Silicon carbide seed crystal lifting pasting glue scraper

Abstract

The invention provides a silicon carbide seed crystal lifting pasting glue scraping machine which comprises a glue scraping machine body, the glue scraping machine body comprises a bottom frame, a marble platform is installed on the bottom frame, polished shafts are fixed to the four corners of the marble platform, a top plate is arranged on the tops of the polished shafts, a movable plate is installed on the polished shafts, and a spiral lead screw lifting mechanism is arranged between the top and the marble platform. The spiral lead screw lifting mechanism comprises a lifting mechanism base, the lifting mechanism base is fixed to the marble platform, a motor is installed on the lifting mechanism base, and the motor drives a movable plate to move up and down along the optical axis; knife edge optical shafts are installed on the upper surface of the top plate, the knife edge optical shafts are installed on the two sides of the top plate respectively, knife edge frames are connected to the knife edge optical shafts, the knife edge frames are in sliding connection with the knife edge optical shafts through sliding bearings, and knife edge rulers are installed on the knife edge frames; a through hole is formed in the center of the top plate, and an operation platform is fixed to the movable plate and located under the through hole.

Description

Technical Field

[0001] The invention relates to the field of silicon carbide, and in particular to a silicon carbide seed crystal lifting, pasting and scraping machine. Background Art

[0002] Limited by the characteristics of the material itself, traditional silicon-based power devices have gradually become unable to meet the high power and high frequency performance requirements of emerging applications such as 5G base stations, new energy vehicles and high-speed rail. However, silicon carbide has excellent performance as a semiconductor material, especially for power components used in power conversion and control. Compared with traditional silicon devices, it can achieve low on-resistance, high-speed switching and high temperature and high voltage resistance, so it has become very popular in recent years.

[0003] At present, the largest application market of silicon carbide is in power control units, inverters, DC-DC converters, on-board chargers, etc. of new energy vehicles. Taking electric vehicles as an example, the use of silicon carbide chips will reduce the volume of electric drive devices to one-fifth, reduce the driving loss of electric vehicles by more than 60%, and significantly increase the mileage with the same battery capacity.

[0004] When using a PVT silicon carbide furnace to grow silicon carbide crystals, the seed crystals are generally pasted on special tooling for growth. The thickness and uniformity of the glue layer will greatly affect the growth quality of the silicon carbide crystals. The thickness and uniformity of the glue layer cannot be guaranteed when manually scraping the glue. Summary of the invention

[0005] In view of the problems existing in the prior art, the present invention provides a silicon carbide seed crystal lifting and pasting scraper to solve at least one of the above technical problems.

[0006] The technical solution of the present invention is: a silicon carbide seed crystal lifting and pasting scraper, including a scraper, characterized in that the scraper includes a base frame, a marble platform is installed on the base frame, an optical axis is fixed at the four corners of the marble platform, a top plate is provided on the top of the optical axis, a moving plate is installed on the optical axis, a spiral screw lifting mechanism is provided between the top and the marble platform, the spiral screw lifting mechanism includes a lifting mechanism base, the lifting mechanism base is fixed on the marble platform, a motor is installed on the lifting mechanism base, and the motor drives the moving plate to move up and down along the optical axis;

[0007] A knife-edge optical axis is installed on the upper surface of the top plate, and the knife-edge optical axis is installed on both sides of the top plate respectively. A knife-edge frame is connected to the knife-edge optical axis, and the knife-edge frame is slidably connected to the knife-edge optical axis through a sliding bearing, and a knife-edge ruler is installed on the knife-edge frame;

[0008] A through hole is opened in the center of the top plate, and an operating platform is fixed on the movable plate, and the operating platform is located directly below the through hole.

[0009] The invention places the product on the operating platform, raises the product to be scraped to below the blade ruler, and moves it down to facilitate taking out the product. The blade ruler is fixed on the blade frame, and the blade frame can move back and forth on the blade optical axis through a sliding bearing, so as to scrape off excess glue and achieve the requirements of leveling the glue and controlling the thickness of the glue layer. The marble platform can play a shock-absorbing effect.

[0010] Further preferably, the installation direction of the optical axis is perpendicular to the installation direction of the knife-edge optical axis, so as to realize the movement of different components.

[0011] Further preferably, a diamond-shaped support seat is provided at the connection between the bottom of the optical axis and the marble platform and at the connection between the top of the optical axis and the top plate.

[0012] The support seat can better fix the optical axis.

[0013] Further preferably, a flange bearing is provided at the connection between the optical axis and the movable plate.

[0014] It can make the moving plate move up and down more smoothly.

[0015] Further preferably, a top plate support seat is provided at the connection between the top optical axis and the top plate.

[0016] Further preferably, the diameter of the through hole is consistent with the length of the blade ruler.

[0017] This optimizes the efficiency of scraping off the glue.

[0018] Further preferably, blocks are provided around the base frame, and the marble platform is located inside the blocks.

[0019] The moving space of the marble platform is limited by the block to prevent the marble platform from falling.

[0020] More preferably, anchor bolts are installed at the bottom of the base frame, and the base frame is adjusted to be level by the anchor bolts, so that the glue layer will not have uneven thickness after flowing due to gravity.

[0021] Further preferably, the motor is provided with a frequency converter, and the motor speed can be adjusted by a knob to adjust the lifting speed of the movable plate. The minimum lifting speed of the equipment is 2mm / min, which can achieve a position accuracy of within 1 wire.

[0022] Beneficial effects:

[0023] 1. The servo motor drives the screw to rotate, and the four optical axes are used to limit the movement of the moving plate;

[0024] 2. The optical axis and the top plate of the scraper are connected by a diamond-shaped support seat. The support seat and the top plate are connected by bolts, and the optical axis is hung on the optical axis by friction. The top plate is installed by tightening the bolts to adjust the tightness. The position of the support seat can be adjusted to adjust the parallelism of the top plate. The parallelism can be verified by a feeler gauge to within 2 wires.

[0025] 3. The base of the lifting mechanism is placed on a marble platform. The marble platform can adjust the marble level through anchor bolts to ensure the level of the scraper during operation and use the shock-absorbing characteristics of marble to increase the stability of the scraper system;

[0026] 4. The motor speed can be adjusted by the frequency converter. The motor speed can be adjusted by the knob to adjust the lifting speed of the moving plate. The minimum lifting speed of the equipment is 2mm / min, which can achieve a position accuracy of less than 1 wire. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0028] In the figure: 1 is a base frame, 2 is a marble platform, 3 is a stopper, 4 is an optical axis, 5 is a screw rod lifting mechanism, 6 is a motor, 7 is a lifting mechanism base, 8 is a moving plate, 9 is a top plate, 10 is a top plate support seat, 11 is a diamond support seat, 12 is a knife edge optical axis, 13 is a knife edge frame, 14 is a knife edge ruler, 15 is a sliding bearing, 16 is a flange bearing, and 18 is an anchor bolt. DETAILED DESCRIPTION

[0029] The present invention will be further described below in conjunction with the accompanying drawings.

[0030] Reference Figure 1 As shown, the silicon carbide seed crystal lifting and pasting glue scraper includes a glue scraper, which includes a base frame 1, a marble platform 2 is installed on the base frame, an optical axis 4 is fixed at the four corners of the marble platform, a top plate 9 is provided on the top of the optical axis, a movable plate 8 is installed on the optical axis, a spiral screw lifting mechanism 5 is provided between the top and the marble platform, the spiral screw lifting mechanism includes a lifting mechanism base 7, the lifting mechanism base is fixed on the marble platform, a motor 6 is installed on the lifting mechanism base, and the motor drives the movable plate to move up and down along the optical axis; a knife-edge optical axis 12 is installed on the upper surface of the top plate, the knife-edge optical axis is respectively installed on both sides of the top plate, a knife-edge frame 13 is connected to the knife-edge optical axis, and the knife-edge frame is slidably connected to the knife-edge optical axis through a sliding bearing 15, and a knife-edge ruler 14 is installed on the knife-edge frame; a through hole is opened in the center of the top plate, an operating platform is fixed on the movable plate, and the operating platform is located directly below the through hole.

[0031] The invention places the product on the operating platform, raises the product to be scraped to below the blade ruler, and moves it down to facilitate taking out the product. The blade ruler is fixed on the blade frame, and the blade frame can move back and forth on the blade optical axis through a sliding bearing, so as to scrape off excess glue and achieve the requirements of leveling the glue and controlling the thickness of the glue layer. The marble platform can play a shock-absorbing effect.

[0032] Further preferably, the installation direction of the optical axis and the installation direction of the knife edge optical axis are perpendicular to each other, so as to realize the movement of different components.

[0033] Further preferably, the connection between the bottom of the optical axis and the marble platform and the connection between the top of the optical axis and the top plate are both provided with a diamond-shaped support seat 11. The optical axis can be better fixed by the support seat.

[0034] Further preferably, a flange bearing 16 is provided at the connection between the optical axis and the movable plate, so that the movable plate can move up and down more smoothly.

[0035] Further preferably, a top plate support seat 10 is provided at the connection between the top optical axis and the top plate.

[0036] Further preferably, the diameter of the through hole is consistent with the length of the knife edge, so as to optimize the efficiency of scraping off the glue.

[0037] Further preferably, the base frame is provided with a stopper 3 around it, and the marble platform is located inside the stopper. The stopper limits the moving space of the marble platform to prevent the marble platform from falling.

[0038] Further preferably, the bottom of the chassis is provided with anchor bolts 18. The level of the chassis is adjusted by the anchor bolts so that the glue layer will not have uneven thickness after flowing due to gravity.

[0039] Further preferably, the motor is provided with a frequency converter, and the motor speed can be adjusted by a knob to adjust the lifting speed of the movable plate. The minimum lifting speed of the equipment is 2mm / min, which can achieve a position accuracy of within 1 wire.

[0040] Beneficial effects:

[0041] 1. The servo motor drives the screw to rotate, and the four optical axes are used to limit the movement of the moving plate;

[0042] 2. The optical axis and the top plate of the scraper are connected by a diamond-shaped support seat. The support seat and the top plate are connected by bolts, and the optical axis is hung on the optical axis by friction. The top plate is installed by tightening the bolts to adjust the tightness. The position of the support seat can be adjusted to adjust the parallelism of the top plate. The parallelism can be verified by a feeler gauge to within 2 wires.

[0043] 3. The base of the lifting mechanism is placed on a marble platform. The marble platform can adjust the marble level through anchor bolts to ensure the level of the scraper during operation and use the shock-absorbing characteristics of marble to increase the stability of the scraper system;

[0044] 4. The motor speed can be adjusted by the frequency converter. The motor speed can be adjusted by the knob to adjust the lifting speed of the moving plate. The minimum lifting speed of the equipment is 2mm / min, which can achieve a position accuracy of less than 1 wire.

[0045] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A silicon carbide seed crystal lifting and pasting glue scraping machine, including a glue scraping machine, characterized in that: The scraper includes a base frame, a marble platform is installed on the base frame, an optical axis is fixed at the four corners of the marble platform, a plate is provided on the top of the optical axis, a moving plate is installed on the optical axis, a screw rod lifting mechanism is provided between the top and the marble platform, the screw rod lifting mechanism includes a lifting mechanism base, the lifting mechanism base is fixed on the marble platform, a motor is installed on the lifting mechanism base, and the motor drives the moving plate to move up and down along the optical axis; A knife-edge optical axis is installed on the upper surface of the top plate, and the knife-edge optical axis is installed on both sides of the top plate respectively. A knife-edge frame is connected to the knife-edge optical axis, and the knife-edge frame is slidably connected to the knife-edge optical axis through a sliding bearing, and a knife-edge ruler is installed on the knife-edge frame; A through hole is opened in the center of the top plate, and an operating platform is fixed on the movable plate, and the operating platform is located directly below the through hole.

2. The silicon carbide seed crystal lifting and pasting scraper according to claim 1, characterized in that: The installation direction of the optical axis and the installation direction of the knife-edge optical axis are perpendicular to each other.

3. The silicon carbide seed crystal lifting and pasting scraper according to claim 1, characterized in that: A diamond-shaped support seat is provided at the connection between the bottom of the optical axis and the marble platform and at the connection between the top of the optical axis and the top plate.

4. The silicon carbide seed crystal lifting and pasting scraper according to claim 1, characterized in that: A flange bearing is provided at the connection between the optical axis and the movable plate.

5. The silicon carbide seed crystal lifting and pasting scraper according to claim 1, characterized in that: A top plate supporting seat is provided at the connection between the top optical axis and the top plate.

6. The silicon carbide seed crystal lifting and pasting scraper according to claim 1, characterized in that: The diameter of the through hole is consistent with the length of the blade ruler.

7. The silicon carbide seed crystal lifting and pasting scraper according to claim 1, characterized in that: Stop blocks are arranged around the base frame, and the marble platform is located inside the stop blocks.

8. The silicon carbide seed crystal lifting and pasting scraper according to claim 1, characterized in that: Anchor bolts are installed at the bottom of the base frame.

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