of the first tooth and the tooth root of the second tooth is equal to the distance between the tooth top of the second tooth and the tooth root of the first tooth, and the distance between the side wall of the first tooth and the side wall of the second tooth is smaller than the distance between the tooth top of the first tooth and the tooth root of the second tooth.

[0016] Compared with the prior art, this application has the following beneficial effects:

[0017] Provided is an outer rotor motor vacuum robot, which uses an outer isolation sleeve and an inner isolation sleeve to form a liquid inlet channel and a liquid outlet channel on the outer side and inner side of a first stator and a second stator respectively, without arranging a liquid cooling pipeline inside the stator assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0019] Figure 1 A top view of an embodiment of the present invention;

[0020] Figure 2 for Figure 1 Cross-sectional view in the AA direction;

[0021] Figure 3 for Figure 2 A local enlarged view of point A;

[0022] Figure 4 A front view of a rotary drive device according to an embodiment of the present invention;

[0023] Figure 5 for Figure 4 Cross-sectional view in the BB direction;

[0024] Figure 6 is a structural block diagram of a cooling system according to an embodiment of the present invention;

[0025] Figure 7 A bottom view of a built-in heat exchanger according to an embodiment of the present invention;

[0026] Figure 8 A top view of a lifting drive device according to an embodiment of the present invention;

[0027] Fig. 9 for Figure 8 The cross-sectional view in CC direction;

[0028] The numbers in the figure represent the following:

[0029] 1-mechanical arm; 11-first rotating part; 12-second rotating part;

[0030] 2-rotation drive device; 21-stator mounting seat; 22-rotor connecting seat; 221-first bearing; 222-second bearing; 23-first outer rotor motor; 231-first stator; 232-first rotor; 24-second outer rotor motor; 241-second stator; 242-second rotor; 25-labyrinth seal ring; 251-first follower tooth; 252-second follower tooth; 26-stator connecting piece; 27-angular displacement sensor;

[0031] 31-electric screw slide; 311-guide rail; 312-slider; 313-lifting push block; 314-lifting nut; 315-screw; 316-motor; 32-telescopic bellows;

[0032] 4-cooling system; 41-outer isolation sleeve; 411-liquid inlet channel; 412-liquid inlet; 413-liquid outlet channel; 414-liquid outlet; 42-inner isolation sleeve; 43-stator sealing ring; 44-built-in heat exchanger; 441-heat exchange pipe; 442-cooling fins; 443-first solenoid valve; 444-third solenoid valve; 45-circulating pump; 46-external radiator; 461-second solenoid valve; 462-fourth solenoid valve;

[0033] 5-Stand. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] This embodiment provides an outer rotor motor vacuum robot, Figure 1 A top view of the outer rotor motor vacuum robot is shown. Figure 2 Shown Figure 1 A cross-sectional view in the AA direction is shown to show the internal structure of the outer rotor motor vacuum robot.

[0036] Combination Figure 1 ,and Figure 2 , the outer rotor motor vacuum robot includes:

[0037] The robot arm 1 comprises a first rotating part 11 and a second rotating part 12 which are coaxially arranged and used to receive the drive of a power source to perform a rotating action, and a driven robot which is transmission-connected to the first rotating part 11 and the second rotating part 12, and the driven robot can be any conventional robot;

[0038] The rotary drive device 2 comprises a stator mounting seat 21, a first stator 231 and a second stator 241 which are coaxially arranged and fixedly connected in sequence from bottom to top, and a first rotor 232 and a second rotor 242 which are rotatably sleeved on the outer sides of the first stator 231 and the second stator 241, respectively. A rotor connecting seat 22 is sleeved on the outer side of the stator mounting seat 21. The rotor connecting seat 22 is fixedly connected to the first rotor 232 and is connected and rests on the top end of the stator mounting seat 21 through a first bearing 221. The second rotor 242 is connected and rests on the top end of the rotor connecting seat 22 through a second bearing 222, so that the rotor connecting seat 22 can rotate relative to the second rotor 242. The first rotor 232 is fixedly connected to the first rotating part 11 through the rotor connecting seat 22, and the second rotor 242 is fixedly connected to the second rotating part 12;

[0039] A lifting drive device, which is transmission-connected to the stator mounting seat 21 and is used to drive the stator mounting seat 21 to move in a vertical direction;

[0040] The stand 5 has a cylindrical appearance and is used to house the lifting drive device and the rotating drive device 2 , and provides good support and sealing functions for the lifting drive device and the rotating drive device 2 .

[0041] In the above embodiment, the first stator 231 and the first rotor 232 constitute a first outer rotor motor 23, and the second stator 241 and the second rotor 242 constitute a second outer rotor motor 24. In order to improve the working stability and accuracy of the rotation drive device 2, the first stator 231 and the second stator 241 are coaxially fixedly connected through a stator connector 26, and the first rotor 232 and the second rotor 242 are both installed with an angular displacement sensor 27 for measuring the rotation angle of the first rotor 232 and the second rotor 242.

[0042] Since the outer rotor motor structure requires the use of a bearing assembly with a larger diameter than the inner rotor, and since the transmission process is often accompanied by the intrusion of corrosive gases, the use of a larger diameter bearing assembly increases the contact area between the bearing and the corrosive gas, increasing the risk of bearing corrosion and reducing the service life of the equipment. In order to increase the torque of the frog arm through the outer rotor motor and thereby improve the overall driving load and operating accuracy of the equipment, higher requirements are placed on the reliability and stability of the equipment's shaft connection.

[0043] In order to solve the problem that a larger diameter bearing assembly increases the contact area between the bearing and the corrosive gas, increases the risk of bearing corrosion and reduces the service life of the equipment, in this embodiment, a labyrinth seal ring 25 is covered on the second bearing 222. Figure 3 A partial enlarged view of the labyrinth seal 25 is shown.

[0044] Combination Figure 3 , the labyrinth seal 25 comprises:

[0045] The first follower tooth 251 is in a circular ring shape, is coaxially fixedly connected to the first rotating part 11, and covers the upper part of the second bearing 222, and has a first tooth extending upward;

[0046] The second follower tooth 252 is in a circular ring shape, is coaxially fixedly connected to the second rotating portion 12, and covers the first follower tooth 251, and has a second tooth extending downward;

[0047] The first teeth and the second teeth are both in the shape of a plurality of concentric rings. The first teeth and the second teeth are respectively inserted into each other's tooth grooves. The gap between the first follower teeth 251 and the second follower teeth 252 forms a labyrinth sealing structure. The first follower teeth 251 and the second follower teeth 252 do not contact each other during relative rotation.

[0048] Among them, the first follower tooth 251 is fixedly connected to the outer ring of the second bearing 222 through the first rotating part 11, and the contact part is sealed. The second follower tooth 252 is fixedly connected to the inner ring of the second bearing 222 through the second rotating part 12, and the contact part is sealed, so that the labyrinth sealing structure formed by the gap between the first follower tooth 251 and the second follower tooth 252 on the upper end surface of the second bearing 222 can achieve a good sealing effect.

[0049] Preferably, combined Figure 3 The distance between the tooth top of the first tooth and the tooth root of the second tooth is equal to the distance between the tooth top of the second tooth and the tooth root of the first tooth, and the distance between the side wall of the first tooth and the side wall of the second tooth is smaller than the distance between the tooth top of the first tooth and the tooth root of the second tooth. This design allows the fluid to experience more complex paths when passing between the tooth top and the tooth root. After the fluid needs to bypass the larger tooth top and tooth root gap, it will still be blocked by the smaller side wall gap, thereby more effectively preventing the fluid from leaking along the tooth groove side wall direction, thereby improving the sealing performance of the labyrinth seal.

[0050] In order to solve the problem that the stator winding is difficult to effectively exchange heat with the vacuum environment in a compact space, in this embodiment, a cooling system 4 is installed on the stator mounting seat 21. Figure 4 is a front view of the rotary drive device 2, Figure 5 yes Figure 4 The cross-sectional view in the BB direction, Figure 6 A structural block diagram of the cooling system 4 is shown.

[0051] Combination Figure 4 , Figure 5 and Figure 6 , the cooling system 4 comprises:

[0052] The outer isolation sleeve 41 is fixedly connected to the stator mounting seat 21 and is sleeved on the outer sides of the first stator 231 and the second stator 241, so as to form a cylindrical liquid inlet channel 411 on the outer sides of the first stator 231 and the second stator 241;

[0053] The inner spacer sleeve 42 is fixedly connected to the stator mounting seat 21 and inserted into the inner side of the first stator 231 and the second stator 241 , so as to form a cylindrical liquid outlet channel 413 inside the first stator 231 and the second stator 241 ;

[0054] The internal heat exchanger 44 is integrated in the stator mounting seat 21 and connected to the liquid outlet channel 413 through the first solenoid valve 443;

[0055] The external radiator 46 is arranged outside the stand 5 and connected to the liquid outlet channel 413 through the second solenoid valve 461;

[0056] The circulation pump 45 has one end connected to the built-in heat exchanger 44 and the external radiator 46 respectively through the third solenoid valve 444 and the fourth solenoid valve 462, and the other end connected to the liquid inlet channel 411. When the first solenoid valve 443 and the third solenoid valve 444 are opened, the circulation pump 45 and the built-in heat exchanger 44 form a built-in cooling system for heat exchange with the first stator 231 and the second stator 241. When the second solenoid valve 461 and the fourth solenoid valve 462 are opened, the circulation pump 45 and the external radiator 46 form an external cooling system for heat exchange with the first stator 231 and the second stator 241.

[0057] The first solenoid valve 443, the second solenoid valve 461, the third solenoid valve 444 and the fourth solenoid valve 462 are opened and closed according to preset conditions, which may be the temperature of the first stator 231 and the second stator 241, or the rotation speed of the first rotor 232 and the second rotor 242, or room temperature and other conditions, thereby achieving ordinary heat dissipation based on the built-in cooling system and enhanced heat dissipation based on the built-in cooling system and the external cooling system.

[0058] The installation gap between the outer isolation sleeve 41 and the inner isolation sleeve 42 and the stator mounting seat 21 is sealed by a stator sealing ring 43, and the stator mounting seat 21 is formed with a liquid inlet 412 connected to the liquid inlet pipe and a liquid outlet 414 connected to the liquid outlet pipe.

[0059] Figure 7 The structure of the internal heat exchanger 44 is shown, combined with Figure 7 , the internal heat exchanger 44 includes:

[0060] The heat exchange pipe 441 is coiled at the bottom of the stator mounting seat 21, one end of which is connected to the liquid outlet 414 through the first solenoid valve 443, and the other end of which is connected to the circulation pump 45 through the third solenoid valve 444;

[0061] The heat dissipation fins 442 are mounted on the outer side of the stator mounting seat 21 to passively exchange heat with the atmosphere to reduce the temperature of the stator mounting seat 21 .

[0062] The external radiator 46 is not shown in the figure. The external radiator 46 is arranged on the outside of the stand 5. The external radiator 46 can adopt any existing heat exchanger.

[0063] Figure 8 This is a top view of the lifting drive device. Fig. 9 yes Figure 8 Cross-sectional view along the CC direction.

[0064] Combination Figure 8 and Fig. 9 , the lifting drive device includes:

[0065] The electric screw slide 31 is fixedly connected to the stand 5 and is drivingly connected to the stator mounting seat 21, and is used to drive the stator mounting seat 21 to rise and fall;

[0066] The telescopic bellows 32 has one end fixedly connected to the stator mounting seat 21 and the other end fixedly connected to the stand 5 , and telescopes with the rising and falling of the stator mounting seat 21 .

[0067] Specifically, the electric screw slide 31 includes:

[0068] The guide rail 311 is vertically arranged and fixedly connected to the inner side of the stand 5;

[0069] A slider 312 is attached to the guide rail 311 and can slide vertically along the guide rail 311;

[0070] A lifting nut 314 is detachably connected to the stator mounting seat 21 via a lifting push block 313;

[0071] The screw rod 315 is vertically arranged and screw-connected to the lifting nut 314;

[0072] The motor 316 is fixedly connected to the inside of the stand 5 and is drivingly connected to the screw rod 315 , and is used to drive the screw rod 315 to rotate so that the lifting nut 314 drives the stator mounting seat 21 to vertically lift and lower along the guide rail 311 .

[0073] The screw rod 315 is wrapped by the inner isolation sleeve 42 . As the stator mounting seat 21 moves up and down, the screw rod 315 and the inner isolation sleeve 42 move axially relative to each other and never contact each other.

[0074] The above embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention. The protection scope of the present invention is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions shall also be deemed to fall within the protection scope of the present invention.

Claims

1. An outer rotor motor vacuum robot, characterized in that: include: A mechanical arm (1) comprising a first rotating part (11) and a second rotating part (12) which are coaxially arranged and used to receive drive from a power source to perform a rotating action, and a driven mechanical arm which is transmission-connected to the first rotating part (11) and the second rotating part (12); A rotary drive device (2), comprising a stator mounting seat (21), a first stator (231) and a second stator (241) which are coaxially arranged and fixedly connected in sequence from bottom to top, and a first rotor (232) and a second rotor (242) which are respectively rotatably sleeved on the outer sides of the first stator (231) and the second stator (241), wherein a rotor connecting seat (22) is sleeved on the outer side of the stator mounting seat (21), the rotor connecting seat (22) is fixedly connected to the first rotor (232) and is connected to and rests on the top end of the stator mounting seat (21) via a first bearing (221), and the second rotor (242) is connected to and rests on the top end of the rotor connecting seat (22) via a second bearing (222), so that the rotor connecting seat (22) can rotate relative to the second rotor (242), wherein the first rotor (232) is fixedly connected to the first rotating part (11) via the rotor connecting seat (22), and the second rotor (242) is fixedly connected to the second rotating part (12); A cooling system (4) mounted on the stator mounting seat (21); Wherein, the cooling system (4) comprises: An outer isolation sleeve (41) fixedly connected to the stator mounting seat (21) and sleeved on the outer sides of the first stator (231) and the second stator (241), thereby forming a cylindrical liquid inlet channel (411) on the outer sides of the first stator (231) and the second stator (241); An inner isolation sleeve (42) fixedly connected to the stator mounting seat (21) and inserted into the inner sides of the first stator (231) and the second stator (241), thereby forming a cylindrical liquid outlet channel (413) on the inner sides of the first stator (231) and the second stator (241); A built-in heat exchanger (44) is integrated into the stator mounting seat (21) and connected to the liquid outlet channel (413) via a first solenoid valve (443); a circulation pump (45), one end of which is connected to the built-in heat exchanger (44) via a third solenoid valve (444), and the other end of which is connected to the liquid inlet channel (411); when the first solenoid valve (443) and the third solenoid valve (444) are opened, the circulation pump (45) and the built-in heat exchanger (44) form a built-in cooling system for exchanging heat with the first stator (231) and the second stator (241); The outer rotor motor vacuum robot also includes: A lifting drive device, drivingly connected to the stator mounting seat (21) and used to drive the stator mounting seat (21) to move in a vertical direction; A stand (5) for fixedly mounting the lifting drive device; Wherein, the lifting drive device comprises: An electric screw slide (31) fixedly connected to the stand (5) and drivingly connected to the stator mounting seat (21), and used for driving the stator mounting seat (21) to rise and fall; A telescopic bellows (32) has one end fixedly connected to the stator mounting seat (21) and the other end fixedly connected to the stand (5), and telescopes as the stator mounting seat (21) rises and falls.

2. The outer rotor motor vacuum robot according to claim 1, characterized in that: The cooling system (4) further comprises an external radiator (46), wherein the external radiator (46) is connected to the liquid outlet channel (413) via a second solenoid valve (461), and one end of the circulation pump (45) is connected to the external radiator (46) via a fourth solenoid valve (462). When the second solenoid valve (461) and the fourth solenoid valve (462) are opened, the circulation pump (45) and the external radiator (46) form an external cooling system for exchanging heat with the first stator (231) and the second stator (241).

3. An outer rotor motor vacuum robot according to claim 1 or 2, characterized in that: The installation gap between the outer isolation sleeve (41) and the inner isolation sleeve (42) and the stator mounting seat (21) is sealed by a stator sealing ring (43); the stator mounting seat (21) is formed with a liquid inlet (412) connected to a liquid inlet pipe, and a liquid outlet (414) connected to a liquid outlet pipe.

4. The outer rotor motor vacuum robot according to claim 1, characterized in that: The built-in heat exchanger (44) comprises: The heat exchange pipe (441) is coiled around the bottom of the stator mounting seat (21), one end of which is connected to the liquid outlet channel (413) via the first solenoid valve (443), and the other end of which is connected to the circulation pump (45) via the third solenoid valve (444).

5. The outer rotor motor vacuum robot according to claim 4, characterized in that: The built-in heat exchanger (44) further comprises: The heat dissipation fins (442) are sleeved on the outer side of the stator mounting seat (21) and are used to passively exchange heat with the atmosphere to reduce the temperature of the stator mounting seat (21).

6. The outer rotor motor vacuum robot according to claim 1, characterized in that: The electric screw slide (31) comprises: A guide rail (311) is vertically arranged and fixedly connected to the inner side of the stand (5); A slider (312) is attached to the guide rail (311) and is capable of sliding vertically along the guide rail (311); A lifting nut (314) is detachably connected to the stator mounting seat (21) via a lifting push block (313); A screw rod (315), which is vertically arranged and spirally connected to the lifting nut (314); A motor (316) is fixedly connected to the inside of the platform (5) and drivingly connected to the screw rod (315), and is used to drive the screw rod (315) to rotate so that the lifting nut (314) drives the stator mounting seat (21) to vertically lift and lower along the guide rail (311).

7. The outer rotor motor vacuum robot according to claim 6, characterized in that: The screw rod (315) is wrapped by the inner isolation sleeve (42), and as the stator mounting seat (21) moves up and down, the screw rod (315) and the inner isolation sleeve (42) move axially relative to each other and never contact each other.

8. The outer rotor motor vacuum robot according to claim 1, characterized in that: The second bearing (222) is covered with a labyrinth seal ring (25), and the labyrinth seal ring (25) comprises: The first follower tooth (251) is in the shape of a circular ring, is coaxially fixedly connected to the first rotating part (11), covers the upper part of the second bearing (222), and has a first tooth extending upward; The second follower tooth (252) is in the shape of a circular ring, is coaxially fixedly connected to the second rotating part (12), covers the top of the first follower tooth (251), and has a second tooth extending downward; The first tooth and the second tooth are both in the shape of a plurality of concentric circular rings; the first tooth and the second tooth are respectively inserted into each other's tooth grooves; a gap between the first follower tooth (251) and the second follower tooth (252) forms a labyrinth seal structure; the first follower tooth (251) and the second follower tooth (252) do not contact each other during relative rotation.

9. The outer rotor motor vacuum robot according to claim 8, characterized in that: The distance between the tooth top of the first tooth and the tooth root of the second tooth is equal to the distance between the tooth top of the second tooth and the tooth root of the first tooth, and the distance between the side wall of the first tooth and the side wall of the second tooth is smaller than the distance between the tooth top of the first tooth and the tooth root of the second tooth.

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