Linked single power source controlled stop mechanism, wafer trimming mechanism and working method

Abstract

The present invention discloses a linkage type single power source controlled stop mechanism, a wafer trimming mechanism and a working method, comprising: a lifting unit having a first and a second working position, which can move from the first working position to the second working position under the drive of a single power source; a blocking member, which can partially extend into or withdraw from the moving path of the lifting unit; a driving member, which can move along the moving direction of the lifting unit and can abut against the blocking member; a rotating limit member, which has at least a first state and a second state; during the process of the lifting unit switching from the second working position to the first working position, the lifting unit stays at the third working position. The present invention also discloses a wafer trimming mechanism, a working method of a linkage type single power source controlled stop mechanism, and a wafer trimming working method. The present invention achieves the purpose of the trimming unit staying at the target height to detect the grooves on the surface of the polishing pad, and the above-mentioned stop action can be automatically released after the detection is completed.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor integrated circuit chip manufacturing, and in particular relates to a linkage type single power source control stop mechanism, a wafer trimming mechanism and a working method. Background Art

[0002] Chemical Mechanical Planarization (CMP) equipment uses polishing pads in the process of polishing wafers. Polishing pads, also known as polishing leather, polishing cloth or polishing sheet, are important auxiliary materials that determine the surface quality in chemical mechanical polishing. They can transport polishing liquid, discharge reactants, and maintain smooth polishing. The quality and performance of the polishing pad have a crucial impact on the surface quality and precision of the final product. The polishing pad can be leveled and polished by a dresser to improve its surface quality. The specific effects of leveling and grinding, as well as how to judge the surface quality of the polishing pad, can be achieved by testing the polishing pad.

[0003] Polishing pad groove detection is an important part of ensuring the quality and performance of polishing pads. By selecting appropriate detection methods and following certain standards and requirements, the width, depth and other parameters of the polishing pad grooves can be accurately measured, providing strong support for the optimization of the polishing process. Specific detection methods include traditional manual measurement: using measuring tools (such as vernier calipers, microscopes, etc.) to directly measure the grooves of the polishing pad; optical detection method: a system and method for online detection of the life of the polishing pad, using a light source and an optical detector to scan the surface of the polishing pad. This method can achieve real-time, non-destructive detection of the depth of the polishing pad grooves, provide parameter basis for the polishing process, and optimize the polishing process parameters.

[0004] The detection accuracy of the optical detection method is related to the distance between the polishing pads. Detection sensors of different specifications need to be controlled at a specific height h from the detection position to ensure the detection accuracy requirements. The dresser realizes the leveling and detection of the polishing pad. The detection sensor is installed on the head of the dresser. Its specific action process is to press down, grind and level it, and lift it to the highest position. This action is achieved by a cylinder. However, in this single-stroke process, it is necessary to insert a stop position point for polishing pad detection, which requires the design of a corresponding mechanism or power device for intermediate position stopping. Of course, the highest position of the dresser can also be used as the detection position, but after changing the detection sensor, the cylinder stroke needs to be changed at the same time, which is very costly for equipment changes and requires redesign and selection. Therefore, inserting a stop position point in the dresser stroke is a low-cost and low-change solution.

[0005] The trimmer stops at the middle position of the cylinder stroke and then moves again, which requires other power input to realize its operation logic. Possible solutions include introducing motor stop, two-stage stroke cylinder, etc., but this solution is costly and requires a large design space. Therefore, it is necessary to design a single power source control stop mechanism to solve this problem. Summary of the invention

[0006] In order to overcome the shortcomings of the prior art, the present invention provides a linkage single power source controlled stop mechanism, a wafer trimming mechanism and a working method, which solves the technical problem of the trimming unit detecting the grooves on the surface of the polishing pad at the target height under the premise of only setting a single power source, and has a compact structure.

[0007] The technical solution adopted by the present invention to solve the technical problem is: a linkage single power source control stop mechanism, comprising:

[0008] A lifting unit has a first working position and a second working position, and can move from the first working position to the second working position under the drive of a single power source, wherein the first working position and the second working position define a moving path of the lifting unit;

[0009] A blocking member, at least part of which can extend into or out of the movable path of the lifting unit;

[0010] The driving member can move along the moving direction of the lifting unit and can abut against the blocking member to support the blocking member upward and drive the blocking member to move in a direction of exiting the moving path of the lifting unit;

[0011] The rotation limiter has at least a first state and a second state; in the first state, it abuts against the driving member and limits the downward movement of the blocking member; in the second state, it is separated from the driving member and releases the movement restriction on the blocking member;

[0012] When the rotation limiter is in the first state, at least a portion of the blocking member extends into the movable path of the lifting unit;

[0013] During the process of the lifting unit switching from the second working position to the first working position, it can resist the blocking member and drive the blocking member to move downward, triggering the rotation limit member to switch from the first state to the second state, and the driving member moves upward and resists the blocking member, so that the driving member and the lifting unit cooperate to form a vertical force balance of the blocking member, and the lifting unit stays in the third working position, which is located between the first working position and the second working position.

[0014] Furthermore, the driving member has an inclined driving surface, and is against the first elastic member; the blocking member has an acting surface that can cooperate with the inclined driving surface, and is against the second elastic member; in the first state of the rotation limit member, it is against the driving member so that the driving member compresses the first elastic member; the lifting unit is located on a reference plane on one side facing the acting surface, and when the rotation limit member is in the first state, the end of the acting surface protrudes from the reference plane.

[0015] Furthermore, the inclined driving surface and the action surface are both inclined surfaces, and the inclined directions and inclined angles are the same.

[0016] Furthermore, a side of the top of the lifting unit facing the action surface has a chamfered surface that can abut against the action surface.

[0017] Furthermore, the driving member has an extension arm, and when the lifting unit is in the first working position, it abuts against the extension arm.

[0018] Furthermore, the rotation limit member also has a third state. In the third state, it respectively abuts against the driving member and the blocking member to limit the downward movement of the driving member; when the lifting unit moves downward to abut against the driving member and drives the driving member to move downward, the rotation limit member can switch from the third state to the first state.

[0019] Furthermore, the expansion and contraction directions of the first elastic member and the second elastic member are perpendicular to each other.

[0020] Furthermore, the rotation limiting member includes a supporting portion that can abut against the blocking member, a clamping portion that can abut against the driving member, and a rotating portion located between the clamping portion and the supporting portion.

[0021] Furthermore, the clamping portion is a protrusion, the driving member has a groove body for accommodating part of the clamping portion, and the rotation limit member is connected to a reset member. When the driving member moves downward, the reset member drives the clamping portion to automatically fall into the groove body.

[0022] Furthermore, when the rotation limiting member is in the first state, there is a gap between the inclined driving surface and the action surface.

[0023] Furthermore, the power source is a cylinder, or the power source is a hydraulic cylinder, or the power source is a motor.

[0024] The present invention also discloses a wafer trimming mechanism, comprising a trimming unit arranged above the polishing pad, and a base unit for driving the trimming unit to rise and fall, wherein the base unit is provided with the linkage single power source control stop mechanism, and the trimming unit is connected to a sensor.

[0025] The present invention further discloses a working method of a linkage type single power source controlled intermittent stop mechanism, comprising the following steps:

[0026] The rotation limiter abuts against the driving member and limits the blocking member from moving downward, and at least a portion of the blocking member extends into the moving path of the lifting unit;

[0027] The lifting unit moves from the first working position to the second working position under the drive of a single power source, and moves against the blocking member to withdraw the blocking member from the moving path of the lifting unit;

[0028] After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the blocking member moves and extends into the moving path of the lifting unit;

[0029] The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves upward until it abuts against the blocking member. The lifting unit and the driving member cooperate to form a vertical force balance for the blocking member. The lifting unit stays in the third working position, which is located between the first working position and the second working position.

[0030] The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward, driving the blocking member to move in a direction away from the lifting unit and remain in a state of exiting the moving path of the lifting unit;

[0031] The lifting unit moves downward to the first working position and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again.

[0032] Further, the following steps are included:

[0033] The rotation limiter limits the inclined driving surface of the driving member and the action surface of the blocking member to move in a direction close to each other, and the first elastic member is in a compressed state;

[0034] The lifting unit moves from the first working position to the second working position under the drive of a single power source, contacts the action surface, so that the blocking member moves to compress the second elastic member;

[0035] After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the second elastic member drives the blocking member to reset;

[0036] The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves in a direction close to the action surface so that the inclined driving surface abuts against the action surface. The lifting unit and the driving member cooperate to prevent the blocking member from moving further downward, and the lifting unit stays in the third working position.

[0037] The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward under the action of the first elastic member. Under the cooperation of the inclined driving surface and the action surface, the blocking member moves away from the lifting unit and remains in a state where the action surface does not protrude from the reference plane.

[0038] The lifting unit moves downward to the first working position and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again.

[0039] The present invention further discloses a wafer trimming method, comprising the following steps:

[0040] The trimming unit moves downward to approach the polishing pad to grind and level the upper surface of the polishing pad; the rotation limiter abuts against the driving member and limits the blocking member from moving downward, and at least a portion of the blocking member extends into the moving path of the lifting unit;

[0041] The lifting unit moves from the first working position to the second working position under the drive of a single power source, and moves against the blocking member to withdraw the blocking member from the moving path of the lifting unit;

[0042] After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the blocking member moves and extends into the moving path of the lifting unit;

[0043] The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves upward until it abuts against the blocking member. The lifting unit and the driving member cooperate to form a vertical force balance for the blocking member. The lifting unit stays in the third working position, which is located between the first working position and the second working position.

[0044] At the third working position, the sensor of the dressing unit detects the groove information on the surface of the polishing pad after the polishing and leveling is completed;

[0045] The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward, driving the blocking member to move in a direction away from the lifting unit and remain in a state of exiting the moving path of the lifting unit;

[0046] The lifting unit moves downward to the first working position, and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again;

[0047] The dressing unit grinds and levels the upper surface of the polishing pad again.

[0048] Further, the following steps are included:

[0049] The trimming unit moves downward to approach the polishing pad to grind and level the upper surface of the polishing pad; the rotating limiter limits the inclined driving surface of the driving member and the action surface of the blocking member to move in a direction close to each other, and the first elastic member is in a compressed state;

[0050] The lifting unit moves from the first working position to the second working position under the drive of a single power source, contacts the action surface, so that the blocking member moves to compress the second elastic member;

[0051] After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the second elastic member drives the blocking member to reset;

[0052] The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves in a direction close to the action surface so that the inclined driving surface abuts against the action surface. The lifting unit and the driving member cooperate to prevent the blocking member from moving further downward, and the lifting unit stays in the third working position.

[0053] At the third working position, the sensor of the dressing unit detects the groove information on the surface of the polishing pad after the polishing and leveling is completed;

[0054] The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward under the action of the first elastic member. Under the cooperation of the inclined driving surface and the action surface, the blocking member moves away from the lifting unit and remains in a state where the action surface does not protrude from the reference plane.

[0055] The lifting unit moves downward to the first working position, and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again;

[0056] The dressing unit grinds and levels the upper surface of the polishing pad again.

[0057] The beneficial effects of the present invention are that, under the premise of setting a single power source, the lifting unit can stop at the third working position, so that the dressing unit stops at the target height to detect the grooves on the surface of the polishing pad, and through logical control, the above-mentioned pause action can be automatically released after the detection is completed. The above process only relies on a single power source, without the help of other power control, to achieve the pause at a specific position of the single-stroke cylinder, with low cost, compact structure, and space saving. It can be applied to any occasion where the single-stroke cylinder needs to be stopped in the middle under the operation; in the traditional structure, the lifting unit stops in the middle at the third working position, which requires consideration of factors such as the lifting load, movement speed, precision requirements, and working environment. The control pause mechanism of the present invention only needs to control the installation tolerance of each component to achieve the lifting unit accurately staying at the third working position, and naturally running to the third working position in the activity path of the first working position and the second working position. The operation process is stable and effectively prevents impact; the installation and use of the blocking member, the driving member, and the rotation limit member can adapt to any working environment, and can also adapt to a humid and corrosive environment, and has stronger adaptability; the control pause mechanism of the present invention can bear ultra-high loads, has good wear resistance and stability, does not need to use positioning equipment, and reduces the use cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 A brief illustration of the linkage type single power source control stop mechanism provided by the present invention Figure 1 , at this time, the lifting unit is in the first working position.

[0059] Figure 2 A brief illustration of the linkage type single power source control stop mechanism provided by the present invention Figure 2 .

[0060] Figure 3 A brief illustration of the linkage type single power source control stop mechanism provided by the present invention Figure 3 , at this time, the lifting unit is in the second working position.

[0061] Figure 4 A brief illustration of the linkage type single power source control stop mechanism provided by the present invention Figure 4 , at this time, the rotation limiter is in the second state.

[0062] Figure 5 A brief illustration of the linkage type single power source control stop mechanism provided by the present invention Figure 5 At this time, the lifting unit is in the second working position and the rotation limiter is in the third state.

[0063] Figure 6 A brief illustration of the linkage type single power source control stop mechanism provided by the present invention Figure 6 At this time, the lifting unit is in the first working position and the rotation limiter is in the third state.

[0064] Figure 7 Schematic diagram of motion control logic when pneumatic cylinders are selected as the power source.

[0065] Figure 8 A brief description of the wafer trimming mechanism provided by the present invention Figure 1 , at this time, the lifting unit is in the third working position.

[0066] Fig. 9 A brief description of the wafer trimming mechanism provided by the present invention Figure 2 , at this time, it indicates that the lifting unit moves from the third working position to the second working position.

[0067] Fig.10 A simplified diagram of the wafer trimming mechanism provided by the present invention.

[0068] Fig.11 A partial cross-sectional view of the wafer trimming mechanism provided by the present invention.

[0069] Among them, 1-lifting unit, 11-beveled surface, 2-driving member, 21-inclined driving surface, 22-extension arm, 23-trough body, 31-first elastic member, 32-second elastic member, 4-blocking member, 41-acting surface, 5-rotation limiting member, 51-supporting part, 52-clamping part, 53-rotating part, 6-polishing pad, 7-dressing unit, 8-base unit. DETAILED DESCRIPTION

[0070] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0071] A linkage type single power source controlled intermittent stop mechanism includes a lifting unit 1, a driving member 2, a blocking member 4, and a rotation limit member 5. The lifting unit 1 has a first working position and a second working position. The first working position and the second working position define the movable path of the lifting unit 1. The lifting unit 1 can move from the first working position to the second working position under the drive of a single power source. The power source is a cylinder, or a hydraulic cylinder, or a motor. In this embodiment, the power source is a cylinder as an example. Under the action of its own gravity, the lifting unit 1 can move from the second working position to the first working position, but cannot stay at the target position between the first working position and the second working position. Here, the first working position of the lifting unit 1 refers to the lowermost position in the up and down movable stroke, and the second working position refers to the uppermost position in the up and down movable stroke.

[0072] The driving member 2 can move along the moving direction of the lifting unit 1, and can abut against the blocking member 4, thereby supporting the blocking member 4 upward and driving the blocking member 4 to move in the direction of exiting the moving path of the lifting unit 1. Specifically, the driving member 2 has an inclined driving surface 21, and abuts against the first elastic member 31. In this embodiment, the driving member 2 has an L-shaped longitudinal section, and has an extension arm 22, which extends in the direction of the lifting unit 1, so that when the lifting unit 1 is in the first working position, it abuts against the extension arm 22, and the extension arm 22 supports the lifting unit 1.

[0073] At least part of the blocking member 4 can extend into or out of the active path of the lifting unit 1. Specifically, the blocking member 4 has an action surface 41 that can cooperate with the inclined driving surface 21 and abut against the second elastic member 32. Specifically, the inclined driving surface 21 and the action surface 41 are both inclined surfaces, and the inclination direction and inclination angle are the same. Figure 1 Taking the direction shown as an example, the inclined driving surface 21 extends obliquely from top to bottom in a direction close to the action surface 41 , and the action surface 41 extends obliquely from top to bottom in a direction away from the inclined driving surface 21 .

[0074] The rotation limit member 5 has at least a first state and a second state; in the first state, the rotation limit member 5 abuts against the driving member 2, thereby limiting the downward movement of the blocking member 4. Specifically, the rotation limit member 5 abuts against the driving member 2, so that the driving member 2 compresses the first elastic member 31 and limits the downward movement of the blocking member 4. At this time, at least part of the blocking member 4 extends into the active path of the lifting unit 1, and in the first state, there is a gap between the inclined driving surface 21 and the action surface 41; in the second state, the rotation limit member 5 is disengaged from the driving member 2, and the driving member 2 can move upward under the drive of the first elastic member 31, and the movement restriction on the blocking member 4 is released, and the blocking member 4 can move downward.

[0075] The rotation limiter 5 includes a supporting portion 51, a clamping portion 52, and a rotating portion 53. The supporting portion 51 can abut against the blocking member 4 to support the blocking member 4 upward. The clamping portion 52 can abut against the driving member 2 to prevent the driving member 2 from moving upward under the drive of the first elastic member 31. The rotating portion 53 is located between the clamping portion 52 and the supporting portion 51, and is used to realize the rotation of the rotation limiter 5 with the rotating portion 53 as a fulcrum. In this embodiment, the clamping portion 52 is a protrusion, specifically an inclined protrusion structure with a pointed portion. The driving member 2 has a groove 23 for accommodating part or all of the clamping portion 52. The rotation limiter 5 is connected to a reset member. When the driving member 2 moves downward, the reset member drives the clamping portion 52 to rotate counterclockwise, slide against the outer wall of the driving member 2, and automatically fall into the groove 23.

[0076] The rotation limiter 5 also includes a third state. In the third state, the clamping portion 52 abuts against the bottom of the driving member 2, and the supporting portion 51 abuts against the blocking member 4, so that the driving member 2 cannot move downward, and the driving member 2 remains in a state of pushing the blocking member 4 to the right, so that the blocking member 4 does not protrude from the reference plane L, preventing the blocking member 4 from interfering with the up and down movement of the lifting unit 1. Of course, the third state of the rotation limiter 5 can also be defined by other components, which is not specifically limited.

[0077] The lifting unit 1, the driving member 2, and the blocking member 4 are arranged in sequence, and the side of the lifting unit 1 facing the action surface 41 is located on the reference plane L. When the rotation limiter 5 is in the first state, the end of the action surface 41 protrudes from the reference plane L in the direction of the lifting unit 1. The expansion and contraction directions of the first elastic member 31 and the second elastic member 32 are perpendicular to each other, the first elastic member 31 provides a vertical force, and the second elastic member 32 provides a horizontal force. Of course, in other embodiments, the expansion and contraction directions of the first elastic member 31 and the second elastic member 32 are not necessarily perpendicular, as long as the horizontal or horizontal movement of the blocking member 4 and the vertical or vertical movement of the driving member 2 can be achieved.

[0078] When the lifting unit 1 switches from the second working position to the first working position, the power source does not work. The lifting unit 1 moves downward under the action of its own gravity until it is against the blocking member 4, specifically, against the part of the blocking member 4 protruding from the reference plane L, thereby driving the blocking member 4 to move downward with the lifting unit 1, triggering the rotation limit member 5 to switch from the first state to the second state. At this time, the rotation limit member 5 is separated from the driving member 2, and the driving member 2 moves upward under the action of the first elastic member 31 and is against the blocking member 4, so that the driving member 2 cooperates with the lifting unit 1 to form a vertical force balance of the blocking member 4. Specifically, the driving member 2 moves upward so that the inclined driving surface 21 is against the action surface 41, thereby limiting the blocking member 4 from continuing to move downward. At this time, the upward elastic force of the first elastic member 31 on the driving member 2 forms an upward supporting force on the blocking member 4, and forms a balanced force with the downward pressure of the lifting unit 1 on the blocking member 4, that is, the upper and lower forces of the blocking member 4 are balanced, so that the lifting unit 1 stays in the third working position. In other words, the lifting unit 1 achieves the function of staying at the target position without the auxiliary action of other power sources.

[0079] After the lifting unit 1 stays at the third working position and completes the detection work, the power source acts to push the lifting unit 1 to move upward again, and the driving member 2 continues to move upward under the action of the first elastic member 31. Under the action of the inclined driving surface 21 and the action surface 41, the blocking member 4 moves to the right and compresses the second elastic member 32 until the blocking member 4 does not protrude from the reference plane L, the clamping portion 52 abuts against the bottom of the driving member 2, and the rotation limit member 5 is in the third state. At this time, the supporting portion 51 abuts against the blocking member 4, so that the driving member 2 cannot move downward, and the blocking member 4 is maintained in a state of compressing the second elastic member 32.

[0080] A working method of a linkage type single power source controlled intermittent stop mechanism, comprising the following steps:

[0081] like Figure 1 As shown, the rotation limiter 5 abuts against the driving member 2 and limits the blocking member 4 from moving downward, and at least a portion of the blocking member 4 extends into the moving path of the lifting unit 1; specifically, the rotation limiter 5 is in the first state, that is, the rotation limiter 5 limits the inclined driving surface 21 of the driving member 2 and the action surface 41 of the blocking member 4 from moving in a direction approaching each other, and the first elastic member 31 is in a compressed state; and there is a gap between the inclined driving surface 21 and the action surface 41, that is, the two are not in contact yet;

[0082] The power source is a cylinder; the lifting unit 1 moves from the first working position to the second working position under the drive of a single power source, moves against the blocking member 4, and thus the blocking member 4 is removed from the moving path of the lifting unit 1; that is, the lifting unit 1 moves from bottom to top under the thrust of the cylinder, such as Figure 2 As shown, the lifting unit 1 moves up to contact with the action surface 41, so that the blocking member 4 moves rightward to compress the second elastic member 32; at this time, the driving member 2 is still in the initial position under the restriction of the rotation limit member 5;

[0083] like Figure 2 As shown, the lifting unit 1 moves upward to contact the blocking member 4, and the blocking member 4 is pushed to move rightward under the action of the action surface 41 of the blocking member 4, and the second elastic member 32 is compressed; in order to increase the contact area between the lifting unit 1 and the blocking member 4, so that the lifting unit 1 can effectively push the blocking member 4 to move horizontally, a chamfered surface 11 is provided on the top of the lifting unit 1 facing the action surface 41, and the inclination direction of the chamfered surface 11 is the same as the inclination direction of the action surface 41, and the two are in contact with each other;

[0084] like Figure 3 As shown, after the lifting unit 1 moves upward and passes over the blocking member 4, the second elastic member 32 returns to normal, so that the blocking member 4 moves to the left and resets; driven by a single power source-cylinder, it continues to move to the second working position, and the blocking member 4 moves and extends into the moving path of the lifting unit 1;

[0085] like Figure 4 As shown, the power source stops working, that is, the cylinder stops inflating, and the lifting unit 1 drops to abut against the blocking member 4 under the action of its own gravity. At this time, the falling of the lifting unit 1 is restricted by the blocking member 4. Under the downward pressure of the lifting unit 1, the blocking member 4 moves downward to drive the rotating limit member 5 to flip, and the clamping portion 52 disengages from the driving member 2. Under the action of the first elastic member 31, the driving member 2 moves in the direction close to the action surface 41, that is, the driving member 2 moves upward, so that the inclined driving surface 21 abuts against the action surface 41, and the lifting unit 1 and the driving member 2 cooperate to prevent the blocking member 4 from continuing to move downward, and the lifting unit 1 stays in the third working position, which is located between the first working position and the second working position. That is to say, the downward force of the lifting unit 1 and the upward force of the driving member 2 on the blocking member 4 are balanced at this time, that is, the blocking member 4 is balanced in the vertical direction, and the blocking member 4 can be suspended at the target position, that is, the lifting unit 1 stays in the third working position;

[0086] like Figure 5 As shown, the power source works again, that is, the cylinder is inflated again, driving the lifting unit 1 to move upward to the second working position. Since the downward force of the blocking member 4 is cancelled, the driving member 2 continues to move upward under the action of the first elastic member 31. Under the cooperation of the inclined driving surface 21 and the action surface 41, the blocking member 4 moves away from the lifting unit 1, that is, the blocking member 4 moves to the right to compress the second elastic member 32, and remains in the state of exiting the activity path of the lifting unit 1.

[0087] When the driving member 2 moves upward to the bottom and abuts against the clamping portion 52, that is, the rotation limiter 5 enters the third state, the driving member 2 keeps the blocking member 4 in a state where the action surface 41 does not protrude from the reference plane L, so that the lifting unit 1 has sufficient space to move downward;

[0088] like Figure 6 As shown, the cylinder stops inflating, the lifting unit 1 moves downward until it moves downward synchronously with the driving member 2, and finally moves downward to the first working position, the blocking member 4 automatically moves downward under the action of gravity, and the rotation limit member 5 automatically rotates counterclockwise and resets under the action of the reset member, that is, the rotation limit member 5 switches from the third state to the first state, and the driving member 2 is restricted by the rotation limit member 5 again, that is, it returns to the state as shown in FIG. Figure 1 The initial state shown; the reset member of the rotation limit member 5 can be a torsion spring.

[0089] The motion control logic of a single power source - cylinder is as follows Figure 7 As shown, the cylinder inflates to raise the lifting unit 1 - the cylinder stops inflating, and the lifting unit 1 automatically falls back - the cylinder inflates again to raise it - finally the cylinder stops inflating, and the lifting unit falls back and resets, which is a cycle.

[0090] like Fig.10 , Fig.11 As shown, a wafer trimming mechanism includes a trimming unit 7 arranged above a polishing pad 6, and a base unit 8, wherein the base unit 8 is used to drive the trimming unit 7 to rise and fall, or the base unit 8 is used to drive the trimming unit 7 to rotate and rise and fall, the base unit 8 is provided with a linkage single power source controlled intermittent mechanism of the above structure, and the trimming unit 7 is connected to a sensor.

[0091] A wafer trimming method comprises the following steps:

[0092] The trimming unit 7 moves the lifting unit 1 downward to approach the polishing pad 6, and uses part of the trimming unit 7 to grind and level the upper surface of the polishing pad 6; at this time, the lifting unit 1 is in the first working position, the rotation limiter 5 is in the first state, the rotation limiter 5 abuts against the driving member 2, and limits the blocking member 4 from moving downward, and at least part of the blocking member 4 extends into the moving path of the lifting unit 1; that is, the rotation limiter 5 limits the inclined driving surface 21 of the driving member 2 and the action surface 41 of the blocking member 4 from moving in a direction close to each other, and the first elastic member 31 is in a compressed state; and there is a gap between the inclined driving surface 21 and the action surface 41, that is, the two are not in contact yet;

[0093] The power source is a cylinder; the lifting unit 1 moves from the first working position to the second working position under the drive of a single power source, moves against the blocking member 4, and thus the blocking member 4 is removed from the moving path of the lifting unit 1, that is, the lifting unit 1 moves from bottom to top under the thrust of the cylinder, such as Figure 2 As shown, the lifting unit 1 moves up to contact with the action surface 41, so that the blocking member 4 moves rightward to compress the second elastic member 32; at this time, the driving member 2 is still in the initial position under the restriction of the rotation limit member 5;

[0094] like Figure 2 As shown, the lifting unit 1 moves upward to contact the blocking member 4, and the blocking member 4 is pushed to move rightward under the action of the action surface 41 of the blocking member 4, and the second elastic member 32 is compressed; in order to increase the contact area between the lifting unit 1 and the blocking member 4, so that the lifting unit 1 can effectively push the blocking member 4 to move horizontally, a chamfered surface 11 is provided on the top of the lifting unit 1 facing the action surface 41, and the inclination direction of the chamfered surface 11 is the same as the inclination direction of the action surface 41, and the two are in contact with each other;

[0095] like Figure 3 As shown, after the lifting unit 1 moves upward and passes over the blocking member 4, the second elastic member 32 returns to normal, so that the blocking member 4 moves to the left and resets; driven by a single power source-cylinder, it continues to move to the second working position, and the blocking member 4 moves and extends into the moving path of the lifting unit 1;

[0096] like Figure 4As shown, the power source stops working, that is, the cylinder stops inflating, and the lifting unit 1 drops to abut against the blocking member 4 under the action of its own gravity. At this time, the falling of the lifting unit 1 is restricted by the blocking member 4. Under the downward pressure of the lifting unit 1, the blocking member 4 moves downward to drive the rotating limit member 5 to flip, and the clamping portion 52 disengages from the driving member 2. Under the action of the first elastic member 31, the driving member 2 moves in the direction close to the action surface 41, that is, the driving member 2 moves upward, so that the inclined driving surface 21 abuts against the action surface 41, and the lifting unit 1 and the driving member 2 cooperate to prevent the blocking member 4 from continuing to move downward, and the lifting unit 1 stays in the third working position, which is located between the first working position and the second working position. That is to say, the downward force of the lifting unit 1 and the upward force of the driving member 2 on the blocking member 4 are balanced at this time, that is, the blocking member 4 is balanced in the vertical direction, and the blocking member 4 can be suspended at the target position, that is, the lifting unit 1 stays in the third working position;

[0097] like Figure 8 As shown, the sensor (not shown in the figure) of the dressing unit 7 detects the groove information on the upper surface of the polishing pad 6 at the third working position. The groove information includes the groove width and depth information to determine the condition of the polishing pad 6 surface after the dressing unit 7 grinds and flattens it, thereby facilitating the adjustment of the next dressing process;

[0098] like Figure 5 , Fig. 9 As shown, the power source works again, that is, the cylinder is inflated again, driving the lifting unit 1 to move upward to the second working position. Since the downward force of the blocking member 4 is cancelled, the driving member 2 continues to move upward under the action of the first elastic member 31. Under the cooperation of the inclined driving surface 21 and the action surface 41, the blocking member 4 moves away from the lifting unit 1, that is, the blocking member 4 moves to the right to compress the second elastic member 32, and remains in the state of exiting the activity path of the lifting unit 1.

[0099] When the driving member 2 moves upward to the bottom and abuts against the clamping portion 52, that is, the rotation limiter 5 enters the third state, the driving member 2 keeps the blocking member 4 in a state where the action surface 41 does not protrude from the reference plane L, so that the lifting unit 1 has sufficient space to move downward;

[0100] like Figure 6 As shown, the cylinder stops inflating, the lifting unit 1 moves downward until it moves downward synchronously with the driving member 2, and finally moves downward to the first working position, the blocking member 4 automatically moves downward under the action of gravity, and the rotation limit member 5 automatically rotates counterclockwise and resets under the action of the reset member, that is, the rotation limit member 5 switches from the third state to the first state, and the driving member 2 is restricted by the rotation limit member 5 again, that is, it returns to the state as shown in FIG. Figure 1 The initial state shown; the reset member of the rotation limit member 5 can be a torsion spring;

[0101] The dressing unit 7 polishes and levels the upper surface of the polishing pad 6 again.

[0102] The above specific implementation modes are used to explain the present invention rather than to limit the present invention. Any modification and change made to the present invention within the spirit of the present invention and the protection scope of the claims shall fall within the protection scope of the present invention.

Claims

1. A linkage type single power source control stop mechanism, characterized in that: include, The lifting unit (1) has a first working position and a second working position, and can move from the first working position to the second working position under the drive of a single power source, wherein the first working position and the second working position define a moving path of the lifting unit (1); A blocking member (4), at least part of which can extend into or out of the movable path of the lifting unit (1); The driving member (2) is movable along the moving direction of the lifting unit (1) and is abutted against the blocking member (4) to support the blocking member (4) upwards and drive the blocking member (4) to move in a direction to exit the moving path of the lifting unit (1); The rotation limiting member (5) has at least a first state and a second state; in the first state, it abuts against the power source of the driving member (2) and limits the downward movement of the blocking member (4); in the second state, it is separated from the driving member (2) and releases the movement restriction on the blocking member (4); When the rotation limiting member (5) is in the first state, at least a portion of the blocking member (4) extends into the movable path of the lifting unit (1); During the process of the lifting unit (1) switching from the second working position to the first working position, it can abut against the blocking member (4) and drive the blocking member (4) to move downward, triggering the rotation limit member (5) to switch from the first state to the second state, and the driving member (2) moves upward and abuts against the blocking member (4), so that the driving member (2) and the lifting unit (1) cooperate to form a vertical force balance on the blocking member (4), and the lifting unit (1) stays in the third working position, which is located between the first working position and the second working position.

2. The linkage type single power source control stop mechanism according to claim 1, characterized in that: The driving member (2) has an inclined driving surface (21) and abuts against the first elastic member (31); the blocking member (4) has an action surface (41) that can cooperate with the inclined driving surface (21) and abuts against the second elastic member (32); when the rotation limit member (5) is in a first state, it abuts against the driving member (2) so that the driving member (2) compresses the first elastic member (31); a side of the lifting unit (1) facing the action surface (41) is located on a reference plane, and when the rotation limit member (5) is in the first state, a distal end of the action surface (41) protrudes from the reference plane.

3. The linkage type single power source control stop mechanism according to claim 2, characterized in that: The inclined driving surface (21) and the action surface (41) are both inclined surfaces, and have the same inclination direction and inclination angle.

4. The linkage type single power source control stop mechanism according to claim 2, characterized in that: The top of the lifting unit (1) has a chamfered surface (11) on one side facing the action surface (41) that can abut against the action surface (41).

5. The linkage type single power source control stop mechanism according to claim 1, characterized in that: The driving member (2) has an extension arm (22), and when the lifting unit (1) is in the first working position, it abuts against the extension arm (22).

6. The linkage type single power source control stop mechanism according to claim 4, characterized in that: The rotation limiting member (5) also has a third state. In the third state, it abuts against the driving member (2) and the blocking member (4) respectively, thereby limiting the downward movement of the driving member (2). When the lifting unit (1) moves downward until it abuts against the driving member (2) and drives the driving member (2) to move downward, the rotation limiting member (5) can be switched from the third state to the first state.

7. The linkage type single power source control stop mechanism according to claim 2, characterized in that: The expansion and contraction directions of the first elastic member (31) and the second elastic member (32) are perpendicular to each other.

8. The linkage type single power source control stop mechanism according to claim 1, characterized in that: The rotation limiting member (5) comprises a supporting portion (51) capable of abutting against the blocking member (4), a clamping portion (52) capable of abutting against the driving member (2), and a rotating portion (53) located between the clamping portion (52) and the supporting portion (51).

9. The linkage type single power source control stop mechanism according to claim 8, characterized in that: The clamping portion (52) is a protrusion, the driving member (2) has a groove body (23) for accommodating part of the clamping portion (52), and the rotation limit member (5) is connected to a reset member, and when the driving member (2) moves downward, the reset member drives the clamping portion (52) to automatically fall into the groove body (23).

10. The linkage type single power source control stop mechanism according to claim 2, characterized in that: When the rotation limiting member (5) is in the first state, there is a gap between the inclined driving surface (21) and the action surface (41).

11. The linkage type single power source control stop mechanism according to claim 1, characterized in that: The power source is a cylinder, or the power source is a hydraulic cylinder, or the power source is a motor.

12. A wafer trimming mechanism, characterized in that: It comprises a dressing unit arranged above the polishing pad, and a base unit for driving the dressing unit to rise and fall, the base unit is provided with a linkage single power source control stop mechanism as described in any one of claims 1 to 11, and the dressing unit is connected with a sensor.

13. A working method of a linkage type single power source controlled intermittent stop mechanism, characterized in that: The following steps are included: The rotation limiter abuts against the driving member and limits the blocking member from moving downward, and at least a portion of the blocking member extends into the moving path of the lifting unit; The lifting unit moves from the first working position to the second working position under the drive of a single power source, and moves against the blocking member to withdraw the blocking member from the moving path of the lifting unit; After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the blocking member moves and extends into the moving path of the lifting unit; The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves upward until it abuts against the blocking member. The lifting unit and the driving member cooperate to form a vertical force balance for the blocking member. The lifting unit stays in the third working position, which is located between the first working position and the second working position. The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward, driving the blocking member to move in a direction away from the lifting unit and remain in a state of exiting the moving path of the lifting unit; The lifting unit moves downward to the first working position and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again.

14. The working method of the linkage type single power source control stop mechanism according to claim 13, characterized in that: The following steps are included: The rotation limiter limits the inclined driving surface of the driving member and the action surface of the blocking member to move in a direction close to each other, and the first elastic member is in a compressed state; The lifting unit moves from the first working position to the second working position under the drive of a single power source, contacts the action surface, so that the blocking member moves to compress the second elastic member; After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the second elastic member drives the blocking member to reset; The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves in a direction close to the action surface so that the inclined driving surface abuts against the action surface. The lifting unit and the driving member cooperate to prevent the blocking member from moving further downward, and the lifting unit stays in the third working position. The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward under the action of the first elastic member. Under the cooperation of the inclined driving surface and the action surface, the blocking member moves away from the lifting unit and remains in a state where the action surface does not protrude from the reference plane. The lifting unit moves downward to the first working position and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again.

15. A wafer trimming method, characterized in that: The following steps are included: The dressing unit moves down close to the polishing pad to grind and level the upper surface of the polishing pad; The rotation limiter abuts against the driving member and limits the blocking member from moving downward, and at least a portion of the blocking member extends into the moving path of the lifting unit; The lifting unit moves from the first working position to the second working position under the drive of a single power source, and moves against the blocking member to withdraw the blocking member from the moving path of the lifting unit; After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the blocking member moves and extends into the moving path of the lifting unit; The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves upward until it abuts against the blocking member. The lifting unit and the driving member cooperate to form a vertical force balance for the blocking member. The lifting unit stays in the third working position, which is located between the first working position and the second working position. At the third working position, the sensor of the dressing unit detects the groove information on the surface of the polishing pad after the polishing and leveling is completed; The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward, driving the blocking member to move in a direction away from the lifting unit and remain in a state of exiting the moving path of the lifting unit; The lifting unit moves downward to the first working position, and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again; The dressing unit grinds and levels the upper surface of the polishing pad again.

16. The wafer trimming method according to claim 15, characterized in that: The following steps are included: The dressing unit moves down close to the polishing pad to grind and level the upper surface of the polishing pad; The rotation limiter limits the inclined driving surface of the driving member and the action surface of the blocking member to move in a direction close to each other, and the first elastic member is in a compressed state; The lifting unit moves from the first working position to the second working position under the drive of a single power source, contacts the action surface, so that the blocking member moves to compress the second elastic member; After the lifting unit passes over the blocking member, it continues to move to the second working position under the drive of the single power source, and the second elastic member drives the blocking member to reset; The power source stops working, and the lifting unit descends under the action of gravity until it abuts against the blocking member. The blocking member moves downward to drive the rotation limit member to flip and disengage from the driving member. The driving member moves in a direction close to the action surface so that the inclined driving surface abuts against the action surface. The lifting unit and the driving member cooperate to prevent the blocking member from moving further downward, and the lifting unit stays in the third working position. At the third working position, the sensor of the dressing unit detects the groove information on the surface of the polishing pad after the polishing and leveling is completed; The single power source drives the lifting unit to move upward to the second working position, and the driving member continues to move upward under the action of the first elastic member. Under the cooperation of the inclined driving surface and the action surface, the blocking member moves away from the lifting unit and remains in a state where the action surface does not protrude from the reference plane. The lifting unit moves downward to the first working position, and drives the driving member to move downward, the blocking member automatically moves downward, the rotation limit member automatically resets, and the driving member is restricted by the rotation limit member again; The dressing unit grinds and levels the upper surface of the polishing pad again.

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