Diaphragm device for cleaning optical mirror surface of laser system

Abstract

The invention discloses a diaphragm device for cleaning an optical mirror surface of a laser system, which belongs to the technical field of optical equipment cleaning, and comprises an optical mirror bracket and a fixed diaphragm, the clean diaphragm is arranged between the optical mirror bracket and the fixed diaphragm, the upper part of the clean diaphragm is provided with an air inlet hole and an air inlet channel, and a gap is arranged between the clean diaphragm and the optical mirror bracket. The air inlet hole, the air inlet channel and the air outlet slit opening are communicated, a four-edge conical groove and an air suction hole are formed in the lower portion of the clean diaphragm, the upper portion of the clean diaphragm is connected with an air inlet head, the lower portion of the clean diaphragm is connected with an air suction head, and a compressed air pipe and an air suction pipe are arranged in the optical lens frame. The compressed gas pipe is connected with the gas inlet head, and the suction gas pipe is connected with the suction head. By integrating the clean diaphragm on the optical lens bracket, the whole structure is compact, the surface of the optical lens can be directly cleaned without disassembling the optical lens, and the internal environment of the optical cabin can be purified.

Description

Technical Field

[0001] The invention relates to the technical field of optical equipment cleaning, and in particular to a diaphragm device for cleaning an optical mirror surface of a laser system. Background Art

[0002] In the laser transmission optical path, the cleanliness of the optical mirror surface is crucial to the service life of the optical mirror, the performance of the laser system and the imaging quality. If there are particles attached to the surface of the optical mirror, the temperature rise of the optical mirror will be abnormal during laser transmission, which will damage the optical film and shorten the service life of the optical mirror. However, when the traditional method finds contamination on the surface of the optical mirror, it is necessary to open the optical cabin and enter the interior to clean it. This process may cause secondary contamination of the internal environment of the optical system, further affecting the performance of the laser system.

[0003] In laser systems, traditional apertures are usually installed on the front surface of the optical mirror frame to prevent beam deviation or stray light from acting on the optical mirror frame. Traditional apertures can only provide protection but cannot clean the optical mirror surface or purify the environment inside the optical cabin.

[0004] A Chinese patent document with publication number CN208098785U and publication date of November 16, 2018 discloses a high-efficiency dust cleaning device for an aperture lock cylinder for a lens, including a workbench, a switch button, a cleaning button, a control panel, an air blowing button, a fixed plate, and a placement table. The workbench is provided with a control panel, the workbench is fixedly connected to the control panel, the control panel is provided with an air blowing button, the air blowing button is fixedly connected to the control panel, a cleaning button is provided on the right side of the air blowing button, the cleaning button is fixedly connected to the control panel, a switch button is provided on the right side of the cleaning button, the switch button is fixedly connected to the control panel, and an air outlet is provided on the right side of the control panel. The air outlet is fixedly connected to the workbench, a dustproof box is provided on the workbench, the dustproof box is fixedly connected to the workbench, a fixed disk is provided in the dustproof box, a fixed head is provided on the fixed disk, the fixed head is fixedly connected to the fixed disk, a placing table is provided on the fixed head, the placing table and the fixed head are detachably connected, a cleaning pipe is provided on the top of the placing table, a cleaning liquid is provided in the cleaning pipe, a cleaning head is provided under the cleaning liquid, the cleaning head is fixedly connected to the cleaning pipe, a high-pressure blowing pipe is provided on the left side of the cleaning head, an air suction hood is provided on the right side of the cleaning head, an air suction pipe is provided under the air suction hood, the air suction pipe is fixedly connected to the air suction hood, and the air suction pipe is fixedly connected to the air outlet.

[0005] The patent document discloses a high-efficiency dust cleaning device for a lens diaphragm lock cylinder, which can solve the problem of low dust cleaning efficiency by providing a dust-free vacuum dustproof box, and a cleaning device, a high-pressure air blowing device and a dust suction device provided in the dustproof box. However, the cleaning of the lens requires the lens to be removed, which is prone to secondary pollution and is not suitable for rapid cleaning of the optical lens surface. Summary of the invention

[0006] In order to overcome the defects of the above-mentioned prior art, the present invention provides an aperture device for cleaning the optical mirror of a laser system. The present invention integrates a clean aperture on the optical mirror frame, and the overall structure is compact. The surface of the optical mirror can be directly cleaned without disassembling the optical mirror, and the internal environment of the optical cabin can be purified.

[0007] The present invention is achieved through the following technical solutions: A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical frame and a fixed diaphragm arranged on the optical frame, characterized in that: a clean diaphragm is arranged between the optical frame and the fixed diaphragm, the clean diaphragm is connected to the fixed diaphragm, an air inlet hole and an air inlet channel are opened on the upper part of the clean diaphragm, a gap is arranged between the clean diaphragm and the optical frame to form an air outlet slit of the clean diaphragm, the air outlet slit is located below the air inlet channel, the air inlet hole, the air inlet channel and the air outlet slit are connected, a four-sided conical groove and an air suction hole connected to the four-sided conical groove are opened on the lower part of the clean diaphragm, an air inlet head is connected to the upper part of the clean diaphragm, and an air suction head is connected to the lower part of the clean diaphragm, a compressed gas pipe and a suction gas pipe are arranged inside the optical frame, the compressed gas pipe is connected to the air inlet head, and the suction gas pipe is connected to the suction head.

[0008] The gap between the clean aperture and the optical frame is 0.05 mm.

[0009] A low thermal conductivity spacer is arranged between the clean aperture and the fixed aperture.

[0010] The optical frame is connected with a first adapter and a second adapter, and the first adapter and the second adapter are located on the same side wall of the optical frame.

[0011] One end of the compressed gas pipe extends out of the optical lens frame and is connected to the first adapter.

[0012] One end of the suction gas tube extends out of the optical frame and is connected to the second adapter.

[0013] The air inlet head is located on the side wall of the clean aperture.

[0014] The air inlet head is located on the top wall of the clean aperture.

[0015] The optical frame includes a first support plate, a vertical plate, a base and a second support plate. The vertical plate is vertically fixedly connected to the base. The first support plate is located on one side of the vertical plate, and the second support plate is located on the other side of the vertical plate. The first support plate, the base and the second support plate are integrally formed.

[0016] The clean aperture is fixedly connected to the vertical plate of the optical frame.

[0017] The beneficial effects of the present invention are mainly manifested in the following aspects: 1. According to the present invention, a clean diaphragm is arranged between the optical frame and the fixed diaphragm, the clean diaphragm is connected to the fixed diaphragm, an air inlet hole and an air inlet channel are provided on the upper part of the clean diaphragm, a gap is provided between the clean diaphragm and the optical frame to form an air outlet slit of the clean diaphragm, the air outlet slit is located below the air inlet channel, the air inlet hole, the air inlet channel and the air outlet slit are connected, a four-sided conical groove and an air suction hole connected to the four-sided conical groove are provided on the lower part of the clean diaphragm, an air inlet head is connected to the upper part of the clean diaphragm, and an air suction head is connected to the lower part of the clean diaphragm, a compressed gas pipe and a suction gas pipe are provided inside the optical frame, the compressed gas pipe is connected to the air inlet head, and the suction gas pipe is connected to the suction head. Compared with the prior art, by integrating the clean diaphragm on the optical frame, the overall structure is compact, the surface of the optical mirror can be directly cleaned without disassembling the optical mirror, and the internal environment of the optical cabin can be purified.

[0018] 2. In the present invention, the gap between the clean aperture and the optical mirror frame is 0.05 mm, and the compressed gas is blown out through the air outlet slit to form a high-speed air flow sheet. The Coanda air amplification effect is used to form an impact air curtain, which is beneficial to improving the cleaning effect of the subsequent optical mirror surface.

[0019] 3. In the present invention, a low thermal conductivity spacer is provided between the clean aperture and the fixed aperture, which can prevent the heat absorbed by the fixed aperture during the light emission process from being transferred to the optical lens frame through heat conduction, thereby preventing the optical lens frame from deforming due to thermal expansion, thereby ensuring the surface stability of the optical lens.

[0020] 4. In the present invention, the upper part of the clean diaphragm is connected to an air inlet head, the lower part of the clean diaphragm is connected to an air suction head, a compressed gas pipe and a suction gas pipe are arranged inside the optical mirror frame, the compressed gas pipe is connected to the air inlet head, and the suction gas pipe is connected to the air suction head, forming an integrated and efficient cleaning mechanism, thereby improving the cleaning efficiency of the optical mirror surface.

[0021] 5. The present invention has a compact overall structure and can be directly applied inside a laser system without the need to separately redesign the internal space of the laser system, thus having good applicability.

[0022] 6. The present invention is simple and efficient in cleaning the surface of optical mirrors, and can avoid the cumbersome steps and potential contamination risks involved in traditional cleaning methods.

[0023] 7. In the present invention, the clean aperture is fixedly connected to the vertical plate of the optical mirror frame. By directly integrating the clean aperture with the optical mirror frame, the user can achieve efficient cleaning operation on the surface of the optical mirror without opening the optical cabin or entering the interior thereof, which significantly reduces the risk of secondary contamination, improves the cleaning efficiency, and prolongs the service life of the optical mirror, thereby optimizing the performance and stability of the entire laser system. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementations, wherein: Figure 1 It is a structural schematic diagram of the present invention; Figure 2 is a side sectional view of the present invention; Figure 3 A half-section diagram of the present invention; Figure 4 is a side view of the present invention; Markings in the figure: 1. optical mirror frame, 2. fixed aperture, 3. clean aperture, 4. air inlet, 5. air inlet channel, 6. air outlet slit, 7. four-sided tapered groove, 8. air suction hole, 9. air inlet head, 10. air suction head, 11. compressed gas pipe, 12. suction gas pipe, 13. low thermal conductivity spacer, 14. first adapter, 15. second adapter, 16. first support plate, 17. vertical plate, 18. base, 19. second support plate, 20. optical mirror. DETAILED DESCRIPTION

[0025] Example 1 See also Figure 1-Figure 3 A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical mirror frame 1 and a fixed diaphragm 2 arranged on the optical mirror frame 1, a clean diaphragm 3 is arranged between the optical mirror frame 1 and the fixed diaphragm 2, the clean diaphragm 3 is connected to the fixed diaphragm 2, an air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3, a gap is arranged between the clean diaphragm 3 and the optical mirror frame 1, forming an air outlet slit 6 of the clean diaphragm 3, and the air outlet slit 6 is located at the air inlet channel 5. At the bottom, the air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected, the lower part of the clean diaphragm 3 is provided with a four-sided conical groove 7 and an air suction hole 8 connected with the four-sided conical groove 7, the upper part of the clean diaphragm 3 is connected with an air inlet head 9, and the lower part of the clean diaphragm 3 is connected with an air suction head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1, the compressed gas pipe 11 is connected with the air inlet head 9, and the suction gas pipe 12 is connected with the suction head 10.

[0026] This embodiment is the most basic implementation method. A clean diaphragm 3 is arranged between the optical frame 1 and the fixed diaphragm 2. The clean diaphragm 3 is connected to the fixed diaphragm 2. An air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3. A gap is arranged between the clean diaphragm 3 and the optical frame 1 to form an air outlet slit 6 of the clean diaphragm 3. The air outlet slit 6 is located below the air inlet channel 5. The air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected. A four-sided conical groove 7 and a groove connected to the four-sided conical groove 7 are opened at the lower part of the clean diaphragm 3. The upper part of the clean aperture 3 is connected to the air intake head 9, the lower part of the clean aperture 3 is connected to the air intake head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1. The compressed gas pipe 11 is connected to the air intake head 9, and the suction gas pipe 12 is connected to the suction head 10. Compared with the prior art, by integrating the clean aperture 3 on the optical lens frame 1, the overall structure is compact, and the surface of the optical lens 20 can be directly cleaned without disassembling the optical lens 20, and the internal environment of the optical cabin can be purified.

[0027] Example 2 See also Figure 1-Figure 3 A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical mirror frame 1 and a fixed diaphragm 2 arranged on the optical mirror frame 1, a clean diaphragm 3 is arranged between the optical mirror frame 1 and the fixed diaphragm 2, the clean diaphragm 3 is connected to the fixed diaphragm 2, an air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3, a gap is arranged between the clean diaphragm 3 and the optical mirror frame 1, forming an air outlet slit 6 of the clean diaphragm 3, and the air outlet slit 6 is located at the air inlet channel 5. At the bottom, the air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected, the lower part of the clean diaphragm 3 is provided with a four-sided conical groove 7 and an air suction hole 8 connected with the four-sided conical groove 7, the upper part of the clean diaphragm 3 is connected with an air inlet head 9, and the lower part of the clean diaphragm 3 is connected with an air suction head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1, the compressed gas pipe 11 is connected with the air inlet head 9, and the suction gas pipe 12 is connected with the suction head 10.

[0028] The gap between the clean aperture 3 and the optical lens frame 1 is 0.05 mm.

[0029] This embodiment is a preferred implementation method. The gap between the clean aperture 3 and the optical lens frame 1 is 0.05 mm. The compressed gas is blown out through the air outlet slit 6 to form a high-speed air flow sheet. The Coanda air amplification effect is used to form an impact air curtain, which is beneficial to improve the cleaning effect of the subsequent optical lens 20 surface.

[0030] Example 3 See also Figure 1-Figure 3A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical mirror frame 1 and a fixed diaphragm 2 arranged on the optical mirror frame 1, a clean diaphragm 3 is arranged between the optical mirror frame 1 and the fixed diaphragm 2, the clean diaphragm 3 is connected to the fixed diaphragm 2, an air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3, a gap is arranged between the clean diaphragm 3 and the optical mirror frame 1, forming an air outlet slit 6 of the clean diaphragm 3, and the air outlet slit 6 is located at the air inlet channel 5. At the bottom, the air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected, the lower part of the clean diaphragm 3 is provided with a four-sided conical groove 7 and an air suction hole 8 connected with the four-sided conical groove 7, the upper part of the clean diaphragm 3 is connected with an air inlet head 9, and the lower part of the clean diaphragm 3 is connected with an air suction head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1, the compressed gas pipe 11 is connected with the air inlet head 9, and the suction gas pipe 12 is connected with the suction head 10.

[0031] Preferably, the gap between the clean aperture 3 and the optical lens frame 1 is 0.05 mm.

[0032] A low thermal conductivity spacer 13 is provided between the clean aperture 3 and the fixed aperture 2 .

[0033] This embodiment is another preferred implementation mode. A low thermal conductivity spacer 13 is provided between the clean aperture 3 and the fixed aperture 2. This can prevent the heat absorbed by the fixed aperture 2 during the light emission process from being transferred to the optical lens frame 1 through heat conduction, thereby preventing the optical lens frame 1 from deforming due to thermal expansion, thereby ensuring the surface stability of the optical lens 20.

[0034] Example 4 See also Figure 1-Figure 3 A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical mirror frame 1 and a fixed diaphragm 2 arranged on the optical mirror frame 1, a clean diaphragm 3 is arranged between the optical mirror frame 1 and the fixed diaphragm 2, the clean diaphragm 3 is connected to the fixed diaphragm 2, an air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3, a gap is arranged between the clean diaphragm 3 and the optical mirror frame 1, forming an air outlet slit 6 of the clean diaphragm 3, and the air outlet slit 6 is located at the air inlet channel 5. At the bottom, the air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected, the lower part of the clean diaphragm 3 is provided with a four-sided conical groove 7 and an air suction hole 8 connected with the four-sided conical groove 7, the upper part of the clean diaphragm 3 is connected with an air inlet head 9, and the lower part of the clean diaphragm 3 is connected with an air suction head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1, the compressed gas pipe 11 is connected with the air inlet head 9, and the suction gas pipe 12 is connected with the suction head 10.

[0035] The gap between the clean aperture 3 and the optical lens frame 1 is 0.05 mm.

[0036] A low thermal conductivity spacer 13 is provided between the clean aperture 3 and the fixed aperture 2 .

[0037] The optical frame 1 is connected to a first adapter 14 and a second adapter 15 . The first adapter 14 and the second adapter 15 are located on the same side wall of the optical frame 1 .

[0038] This embodiment is another preferred implementation manner. The upper part of the clean aperture 3 is connected to an air inlet head 9, and the lower part of the clean aperture 3 is connected to an air suction head 10. A compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1. The compressed gas pipe 11 is connected to the air inlet head 9, and the suction gas pipe 12 is connected to the suction head 10, forming an integrated and efficient cleaning mechanism, thereby improving the cleaning efficiency of the surface of the optical mirror 20.

[0039] Example 5 See also Figure 1-Figure 3 A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical mirror frame 1 and a fixed diaphragm 2 arranged on the optical mirror frame 1, a clean diaphragm 3 is arranged between the optical mirror frame 1 and the fixed diaphragm 2, the clean diaphragm 3 is connected to the fixed diaphragm 2, an air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3, a gap is arranged between the clean diaphragm 3 and the optical mirror frame 1, forming an air outlet slit 6 of the clean diaphragm 3, and the air outlet slit 6 is located at the air inlet channel 5. At the bottom, the air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected, the lower part of the clean diaphragm 3 is provided with a four-sided conical groove 7 and an air suction hole 8 connected with the four-sided conical groove 7, the upper part of the clean diaphragm 3 is connected with an air inlet head 9, and the lower part of the clean diaphragm 3 is connected with an air suction head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1, the compressed gas pipe 11 is connected with the air inlet head 9, and the suction gas pipe 12 is connected with the suction head 10.

[0040] The gap between the clean aperture 3 and the optical lens frame 1 is 0.05 mm.

[0041] A low thermal conductivity spacer 13 is provided between the clean aperture 3 and the fixed aperture 2 .

[0042] Further preferably, a first adapter 14 and a second adapter 15 are connected to the optical frame 1 , and the first adapter 14 and the second adapter 15 are located on the same side wall of the optical frame 1 .

[0043] One end of the compressed gas pipe 11 extends out of the optical frame 1 and is connected to the first adapter 14 .

[0044] One end of the suction gas tube 12 extends out of the optical frame 1 and is connected to the second adapter 15 .

[0045] The air inlet head 9 is located on the side wall of the clean aperture 3 .

[0046] This embodiment is another preferred implementation method, which has a compact overall structure and can be directly applied inside a laser system without the need to separately redesign the internal space of the laser system, and has good applicability.

[0047] Example 6 See also Figure 1-Figure 4 A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical mirror frame 1 and a fixed diaphragm 2 arranged on the optical mirror frame 1, a clean diaphragm 3 is arranged between the optical mirror frame 1 and the fixed diaphragm 2, the clean diaphragm 3 is connected to the fixed diaphragm 2, an air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3, a gap is arranged between the clean diaphragm 3 and the optical mirror frame 1, forming an air outlet slit 6 of the clean diaphragm 3, and the air outlet slit 6 is located at the air inlet channel 5. At the bottom, the air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected, the lower part of the clean diaphragm 3 is provided with a four-sided conical groove 7 and an air suction hole 8 connected with the four-sided conical groove 7, the upper part of the clean diaphragm 3 is connected with an air inlet head 9, and the lower part of the clean diaphragm 3 is connected with an air suction head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1, the compressed gas pipe 11 is connected with the air inlet head 9, and the suction gas pipe 12 is connected with the suction head 10.

[0048] The gap between the clean aperture 3 and the optical lens frame 1 is 0.05 mm.

[0049] A low thermal conductivity spacer 13 is provided between the clean aperture 3 and the fixed aperture 2 .

[0050] The optical frame 1 is connected to a first adapter 14 and a second adapter 15 . The first adapter 14 and the second adapter 15 are located on the same side wall of the optical frame 1 .

[0051] One end of the compressed gas pipe 11 extends out of the optical frame 1 and is connected to the first adapter 14 .

[0052] One end of the suction gas tube 12 extends out of the optical frame 1 and is connected to the second adapter 15 .

[0053] The air inlet head 9 is located on the top wall of the clean aperture 3 .

[0054] The optical frame 1 includes a first support plate 16, a vertical plate 17, a base 18 and a second support plate 19. The vertical plate 17 is vertically fixedly connected to the base 18. The first support plate 16 is located on one side of the vertical plate 17, and the second support plate 19 is located on the other side of the vertical plate 17. The first support plate 16, the base 18 and the second support plate 19 are integrally formed.

[0055] This embodiment is another preferred implementation method. The cleaning operation of the surface of the optical mirror 20 is simple and efficient, and can avoid the cumbersome steps and potential contamination risks involved in traditional cleaning methods.

[0056] Example 7 See also Figure 1-Figure 4 A diaphragm device for cleaning an optical mirror surface of a laser system comprises an optical mirror frame 1 and a fixed diaphragm 2 arranged on the optical mirror frame 1, a clean diaphragm 3 is arranged between the optical mirror frame 1 and the fixed diaphragm 2, the clean diaphragm 3 is connected to the fixed diaphragm 2, an air inlet hole 4 and an air inlet channel 5 are opened on the upper part of the clean diaphragm 3, a gap is arranged between the clean diaphragm 3 and the optical mirror frame 1, forming an air outlet slit 6 of the clean diaphragm 3, and the air outlet slit 6 is located at the air inlet channel 5. At the bottom, the air inlet hole 4, the air inlet channel 5 and the air outlet slit 6 are connected, the lower part of the clean diaphragm 3 is provided with a four-sided conical groove 7 and an air suction hole 8 connected with the four-sided conical groove 7, the upper part of the clean diaphragm 3 is connected with an air inlet head 9, and the lower part of the clean diaphragm 3 is connected with an air suction head 10, and a compressed gas pipe 11 and a suction gas pipe 12 are arranged inside the optical lens frame 1, the compressed gas pipe 11 is connected with the air inlet head 9, and the suction gas pipe 12 is connected with the suction head 10.

[0057] The gap between the clean aperture 3 and the optical lens frame 1 is 0.05 mm.

[0058] A low thermal conductivity spacer 13 is provided between the clean aperture 3 and the fixed aperture 2 .

[0059] The optical frame 1 is connected to a first adapter 14 and a second adapter 15 . The first adapter 14 and the second adapter 15 are located on the same side wall of the optical frame 1 .

[0060] One end of the compressed gas pipe 11 extends out of the optical frame 1 and is connected to the first adapter 14 .

[0061] One end of the suction gas tube 12 extends out of the optical frame 1 and is connected to the second adapter 15 .

[0062] The air inlet head 9 is located on the top wall of the clean aperture 3 .

[0063] The optical frame 1 includes a first support plate 16, a vertical plate 17, a base 18 and a second support plate 19. The vertical plate 17 is vertically fixedly connected to the base 18. The first support plate 16 is located on one side of the vertical plate 17, and the second support plate 19 is located on the other side of the vertical plate 17. The first support plate 16, the base 18 and the second support plate 19 are integrally formed.

[0064] The clean aperture 3 is fixedly connected to the vertical plate 17 of the optical frame 1 .

[0065] This embodiment is the best implementation mode. The clean aperture 3 is fixedly connected to the vertical plate 17 of the optical mirror frame 1. By directly integrating the clean aperture 3 with the optical mirror frame 1, the user can achieve efficient cleaning operation on the surface of the optical mirror 20 without opening the optical cabin or entering its interior, which significantly reduces the risk of secondary contamination, improves the cleaning efficiency, and extends the service life of the optical mirror 20, thereby optimizing the performance and stability of the entire laser system.

[0066] The working process of the clean aperture is as follows: The compressed gas enters the air inlet channel 5 through the air inlet hole 4 of the clean aperture 3, and the gas entering the air inlet channel 5 is blown out through the air outlet slit 6 to form a high-speed airflow sheet. By using the Coanda air amplification effect principle and the structure of the clean aperture 3 itself, the airflow sheet will drain the ambient gas several dozen times that of the airflow sheet, thereby forming a thin, high-intensity, large-airflow impact air curtain with uniform air curtain strength. The impact air curtain acts on the surface of the optical mirror 20, blowing away the attachments on the surface of the optical mirror 20. The attachments move in the direction of air flow and then enter the four-sided conical groove 7 at the bottom of the clean aperture 3, and are guided out of the optical cabin through the air suction hole 8 and the suction gas pipe 12. Not only can the surface of the optical mirror 20 be effectively cleaned, but also the internal environment of the optical cabin can be purified.

[0067] The Coanda effect formula is: in, is the total air flow, is the density of ambient air, is the density of the airflow, is the cross-sectional area of ​​the ambient air, is the cross-sectional area of ​​the airflow, is the initial gas flow rate.

Claims

1. An aperture device for cleaning an optical mirror surface of a laser system, comprising an optical mirror frame (1) and a fixed aperture (2) arranged on the optical mirror frame (1), characterized in that: A clean diaphragm (3) is arranged between the optical frame (1) and the fixed diaphragm (2), the clean diaphragm (3) being connected to the fixed diaphragm (2), an air inlet hole (4) and an air inlet channel (5) being provided at the top of the clean diaphragm (3), a gap being arranged between the clean diaphragm (3) and the optical frame (1), forming an air outlet slit opening (6) of the clean diaphragm (3), the air outlet slit opening (6) being located below the air inlet channel (5), and the air inlet hole (4), the air inlet channel (5) and the air outlet slit opening (6) ), the lower part of the clean diaphragm (3) is provided with a four-sided conical groove (7) and an air suction hole (8) connected to the four-sided conical groove (7), the upper part of the clean diaphragm (3) is connected to an air inlet head (9), the lower part of the clean diaphragm (3) is connected to an air suction head (10), and a compressed gas pipe (11) and a suction gas pipe (12) are arranged inside the optical lens frame (1), the compressed gas pipe (11) is connected to the air inlet head (9), and the suction gas pipe (12) is connected to the suction head (10).

2. The aperture device for cleaning the optical mirror surface of a laser system according to claim 1, characterized in that: The gap between the clean aperture (3) and the optical lens frame (1) is 0.05 mm.

3. The aperture device for cleaning the optical mirror surface of a laser system according to claim 1, characterized in that: A low thermal conductivity spacer (13) is provided between the clean aperture (3) and the fixed aperture (2).

4. The aperture device for cleaning the optical mirror surface of a laser system according to claim 1, characterized in that: The optical frame (1) is connected to a first adapter (14) and a second adapter (15); the first adapter (14) and the second adapter (15) are located on the same side wall of the optical frame (1).

5. The aperture device for cleaning the optical mirror surface of a laser system according to claim 4, characterized in that: One end of the compressed gas pipe (11) extends out of the optical mirror frame (1) and is connected to the first adapter (14).

6. The aperture device for cleaning the optical mirror surface of a laser system according to claim 4, characterized in that: One end of the suction gas tube (12) extends out of the optical frame (1) and is connected to the second adapter (15).

7. The aperture device for cleaning the optical mirror surface of a laser system according to claim 1, characterized in that: The air inlet head (9) is located on the side wall of the clean aperture (3).

8. The aperture device for cleaning the optical mirror surface of a laser system according to claim 1, characterized in that: The air inlet head (9) is located on the top wall of the clean aperture (3).

9. The aperture device for cleaning the optical mirror surface of a laser system according to claim 1, characterized in that: The optical frame (1) comprises a first support plate (16), a vertical plate (17), a base (18) and a second support plate (19); the vertical plate (17) and the base (18) are vertically fixedly connected; the first support plate (16) is located on one side of the vertical plate (17), and the second support plate (19) is located on the other side of the vertical plate (17); the first support plate (16), the base (18) and the second support plate (19) are integrally formed.

10. The aperture device for cleaning the optical mirror surface of a laser system according to claim 9, characterized in that: The clean diaphragm (3) is fixedly connected to the vertical plate (17) of the optical mirror frame (1).

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