Planetary carrier product fixture

Abstract

The present invention provides a product fixture for a planetary frame. The product fixture for the planetary frame includes: a disc, a clamp, an elastic connector, a connecting column, a track, a movable substrate, an elastic force adjustment mechanism and a positioning mechanism. After the above-mentioned product fixture for the planetary frame is loaded onto the planetary frame, based on the position of the product fixture of the planetary frame on the planetary frame, the user can conveniently fix the movable substrate at different positions of the track, and then position the elastic force adjustment mechanism at different positions of the planetary frame, so that the user can adjust the elongation of the elastic connector by adjusting the elastic force adjustment mechanism according to the thickness and material of the wafer, thereby adjusting the elastic force of the elastic connector, and then adjusting the clamping force of the clamp on the wafer. The above-mentioned product fixture for the planetary frame can not only prevent thicker wafers from falling off the planetary frame and breaking due to insufficient clamping force; it can also prevent thinner wafers from breaking due to excessive clamping force.

Description

Technical Field

[0001] The invention relates to the field of semiconductor technology, in particular to a product fixture of a planetary frame. Background Art

[0002] Vacuum evaporation has become the earliest developed and most widely used physical vapor deposition technology due to its characteristics of simple film formation, high film purity and good film density. Vacuum evaporation has been widely used in optoelectronics, semiconductors, micro-machining and other fields. Vacuum evaporation usually adopts direct or indirect heating methods such as electric heating wires and electron beams to heat and vaporize the solid evaporating material contained in the container. The vaporized evaporating material diffuses to the surface of the product and adsorbs to the surface of the product to form a film. The product can be a wafer, optical glass, etc. In the vacuum evaporation process, in order to obtain a more uniform thin film, it is necessary to use a product fixture to fix the product on a rotating star frame.

[0003] However, when using a vertical planetary rack to coat the surface of a wafer (i.e., a product), it was found that: for thicker wafers, they are prone to fall off the planetary rack and break during the process of forming the thin film; for thinner wafers, not only are they prone to breakage when loading and unloading the wafers, but they may even fall off the planetary rack due to breakage during the process of forming the thin film. Summary of the invention

[0004] The object of the present invention is to provide a product fixture of a planetary carrier, which can quantitatively adjust the pressing force on the wafer according to the material and thickness of the wafer, thereby avoiding the wafer from falling off and being broken into pieces.

[0005] The invention provides a product clamp of a planetary frame, which comprises a clamp, a track, a movable base plate, an elastic force adjustment mechanism and a positioning mechanism.

[0006] A planet carrier product fixture, comprising:

[0007] A disc, used for carrying a wafer, the disc having a first surface and a second surface facing away from each other, and the wafer is placed on the first surface;

[0008] a clamper, disposed on the second surface of the disc, for clamping a wafer;

[0009] an elastic connector, disposed on the second surface of the disc, the elastic connector being connected to the clamp;

[0010] A connecting post, disposed on the second surface of the disk, with the center of the connecting post located at the center of the disk, and the connecting post is connected to the elastic connector;

[0011] A track is disposed on the second surface of the disk, and the track is located between the center of the disk and the circumference of the disk;

[0012] A movable substrate, movably disposed on the track;

[0013] an elastic force adjustment mechanism, disposed on the movable substrate, the elastic force adjustment mechanism being connected to the elastic connector via the connecting column, the elastic force adjustment mechanism being used to control the pressing force of the clamper on the wafer; and

[0014] A positioning mechanism is arranged on the track and is used to fix the movable substrate at a set position of the track.

[0015] In one embodiment, the movable substrate comprises:

[0016] A fan ring is movably arranged on the track;

[0017] A limit block, arranged on the fan ring;

[0018] A handle, disposed on the limit block, and extending beyond the circumference of the disc;

[0019] A positioning hole is provided on the fan ring, and the positioning hole is a groove provided on the inner surface of the fan ring; and

[0020] A mounting hole is provided on the fan ring, and the mounting hole is a through hole, and the mounting hole is used to fix the limit block on the fan ring.

[0021] In one embodiment, the limit block includes a first limit block and a second limit block which are spaced apart from each other;

[0022] The outer edge of the first limit block is arranged close to the outer edge of the fan ring;

[0023] The inner edge of the second limit block is arranged close to the inner edge of the fan ring;

[0024] The first limiting block comprises: a first fixing seat and a first limiting member, the handle is arranged on the outer side of the first fixing seat, and the first limiting member is arranged on the inner side of the first fixing seat;

[0025] The second limiting block includes: a second fixing seat and a second limiting member, and the second limiting member is arranged outside the second fixing seat

[0026] The first limiting member and the second limiting member are arranged at the same height;

[0027] The track is located in a limiting space formed by the first limiting block and the second limiting block.

[0028] In one embodiment, the track comprises:

[0029] a bottom surface portion disposed on the second surface of the disk and in contact with the second surface of the disk;

[0030] A mounting portion, on one hand, fixedly connected to the bottom surface portion, and on the other hand, fixedly arranged on the second surface of the disk;

[0031] a top surface portion disposed above the bottom surface portion;

[0032] a fixing portion, located on the top surface portion, the fixing portion being used to achieve a fixed connection between the bottom surface portion and the top surface portion; and,

[0033] A cut-off portion is located on the top surface portion, and the cut-off portion is used to cut off the movement of the movable substrate.

[0034] In one embodiment, the positioning mechanism is disposed inside the bottom surface portion and the top surface portion at intervals;

[0035] The positioning mechanism comprises: a spring and a positioning column elastically connected to the spring;

[0036] When the movable substrate is fixed at a set position of the rail, the positioning post is confined in the positioning hole.

[0037] In one embodiment, the arc length of the track is greater than the arc length of the sector ring;

[0038] The arc of the track is greater than or equal to , and the arc of the track is less than or equal to .

[0039] In one embodiment, the elastic force adjustment mechanism comprises:

[0040] A first column, wherein the first column is a right cylindrical column, and its diameter is a first diameter, and an outer wall of the first column is provided with a thread;

[0041] A second column, fixedly connected to the first column, the second column is a regular prism-shaped column, and its diameter is a second diameter, the second diameter is larger than the first diameter, and a scale is provided on the outer side wall of the second column;

[0042] a support body, fixedly connected to the second column, the support body being a disc structure, the diameter of the support body being a third diameter, and the third diameter being greater than the second diameter; and

[0043] A fixing member, into which the first column is screwed, and the fixing member is used to fix the first column, the second column and the support body that are fixedly connected to each other on the back side of the movable substrate.

[0044] In one embodiment, the fixing member is a fixing nut and is fixedly disposed on a surface of the sector ring away from the disk, and the support body is rotated to enable the first column to move forward and backward along the threaded hole of the fixing member.

[0045] In one embodiment, the holder comprises:

[0046] A chuck base, fixedly disposed on the disc;

[0047] A clamping block is fixedly disposed on the chuck base, wherein the clamping block is higher than the first surface of the disc; and

[0048] A spring piece, arranged on the card block;

[0049] The card block includes: a card body, two card arms respectively arranged on the sides of the card body, and two card hands respectively arranged on the sides of the two card arms, the two card hands are parallel to the card body, and the two card hands are in an inwardly surrounding shape, and the card body, the two card arms, and the two card hands surround a card slot with an opening;

[0050] The spring sheet comprises: an arc-shaped surface, and two folding arms arranged at two ends of the arc-shaped surface; the arc-shaped surface is arranged at the opening of the slot, and the two folding arms are respectively arranged at two bends of the slot.

[0051] In one embodiment, the product fixture of the planet carrier further comprises: a first baffle, a second baffle, and a third baffle, which are respectively arranged at intervals on the circumference of the disc;

[0052] The first baffle, the second baffle, the third baffle and the clamp are all used to fix the wafer.

[0053] In one embodiment, the outer edge of the first surface of the disk has a boss for placing a wafer, the inner diameter of the boss is smaller than the diameter of the wafer, the outer diameter of the boss is equal to the outer diameter of the disk, the outer diameter of the boss is larger than the diameter of the wafer, and the thickness of the boss is larger than the thickness of the disk body.

[0054] The present invention has at least the following advantages or beneficial effects:

[0055] 1. The planetary frame applicable to the product fixture of the planetary frame provided in the present application may be a formal planetary frame. The product fixture of the planetary frame includes: a disc, a clamp, an elastic connector, a connecting column, a track, a movable substrate, an elastic force adjustment mechanism and a positioning mechanism. After the above-mentioned product fixture of the planetary frame is loaded onto the planetary frame, based on the position of the product fixture of the planetary frame on the planetary frame, the user can conveniently fix the movable substrate at different positions of the track, and then position the elastic force adjustment mechanism at different positions of the planetary frame, so that after the user loads the product fixture of the planetary frame onto the planetary frame, the user can adjust the elongation of the elastic connector by adjusting the elastic force adjustment mechanism according to the thickness and material of the wafer, so as to adjust the elastic force of the elastic connector, and then adjust the clamping force of the clamp on the wafer (product). Therefore, the product fixture of the planetary frame provided in the present application can not only prevent the thicker wafer from falling off the planetary frame and breaking due to insufficient pressing force; it can also prevent the thinner wafer from breaking due to excessive pressing force.

[0056] 2. The movable base plate has a simple structure and can be movably arranged on the track and can run along the track, so as to facilitate the adjustment of the position of the elastic force adjustment mechanism. When multiple planetary frame product fixtures are arranged on the planetary frame, mutual collision between the multiple planetary frame product fixtures can be avoided, thus saving space.

[0057] 3. The movable base plate has a simple structure and can be movably arranged on the track and can run along the track, so as to facilitate the adjustment of the position of the elastic force adjustment mechanism. When multiple planetary frame product fixtures are arranged on the planetary frame, mutual collision between the multiple planetary frame product fixtures can be avoided, thus saving space.

[0058] The specific structural diagram of the limit block is further refined. The structural design of the limit block is convenient for combination with the track, and a relatively simplified structure is used to achieve a movable function, saving space.

[0059] 4. In this embodiment, the specific structural diagram of the track is further refined. The structural design of the track is convenient for fixing the track to the disc, and is also more conducive to the combination of the track and the movable substrate to achieve flexible movement of the movable substrate in the track.

[0060] 5. The spring is elastically connected to the positioning column. When the movable substrate needs to be moved on the track, the user can push the handle in a preset direction so that the fan ring of the movable substrate presses the positioning column downward, and the spring is in a relatively contracted state; when the movable substrate needs to be fixed on the track, the spring is in a relatively relaxed state, and the positioning column is located in the positioning hole of the movable substrate to achieve movement and positioning of the movable substrate.

[0061] 6. The clamp is provided with an arc-shaped spring sheet, and the hardness of the spring sheet gradually decreases from the top to the bottom of the arc-shaped surface. This is conducive to the elastic deformation of the arc-shaped surface according to the shape of the wafer during the elastic force adjustment of the linear spring, so as to achieve surface contact between the arc-shaped surface and the edge of the wafer, reduce the pressure of the clamp on the edge of the wafer, and thus help prevent the breakage of thinner wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0063] Figure 1 A schematic diagram of the back structure of a product fixture of a planetary carrier provided in an embodiment of the present invention;

[0064] Figure 2 for Figure 1 A schematic cross-sectional view of a product fixture of a planet carrier along AA' provided in the embodiment shown in FIG.

[0065] Figure 3 for Figure 1 The embodiment shown in FIG. 1 is a front view of a movable substrate after being mounted to a product fixture of a planet carrier;

[0066] Figure 4 for Figure 1 A schematic diagram of the back side of the movable substrate provided in the embodiment shown in FIG.

[0067] Figure 5 for Figure 1 A front view of a track in a product fixture of a planet carrier provided by the embodiment shown in FIG.

[0068] Figure 6 for Figure 1 A schematic back view of a track in a product fixture of a planet carrier provided in the embodiment shown in FIG.

[0069] Figure 7 for Figure 1 A schematic diagram of an elastic force adjustment mechanism in a product fixture of a planetary carrier provided by the embodiment shown in FIG.

[0070] Figure 8 A schematic diagram of the structure of a clamp in a product clamp of a planetary carrier provided in an embodiment of the present invention;

[0071] Fig. 9 A schematic diagram of the front structure of a product fixture of a planetary carrier provided in an embodiment of the present invention;

[0072] Fig.10 This is a front schematic diagram of a product fixture of a planetary carrier provided by an embodiment of the present invention after carrying a wafer.

[0073] icon:

[0074] Planet carrier product fixture 100:

[0075] Clamp 10: chuck base 10a, clamping block 10b, spring piece 10c;

[0076] The clamp body 11, the clamp arm 12, the clamp hand 13, the arc surface 14, and the folding arm 15;

[0077] A first baffle 10-1, a second baffle 10-2, and a third baffle 10-3;

[0078] Disc 20, boss 21;

[0079] Elastic connector 30, connecting column 40;

[0080] Rail 50: top surface portion 51, bottom surface portion 52, mounting portion 53, fixing portion 54, cut-off portion 55;

[0081] A movable base plate 60, a fan ring 61, a handle 62, a limit block 63, a positioning hole 64, and a mounting hole 65;

[0082] First limiting block 63 - 1 : first fixing seat 63 - 11 and first limiting member 63 - 12;

[0083] The second limiting block 63 - 2 : the second fixing seat 63 - 21 and the second limiting member 63 - 22 ;

[0084] Elastic force adjustment mechanism 70: first column 71, fixing member 72, second column 73, supporting body 74;

[0085] Positioning mechanism 80: spring 81, positioning column 82;

[0086] Wafer 200. DETAILED DESCRIPTION

[0087] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0088] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0089] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0090] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0091] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0092] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0093] See also Figure 1 , Fig. 9 and Fig.10The present application provides a planetary frame product fixture 100, which is applied to the planetary frame, and the product fixture is used to fix the product to the planetary frame. The product includes a semiconductor structure such as a wafer 200. The planetary frame to which the planetary frame product fixture 100 involved in the present application is applicable may be a formal planetary frame. The planetary frame product fixture 100 includes: a disc 20, a clamp 10, an elastic connector 30, a connecting column 40, a track 50, a movable substrate 60, an elastic force adjustment mechanism 70 and a positioning mechanism 80.

[0094] The disk 20 is used to carry the wafer 200. The disk 20 has a first surface and a second surface facing away from each other, and the wafer 200 is placed on the first surface. The first surface is the front surface, and the second surface is the back surface. The front surface of the disk 20 is relatively far away from the inner surface of the upright planet carrier, and the back surface of the disk 20 contacts the inner surface of the upright planet carrier.

[0095] The clamp 10 is disposed on the second surface of the disk 20 to clamp the wafer 200 and ensure that the wafer 200 does not fall when the planet carrier moves. One or more clamps 10 may be provided.

[0096] The elastic connector 30 is disposed on the second surface of the disk 20, and the elastic connector 30 is connected to the clamp 10. The elastic connector 30 can be configured as a linear spring, and connecting wires are disposed at both ends of the linear spring.

[0097] The connecting column 40 is arranged on the second surface of the disk 20, and the center of the connecting column 40 is located at the center of the disk 20, and the connecting column 40 is connected to the elastic connector 30. The connecting column 40 can be connected to the linear spring through a connecting line. The connecting column 40 is located at the center of the disk 20, and one end of the connecting column 40 is fixedly connected to the disk 20; at the same time, a through hole parallel to the surface of the disk 20 is arranged on the column body of the connecting column 40, and the extension line of the through hole is perpendicular to the bottom of the track 50. A through hole can be arranged on the column body of the connecting column 40, and the connecting line can pass through the through hole.

[0098] The track 50 is disposed on the second surface of the disk 20, and the track 50 is located between the center of the disk 20 and the circumference of the disk 20. The track 50 is used to provide a movable space.

[0099] The movable substrate 60 is movably disposed on the track 50. For example, the movable substrate 60 can be sleeved on the outer side of the track 50. The movable substrate 60 moves relative to the track 50 according to actual needs.

[0100] The elastic force adjustment mechanism 70 is disposed on the movable substrate 60 and is connected to the elastic connector 30 via the connecting column 40. The elastic force adjustment mechanism 70 is used to control the pressing force of the clamp 10 on the wafer 200. The connecting wire passing through the small hole of the connecting column 40 can be further extended to the elastic force adjustment mechanism 70.

[0101] The positioning mechanism 80 is disposed on the track 50 and is used to fix the movable substrate 60 at a set position of the track 50. The positioning mechanism 80 can limit the movable substrate 60 to stop moving at a certain position. The positioning mechanism 80 can include a plurality of positioning columns arranged at intervals, and the specific spacing can be determined according to actual needs.

[0102] In this embodiment, after the product fixture 100 of the planetary frame is loaded onto the planetary frame, based on the position of the product fixture 100 of the planetary frame on the planetary frame, the user can conveniently fix the movable substrate 60 at different positions of the track 50, and then position the elastic force adjustment mechanism 70 at different positions of the planetary frame, so that after the user loads the product fixture 100 of the planetary frame onto the planetary frame, the user can adjust the elongation of the elastic connector 30 by adjusting the elastic force adjustment mechanism 70 according to the thickness and material of the wafer 200, so as to adjust the elastic force of the elastic connector 30, and then adjust the pressing force of the clamp 10 on the wafer 200 (product). Therefore, the product fixture 100 of the planetary frame provided by the present application can not only prevent the thicker wafer 200 from falling off the planetary frame and breaking due to insufficient pressing force, but also prevent the thinner wafer 200 from breaking due to excessive pressing force.

[0103] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 In one embodiment, the movable substrate 60 includes: a fan ring 61, a handle 62, a limit block 63, a positioning hole 64 and a mounting hole 65. The fan ring 61 is movably arranged on the track 50. The limit block 63 is arranged on the fan ring 61. The handle 62 is arranged on the limit block 63 and the handle 62 extends beyond the circumference of the disc 20. The handle 62 protrudes outward from the outer circumference of the fan ring 61, and the five positioning holes 64 arranged on the fan surface are distributed on an arc, the radius of which is equal to the radius of the arc where the positioning column 82 on the track 50 is located, and the center of the circle is the same as the center of the arc where the positioning column 82 is located. The thickness of the handle 62 is equal to the thickness of the fan ring 61. The positioning hole 64 is arranged on the fan ring 61 and the positioning hole 64 is a groove arranged on the inner surface of the fan ring 61. The positioning holes 64 are spaced apart along the arc expansion direction of the fan ring 61. The mounting hole 65 is provided on the fan ring 61 and is a through hole. The mounting hole 65 is used to fix the limit block 63 on the fan ring 61. The mounting holes 65 are distributed along the radial direction of the fan ring 61 and on both sides of the positioning hole 64.

[0104] In this embodiment, the movable substrate 60 has a simple structure and is movably arranged on the track 50, and can run along the track 50, so as to facilitate the adjustment of the position of the elastic force adjustment mechanism 70. When a plurality of planetary frame product fixtures 100 are arranged on the planetary frame, mutual collision between the plurality of planetary frame product fixtures 100 can be avoided, thus saving space.

[0105] See also Figure 4 In one embodiment, the stopper 63 includes a first stopper 63-1 and a second stopper 63-2 which are spaced apart. The outer edge of the first stopper 63-1 is disposed close to the outer edge of the fan ring 61. The inner edge of the second stopper 63-2 is disposed close to the inner edge of the fan ring 61.

[0106] The first limiting block 63-1 includes: a first fixing seat 63-11 and a first limiting member 63-12, the handle 62 is arranged outside the first fixing seat 63-11, and the first limiting member 63-12 is arranged inside the first fixing seat 63-11. The second limiting block 63-2 includes: a second fixing seat 63-21 and a second limiting member 63-22, and the second limiting member 63-22 is arranged outside the second fixing seat 63-21. The first limiting member 63-12 and the second limiting member 63-22 are arranged at the same height.

[0107] The track 50 is located in a limiting space formed by the first limiting block 63 - 1 and the second limiting block 63 - 2 . In other words, the movable substrate 60 can slide freely on the track 50 .

[0108] Specifically, Figure 4 As shown, the bottom surface of the first stopper 63-12 is higher than the bottom surface of the first fixing seat 63-11. In other words, the bottom surface of the first stopper 63-12 is higher than the top surface of the fan ring 61. The bottom surface of the second stopper 63-22 is higher than the bottom surface of the second fixing seat 63-21. In other words, the bottom surface of the second stopper 63-22 is higher than the top surface of the fan ring 61. The top surface and bottom surface here only represent Figure 4 Referring to the top surface and the bottom surface in the back schematic diagram of the movable substrate, when the movable substrate 60 is installed on the track 50, the meanings of the above-mentioned "top surface", "bottom surface" and "height relationship" may be different.

[0109] In this embodiment, the specific structure of the limit block 63 is further refined. The structural design of the limit block 63 is convenient for combination with the track 50, and a relatively simplified structure is used to achieve a movable function, thereby saving space.

[0110] See also Figure 5 and Figure 6 In one embodiment, the track 50 includes: a top surface portion 51 , a bottom surface portion 52 , a mounting portion 53 , a fixing portion 54 , and a cutoff portion 55 .

[0111] The bottom surface portion 52 is disposed on the second surface of the disk 20 and contacts the second surface of the disk 20. The bottom surface portion 52 is located in a limiting space formed by the first fixing seat 63-11 and the second fixing seat 63-21.

[0112] The mounting portion 53 is fixedly connected to the bottom surface portion 52 on one hand, and is fixedly disposed on the second surface of the disk 20 on the other hand. The mounting portion 53 may be as follows: Figure 5 The extension portion shown has a through hole. A plurality of mounting portions 53 , for example, four mounting portions 53 , may be provided to achieve a stable connection between the track 50 and the disk 20 .

[0113] The top surface portion 51 is located above the bottom surface portion 52. The top surface portion 51 is located in the limiting space formed by the first limiting member 63-12 and the second limiting member 63-22. Figure 5 and Figure 6 As shown, in one embodiment, the width of the bottom surface portion 52 may be smaller than the width of the top surface portion 51 .

[0114] The fixing portion 54 is located on the top surface portion 51, and is used to achieve a fixed connection between the bottom surface portion 52 and the top surface portion 51. In one embodiment, the fixing portion 54 includes a threaded hole provided on the top surface portion 51, and a fixing screw corresponding to the size of the threaded hole. The fixing screw passes through the threaded hole to fix the bottom surface portion 52 and the top surface portion 51.

[0115] The cut-off portion 55 is located on the top surface portion 51, and the cut-off portion 55 is used to cut off the movement of the movable substrate 60. In one embodiment, the cut-off portion 55 includes a through hole and a cut-off block, and the cut-off block is inserted into the through hole. The depth of the cut-off block is relatively deep, and is used to prevent the movable substrate 60 from continuing to move rightward or leftward.

[0116] In this embodiment, the specific structural diagram of the track 50 is further refined. The structural design of the track 50 is convenient for fixing the track 50 to the disc 20 and is also more conducive to the combination of the track 50 and the movable substrate 60 to achieve flexible movement of the movable substrate 60 in the track 50.

[0117] See also Figure 2 and Figure 5 In one embodiment, the positioning mechanism 80 is arranged at intervals inside the bottom surface portion 52 and the top surface portion 51. The positioning mechanism 80 includes: a spring 81 and a positioning column 82 elastically connected to the spring 81. The positioning column 82 is set as a positioning column with a spherical head. When the movable substrate 60 is fixed at the set position of the track 50, the positioning column 82 is confined in the positioning hole 64. The projection of the arrangement trajectory of the positioning column 82 inside the track 50 on the disk 20 is an arc with the same center as the projection of the track 50 on the disk 20.

[0118] In this embodiment, the spring 81 is elastically connected to the positioning column 82. When the movable substrate 60 needs to be moved on the track 50, the user can push the handle 62 in a preset direction so that the fan ring 61 of the movable substrate 60 presses the positioning column 82 downward, and the spring 81 is in a relatively contracted state; when the movable substrate 60 needs to be fixed on the track 50, the spring 81 is in a relatively relaxed state, and the positioning column 82 is located in the positioning hole 64 of the movable substrate 60 to realize the movement and positioning of the movable substrate 60.

[0119] See also Figure 1 In one embodiment, the arc length of the track 50 is greater than the arc length of the sector ring 61. The arc length of the track 50 is greater than or equal to , and the arc of track 50 is less than or equal to .

[0120] In this embodiment, the arc length and arc angle of the track 50 are specifically designed. In the arrangement of this embodiment, it is more convenient to realize the product fixture 100 of the planetary carrier.

[0121] See also Figure 7 In one embodiment, the elastic force adjustment mechanism 70 includes: a first column 71, a fixing member 72, a second column 73, and a support body 74. Preferably, the first column 71, the second column 73, and the support body 74 are formed in one step.

[0122] The first cylinder 71 is a right cylindrical cylinder, and its diameter is a first diameter, and there is a thread on the outer wall of the first cylinder 71. The second cylinder 73 is fixedly connected to the first cylinder 71, and the second cylinder 73 is a right prism cylinder, and its diameter is a second diameter, which is larger than the first diameter, and there is a scale on the outer wall of the second cylinder 73.

[0123] The support body 74 is fixedly connected to the second column 73 . The support body 74 is a disc structure. The diameter of the support body 74 is a third diameter, which is greater than the second diameter.

[0124] The first column 71 is screwed into the fixing member 72, and the fixing member 72 is used to fix the first column 71, the second column 73 and the support body 74 that are fixedly connected to each other to the back of the movable substrate 60. Specifically, the fixing member 72 can be welded to the movable substrate 60.

[0125] In this embodiment, the first column 71, the second column 73 and the support body 74 are integrally formed at one time, and the fixing member 72 can be fixed to the back of the movable substrate 60 by welding. The outer wall of the first column 71 has a thread, and the first column 71 can be screwed into the fixing member 72 to achieve the adjustment of the tension of the elastic connector 30 by the elastic force adjustment mechanism 70.

[0126] In one embodiment, the fixing member 72 is a fixing nut, which is disposed on the surface of the sector ring 61 away from the disk 20 , and the support body 74 is rotated to enable the first column 71 to move forward and backward along the threaded hole of the fixing member 72 .

[0127] In this embodiment, the structural arrangement of the fixing member 72 is specifically disclosed to facilitate adjustment of the tension of the elastic connector 30 by the elastic force adjustment mechanism 70 .

[0128] See also Figure 8 In one embodiment, the clamp 10 includes: a clamp base 10a, a clamp block 10b, and a spring 10c. The clamp base 10a is fixedly disposed on the disk 20. The clamp block 10b is fixedly disposed on the clamp base 10a, and the clamp block 10b is higher than the first surface of the disk 20. The spring 10c is disposed on the clamp block 10b.

[0129] Among them, the card block 10b includes: a card body 11, two card arms 12 respectively arranged on the sides of the card body 11, and two card hands 13 respectively arranged on the sides of the two card arms 12. The two card hands 13 are parallel to the card body 11, and the two card hands 13 are in an inward surrounding shape. The card body 11, the two card arms 12, and the two card hands 13 form a card slot with an opening.

[0130] The spring piece 10c includes an arc surface 14 and two folding arms 15 disposed at two ends of the arc surface 14. The arc surface 14 is disposed at the opening of the slot, and the two folding arms 15 are respectively disposed at two bends of the slot.

[0131] In this embodiment, the card body 11, the card arm 12 and the card hand 13 of the card block 10b surround a card slot with an opening. The folding arm 15 of the spring 10c is placed in the card slot, and the arc surface 14 protrudes from the opening. A cover plate (not shown) is also provided on the spring 10c and the card block 10b, and is fixedly connected through the positioning hole on the card body 11. The length of the cover plate is equal to the length of the card block 10b, but its width is wider than the width of the card block 10b, and the projection of the cover plate on the chuck base 10a at least covers the projection of the card block 10b and the spring 10c on the chuck base 10a. At the same time, in order to facilitate the surface contact between the spring 10c and the wafer 200, the hardness of the spring 10c gradually decreases from the top to the bottom of the arc surface 14.

[0132] Furthermore, the arc surface 14 and the elastic connector 30 are connected via a connecting line. The connecting line of the elastic connector 30 passes through the small hole in 40 and continues to be connected to the first column 71 .

[0133] In this embodiment, the clamp 10 is provided with an arc-shaped spring piece 10c, and the hardness of the spring piece 10c gradually decreases from the top to the bottom of the arc-shaped surface 14. This is conducive to the arc-shaped surface 14 being elastically deformed according to the shape of the wafer 200 during the elastic force adjustment of the linear spring, so as to achieve surface contact between the arc-shaped surface and the edge of the wafer 200, reduce the pressure of the clamp 10 on the edge of the wafer 200, and thus help prevent the thinner wafer 200 from breaking.

[0134] See also Fig. 9 and Fig.10 In one embodiment, the planetary frame product fixture 100 further includes: a first baffle 10-1, a second baffle 10-2, and a third baffle 10-3, which are respectively arranged at intervals on the circumference of the disk 20. The first baffle 10-1, the second baffle 10-2, the third baffle 10-3 and the clamp 10 are all used to fix the wafer 200.

[0135] In other embodiments, the clamp 10 , the first baffle 10 - 1 , the second baffle 10 - 2 , and the third baffle 10 - 3 are respectively disposed at positions of 0°, 90°, 180°, and 270° of the disk 20 in a clockwise direction.

[0136] In other embodiments, the first baffle 10 - 1 , the second baffle 10 - 2 , and the third baffle 10 - 3 may also be configured as a clamp 10 , so as to achieve elastic pressure in four directions.

[0137] See also Fig.10 In one embodiment, the outer edge of the first surface of the disk 20 has a boss 21 for placing the wafer 200. The inner diameter of the boss 21 is smaller than the diameter of the wafer 200, the outer diameter of the boss 21 is equal to the outer diameter of the disk 20, the outer diameter of the boss 21 is larger than the diameter of the wafer 200, and the thickness of the boss 21 is larger than the thickness of the disk 20 body. The boss 21 is used to provide a support platform for the wafer 200, so the boss 21 can be a platform or have a groove. After the wafer 200 is placed on the disk 20, only the surrounding circle is in contact with the disk 20, which can prevent the surface of the wafer 200 from being scratched.

[0138] When assembling the product fixture 100 of the planet carrier, first, the positioning column 82 and the spring 81 are installed in the mounting hole of the bottom surface portion 52 of the track 50, and the top surface portion 51 of the track 50 is screwed to the bottom surface portion 52 of the track 50 through the fixing portion 54. The stopper 63 is installed on the movable substrate 60 through the mounting hole 65, and then the movable substrate 60 is installed on the track 50, and then the positioning pin is installed in the cut-off portion 55 of the track 50 to prevent the movable substrate 60 from sliding off the track 50. The above-mentioned assembly is installed on the disk 20 through the mounting portion 53 on the track 50 by screws, and at the same time, the first end of the first column 71 of the elastic force adjustment mechanism 70 is screwed in from the end of the fixing member 72 close to the edge of the disk 20, and screwed out from the other end of the fixing member 72 away from the edge of the disk 20. Next, one end of the elastic connector 30 is fixedly connected to the bottom plate of the clamp 10 , and the other end passes through the small hole of the connecting column 40 and is fixedly connected to the first end of the first column 71 of the elastic force adjustment mechanism 70 .

[0139] The end of the connecting column 40 that is not connected to the disk 20 is passed through the small hole on the planetary frame, and the connecting column 40 is fixed to the planetary frame using a nut. There are many ways to connect the connecting column 40 and the planetary frame, which will not be described in detail here.

[0140] The planet carrier product fixture 100 provided in the present application is currently applicable to product fixtures of upright planet carriers, and may also be applicable to product fixtures of inverted planet carriers, and only corresponding improvements need to be made.

[0141] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A planet carrier product fixture, characterized in that: include: A circular disk (20) for carrying a wafer (200), the circular disk (20) having a first surface and a second surface facing away from each other, the wafer (200) being placed on the first surface; A clamp (10), arranged on the second surface of the disc (20), and used for clamping the wafer (200); An elastic connector (30) is arranged on the second surface of the disc (20), and the elastic connector (30) is connected to the clamp (10); A connecting column (40) is arranged on the second surface of the disk (20), and the center of the connecting column (40) is located at the center of the disk (20), and the connecting column (40) is connected to the elastic connector (30); A track (50) is arranged on the second surface of the disk (20), and the track (50) is located between the center of the disk (20) and the circumference of the disk (20); A movable substrate (60) movably disposed on the track (50); an elastic force adjustment mechanism (70) disposed on the movable substrate (60), the elastic force adjustment mechanism (70) being connected to the elastic connector (30) via the connecting column (40), the elastic force adjustment mechanism (70) being used to control the pressing force of the clamp (10) on the wafer (200); as well as, A positioning mechanism (80) is arranged on the track (50) and is used to fix the movable substrate (60) at a set position on the track (50).

2. The product fixture of the planetary carrier according to claim 1, characterized in that: The movable substrate (60) comprises: A fan ring (61) is movably arranged on the track (50); A limit block (63) is arranged on the fan ring (61); a handle (62) disposed on the limiting block (63), and the handle (62) extends outside the circumference of the disc (20); a positioning hole (64) disposed on the sector ring (61), wherein the positioning hole (64) is a groove disposed on the inner surface of the sector ring (61); and A mounting hole (65) is provided on the fan ring (61), and the mounting hole (65) is a through hole. The mounting hole (65) is used to fix the limit block (63) on the fan ring (61).

3. The product fixture of the planetary carrier according to claim 2, characterized in that: The limit block (63) comprises a first limit block (63-1) and a second limit block (63-2) which are arranged at an interval; The outer edge of the first limiting block (63-1) is arranged close to the outer edge of the sector ring (61); The inner edge of the second limiting block (63-2) is arranged close to the inner edge of the fan ring (61); The first limiting block (63-1) comprises: a first fixing seat (63-11) and a first limiting member (63-12); the handle (62) is arranged on the outer side of the first fixing seat (63-11), and the first limiting member (63-12) is arranged on the inner side of the first fixing seat (63-11); The second limiting block (63-2) comprises: a second fixing seat (63-21) and a second limiting member (63-22), wherein the second limiting member (63-22) is arranged outside the second fixing seat (63-21); The first limiting member (63-12) and the second limiting member (63-22) are arranged at the same height; The track (50) is located in a limiting space formed by the first limiting block (63-1) and the second limiting block (63-2).

4. The planet carrier product fixture according to claim 3, characterized in that: The track (50) comprises: a bottom surface portion (52) disposed on the second surface of the disk (20) and in contact with the second surface of the disk (20); A mounting portion (53), which is fixedly connected to the bottom surface portion (52) on the one hand, and is fixedly arranged on the second surface of the disc (20) on the other hand; A top surface portion (51) located above the bottom surface portion (52); a fixing portion (54), located on the top surface portion (51), the fixing portion (54) being used to achieve a fixed connection between the bottom surface portion (52) and the top surface portion (51); and, A cut-off portion (55) is located on the top surface portion (51), and the cut-off portion (55) is used to cut off the movement of the movable substrate (60).

5. The planet carrier product fixture according to claim 4, characterized in that: The positioning mechanism (80) is arranged at intervals inside the bottom surface portion (52) and the top surface portion (51); The positioning mechanism (80) comprises: a spring (81) and a positioning column (82) elastically connected to the spring (81); When the movable substrate (60) is fixed at a set position of the track (50), the positioning column (82) is confined in the positioning hole (64).

6. The planet carrier product fixture according to claim 5, characterized in that: The arc length of the track (50) is greater than the arc length of the sector ring (61); The arc of the track (50) is greater than or equal to , and the arc of the track (50) is less than or equal to .

7. The product fixture of the planetary carrier according to claim 6, characterized in that: The elastic force adjustment mechanism (70) comprises: A first column (71), the first column (71) being a right cylindrical column with a diameter of a first diameter, and having a thread on an outer wall of the first column (71); A second column (73) is fixedly connected to the first column (71); the second column (73) is a regular prism-shaped column, and its diameter is a second diameter, the second diameter is greater than the first diameter, and a scale is provided on the outer side wall of the second column (73); a support body (74) fixedly connected to the second column (73), the support body (74) being a disc structure, the diameter of the support body (74) being a third diameter, the third diameter being greater than the second diameter; and, A fixing member (72), wherein the first column (71) is screwed into the fixing member (72), and the fixing member (72) is used to fix the first column (71), the second column (73) and the support body (74) which are fixedly connected to each other on the back side of the movable substrate (60).

8. The planet carrier product fixture according to claim 7, characterized in that: The fixing member (72) is a fixing nut and is fixedly arranged on a surface of the fan ring (61) away from the disk (20). The support body (74) is rotated to enable the first column (71) to move forward and backward along the threaded hole of the fixing member (72).

9. The planet carrier product fixture according to claim 8, characterized in that: The holder (10) comprises: A chuck base (10a) fixedly disposed on the disc (20); a clamping block (10b) fixedly disposed on the clamping head base (10a), wherein the clamping block (10b) is higher than the first surface of the disc (20); and A spring piece (10c) is arranged on the clamping block (10b); The card block (10b) comprises: a card body (11), two card arms (12) respectively arranged on the side of the card body (11), and two card hands (13) respectively arranged on the side of the two card arms (12), the two card hands (13) are parallel to the card body (11), and the two card hands (13) are in an inwardly surrounding shape, and the card body (11), the two card arms (12), and the two card hands (13) form a card slot with an opening; The spring sheet (10c) comprises: an arcuate surface (14), and folding arms (15) respectively arranged at two ends of the arcuate surface (14); the arcuate surface (14) is arranged at the opening of the slot, and the two folding arms (15) are respectively arranged at two bends of the slot.

10. The planet carrier product fixture according to claim 9, characterized in that: The planetary frame product fixture (100) further comprises: a first baffle (10-1), a second baffle (10-2), and a third baffle (10-3), which are respectively arranged at intervals on the circumference of the disc (20); The first baffle (10-1), the second baffle (10-2), the third baffle (10-3) and the clamp (10) are all used to fix the wafer (200).

11. The planet carrier product fixture according to claim 10, characterized in that: The outer edge of the first surface of the disk (20) has a boss (21) for placing a wafer (200), the inner diameter of the boss (21) is smaller than the diameter of the wafer (200), the outer diameter of the boss (21) is equal to the outer diameter of the disk (20), the outer diameter of the boss (21) is larger than the diameter of the wafer (200), and the thickness of the boss (21) is larger than the thickness of the disk (20) body.

Images