Compact extreme ultraviolet broadband spectrometer

Abstract

A compact extreme ultraviolet broadband spectrometer disclosed by the present invention comprises a laser plasma light source and a bearing mechanism, the bearing mechanism comprises a light source cavity and a collection cavity, the axes of the light source cavity and the collection cavity are on the same straight line, the light source cavity is communicated with the collection cavity through a first connecting pipe, and a light splitting element is arranged on the upper surface of the light source cavity. A non-periodic Al / Zr multilayer film spherical reflector is arranged on the upper surface of the collecting cavity, the other side of the light source cavity is connected with a CCD sensor through a second connecting pipe, and a stray light restraining mechanism is arranged on the second connecting pipe and located between the CCD sensor and the light splitting element. According to the compact extreme ultraviolet broadband spectrometer, the spectral resolution and the transmission efficiency are guaranteed, meanwhile, the extra space requirement and the introduction of extra aberration caused by using a reflective grating are avoided, and the spectral resolution is improved.

Description

Technical Field

[0001] The invention relates to the technical field of spectrum analysis instruments, and in particular to a compact extreme ultraviolet broadband spectrometer. Background Art

[0002] Spectroscopic research in the extreme ultraviolet band (10-60nm) plays a vital role in science and industry. The 24-32nm band is closely related to research in plasma diagnostics, materials science, semiconductor manufacturing, and astronomy, and has extremely high research value. The extreme ultraviolet spectrometer provides a high-resolution spectral research method, which is of great significance for the in-depth characterization of the electronic structure of matter, energy level transitions, and plasma characteristics. However, the current extreme ultraviolet spectrometer still has some shortcomings:

[0003] 1) Traditional extreme ultraviolet spectrometers widely use grazing incidence structures. This design causes light to reflect at an angle close to the surface incident angle, thereby reducing light absorption and scattering. It can achieve higher reflectivity in the high-energy photon band and is suitable for high-resolution spectral research. However, this structure brings the following disadvantages: ① The large-angle reflection element makes the spectrometer larger. ② In order to reduce the aberration caused by the grazing incidence structure, the grazing incidence element needs to have a more complex surface shape (such as a toroid, cylinder, etc.), which increases the difficulty and cost of component preparation. ③ The assembly and calibration process of the grazing incidence structure is relatively difficult, which greatly affects the application of the spectrometer system.

[0004] 2) Although some EUV spectrometers use a normal-incidence structure, which is more compact and has lower system assembly difficulty and preparation cost, they face the problem of low system efficiency. With the emergence of multilayer film technology, the efficiency of reflective elements under normal-incidence working conditions has been greatly improved, such as the 13.5nm Mo / Si multilayer film used in lithography technology. In addition, in order to expand the application bandwidth, non-periodic multilayer film technology has also been more widely used. However, for the 24-32nm band, the traditional Mo / Si material pair does not show good reflection performance. The maximum uniform reflectivity that can be achieved in theory is only 10%, and the problem of low efficiency of the spectrometer system still exists.

[0005] 3) Some EUV spectrometers use gas discharge plasma equipment or synchrotron radiation accelerators as the EUV light source of the system. The former is a common laboratory light source with good radiation stability, but it has disadvantages such as low intensity and discontinuous spectrum, which greatly limits the performance of the spectrometer. Synchrotron radiation source can produce high-stability, high-intensity continuous radiation, but its use has a complex process and is limited by user time, making the application of spectrometers more difficult. Summary of the invention

[0006] The purpose of the present invention is to provide a compact extreme ultraviolet broadband spectrometer, which solves the problems of large system volume and difficult installation and adjustment caused by the grazing incidence structure of traditional extreme ultraviolet band spectrometers.

[0007] To achieve the above-mentioned purpose, the present invention provides a compact extreme ultraviolet broadband spectrometer, comprising a laser plasma light source and a supporting mechanism, wherein the supporting mechanism comprises a light source cavity and a collecting cavity whose axes are on the same straight line, the light source cavity is connected to the collecting cavity through a first connecting tube, a spectroscopic element is arranged on the upper surface of the light source cavity, a non-periodic Al / Zr multilayer spherical reflector is arranged on the upper surface of the collecting cavity, a CCD sensor is connected to the other side of the light source cavity through a second connecting tube, and a stray light suppression mechanism is arranged on the second connecting tube between the CCD sensor and the spectroscopic element.

[0008] Preferably, the light source cavity and the collecting cavity are both cylindrical cavity structures with closed upper and lower ends, the diameter of the light source cavity is larger than the diameter of the collecting cavity, the interiors of the light source cavity and the collecting cavity are both vacuum environments, and four waist-shaped holes are provided at the bottom of the light source cavity and the collecting cavity.

[0009] Preferably, the non-periodic Al / Zr multilayer spherical reflector is used to collect the extreme ultraviolet plasma radiation generated by the laser plasma light source and focus the extreme ultraviolet plasma radiation onto the surface of the CCD sensor;

[0010] The non-periodic Al / Zr multilayer spherical reflector has an aperture of 25.4 mm and a thickness of 7 mm. The non-periodic Al / Zr multilayer spherical reflector adopts a concave spherical substrate made of SiO2. The surface roughness of the concave spherical surface after fine polishing is less than 0.5 nm, the radius of curvature is 641.523 mm, and the error is less than 0.5%;

[0011] The non-periodic Al / Zr multilayer spherical reflector is made by stacking film layers with different periodic thicknesses. The absorption edges of Al and Zr of the non-periodic Al / Zr multilayer spherical reflector are far away from the 24-32nm band. The working angle of the non-periodic Al / Zr reflector is an incident angle of 2°. The distance between the non-periodic Al / Zr reflector and the laser plasma light source is 500mm, and the distance between the non-periodic Al / Zr reflector and the CCD sensor is 900mm.

[0012] Preferably, the spectroscopic element is used to split the plasma extreme ultraviolet radiation spectrum, the spectroscopic element is fixed at a distance of 300 mm from the CCD sensor through a first optical bracket, and the spectroscopic element uses a 1000 line / mm large-aperture gold transmission grating;

[0013] The stray light suppression mechanism is used to filter out visible light and protect the CCD sensor. The stray light suppression mechanism includes an Al filter. The thickness of the Al filter is 200 nm. The CCD sensor is used to convert photoelectric signals into electrical signals, and transmit and read them through charge coupling to form images.

[0014] Preferably, the laser plasma light source includes a Nd:YAG laser, a focusing lens, a target material and an optical slit, the focusing lens is used to focus high-intensity pulsed laser onto the target material, the focusing lens is fixed to a one-dimensional manual adjustment platform via a second optical bracket, the focusing lens is arranged in front of the Nd:YAG laser, the target material is vertically arranged on the upper surface of the light source cavity via a one-dimensional electric lifting platform, and the distance between the center of the focusing lens and the target material is 480 mm to 500 mm.

[0015] Preferably, the target material is made of one of aluminum, copper, silicon, tungsten, iron, magnesium, titanium or molybdenum, and the length, width and height of the target material are 100 mm×25 mm×5 mm respectively.

[0016] Preferably, the one-dimensional electric lifting platform includes a table top and a cross roller guide slidably connected to the table top, the cross roller guide is vertically arranged on the upper surface of the light source cavity, the upper surface of the light source cavity is provided with a driving motor, the output shaft of the driving motor is fixedly provided with a threaded screw, the threaded screw passes through the table top and is slidably connected to the table top.

[0017] Preferably, a slider cooperating with the cross roller guide is arranged on the table top, the length and width of the table top are 125mm×100mm respectively, the load-bearing capacity of the table top is not less than 8kg, and the stroke of the one-dimensional electric lifting platform is 75mm.

[0018] Preferably, the driving motor communicates with an external controller through a flange with a high vacuum lead, and a third optical bracket is arranged 10 mm away from the laser plasma light source point, a circular molybdenum sheet is arranged on the third optical bracket, and the optical slit is etched on the circular molybdenum sheet, the thickness of the circular molybdenum sheet is 1 mm, the diameter is 25.4 mm, and the length of the optical slit is 100 mm×10 μm.

[0019] Preferably, the non-periodic Al / Zr reflector is equipped with a three-dimensional manual adjustment stage and a one-dimensional electric adjustment stage in the X direction;

[0020] The three-dimensional manual adjustment stage includes a yaw and pitch adjustment stage and a Y-direction translation stage, which are used for posture calibration during the installation process. The one-dimensional electric adjustment stage in the X direction is used to fine-tune the reflector posture in a vacuum environment to optimize the focusing performance.

[0021] Therefore, the present invention adopts the above-mentioned compact extreme ultraviolet broadband spectrometer, and the beneficial effects are as follows:

[0022] (1) The present invention adopts a non-periodic Al / Zr multilayer spherical mirror to realize a normal-incident spectrometer structure, has high light transmission efficiency in the 24-32nm band, and enhances the intensity of the spectral signal.

[0023] (2) The normal incidence design of the present invention makes the optical path of the spectrometer simpler, reduces the system volume, realizes a compact structural design, makes installation and calibration easier, and reduces the system preparation cost.

[0024] (3) The laser plasma light source provided in the present invention provides the spectrometer system with extreme ultraviolet radiation of higher intensity and continuous spectrum.

[0025] (4) The present invention uses a large-aperture gold transmission grating with 1000 lines / mm as the spectroscopic element, and sets the aperture to 10 mm. The diffraction process does not change the direction of the light path, and has high diffraction efficiency in the 24-32 nm band, thereby improving the spectral resolution.

[0026] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of an embodiment of a compact extreme ultraviolet broadband spectrometer of the present invention;

[0028] Figure 2 The figure is a side view of a one-dimensional electric lifting platform of an embodiment of a compact extreme ultraviolet broadband spectrometer of the present invention.

[0029] Reference numerals

[0030] 1. Light source cavity; 2. Collecting cavity; 3. First connecting tube; 4. Spectroscopic element; 5. Non-periodic Al / Zr multilayer spherical reflector; 6. Second connecting tube; 7. CCD sensor; 8. Stray light suppression mechanism; 9. Nd:YAG laser; 10. Focusing lens; 11. Target material; 12. Threaded screw; 13. Optical slit; 14. Table; 15. Cross roller guide; 16. Drive motor. DETAILED DESCRIPTION

[0031] The technical solution of the present invention is further described below through the accompanying drawings and embodiments.

[0032] Unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0033] As shown in the figure, a compact 24-32nm extreme ultraviolet broadband spectrometer includes a laser plasma light source and a supporting mechanism. The supporting mechanism includes a light source cavity 1 and a collecting cavity 2 whose axes are on the same straight line. A spectroscopic element 4 is arranged on the upper surface of the light source cavity 1, and a non-periodic Al / Zr multilayer spherical reflector 5 is arranged on the upper surface of the collecting cavity 2. A CCD sensor 7 is connected to the other side of the light source cavity 1 through a second connecting tube 6, and a stray light suppression mechanism 8 is arranged on the second connecting tube 6 between the CCD sensor 7 and the spectroscopic element 4.

[0034] Among them, the laser plasma light source is used to generate extreme ultraviolet plasma radiation, the non-periodic Al / Zr multilayer spherical reflector 5 is used to collect the extreme ultraviolet plasma radiation generated by the laser plasma light source, and focus the extreme ultraviolet plasma radiation in the 24-32mm band onto the surface of the CCD sensor 7; the spectroscopic element 4 is installed between the non-periodic Al / Zr multilayer spherical reflector 5 and the CCD sensor 7, and is used to spectroscopically analyze the plasma 24-32mm extreme ultraviolet radiation spectrum; the stray light suppression mechanism 8 is used to filter out visible light and protect the CCD sensor 7, and the CCD sensor 7 converts the photoelectric signal into an electric charge through the photoelectric effect, transfers and converts it into an electrical signal line by line, and finally generates a digital image through analog-to-digital conversion.

[0035] Compared with the prior art, the present invention uses a non-periodic Al / Zr multilayer spherical reflector 5 in a spectrometer system for the first time, thereby realizing 24-32nm broadband high-efficiency spectral detection under normal incidence conditions.

[0036] The light source cavity 1 and the collecting cavity 2 in the whole system bearing mechanism are both cylindrical cavity structures made of stainless steel material with closed upper and lower ends, and the diameter of the light source cavity 1 is larger than the diameter of the collecting cavity 2. Specifically, the diameter of the light source cavity 1 is 400mm, the diameter of the collecting cavity 2 is 250mm, the cavity wall thickness of the light source cavity 1 and the collecting cavity 2 is 6mm, and the interior of the light source cavity 1 and the collecting cavity 2 are both vacuum environments. The above-mentioned size and structure settings enable the entire device to withstand the pressure brought by the ultra-high vacuum environment without deformation. The light source cavity 1 is connected to the collecting cavity 2 through the first connecting tube 3. The first connecting tube 3 can use an ISO 100 stainless steel bellows with a length of 100mm. The bottom of the light source cavity 1 and the collecting cavity 2 are both provided with four waist-shaped holes with a length of 25mm and an outer diameter of 6.6mm, which can fix the device on the required optical platform.

[0037] The laser plasma light source includes a Nd:YAG laser 9, a focusing lens 10, a target material 11 and an optical slit 13. The focusing lens 10 with F=500 mm (focal length 500 mm) is used to focus the high-intensity pulsed laser onto the target material 11. The focusing lens 10 is fixed on a one-dimensional manual adjustment platform through a second optical bracket, and can be fine-tuned along the laser incident direction to obtain different laser focusing conditions. The focusing lens 10 is arranged in front of the Nd:YAG laser 9, and the distance between the center of the focusing lens 10 and the target material 11 is 480 mm to 500 mm.

[0038] In order to meet different research and use requirements, the spectrometer system is equipped with a variety of target materials 11, including but not limited to one of aluminum, copper, silicon, tungsten, iron, magnesium, titanium or molybdenum with a purity of ≥99.99%, and the length, width and height of the target material 11 are 100mm×25mm×5mm respectively. The target material 11 is vertically set on the upper surface of the light source cavity 1 through a one-dimensional electric lifting platform, and the target material can be translated by ±37.5mm in the direction perpendicular to the ground. The life of each target material 11 is higher than 30,000 laser pulses.

[0039] The one-dimensional electric lifting platform includes a table 14 and a cross roller guide 15 slidably connected to the table 14. The length and width of the table 14 are 125mm×100mm respectively. The table 14 is 40mm away from the ground and 500mm away from the target. The load-bearing capacity of the table 14 is not less than 8kg. The cross roller guide 15 is vertically arranged on the upper surface of the light source cavity 1. The upper surface of the light source cavity 1 is provided with a driving motor 16. The output shaft of the driving motor 16 is fixedly provided with a precision threaded screw 12 with a pitch of 1mm. The threaded screw 12 passes through the table 14 and is slidably connected to the table 14. A slider is provided on the table 14 to cooperate with the cross roller guide 15. The stroke of the one-dimensional electric lifting platform is set to 75mm, which can realize the effective translation of the target 11.

[0040] During specific operation, the drive motor 16 communicates with the external controller through a specially made flange with a high vacuum lead. A two-phase stepper motor is selected as the drive motor 16. When a precision threaded screw 12 with a pitch of 1mm is used for advancement, the table 14 can rise or fall along the cross roller guide 15. The repeat positioning accuracy is set to ±1μm. During displacement, the left and right and front and back offsets of the table 14 are less than 12μm, which ensures the movement stability of the target 11 to the greatest extent.

[0041] When the high-intensity pulsed laser is focused on the target 11, it will generate radiation distributed in πrad. In order to improve the spectral resolution of the system, an optical slit 13 is provided behind the light source point. Specifically, a third optical bracket is provided 10 mm away from the laser plasma light source point, and a circular molybdenum sheet is provided on the third optical bracket. The optical slit 13 is etched on the circular molybdenum sheet. The thickness of the circular molybdenum sheet is 1 mm, the diameter is 25.4 mm, and the length and width of the optical slit 13 are 100 mm×10 μm respectively. The setting of the optical slit 13 enables the spectrometer system to have a spectral resolution better than 0.15 nm.

[0042] In order to solve the problem of low efficiency of traditional spectrometers in the 24-32nm band, the present invention designs and prepares a non-periodic Al / Zr multilayer spherical reflector 5 for use in this band. The principle is to expand the reflection wavelength bandwidth of the multilayer film by superimposing film layers of different periodic thicknesses.

[0043] Specifically, the absorption edges of Al and Zr of the non-periodic Al / Zr multilayer spherical reflector 5 are far away from the 24-32nm band, which can provide a higher reflectivity. At the same time, the Al / Zr material pair can form a uniform and flat film layer and has good thermal stability. Through design optimization, this non-periodic Al / Zr multilayer film can achieve a theoretical uniform reflectivity of about 20% in the 24-32nm band.

[0044] The non-periodic Al / Zr multilayer spherical reflector 5 has an aperture of 25.4 mm and a thickness of 7 mm. During the preparation of the non-periodic Al / Zr multilayer spherical reflector 5, a concave spherical substrate made of SiO2 is used. After fine polishing, the concave spherical surface (reflecting surface) has a surface roughness of less than 0.5 nm, a radius of curvature of 641.523 mm, and an error of less than 0.5%.

[0045] The non-periodic Al / Zr reflector 5 is equipped with a three-dimensional manual adjustment stage and a one-dimensional electric adjustment stage in the X direction; the three-dimensional manual adjustment stage includes a yaw and pitch adjustment stage and Figure 1The Y-direction translation stage is used for posture calibration during the installation process; the X-direction one-dimensional electric adjustment stage is used to fine-tune the mirror posture in a vacuum environment to optimize the focusing performance. At the same time, the working angle of the non-periodic Al / Zr reflector 5 is set to an incident angle of 2°, the distance between the non-periodic Al / Zr reflector 5 and the laser plasma light source is 500mm, and the distance between the non-periodic Al / Zr reflector 5 and the CCD sensor 7 is 900mm.

[0046] The spectroscopic element 4 is fixed at a distance of 7300 mm from the CCD sensor by the first optical bracket. In this spectrometer system, a 1000 line / mm large-aperture gold transmission grating is selected as the spectroscopic element 4, which has a 10mm×10mm light-transmitting area and a sufficiently high line density, provides a larger dispersion angle, and ensures spectral resolution.

[0047] At the same time, the self-supporting structure avoids the aberration introduced by the reflective grating, further improving the spectral resolution. In addition, the gold material itself has low absorption characteristics and excellent thermal stability in the extreme ultraviolet band, so the gold grating can diffract EUV radiation more efficiently.

[0048] The stray light suppression mechanism 8 is used to filter out visible light and protect the CCD sensor 7. The stray light suppression mechanism 8 includes an Al filter. The Al filter as a core component has a thickness of 200nm. It can not only suppress the visible light entering the CCD sensor 7 to reduce the background noise, but also suppress short-wave radiation below 17nm to reduce the impact of high-order harmonics on the experimental results.

[0049] At the same time, the 200nm thick Al filter still retains a high light transmission efficiency at 24-32nm, with an average transmittance of about 70%. The CCD sensor 7 used is a semiconductor device for photoelectric detection, which converts photoelectric signals into electrical signals, transmits and reads them through charge coupling to form an image. The effective detection area of ​​this CCD sensor 7 is 13mm×13mm, which can completely cover the 0-32nm band range. The single pixel size of its detection surface is 13μm×13μm, which can provide extremely high spatial and spectral resolution. And the CCD sensor 7 has low noise characteristics when working under low temperature conditions. Since EUV signals are usually weak, low noise levels help to improve the signal-to-noise ratio, thereby obtaining clearer and more accurate spectral data. It is worth noting that unlike most CCD detections in the visible light band, this CCD sensor 7 is coated with a special coating to ensure high detection efficiency in the extreme ultraviolet band.

[0050] Therefore, the present invention adopts the above-mentioned compact extreme ultraviolet broadband spectrometer to solve the problems of large system volume and difficult installation and adjustment caused by the grazing incidence structure of traditional extreme ultraviolet band spectrometers. A 24-32nm spectrometer based on the normal incidence structure was designed and built. Its core component is a non-periodic Al / Zr multilayer film reflector 5, which can have a uniform reflectivity of about 20% under the condition of an incident angle of 2°, which makes the normal incidence compact structure possible. At the same time, a 1000m line / mm normal incidence gold grating is used in the system as the spectroscopic element 4, which avoids the additional space requirements and the introduction of additional aberrations caused by the use of reflective gratings while ensuring the spectral resolution and transmission efficiency, thereby improving the spectral resolution.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A compact extreme ultraviolet broadband spectrometer, It is characterized in that It comprises a laser plasma light source and a bearing mechanism, wherein the bearing mechanism comprises a light source cavity and a collecting cavity whose axes are on the same straight line, the light source cavity is connected with the collecting cavity through a first connecting tube, a spectroscopic element is arranged on the upper surface of the light source cavity, a non-periodic Al / Zr multilayer spherical reflector is arranged on the upper surface of the collecting cavity, a CCD sensor is connected to the other side of the light source cavity through a second connecting tube, and a stray light suppression mechanism is arranged on the second connecting tube between the CCD sensor and the spectroscopic element.

2. A compact extreme ultraviolet broadband spectrometer according to claim 1, Features: The light source cavity and the collection cavity are both cylindrical cavity structures with closed upper and lower ends. The diameter of the light source cavity is larger than the diameter of the collection cavity. The interiors of the light source cavity and the collection cavity are both vacuum environments. Four waist-shaped holes are provided at the bottom of the light source cavity and the collection cavity.

3. A compact extreme ultraviolet broadband spectrometer according to claim 2, Features: The non-periodic Al / Zr multilayer spherical reflector is used to collect the extreme ultraviolet plasma radiation generated by the laser plasma light source and focus the extreme ultraviolet plasma radiation onto the surface of the CCD sensor; The non-periodic Al / Zr multilayer spherical reflector has a diameter of 25.4 mm and a thickness of 7 mm. The non-periodic Al / Zr multilayer spherical reflector is made of Si0 2 The concave spherical surface of the material has a surface roughness of less than 0.5nm after fine polishing, a curvature radius of 641.523mm, and an error of less than 0.5%; The non-periodic Al / Zr multilayer spherical reflector is made by stacking film layers with different periodic thicknesses. The absorption edges of Al and Zr of the non-periodic Al / Zr multilayer spherical reflector are far away from the 24-32nm band. The working angle of the non-periodic Al / Zr reflector is an incident angle of 2°. The distance between the non-periodic Al / Zr reflector and the laser plasma light source is 500mm, and the distance between the non-periodic Al / Zr reflector and the CCD sensor is 900mm.

4. A compact extreme ultraviolet broadband spectrometer according to claim 3, Features: The spectroscopic element is used for spectroscopic analysis of plasma extreme ultraviolet radiation spectrum. The spectroscopic element is fixed at a distance of 300 mm from the CCD sensor through a first optical bracket. The spectroscopic element uses a 1000 line / mm large-aperture gold transmission grating. The stray light suppression mechanism is used to filter out visible light and protect the CCD sensor. The stray light suppression mechanism includes an Al filter. The thickness of the Al filter is 200 nm. The CCD sensor is used to convert photoelectric signals into electrical signals, and transmit and read them through charge coupling to form images.

5. A compact extreme ultraviolet broadband spectrometer according to claim 4, Features: The laser plasma light source comprises a Nd:YAG laser, a focusing lens, a target material and an optical slit. The focusing lens is used to focus high-intensity pulsed laser onto the target material. The focusing lens is fixed on a one-dimensional manual adjustment platform through a second optical bracket. The focusing lens is arranged in front of the Nd:YAG laser. The target material is vertically arranged on the upper surface of the light source cavity through a one-dimensional electric lifting platform. The distance between the center of the focusing lens and the target material is 480 mm to 500 mm.

6. A compact extreme ultraviolet broadband spectrometer according to claim 5, Features: The target material is made of one of aluminum, copper, silicon, tungsten, iron, magnesium, titanium or molybdenum, and the length, width and height of the target material are 100 mm×25 mm×5 mm respectively.

7. A compact extreme ultraviolet broadband spectrometer according to claim 6, Features: The one-dimensional electric lifting platform includes a table top and a cross roller guide slidably connected to the table top, the cross roller guide is vertically arranged on the upper surface of the light source cavity, the upper surface of the light source cavity is provided with a driving motor, the output shaft of the driving motor is fixedly provided with a threaded screw, the threaded screw passes through the table top and is slidably connected to the table top.

8. A compact extreme ultraviolet broadband spectrometer according to claim 7, Features: The table top is provided with a sliding block cooperating with the cross roller guide rail, the length and width of the table top are 125mm×100mm respectively, the load-bearing capacity of the table top is not less than 8kg, and the stroke of the one-dimensional electric lifting platform is 75mm.

9. A compact extreme ultraviolet broadband spectrometer according to claim 8, Features: The driving motor communicates with an external controller through a flange with a high vacuum lead. A third optical bracket is arranged 10 mm away from the laser plasma light source point. A circular molybdenum sheet is arranged on the third optical bracket. The optical slit is etched on the circular molybdenum sheet. The thickness of the circular molybdenum sheet is 1 mm and the diameter is 25.4 mm. The length of the optical slit is 100 mm×10 μm.

10. A compact extreme ultraviolet broadband spectrometer according to claim 9, Features: The non-periodic Al / Zr reflector is equipped with a three-dimensional manual adjustment stage and a one-dimensional electric adjustment stage in the X direction; The three-dimensional manual adjustment stage includes a yaw and pitch adjustment stage and a Y-direction translation stage, which are used for posture calibration during the installation process. The one-dimensional electric adjustment stage in the X direction is used to fine-tune the reflector posture in a vacuum environment to optimize the focusing performance.

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