A PVD surface coating device

Abstract

The present invention relates to the field of PVD coating technology, and in particular to a PVD surface coating device, comprising a coating box and a vacuum pump group connected to the coating box, a sealing door is hingedly connected to the front end of the coating box, a coating mechanism is arranged inside the coating box, a fixed plate is fixedly connected to the bottom end of the coating box, a driving motor is fixedly connected to the bottom of the fixed plate, an output end of the driving motor is fixedly connected to a rotating rod through the top end of the fixed plate, a bottom plate and a top plate are respectively fixedly connected to the upper and lower ends of the outer wall of the rotating rod, and a gap is left between the bottom plate and the fixed plate, a plurality of rotating cylinders are rotatably connected between the bottom plate and the top plate, and a fixture table for placing workpieces is arranged on the outer walls of the plurality of rotating cylinders. Through the mutual cooperation of the above-mentioned structures, the present invention can not only rotate and self-rotate during the PVD coating process of the workpiece, but also drive the workpiece to move reciprocally up and down, thereby ensuring that the workpiece can be evenly coated and improving the production quality of the device.

Description

Technical Field

[0001] The invention relates to the technical field of PVD coating, and in particular to a PVD surface coating device. Background Art

[0002] PVD, or physical vapor deposition technology, refers to the technology of using physical methods under vacuum conditions to vaporize the surface of the material source into gaseous atoms or molecules, or partially ionize it into ions, and deposit a thin film with certain special functions on the surface of the substrate through a low-pressure gas or plasma process. Physical vapor deposition is one of the main surface treatment technologies, which can make the surface of the workpiece have many superior properties that are superior to the solid material itself, such as wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic conductivity, insulation and decoration. PVD coating technology is mainly divided into three categories: vacuum evaporation coating, vacuum sputtering coating and vacuum ion plating.

[0003] A PVD coating fixture with publication number CN116855911A in the prior art is convenient for comprehensive PVD coating treatment of the workpiece on the fixture, and can realize three-level rotation of the workpiece placed on the fixture device, thereby improving the PVD coating efficiency of the workpiece and improving the uniformity of the workpiece coating, thereby ensuring the quality of the workpiece PVD coating.

[0004] Although it is possible to achieve three-stage rotation of the workpiece during the PVD coating process, there are still some shortcomings in the actual processing process. Since the coating structure in the coating box and the height position of the workpiece are fixed, the workpiece cannot be moved up and down during the coating process to uniformly coat the workpiece, resulting in different coating qualities for the same batch of workpieces, greatly reducing the coating quality of the device.

[0005] Therefore, a PVD surface coating device is proposed to solve the problem that the workpiece cannot be moved up and down during the coating process. Summary of the invention

[0006] The purpose of the present invention is to solve the shortcomings of the background technology and to propose a PVD surface coating device.

[0007] To achieve the above purpose, the technical solution adopted by the present invention is: a PVD surface coating device, comprising a coating box and a vacuum pump group connected to the coating box, the front end of the coating box is hingedly connected to a sealing door, a coating mechanism is arranged inside the coating box, a fixed plate is fixedly connected to the bottom end of the coating box, a driving motor is fixedly connected to the bottom of the fixed plate, an output end of the driving motor is fixedly connected to a rotating rod through the top end of the fixed plate, a bottom plate and a top plate are respectively fixedly connected to the outer wall of the rotating rod at the upper and lower ends, and a gap is left between the bottom plate and the fixed plate, a plurality of rotating cylinders are rotatably connected between the bottom plate and the top plate, a plurality of outer walls of the rotating cylinders are provided with a fixture table for placing workpieces, the bottom plate and the fixed plate are provided with a rotating mechanism for driving the rotating cylinder to rotate, and a reciprocating mechanism is provided on the top plate;

[0008] The reciprocating mechanism includes a driving bevel gear, a slider is provided inside the rotating cylinder, a connecting structure is provided between the slider and the fixture table, a pair of winding plates are fixedly connected to the top of the top plate and located above the rotating cylinder, a winding roller is rotatably connected between the winding plates, a pull rope is fixedly connected to the outer wall of the winding roller, and the other end of the pull rope passes through the top plate and is fixedly connected to the top of the slider, one of the side walls of the winding plates is rotatably connected to an upper bevel gear, and the rotating part of the winding roller passes through the side wall of the upper bevel gear and is fixedly connected to an L-shaped plate;

[0009] The side wall of the upper bevel gear is rotatably connected to the driven bevel gear, the driving bevel gear is fixedly connected to the top of the coating box and meshes with the driven bevel gear, a straight rod is slidably connected through the side wall of the L-shaped plate, and a push rod for pushing the straight rod to move is fixedly connected to the side wall of the driven bevel gear. An inward groove is provided on the side wall of the upper bevel gear, an upper spring is fixedly connected between the outer wall of the straight rod and the side wall of the L-shaped plate, and a slot is provided on the side wall of the straight rod next to the push rod.

[0010] In the above technical solution, further, the groove is arranged on the rotation track of the straight rod, and the connection between the groove and the outer wall of the upper bevel gear is inclined.

[0011] In the above technical solution, further, another side wall of the winding plate is fixedly connected with a spiral spring, and the rotating part of the winding roller passes through the side wall of the winding plate and is fixedly connected to the other end of the spiral spring.

[0012] In the above technical solution, further, the connecting structure includes a T-ring, the bottom of the top plate and the inside of the rotating cylinder are fixedly connected to a fixed cylinder, the slider is slidably connected to the inner side of the fixed cylinder, the outer walls of the fixed cylinder and the rotating cylinder are penetrated with through grooves, both ends of the slider extend and are arranged between the rotating cylinder and the fixed cylinder, T-slots compatible with the T-ring are opened on both sides of the slider, the T-ring is arranged between the rotating cylinder and the fixed cylinder and is slidably connected to the inner side of the T-slot, and the inner side of the fixture table is fixedly connected to the outer wall of the T-ring through the through groove.

[0013] In the above technical solution, further, a buffer spring is fixedly connected between the bottom of the sliding block and the inner bottom end of the fixing tube.

[0014] In the above technical solution, further, the rotating mechanism includes a fixed gear ring, the bottom of the rotating cylinder is fixedly connected with a rotating gear through the bottom of the bottom plate, and the fixed gear ring is fixedly connected to the top of the fixed plate and meshes with the rotating gear.

[0015] In the above technical solution, further, the top of the top plate is rotatably connected to a lower bevel gear, and the lower bevel gear and the upper bevel gear are meshed with each other, the side wall of the lower bevel gear is fixedly connected to an adjustment plate, the top of the adjustment plate is fixedly connected to a limit frame, the inner side of the limit frame is slidably connected to a toothed plate, the top of the top plate and above the limit frame is fixedly connected to a positioning frame, the top of the inner top of the positioning frame is provided with a rack groove, the bottom of the toothed plate and the bottom end of the limit frame are fixedly connected with a lower spring, and the toothed plate and the rack groove are both arranged in an arc shape and meshed with each other.

[0016] In the above technical solution, further, a scale groove is provided on the top of the top plate and below the positioning frame, and a pressing block is fixedly connected to the side wall of the tooth plate.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. Through the setting of the reciprocating mechanism, it can not only rotate and self-rotate during the PVD coating process of the workpiece, but also drive the workpiece to move up and down, ensuring that the workpiece can be evenly coated and improving the production quality of the device.

[0019] 2. Through the arrangement of the lower bevel gear, the upper bevel gear and the toothed plate, the distance of each reciprocating movement can be adjusted according to the height of the coated workpiece to prevent the workpiece from hitting the top plate due to being too high, thereby improving the application range of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the front three-dimensional structure of the coating device of the present invention;

[0021] Figure 2 It is a schematic diagram of the overall appearance structure of the reciprocating mechanism of the present invention;

[0022] Figure 3 The appended Figure 2 A schematic diagram of the partially enlarged structure at center A;

[0023] Figure 4 It is a schematic diagram of the overall appearance structure of the fixed ring and the rotating ring of the present invention;

[0024] Figure 5 It is a schematic diagram of a partially normal full-section three-dimensional structure of a rotating cylinder and a fixed cylinder of the present invention;

[0025] Figure 6 It is a schematic diagram of the overall appearance structure of the winding roller of the present invention;

[0026] Figure 7 It is a schematic diagram of the full-section three-dimensional structure of the winding roller of the present invention from the front;

[0027] Figure 8 The appended Figure 7 Schematic diagram of the local enlarged structure at point B in the middle.

[0028] In the figure: 1, coating box; 2, vacuum pump group; 3, sealing door; 4, coating mechanism; 5, fixed plate; 6, driving motor; 7, rotating rod; 8, bottom plate; 9, top plate; 10, rotating cylinder; 11, driving bevel gear; 12, fixture table; 13, slider; 14, winding plate; 15, winding roller; 16, pull rope; 17, upper bevel gear; 18, L-shaped plate; 19, driven bevel gear; 20, straight rod; 21, push rod ; 22. groove; 23. upper spring; 24. slot; 25. scroll spring; 26. T-ring; 27. fixing cylinder; 28. through slot; 29. ​​T-slot; 30. buffer spring; 31. fixing gear ring; 32. rotating gear; 33. lower bevel gear; 34. adjusting plate; 35. limit frame; 36. gear plate; 37. positioning frame; 38. rack groove; 39. lower spring; 40. scale groove; 41. pressing block. DETAILED DESCRIPTION

[0029] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0031] like Figure 1-8A PVD surface coating device is shown, comprising a coating box 1 and a vacuum pump group 2 connected to the coating box 1, a sealing door 3 is hingedly connected to the front end of the coating box 1, a coating mechanism 4 is arranged inside the coating box 1, the coating mechanism 4 is a mature technology in the prior art, so it is not described in detail here, a fixing plate 5 is fixedly connected to the bottom end of the coating box 1, a driving motor 6 is fixedly connected to the bottom of the fixing plate 5, and the driving motor 6 is a low-speed motor, which drives the workpiece to rotate slowly in the coating box 1, so as to ensure that the push rod 21 moves to the initial position before the winding roller 15 is reset, and the output of the driving motor 6 The outlet passes through the top of the fixed plate 5 and is fixedly connected with a rotating rod 7. The upper and lower ends of the outer wall of the rotating rod 7 are respectively fixedly connected with a bottom plate 8 and a top plate 9, and a gap is left between the bottom plate 8 and the fixed plate 5. A plurality of rotating cylinders 10 are rotatably connected between the bottom plate 8 and the top plate 9. The outer walls of the plurality of rotating cylinders 10 are all provided with a fixture table 12 for placing the workpiece. The fixture table 12 is a mature technology in the prior art and can clamp the workpiece to ensure the stability of the workpiece during the coating process. The bottom plate 8 and the fixed plate 5 are provided with a rotating mechanism for driving the rotating cylinder 10 to rotate, and a reciprocating mechanism is provided on the top plate 9;

[0032] The reciprocating mechanism includes a driving bevel gear 11, a slider 13 is provided inside the rotating cylinder 10, a connecting structure is provided between the slider 13 and the fixture table 12, a pair of winding plates 14 are fixedly connected to the top of the top plate 9 and located above the rotating cylinder 10, a winding roller 15 is rotatably connected between the winding plates 14, and a pull rope 16 is fixedly connected to the outer wall of the winding roller 15. It should be noted here that the pulling position of each group of fixture tables 12 can be staggered, so that the up and down reciprocating position of each group of workpieces will be different, thereby further improving the coating effect on the workpieces. The other end of the pull rope 16 passes through the top plate 9 and is fixedly connected to the top of the slider 13, one of the side walls of the winding plates 14 is rotatably connected to an upper bevel gear 17, and the rotating part of the winding roller 15 passes through the side wall of the upper bevel gear 17 and is fixedly connected to an L-shaped plate 18;

[0033] The side wall of the upper bevel gear 17 is rotatably connected with a driven bevel gear 19, and the driving bevel gear 11 is fixedly connected to the top of the coating box 1 and meshes with the driven bevel gear 19. The side wall of the L-shaped plate 18 is slidably connected with a straight rod 20, and the side wall of the driven bevel gear 19 is fixedly connected with a push rod 21 for pushing the straight rod 20 to move. The side wall of the upper bevel gear 17 is provided with an inward groove 22, and an upper spring 23 is fixedly connected between the outer wall of the straight rod 20 and the side wall of the L-shaped plate 18. The side wall of the straight rod 20 and the push rod 21 are provided with a groove 24. The groove 22 is set on the rotation trajectory of the straight rod 20, and the connection between the groove 22 and the outer wall of the upper bevel gear 17 is inclined to facilitate the sliding out of the straight rod 20. Another side wall of the winding plate 14 is fixedly connected with a volute spring 25, which is convenient for pulling the winding roller 15 to reset. The rotating part of the winding roller 15 passes through the side wall of the winding plate 14 and is fixedly connected to the other end of the volute spring 25;

[0034] When in use, first open the sealing door 3 to clamp the workpiece on the fixture table 12 in sequence, then close the sealing door 3, then open the vacuum pump group 2 to evacuate the coating box 1, and then start the coating mechanism 4 to coat the workpiece, and at the same time control the drive motor 6 to start and drive the rotating rod 7, the bottom plate 8 and the top plate 9 to rotate, thereby driving the workpiece to circulate through the coating mechanism 4 on both sides for uniform coating, and at the same time drive the rotating mechanism to drive the workpiece to rotate, further improving the coating uniformity, at the same time, because the driving bevel gear 11 is fixed at the top of the coating box 1, the meshing driven bevel gear 19 will be driven to rotate under the drive of the rotation of the top plate 9, thereby driving the push rod 21 to push the straight rod 20 to rotate, and then drive the L-shaped plate 18 and the winding roller 15 to rotate, realize the winding of the pull rope 16, and then pull the slider 13 to move upward, and then drive the fixture table 12 to slide upward through the T-ring 26, and at the same time gradually compress the volute spring 25 and stretch the buffer spring 30;

[0035] Then, when the push rod 21 pushes the straight rod 20 to the side wall of the groove 22, the elastic force of the upper spring 23 will push the straight rod 20 to be inserted into the groove 22, thereby pushing the slot 24 to the side of the push rod 21, so that the straight rod 20 loses the thrust of the push rod 21, and then the elastic force of the spiral spring 25 and the buffer spring 30 pulls the winding roller 15 to rotate in the opposite direction, thereby driving the straight rod 20 to slide out of the groove 22, and at the same time stretching the upper spring 23, thereby driving the clamp table 12 to slide downward for reset, and finally the push rod 21 rotates to the side of the straight rod 20, and so on and so forth, thereby realizing the up and down reciprocating movement of the workpiece during the coating rotation process, which can further improve the comprehensiveness of the workpiece passing through the coating mechanism 4, thereby improving the coating effect of the device.

[0036] In order to prevent the slider 13 and the pull rope 16 from rotating during the rotation of the rotating cylinder 10, the connecting structure includes a T-ring 26, a fixed cylinder 27 is fixedly connected to the bottom of the top plate 9 and located inside the rotating cylinder 10, the slider 13 is slidably connected to the inner side of the fixed cylinder 27, and the outer wall of the fixed cylinder 27 and the rotating cylinder 10 are penetrated with a through groove 28, both ends of the slider 13 are extended and arranged between the rotating cylinder 10 and the fixed cylinder 27, and T-slots 29 adapted to the T-ring 26 are opened on both sides of the slider 13, the T-ring 26 is arranged between the rotating cylinder 10 and the fixed cylinder 27 and is slidably connected to the inner side of the T-slot 29, the inner side of the fixture table 12 is fixedly connected to the outer wall of the T-ring 26 through the through groove 28, and a buffer spring 30 is fixedly connected between the bottom of the slider 13 and the inner bottom end of the fixed cylinder 27. Through the setting of the buffer spring 30, not only can the slider 13 be pulled to quickly reset, but also the slider 13 can be in soft contact with the bottom of the fixed cylinder 27 to avoid excessive impact force;

[0037] When the rotating mechanism drives the rotating cylinder 10 and the fixture table 12 to rotate, it will drive the T-ring 26 to rotate in the T-slot 29, and will not drive the slider 13 on the fixed cylinder 27 to rotate, so as to avoid the pull rope 16 from being entangled and affecting the normal operation of the device. At the same time, when the pull rope 16 pulls the slider 13 upward, it can drive the T-ring 26 and the fixture table 12 to move upward, thereby achieving uniform coating of the workpiece.

[0038] In order to enable the workpiece to rotate during the coating process, the rotating mechanism includes a fixed gear ring 31, and the bottom of the rotating cylinder 10 is fixedly connected to a rotating gear 32 through the bottom of the bottom plate 8, and the fixed gear ring 31 is fixedly connected to the top of the fixed plate 5 and meshes with the rotating gear 32;

[0039] When the driving motor 6 drives the rotating rod 7 and the rotating cylinder 10 to rotate, it will drive multiple rotating gears 32 to rotate beside the fixed gear ring 31. Since the fixed gear ring 31 is fixed on the fixed plate 5, it will drive multiple meshing rotating gears 32 to rotate, and then drive the rotating cylinder 10 to rotate, thereby driving the fixture table 12 to rotate, realizing the self-rotation of the workpiece during the coating process, and further improving the coating effect of the device.

[0040] In order to adjust the distance of each reciprocating movement according to the height of the coating workpiece, a lower bevel gear 33 is rotatably connected to the top of the top plate 9, and the lower bevel gear 33 is meshed with the upper bevel gear 17, and an adjustment plate 34 is fixedly connected to the side wall of the lower bevel gear 33, and a limit frame 35 is fixedly connected to the top of the adjustment plate 34, and a tooth plate 36 is slidably connected to the inner side of the limit frame 35, and a positioning frame 37 is fixedly connected to the top of the top plate 9 and located above the limit frame 35;

[0041] A rack groove 38 is provided at the top inner side of the positioning frame 37, a lower spring 39 is fixedly connected between the bottom of the tooth plate 36 and the inner bottom end of the limit frame 35, and the tooth plate 36 and the rack groove 38 are both arranged in an arc shape and mesh with each other, a scale groove 40 is provided at the top of the top plate 9 and below the positioning frame 37, through the setting of the scale groove 40, the upward moving distance can be accurately adjusted according to the height of the workpiece, and the convenience performance of the device is improved, and a pressing block 41 is fixedly connected to the side wall of the tooth plate 36, through the setting of the pressing block 41, it is convenient to quickly press the tooth plate 36 to move downward to release the position restriction of the limit frame 35;

[0042] When the moving distance needs to be adjusted each time according to the height of the coated workpiece, the driving motor 6 is first controlled to rotate the positioning frame 37 to the sealing door 3, which is convenient for the staff to adjust. The pressing block 41 is then pushed downward to drive the toothed plate 36 to slide downward, so that the toothed plate 36 slides out of the rack groove 38 to release the position restriction of the limit frame 35. At the same time, the lower spring 39 is compressed, which can push the limit frame 35 to drive the adjustment plate 34 and the lower bevel gear 33 to rotate, thereby driving the meshing upper bevel gear 17 to rotate, thereby changing the position of the groove 22, changing the position of releasing the limit, and then adjusting the height each time, which can be suitable for uniform coating of workpieces of different heights. After the adjustment is completed, the pressing block 41 can be released, and then the elastic force of the lower spring 39 pushes the toothed plate 36 to slide upward and slide into the rack groove 38, thereby fixing the position of the limit frame 35 and the adjustment plate 34.

[0043] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A PVD surface coating device, comprising a coating box (1) and a vacuum pump group (2) connected to the coating box (1), wherein the coating box (1) is hingedly connected to a sealing door (3) at the front end, and a coating mechanism (4) is provided inside the coating box (1), characterized in that: The coating box (1) is fixedly connected to a fixed plate (5) at the bottom end thereof, and a driving motor (6) is fixedly connected to the bottom of the fixed plate (5); the output end of the driving motor (6) passes through the top end of the fixed plate (5) and is fixedly connected to a rotating rod (7); the upper and lower ends of the outer wall of the rotating rod (7) are respectively fixedly connected to a bottom plate (8) and a top plate (9); a gap is left between the bottom plate (8) and the fixed plate (5); a plurality of rotating cylinders (10) are rotatably connected between the bottom plate (8) and the top plate (9); a fixture table (12) for placing workpieces is provided on the outer walls of the plurality of rotating cylinders (10); a rotating mechanism for driving the rotating cylinder (10) to rotate is provided on the bottom plate (8) and the fixed plate (5); and a reciprocating mechanism is provided on the top plate (9); The reciprocating mechanism comprises a driving bevel gear (11), a slider (13) is provided inside the rotating cylinder (10), a connecting structure is provided between the slider (13) and the fixture table (12), a pair of winding plates (14) are fixedly connected to the top of the top plate (9) at a position corresponding to the top of the rotating cylinder (10), a winding roller (15) is rotatably connected between the winding plates (14), a pull rope (16) is fixedly connected to the outer wall of the winding roller (15), the other end of the pull rope (16) passes through the top plate (9) and is fixedly connected to the top of the slider (13), one of the side walls of the winding plates (14) is rotatably connected to an upper bevel gear (17), and the rotating part of the winding roller (15) passes through the side wall of the upper bevel gear (17) and is fixedly connected to an L-shaped plate (18); The side wall of the upper bevel gear (17) is rotatably connected to a driven bevel gear (19); the driving bevel gear (11) is fixedly connected to the top of the coating box (1) and meshes with the driven bevel gear (19); a straight rod (20) is slidably connected through the side wall of the L-shaped plate (18); a push rod (21) for pushing the straight rod (20) to move is fixedly connected to the side wall of the driven bevel gear (19); an inwardly recessed groove (22) is provided on the side wall of the upper bevel gear (17); an upper spring (23) is fixedly connected between the outer wall of the straight rod (20) and the side wall of the L-shaped plate (18); and a slot (24) is provided on the side wall of the straight rod (20) next to the push rod (21).

2. A PVD surface coating device according to claim 1, characterized in that: The grooves (22) are arranged on the rotation track of the straight rod (20), and the inner sides of the grooves (22) located on the rotation track of the straight rod (20) are all arranged obliquely.

3. A PVD surface coating device according to claim 1, characterized in that: Another side wall of the winding plate (14) is fixedly connected to a spiral spring (25), and the rotating portion of the winding roller (15) passes through the side wall of the winding plate (14) and is fixedly connected to the other end of the spiral spring (25).

4. A PVD surface coating device according to claim 1, characterized in that: The connection structure comprises a T-shaped ring (26); a fixed cylinder (27) is fixedly connected to the bottom of the top plate (9) at a position corresponding to the inside of the rotating cylinder (10); the slider (13) is slidably connected to the inside of the fixed cylinder (27); a through groove (28) is penetrated through the outer walls of the fixed cylinder (27) and the rotating cylinder (10); two ends of the slider (13) are extended and arranged between the rotating cylinder (10) and the fixed cylinder (27); two sides of the slider (13) are provided with T-shaped grooves (29) adapted to the T-shaped ring (26); the T-shaped ring (26) is arranged between the rotating cylinder (10) and the fixed cylinder (27) and is slidably connected to the inside of the T-shaped groove (29); and the inner side of the fixture table (12) passes through the through groove (28) and is fixedly connected to the outer wall of the T-shaped ring (26).

5. A PVD surface coating device according to claim 4, characterized in that: A buffer spring (30) is fixedly connected between the bottom of the sliding block (13) and the inner bottom end of the fixing cylinder (27).

6. A PVD surface coating device according to claim 1, characterized in that: The rotating mechanism comprises a fixed gear ring (31), the bottom of the rotating cylinder (10) passes through the bottom of the bottom plate (8) and is fixedly connected to a rotating gear (32), and the fixed gear ring (31) is fixedly connected to the top of the fixed plate (5) and meshes with the rotating gear (32).

7. A PVD surface coating device according to claim 1, characterized in that: The top of the top plate (9) is rotatably connected to a lower bevel gear (33), and the lower bevel gear (33) meshes with the upper bevel gear (17). The side wall of the lower bevel gear (33) is fixedly connected to an adjustment plate (34). The top of the adjustment plate (34) is fixedly connected to a limit frame (35). The inner side of the limit frame (35) is slidably connected to a toothed plate (36). The top of the top plate (9) is fixedly connected to a positioning frame (37) at a position corresponding to the upper side of the limit frame (35). A rack groove (38) is provided at the inner top of the positioning frame (37). A lower spring (39) is fixedly connected between the bottom of the toothed plate (36) and the inner bottom end of the limit frame (35). The toothed plate (36) and the rack groove (38) are both arranged in an arc shape and mesh with each other.

8. A PVD surface coating device according to claim 7, characterized in that: A scale groove (40) is provided at the top of the top plate (9) at a position corresponding to the bottom of the positioning frame (37), and a pressing block (41) is fixedly connected to the side wall of the tooth plate (36).

Images