A gas static pressure guide rail

Abstract

The present application discloses a gas static pressure guide rail, which belongs to the technical field of air floating guide rails. It mainly includes a slide rail, on which a slider is slidably installed; an air inlet, which is located on one side of the slide rail, and an air pipe is installed on the air inlet, and the air pipe is connected to the slider; a first slide, and the air pipe is located directly above the first slide; a detection device, which includes a bottom plate; a detection chamber, the interior of which is provided with a central through-hole, and a gas sensor is installed in the hole; wherein the air pipe is located inside the hole, and the detection chamber is suitable for reciprocating movement on the first slide, and the air pipe is detected for air leakage through the gas sensor. A gas static pressure guide rail of the present application, by setting a detection device, can promptly detect air leakage in the air pipe, and by setting a collar assembly, can promptly block the air leakage point, thereby effectively controlling the air leakage and ensuring the safe and stable operation of the system.

Description

Technical Field

[0001] The present application relates to the technical field of air floating guide rails, and in particular to a gas static pressure guide rail. Background Art

[0002] Gas hydrostatic guideway is a guideway system that realizes frictionless and vibration-free smooth movement based on the gas hydrostatic effect. It is mainly composed of a guideway and a slide (or slider), and the contactless movement between the two is achieved through air film lubrication. It is mainly suitable for high-speed and high-precision machinery and equipment, such as semiconductor manufacturing equipment, medical equipment, etc.

[0003] For example, the patent with publication number CN111590340A specifically discloses an actively controlled air cushion hydrostatic slider module for a gas hydrostatic guide rail. By setting a displacement sensor to measure the fitting clearance between the hydrostatic slider and the guide rail, real-time control of the air cushion clearance is achieved to adapt to the guide rail processing errors and external load changes, significantly improving the movement accuracy of the slider. At the same time, by adjusting the thickness of the adjusting gasket, the initial throttling ratio can be adjusted to adapt to changes in the structural parameters and working conditions of the gas hydrostatic guide rail.

[0004] In the above patent, the gas static pressure guide rail realizes real-time control of the air cushion gap by setting a displacement sensor to adapt to the guide rail processing error. Although the gas static pressure guide rail can reduce the error of gas entry, over time, the gas pipe on the slider may lose its sealing due to aging or wear, which may lead to leakage in the gas pipe. Leakage may further increase the sliding error between the slider and the slide rail, thereby affecting the performance of the entire machine equipment. For example, in semiconductor manufacturing equipment, the accuracy and stability of the guide rail are crucial to the production of chips. Leakage may lead to a decline in chip production quality or equipment failure, so it is necessary to provide a gas static pressure guide rail with a leakage detection device to solve the above problems.

[0005] It should be noted that the above information disclosed in this background technology section is only for understanding the background technology of the present application concept, and therefore, it may contain information that does not constitute the prior art. Summary of the invention

[0006] Based on the above problems existing in the prior art, the problem to be solved by the present application is: to provide a gas static pressure guide rail to achieve the effect of real-time leakage detection of the gas pipe of the slider in the air floating guide rail.

[0007] The technical solution adopted by the present application to solve its technical problems is: a gas hydrostatic guide rail, including a slide rail, on which a slider is slidably installed; an air inlet, which is located on one side of the slide rail, and an air pipe is installed on the air inlet, and the end of the air pipe away from the air inlet is connected to the slider; a first slide, which is arranged on one side of the slide rail, and the air pipe is located directly above the first slide; a detection device, which includes a base plate, and a plurality of groups of rotating wheels are arranged at the bottom of the base plate, and the rotating wheels are slidably installed on the first slide; a detection chamber, a centrally through-hole is arranged inside the detection chamber, and the diameter of the receiving hole is larger than the diameter of the air pipe, and a gas sensor is installed in the receiving hole; wherein the air pipe is located inside the receiving hole, and the detection chamber is suitable for reciprocating on the first slide, and the air pipe is detected for gas leakage by the gas sensor.

[0008] Furthermore, a feeding part is provided inside the detection bin, and the feeding part includes a second slide, and the second slide is installed on the top of the base plate, a fixed motor is provided on one side of the second slide, a screw is installed on the output end of the fixed motor, a bearing seat is provided on the side of the second slide away from the fixed motor, and the end of the screw away from the fixed motor is installed in the bearing seat; a bracket is slidably connected to the top of the second slide, a threaded sleeve is provided at the bottom of the bracket, the threaded sleeve has a thread matching the screw, and the threaded sleeve is threadedly connected to the screw; a fixed sleeve, a through hole is provided at the center where the fixed sleeve is installed, the through hole is coaxially arranged with the accommodating hole, the size of the through hole is matched with the size of the accommodating hole, and a plurality of groups of throat clamps are placed in sequence in the fixed sleeve.

[0009] Furthermore, a notch is provided on one side of the bottom of the fixed sleeve, a push block is fixedly installed on the bottom plate, the size of the push block is smaller than the size of the notch, and one side of the push block is extended toward the notch.

[0010] Furthermore, a placement plate is provided on a side of the fixing sleeve away from the notch.

[0011] Furthermore, a stretching part is provided on one side of the feeding part, and the stretching part includes two sets of third slideways arranged opposite to each other, a pneumatic block is slidably installed on the third slideway, a support frame is provided on the top of the pneumatic block, and a clamp is provided on the top of the support frame.

[0012] Furthermore, the inner side of the support frame is arranged to be arc-shaped, and when the two groups of support frames are close to each other, the inner sides of the two groups of support frames are assembled together to form a circular placement cavity, and the size of the placement cavity is adapted to the size of the throat clamp.

[0013] Furthermore, a stopper is provided on the inner side of the support frame.

[0014] Furthermore, the throat clamp is composed of a clamping block and a steel belt, and a sealing pad made of rubber is arranged on the inner side of the steel belt.

[0015] Furthermore, the detection device is controlled by a PLC control system.

[0016] Furthermore, a rotating motor is fixedly installed on one side of the air inlet, and a winding frame is installed on the output end of the rotating motor through a coupling. The winding frame is suitable for rotating under the drive of the rotating motor, and the air delivery pipe is wound and stored on the winding frame.

[0017] The beneficial effect of the present application is that the present application provides a gas static pressure guide rail, which, by setting a detection device, enables the gas pipe to be discovered in time when a leak occurs, and at the same time, by setting a collar assembly, the leak point can be blocked in time, thereby effectively controlling the leak and ensuring the safe and stable operation of the system.

[0018] In addition to the above-described purposes, features and advantages, the present application also has other purposes, features and advantages. The present application will be further described in detail with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings in the specification, which constitute a part of the present application, are used to provide further understanding of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute improper limitations on the present application.

[0020] In the attached picture:

[0021] Figure 1 It is an overall schematic diagram of a gas hydrostatic guide rail in this application;

[0022] Figure 2 for Figure 1 Side structural diagram of the medium hydrostatic guide rail;

[0023] Figure 3 for Figure 2 Schematic diagram of the structure of the detection component;

[0024] Figure 4 for Figure 3 A schematic diagram of the structure of the middle collar assembly;

[0025] Figure 5 for Figure 4 The structural diagram of the middle feeding part;

[0026] Figure 6 for Figure 5 A schematic diagram of the side structure of the middle feeding section;

[0027] Figure 7 for Figure 6 A schematic diagram of the internal structure of the middle fixed sleeve;

[0028] Figure 8 for Figure 4 Structural schematic diagram of the middle stretching section;

[0029] Among them, the reference numerals in the figure are:

[0030] 1. Guide rail assembly; 11. Slide rail; 12. Slider;

[0031] 2. Air supply assembly; 21. Air inlet; 22. Air pipe; 23. Winding rack;

[0032] 3. Detection assembly; 31. First slideway; 32. Detection device; 33. Bottom plate; 34. Detection chamber; 341. Cover plate; 35. Accommodation hole; 36. Gas sensor;

[0033] 4. Ring assembly; 41. Feeding part; 42. Second slideway; 43. Fixed motor; 44. Screw rod; 45. Bearing seat; 46. Bracket;

[0034] 5. Discharging part; 51. Fixing sleeve; 511. Notch; 52. Hose clamp; 53. Push block; 54. Placement plate;

[0035] 6. stretching part; 61. third slideway; 62. pneumatic block; 63. support frame; 64. stopper; 65. clamping claw. DETAILED DESCRIPTION

[0036] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0037] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0038] Embodiment 1: This embodiment specifically describes the basic structure and working principle of a gas static pressure guide rail, specifically:

[0039] like Figure 1-Figure 3 As shown, the present application provides a gas static pressure guide rail, including a guide rail assembly 1, which adopts a traditional air floating guide rail design, has the characteristics of high precision, low friction, and smooth operation, and is widely used in occasions requiring precision control such as CNC workshops;

[0040] The guide rail assembly 1 includes a slide rail 11, which is installed in a CNC workshop. A slider 12 is slidably installed on the slide rail 11. An air flotation cavity is provided inside the slider 12. An air supply assembly 2 is provided on one side of the slider 12. The air supply assembly 2 is used to provide power for the slider 12, so that a stable air film is formed between the slider 12 and the slide rail 11 during the movement, thereby realizing high-precision and low-friction movement on the slide rail 11.

[0041] The air supply assembly 2 includes an air inlet 21, which is located at one side of the slide rail 11. A gas delivery pipe 22 is installed on the air inlet 21. One end of the gas delivery pipe 22 away from the air inlet 21 is connected to the slider 12 for delivering gas to the slider 12 so that the slider 12 can slide on the slide rail 11.

[0042] At the same time, a rotating motor (not shown in the figure) is fixedly installed on one side of the air inlet 21, and a winding frame 23 is fixedly installed on the output end of the rotating motor through a coupling. The winding frame 23 is suitable for rotating under the drive of the rotating motor, and the air pipe 22 is wound and stored on the winding frame 23. When the slider 12 slides on the slide rail 11, the rotating motor will also rotate synchronously and drive the winding frame 23 to rotate, so that the extended length of the air pipe 22 is synchronized with the movement length of the slider 12, so that the air pipe 22 located outside the winding frame 23 is always in a straight state, avoiding additional resistance and wear caused by the bending of the air pipe 22.

[0043] At the same time, in order to avoid leakage of the gas pipe 22 during gas transmission, a detection component 3 is also provided on the slide rail 11, and the detection component 3 includes a first slide 31, and the first slide 31 is provided on one side of the slide rail 11, and the gas pipe 22 is located directly above the first slide 31. At the same time, a detection device 32 is provided on the first slide 31, and the detection device 32 is used to detect leakage of the gas pipe 22 to prevent leakage from affecting the movement of the slider 12;

[0044] The detection device 32 includes a bottom plate 33, and a plurality of rotating wheels (not shown in the figure) are arranged at the bottom of the bottom plate 33. The plurality of rotating wheels are suitable for moving on the first slideway 31 driven by an external motor, thereby driving the bottom plate 33 to move synchronously.

[0045] Meanwhile, a detection chamber 34 is arranged on the bottom plate 33, and a cover plate 341 which can be opened and closed freely is arranged on the top of the detection chamber 34. Meanwhile, a centrally-through receiving hole 35 is arranged inside the detection chamber 34, and the diameter of the receiving hole 35 is larger than the diameter of the gas pipe 22. Meanwhile, a plurality of gas sensors 36 are arranged in the receiving hole 35, and the gas sensors 36 are used to detect the air leakage at the leakage point on the gas pipe 22 in real time.

[0046] Before performing a gas leakage detection, first open the cover 341 on the top of the detection chamber 34, put the gas pipe 22 into the accommodating hole 35, and then put the cover 341 back on. Then control the rotating wheel to drive the detection device 32 to move back and forth on the first slide 31, so as to perform a gas leakage detection on the surface of the gas pipe 22. When a gas leakage occurs at a certain position, the gas sensitive sensor 36 can report the leakage point in real time, so that the staff can seal the leakage point in time, thereby improving the safety and reliability of the device.

[0047] Embodiment 2: When the gas pipeline 22 leaks, it is cumbersome for the staff to seal it, which may increase the downtime of the device. Therefore, the detection device 32 is improved so that it can seal the gas pipeline 22 in time. The structure and principle of the detection device 32 are described below, specifically:

[0048] like Figure 4-Figure 7 As shown, a collar assembly 4 is arranged inside the detection chamber 34, and the collar assembly 4 includes a feeding part 41, and the feeding part 41 includes a second slide 42, and the second slide 42 is installed on the top of the bottom plate 33, and a fixed motor 43 is fixedly installed on one side of the second slide 42, and a screw rod 44 is fixedly installed on the output end of the fixed motor 43 through a coupling, and a bearing seat 45 is arranged on the side of the second slide 42 away from the fixed motor 43, and the other end of the screw rod 44 is rotatably connected in the bearing seat 45;

[0049] Meanwhile, a bracket 46 is slidably connected to the top of the second slideway 42, and a threaded sleeve (not shown in the figure) is provided at the bottom of the bracket 46. The threaded sleeve has a thread matching the screw rod 44, and the threaded sleeve is threadedly connected to the screw rod 44, so that the bracket 46 is suitable for sliding on the second slideway 42 driven by the fixed motor 43;

[0050] Meanwhile, a discharge portion 5 is provided on the bracket 46, and the discharge portion 5 includes a fixed sleeve 51 fixedly mounted on the top of the bracket 46, and a through hole is provided at the center of the fixed sleeve 51, and the through hole is provided cocentrically with the receiving hole 35, and the size of the through hole is adapted to the size of the receiving hole 35, and a plurality of groups of throat hoops 52 are sequentially placed in the fixed sleeve 51, and the throat hoops 52 are composed of a card block and a steel belt, and a rubber sealing pad is provided on the inner side of the steel belt, which is used to block the leakage point on the gas transmission pipe 22;

[0051] At the same time, a notch 511 is provided on one side of the bottom of the fixing sleeve 51, and a push block 53 is fixedly installed on the bottom plate 33. The size of the push block 53 is smaller than the size of the notch 511, and one side of the push block 53 extends toward the notch 511. At the same time, a placement plate 54 is provided on one side of the fixing sleeve 51 away from the notch 511, and the placement plate 54 is used to temporarily store the throat clamp 52.

[0052] When the throat hoop 52 needs to be transported, the fixed motor 43 is first used to drive the fixed sleeve 51 to move toward the push block 53. At this time, the push block 53 will contact the throat hoop 52 at the rear side of the fixed sleeve 51. At the same time, as the fixed sleeve 51 continues to move, the throat hoop 52 at the front end will be pushed out of the fixed sleeve 51 into the placement plate 54 by the push block 53. At this time, the fixed motor 43 is controlled to rotate in the opposite direction, thereby driving the fixed sleeve 51 to move in the direction away from the push block 53, so that the throat hoop 52 is transported to the next process.

[0053] like Figure 8 As shown, the collar assembly 4 also includes a stretching portion 6 arranged on one side of the feeding portion 41, and the stretching portion 6 includes two sets of third slideways 61 arranged opposite to each other, and a pneumatic block 62 is slidably mounted on the third slideway 61, and a support frame 63 is fixedly mounted on the top of the pneumatic block 62, and a clamping claw 65 is fixedly mounted on the top of the support frame 63, and the clamping claw 65 is used to clamp the throat clamp 52;

[0054] The inner side of the support frame 63 is set to be arc-shaped, and the two groups of support frames 63 are suitable for approaching or moving away from each other under the drive of the pneumatic block 62. When the two groups of support frames 63 are close to each other, the inner sides of the two groups of support frames 63 are combined with each other to form a circular placement cavity, and the size of the placement cavity is adapted to the size of the throat hoop 52;

[0055] At the same time, a stopper 64 is provided on the inner side of the support frame 63, and the stopper 64 is used to prevent the throat clamp 52 from falling out. When the fixed sleeve 51 needs to be moved toward the push block 53, the throat clamp 52 located in the placement plate 54 will enter the placement cavity, and the block and the steel belt of the throat clamp 52 will be clamped by the claws 65 on both sides respectively, and then the two groups of pneumatic blocks 62 are moved away from each other, so that the steel belt is tightened and fixed on the leakage point of the air pipe 22, and then the claws 65 release the clamping of the throat clamp 52. At this time, since the diameter of the throat clamp 52 becomes smaller due to tightening, the fixing sleeve 51 can pass smoothly, and will not affect the subsequent detection and blocking work.

[0056] When the slider 12 continues to move on the slide rail 11, the detection device 32 will also synchronously continuously detect the gas pipe 22. When a leak occurs at a certain point on the gas pipe 22, the gas sensor 36 on the detection device 32 will sound an alarm and temporarily stop the slider 12 from moving. At this time, the collar assembly 4 will promptly block the leak point through the throat clamp 52, and then the slider 12 can continue to perform CNC operations;

[0057] At the same time, in order to enable the stretching part 6 and the discharge part 5 to move in coordination, a PLC control system is also provided in the detection device 32, and the clamping jaws 65, the pneumatic block 62 and the fixed motor 43 and other devices are all suitable for coordinated operation under the control of the PLC control system.

[0058] In summary, the device is provided with a detection device 32 so that the gas pipe 22 can be discovered in time when a leak occurs. At the same time, by providing a collar assembly 4, the leak point can be blocked in time, thereby effectively controlling the leak and ensuring the safe and stable operation of the system.

[0059] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A gas static pressure guide rail, characterized in that: include: A slide rail (11), on which a slider (12) is slidably mounted; An air inlet (21), the air inlet (21) being located on one side of the slide rail (11), an air delivery pipe (22) being installed on the air inlet (21), and an end of the air delivery pipe (22) away from the air inlet (21) being connected to the slide block (12); a first slideway (31), the first slideway (31) being arranged on one side of the slide rail (11), the air delivery pipe (22) being located directly above the first slideway (31); A detection device (32), the detection device (32) comprising a bottom plate (33), a plurality of groups of rotating wheels being arranged at the bottom of the bottom plate (33), the rotating wheels being slidably mounted on the first slideway (31); A detection chamber (34), wherein a centrally-through receiving hole (35) is provided inside the detection chamber (34), the diameter of the receiving hole (35) being larger than the diameter of the gas delivery pipe (22), and a gas sensor (36) being installed in the receiving hole (35); The gas delivery pipe (22) is located inside the receiving hole (35), the detection chamber (34) is suitable for reciprocating on the first slideway (31), and performs gas leakage detection on the gas delivery pipe (22) through the gas sensor (36); A feeding portion (41) is provided inside the detection chamber (34), and the feeding portion (41) comprises a second slideway (42), the second slideway (42) is mounted on the top of the bottom plate (33), a fixed motor (43) is provided on one side of the second slideway (42), a screw rod (44) is mounted on the output end of the fixed motor (43), a bearing seat (45) is provided on the side of the second slideway (42) away from the fixed motor (43), and an end of the screw rod (44) away from the fixed motor (43) is mounted in the bearing seat (45); A bracket (46) is slidably connected to the top of the second slideway (42), a threaded sleeve is provided at the bottom of the bracket (46), a thread matching the screw rod (44) is provided in the threaded sleeve, and the threaded sleeve is threadedly connected to the screw rod (44); A fixing sleeve (51), the fixing sleeve (51) being mounted on the top of the bracket (46), the fixing sleeve (51) being provided with a through hole at its center, the through hole being provided cocentrically with the receiving hole (35), the size of the through hole being adapted to the size of the receiving hole (35), and a plurality of groups of throat hoops (52) being sequentially placed in the fixing sleeve (51); A notch (511) is provided on one side of the bottom of the fixing sleeve (51), a push block (53) is fixedly mounted on the bottom plate (33), the size of the push block (53) is smaller than the size of the notch (511), and one side of the push block (53) is extended toward the notch (511); A stretching portion (6) is provided on one side of the feeding portion (41), and the stretching portion (6) comprises two sets of third slideways (61) arranged opposite to each other, a pneumatic block (62) is slidably mounted on the third slideway (61), a support frame (63) is provided on the top of the pneumatic block (62), and a clamping claw (65) is provided on the top of the support frame (63).

2. A gas hydrostatic guide rail according to claim 1, characterized in that: A placement plate (54) is provided on a side of the fixing sleeve (51) away from the notch (511).

3. A gas hydrostatic guide rail according to claim 1, characterized in that: The inner side of the support frame (63) is arranged in an arc shape, and when two groups of the support frames (63) are close to each other, the inner sides of the two groups of the support frames (63) are assembled together to form a circular placement cavity, and the size of the placement cavity is adapted to the size of the throat clamp (52).

4. The gas hydrostatic guide rail according to claim 1, characterized in that: A stopper (64) is provided on the inner side of the support frame (63).

5. The gas hydrostatic guide rail according to claim 1, characterized in that: The throat clamp (52) is composed of a clamping block and a steel belt, and a sealing pad made of rubber is arranged on the inner side of the steel belt.

6. The gas hydrostatic guide rail according to claim 1, characterized in that: The detection device (32) is controlled by a PLC control system.

7. The gas hydrostatic guide rail according to claim 1, characterized in that: A rotating motor is fixedly mounted on one side of the air inlet (21), a winding frame (23) is mounted on the output end of the rotating motor via a coupling, the winding frame (23) is suitable for rotating under the drive of the rotating motor, and the air delivery pipe (22) is wound and stored on the winding frame (23).

Images