Electron beam physical vapor deposition (EB-PVD) thermal barrier coating preparation device and method

Abstract

The invention discloses a device and method for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), which belongs to the technical field of thermal barrier coatings, and includes a loading chamber, the loading chamber and the deposition chamber are sealed and connected through a connecting channel, a sealing valve is sealed and fixedly arranged on the connecting channel, one end of a rotating spindle is arranged in the loading chamber, the other end of the rotating spindle passes through the loading chamber and is fixedly connected to a driving component, the rotating spindle is sealed and matched with the side wall of the loading chamber, a target assembly is sealed and arranged on the bottom of the deposition chamber, an electron gun is sealed and fixedly arranged on the inner wall of the deposition chamber, a heating assembly is fixedly arranged on the inner wall of the deposition chamber, and the heating assembly is electrically connected to a control assembly through a sealing conductive assembly. By adding a loading chamber and a sealing valve, the deposition chamber can be effectively sealed when loading, and when a coating is required, it is only necessary to evacuate the loading chamber, and the loading chamber is small in size, which can effectively reduce the energy consumed by evacuation.

Description

Technical Field

[0001] The invention relates to the technical field of thermal barrier coatings, and in particular to a device and method for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD). Background Art

[0002] The preparation of coatings on the surfaces of hot-end parts of aircraft engines (such as combustion chambers and turbine blades) can effectively improve the parts' antioxidant and corrosion resistance, reduce the surface temperature of the parts, and thus increase the life of the parts (theoretically, if the surface temperature of the parts is reduced by 15°C, the life of the parts can be increased by 1 time). The main processes for preparing coatings are gas phase Al infiltration, multi-arc ion plating, flame spraying, atmospheric plasma spraying (APS) and electron beam physical vapor deposition (EB-PVD). EB-PVD technology uses electron beams to heat the target material (the raw material to be coated), so that the target material evaporates after heating, and gaseous molecules or atoms are subsequently deposited on the surface of the parts to form a coating. Due to the high energy of the electron beam, it can heat and melt / evaporate high-melting-point materials (such as nickel, cobalt, molybdenum, zirconium oxide, etc.) that cannot be heated by conventional methods; EB-PVD can prepare thermal barrier coatings with columnar microstructures, which have high strain tolerance and excellent thermal shock resistance. Its theoretical life is 7 times that of APS thermal barrier coatings.

[0003] The EB-PVD equipment in the prior art only has an independent deposition chamber. Since the internal space of the deposition chamber is large, each vacuum operation consumes more electricity. At the same time, a high-energy electron beam generated by an electron gun is used to heat the parts in the deposition chamber. However, electron beam heating of parts has disadvantages. For example, the parts are easily burned due to the high energy of the electron beam. The electron beam spot is small and the heating range is narrow, so it is not easy to heat large parts. The electron beam is "linear" heating, so it is not easy to heat shielded areas, resulting in uneven heating of parts. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide an apparatus and method for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD).

[0005] The objective of the present invention is achieved through the following technical solutions:

[0006] An electron beam physical vapor deposition (EB-PVD) device for preparing a thermal barrier coating comprises a loading chamber, a deposition chamber, a blade tooling, a rotating spindle, a connecting channel, a sealing valve, an electron gun, a target assembly, a heating assembly, a driving assembly, a sealing conductive assembly, a vacuum assembly and a control assembly, wherein the loading chamber is sealed and connected to the deposition chamber through the connecting channel, the sealing valve is sealed and fixedly arranged on the connecting channel, one end of the rotating spindle is arranged in the loading chamber and is fixedly connected to the blade tooling, the other end of the rotating spindle passes through the loading chamber and is fixedly connected to the driving assembly, and the rotating spindle is sealed to the side wall of the loading chamber. The target assembly is sealingly arranged on the bottom of the deposition chamber and cooperates with the blade tooling, the electron gun is sealingly fixedly arranged on the inner wall of the deposition chamber and cooperates with the target assembly, the heating assembly is fixedly arranged on the inner wall of the deposition chamber and cooperates with the blade tooling, the heating assembly is electrically connected to the control assembly through the sealing conductive assembly, the sealing conductive assembly is sealingly fixedly arranged on the side wall of the deposition chamber, the loading chamber and the deposition chamber are respectively sealed and connected to the vacuum assembly, and the electron gun, the target assembly, the driving assembly and the vacuum assembly are all electrically connected to the control assembly.

[0007] Furthermore, the heating assembly includes a heating rod, an arc-shaped connecting head, a fixing rod, a first high-temperature resistant insulating tube, an insulating layer, a high-temperature resistant insulating gasket, a bearing shell, a bearing end plate and a bearing baffle, the bearing end plates are fixedly arranged on both ends of the bearing shell, the bearing baffles fixedly connected to the bearing end plates are fixedly arranged on both sides of the bearing shell, at least two layers of the insulating layer are arranged in the bearing shell, both sides of the insulating layer are arranged on the bearing baffle, the two ends of the insulating layer are respectively matched with the two bearing end plates, the first mounting holes are arranged on both ends of the bearing shell, the second mounting holes matched with the first mounting holes are arranged on the insulating layer, one end of the first high-temperature resistant insulating tube is arranged on the first mounting hole and extends to the bearing On the outside of the shell, the other end of the first high-temperature resistant insulating tube is arranged on the second mounting hole and extends to the inner side of the thermal insulation layer, the arc-shaped connecting head is arranged on the inner side of the thermal insulation layer and is fixedly connected to one end of the fixing rod, the other end of the fixing rod passes through the first high-temperature resistant insulating tube and is fixed on the first high-temperature resistant insulating tube, the arc-shaped connecting head and the heating rod are alternately arranged and electrically connected end to end, the heating rods or the arc-shaped connecting heads on both end sides are electrically connected to the sealing conductive assembly, the heating rod is matched with the blade tooling, the high-temperature resistant insulating gasket is arranged between the thermal insulation layer and the thermal insulation layer, the high-temperature resistant insulating gasket is arranged between the bearing shell and the thermal insulation layer, and the high-temperature resistant insulating gasket is sleeved on the first high-temperature resistant insulating tube.

[0008] Furthermore, the cross-sections of the load-bearing shell and the heat-insulating layer are both arc-shaped and coaxially arranged, and the load-bearing end plate is fan-shaped and coaxially arranged with the load-bearing shell.

[0009] Furthermore, an even number of the heating rods are arranged on the inner side of the thermal insulation layer, the heating rods on both sides are electrically connected to the control component, all the heating rods are arranged parallel to the axis of the supporting shell, and all the heating rods are arranged on the same arc surface.

[0010] Furthermore, a shielding plate is arranged between the bearing baffles, and the bearing end plate is fixed to the inner wall of the deposition chamber through a supporting rod.

[0011] Furthermore, the sealed conductive component includes a conductive copper rod, a second high-temperature resistant insulating tube, a window plate, a cavity plate, a sealing sleeve, a gasket, a static sealing plate, a dynamic sealing plate, a clamping head, an inner rubber gasket, a wire connector and a cable. One end of the conductive copper rod is electrically connected to the heating component, and the other end of the conductive copper rod is electrically connected to the control component through the wire connector and the cable in sequence. The conductive copper rod is arranged in the second high-temperature resistant insulating tube, and the second high-temperature resistant insulating tube is arranged in the sealing sleeve. One end of the sealing sleeve is sealed and arranged on the cavity plate, and the other end of the sealing sleeve is sealed and arranged on the window plate. The window plate is sealed and fixed on the window of the deposition chamber, and both the window plate and the cavity plate are provided with A through hole that seals with the sealing sleeve, a receiving cavity is formed between the window plate, the cavity plate and the sealing sleeve, the receiving cavity is filled with coolant, the static sealing plate is sealed and fixedly arranged on the cavity plate, a stepped hole that cooperates with the conductive copper rod is arranged in the static sealing plate, a gasket is sealed in the stepped hole, the gasket sealing sleeve is arranged on the conductive copper rod and one end cooperates with the second high-temperature resistant insulating tube, the clamping head, the dynamic sealing plate and the inner rubber gasket are all sealingly sleeved on the conductive copper rod, and the dynamic sealing plate is pressed on the other end of the gasket through the inner rubber gasket and the clamping head in turn, the clamping head is arranged in the stepped hole, and the dynamic sealing plate is fixed to the static sealing plate through a fixing member.

[0012] Furthermore, the sealing conductive component also includes a Y-shaped sealing ring, an outer rubber gasket and a locking nut. A sealing groove is provided on the dynamic sealing plate. The Y-shaped sealing ring is sealingly arranged in the sealing groove and sealingly cooperates with the sealing groove. The Y-shaped sealing ring and the outer rubber gasket are both sleeved on the conductive copper rod and sealingly cooperate with the conductive copper rod sheet. The locking nut is threadedly cooperated with the conductive copper rod and is pressed against the Y-shaped sealing ring through the outer rubber gasket.

[0013] Furthermore, a cooling liquid inlet and a cooling liquid outlet are provided on the cavity plate, and both the cooling liquid inlet and the cooling liquid outlet are sealed and connected to the accommodating cavity.

[0014] Furthermore, the conductive copper rod is electrically connected to the heating component through a wire, a third high-temperature resistant insulating tube is provided outside the wire sleeve, a mounting hole matching with the third high-temperature resistant insulating tube is provided on the heating component, and the second high-temperature resistant insulating tube matches with the third high-temperature resistant insulating tube.

[0015] A method for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), the method using the device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), the method comprising the following steps:

[0016] S1: opening the hatch of the loading chamber, installing the turbine blade to be coated on the blade tooling, and then closing the hatch;

[0017] S2: Controlling the vacuum pumping component to operate by the control component, and simultaneously performing vacuum pumping operations on the loading chamber and the deposition chamber;

[0018] S3: After the vacuuming work is completed, the vacuuming component is closed by the control component, and then the sealing valve is controlled to open, and then the driving component is controlled to work, so that the blade tooling in the loading chamber passes through the connecting channel and enters the deposition chamber and cooperates with the heating component and the target assembly;

[0019] S4: controlling the heating component to heat the turbine blade, and controlling the driving component to drive the blade tooling to rotate;

[0020] S5: When the turbine blade reaches a preset temperature, the electron gun is controlled to generate an electron beam to heat the target material in the target assembly, and the target material evaporates after being heated to form gaseous molecules or atoms and is deposited on the turbine blade for coating;

[0021] S6: After the coating is completed, the blade tooling is controlled to enter the loading chamber by controlling the driving assembly, and the sealing valve is controlled to close;

[0022] S7: introducing air into the charging chamber to cool the blade tooling once;

[0023] S8: After the primary cooling is completed, the hatch is opened for secondary cooling. After the secondary cooling is completed, the turbine blade is removed from the blade tooling to complete the entire coating work.

[0024] The beneficial effects of the present invention are:

[0025] 1) In this technology, by adding a loading chamber and a sealing valve, the deposition chamber can be effectively sealed during loading. When coating is required, it is only necessary to evacuate the loading chamber. The small size of the loading chamber can effectively reduce the energy consumed by vacuuming.

[0026] 2) In this technology, a heating component is provided to heat the parts on the blade tooling evenly over a large area without causing the parts to burn out during the heating process.

[0027] 3) In this technology, the sealed conductive component facilitates the transmission of electricity by the conductive copper rod, while also ensuring that the deposition chamber has a better sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a three-dimensional connection structure diagram of the thermal barrier coating device;

[0029] Figure 2 It is a three-dimensional connection structure diagram of the blade tooling in the charging chamber;

[0030] Figure 3 A three-dimensional connection structure diagram of the heating assembly in the deposition chamber;

[0031] Figure 4 It is a three-dimensional connection structure between the blade tooling and the heating component. Figure 1 ;

[0032] Figure 5 It is a three-dimensional connection structure between the blade tooling and the heating component. Figure 2 ;

[0033] Figure 6 It is a three-dimensional connection structure diagram between the first high temperature resistant insulating tube and the thermal insulation layer;

[0034] Figure 7 It is a three-dimensional connection structure diagram between the heating rod and the arc-shaped connector;

[0035] Figure 8 It is a three-dimensional internal connection structure diagram of the heating component;

[0036] Fig. 9 A cross-sectional connection structure diagram of a sealed conductive component;

[0037] In the figure, 1-charging chamber, 2-deposition chamber, 3-blade tooling, 4-rotating spindle, 5-connecting channel, 6-sealing valve, 7-electron gun, 8-target assembly, 9-driving assembly, 10-vacuum assembly, 11-control assembly, 12-heating rod, 13-arc connector, 14-fixing rod, 15-first high temperature resistant insulating tube, 16-insulating layer, 17-high temperature resistant insulating gasket, 18-bearing shell, 19-bearing end plate, 20-bearing baffle, 21-first mounting hole, 22-second mounting hole, 23-shielding plate, 24-support rod, 25-conductive copper rod, 26-second high temperature resistant insulating tube, 27-window plate, 28-cavity plate, 29-sealing sleeve, 30-gasket, 31-static sealing plate, 32-dynamic sealing plate, 33-pressing head, 34-inner rubber gasket, 35-wire connector, 36-cable, 37-coolant, 38-step hole, 39-Y-type sealing ring, 40-outer rubber gasket, 41-locking nut, 42-sealing groove, 43-coolant inlet, 44-coolant outlet, 45-third high temperature resistant insulating tube, 46-mounting hole, 47-fixing part, 48-copper wire. DETAILED DESCRIPTION

[0038] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0039] See also Figure 1-Figure 9 , the present invention provides a technical solution:

[0040] An electron beam physical vapor deposition EB-PVD thermal barrier coating preparation device comprises a charging chamber 1, a deposition chamber 2, a blade tool 3, a rotating spindle 4, a connecting channel 5, a sealing valve 6, an electron gun 7, a target assembly 8, a heating assembly, a driving assembly 9, a sealing conductive assembly, a vacuum assembly 10 and a control assembly 11. The charging chamber 1 is sealed and connected with the deposition chamber 2 through the connecting channel 5. The sealing valve 6 is sealed and fixedly arranged on the connecting channel 5. One end of the rotating spindle 4 is arranged in the charging chamber 1 and is fixedly connected to the blade tool 3. The other end of the rotating spindle 4 passes through the charging chamber 1 and is fixedly connected to the driving assembly 9. The shaft 4 is sealed and matched with the side wall of the loading chamber 1, the target assembly 8 is sealed and arranged on the bottom of the deposition chamber 2 and matched with the blade tooling 3, the electron gun 7 is sealed and fixedly arranged on the inner wall of the deposition chamber 2 and matched with the target assembly 8, the heating assembly is fixedly arranged on the inner wall of the deposition chamber 2 and matched with the blade tooling 3, the heating assembly is electrically connected to the control assembly 11 through the sealed conductive assembly, the sealed conductive assembly is sealed and fixedly arranged on the side wall of the deposition chamber 2, the loading chamber 1 and the deposition chamber 2 are respectively sealed and connected with the vacuum assembly 10, and the electron gun 7, the target assembly 8, the driving assembly 9 and the vacuum assembly 10 are all electrically connected to the control assembly 11. In the charging chamber 1, the turbine blades are mounted on or removed from the blade fixture 3. The blade fixture 3 is a prior art for mounting turbine blades. The drive assembly 9 is a prior art. Before coating, the drive assembly 9 transfers the blade fixture 3 from the charging chamber 1 to the deposition chamber 2 by rotating the main shaft 4. After coating, the blade fixture 3 is transferred from the deposition chamber 2 to the charging chamber 1. During the coating process, the drive assembly 9 drives the blade fixture 3 to rotate by rotating the main shaft 4. Therefore, the operation of the drive assembly 9 is controlled by the control assembly 11 in the prior art. The connecting channel 5 is used in conjunction with the sealing valve 6 in the prior art. The blade fixture 3 must pass through the connecting channel 5 from the charging chamber 1 to the deposition chamber 2 or from the deposition chamber 2 to the charging chamber 1. When the blade fixture 3 is in the deposition chamber 2, the sealing valve 6 is in an open state. When the blade fixture 3 is in the charging chamber 1, the sealing valve 6 is in a closed state. Therefore, the operation of the sealing valve 6 is controlled by the control assembly 11.The turbine blades need to be in a vacuum state during coating, but they cannot be in a vacuum state during cooling. Since the space of the deposition chamber 2 is large, if the deposition chamber 2 needs to be opened after each processing, the deposition chamber 2 needs to frequently change from a natural state to a vacuum state, which will consume more energy and time and reduce the processing efficiency. After the loading chamber 1 is added, after the coating work is completed, the blade tooling 3 enters the loading chamber 1. At this time, the sealing valve 6 is closed so that the deposition chamber 2 is still in a vacuum state, and the loading chamber 1 can be filled with air for cooling. After cooling, the coated turbine blades are removed, and then the uncoated turbine blades are installed. Then the loading chamber 1 is sealed, and the sealing valve 6 is opened after the loading chamber 1 is evacuated, and the blade tooling 3 is sent to the deposition chamber 2 for further processing. The space of the loading chamber 1 is small, and it is easier to evacuate, which reduces the time for evacuating and improves the processing efficiency. The electron gun 7 is a prior art. The function of the electron gun 7 is to heat the target material in the target assembly 8 so that the target material evaporates to form gaseous molecules or atoms. The gaseous molecules or atoms adhere to the turbine blades to achieve coating. As the target material in the target assembly 8 is consumed, the position of its upper surface will decrease. Therefore, the target assembly 8 in the prior art is controlled by the control component 11 to raise the position of the target material. The function of the heating component is to heat the turbine blades on the blade fixture 3 so that the gaseous molecules or atoms can better adhere to the turbine blades. The turbine blades will be heated only when the blade fixture 3 enters the deposition chamber 2. The heating is stopped after the coating is completed. Therefore, the operation of the heating component is also controlled by the control component 11. The vacuum assembly 10 is a prior art. Its function is to vacuum the loading chamber 1 and the deposition chamber 2. The vacuum assembly 10 can vacuum the loading chamber 1 and the deposition chamber 2 at the same time, or vacuum the loading chamber 1 or the deposition chamber 2 separately. Therefore, the vacuum assembly 10 is also controlled by the control component 11. In this technology, the coating on the heating component and the sealing conductive component needs to be removed once every 6 to 8 times the blade tooling 3 is processed, which can effectively prevent the coating on the heating component and the sealing conductive component from conducting electricity.

[0041] In some embodiments, the heating assembly includes a heating rod 12, an arc-shaped connecting head 13, a fixing rod 14, a first high-temperature resistant insulating tube 15, an insulating layer 16, a high-temperature resistant insulating gasket 17, a bearing shell 18, a bearing end plate 19 and a bearing baffle 20. The bearing end plates 19 are fixedly arranged on both ends of the bearing shell 18, and the bearing baffles 20 fixedly connected to the bearing end plates 19 are fixedly arranged on both sides of the bearing shell 18. At least two layers of insulating layers 16 are arranged in the bearing shell 18, and both sides of the insulating layer 16 are arranged on the bearing baffle 20. The two ends of the insulating layer 16 are respectively matched with the two bearing end plates 19, and the first mounting holes 21 are arranged on both ends of the bearing shell 18. The second mounting holes 22 matching the first mounting holes 21 are arranged on the insulating layer 16. One end of the first high-temperature resistant insulating tube 15 is arranged on the first mounting hole. The first high temperature resistant insulating tube 15 is provided on the hole 21 and extends to the outside of the bearing shell 18, the other end of the first high temperature resistant insulating tube 15 is arranged on the second mounting hole 22 and extends to the inner side of the thermal insulation layer 16, the arc connector 13 is arranged on the inner side of the thermal insulation layer 16 and is fixedly connected to one end of the fixing rod 14, the other end of the fixing rod 14 passes through the first high temperature resistant insulating tube 15 and is fixed on the first high temperature resistant insulating tube 15, the arc connector 13 and the heating rod 12 are alternately arranged and electrically connected end to end, the heating rods 12 or the arc connector 13 on the two end sides are electrically connected to the sealed conductive component, the heating rod 12 cooperates with the blade tooling 3, a high temperature resistant insulating gasket 17 is arranged between the thermal insulation layer 16 and the thermal insulation layer 16, a high temperature resistant insulating gasket 17 is arranged between the bearing shell 18 and the thermal insulation layer 16, and the high temperature resistant insulating gasket 17 is sleeved on the first high temperature resistant insulating tube 15. Among them, the heating rod 12 is a prior art and is used to heat the turbine blades on the blade tooling 3. Since the arc-shaped connecting head 13 is used to fix the heating rod 12 through the fixing rod 14, the arc-shaped connecting head 13 also has a conductive function. A first high-temperature resistant insulating tube 15 is sleeved on the outside of the fixing rod 14. The first high-temperature resistant insulating tube 15 is a ceramic insulating tube in the prior art. The lower end of the first high-temperature resistant insulating tube 15 is pressed against the arc-shaped connecting head 13. A through hole is provided at the upper end of the fixing rod 14. A wedge-shaped pin is provided in the through hole. The fixing rod 14 is fixed in the first high-temperature resistant insulating tube 15 by the wedge-shaped pin. The wedge-shaped pin does not contact the bearing shell 18. The first high-temperature resistant insulating tube 15 is divided into two sections, and one section is in contact with the thermal insulation layer 16.The other section is in contact with the bearing shell 18. The bearing shell 18 and the insulation layer 16 are both arranged on the outer wall of the first high-temperature resistant insulating tube 15. The first high-temperature resistant insulating tube 15 is provided with multiple layers of insulation layers 16, generally 5 to 8 layers of insulation layers 16, and high-temperature resistant insulating gaskets 17 are arranged between the insulation layers 16. The high-temperature resistant insulating gaskets 17 are ceramic insulation gaskets in the prior art. The insulation layer 16 is made of molybdenum in the prior art. The bearing shell 18, the bearing end plate 19 and the bearing baffle 20 are made of high-temperature resistant metal materials in the prior art, such as nickel-based or cobalt-based high-temperature alloys. The bearing shell 18, the bearing end plate 19 and the bearing baffle 20 are fixed together by fixing buckles and screws and fixed on the inner wall of the deposition chamber 2. The structure composed of the bearing shell 18, the bearing end plate 19 and the bearing baffle 20 is used to install and fix the first high-temperature resistant insulating tube 15 and the insulation layer 16, and the insulation layer 16 is used for heat insulation.

[0042] In some embodiments, the cross-sections of the bearing shell 18 and the heat insulation layer 16 are both arc-shaped and coaxially arranged, and the bearing end plate 19 is fan-shaped and coaxially arranged with the bearing shell 18. Among them, since a plurality of turbine blades are installed on the blade tooling 3, the blade tooling 3 will rotate during operation, so when heating, in order to better cooperate with the blade tooling 3, the bearing shell 18 and the heat insulation layer 16 are arranged in an arc shape. The bearing shell 18 and the heat insulation layer 16 are both arranged parallel to the axis of the blade tooling 3.

[0043] In some embodiments, an even number of heating rods 12 are arranged on the inner side of the insulation layer 16, and the heating rods 12 on both sides are electrically connected to the control assembly 11. All the heating rods 12 are arranged parallel to the axis of the bearing shell 18, and all the heating rods 12 are arranged on the same arc surface. Among them, the number of heating rods 12 is an even number, which is convenient for the copper wires 48 on both sides of the heating rods 12 to be on the same side, which is convenient for transmitting electrical energy for heating. The heating rods 12 are arranged parallel to the axis of the bearing shell 18. Since the bearing shell 18 cooperates with the blade tooling 3, it is convenient to evenly heat the turbine blades, which has a better heating effect.

[0044] In some embodiments, a shielding plate 23 is provided between the bearing baffles 20 and the bearing baffles 20, and the bearing end plate 19 is fixed to the inner wall of the deposition chamber 2 by a support rod 24. The shielding plate 23 is provided to reduce the target coating on the heating rod 12, reduce the influence of the coating on the heating rod 12, and also reduce the difficulty of cleaning the coating on the heating rod 12 later. The bearing end plate 19 is fixed to the inner wall of the deposition chamber 2 by the support rod 24, and the bearing housing 18 can also be fixed to the inner wall of the deposition chamber 2 by the support rod 24.

[0045] In some embodiments, the sealed conductive component includes a conductive copper rod 25, a second high temperature resistant insulating tube 26, a window plate 27, a cavity plate 28, a sealing sleeve 29, a gasket 30, a static sealing plate 31, a dynamic sealing plate 32, a clamping head 33, an inner rubber gasket 34, a wire connector 35 and a cable 36. One end of the conductive copper rod 25 is electrically connected to the heating component, and the other end of the conductive copper rod 25 is electrically connected to the control component 11 through the wire connector 35 and the cable 36 in sequence. The conductive copper rod 25 is arranged in the second high temperature resistant insulating tube 26, the second high temperature resistant insulating tube 26 is arranged in the sealing sleeve 29, one end of the sealing sleeve 29 is sealed on the cavity plate 28, and the other end of the sealing sleeve 29 is sealed on the window plate 27. The window plate 27 is sealed and fixed on the window of the deposition chamber 2, and the window plate 27 and the cavity The cavity plate 28 is provided with through holes that are sealed with the sealing sleeve 29. A accommodating cavity is formed between the window plate 27, the cavity plate 28 and the sealing sleeve 29. The accommodating cavity is filled with coolant 37. A static sealing plate 31 is sealed and fixedly provided on the cavity plate 28. A stepped hole 38 that is matched with the conductive copper rod 25 is provided in the static sealing plate 31. A gasket 30 is sealed in the stepped hole 38. The gasket 30 is sealed on the conductive copper rod 25 and one end of the gasket 30 is matched with the second high-temperature resistant insulating tube 26. The clamping head 33, the dynamic sealing plate 32 and the inner rubber gasket 34 are all sealed on the conductive copper rod 25. The dynamic sealing plate 32 is pressed on the other end of the gasket 30 through the inner rubber gasket 34 and the clamping head 33 in turn. The clamping head 33 is set in the stepped hole 38, and the dynamic sealing plate 32 is fixed to the static sealing plate 31 by a fixing member 47. The sealing conductive assembly also includes a Y-shaped sealing ring 39, an outer rubber gasket 40 and a locking nut 41. The dynamic sealing plate 32 is provided with a sealing groove 42. The Y-shaped sealing ring 39 is sealed and arranged in the sealing groove 42 and is sealed and matched with the sealing groove 42. The Y-shaped sealing ring 39 and the outer rubber gasket 40 are both sleeved on the conductive copper rod 25 and are sealed and matched with the conductive copper rod 25. The locking nut 41 is threadedly matched with the conductive copper rod 25 and is pressed on the Y-shaped sealing ring 39 through the outer rubber gasket 40. The cavity plate 28 is provided with a coolant inlet 43 and a coolant outlet 44, and the coolant inlet 43 and the coolant outlet 44 are both sealed and connected with the accommodating cavity. Among them, the second high-temperature resistant insulating tube 26 is a ceramic insulating tube in the prior art, and the conductive copper rod 25 is arranged inside the second high-temperature resistant insulating tube 26 for conduction. A through window is provided on the deposition chamber 2, and the window plate 27 is sealed and fixed on the window plate 27. The cavity plate 28 is sealed and welded on the window plate 27. The two ends of the sealing sleeve 29 are respectively sealed and welded on the window plate 27 and the cavity plate 28. The coolant inlet 43 and the coolant outlet 44 are convenient for recycling during water cooling.The second high temperature resistant insulating tube 26 is arranged in the sealing sleeve 29, the static sealing plate 31 is sealed and welded on the cavity plate 28, the gasket 30 is a metal gasket, which is used to cooperate with the end of the second high temperature resistant insulating tube 26, and the gasket 30 is provided with multiple pieces, and the pressing head 33 is used to press the gasket 30, and an inner rubber gasket 34 is arranged between the gasket 30 and the dynamic sealing plate 32, and the inner rubber gasket 34 is sealed with the conductive copper rod 25, and the inner rubber gasket 34 is sealed with the static sealing plate 31, and the first seal is formed under the pressure of the dynamic sealing plate 32; the Y-shaped sealing ring 39 is set in the dynamic sealing plate 32, and the Y-shaped sealing ring 39 and the dynamic sealing plate 32 The outer rubber gasket 40 is sealed with the dynamic sealing plate 32 and the conductive copper rod 25 under the pressure of the locking nut 41, thus forming a third seal, which can effectively prevent air leakage in the deposition chamber 2 when it is in a vacuum state. The locking nut 41 also has a limiting function. After the deposition chamber 2 is evacuated, the pressure in the deposition chamber 2 is small, and the conductive copper rod 25 will move into the deposition chamber 2. The wire connector 35 is arranged between the two locking nuts 41, and the wire connector 35 transmits electricity through the cable 36, so that the heating rod 12 is heated.

[0046] In some embodiments, the conductive copper rod 25 is electrically connected to the heating component through a copper wire 48, a third high temperature resistant insulating tube 45 is provided on the outer sleeve of the copper wire 48, a mounting hole 46 matching the third high temperature resistant insulating tube 45 is provided on the heating component, and the second high temperature resistant insulating tube 26 matches the third high temperature resistant insulating tube 45. Among them, the third high temperature resistant insulating tube 45 is a ceramic insulating tube in the prior art, the copper wire 48 is connected between the heating rod 12 and the conductive copper rod 25, the third high temperature resistant insulating tube 45 is provided to facilitate fixing the copper wire 48 on the bearing end plate 19, the bearing end plate 19 is provided with a mounting hole 46 matching the third high temperature resistant insulating tube 45, and the third high temperature resistant insulating tube 45 is provided to facilitate cleaning of the coating, and if the coating is not cleaned, the third high temperature resistant insulating tube 45 will directly conduct electricity.

[0047] A method for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), the method uses an electron beam physical vapor deposition (EB-PVD) device for preparing a thermal barrier coating, and the method comprises the following steps:

[0048] (1) Open the hatch of the loading chamber 1, install the turbine blade to be coated on the blade fixture 3, and then close the hatch. Before processing, the turbine blade needs to be installed on the blade fixture 3. In this technology, multiple turbine blades can be installed on the blade fixture 3. After all the turbine blades are installed, close the hatch. The hatch in the loading chamber 1 is sealed after closing.

[0049] (2) The vacuum pumping component 10 is controlled by the control component 11 to vacuum the loading chamber 1 and the deposition chamber 2 at the same time. The vacuum pumping component 10 is started by the control component 11, and the loading chamber 1 is vacuumed first. If the vacuum degree of the deposition chamber 2 is the same as the preset vacuum degree, the deposition chamber 2 does not need to be vacuumed. If the vacuum degree of the deposition chamber 2 does not reach the preset vacuum degree, the deposition chamber 2 also needs to be vacuumed. A sealing valve 6 is provided between the loading chamber 1 and the deposition chamber 2. The sealing valve 6 will only be opened when the vacuum degrees of the loading chamber 1 and the deposition chamber 2 are the same. Opening the sealing valve 6 when the vacuum degrees are different may easily cause damage to the equipment.

[0050] (3) After the vacuuming is completed, the vacuuming component 10 is closed by the control component 11, and then the sealing valve 6 is controlled to open, and then the driving component 9 is controlled to work, so that the blade fixture 3 in the loading chamber 1 passes through the connecting channel 5 and enters the deposition chamber 2 and cooperates with the heating component and the target component 8. After the vacuuming of the loading chamber 1 and the deposition chamber 2 is completed, that is, the vacuum degree in the loading chamber 1 and the deposition chamber 2 is the same, the vacuuming component 10 is closed, the sealing valve 6 is opened, and the blade fixture 3 is driven to enter the deposition chamber 2 so that the blade fixture 3 is directly above the target component 8, and the blade fixture 3 is in the heating component.

[0051] (4) Control the heating component to heat the turbine blades, and control the driving component 9 to drive the blade fixture 3 to rotate. The turbine blades are heated before coating. The driving component 9 drives the blade fixture 3 to rotate by rotating the main shaft 4, and the heating component heats the turbine blades at the same time.

[0052] (5) When the turbine blade reaches the preset temperature, the electron gun 7 is controlled to generate an electron beam to heat the target material in the target assembly 8. After the target material is heated, it evaporates to form gaseous molecules or atoms and is deposited on the turbine blade for coating. The electron gun 7 heats the target material to form gaseous molecules or atoms that are deposited on the turbine blade, thereby achieving turbine blade coating. During the coating process, the heating assembly is continuously heated.

[0053] (6) After the coating is completed, the blade tooling 3 is controlled to enter the loading chamber 1 by controlling the driving assembly 9, and the sealing valve 6 is controlled to be closed. The sealing valve 6 is closed to prevent the vacuum degree in the deposition chamber 2 from changing. During the next processing, the energy consumed by evacuating the deposition chamber 2 is reduced, effectively saving energy.

[0054] (7) Air is introduced into the loading chamber 1 to cool the blade fixture 3. After the first cooling is completed, the door is opened for secondary cooling. After the secondary cooling is completed, the turbine blade is removed from the blade fixture 3, and the entire coating work is completed.

[0055] In the description of the present invention, it is necessary to understand that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0056] In the present invention, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation", "hinge" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0057] The above is only a preferred embodiment of the present invention. It should be understood that the present invention is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the concept described herein through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art shall not deviate from the spirit and scope of the present invention, and shall be within the scope of protection of the claims attached to the present invention.

Claims

1. An electron beam physical vapor deposition (EB-PVD) device for preparing a thermal barrier coating, characterized in that: The invention comprises a loading chamber (1), a deposition chamber (2), a blade fixture (3), a rotating spindle (4), a connecting channel (5), a sealing valve (6), an electron gun (7), a target assembly (8), a heating assembly, a driving assembly (9), a sealing conductive assembly, a vacuum assembly (10) and a control assembly (11), wherein the loading chamber (1) is sealed and connected to the deposition chamber (2) via the connecting channel (5), the sealing valve (6) is sealed and fixedly arranged on the connecting channel (5), one end of the rotating spindle (4) is arranged in the loading chamber (1) and is fixedly connected to the blade fixture (3), the other end of the rotating spindle (4) passes through the loading chamber (1) and is fixedly connected to the driving assembly (9), the rotating spindle (4) is sealed and matched with the side wall of the loading chamber (1), and the The target assembly (8) is sealed and arranged on the bottom of the deposition chamber (2) and cooperates with the blade fixture (3); the electron gun (7) is sealed and fixedly arranged on the inner wall of the deposition chamber (2) and cooperates with the target assembly (8); the heating assembly is fixedly arranged on the inner wall of the deposition chamber (2) and cooperates with the blade fixture (3); the heating assembly is electrically connected to the control assembly (11) through the sealed conductive assembly; the sealed conductive assembly is sealed and fixedly arranged on the side wall of the deposition chamber (2); the loading chamber (1) and the deposition chamber (2) are respectively sealed and connected to the vacuum assembly (10); the electron gun (7), the target assembly (8), the drive assembly (9) and the vacuum assembly (10) are all electrically connected to the control assembly (11); The heating assembly comprises a heating rod (12), an arc-shaped connecting head (13), a fixing rod (14), a first high-temperature resistant insulating tube (15), a heat-insulating layer (16), a high-temperature resistant insulating gasket (17), a bearing shell (18), a bearing end plate (19) and a bearing baffle (20), wherein the bearing end plates (19) are fixedly arranged at both ends of the bearing shell (18), the bearing baffle (20) fixedly connected to the bearing end plates (19) are fixedly arranged on both sides of the bearing shell (18), and the bearing shell (18) is provided with a plurality of heat-resistant insulating gaskets (17), wherein the heat-resistant insulating gasket (17 ... ) are provided with at least two layers of the thermal insulation layer (16), both sides of the thermal insulation layer (16) are provided on the bearing baffle (20), the two ends of the thermal insulation layer (16) are respectively matched with the two bearing end plates (19), the two ends of the bearing shell (18) are provided with a first mounting hole (21), the thermal insulation layer (16) is provided with a second mounting hole (22) matched with the first mounting hole (21), one end of the first high temperature resistant insulating tube (15) is provided on the first mounting hole (21) and extends to The other end of the first high temperature resistant insulating tube (15) is arranged on the outside of the bearing shell (18) on the second mounting hole (22) and extends to the inside of the thermal insulation layer (16); the arc-shaped connector (13) is arranged on the inside of the thermal insulation layer (16) and is fixedly connected to one end of the fixing rod (14); the other end of the fixing rod (14) passes through the first high temperature resistant insulating tube (15) and is fixed on the first high temperature resistant insulating tube (15); the arc-shaped connector (13) is connected to the heating rod (12) The heating rods (12) or the arc-shaped connectors (13) at both ends are electrically connected to the sealed conductive components, the heating rods (12) cooperate with the blade tooling (3), the high-temperature resistant insulating gaskets (17) are arranged between the thermal insulation layers (16), the high-temperature resistant insulating gaskets (17) are arranged between the bearing shell (18) and the thermal insulation layer (16), and the high-temperature resistant insulating gaskets (17) are sleeved on the first high-temperature resistant insulating tube (15).

2. The device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 1, characterized in that: The cross-sections of the load-bearing shell (18) and the heat insulation layer (16) are both arc-shaped and are coaxially arranged, and the load-bearing end plate (19) is fan-shaped and coaxially arranged with the load-bearing shell (18).

3. The device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 2, characterized in that: An even number of the heating rods (12) are arranged on the inner side of the heat insulation layer (16); the heating rods (12) on both sides are electrically connected to the control component (11); all the heating rods (12) are arranged parallel to the axis of the supporting shell (18); and all the heating rods (12) are arranged on the same arc surface.

4. An electron beam physical vapor deposition (EB-PVD) device for preparing thermal barrier coatings according to any one of claims 1 to 3, characterized in that: A shielding plate (23) is provided between the bearing baffles (20), and the bearing end plates (19) are fixed to the inner wall of the deposition chamber (2) via support rods (24).

5. An electron beam physical vapor deposition (EB-PVD) device for preparing a thermal barrier coating according to any one of claims 1 to 3, characterized in that: The sealed conductive component comprises a conductive copper rod (25), a second high temperature resistant insulating tube (26), a window plate (27), a cavity plate (28), a sealing sleeve (29), a gasket (30), a static sealing plate (31), a dynamic sealing plate (32), a clamping head (33), an inner rubber gasket (34), a wire connector (35) and a cable (36). One end of the conductive copper rod (25) is electrically connected to the heating component, and the other end of the conductive copper rod (25) is connected to the heating component through the wire connector (35) and the cable (36) in sequence. The control component (11) is electrically connected, the conductive copper rod (25) is arranged in the second high temperature resistant insulating tube (26), the second high temperature resistant insulating tube (26) is arranged in the sealing sleeve (29), one end of the sealing sleeve (29) is sealed on the cavity plate (28), and the other end of the sealing sleeve (29) is sealed on the window plate (27), the window plate (27) is sealed and fixed on the window of the deposition chamber (2), and the window plate (27) and the cavity plate (28) are both provided with The sealing sleeve (29) is sealed with a through hole, and a receiving cavity is formed between the window plate (27), the cavity plate (28) and the sealing sleeve (29), and the receiving cavity is filled with a coolant (37). The static sealing plate (31) is sealed and fixedly arranged on the cavity plate (28), and a stepped hole (38) cooperating with the conductive copper rod (25) is arranged in the static sealing plate (31), and a gasket (30) is sealed in the stepped hole (38), and the gasket (30) is sealed and sleeved on the conductive copper rod (25). ) and one end cooperates with the second high-temperature resistant insulating tube (26), the clamping head (33), the dynamic sealing plate (32) and the inner rubber gasket (34) are all sealed and sleeved on the conductive copper rod (25), and the dynamic sealing plate (32) is pressed on the other end of the gasket (30) through the inner rubber gasket (34) and the clamping head (33) in turn, the clamping head (33) is arranged in the stepped hole (38), and the dynamic sealing plate (32) is fixed to the static sealing plate (31) through a fixing member (47).

6. The device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 5, characterized in that: The sealing conductive component further comprises a Y-shaped sealing ring (39), an outer rubber gasket (40) and a locking nut (41); a sealing groove (42) is provided on the dynamic sealing plate (32); the Y-shaped sealing ring (39) is sealingly arranged in the sealing groove (42) and is sealingly matched with the sealing groove (42); the Y-shaped sealing ring (39) and the outer rubber gasket (40) are both sleeved on the conductive copper rod (25) and are sealingly matched with the conductive copper rod (25); the locking nut (41) is threadedly matched with the conductive copper rod (25) and is pressed against the Y-shaped sealing ring (39) through the outer rubber gasket (40).

7. The device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 5, characterized in that: A cooling liquid inlet (43) and a cooling liquid outlet (44) are provided on the cavity plate (28), and both the cooling liquid inlet (43) and the cooling liquid outlet (44) are sealed and connected to the accommodating cavity.

8. The device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 5, characterized in that: The conductive copper rod (25) is electrically connected to the heating component via a copper wire (48); a third high temperature resistant insulating tube (45) is provided on the outer sleeve of the copper wire (48); a mounting hole (46) that cooperates with the third high temperature resistant insulating tube (45) is provided on the heating component; and the second high temperature resistant insulating tube (26) cooperates with the third high temperature resistant insulating tube (45).

9. A method for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), the method using an electron beam physical vapor deposition (EB-PVD) thermal barrier coating preparation device according to any one of claims 1 to 8, characterized in that: The method comprises the following steps: S1: opening the hatch of the loading chamber (1), installing the turbine blade to be coated on the blade tooling (3), and then closing the hatch; S2: controlling the vacuum pumping component (10) to operate through the control component (11), and simultaneously performing vacuum pumping operations on the loading chamber (1) and the deposition chamber (2); S3: After the vacuuming work is completed, the vacuuming component (10) is closed through the control component (11), and then the sealing valve (6) is controlled to open, and then the driving component (9) is controlled to work, so that the blade tooling (3) in the loading chamber (1) passes through the connecting channel (5) and enters the deposition chamber (2) and cooperates with the heating component and the target component (8); S4: controlling the heating component to heat the turbine blade, and controlling the driving component (9) to drive the blade tooling (3) to rotate; S5: When the turbine blade reaches a preset temperature, the electron gun (7) is controlled to generate an electron beam to heat the target material in the target material assembly (8), and the target material evaporates after being heated to form gaseous molecules or atoms and is deposited on the turbine blade to form a coating; S6: After the coating is completed, the blade tooling (3) is caused to enter the loading chamber (1) by controlling the driving component (9), and the sealing valve (6) is controlled to be closed; S7: introducing air into the charging chamber (1) to cool the blade tooling (3); S8: After the primary cooling is completed, the hatch is opened for secondary cooling. After the secondary cooling is completed, the turbine blade is removed from the blade tooling (3), completing the entire coating work.

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