Open type fluid generating device

Abstract

The invention relates to the technical field of fluid control, in particular to an open type fluid generating device which comprises a substrate, a piezoelectric plate, a spacing part, a first diaphragm and a second diaphragm, the piezoelectric plate and the substrate are jointed to form an actuator, and the first diaphragm is fixedly connected to one end, away from the actuator, of the spacing part through a first joint part to form an excitation cavity; the second diaphragm is located on the side, away from the actuator, of the first diaphragm at intervals, a pump cavity is formed between the first diaphragm and the second diaphragm, fluid in the pump cavity is excited through the first diaphragm to generate pressure change, the second diaphragm is promoted to generate vibration, and the volume variation of the pump cavity in the working process is increased; the pump cavity is an open cavity, the hole part is arranged on the second diaphragm, and when the hole part is blocked by foreign matters and dust in the air, the hole part is easier to clean; the first diaphragm is provided with a first separation part, and the second diaphragm is provided with a second separation part, so that the vibration energy of the first diaphragm and the second diaphragm mainly acts on the first vibration area and the second vibration area.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid control, and in particular to an open fluid generating device. Background Art

[0002] The piezoelectric driven gas generating device constructed using the synthetic jet principle is considered to be able to be configured in the narrow internal space of electronic products for use as an air-cooled heat dissipation device due to its many advantages such as simple and compact structure, light weight, low cost, easy miniaturization, and no need for additional gas source.

[0003] However, research has found that since the synthetic jet is a zero-mass jet and does not have a gas transport function like an air pump device, the jet hole located on one side of the jet cavity serves as both a gas intake and a gas exhaust during operation. Obviously, this in-and-out working mode results in a large energy loss. In addition, when used as a heat dissipation device, a local hot air circulation will be formed in the area opposite to the jet hole and the heat source, and good thermal benefits cannot be obtained.

[0004] Based on this, the researchers constructed a drainage chamber by setting a baffle with a jet hole (opposite to the jet hole) on one side of the jet hole to control the gas flow direction during the inhalation and exhaust process, so that when inhaling, the gas enters the drainage chamber from the outer side of the baffle and is inhaled into the jet chamber through the jet hole. When exhausting, the gas in the jet chamber is discharged from the jet chamber through the jet hole to form a gas jet and is ejected through the jet hole, thereby avoiding local hot air circulation; but there are still some problems: on the one hand, in order to form a jet, the jet hole scale is generally set very small, there is a risk of being blocked by foreign matter and dust in the air, and the jet chamber is a closed chamber, which is not conducive to cleaning and maintenance; on the other hand, the vibration displacement of the piezoelectric actuator is extremely small, about a few microns to tens of microns, and the volume change of the jet chamber caused must be very small. The output performance of the gas generating device is limited, and it is difficult to meet the heat dissipation requirements of electronic products. Summary of the invention

[0005] The technical problem to be solved by the present invention is: in order to solve the deficiencies in the prior art, an open fluid generating device is now provided.

[0006] The technical solution adopted by the present invention to solve the technical problem is: an open fluid generating device, comprising:

[0007] A substrate, with at least one piezoelectric sheet bonded to one or both sides of the surface in the thickness direction, the piezoelectric sheet and the substrate are bonded to form an actuator, and the actuator has a first main surface and a second main surface arranged opposite to each other in the thickness direction;

[0008] A spacer, wherein the first main surface and / or the second main surface are joined with the spacer, the spacer is joined with the actuator at one end portion close to the actuator, and the spacer and the actuator form a groove portion with an opening at one end away from the actuator;

[0009] A first diaphragm having a first joint portion and a first vibrating portion connected to each other, wherein the first diaphragm is fixedly connected to an end of the partition portion away from the actuator through the first joint portion to cover the opening of the groove portion, so that an excitation cavity is formed between the actuator, the groove portion and the first diaphragm, the first vibrating portion is formed as an end wall of the excitation cavity, a first partition portion is provided on the first diaphragm to partition the first vibrating portion into at least two first vibrating regions, and the ability of the region of the first diaphragm opposite to the first partition portion to resist elastic deformation when a force is applied is greater than the ability of the first vibrating region of the first diaphragm to resist elastic deformation when a force is applied;

[0010] and the second diaphragm has a second joint portion and a second vibrating portion connected to each other, the second joint portion is fixed so that the second diaphragm is spaced apart and located on a side of the first diaphragm away from the actuator, a pump cavity is formed between the first diaphragm and the second diaphragm, a second partition portion is provided on the second diaphragm to partition the second vibrating portion into at least two second vibrating regions, the ability of the region of the second diaphragm opposite to the second partition portion to resist elastic deformation when a force is applied is greater than the ability of the second vibrating region of the second diaphragm to resist elastic deformation when a force is applied, and the second vibrating region is penetrated by at least one hole portion connected to the pump cavity;

[0011] When the actuator vibrates under the stimulation of the electrical signal, the actuator transmits the vibration energy to the first diaphragm, so as to cause the first diaphragm to vibrate, thereby causing the second diaphragm to vibrate.

[0012] Furthermore, the second vibration part is arranged opposite to the first vibration part; there is at least one second vibration area formed opposite to the first vibration area at two ends of the pump cavity;

[0013] At least one hole portion communicating with the pump chamber is penetrated through the second vibration area opposite to the first vibration area;

[0014] When the pump chamber inhales fluid, external fluid enters the pump chamber along the outer peripheral side of the pump chamber, and when the pump chamber discharges fluid, the fluid in the pump chamber is discharged along the hole portion.

[0015] Furthermore, the hole portion is provided in a region of the second vibration region that is opposite to the maximum amplitude region or a region adjacent to the maximum amplitude region of the opposite first vibration region.

[0016] Furthermore, the first partition protrudes from the surface of the first vibration area of ​​the first diaphragm, and at least a portion of the first partition is located between two adjacent first vibration areas;

[0017] The second partition protrudes from the surface of the second vibration region of the second diaphragm, and at least a portion of the second partition is located between two adjacent second vibration regions.

[0018] Furthermore, a local area of ​​the first diaphragm is shaped to form the first partition portion, and the first partition portion is a first partition rib disposed on the first vibration portion and protruding from the surface of the first vibration area of ​​the first diaphragm.

[0019] In one solution of the first partition, the first partition is formed by providing a first rib in a local area on one side of the first diaphragm;

[0020] The first rib has a first partition section arranged on the first vibration part, the first partition section protrudes from the surface of the first vibration area of ​​the first diaphragm, and the first partition section divides the first vibration part into at least two first vibration areas.

[0021] Further, the first convex rib is arranged on a side of the first diaphragm away from the actuator, and a first partition constituting the first convex rib is arranged on a side of the first vibration part of the first diaphragm away from the actuator.

[0022] Furthermore, the first rib also has a first extension section extending from the first partition section to the first joint portion, the first extension section protrudes from the surface of the first vibration area, and the first extension section is fixedly connected to a side of the first joint portion away from the partition portion.

[0023] Further, the first convex rib is arranged on a side of the first diaphragm facing the actuator, and a first partition constituting the first convex rib is arranged on a side of the first vibration part of the first diaphragm facing the actuator.

[0024] Furthermore, the first rib also has a first extension section extending from the first partition section to the first joint portion, the first extension section protrudes from the surface of the first vibration zone of the first diaphragm, and the first extension section is fixedly clamped between the first joint portion of the first diaphragm and the partition portion.

[0025] Furthermore, a side of the first partition facing the actuator is fixedly connected to the actuator.

[0026] One solution of the first partition is that the first partition is formed by providing a first convex rib facing the actuator side and a second convex rib facing away from the actuator in local areas on both sides of the first diaphragm;

[0027] The first convex rib has a first partition section disposed on the first vibrating portion;

[0028] The second convex rib has a second partition section disposed on the first vibrating portion;

[0029] The first partition section and the second partition section both protrude from the first diaphragm.

[0030] Furthermore, the first convex rib further comprises a first extension section extending from the first partition section to the first joint portion, and / or the second convex rib comprises a second extension section extending from the second partition section to the joint portion;

[0031] The first extension section protrudes from the surface of the first vibration area of ​​the first diaphragm, and the first extension section is fixedly clamped between the first joint portion and the spacing portion of the first diaphragm;

[0032] The second extending section protrudes from the surface of the first vibration region of the first diaphragm, and the second extending section is fixedly connected to a side of the first joint portion of the first diaphragm away from the spacing portion.

[0033] Furthermore, a side of the first partition facing the actuator is fixedly connected to the actuator.

[0034] Furthermore, the materials constituting the first convex rib and the second convex rib are the same or different.

[0035] Regarding one solution of the second partition, a local area of ​​the second diaphragm is shaped to form the second partition, and the second partition is a second partition rib provided on the second vibration part and protruding from the surface of the second vibration area of ​​the second diaphragm.

[0036] In one solution of the second partition, the second partition is formed by providing a third rib in a local area on one side of the second diaphragm;

[0037] The third rib has a third partition section arranged on the second vibration part, the third partition section protrudes from the surface of the second vibration area of ​​the second diaphragm, and the third partition section divides the second vibration part into at least two second vibration areas.

[0038] Furthermore, the third convex rib is arranged on a side of the second diaphragm away from the actuator, and a third partition constituting the third convex rib is arranged on a side of the second vibration part of the second diaphragm away from the actuator.

[0039] Furthermore, the third rib also has a third extension section extending from the third partition section to the second joint portion, the third extension section protrudes from the surface of the second vibration zone, and the third extension section is fixedly connected to a side of the second joint portion away from the partition portion.

[0040] In one solution of the second partition, the third rib is disposed on a side of the second diaphragm facing the actuator, and a third partition segment constituting the third rib is disposed on a side of the second vibrating portion of the second diaphragm facing the actuator.

[0041] Furthermore, the third rib also has a third extension section extending from the third partition section to the second joint portion, the third extension section protrudes from the surface of the second vibration zone of the second diaphragm, and the third extension section is fixed on a side of the second joint portion facing the partition portion.

[0042] One solution of the second partition is that the second partition is formed by providing a third rib facing the actuator and a fourth rib facing away from the actuator in local areas on both sides of the second diaphragm;

[0043] The third convex rib has a third partition section arranged on the second vibration part;

[0044] The fourth convex rib has a fourth partition section disposed on the second vibrating portion;

[0045] The third partition and the fourth partition both protrude from the second diaphragm.

[0046] Further, the third rib further comprises a third extension section extending from the third partition section to the second joint portion, and / or the fourth rib comprises a fourth extension section extending from the fourth partition section to the second joint portion;

[0047] The third extension section protrudes from the surface of the second vibration area of ​​the second diaphragm, and the third extension section is fixed on a side of the second joint portion facing the spacing portion;

[0048] The fourth extending section protrudes from the surface of the second vibration region of the second diaphragm, and the fourth extending section is fixedly connected to a side of the second joint portion of the second diaphragm away from the spacing portion.

[0049] Furthermore, the materials constituting the third convex rib and the fourth convex rib are the same or different.

[0050] Furthermore, the first partition is integrally formed with or fixedly connected to the first diaphragm;

[0051] The second partition is integrally formed with or fixedly connected to the second diaphragm.

[0052] Further, the first partition part is a continuous integral structure in the area on the same side of the first diaphragm; or, the first partition part is formed into a plurality of first partition strips arranged at intervals in the area on the same side of the first diaphragm;

[0053] The second partition part is a continuous integral structure in the area on the same side of the second diaphragm; or, the second partition part is formed into a plurality of second partition strips arranged at intervals in the area on the same side of the second diaphragm.

[0054] Further, the spacer is an annular structure, the inner peripheral wall of the spacer and the actuator enclose an annular groove, and one end of the spacer away from the actuator is fully or partially engaged with the first diaphragm on an annular path around the groove;

[0055] Alternatively, the spacer portion has multiple spacers, and the spacers of the same spacer portion are all joined to the first main surface or the second main surface. The multiple spacers are spaced apart and distributed along a circular path around the excitation cavity to form the groove portion with the actuator, and the end of the spacer facing away from the actuator is fully or partially joined to the first diaphragm.

[0056] Furthermore, the first diaphragm is composed of a polymer material, or a composite material composed of a polymer material and a metal material; the second diaphragm is composed of a polymer material, or a composite material composed of a polymer material and a metal material.

[0057] Furthermore, when the actuator vibrates under the excitation of an electrical signal, the first diaphragm and the second diaphragm generate vibrations with a certain phase difference.

[0058] The beneficial effects of the present invention are:

[0059] 1) The present invention excites the fluid in the pump chamber to produce pressure changes through the first diaphragm, prompting the second diaphragm to also vibrate, thereby increasing the volume change of the pump chamber during the working process, thereby greatly improving the output performance;

[0060] 2) The pump chamber formed between the first diaphragm and the second diaphragm in the present invention is an open chamber, and the hole is provided on the second diaphragm, so that when the hole is blocked by foreign matter or dust in the air, it is easier to clean;

[0061] 3) The present invention uses the first diaphragm as an excitation source for exciting the fluid in the pump cavity to produce pressure changes. The vibration energy generated by the actuator under the excitation of the external electrical signal, on the one hand, drives the fluid in the excitation cavity to produce pressure changes when the actuator vibrates, thereby causing the first diaphragm to vibrate and transfer the energy to the first diaphragm. More importantly, the energy is directly transferred to the first diaphragm through the mechanical coupling formed by the actuator and the first diaphragm. The energy transfer efficiency is high, and the extremely small vibration displacement of the actuator can cause the first diaphragm to produce a displacement several times or even dozens of times the vibration displacement of the actuator, thereby further promoting the improvement of output performance;

[0062] 4) In the present invention, a first partition is arranged on the first diaphragm to form at least two first vibration zones, and a second partition is arranged on the second diaphragm to form at least two second vibration zones, so that the vibration energy of the first diaphragm and the second diaphragm mainly acts on the first vibration zone and the second vibration zone, thereby reducing energy loss. When the vibration energy remains unchanged, it is beneficial to cause the first vibration zone of the first diaphragm and the second vibration zone of the second diaphragm to generate vibrations with larger amplitude.

[0063] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0064] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0065] Figure 1 It is an exploded schematic diagram of an open fluid generating device;

[0066] Figure 2 is a cross-sectional schematic diagram of an open fluid generating device;

[0067] Figure 3 is a schematic diagram of a first diaphragm separating two first vibration zones;

[0068] Figure 4 is a schematic diagram of a second diaphragm separating two second vibration zones;

[0069] Figure 5 is a schematic diagram of a structure in which a spacer and a substrate enclose a groove;

[0070] Figure 6 It is a schematic structural diagram of a spacer and a piezoelectric sheet disposed on the same side surface of a substrate in a thickness direction;

[0071] Figure 7 It is a schematic diagram of a structure in which both main surfaces of the actuator are provided with a spacer portion combined with a substrate, and a piezoelectric sheet is provided on any side surface of the substrate in the thickness direction;

[0072] Figure 8 It is a structural schematic diagram in which piezoelectric sheets and spacers are disposed on both main surfaces of the actuator, and the spacers are bonded to the piezoelectric sheets;

[0073] Fig. 9 The schematic diagram is a structural diagram in which spacers are provided on both main surfaces of the actuator, and the spacers on one side are bonded to the piezoelectric sheet, and the spacers on the other side are bonded to the substrate;

[0074] Fig.10 It is a schematic diagram of the pump chamber sucking fluid;

[0075] Fig.11 is a schematic diagram of the fluid discharged from the pump chamber;

[0076] Fig.12 is a schematic diagram of a first diaphragm separating four first vibration zones;

[0077] Fig.13 is a schematic diagram of a first diaphragm provided with a first diaphragm rib;

[0078] Fig.14 is a schematic diagram of a second diaphragm provided with a second rib;

[0079] Fig.15 is a schematic diagram of a first diaphragm provided with a first dividing strip;

[0080] Fig.16 is a schematic diagram of a second diaphragm provided with a first dividing strip;

[0081] Fig.17 is a schematic diagram of spacers arranged at intervals to form a spacer portion;

[0082] Fig.18 is a schematic diagram of a first diaphragm having a first rib disposed on a side facing away from the actuator;

[0083] Fig.19 It is a cross-sectional schematic diagram of an open fluid generating device in which a first partition is arranged on both sides of a first diaphragm and a second partition is arranged on both sides of a second diaphragm;

[0084] Fig. 20 yes Fig.19 AA section view in FIG.

[0085] Fig.21 is a schematic diagram of a first diaphragm provided with a first convex rib on a side facing the actuator;

[0086] Fig. 22 is a schematic diagram of a first diaphragm having a first rib fixedly connected to the actuator disposed on a side facing the actuator;

[0087] Fig.23 It is a schematic diagram showing that a first convex rib and a second convex rib are respectively arranged on both sides of a first diaphragm.

[0088] In the figure: 1, first diaphragm, 11, first joint portion, 12, first vibration portion, 121, first vibration region, 121a, maximum amplitude region;

[0089] 2. a second diaphragm, 21. a second joint portion, 22. a second vibration portion, 221. a second vibration region, 221a. a hole portion;

[0090] 3. actuator, 3a. first main surface, 3b. second main surface, 31. substrate, 32. piezoelectric sheet;

[0091] 4. spacer portion, 41. groove portion, 42. spacer body;

[0092] 5. Excitation chamber;

[0093] 6. Pump chamber;

[0094] 7, first partition, 71, first convex rib, 711, first partition section, 712, first extension section, 72, second convex rib, 721, second partition section, 722, second extension section, 73, first partition rib, 7-1, first partition strip;

[0095] 8. Second partition portion, 81. Third convex rib, 811. Third partition section, 812. Third extension section, 82. Fourth convex rib, 821. Fourth partition section, 822. Fourth extension section, 83. Second partition rib, 8-1. Second partition strip. DETAILED DESCRIPTION

[0096] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention, and directions and references (e.g., up, down, left, right, etc.) may only be used to help describe the features in the drawings. Therefore, the following specific embodiments are not to be taken in a limiting sense, and the scope of the subject matter claimed is limited only by the attached claims and their equivalents.

[0097] Example 1

[0098] like Figure 1 As shown, an open fluid generating device includes: a substrate 31, a piezoelectric sheet 32, a spacer 4, a first diaphragm 1 and a second diaphragm 2;

[0099] like Figures 5 to 9 As shown, at least one piezoelectric sheet 32 ​​is bonded to one or both sides of the substrate 31 in the thickness direction. The piezoelectric sheet 32 ​​may be a piezoelectric ceramic sheet. The piezoelectric sheet 32 ​​and the substrate 31 constitute an actuator 3. The actuator 3 has a first main surface 3a and a second main surface 3b that are arranged opposite to each other in the thickness direction. The piezoelectric sheet 32 ​​causes the actuator 3 to vibrate under the stimulation of an electrical signal.

[0100] The substrate 31 may be, but is not limited to, circular, rectangular, polygonal or elliptical, etc. In this embodiment, the substrate 31 is in the shape of a circular plate as an example. A single piezoelectric sheet 32 ​​can be bonded to any side surface of the substrate 31 in the thickness direction to form a piezoelectric unimorph actuator 3; or two piezoelectric sheets 32 are respectively arranged on the two side surfaces of the substrate 31 in the thickness direction to form a piezoelectric dual-chip actuator 3; or a plurality of piezoelectric sheets 32 are arranged on the same side surface of the substrate 31 in the thickness direction to form a composite multilayer piezoelectric actuator 3, etc. The piezoelectric sheet 32 ​​causes the actuator 3 to vibrate under the excitation of an external periodic electrical signal.

[0101] The first main surface 3 a and / or the second main surface 3 b are joined with a spacer 4 , which is connected to the actuator 3 at one end thereof close to the actuator 3 , and forms a groove 41 with an opening at one end thereof away from the actuator 3 .

[0102] Specifically:

[0103] The spacer 4 can be bonded to one side or both sides of the substrate 31 constituting the actuator 3 in the thickness direction. At this time, it is not difficult to understand that the spacer 4 can be bonded to either one side of the substrate 31 in the thickness direction or the other side of the substrate 31 in the thickness direction. Figure 5 and Figure 6 As shown, of course, when there are multiple spacers 4 at the same time, for example, the open fluid generating device of the present application can have a bidirectional working function. At this time, the two main surfaces of the actuator 3 need to be provided with spacers 4, and the spacers 4 can be respectively provided on the two side surfaces of the substrate 31 in the thickness direction, such as Figure 7 As shown; Under this structure, when the spacer 4 and the piezoelectric sheet 32 ​​are arranged on the same side surface of the substrate 31 in the thickness direction, the piezoelectric sheet 32 ​​is located in the groove 41 of the spacer 4, and at the same time, the spacer 4 has a height protruding from the surface of the piezoelectric sheet 32, as shown in FIG. Figure 6 and Figure 7 When the spacer 4 and the piezoelectric sheet 32 ​​are respectively disposed on both side surfaces of the substrate 31 in the thickness direction, this limitation is not applied; the bonding between the spacer 4 and the substrate 31 may be bonding or integrally formed.

[0104] In addition, the spacer 4 can also be joined to the side surface of the piezoelectric sheet 32 ​​constituting the actuator 3 that is away from the actuator 3. Under this structure, it is not difficult to understand that when the actuator 3 constitutes the above piezoelectric single-chip actuator 3, the spacer 4 can be joined to the side surface of the piezoelectric sheet 32 ​​constituting the piezoelectric single-chip actuator 3 that is away from the substrate 31; when the actuator 3 constitutes the above piezoelectric dual-chip actuator 3, the spacer 4 can be joined to the side surface of the piezoelectric sheet 32 ​​on either side of the piezoelectric dual-chip actuator 3 that is away from the substrate 31. Of course, when there are multiple spacers 4 at the same time, for example, the open fluid generating device of the present application can have a bidirectional working function. At this time, the first main surface 3a and the second main surface 3b of the actuator 3 need to be provided with a spacer 4. The spacer 4 can be respectively provided on the side surfaces of the piezoelectric sheets 32 on both sides of the piezoelectric dual-chip actuator 3 that are away from the substrate 31, such as Figure 8 shown.

[0105] In addition, it is not difficult to understand that when there are multiple spacers 4 at the same time, the bonding methods of the above-mentioned spacers 4 can also be combined with each other. For example, the open fluid generating device of the present application can have a bidirectional working function. At this time, the first main surface 3a and the second main surface 3b of the actuator 3 both need to be provided with spacers 4, wherein at least one spacer 4 is bonded to the surface of the side of the piezoelectric sheet 32 ​​constituting the actuator 3 away from the actuator 3, and at least one spacer 4 is bonded to the side of the substrate 31 away from the actuator 3, such as Fig. 9 As shown; under this structure, the connection between the spacer 4 and the substrate 31 can be adhesively bonded or integrally formed.

[0106] Of course, the joining method of the spacer 4 is not limited to this. The joining method of the spacer 4 follows the principle that the end of the spacer 4 close to the actuator 3 is connected to the actuator 3, and the spacer 4 and the actuator 3 form a groove 41 with an opening at the end facing away from the actuator 3.

[0107] In this embodiment, the actuator 3 is configured as a piezoelectric single-crystal actuator 3, the spacer 4 is one, and the spacer 4 is bonded to the surface of the substrate 31 located on the side where the second main surface 3b of the actuator 3 is located, for easy understanding.

[0108] The spacer 4 is bonded to the surface of the substrate 31 on the side where the second main surface 3b is located, and the end of the spacer 4 close to the substrate 31 is connected to the substrate 31, and the spacer 4 and the substrate 31 surround a groove 41 with an opening at one end away from the substrate 31, such as Figure 5 As shown; the connection between the spacer 4 and the substrate 31 can be bonding or integrally formed, the spacer 4 is an annular structure, so that the inner peripheral wall of the spacer 4 itself encloses the groove portion 41;

[0109] One end of the spacer 4 close to the substrate 31 is joined to the surface of the substrate 31 on the side where the second main surface 3b is located, and the first diaphragm 1 is connected to the end of the spacer 4 facing away from the substrate 31, thereby making the vibration of the actuator 3 directly drive the spacer 4 and the first diaphragm 1 to vibrate, so as to transfer the vibration energy to the first diaphragm 1 through mechanical coupling.

[0110] like Figure 1-3 As shown, the first diaphragm 1 has a first joint portion 11 and a first vibrating portion 12 that are connected to each other. The first joint portion 11 and the first vibrating portion 12 can be integrally formed or fixedly connected. The first diaphragm 1 is fixedly connected to the end of the spacer 4 away from the actuator 3 through the first joint portion 11 to cover the opening of the groove portion 41, so that an excitation cavity 5 is formed between the actuator 3, the groove portion 41 and the first diaphragm 1. The first vibrating portion 12 is formed as the end wall of the excitation cavity 5. Therefore, the first diaphragm 1 is fixedly connected to the actuator 3 through the spacer 4, and the vibration of the actuator 3 causes the first diaphragm 1 to vibrate. This process is accompanied by the transfer of energy. The vibration energy generated by the actuator 3 under the stimulation of the external electrical signal, on the one hand, drives the fluid in the excitation chamber 5 to produce pressure changes when the actuator 3 vibrates, thereby causing the first diaphragm 1 to vibrate and transfer the energy to the first diaphragm 1. More importantly, the energy is directly transferred to the first diaphragm 1 through the mechanical coupling formed by the actuator 3 and the first diaphragm 1. The energy transfer efficiency is high, and the extremely small vibration displacement of the actuator 3 can cause the first diaphragm 1 to produce a displacement several times or even dozens of times the vibration displacement of the actuator 3.

[0111] The first diaphragm 1 is provided with a first partition 7, which partitions the first vibrating portion 12 into at least two first vibrating areas 121, and at least a portion of the first partition 7 is located between two adjacent first vibrating areas 121; the ability of the area of ​​the first diaphragm 1 opposite to the first partition 7 to resist elastic deformation when subjected to force is greater than the ability of the first vibrating area 121 of the first diaphragm 1 to resist elastic deformation when subjected to force, thereby, the energy required to induce the area of ​​the first diaphragm 1 opposite to the first partition 7 to vibrate is much greater than the energy required to induce the first vibrating area 121 to vibrate, which is equivalent to the first diaphragm 1 opposite to the first partition 7. The area opposite to the first partition 7 is substantially constrained, and the vibration is suppressed. The vibration energy transmitted to the first diaphragm 1 by the actuator 3 will mainly act on the first vibration zone 121, causing the first vibration zone 121 to generate a large amplitude, while the area of ​​the first diaphragm 1 opposite to the first partition 7 does not vibrate or generates a small vibration, thereby reducing energy loss. In addition, the first vibration part 12 is divided into a plurality of first vibration zones 121 by the first partition 7, so that the effective working space of the excitation cavity 5 between the actuator 3 and the first diaphragm 1 is not mainly concentrated in the central area of ​​the first diaphragm 1, but is extended to a larger area than the central area, thereby achieving a higher utilization rate of the vibration energy.

[0112] like Figure 1 , 2 As shown in Figure 4, the second diaphragm 2 has a second joint portion 21 and a second vibrating portion 22 connected to each other, the second joint portion 21 can be integrally formed with the second vibrating portion 22 or fixedly connected, the second joint portion 21 is fixed (for example, the second joint portion 21 can be fixed to the substrate of the electronic device, and the center of the substrate can have an opening to avoid the second vibrating portion 22), so that the second diaphragm 2 is arranged at intervals on the side of the first diaphragm 1 away from the actuator 3, so that a pump chamber 6 is formed between the first diaphragm 1 and the second diaphragm 2;

[0113] The second vibrating portion 22 is arranged opposite to the first vibrating portion 12, and the second diaphragm 2 further has a second partition 8, which partitions the second vibrating portion 22 of the second diaphragm 2 into at least two second vibrating regions 221, and at least a portion of the second partition 8 is located between two adjacent second vibrating regions 221, and the region of the second diaphragm 2 opposite to the second partition 8 has a greater ability to resist elastic deformation when a force is applied than the second vibrating region 221 of the second diaphragm 2.

[0114] The second vibration area 221 is penetrated by at least one hole 221a connected to the pump chamber 6; when the actuator 3 vibrates under the excitation of the electrical signal, the vibration energy is transmitted to the first diaphragm 1 to promote the first diaphragm 1 to vibrate, thereby promoting the second diaphragm 2 to vibrate. When the pump chamber 6 inhales fluid, the external fluid enters the pump chamber 6 along the outer peripheral side of the pump chamber 6. When the pump chamber 6 discharges fluid, the fluid in the pump chamber 6 is discharged along the hole 221a. The specific description is as follows:

[0115] The vibration energy of the first diaphragm 1 causes the pump chamber 6 formed between the first diaphragm 1 and the second diaphragm 2 to produce pressure changes, and then further transmits the vibration energy to the second diaphragm 2, causing the second diaphragm 2 to vibrate; the first diaphragm 1 is formed as an excitation source to excite the fluid in the pump chamber 6 to produce pressure changes. The vibration system composed of the first diaphragm 1, the pump chamber 6 and the second diaphragm 2 can be equivalent to a two-degree-of-freedom vibration system. The second diaphragm 2 and the first diaphragm 1 can produce substantially the same frequency vibration with a certain phase difference. There must be a frequency or frequency band that makes the vibration phase difference between the second diaphragm 2 and the first diaphragm 1 close to 180°, which is conducive to further increasing The volume change of the pump chamber 6 during operation is increased; in addition, similar to the arrangement of the first partition 7 on the first diaphragm 1, the energy required to cause the area of ​​the second diaphragm 2 opposite to the second partition 8 to vibrate is much greater than the energy required to cause the second vibration zone 221 to vibrate, which is equivalent to the area of ​​the second diaphragm 2 opposite to the second partition 8 being substantially constrained and the vibration being suppressed. The vibration energy transmitted from the first diaphragm 1 to the second diaphragm 2 will mainly act on the second vibration zone 221, causing the second vibration zone 221 to generate a large amplitude, while the area of ​​the second diaphragm 2 opposite to the second partition 8 does not vibrate or generates a small vibration.

[0116] In addition, the second vibration part 22 is divided into a plurality of second vibration zones 221 by the second partition part 8, so that the effective working space of the pump chamber 6 formed between the first diaphragm 1 and the second diaphragm 2 is not mainly concentrated in the central area of ​​the relatively arranged first diaphragm 1 and the second diaphragm 2, but extends to a larger area than the central area, thereby achieving a higher utilization rate of the vibration energy.

[0117] There is at least one second vibration area 221 formed at both ends of the pump chamber 6 opposite to the first vibration area 121. Preferably, all second vibration areas 221 are formed at both ends of the pump chamber 6 opposite to the first vibration area 121. When the actuator 3 vibrates under the excitation of the electrical signal, it transfers the vibration energy to the first diaphragm 1 to cause the first diaphragm 1 to vibrate, thereby causing the second diaphragm 2 to vibrate. At least one hole portion 221a connected to the pump chamber 6 is penetrated on the second vibration area 221 opposite to the first vibration area 121. The hole portion 221a is arranged on the second vibration area 221 in an area opposite to the maximum amplitude area 121a of the opposite first vibration area 121 or an adjacent area of ​​the maximum amplitude area 121a, such as Figure 2-4 As shown; the adjacent area of ​​the maximum amplitude region 121a of the first vibration zone 121 refers to the area close to the side of the maximum amplitude region 121a but not including the maximum amplitude region 121a in the interval between the maximum amplitude region 121a of the first vibration zone 121 and the adjacent first separator 7.

[0118] Any group of the first vibration area 121 and the second vibration area 221 opposite to each other formed at both ends of the pump chamber 6 constitutes the smallest working unit of the pump chamber 6. During operation, the piezoelectric sheet 32 ​​causes the actuator 3 to vibrate under the stimulation of the electrical signal, and transmits the vibration energy to the first diaphragm 1 to cause the first diaphragm 1 to vibrate, thereby causing the second diaphragm 2 to vibrate. When the first vibration area 121 and the second vibration area 221 relative to the area where the hole 221a is located are deformed away from each other, the volume of the smallest working unit corresponding to the hole 221a in the pump chamber 6 increases, the pressure decreases, and the external fluid enters the pump chamber 6 along the outer peripheral side of the smallest working unit. Fig.10 As shown; when the first vibration zone 121 and the second vibration zone 221 relative to the area where the hole 221a is located are deformed to approach each other, the volume of the minimum working unit corresponding to the hole 221a in the pump chamber 6 becomes smaller, and the pressure increases. The gas sucked into the pump chamber 6 in the previous process is discharged from the pump chamber 6 along the hole 221a with a certain momentum. The fluid with a certain momentum flows out of the hole 221a to form a jet, and can entrain the surrounding fluid to further increase the output flow rate, as shown in FIG. Fig.11 As shown, this goes back and forth.

[0119] The pump chamber 6 formed between the first diaphragm 1 and the second diaphragm 2 is an open chamber, and the hole 221a is arranged on the second diaphragm 2. When the hole 221a is blocked by foreign matter or dust in the air, it is easier to clean; the second diaphragm 2 can even be constructed as a detachable structure to facilitate cleaning.

[0120] In the present embodiment, the first partition portion 7 protrudes from the surface of the first vibration zone 121 of the first diaphragm 1, so that the ability of the first diaphragm 1 opposite to the first partition portion 7 to resist elastic deformation when a force is applied is greater than the ability of the first vibration zone 121 of the first diaphragm 1 to resist elastic deformation when a force is applied; but not limited to this, for example, the first diaphragm 1 itself can also be composed of non-homogeneous materials, or other rigid dielectric bodies (such as metal ribs) can be embedded in the area of ​​the first diaphragm 1 opposite to the first partition portion 7, which can also achieve that the ability of the first diaphragm 1 opposite to the first partition portion 7 to resist elastic deformation when a force is applied is greater than the ability of the first vibration zone 121 of the first diaphragm 1 to resist elastic deformation when a force is applied.

[0121] Similarly, by having the second partition 8 protrude from the surface of the second vibration zone 221 of the second diaphragm 2, it can be achieved that the ability of the second diaphragm 2 opposite to the second partition 8 to resist elastic deformation when a force is applied is greater than the ability of the second vibration zone 221 of the second diaphragm 2 to resist elastic deformation when a force is applied; but not limited to this, for example, the second diaphragm 2 itself can also be made of non-homogeneous material, or other rigid dielectric bodies (such as metal ribs) can be embedded in the area of ​​the second diaphragm 2 opposite to the second partition 8, which can also achieve that the ability of the second diaphragm 2 opposite to the second partition 8 to resist elastic deformation when a force is applied is greater than the ability of the second vibration zone 221 of the second diaphragm 2 to resist elastic deformation when a force is applied.

[0122] like Figure 12-14 As shown, the first partition 7 and the second partition 8 can be respectively formed by shaping the parts of the first diaphragm 1 and the second diaphragm 2, or they can be respectively formed by setting ribs in the local areas on one side or both sides of the first diaphragm 1 and the second diaphragm 2. Of course, it can also be a cross combination of the above methods, which is not limited here. The principle followed is that by setting the first partition 7 and the second partition 8, the ability of the first diaphragm 1 to resist elastic deformation when the area opposite to the first partition 7 is subjected to force is greater than the ability of the first vibration zone 121 of the first diaphragm 1 to resist elastic deformation when the force is applied, and the ability of the second diaphragm 2 to resist elastic deformation when the area opposite to the second partition 8 is subjected to force is greater than the ability of the second vibration zone 221 of the second diaphragm 2 to resist elastic deformation when the force is applied.

[0123] In this embodiment, the first partition 7 and the second partition 8 are respectively formed by shaping parts of the first diaphragm 1 and the second diaphragm 2 for illustration.

[0124] As for the first diaphragm 1, the first partition portion 7 is formed by shaping a local area of ​​the first diaphragm 1 and has a first partition rib 73 protruding from the first diaphragm 1; that is, a local area of ​​the first diaphragm 1 is shaped to form the first partition portion 7, and the first partition portion 7 is the first partition rib 73 arranged on the first vibration portion 12 and protruding from the surface of the first vibration zone 121 of the first diaphragm 1.

[0125] The first rib 73 protrudes from the first diaphragm 1. The first rib 73 may be entirely protruded toward the side of the first diaphragm 1 away from the actuator 3 or toward the side of the first diaphragm 1 toward the actuator 3. Fig.13As shown; part of the first partition rib 73 may protrude toward the side of the first diaphragm 1 away from the actuator 3, while another part of the first partition rib 73 protrudes toward the side of the first diaphragm 1 toward the actuator 3; or the first partition rib 73 protruding from the first diaphragm 1 may have both a part protruding toward the side of the first diaphragm 1 away from the actuator 3 and a part protruding toward the side of the first diaphragm 1 toward the actuator 3, which is not limited here. The cross-sectional shape of the first partition rib 73 may be angular, sawtooth, or wavy, which is also not limited here.

[0126] In addition, it should be noted that the first partition 7 can be a continuous integral structure, such as Fig.12 As shown, the first partition 7 can also be formed as a plurality of first partition bars 7-1 arranged at intervals, that is, the first partition 7 is a plurality of first partition bars 7-1 arranged discretely, such as Fig.15 As shown, in principle, it is sufficient as long as the separation of the first vibration area 121 can be achieved.

[0127] Similarly, with respect to the second diaphragm 2, the second partition 8 is formed by shaping a local area of ​​the second diaphragm 2 and has a second partition rib 83 protruding from the second diaphragm 2, such as Fig.14 As shown; that is, a local area of ​​the second diaphragm 2 is formed into a second partition 8 by shaping, and the second partition 8 is a second partition rib 83 arranged on the second vibration part 22 and protruding from the surface of the second vibration area 221 of the second diaphragm 2; the second partition 8 can be a continuous integral structure, and the second partition 8 can also be formed into a plurality of second partition strips 8-1 arranged at intervals, that is, the second partition 8 is a plurality of second partition strips 8-1 arranged discretely, such as Fig.16 As shown; the second partition 8 can adopt the same structural form and setting method as the first partition 7, which will not be repeated here.

[0128] The spacer 4 is a continuous annular structure, the inner peripheral wall of the spacer 4 and the substrate 31 enclose an annular groove 41, and the end of the spacer 4 away from the substrate 31 is fully or partially engaged with the first diaphragm 1 on an annular path around the groove 41, or the spacer 4 has a plurality of discrete spacers 42 distributed in an annular shape, such as Fig.17 As shown, the spacers 42 are all joined to the first main surface 3a or the second main surface 3b, and multiple spacers 42 are spaced apart and distributed along a circular path around the excitation cavity 5 to form a groove 41 with the actuator 3, and the end of the spacer 42 facing away from the actuator 3 is fully or partially joined to the first diaphragm 1.

[0129] That is, the substrate 31, the first diaphragm 1 and the spacer 4 form an excitation cavity 5, and the spacer 4 forms the inner wall of the excitation cavity 5. The inner wall of the excitation cavity 5 can be closed, without a channel connected to the outside, and the spacer 4 is an annular structure; the inner wall of the excitation cavity 5 can also be open, and the spacer 4 has a plurality of discrete spacers 42 distributed in an annular shape, and the gaps between the plurality of spacers 42 arranged at intervals form a channel connected to the outside, and the channel connects the excitation cavity 5.

[0130] The first diaphragm 1 / the second diaphragm 2 can be composed of metal film materials, such as copper foil, titanium foil, stainless steel foil, etc. Preferably, the first diaphragm 1 / the second diaphragm 2 is composed of polymer materials, such as PET, PI, PPS, PEI, FEP or other polymer film materials, or the first diaphragm 1 / the second diaphragm 2 is composed of a composite material composed of a polymer material and other metal materials, such as PI copper clad laminate / film, PET copper clad laminate / film, PET nickel-plated laminate / film, carbon fiber metal composite laminate / film, etc.; whether it is a polymer material or a composite material composed of a polymer material and other materials, compared with metal materials, they all show the characteristics of light weight and high elastic strain limit, and the limit amplitude during resonance is usually much higher than that of metal materials, which is particularly suitable for high requirements on flow output, such as heat dissipation of smart 3C terminal products.

[0131] Example 2

[0132] The difference between Example 2 and Example 1 is that the first partition 7 and the second partition 8 are formed by providing convex ribs in a local area on one side of the first diaphragm 1 and the second diaphragm 2;

[0133] As for the first diaphragm 1:

[0134] The first partition portion 7 may be formed by providing a first rib 71 in a local area of ​​the first diaphragm 1 on a side away from the actuator 3, the first rib 71 protruding from the first diaphragm 1, the first rib 71 having a first partition 711 provided on the first vibration portion 12, the first partition 711 partitioning the first vibration portion 12 into at least two first vibration areas 121, the first partition 711 being provided on a side of the first vibration portion 12 away from the actuator 3, and the first partition 711 protruding from the surface of the first vibration area 121 of the first diaphragm 1, as shown in FIG. Fig.18 As shown; in addition, the first rib 71 also has a first extension section 712 extending from the first partition section 711 to the first joining portion 11, the first extension section 712 protrudes from the surface of the first vibration zone 121, and the first extension section 712 is fixedly connected to the side of the first joining portion 11 away from the partition section 4.

[0135] Of course, the first partition portion 7 can also be formed by providing a first rib 71 in a local area of ​​the first diaphragm 1 facing the actuator 3, and the first partition section 711 constituting the first rib 71 is provided on the side of the first vibrating portion 12 facing the actuator 3, such as Fig.21 As shown; in addition, the first rib 71 further includes a first extension section 712 extending from the first partition section 711 to the first joint portion 11, the first extension section 712 protrudes from the surface of the first vibration region 121 of the first diaphragm 1, and the first extension section 712 is fixedly clamped between the first joint portion 11 of the first diaphragm 1 and the partition portion 4, and even the first partition section 711 constituting the first rib 71 can be connected to the actuator 3 on one side facing the actuator 3, as shown in FIG. Fig.19 and 20 shown.

[0136] It should be noted that when the partition segments constituting the first rib 71 are connected to the actuator 3 on the side facing the actuator 3, and the first partition portion 7 is arranged to be a first partition portion 7 of a continuous integral structure, especially when the first partition segments 711 constituting the first partition portion 7 are formed into a continuous integral structure, the excitation cavity 5 is formed into a plurality of spaced sub-cavities, and the number of the sub-cavities matches the number of the first vibration zones 121.

[0137] Likewise, with respect to the second diaphragm 2:

[0138] The second partition portion 8 can be formed by setting a third rib 81 in a local area on the side of the second diaphragm 2 away from the first diaphragm 1, the third rib 81 protrudes from the second diaphragm 2, the third rib 81 has a third partition segment 811 set on the second vibration portion 22, the third partition segment 811 divides the second vibration portion 22 into at least two second vibration areas 221; the third partition segment 811 is set on the side of the second vibration portion 22 away from the first diaphragm 1; in addition, the third rib 81 also has a third extension segment 812 extending from the third partition segment 811 to the second joint portion 21, and the third extension segment 812 is fixedly connected to the side of the second joint portion 21 away from the partition portion 4.

[0139] Of course, the second partition portion 8 can also be formed by setting a third rib 81 in a local area on the side of the second diaphragm 2 facing the first diaphragm 1, and the third partition segment 811 constituting the third rib 81 is arranged on the side of the second vibration portion 22 facing the first diaphragm 1; in addition, the third rib 81 also has a third extension segment 812 extending from the third partition segment 811 to the second joint portion 21, the third extension segment 812 protrudes from the surface of the second vibration zone 221 of the second diaphragm 2, and the third extension segment 812 is fixed on the side of the second joint portion 21 facing the partition portion 4.

[0140] The first partition 7 may be a first partition 7 of a continuous integral structure, that is, the first rib 71 constituting the first partition 7 forms a continuous integral structure while dividing the first vibration portion 12 of the first diaphragm 1 into at least two first vibration areas 121; the first partition 7 may also be a plurality of discretely arranged first partition strips 7-1, such as Fig.15 As shown, that is, the first rib 71 constituting the first partition portion 7 is discretely arranged while dividing the first vibration portion 12 of the first diaphragm 1 into at least two first vibration areas 121;

[0141] Similarly, the second partition 8 can be a second partition 8 of a continuous integral structure, that is, the third rib 81 constituting the second partition 8 forms a continuous integral structure while dividing the second vibration portion 22 of the second diaphragm 2 into at least two second vibration areas 221; the second partition 8 can also be a plurality of discretely arranged second partition strips 8-1, such as Fig.16 As shown, that is, the third rib 81 constituting the second partition portion 8 is discretely arranged while partitioning the second vibration portion 22 of the second diaphragm 2 into at least two second vibration areas 221 .

[0142] The first rib 71 is integrally formed with or fixedly connected to the first diaphragm 1. The first rib 71 may be made of the same material as the first diaphragm 1, or may be made of a different material from the first diaphragm 1. For example, when the first diaphragm 1 is made of a polyimide film, the material of the first rib 71 may be a polyimide film material or SUS304 stainless steel. The material of the first rib 71 is not limited here, but the principle to be followed is to ensure that the ability of the area of ​​the first diaphragm 1 opposite to the first partition 7 to resist elastic deformation when subjected to force is greater than the ability of the first vibration zone 121 of the first diaphragm 1 to resist elastic deformation when subjected to force, so that the first partition 7 separates the first vibration zone 12 of the first diaphragm 1 to form at least two first vibration zones 121. In addition, the first rib 71 constituting the first partition 7 may be of uniform cross-section or variable cross-section, which is not limited here.

[0143] The third rib 81 is integrally formed with or fixedly connected to the second diaphragm 2. The third rib 81 may be made of the same material as the second diaphragm 2, or may be made of a different material from the second diaphragm 2. For example, when the second diaphragm 2 is made of a polyimide film, the third rib 81 may be made of a polyimide film or SUS304 stainless steel. The material of the third rib 81 is not limited here, but the principle to be followed is to ensure that the ability of the area of ​​the second diaphragm 2 opposite to the second partition 8 to resist elastic deformation when subjected to force is greater than the ability of the second vibration zone 221 of the second diaphragm 2 to resist elastic deformation when subjected to force, so that the second partition 8 separates the second vibration zone 22 of the second diaphragm 2 to form at least two second vibration zones 221. In addition, the third rib 81 constituting the second partition 8 may be of a uniform cross-section or a variable cross-section, which is not limited here.

[0144] Example 3

[0145] The difference between this embodiment and the second embodiment is that the first partition 7 and the second partition 8 are formed by providing convex ribs in local areas on both sides of the first diaphragm 1 and the second diaphragm 2;

[0146] As for the first diaphragm 1:

[0147] The first partition part 7 is formed by arranging a first convex rib 71 facing the actuator 3 and a second convex rib 72 facing away from the actuator 3 in local areas on both sides of the first diaphragm 1. The first convex rib 71 has a first partition section 711 arranged on the first vibration part 12, and the second convex rib 72 has a second partition section 721 arranged on the first vibration part 12. The first partition section 711 and the second partition section 721 both protrude from the first diaphragm 1. Fig. 20 and 23 As shown; even, the first partition segment 711 is connected to the actuator 3 on the side facing the actuator 3.

[0148] The first rib 71 may further include a first extension section 712 extending from the first partition section 711 to the first joint portion 11 , or / and the second rib 72 may further include a second extension section 722 extending from the second partition section 721 to the joint portion;

[0149] The first extension section 712 protrudes from the surface of the first vibration area 121 of the first diaphragm 1, and the first extension section 712 is fixedly clamped between the first joint portion 11 of the first diaphragm 1 and the spacer portion 4;

[0150] The second extension section 722 protrudes from the surface of the first vibration region 121 of the first diaphragm 1 , and the second extension section 722 is fixedly connected to a side of the first joint portion 11 of the first diaphragm 1 that is away from the spacer portion 4 .

[0151] The first rib 71 and the second rib 72 may be made of the same or different materials.

[0152] As for the second diaphragm 2:

[0153] The second partition portion 8 is formed by arranging a third rib 81 facing the actuator 3 and a fourth rib 82 facing away from the actuator 3 in local areas on both sides of the second diaphragm 2; the third rib 81 has a third partition segment 811 arranged on the second vibration portion 22, and the fourth rib 82 has a fourth partition segment 821 arranged on the second vibration portion 22, and the third partition segment 811 and the fourth partition segment 821 both protrude from the second diaphragm 2.

[0154] The third rib 81 may further include a third extension section 812 extending from the third partition section 811 to the second joint portion 21 or / and the fourth rib 82 may further include a fourth extension section 822 extending from the fourth partition section 821 to the second joint portion 21;

[0155] The third extension section 812 protrudes from the surface of the second vibration area 221 of the second diaphragm 2, and the third extension section 812 is fixed on a side of the second joint portion 21 facing the spacer portion 4;

[0156] The fourth extension section 822 protrudes from the surface of the second vibration region 221 of the second diaphragm 2, and the fourth extension section 822 is fixedly connected to the side of the second joint portion 21 of the second diaphragm 2 away from the spacer portion 4, such as Fig.17 shown.

[0157] The third rib 81 and the fourth rib 82 may be made of the same or different materials.

[0158] It should be noted that the first convex rib 71 and the second convex rib 72 located on both sides of the first diaphragm 1 may have the same structure or different structures, and may be arranged opposite to each other or staggered.

[0159] The third convex rib 81 and the fourth convex rib 82 located on both sides of the second diaphragm 2 may have the same structure or different structures, and may be arranged opposite to each other or staggered.

[0160] The above-mentioned ideal embodiments of the present invention are for inspiration. Through the above-mentioned description, relevant staff can make various changes and modifications without departing from the technical idea of ​​the present invention. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. An open fluid generating device, characterized in that: include: A substrate (31) having at least one piezoelectric sheet (32) bonded to one or both surfaces in a thickness direction, the piezoelectric sheet (32) being bonded to the substrate (31) to form an actuator (3), the actuator (3) having a first main surface (3a) and a second main surface (3b) arranged opposite to each other in the thickness direction; A spacer (4), wherein the first main surface (3a) or / and the second main surface (3b) are joined with the spacer (4), the spacer (4) is joined with the actuator (3) at one end close to the actuator (3), and the spacer (4) and the actuator (3) form a groove (41) having an opening at one end facing away from the actuator (3); A first diaphragm (1) having a first joint portion (11) and a first vibrating portion (12) connected to each other; the first diaphragm (1) is fixedly connected to an end of the spacer portion (4) away from the actuator (3) through the first joint portion (11) to cover the opening of the groove portion (41), so that an excitation cavity (5) is formed between the actuator (3), the groove portion (41) and the first diaphragm (1); the first vibrating portion (12) forms an end wall of the excitation cavity (5); a first partition portion (7) is provided on the first diaphragm (1) to partition the first vibrating portion (12) into at least two first vibrating areas (121); the area of ​​the first diaphragm (1) opposite to the first partition portion (7) has a greater ability to resist elastic deformation when a force is applied than the first vibrating area (121) of the first diaphragm (1); and a second diaphragm (2) having a second joint portion (21) and a second vibrating portion (22) connected to each other, the second joint portion (21) being fixed so that the second diaphragm (2) is spaced apart from the actuator (3) side of the first diaphragm (1), a pump chamber (6) being formed between the first diaphragm (1) and the second diaphragm (2), the second diaphragm (2) being provided with a second partition portion (8) for partitioning the second vibrating portion (22) into at least two second vibrating regions (221), the region of the second diaphragm (2) opposite to the second partition portion (8) having a greater ability to resist elastic deformation when subjected to force than the second vibrating region (221) of the second diaphragm (2), and the second vibrating region (221) being penetrated by at least one hole portion (221a) communicating with the pump chamber (6); When the actuator (3) vibrates under the stimulation of an electrical signal, it transmits vibration energy to the first diaphragm (1), thereby prompting the first diaphragm (1) to vibrate, thereby prompting the second diaphragm (2) to vibrate.

2. The open flow generating device according to claim 1, characterized in that: The second vibration part (22) is arranged opposite to the first vibration part (12); there is at least one second vibration area (221) formed opposite to the first vibration area (121) at two ends of the pump chamber (6); At least one hole (221a) communicating with the pump chamber (6) is penetrated through the second vibration area (221) opposite to the first vibration area (121); When the pump chamber (6) inhales fluid, external fluid enters the pump chamber (6) along the outer peripheral side of the pump chamber (6), and when the pump chamber (6) discharges fluid, the fluid in the pump chamber (6) is discharged along the hole portion (221a).

3. The open flow generating device according to claim 2, characterized in that: The hole portion (221a) is arranged in an area on the second vibration area (221) that is opposite to the maximum amplitude area (121a) of the opposed first vibration area (121) or an area adjacent to the maximum amplitude area (121a).

4. The open flow generating device according to claim 1, characterized in that: The first partition (7) protrudes from the surface of the first vibration area (121) of the first diaphragm (1), and at least a portion of the first partition (7) is located between two adjacent first vibration areas (121); The second partition (8) protrudes from the surface of the second vibration area (221) of the second diaphragm (2), and at least a part of the area of ​​the second partition (8) is located between two adjacent second vibration areas (221).

5. The open flow generating device according to claim 4, characterized in that: A local area of ​​the first diaphragm (1) is shaped to form the first partition (7), and the first partition (7) is a first partition rib (73) arranged on the surface of the first vibration area (121) of the first diaphragm (1).

6. The open flow generating device according to claim 4, characterized in that: The first partition (7) is formed by providing a first convex rib (71) in a local area on one side of the first diaphragm (1); The first convex rib (71) comprises a first partition (711) arranged on the first vibration part (12), the first partition (711) protruding from the surface of the first vibration area (121) of the first diaphragm (1), and the first partition (711) divides the first vibration part (12) into at least two first vibration areas (121).

7. The open flow generating device according to claim 6, characterized in that: The first convex rib (71) is arranged on a side of the first diaphragm (1) facing away from the actuator (3), and the first partition (711) constituting the first convex rib (71) is arranged on a side of the first vibration part (12) of the first diaphragm (1) facing away from the actuator (3).

8. The open flow generating device according to claim 7, characterized in that: The first convex rib (71) further comprises a first extension section (712) extending from the first partition section (711) to the first joint portion (11), the first extension section (712) protruding from the surface of the first vibration zone (121), and the first extension section (712) being fixedly connected to a side of the first joint portion (11) facing away from the partition section (4).

9. The open flow generating device according to claim 6, characterized in that: The first convex rib (71) is arranged on a side of the first diaphragm (1) facing the actuator (3), and the first partition (711) constituting the first convex rib (71) is arranged on a side of the first vibration part (12) of the first diaphragm (1) facing the actuator (3).

10. The open flow generating device according to claim 9, characterized in that: The first rib (71) also has a first extension section (712) extending from the first partition section (711) to the first joint portion (11), the first extension section (712) protruding from the surface of the first vibration area (121) of the first diaphragm (1), and the first extension section (712) is fixedly clamped between the first joint portion (11) of the first diaphragm (1) and the partition portion (4).

11. The open flow generating device according to claim 9, characterized in that: The side of the first partition (711) facing the actuator (3) is fixedly connected to the actuator (3).

12. The open flow generating device according to claim 4, characterized in that: The first partition (7) is formed by arranging a first convex rib (71) facing the actuator (3) and a second convex rib (72) facing away from the actuator (3) in local areas on both sides of the first diaphragm (1); The first convex rib (71) has a first partition (711) arranged on the first vibrating portion (12); The second convex rib (72) has a second partition (721) arranged on the first vibrating portion (12); The first partition section (711) and the second partition section (721) both protrude from the first diaphragm (1).

13. The open flow generating device according to claim 12, characterized in that: The first convex rib (71) further comprises a first extension section (712) extending from the first partition section (711) to the first joint portion (11) or / and the second convex rib (72) comprises a second extension section (722) extending from the second partition section (721) to the joint portion; The first extension section (712) protrudes from the surface of the first vibration area (121) of the first diaphragm (1), and the first extension section (712) is fixedly clamped between the first joint portion (11) of the first diaphragm (1) and the spacer portion (4); The second extension section (722) protrudes from the surface of the first vibration area (121) of the first diaphragm (1), and the second extension section (722) is fixedly connected to the side of the first joint portion (11) of the first diaphragm (1) facing away from the spacer portion (4).

14. The open flow generating device according to claim 12, characterized in that: The side of the first partition (711) facing the actuator (3) is fixedly connected to the actuator (3).

15. The open flow generating device according to claim 12, characterized in that: The materials constituting the first convex rib (71) and the second convex rib (72) are the same or different.

16. The open flow generating device according to claim 4, characterized in that: A local area of ​​the second diaphragm (2) is shaped to form the second partition (8), and the second partition (8) is a second partition rib (83) arranged on the second vibration part (22) and protruding from the surface of the second vibration area (221) of the second diaphragm (2).

17. The open flow generating device according to claim 4, characterized in that: The second partition (8) is formed by providing a third convex rib (81) in a local area on one side of the second diaphragm (2); The third convex rib (81) has a third partition (811) arranged on the second vibration part (22), the third partition (811) protrudes from the surface of the second vibration area (221) of the second diaphragm (2), and the third partition (811) divides the second vibration part (22) into at least two second vibration areas (221).

18. The open flow generating device according to claim 17, characterized in that: The third convex rib (81) is arranged on the side of the second diaphragm (2) away from the actuator (3), and the third partition (811) constituting the third convex rib (81) is arranged on the side of the second vibration part (22) of the second diaphragm (2) away from the actuator (3).

19. The open flow generating device according to claim 18, characterized in that: The third convex rib (81) further comprises a third extension section (812) extending from the third partition section (811) to the second joint portion (21), the third extension section (812) protruding from the surface of the second vibration zone (221), and the third extension section (812) is fixedly connected to a side of the second joint portion (21) facing away from the partition section (4).

20. The open flow generating device according to claim 17, characterized in that: The third convex rib (81) is arranged on the side of the second diaphragm (2) facing the actuator (3), and the third partition (811) constituting the third convex rib (81) is arranged on the side of the second vibration part (22) of the second diaphragm (2) facing the actuator (3).

21. The open flow generating device according to claim 20, characterized in that: The third rib (81) also has a third extension section (812) extending from the third partition section (811) to the second joint portion (21), the third extension section (812) protruding from the surface of the second vibration area (221) of the second diaphragm (2), and the third extension section (812) is fixed on the side of the second joint portion (21) facing the partition portion (4).

22. The open flow generating device according to claim 4, characterized in that: The second partition (8) is formed by arranging a third convex rib (81) facing the actuator (3) and a fourth convex rib (82) facing away from the actuator (3) in local areas on both sides of the second diaphragm (2); The third convex rib (81) has a third partition (811) arranged on the second vibrating portion (22); The fourth convex rib (82) has a fourth partition (821) arranged on the second vibrating portion (22); The third partition section (811) and the fourth partition section (821) both protrude from the second diaphragm (2).

23. The open flow generating device according to claim 22, characterized in that: The third convex rib (81) further comprises a third extension section (812) extending from the third partition section (811) to the second joint portion (21), and / or the fourth convex rib (82) comprises a fourth extension section (822) extending from the fourth partition section (821) to the second joint portion (21); The third extension section (812) protrudes from the surface of the second vibration area (221) of the second diaphragm (2), and the third extension section (812) is fixed on a side of the second joint portion (21) facing the spacer portion (4); The fourth extension section (822) protrudes from the surface of the second vibration area (221) of the second diaphragm (2), and the fourth extension section (822) is fixedly connected to the side of the second joint portion (21) of the second diaphragm (2) that is away from the spacing portion (4).

24. The open flow generating device according to claim 12, characterized in that: The materials constituting the third convex rib (81) and the fourth convex rib (82) are the same or different.

25. The open flow generating device according to any one of claims 1 to 4, 6 to 15 and 17 to 24, characterized in that: The first partition (7) is integrally formed with or fixedly connected to the first diaphragm (1); The second partition (8) is integrally formed with or fixedly connected to the second diaphragm (2).

26. The open flow generating device according to any one of claims 1 to 24, characterized in that: The first partition (7) is a continuous integral structure in the area on the same side of the first diaphragm (1); or the first partition (7) is formed into a plurality of first partition strips (7-1) arranged at intervals in the area on the same side of the first diaphragm (1); The second partition (8) is a continuous integral structure in the area on the same side of the second diaphragm (2); or, the second partition (8) is formed as a plurality of second partition strips (8-1) arranged at intervals in the area on the same side of the second diaphragm (2).

27. The open flow generating device according to any one of claims 1 to 24, characterized in that: The spacer (4) is an annular structure, the inner peripheral wall of the spacer (4) and the actuator (3) enclose an annular groove (41), and the end of the spacer (4) away from the actuator (3) is fully or partially engaged with the first diaphragm (1) on an annular path around the groove (41); Alternatively, the spacer portion (4) has a plurality of spacers (42), and the spacers (42) of the same spacer portion (4) are all joined to the first main surface (3a) or the second main surface (3b), and the plurality of spacers (42) are spaced and distributed along a circular path around the excitation cavity (5) to enclose the groove portion (41) with the actuator (3), and one end of the spacer (42) facing away from the actuator (3) is fully or partially joined to the first diaphragm (1).

28. The open flow generating device according to any one of claims 1 to 24, characterized in that: The first diaphragm (1) is made of a polymer material, or a composite material of a polymer material and a metal material; the second diaphragm (2) is made of a polymer material, or a composite material of a polymer material and a metal material.

29. The open flow generating device according to any one of claims 1 to 24, characterized in that: When the actuator (3) vibrates under the stimulation of an electrical signal, the first diaphragm (1) and the second diaphragm (2) generate vibrations with a certain phase difference.

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