A pulling device for glue coating and developing equipment

Abstract

The present invention discloses a pulling and drawing device for a glue coating and developing device, and relates to the technical field of semiconductor production equipment. The pulling and drawing device for the glue coating and developing device comprises a shell and a device body arranged on the body of the glue coating and developing device, and the bottom of the shell is fixedly connected with two symmetrically arranged first fixed plates, and the opposite side walls of the two first fixed plates are fixedly connected with two symmetrically arranged guide rails. The pulling and drawing device for the glue coating and developing device can automatically clean the surface of the guide rail and automatically blow air to clean it; it can automatically apply lubricating oil to the surface of the guide rail, and at the same time, it can automatically stir the lubricating oil to make it more uniform, thereby ensuring the lubrication effect, so that it can make the pulling and drawing smoother, and under the joint action of the buffer, it can reduce the shaking of the device body; when the shaking amplitude is large, an alarm is sounded through an external alarm, and the maintenance personnel are reminded to perform maintenance, thereby ensuring the use effect and life of the device body.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor production equipment, in particular to a pulling device for glue coating and developing equipment. Background Art

[0002] ‌Semiconductor coating and developing equipment is a key equipment in integrated circuit manufacturing. It is used in conjunction with a photolithography machine and is responsible for process processes such as coating, baking and developing. It mainly includes a wafer box workstation, a process processing part, supporting units, a wafer box station and a robotic arm. The process processing part is the main body of the equipment, which is equipped with main process units such as an adhesion enhancement module, a hot plate, a cold plate, spin coating, and development. It is responsible for the main process processing of the wafer. The existing process processing part has a variety of structural designs and process module layouts. In order to facilitate repair and maintenance, a pull-out device is usually provided to pull the equipment body out of the casing of the coating and developing equipment.‌

[0003] However, when the existing pull-out device for the coating and developing equipment is in use, impurities are easily adhered to the guide rails of the pull-out device, which is not only inconvenient to clean, but also causes the pull-out device to get stuck. At the same time, after long-term use, the guide rails often get stuck due to lack of lubrication, affecting its normal movement and easily causing violent shaking of the equipment body, affecting its use effect and lifespan. Summary of the invention

[0004] The object of the present invention is to provide a pulling device for a glue coating and developing device to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a pulling device for a glue coating and developing device, comprising a shell and a device body arranged on the body of the glue coating and developing device, the bottom of the shell is fixedly connected to two symmetrically arranged first fixed plates, and the opposite side walls of the two first fixed plates are fixedly connected to guide rails, each of the guide rails is slidably connected to a sliding plate, and the side wall of each sliding plate is fixedly connected to a connecting plate, the opposite side walls of the two connecting plates are fixedly connected to a support plate, and the top of the support plate is fixedly connected to a plurality of buffers, and the upper end of the buffer is fixedly connected to a mounting plate , and the equipment body is fixed on the top of the mounting plate, the side wall of the shell is provided with a notch, and a sealing plate is inserted in the notch, the sealing plate is fixed to the side wall of the mounting plate, and the side wall of the sealing plate is fixedly connected with a handle, and the side wall of each connecting plate is provided with two sets of limiting mechanisms, blowing mechanisms and lubricating mechanisms, the limiting mechanism is used to limit the sliding plate, and the blowing mechanism is used to automatically blow and clean the surface of the guide rail, the lubricating mechanism is used to automatically lubricate the surface of the guide rail, and a detection mechanism is provided between the mounting plate and the support plate, and the detection mechanism is used to detect the shaking amplitude.

[0006] Preferably, the detection mechanism includes two support blocks fixedly connected to the top of the support plate, and a first connecting block is fixedly connected to the top of an outer support block, a side wall of the first connecting block is rotatably connected to a pointer via a first rotating shaft, and a support frame is fixedly connected to the top of the support plate, an arc-shaped dial is fixedly connected to the top of the support frame, and a visual sensor is fixedly connected to the top of the support plate, and the rotation of the first rotating shaft is driven by a first driving mechanism.

[0007] Preferably, the limiting mechanism includes a second fixed plate fixedly connected to the side wall of the connecting plate, and the top of the second fixed plate is connected to a first moving block through a moving mechanism, the top of the first moving block is fixedly connected to an insertion rod, and a limiting hole is opened at the bottom of the guide rail.

[0008] Preferably, the blowing mechanism includes a third fixed plate fixedly connected to the bottom of the connecting plate, and the side wall of the third fixed plate is fixedly connected with a U-shaped frame and a hollow first U-shaped cover, the side wall of the first U-shaped cover is inserted with a plurality of fixing rings, and a movable tube is inserted in each fixing ring, the lower end of the movable tube passes through the first U-shaped cover, and the side wall of the movable tube is provided with a plurality of through holes arranged in an array, the upper end of the movable tube is fixedly connected with a rubber tube, and the upper end of the rubber tube passes through the U-shaped frame, the side wall of the rubber tube is fixedly sleeved with a circular ring, and the side wall of the rubber tube is sleeved with a first spring, the two ends of the first spring are respectively fixed to the top of the U-shaped frame and the bottom of the circular ring, and an air supply mechanism for supplying air to the first U-shaped cover is provided at the top of the second fixed plate.

[0009] Preferably, the lubrication mechanism includes two second U-shaped covers fixedly connected to both sides of the sliding plate, and the side wall of each second U-shaped cover is fixedly connected to a sponge block, the side wall of the second U-shaped cover close to the sponge block is provided with a plurality of oil outlet holes, and the side wall of the connecting plate is provided with an oil supply mechanism for supplying oil to the second U-shaped cover.

[0010] Preferably, the air supply mechanism includes a fixed cover fixedly connected to the top of the second fixed plate, and a first slider is slidably connected in the fixed cover, the side wall of the first movable block is rotatably connected to the first sleeve, and a sliding disk is slidably connected in the first sleeve, the bottom of the sliding disk is fixedly connected to a first rod, and the lower end of the first rod is rotatably connected to the side wall of the first slider, a second spring is fixedly connected between the top of the sliding disk and the first sleeve, and an air inlet pipe is fixedly inserted into the side wall of the fixed cover, an air outlet pipe is fixedly inserted into the side wall of the fixed cover, and an end of the air outlet pipe away from the fixed cover is fixedly inserted at the bottom of the first U-shaped cover.

[0011] Preferably, the oil supply mechanism includes an oil storage tank fixedly connected to the side wall of the connecting plate, and the inner wall of the oil storage tank is fixedly connected to a second connecting block, the bottom of the second connecting block is rotatably connected to a plurality of stirring rods arranged in an array through a rotating rod, and the side wall of the rotating rod is sleeved with a counterweight block, an oil supply pipe is fixedly connected between the oil storage tank and the second U-shaped cover, the side wall of the oil supply pipe is provided with an on-off mechanism, and the rotation of the rotating rod is driven by a second driving mechanism.

[0012] Preferably, the first driving mechanism includes a first gear and a first rack that are meshed together; the first gear is fixedly sleeved on the side wall of the first rotating shaft; the first rack is connected to the side wall of the support block through a reset mechanism; the side wall of the support block away from the support frame is fixedly connected with a pull rope, the other end of the pull rope passes through the side wall of another support block and is fixed to the first rack, and the bottom of the mounting plate is fixedly connected with a first push plate, and the first push plate is fixedly sleeved on the side wall of the pull rope.

[0013] Preferably, the reset mechanism includes a U-shaped plate fixedly connected to the side wall of the support block close to the support frame, and the side wall of the U-shaped plate is fixedly connected to two fixed rods arranged in an array, and the side wall of each fixed rod is sleeved with a second slider, and the second slider is fixed to the side wall of the first rack, and the side wall of each fixed rod is sleeved with a third spring, and the two ends of the third spring are respectively fixed to the U-shaped plate and the second slider.

[0014] Preferably, the second driving mechanism includes a second gear fixedly mounted on the side wall of the rotating rod, and the side wall of the second connecting block is fixedly connected to an L-shaped block, the side wall of the L-shaped block is inserted with an L-shaped moving frame, and one end of the moving frame is fixedly connected to a second rack, the second rack is meshed with the second gear, and the side wall of the moving frame is fixedly connected to a second push plate, and the side wall of the second push plate is provided with an oblique groove, a push rod is inserted in the oblique groove, and the push rod is fixed to the first moving block.

[0015] Preferably, the on-off mechanism includes a mounting cover fixedly inserted into the side wall of the oil supply pipe, and a second movable block is slidably connected inside the mounting cover, a circular hole is opened on the side wall of the second movable block, and a fourth spring is fixedly connected between the second movable block and the mounting cover, and the second movable block is moved by the pushing mechanism.

[0016] Preferably, the pushing mechanism includes a fixed box fixedly inserted into the side wall of the outlet pipe, and a second rotating shaft is rotatably connected inside the fixed box, a baffle is fixedly connected to the side wall of the second rotating shaft, a cam is provided on the side wall fixed sleeve of the second rotating shaft, and a U-shaped pushing frame is fixedly connected to the side wall of the second movable block.

[0017] Preferably, the moving mechanism includes two symmetrically arranged second rods fixedly connected to the top of the second fixed plate, and the side wall of each second rod is sleeved with a second sleeve, the upper end of the second sleeve is fixed to the bottom of the first moving block, and the side wall of each second sleeve is sleeved with a fifth spring, the two ends of the fifth spring are respectively fixed to the top of the second fixed plate and the bottom of the first moving block, and the top of the second fixed plate is fixedly connected to an electromagnet, the bottom of the first moving block is fixedly connected to an iron block, and the iron block and the electromagnet are arranged opposite to each other.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] This kind of pulling and drawing device for glue coating and developing equipment is provided with a blowing mechanism, etc., when the main body of the equipment needs to be repaired, the electromagnet is energized, and the electromagnet attracts the iron block after being energized, so that the first moving block moves downward, and at the same time, the fifth spring is compressed, and the insertion rod is withdrawn from the limiting hole. At the same time, when the first moving block moves downward, the first sleeve and the first sleeve rod can push the first slider to slide into the fixed cover. At this time, the air temporarily stored in the fixed cover can be squeezed, and at the same time, it enters the first U-shaped cover through the air outlet pipe, and the second spring can be compressed. Then, the handle is pulled to make the sliding plate slide along the guide rail. At the same time, the support plate is driven to move through the connecting plate, and the mounting plate is driven to move through the buffer, so that the main body of the equipment can be pulled and drawn. When the sliding plate and the connecting plate move, the U-shaped frame and the first U-shaped cover are driven to move through the third fixed plate, thereby driving the rubber tube to slide on the surface of the guide rail, so as to clean the surface of the guide rail. When the impurities on the surface of the guide rail are difficult to clean, the rubber tube can drive the moving tube to move into the first U-shaped cover. At the same time, the first spring is compressed. At this time, the impurities can be squeezed and crushed, and when the through hole moves into the first U-shaped cover, the compressed air in the fixed cover and the first U-shaped cover enters the moving tube through the through hole and blows on the surface of the impurities through the rubber tube, thereby improving the cleaning effect on the surface of the guide rail and making the pulling and pulling smoother. In addition, with the joint action of the buffer, the shaking of the equipment body can be reduced.

[0020] The pull-out device for the glue coating and developing equipment is provided with a lubricating mechanism, etc., so that when the surface of the guide rail is automatically blown and cleaned, when the compressed gas enters the air outlet pipe, it can push the baffle to rotate upward along the second rotating shaft and open, and at the same time, drive the cam to rotate synchronously, and make the tip of the cam abut against the side wall of the pushing frame, and can drive the second moving block to slide into the installation cover through the pushing frame, so that the circular hole and the oil supply pipe coincide with each other, and at the same time, the fourth spring is compressed. At this time, the on-off mechanism is opened, and under the action of the counterweight block, the lubricating oil in the oil storage tank enters through the oil supply pipe. The oil enters the second U-shaped cover and enters the sponge block through the oil outlet hole and is smeared on the surface of the guide rail, so that the surface of the guide rail can be automatically smeared with lubricating oil, making it smoother when pulling and pulling. Moreover, when the first moving block moves downward, it can drive the pushing rod to slide in the inclined groove, thereby pushing the second pushing plate to move, and driving the second rack to move through the moving frame. When the second rack moves, it drives the second gear and the rotating rod to rotate, and then drives the stirring rod to rotate, so that the lubricating oil can be automatically stirred to make it more uniform, thereby ensuring the subsequent lubrication effect.

[0021] This pulling and pulling device for glue coating and developing equipment is provided with a detection mechanism, etc., and when pulling and pulling, under the action of the buffer, the shaking of the mounting plate and the equipment body can be reduced. When the mounting plate and the equipment body shake up and down, the pull rope can be bent by the first push plate, so that the first rack can be pulled to move in the direction close to the support block. At the same time, the third spring is compressed. When the first rack moves, it can drive the first gear and the first rotating shaft to rotate, and then drive the pointer to rotate. At this time, the scale on the dial indicated by the pointer is detected by the visual sensor, and the amplitude of the shaking of the mounting plate and the equipment body can be determined. Therefore, during the pulling and pulling process, the shaking amplitude of the mounting plate and the equipment body is automatically detected, and when the shaking amplitude is large, an external alarm is used to alarm and remind maintenance personnel to perform maintenance, so as to ensure the use effect and life of the equipment body. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the use state of the present invention;

[0023] Figure 2 It is a schematic diagram of the overall structure of the present invention;

[0024] Figure 3 It is a schematic diagram of the position of the limiting mechanism in the present invention;

[0025] Figure 4 It is a partial cross-sectional structural schematic diagram of the oil storage tank, the second U-shaped cover, the mounting cover and the fixing box in the present invention;

[0026] Figure 5It is a partial cross-sectional structural schematic diagram of the first sleeve in the present invention;

[0027] Figure 6 for Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0028] Figure 7 for Figure 2 A schematic diagram of the enlarged structure at B in the middle;

[0029] Figure 8 for Figure 3 Schematic diagram of the enlarged structure at C in the middle;

[0030] Fig. 9 for Figure 4 Schematic diagram of the enlarged structure at D in the middle;

[0031] Fig.10 for Figure 5 Schematic diagram of the enlarged structure at E in the middle;

[0032] Fig.11 for Figure 7 The enlarged structural diagram at F in the middle;

[0033] Fig.12 for Figure 7 Schematic diagram of the enlarged structure at G in the middle;

[0034] Fig.13 for Fig. 9 Schematic diagram of the enlarged structure at H in the middle;

[0035] Fig.14 for Fig. 9 A schematic diagram of the enlarged structure at position I in the middle;

[0036] Fig.15 for Fig.13 Schematic diagram of the enlarged structure at J in the middle.

[0037] In the figure: 1. main body of the coating and developing device; 101. shell; 102. main body of the device; 2. air supply mechanism; 201. fixed cover; 202. first slider; 203. air outlet pipe; 204. first sleeve; 205. sliding plate; 206. second spring; 207. first sleeve rod; 208. air inlet pipe; 3. oil supply mechanism; 301. oil storage tank; 302. second connecting block; 303. rotating rod; 304. stirring rod; 305. oil supply pipe; 306. counterweight block; 4. second driving mechanism; 401. L-shaped block; 402. moving frame; 403. second rack; 404, second gear; 405, second push plate; 406, inclined slot; 407, push rod; 5, on-off mechanism; 501, mounting cover; 502, second moving block; 503, round hole; 504, fourth spring; 6, push mechanism; 601, fixed box; 602, second rotating shaft; 603, baffle; 604, cam; 605, push frame; 7, moving mechanism; 701, second set of rods; 702, second sleeve; 703, fifth spring; 704, electromagnet; 705, iron block; 8, detection mechanism; 801, support block; 80 2. First connecting block; 803. First rotating shaft; 804. Pointer; 805. Support frame; 806. Scale plate; 807. Visual sensor; 9. First driving mechanism; 901. First gear; 902. First rack; 903. Pull rope; 904. First push plate; 10. Reset mechanism; 1001. U-shaped plate; 1002. Fixed rod; 1003. Second slider; 1004. Third spring; 11. First fixed plate; 12. Guide rail; 13. Sliding plate; 14. Support plate; 15. Buffer; 16. Mounting plate; 17. Notch; 18. Closing plate; 19. Handle; 20. Connecting plate; 21. Limiting mechanism; 2101. Limiting hole; 2102. First moving block; 2103. Second fixed plate; 2104. Insert rod; 22. Blowing mechanism; 2201. Third fixed plate; 2202. U-shaped frame; 2203. First U-shaped cover; 2204. Moving tube; 2205. Through hole; 2206. Fixed ring; 2207. Rubber tube; 2208. Ring; 2209. First spring; 23. Lubricating mechanism; 2301. Second U-shaped cover; 2302. Sponge block; 2303. Oil outlet hole. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0039] See also Figure 1-Figure 15The present invention provides a technical solution: a pulling device for a glue coating and developing device, comprising a shell 101 and a device body 102 arranged on a glue coating and developing device body 1, the bottom of the shell 101 is fixedly connected with two symmetrically arranged first fixed plates 11, and the opposite side walls of the two first fixed plates 11 are fixedly connected with guide rails 12, each guide rail 12 is slidably connected with a sliding plate 13, and the side wall of each sliding plate 13 is fixedly connected with a connecting plate 20, the opposite side walls of the two connecting plates 20 are fixedly connected with a supporting plate 14, and the top of the supporting plate 14 is fixedly connected with a plurality of buffers 15, the upper end of the buffer 15 is fixedly connected with a mounting plate 16, and the device body 1 02 is fixed on the top of the mounting plate 16, a notch 17 is provided on the side wall of the housing 101, and a sealing plate 18 is inserted in the notch 17, the sealing plate 18 is fixed to the side wall of the mounting plate 16, and a handle 19 is fixedly connected to the side wall of the sealing plate 18, and two sets of limiting mechanisms 21, a blowing mechanism 22 and a lubricating mechanism 23 are provided on the side wall of each connecting plate 20, the limiting mechanism 21 is used to limit the sliding plate 13, and the blowing mechanism 22 is used to automatically blow and clean the surface of the guide rail 12, and the lubricating mechanism 23 is used to automatically lubricate the surface of the guide rail 12, and a detection mechanism 8 is provided between the mounting plate 16 and the support plate 14, and the detection mechanism 8 is used to detect the shaking amplitude;

[0040] The limiting mechanism 21 includes a second fixing plate 2103 fixedly connected to the side wall of the connecting plate 20, and the top of the second fixing plate 2103 is connected to the first moving block 2102 through the moving mechanism 7, the top of the first moving block 2102 is fixedly connected to the insertion rod 2104, and the bottom of the guide rail 12 is provided with a limiting hole 2101;

[0041] The blowing mechanism 22 includes a third fixing plate 2201 fixedly connected to the bottom of the connecting plate 20, and the side wall of the third fixing plate 2201 is fixedly connected with a U-shaped frame 2202 and a first U-shaped cover 2203 arranged in a hollow manner, and the side wall of the first U-shaped cover 2203 is inserted with a plurality of fixing rings 2206, and each fixing ring 2206 is inserted with a moving tube 2204, the lower end of the moving tube 2204 penetrates into the first U-shaped cover 2203, and the side wall of the moving tube 2204 is provided with a plurality of through holes 220 arranged in an array. 5. The upper end of the mobile tube 2204 is fixedly connected with a rubber tube 2207, and the upper end of the rubber tube 2207 penetrates the U-shaped frame 2202. The side wall of the rubber tube 2207 is fixedly sleeved with a ring 2208, and the side wall of the rubber tube 2207 is sleeved with a first spring 2209. The two ends of the first spring 2209 are respectively fixed to the top of the U-shaped frame 2202 and the bottom of the ring 2208, and the top of the second fixed plate 2103 is provided with an air supply mechanism 2 for supplying air to the first U-shaped cover 2203;

[0042] The lubrication mechanism 23 includes two second U-shaped covers 2301 fixedly connected to both sides of the sliding plate 13, and a sponge block 2302 is fixedly connected to the side wall of each second U-shaped cover 2301, and a plurality of oil outlet holes 2303 are provided on the side wall of the second U-shaped cover 2301 close to the sponge block 2302, and the side wall of the connecting plate 20 is provided with an oil supply mechanism 3 for supplying oil to the second U-shaped cover 2301, which can automatically clean the surface of the guide rail 12 and automatically blow clean; it can automatically apply lubricating oil to the surface of the guide rail 12, and at the same time, it can automatically stir the lubricating oil to make it more uniform, thereby ensuring the lubrication effect, so that it can make the pulling and pulling smoother, and under the joint action of the buffer 15, it can reduce the shaking of the equipment body 102; when the amplitude of the shaking is large, an alarm is given through an external alarm, and the maintenance personnel are reminded to carry out maintenance to ensure the use effect and life of the equipment body 102.

[0043] The detection mechanism 8 includes two support blocks 801 fixedly connected to the top of the support plate 14, and the top of the outer support block 801 is fixedly connected to the first connection block 802, the side wall of the first connection block 802 is rotatably connected to the pointer 804 through the first rotating shaft 803, and the top of the support plate 14 is fixedly connected to the support frame 805, the top of the support frame 805 is fixedly connected to the arc-shaped dial 806, and the top of the support plate 14 is fixedly connected to the visual sensor 807, the rotation of the first rotating shaft 803 is driven by the first driving mechanism 9, the visual sensor 807 is electrically connected to the external alarm, and under the joint action of the buffer 15, the shaking of the equipment body 102 can be reduced, and when the mounting plate 16 and the equipment body 102 shake up and down, they can both make the pull plate 904 The rope 903 bends, so that it can pull the first rack 902 to move towards the support block 801. At the same time, the third spring 1004 is compressed. When the first rack 902 moves, it can drive the first gear 901 and the first shaft 803 to rotate, thereby driving the pointer 804 to rotate. At this time, the scale on the dial 806 indicated by the pointer 804 is detected by the visual sensor 807, and the amplitude of the shaking of the mounting plate 16 and the equipment body 102 can be determined. Therefore, during the pulling process, the shaking amplitude of the mounting plate 16 and the equipment body 102 is automatically detected, and when the shaking amplitude is large, an external alarm is used to alarm and remind maintenance personnel to perform maintenance. It may be due to deformation of the guide rail 12, etc., to ensure the use effect and life of the equipment body 102.

[0044] The air supply mechanism 2 includes a fixed cover 201 fixedly connected to the top of the second fixed plate 2103, and a first slider 202 is slidably connected in the fixed cover 201, a first sleeve 204 is rotatably connected to the side wall of the first moving block 2102, and a sliding plate 205 is slidably connected in the first sleeve 204, a first sleeve rod 207 is fixedly connected to the bottom of the sliding plate 205, and the lower end of the first sleeve rod 207 is rotatably connected to the side wall of the first slider 202, a second spring 206 is fixedly connected between the top of the sliding plate 205 and the first sleeve 204, and an air inlet pipe 208 is fixedly inserted in the side wall of the fixed cover 201, a first one-way valve is arranged in the air inlet pipe 208, and the conduction direction of the first one-way valve is from the outside to the inside. The first movable block 2102 is inserted into the fixed cover 201, and an air outlet pipe 203 is fixedly inserted into the side wall of the fixed cover 201. A second one-way valve is arranged in the air outlet pipe 203, and the conducting direction of the second one-way valve is from the fixed cover 201 to the first U-shaped cover 2203, and one end of the air outlet pipe 203 away from the fixed cover 201 is fixedly inserted at the bottom of the first U-shaped cover 2203. When the first moving block 2102 moves downward, the first sleeve 204 and the first sleeve rod 207 can push the first slider 202 to slide into the fixed cover 201. At this time, the air temporarily stored in the fixed cover 201 can be squeezed, and at the same time, enter the first U-shaped cover 2203 through the air outlet pipe 203, and the second spring 206 can be compressed.

[0045] The oil supply mechanism 3 includes an oil storage tank 301 fixedly connected to the side wall of the connecting plate 20, and the inner wall of the oil storage tank 301 is fixedly connected to a second connecting block 302, the bottom of the second connecting block 302 is rotatably connected to a plurality of stirring rods 304 arranged in an array through a rotating rod 303, and the side wall of the rotating rod 303 is sleeved with a counterweight block 306, an oil supply pipe 305 is fixedly connected between the oil storage tank 301 and the second U-shaped cover 2301, the side wall of the oil supply pipe 305 is provided with an on-off mechanism 5, and the rotation of the rotating rod 303 is driven by the second driving mechanism 4, under the action of the counterweight block 306, the lubricating oil in the oil storage tank 301 enters the second U-shaped cover 2301 through the oil supply pipe 305, and enters the sponge block 2302 through the oil outlet 2303, and is smeared on the surface of the guide rail 12, and can pass through the second driving mechanism 4.

[0046] The first driving mechanism 9 includes a first gear 901 and a first rack 902 that are meshed; the first gear 901 is fixedly sleeved on the side wall of the first rotating shaft 803; the first rack 902 is connected to the side wall of the supporting block 801 through the reset mechanism 10; a pull rope 903 is fixedly connected to the side wall of the supporting block 801 away from the supporting frame 805, and the other end of the pull rope 903 passes through the side wall of another supporting block 801 and is fixed to the first rack 902, and a first push plate 904 is fixedly connected to the bottom of the mounting plate 16, and the first push plate 904 is fixedly sleeved on the side wall of the pull rope 903. When the mounting plate 16 and the device body 102 are shaken up and down, the pull rope 903 can be bent through the first push plate 904, thereby being able to pull The first rack 902 moves toward the direction approaching the support block 801, and at the same time, the third spring 1004 is compressed. When the first rack 902 moves, it can drive the first gear 901 and the first shaft 803 to rotate, and then drive the pointer 804 to rotate. At this time, the scale on the dial 806 indicated by the pointer 804 is detected by the visual sensor 807, and the amplitude of the shaking of the mounting plate 16 and the equipment body 102 can be determined. Therefore, during the pulling process, the shaking amplitude of the mounting plate 16 and the equipment body 102 is automatically detected, and when the shaking amplitude is large, an external alarm is used to alarm and remind maintenance personnel to perform maintenance to ensure the use effect and life of the equipment body 102.

[0047] The reset mechanism 10 includes a U-shaped plate 1001 fixedly connected to the side wall of the support block 801 near the support frame 805, and the side wall of the U-shaped plate 1001 is fixedly connected to two array-arranged fixed rods 1002, and the side wall of each fixed rod 1002 is sleeved with a second slider 1003, and the second slider 1003 is fixed to the side wall of the first rack 902, and the side wall of each fixed rod 1002 is sleeved with a third spring 1004, and the two ends of the third spring 1004 are respectively fixed to the U-shaped plate 1001 and the second slider 1003, so as to guide and reset the movement of the first rack 902.

[0048] The second driving mechanism 4 includes a second gear 404 fixedly sleeved on the side wall of the rotating rod 303, and the side wall of the second connecting block 302 is fixedly connected with an L-shaped block 401, and the side wall of the L-shaped block 401 is inserted with an L-shaped movable frame 402, and one end of the movable frame 402 is fixedly connected with a second rack 403, and the second rack 403 is meshed with the second gear 404, and the side wall of the movable frame 402 is fixedly connected with a second push plate 405, and the side wall of the second push plate 405 is provided with an inclined groove 406, and a push rod 4 is inserted in the inclined groove 406. 07, and the push rod 407 is fixed to the first moving block 2102. When the first moving block 2102 moves downward, it can drive the push rod 407 to slide in the inclined groove 406, thereby pushing the second push plate 405 to move, and driving the second rack 403 to move through the moving frame 402. When the second rack 403 moves, it drives the second gear 404 and the rotating rod 303 to rotate, and then drives the stirring rod 304 to rotate, so that the lubricating oil can be automatically stirred to make it more uniform, thereby ensuring the subsequent lubrication effect.

[0049] The on-off mechanism 5 includes a mounting cover 501 fixedly inserted into the side wall of the oil supply pipe 305, and a second movable block 502 is slidably connected in the mounting cover 501, a circular hole 503 is opened in the side wall of the second movable block 502, and a fourth spring 504 is fixedly connected between the second movable block 502 and the mounting cover 501, and the second movable block 502 is moved by the pushing mechanism 6. When the surface of the guide rail 12 is automatically blown and cleaned, the second movable block 502 is pushed by the pushing mechanism 6 to slide into the mounting cover 501, and at the same time, the circular hole 503 is overlapped with the oil supply pipe 305, and at the same time, the fourth spring 504 is compressed. At this time, the on-off mechanism 5 is opened.

[0050] The pushing mechanism 6 includes a fixed box 601 fixedly inserted into the side wall of the air outlet pipe 203, and a second rotating shaft 602 is rotatably connected in the fixed box 601, a baffle 603 is fixedly connected to the side wall of the second rotating shaft 602, a cam 604 is fixedly sleeved on the side wall of the second rotating shaft 602, and a U-shaped pushing frame 605 is fixedly connected to the side wall of the second movable block 502. When the compressed gas enters the air outlet pipe 203, the baffle 603 can be pushed to rotate upward along the second rotating shaft 602 to open. At the same time, the cam 604 is driven to rotate synchronously, and the tip of the cam 604 is abutted against the side wall of the pushing frame 605, so that the second movable block 502 can be driven to slide into the mounting cover 501 through the pushing frame 605.

[0051] The moving mechanism 7 includes two symmetrically arranged second rods 701 fixedly connected to the top of the second fixed plate 2103, and the side wall of each second rod 701 is sleeved with a second sleeve 702, the upper end of the second sleeve 702 is fixed to the bottom of the first moving block 2102, and the side wall of each second sleeve 702 is sleeved with a fifth spring 703, the two ends of the fifth spring 703 are respectively fixed to the top of the second fixed plate 2103 and the bottom of the first moving block 2102, and the top of the second fixed plate 2103 is fixedly connected with an electromagnet 704, the bottom of the first moving block 2102 is fixedly connected with an iron block 705, and the iron block 705 is arranged opposite to the electromagnet 704. When the equipment body 102 needs to be repaired, the electromagnet 704 is energized. After the electromagnet 704 is energized, it attracts the iron block 705, so that the first moving block 2102 moves downward. At the same time, the fifth spring 703 is compressed, and the insertion rod 2104 is withdrawn from the limiting hole 2101.

[0052] Working principle: When in use, when the device body 102 needs to be repaired, the electromagnet 704 is energized, and the electromagnet 704 attracts the iron block 705 after being energized, so that the first moving block 2102 moves downward, and at the same time, the fifth spring 703 is compressed, and the insertion rod 2104 is withdrawn from the limiting hole 2101. At the same time, when the first moving block 2102 moves downward, the first sleeve 204 and the first sleeve rod 207 can push the first slider 202 to slide into the fixed cover 201. At this time, the air temporarily stored in the fixed cover 201 can be squeezed, and at the same time, it enters the first U-shaped cover 2203 through the air outlet pipe 203, and the second spring 206 can be compressed;

[0053] Next, the handle 19 is pulled to make the sliding plate 13 slide along the guide rail 12. At the same time, the support plate 14 is moved by the connecting plate 20, and the mounting plate 16 is moved by the buffer 15, so that the device body 102 can be pulled out for easy inspection and maintenance. At the same time, when the sliding plate 13 and the connecting plate 20 are moved, the U-shaped frame 2202 and the first U-shaped cover 2203 are moved by the third fixing plate 2201, and then the rubber tube 2207 is driven to slide on the surface of the guide rail 12, so that the surface of the guide rail 12 can be cleaned. When the impurities on the surface of the guide rail 12 are difficult to clean, the rubber tube 2207 can drive the moving tube 2204 to move into the first U-shaped cover 2203. At the same time, the first spring 2209 is compressed. At this time, the impurities can be squeezed and crushed. Moreover, when the through hole 2205 moves into the first U-shaped cover 2203, the compressed air in the fixed cover 201 and the first U-shaped cover 2203 enters the moving tube 2204 through the through hole 2205 and blows on the surface of the impurities through the rubber tube 2207, thereby achieving a better cleaning effect on the surface of the guide rail 12 and making the pulling smoother.

[0054] At the same time, when the surface of the guide rail 12 is automatically blown and cleaned, when the compressed gas enters the air outlet pipe 203, it can push the baffle 603 to rotate upward along the second rotating shaft 602 to open. At the same time, the cam 604 is driven to rotate synchronously, and the tip of the cam 604 is abutted against the side wall of the pushing frame 605. The second moving block 502 can be driven by the pushing frame 605 to slide into the installation cover 501, so that the circular hole 503 coincides with the oil supply pipe 305. At the same time, the fourth spring 504 is compressed. At this time, the on-off mechanism 5 is opened, and under the action of the counterweight block 306, the lubricating oil in the oil storage tank 301 enters the second U-shaped cover 230 through the oil supply pipe 305. 1, and enters the sponge block 2302 through the oil outlet hole 2303 and is smeared on the surface of the guide rail 12, so that the surface of the guide rail 12 can be automatically smeared with lubricating oil, making it smoother when pulling and pulling. In addition, when the first moving block 2102 moves downward, it can drive the push rod 407 to slide in the inclined groove 406, thereby pushing the second push plate 405 to move, and drive the second rack 403 to move through the moving frame 402. When the second rack 403 moves, it drives the second gear 404 and the rotating rod 303 to rotate, and then drives the stirring rod 304 to rotate, so that the lubricating oil can be automatically stirred to make it more uniform, thereby ensuring the subsequent lubrication effect;

[0055] In addition, under the joint action of the buffer 15, the shaking of the equipment body 102 can be reduced. When the mounting plate 16 and the equipment body 102 shake up and down, the pull rope 903 can be bent through the first push plate 904, so that the first rack 902 can be pulled to move in the direction close to the support block 801. At the same time, the third spring 1004 is compressed. When the first rack 902 moves, it can drive the first gear 901 and the first shaft 803 to rotate, thereby driving the pointer 804 to rotate. At this time, the scale on the dial 806 indicated by the pointer 804 is detected by the visual sensor 807, and the shaking amplitude of the mounting plate 16 and the equipment body 102 can be determined. Therefore, during the pulling process, the shaking amplitude of the mounting plate 16 and the equipment body 102 is automatically detected. In addition, when the shaking amplitude is large, an external alarm is used to alarm and remind maintenance personnel to perform maintenance. It may be deformation of the guide rail 12, etc., to ensure the use effect and life of the equipment body 102.

Claims

1. A pulling device for a glue coating and developing device, comprising a housing (101) and a device body (102) arranged on a glue coating and developing device body (1), characterized in that: The bottom of the shell (101) is fixedly connected to two symmetrically arranged first fixing plates (11), and the opposite side walls of the two first fixing plates (11) are fixedly connected to guide rails (12), each of the guide rails (12) is slidably connected to a sliding plate (13), and the side wall of each sliding plate (13) is fixedly connected to a connecting plate (20), the opposite side walls of the two connecting plates (20) are fixedly connected to a supporting plate (14), and the top of the supporting plate (14) is fixedly connected to a plurality of buffers (15), the upper end of the buffer (15) is fixedly connected to a mounting plate (16), and the device body (102) is fixed to the top of the mounting plate (16), and the side wall of the shell (101) is provided with a notch (17), and A sealing plate (18) is inserted into the notch (17), the sealing plate (18) is fixed to the side wall of the mounting plate (16), and the side wall of the sealing plate (18) is fixedly connected to a handle (19), and the side wall of each connecting plate (20) is provided with two sets of limiting mechanisms (21), a blowing mechanism (22) and a lubricating mechanism (23), the limiting mechanism (21) is used to limit the sliding plate (13), and the blowing mechanism (22) is used to automatically blow and clean the surface of the guide rail (12), and the lubricating mechanism (23) is used to automatically lubricate the surface of the guide rail (12), and a detection mechanism (8) is provided between the mounting plate (16) and the support plate (14), and the detection mechanism (8) is used to detect the shaking amplitude; The detection mechanism (8) comprises two support blocks (801) fixedly connected to the top of the support plate (14), and the top of the outer support block (801) is fixedly connected to a first connection block (802), the side wall of the first connection block (802) is rotatably connected to a pointer (804) via a first rotating shaft (803), and the top of the support plate (14) is fixedly connected to a support frame (805), the top of the support frame (805) is fixedly connected to an arc-shaped dial (806), and the top of the support plate (14) is fixedly connected to a visual sensor (807), and the rotation of the first rotating shaft (803) is driven by a first driving mechanism (9); The first driving mechanism (9) comprises a first gear (901) and a first rack (902) which are meshed with each other; the first gear (901) is fixedly sleeved on the side wall of the first rotating shaft (803); the first rack (902) is connected to the side wall of the support block (801) through a reset mechanism (10); a pull rope (903) is fixedly connected to the side wall of the support block (801) away from the support frame (805), the other end of the pull rope (903) passes through the side wall of another support block (801) and is fixed to the first rack (902); the bottom of the mounting plate (16) is fixedly connected to a first push plate (904), and the first push plate (904) is fixedly sleeved on the side wall of the pull rope (903); The reset mechanism (10) comprises a U-shaped plate (1001) fixedly connected to the side wall of a support block (801) close to a support frame (805), and the side wall of the U-shaped plate (1001) is fixedly connected to two fixed rods (1002) arranged in an array, and the side wall of each fixed rod (1002) is sleeved with a second slider (1003), and the second slider (1003) is fixed to the side wall of the first rack (902), and the side wall of each fixed rod (1002) is sleeved with a third spring (1004), and the two ends of the third spring (1004) are respectively fixed to the U-shaped plate (1001) and the second slider (1003).

2. The pulling device for a coating and developing device according to claim 1, characterized in that: The limiting mechanism (21) comprises a second fixed plate (2103) fixedly connected to the side wall of the connecting plate (20), the top of the second fixed plate (2103) is connected to a first moving block (2102) via a moving mechanism (7), the top of the first moving block (2102) is fixedly connected to an insertion rod (2104), and a limiting hole (2101) is provided at the bottom of the guide rail (12).

3. A pulling device for a glue coating and developing device according to claim 2, characterized in that: The blowing mechanism (22) comprises a third fixing plate (2201) fixedly connected to the bottom of the connecting plate (20), and the side wall of the third fixing plate (2201) is fixedly connected to a U-shaped frame (2202) and a first U-shaped cover (2203) arranged in a hollow manner, a plurality of fixing rings (2206) are inserted into the side wall of the first U-shaped cover (2203), and a moving tube (2204) is inserted into each fixing ring (2206), the lower end of the moving tube (2204) passes through the first U-shaped cover (2203), and the side wall of the moving tube (2204) is provided with a plurality of through holes (2205) arranged in an array. ), the upper end of the movable tube (2204) is fixedly connected to a rubber tube (2207), and the upper end of the rubber tube (2207) is arranged to penetrate the U-shaped frame (2202), the side wall fixed sleeve of the rubber tube (2207) is provided with a ring (2208), and the side wall sleeve of the rubber tube (2207) is provided with a first spring (2209), the two ends of the first spring (2209) are respectively fixed to the top of the U-shaped frame (2202) and the bottom of the ring (2208), and the top of the second fixed plate (2103) is provided with an air supply mechanism (2) for supplying air to the first U-shaped cover (2203).

4. The pulling device for a coating and developing device according to claim 3, characterized in that: The lubrication mechanism (23) comprises two second U-shaped covers (2301) fixedly connected to both sides of the sliding plate (13), and a sponge block (2302) is fixedly connected to the side wall of each second U-shaped cover (2301), a plurality of oil outlet holes (2303) are provided on the side wall of the second U-shaped cover (2301) close to the sponge block (2302), and an oil supply mechanism (3) for supplying oil to the second U-shaped cover (2301) is provided on the side wall of the connecting plate (20).

5. The pulling device for a coating and developing device according to claim 4, characterized in that: The air supply mechanism (2) comprises a fixed cover (201) fixedly connected to the top of the second fixed plate (2103), and a first slider (202) is slidably connected inside the fixed cover (201), a first sleeve (204) is rotatably connected to the side wall of the first movable block (2102), and a sliding plate (205) is slidably connected inside the first sleeve (204), a first sleeve rod (207) is fixedly connected to the bottom of the sliding plate (205), and the lower end of the first sleeve rod (207) is rotatably connected to the side wall of the first slider (202), a second spring (206) is fixedly connected between the top of the sliding plate (205) and the first sleeve (204), an air inlet pipe (208) is fixedly inserted into the side wall of the fixed cover (201), an air outlet pipe (203) is fixedly inserted into the side wall of the fixed cover (201), and one end of the air outlet pipe (203) away from the fixed cover (201) is fixedly inserted into the bottom of the first U-shaped cover (2203).

6. A pulling device for a coating and developing device according to claim 5, characterized in that: The oil supply mechanism (3) comprises an oil storage tank (301) fixedly connected to the side wall of the connecting plate (20), and the inner side wall of the oil storage tank (301) is fixedly connected to a second connecting block (302), the bottom of the second connecting block (302) is rotatably connected to a plurality of stirring rods (304) arranged in an array via a rotating rod (303), and the side wall of the rotating rod (303) is sleeved with a counterweight (306), an oil supply pipe (305) is fixedly connected between the oil storage tank (301) and the second U-shaped cover (2301), the side wall of the oil supply pipe (305) is provided with an on-off mechanism (5), and the rotation of the rotating rod (303) is driven by a second driving mechanism (4).

7. A pulling device for a coating and developing device according to claim 6, characterized in that: The second driving mechanism (4) comprises a second gear (404) fixedly sleeved on the side wall of the rotating rod (303), and the side wall of the second connecting block (302) is fixedly connected to an L-shaped block (401), the side wall of the L-shaped block (401) is inserted with an L-shaped moving frame (402), and one end of the moving frame (402) is fixedly connected to a second rack (403), the second rack (403) is meshed with the second gear (404), and the side wall of the moving frame (402) is fixedly connected to a second push plate (405), and the side wall of the second push plate (405) is provided with an inclined groove (406), a push rod (407) is inserted in the inclined groove (406), and the push rod (407) is fixed to the first moving block (2102).

8. The pulling device for a coating and developing device according to claim 7, characterized in that: The on-off mechanism (5) comprises a mounting cover (501) fixedly inserted into a side wall of the oil supply pipe (305), a second moving block (502) being slidably connected inside the mounting cover (501), a round hole (503) being provided on the side wall of the second moving block (502), and a fourth spring (504) being fixedly connected between the second moving block (502) and the mounting cover (501), and the second moving block (502) is moved by being pushed by a pushing mechanism (6).

9. The pulling device for a coating and developing device according to claim 8, characterized in that: The pushing mechanism (6) comprises a fixed box (601) fixedly inserted into the side wall of the air outlet pipe (203), and a second rotating shaft (602) is rotatably connected inside the fixed box (601), a baffle (603) is fixedly connected to the side wall of the second rotating shaft (602), a cam (604) is fixedly provided on the side wall of the second rotating shaft (602), and a U-shaped pushing frame (605) is fixedly connected to the side wall of the second moving block (502).

10. The pulling device for a coating and developing device according to claim 2, characterized in that: The moving mechanism (7) comprises two symmetrically arranged second rods (701) fixedly connected to the top of the second fixed plate (2103), and the side wall of each second rod (701) is sleeved with a second sleeve (702), the upper end of the second sleeve (702) is fixed to the bottom of the first moving block (2102), and the side wall of each second sleeve (702) is sleeved with a fifth spring (703), the two ends of the fifth spring (703) are respectively fixed to the top of the second fixed plate (2103) and the bottom of the first moving block (2102), and the top of the second fixed plate (2103) is fixedly connected to an electromagnet (704), the bottom of the first moving block (2102) is fixedly connected to an iron block (705), and the iron block (705) and the electromagnet (704) are arranged opposite to each other.

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