Semiconductor raw material grinding equipment

Abstract

The present invention belongs to the technical field of grinding, and specifically discloses a semiconductor raw material grinding device, comprising a lower box body, the top of the lower box body is fixedly connected to an upper box body, the top of the inner wall of the upper box body is fixedly installed with a mounting mechanism, the bottom of the mounting mechanism is provided with a plurality of driving mechanisms, the bottoms of the plurality of driving mechanisms are respectively installed with grinding wheels of different particle sizes, the outer wall of the driving mechanism is connected with a water pipe, the end of the water pipe is fixedly connected with a water spray head, and the water spray head is fixedly connected to one side of the outer wall of the driving mechanism through a rotating member, a rotating assembly is provided inside the upper box body, and accurate replacement of the grinding wheel is achieved by setting the rotating assembly, each grinding wheel is provided with an independent torque and rotation speed, which can be set according to the grinding requirements, and the actual grinding effect is better. At the same time, accurate replacement can still be achieved without limiting the specific number of grinding wheels, and the life of the motor is also effectively extended.

Description

Technical Field

[0001] The invention belongs to the field of grinding, and specifically discloses a semiconductor raw material grinding device. Background Art

[0002] In the semiconductor manufacturing industry, grinding equipment is one of the key equipment. Grinding can improve the surface quality and micromorphology of wafers, and remove defects such as unevenness, scratches, cracks, etc. on the wafer surface. The grinding process is generally divided into coarse grinding, fine grinding, coarse polishing and fine polishing. Therefore, the grinding wheel needs to be replaced many times during the grinding process. Traditional semiconductor grinding equipment usually needs to be shut down and perform complicated disassembly and installation operations when replacing the grinding wheel. This is not only time-consuming and labor-intensive, but there are certain safety risks during the operation, and the skills of the operator are required to be high. Therefore, there are obvious deficiencies in production efficiency and safety.

[0003] In order to solve the above problems, some patents have proposed corresponding solutions in recent years. For example, Chinese patent CN115847275B proposes a semiconductor raw material grinding device, which includes a grinding component and a locking component. It is more convenient and quick to replace grinding wheels of different particle sizes, which is conducive to saving replacement time and improving grinding efficiency.

[0004] Although the above patents have improved the convenience of replacing grinding wheels in semiconductor grinding equipment to a certain extent, there are still some problems:

[0005] This application uses a single motor to drive all the grinding wheels to rotate. In actual use, each time a grinding wheel is replaced, the motor is required to execute a different preset program to drive the grinding wheel to rotate to complete the corresponding particle size grinding requirements. In addition, the motor also needs to drive all the grinding wheels to rotate at the same time each time, which puts too much burden on the motor. At the same time, since the grinding time of semiconductors is generally more than 6 hours, this further increases the burden on the motor operation and greatly reduces the service life of the motor. Summary of the invention

[0006] In view of this, an object of the present invention is to provide a semiconductor material grinding device to solve the problem of heavy burden on the motor during the grinding process in the prior art.

[0007] To achieve the above purpose, the present invention provides a semiconductor raw material grinding equipment, including a lower box body, the top of the lower box body is fixedly connected to the upper box body, the top of the inner wall of the upper box body is fixedly installed with a mounting mechanism, the bottom of the mounting mechanism is provided with a plurality of driving mechanisms, the bottoms of the plurality of driving mechanisms are respectively installed with grinding wheels of different particle sizes, the outer wall of the driving mechanism is installed and connected with a water pipe, the end of the water pipe is fixedly connected with a water spray head, and the water spray head is fixedly connected to one side of the outer wall of the driving mechanism through a rotating member, a rotating component is provided inside the upper box body, a fixing mechanism is provided on the top of the rotating component, a sewage recovery component is provided inside the lower box body, an air vent is provided at the bottom of the inner wall of the fixing mechanism, the rotating component is used to drive the fixing mechanism to rotate, the rotating component is connected to the lower box body, the sewage recovery component is used to recover the cooling liquid sprayed from the water spray head, and the sewage recovery component is connected to the lower box body.

[0008] In the above technical solution, preferably, the rotating assembly includes a motor fixedly connected to the bottom of the inner wall of the lower box body, the output end of the motor is fixedly connected to a reducer, and the reducer is fixedly connected to the bottom of the inner wall of the lower box body, the output end of the reducer is fixedly connected to a rotating shaft, the top of the rotating shaft is fixedly connected to a rotating block, and the rotating block is rotatably connected to the top of the inner wall of the lower box body, the outer wall end of the rotating shaft close to the rotating block is fixedly connected to a connecting arm, the outer wall side of the connecting arm away from the rotating shaft is fixedly connected to a first connecting block, the top of the first connecting block is fixedly connected to a second connecting block, and the top of the second connecting block is fixedly connected to A movable seat is fixedly connected thereto, and the movable seat is fixedly connected to the bottom of the fixing mechanism, a partition plate is provided on the outside of the movable seat, and the partition plate is fixedly connected to the bottom of the inner wall of the upper box body, the bottom of the inner wall of the upper box body is fixedly connected with a first arc-shaped slide rail and a second arc-shaped slide rail in sequence from the outside to the inside, and the movable seat is slidably connected to the outer walls of the second arc-shaped slide rail and the first arc-shaped slide rail, the bottom of the inner wall of the upper box body and the top of the inner wall of the lower box body are both provided with arc-shaped movable openings, the arc-shaped movable openings are located between the first arc-shaped slide rail and the second arc-shaped slide rail, and the arc-shaped movable openings are adapted to the shape of the second connecting block.

[0009] In the above technical solution, preferably, a connecting portion is provided between the ends of the arc-shaped movable opening, and the connecting portion is located on the inner wall of the upper box body.

[0010] In the above technical solution, preferably, a mounting cover is fixedly connected to the top of the inner wall of the lower box body, an arc-shaped movable hole is opened at the bottom of the mounting cover, a closed arc-shaped guide rail is fixedly connected to the top of the inner wall of the mounting cover, a guide rail seat is slidably connected to the top of the arc-shaped guide rail, and the guide rail seat is slidably connected to the bottom of the first connecting block.

[0011] In the above technical solution, preferably, a receiving head is installed on the outer wall of the first connecting block, and a plurality of infrared emitters are arranged on the outside of the receiving head. The plurality of infrared emitters are all installed on the inner wall of the mounting cover, and the number of the plurality of infrared emitters corresponds to the number of the driving mechanisms.

[0012] In the above technical solution, preferably, a protective tube is provided on the outside of the rotating shaft, and the protective tube is fixedly connected to the mounting cover, and a reinforcement frame is fixedly connected to the outside of the protective tube, and the reinforcement frame is fixedly connected to the bottom of the inner wall of the lower box body.

[0013] In the above technical solution, preferably, the inner wall of the mounting cover is fixedly connected with an inner gear ring, a large gear is provided inside the inner gear ring, and the large gear is fixedly connected to the outer wall of the rotating shaft, a plurality of small gears are provided between the large gear and the inner gear ring, and the small gears are respectively meshed with the inner gear ring and the large gear.

[0014] In the above technical scheme, preferably, the sewage recovery component includes a connecting pipe inserted and rotatably connected to the inside of the arc-shaped movable hole, the connecting pipe is an elastic structure, the bottom of the connecting pipe is fixedly connected to a sewage tank, and the sewage tank is fixedly connected to the bottom of the inner wall of the lower box body, the other end of the connecting pipe is fixedly connected to a collecting bucket, the collecting bucket is rotatably connected to the bottom of the inner wall of the lower box body, and the collecting bucket is fixedly connected to the second connecting block, a second notch is provided on the outer wall of the collecting bucket, a first notch is provided on the outer wall of the collecting bucket, a plurality of connecting plates are fixedly connected to the inner side of the collecting bucket, the other end of the connecting plate is fixedly connected to a fixed block, and the fixed block is fixedly connected to the outer wall of the rotating shaft, and an arc-shaped inlet is provided on the top of the collecting bucket.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] By setting the rotating assembly, the grinding wheel can be accurately replaced. Each grinding wheel has an independent torque and speed, which can be set according to the grinding requirements. The actual grinding effect is better. At the same time, accurate replacement can still be achieved without limiting the specific number of grinding wheels, and the motor life is also effectively extended.

[0017] By setting up a sewage recovery component, the coolant can be continuously recovered, and when the fixing mechanism changes position, the collecting bucket and the connecting pipe can spontaneously follow the rotation, thereby keeping the sewage recovery route unobstructed and not being affected by the change of position of the fixing mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention;

[0019] Figure 2 It is a schematic diagram of the internal structure of the upper box body of the present invention;

[0020] Figure 3 It is a schematic diagram of the connecting portion structure of the present invention;

[0021] Figure 4 It is a schematic diagram of the internal structure of the lower box body of the present invention;

[0022] Figure 5 It is a schematic diagram of the internal structure of the mounting cover of the present invention;

[0023] Figure 6 It is a schematic diagram of the arc-shaped inlet structure of the present invention;

[0024] Figure 7 It is a schematic diagram of the large gear structure of the present invention.

[0025] In the figure: 1, lower box; 2, upper box; 3, mounting mechanism; 4, driving mechanism; 5, sprinkler head; 6, grinding wheel; 7, water pipe; 8, fixing mechanism; 9, connecting part; 10, arc-shaped movable opening; 11, partition plate; 12, first arc-shaped slide rail; 13, second arc-shaped slide rail; 14, moving seat; 15, air vent; 16, protective tube; 17, mounting cover; 18, reinforcement frame; 19, rotating shaft; 20, motor; 21, reducer; 2 2. Sewage tank; 23. Connecting pipe; 24. First connecting block; 25. Second connecting block; 26. Receiving head; 27. Infrared transmitter; 28. Collecting bucket; 29. ​​Arc-shaped entrance; 30. First notch; 31. Second notch; 32. Arc-shaped guide rail; 33. Arc-shaped movable hole; 34. Rotating block; 35. Connecting plate; 36. Connecting arm; 37. Small gear; 38. Large gear; 39. Inner gear ring; 40. Fixed block; 41. Guide rail seat. DETAILED DESCRIPTION

[0026] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] like Figure 1-Figure 7 A semiconductor raw material grinding device shown in the figure includes a lower box body 1, an upper box body 2 is fixedly connected to the top of the lower box body 1, a mounting mechanism 3 is fixedly installed on the top of the inner wall of the upper box body 2, a plurality of driving mechanisms 4 are arranged at the bottom of the mounting mechanism 3, grinding wheels 6 of different particle sizes are respectively installed at the bottom of the plurality of driving mechanisms 4, a water pipe 7 is installed and connected to the outer wall of the driving mechanism 4, a water spray head 5 is fixedly connected to one side of the outer wall of the driving mechanism 4 through a rotating member, a rotating assembly is arranged inside the upper box body 2, a fixing mechanism 8 is arranged on the top of the rotating assembly, an air vent 15 is opened at the bottom of the inner wall of the fixing mechanism 8, and the rotating assembly is used to drive the fixing mechanism 8 to rotate.

[0029] The semiconductor raw material is placed in the fixing mechanism 8, which is a prior art and is connected to the fan outside the equipment through an air pipe. The fan is started to generate negative pressure, and the wind is transported from the air vent 15 to the inside of the fan, thereby adsorbing the semiconductor raw material and keeping the overall position of the semiconductor raw material unchanged. Thereafter, the user starts the driving mechanism 4 through the controller, and the driving mechanism 4 drives the grinding wheel 6 to grind the semiconductor raw material. It should be noted here that the driving mechanism 4 includes a driving motor, a machine base, a plurality of fixing rods and a storage bottle for temporarily storing coolant, wherein the storage bottle is connected to an external coolant delivery device through a liquid pipe. During the grinding process, the coolant in the storage bottle flows into the inside of the water delivery pipe 7 and is sprayed out through the water spray head 5, sprinkled on the semiconductor raw material and takes away its heat, and cools the ground semiconductor raw material. The preset program and output power of each driving mechanism 4 used to drive the grinding wheels 6 of different particle sizes are different. Through this design, a separate grinding wheel 6 is driven by a separate driving mechanism 4, and the actual implementation effect is better.

[0030] The rotating assembly is connected to the lower box body 1, and the rotating assembly includes a motor 20 fixedly connected to the bottom of the inner wall of the lower box body 1, the output end of the motor 20 is fixedly connected to the reducer 21, and the reducer 21 is fixedly connected to the bottom of the inner wall of the lower box body 1, the output end of the reducer 21 is fixedly connected to the rotating shaft 19, the top of the rotating shaft 19 is fixedly connected to the rotating block 34, and the rotating block 34 is rotatably connected to the top of the inner wall of the lower box body 1, the outer wall end of the rotating shaft 19 close to the rotating block 34 is fixedly connected to the connecting arm 36, the outer wall side of the connecting arm 36 away from the rotating shaft 19 is fixedly connected to the first connecting block 24, the top of the first connecting block 24 is fixedly connected to the second connecting block 25, and the top of the second connecting block 25 is fixedly connected to the second connecting block 25. The upper part is fixedly connected with a movable seat 14, and the movable seat 14 is fixedly connected to the bottom of the fixing mechanism 8, a partition plate 11 is provided on the outside of the movable seat 14, and the partition plate 11 is fixedly connected to the bottom of the inner wall of the upper box body 2, and the bottom of the inner wall of the upper box body 2 is fixedly connected with a first arc-shaped slide rail 12 and a second arc-shaped slide rail 13 in sequence from the outside to the inside, and the movable seat 14 is slidably connected to the outer walls of the second arc-shaped slide rail 13 and the first arc-shaped slide rail 12, and an arc-shaped movable opening 10 is opened at the bottom of the inner wall of the upper box body 2 and the top of the inner wall of the lower box body 1, and the arc-shaped movable opening 10 is located between the first arc-shaped slide rail 12 and the second arc-shaped slide rail 13, and the arc-shaped movable opening 10 is adapted to the shape of the second connecting block 25.

[0031] Start the motor 20, and after being connected to the reducer 21, drive the rotating shaft 19 and the rotating block 34 to rotate synchronously. The torque output by the motor 20 is converted by the reducer 21, thereby reducing the rotation speed and increasing the torque, thereby improving the accuracy and making it easier to control the position of the fixing mechanism 8. The first connecting block 24 is driven to move through the connection of the connecting arm 36. Through the penetration of the arc-shaped movable opening 10, the first connecting block 24 extends from the lower box body 1 to the interior of the upper box body 2 and is connected to the moving seat 14. When the torque is transmitted to the moving seat 14, the moving seat 14 slides along the first arc-shaped slide rail 12 and the second arc-shaped slide rail 13, and finally drives the fixing mechanism 8 to move. Through this design, the position of the fixing mechanism 8 can be changed more accurately.

[0032] A connecting portion 9 is provided between the ends of the arc-shaped movable opening 10, and the connecting portion 9 is located on the inner wall of the upper box body 2. The connecting portion 9 separates the arc-shaped movable opening 10, and provides connection and support to the part of the bottom of the inner wall of the upper box body 2 located inside the arc-shaped movable opening 10. Through this design, the trajectory of the movable seat 14 is limited to reciprocating swinging rather than free rotation, which can prevent the air pipe connected to the fixing mechanism 8 from being entangled and blocking the airflow channel.

[0033] The top of the inner wall of the lower box body 1 is fixedly connected with a mounting cover 17, and an arc-shaped movable hole 33 is opened at the bottom of the mounting cover 17. The top of the inner wall of the mounting cover 17 is fixedly connected with a closed arc-shaped guide rail 32, and the top of the arc-shaped guide rail 32 is slidably connected with a guide rail seat 41, and the guide rail seat 41 is slidably connected to the bottom of the first connecting block 24. The guide rail seat 41 provides support for the first connecting block 24 and assists its sliding. Through this design, the bottom of the first connecting block 24 is supported and the sliding is more continuous.

[0034] A receiving head 26 is installed on the outer wall of the first connecting block 24 , and a plurality of infrared emitters 27 are arranged on the outer side of the receiving head 26 . The plurality of infrared emitters 27 are all installed on the inner wall of the mounting cover 17 , and the number of the plurality of infrared emitters 27 corresponds to the number of the driving mechanisms 4 .

[0035] The infrared emitter 27 at the corresponding position emits a straight infrared light, wherein the number of the infrared emitters 27 is multiple, and is bound to the number and orientation of the water sprinkler heads 5. When the water sprinkler head 5 needs to be replaced, the corresponding infrared emitter 27 immediately emits infrared light, and the others do not emit light. When the first connecting block 24 moves to a certain position, the receiving head 26 receives the infrared light, and the motor 20 stops rotating. At this time, the position of the fixing mechanism 8 is changed, and grinding can continue. By setting a rotating component, precise replacement of the grinding wheel 6 is achieved. Each grinding wheel 6 is provided with an independent torque and speed, which can be set according to the grinding requirements. The actual grinding effect is better. At the same time, precise replacement can still be achieved without limiting the specific number of grinding wheels 6, and the motor life is also effectively extended.

[0036] A protective tube 16 is provided on the outside of the rotating shaft 19, and the protective tube 16 is fixedly connected to the mounting cover 17. A reinforcement frame 18 is fixedly connected to the outside of the protective tube 16, and the reinforcement frame 18 is fixedly connected to the bottom of the inner wall of the lower box body 1. Through this design, a protective effect is achieved for the rotating shaft 19.

[0037] An inner gear ring 39 is fixedly connected to the inner wall of the mounting cover 17, a large gear 38 is provided inside the inner gear ring 39, and the large gear 38 is fixedly connected to the outer wall of the rotating shaft 19, a plurality of small gears 37 are provided between the large gear 38 and the inner gear ring 39, and the small gears 37 are respectively meshed with the inner gear ring 39 and the large gear 38. When the rotating shaft 19 rotates, the large gear 38 is synchronously driven to rotate, and the small gears 37 are synchronously driven to rotate inside the inner gear ring 39 through the meshing relationship. Through this design, the torque of the rotating shaft 19 is further improved, so that it requires greater force when rotating, and correspondingly, it is more accurate and stable when stopping.

[0038] A sewage recovery component is provided inside the lower box body 1, and the sewage recovery component is used to recover the coolant sprayed from the sprinkler head 5. The sewage recovery component is connected to the lower box body 1, and the sewage recovery component includes a connecting pipe 23 inserted and rotatably connected inside the arc-shaped movable hole 33. The connecting pipe 23 is an elastic structure. The bottom of the connecting pipe 23 is fixedly connected to a sewage tank 22, and the sewage tank 22 is fixedly connected to the bottom of the inner wall of the lower box body 1. The other end of the connecting pipe 23 is fixedly connected to a collecting bucket 28, and the collecting bucket 28 is rotatably connected to the bottom of the inner wall of the lower box body 1, and the collecting bucket 28 is fixedly connected to the second connecting block 25. The outer wall of the collecting bucket 28 is provided with a second notch 31, and the outer wall of the collecting bucket 28 is provided with a first notch 30. A plurality of connecting plates 35 are fixedly connected to the inner side of the collecting bucket 28, and the other end of the connecting plate 35 is fixedly connected to a fixed block 40, and the fixed block 40 is fixedly connected to the outer wall of the rotating shaft 19. The top of the collecting bucket 28 is provided with an arc-shaped inlet 29.

[0039] When the coolant is sprayed from the water spray head 5 to the ground semiconductor raw material, it will take away its heat and splash inside the upper box body 2, and finally gather together from the arc-shaped movable opening 10 from the upper box body 2 into the lower box body 1, and enter the interior of the collecting barrel 28 through the arc-shaped inlet 29 at the top. Under the influence of gravity, the sewage inside the collecting barrel 28 is collected into the sewage tank 22 through the connecting pipe 23, and the sewage is collected. When the fixing mechanism 8 changes its position, through the connection of the connecting plate 35 and the second connecting block 25, the collecting barrel 28 and the fixing mechanism 8 move in the same amplitude and rotate together inside the lower box body 1, and the rotation force pulls The connecting pipe 23 is moved to twist it, and the arc-shaped inlet 29 rotates with the collecting barrel 28, so it is not blocked and can continuously receive sewage into the collecting barrel 28. Because the connecting pipe 23 is an elastic structure and can be stretched appropriately, the internal passage is still unobstructed even if it is twisted. Therefore, sewage can continuously enter the sewage tank 22 from the collecting barrel 28. By setting up a sewage recovery component, the coolant can be continuously recovered, and when the fixing mechanism 8 changes its position, the collecting barrel 28 and the connecting pipe 23 can spontaneously follow the rotation, thereby keeping the sewage recovery route unobstructed and not being affected by the change of position of the fixing mechanism 8.

[0040] The working principle provided by the present invention is:

[0041] The process of grinding the semiconductor raw material is to place the semiconductor raw material in the fixing mechanism 8, which is a prior art and is connected to the fan outside the equipment through an air pipe. The fan is started to generate negative pressure, and the wind is transported from the air vent 15 to the inside of the fan, thereby adsorbing the semiconductor raw material and keeping the overall position of the semiconductor raw material unchanged. Thereafter, the user starts the driving mechanism 4 through the controller, and the driving mechanism 4 drives the grinding wheel 6 to grind the semiconductor raw material. It should be noted that the driving mechanism 4 includes a driving motor, a machine base, a plurality of fixing rods and a storage bottle for temporarily storing a coolant, wherein the storage bottle is connected to an external coolant delivery device through a liquid pipe. During the grinding process, the coolant in the storage bottle flows into the inside of the water delivery pipe 7 and is sprayed out through the water spray head 5, sprinkled on the semiconductor raw material and takes away its heat, thereby cooling the ground semiconductor raw material.

[0042] The process of changing the specific position of the fixing mechanism 8 is that the user starts the motor 20 through the controller, drives the rotating shaft 19 and the rotating block 34 to rotate synchronously after being connected with the reducer 21, drives the first connecting block 24 to move through the connection of the connecting arm 36, and finally drives the fixing mechanism 8 to move. At this time, the infrared transmitter 27 at the corresponding position emits a straight infrared light. When the first connecting block 24 moves to a certain position, the receiving head 26 receives the infrared light. At this time, the motor 20 stops rotating. At this time, the position of the fixing mechanism 8 is changed, and grinding can continue;

[0043] The process of recycling sewage is as follows: when the coolant is sprayed from the water spray head 5 to the ground semiconductor raw material, it will take away its heat and splash inside the upper box body 2, and finally gather together and flow from the upper box body 2 to the inside of the lower box body 1 through the arc-shaped movable port 10, and enter the inside of the collecting barrel 28 through the arc-shaped inlet 29 at the top of the collecting barrel 28. Under the influence of gravity, the sewage inside the collecting barrel 28 is collected into the sewage tank 22 through the connecting pipe 23, and the sewage collection is completed. When the fixing mechanism 8 changes its position, through the connection of the connecting plate 35 and the second connecting block 25, the collecting barrel 28 and the fixing mechanism 8 move in the same amplitude and rotate together inside the lower box body 1. The rotating force pulls the connecting pipe 23 to twist it, and the arc-shaped inlet 29 rotates with the collecting barrel 28, so it is not blocked and can continuously receive sewage to the inside of the collecting barrel 28. Because the connecting pipe 23 is an elastic structure and can be stretched appropriately, even if it is twisted, the internal passage is still unobstructed, so the sewage can continuously enter the sewage tank 22 from the collecting barrel 28.

[0044] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A semiconductor raw material grinding device, comprising a lower box (1), the top of which is fixedly connected to an upper box (2), characterized in that: A mounting mechanism (3) is fixedly mounted on the top of the inner wall of the upper box body (2); a plurality of driving mechanisms (4) are provided at the bottom of the mounting mechanism (3); grinding wheels (6) of different particle sizes are respectively mounted at the bottom of the plurality of driving mechanisms (4); a water pipe (7) is mounted on the outer wall of the driving mechanism (4); a water spray head (5) is fixedly connected to the end of the water pipe (7); and the water spray head (5) is fixedly connected to one side of the outer wall of the driving mechanism (4) via a rotating member; a rotating assembly is provided inside the upper box body (2); a fixing mechanism (8) is provided on the top of the rotating assembly; a sewage recovery assembly is provided inside the lower box body (1); and a vent hole (15) is provided at the bottom of the inner wall of the fixing mechanism (8); The rotating assembly is used to drive the fixing mechanism (8) to rotate, and the rotating assembly is connected to the lower box (1); The sewage recovery component is used to recover the coolant sprayed from the water spray head (5), and the sewage recovery component is connected to the lower box (1); The rotating assembly comprises a motor (20) fixedly connected to the bottom of the inner wall of the lower box (1); the output end of the motor (20) is fixedly connected to a reducer (21), and the reducer (21) is fixedly connected to the bottom of the inner wall of the lower box (1); the output end of the reducer (21) is fixedly connected to a rotating shaft (19); the top of the rotating shaft (19) is fixedly connected to a rotating block (34), and the rotating block (34) is rotatably connected to the top of the inner wall of the lower box (1); an end of the outer wall of the rotating shaft (19) close to the rotating block (34) is fixedly connected to a connecting arm (36); a side of the outer wall of the connecting arm (36) away from the rotating shaft (19) is fixedly connected to a first connecting block (24); the top of the first connecting block (24) is fixedly connected to a second connecting block (25), and the top of the second connecting block (25) is fixedly connected to a movable A seat (14), and the movable seat (14) is fixedly connected to the bottom of the fixing mechanism (8), a partition plate (11) is provided on the outside of the movable seat (14), and the partition plate (11) is fixedly connected to the bottom of the inner wall of the upper box body (2), the bottom of the inner wall of the upper box body (2) is fixedly connected with a first arc-shaped slide rail (12) and a second arc-shaped slide rail (13) in sequence from the outside to the inside, and the movable seat (14) is slidably connected to the outer walls of the second arc-shaped slide rail (13) and the first arc-shaped slide rail (12), the bottom of the inner wall of the upper box body (2) and the top of the inner wall of the lower box body (1) are both provided with an arc-shaped movable opening (10), the arc-shaped movable opening (10) is located between the first arc-shaped slide rail (12) and the second arc-shaped slide rail (13), and the arc-shaped movable opening (10) is adapted to the shape of the second connecting block (25); A mounting cover (17) is fixedly connected to the top of the inner wall of the lower box body (1), an arc-shaped movable hole (33) is opened at the bottom of the mounting cover (17), a closed arc-shaped guide rail (32) is fixedly connected to the top of the inner wall of the mounting cover (17), a guide rail seat (41) is slidably connected to the top of the arc-shaped guide rail (32), and the guide rail seat (41) is slidably connected to the bottom of the first connecting block (24); A receiving head (26) is installed on the outer wall of the first connecting block (24), and a plurality of infrared emitters (27) are arranged on the outer side of the receiving head (26). The plurality of infrared emitters (27) are all installed on the inner wall of the installation cover (17), and the number of the plurality of infrared emitters (27) corresponds to the number of the driving mechanisms (4).

2. A semiconductor raw material grinding device according to claim 1, characterized in that: A connecting portion (9) is provided between the ends of the arc-shaped movable opening (10), and the connecting portion (9) is located on the inner wall of the upper box body (2).

3. A semiconductor raw material grinding device according to claim 1, characterized in that: A protective tube (16) is provided outside the rotating shaft (19), and the protective tube (16) is fixedly connected to the mounting cover (17). A reinforcement frame (18) is fixedly connected to the outside of the protective tube (16), and the reinforcement frame (18) is fixedly connected to the bottom of the inner wall of the lower box body (1).

4. A semiconductor raw material grinding device according to claim 1, characterized in that: An inner gear ring (39) is fixedly connected to the inner wall of the mounting cover (17), a large gear (38) is provided inside the inner gear ring (39), and the large gear (38) is fixedly connected to the outer wall of the rotating shaft (19), a plurality of small gears (37) are provided between the large gear (38) and the inner gear ring (39), and the small gears (37) are respectively meshed with the inner gear ring (39) and the large gear (38).

5. The semiconductor raw material grinding equipment according to claim 1, characterized in that: The sewage recovery component comprises a connecting pipe (23) inserted and rotatably connected to the inside of the arc-shaped movable hole (33); the connecting pipe (23) is an elastic structure; the bottom of the connecting pipe (23) is fixedly connected to a sewage tank (22), and the sewage tank (22) is fixedly connected to the bottom of the inner wall of the lower box body (1); the other end of the connecting pipe (23) is fixedly connected to a collecting bucket (28), and the collecting bucket (28) is rotatably connected to the bottom of the inner wall of the lower box body (1), and the collecting bucket (28) ) is fixedly connected to the second connecting block (25), the outer wall of the collecting barrel (28) is provided with a second notch (31), the outer wall of the collecting barrel (28) is provided with a first notch (30), a plurality of connecting plates (35) are fixedly connected to the inner side of the collecting barrel (28), the other end of the connecting plate (35) is fixedly connected to a fixing block (40), and the fixing block (40) is fixedly connected to the outer wall of the rotating shaft (19), and the top of the collecting barrel (28) is provided with an arc-shaped entrance opening (29).

Images