Calibration method, calibration system and storage medium

Abstract

The invention discloses a calibration method, a calibration system and a storage medium. The method comprises the following steps: acquiring a fitting formula between a first pixel coordinate and a first deflection angle of a standard micro galvanometer at a preset pose and a preset imaging distance, wherein the first deflection angle comprises a first pitch angle and a first horizontal angle; acquiring a second pixel coordinate corresponding to the to-be-measured micro-galvanometer at a preset pose and a preset imaging distance; and according to a fitting formula between the first pixel coordinate and the first deflection angle and the second pixel coordinate, calculating to obtain a second deflection angle of the to-be-measured micro galvanometer, wherein the second deflection angle comprises a second pitch angle and a second horizontal angle. Therefore, the calibration method does not need to calculate the rotation matrix of the micro-galvanometer coordinate system and the camera coordinate system, does not need a complex test scene, is high in precision, is simple in operation, greatly improves the test efficiency, guarantees the high precision requirement of the deflection angle calibration of the to-be-tested micro-galvanometer, and greatly improves the calibration speed of a single to-be-tested micro-galvanometer.

Description

Technical Field

[0001] The present application relates to the technical field of optical calibration, and in particular to a calibration method, a calibration system and a storage medium. Background Art

[0002] The current scheme for calibrating the angle of the micro-vibrator is carried out by using optical tooling. The error of the tooling will affect the calculation accuracy of the angle, and the tooling calibration process is complicated, time-consuming and labor-intensive. In addition, due to the limitations of the photosensitive area and pixel resolution of the position sensor in the scheme, the distance between the micro-vibrator and the position sensor is relatively close, and the spot area is larger than the pixel area. Therefore, the calculation resolution of the micro-vibrator's mirror deflection angle is low and the error is large.

[0003] In addition, in the angle calibration scheme that uses light reflection to determine the micro-vibration mirror's own coordinate system, it is necessary to photograph the different postures of the micro-vibration mirror one by one when determining the micro-vibration mirror's own coordinate system, which is time-consuming and the amount of posture information is small, which will also cause the calibration accuracy of the micro-vibration mirror's mirror deflection angle to deteriorate. Summary of the invention

[0004] In view of this, the present invention aims to solve one of the problems in the related art at least to a certain extent. To this end, the purpose of the present application is to provide a calibration method, a calibration system and a storage medium.

[0005] The embodiment of the present application provides a method for calibrating the mirror deflection angle of a micro-vibration mirror. The calibration method comprises:

[0006] Obtaining a fitting formula between a first pixel coordinate and a first deflection angle of a standard micro-vibration mirror at a preset posture and a preset imaging distance, wherein the first deflection angle includes a first pitch angle and a first horizontal angle;

[0007] Obtaining a second pixel coordinate corresponding to the micro-vibration mirror to be tested at the preset posture and the preset imaging distance;

[0008] The second deflection angle of the micro-vibration mirror to be measured is calculated according to the fitting formula between the first pixel coordinate and the first deflection angle and the second pixel coordinate, and the second deflection angle includes a second pitch angle and a second horizontal angle.

[0009] In this way, the calibration method of the present application adjusts the placement posture of the micro-vibration mirror to be tested to be consistent with that of the standard micro-vibration mirror as a preset posture, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror to be tested into the pixel-angle fitting formula corresponding to the standard micro-vibration mirror to obtain the second deflection angle of the micro-vibration mirror to be tested. This method does not need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor does it require a complex test scene. It has high accuracy and is simple to operate. The test efficiency is greatly improved, which not only ensures the high-precision requirements for the deflection angle calibration of the micro-vibration mirror to be tested, but also greatly improves the calibration speed of a single micro-vibration mirror to be tested.

[0010] In some embodiments, the fitting formula for obtaining the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror at a preset posture and a preset imaging distance includes:

[0011] Acquire the reflected light spot images formed by the standard micro-vibration mirror at the preset posture and at different preset imaging distances;

[0012] Acquire a mirror reflection spot image formed by the standard micro-vibration mirror at the preset posture and the preset imaging distance at different mirror deflection angles; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle;

[0013] Extracting the pixel geometric centroid of the light spot on the pose reflection light spot image to obtain the pose pixel coordinates of the pose reflection light spot formed by the imaging panel at different imaging distances; and extracting the pixel geometric centroid of the light spot on the mirror reflection light spot image to obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances;

[0014] A fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror at the preset posture and the preset imaging distance is calculated according to the posture pixel coordinate and the deflection pixel coordinate.

[0015] In this way, the calibration method of the present application obtains the reflection spot image and the mirror reflection spot image of the standard micro-vibration mirror, and obtains the pose pixel coordinates of the pose reflection spot by extracting the pixel geometric centroid of the spot on the pose reflection spot image, and obtains the deflected pixel coordinates of the mirror reflection spot by extracting the pixel geometric centroid of the spot on the mirror reflection spot image, and then calculates the fitting formula of the standard micro-vibration mirror through the pose pixel coordinates and the deflected pixel coordinates.

[0016] In some embodiments, obtaining the second pixel coordinates corresponding to the micro-vibration mirror to be tested at the preset posture and the preset imaging distance includes:

[0017] Acquire a mirror reflection spot image formed by the micro-vibration mirror to be tested at the preset posture and the preset imaging distance at different mirror deflection angles; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle;

[0018] The pixel geometric centroid of the light spot on the mirror reflection light spot image corresponding to the micro-vibration mirror to be tested is extracted, the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances are obtained, and the second pixel coordinates are obtained.

[0019] In this way, the calibration method of the present application obtains the mirror reflection spot image formed by the micro-vibration mirror to be tested at a preset posture and a preset imaging distance with different mirror deflection angles, and extracts the pixel geometric centroid of the light spot on the mirror reflection spot image corresponding to the micro-vibration mirror to be tested, thereby obtaining the deflected pixel coordinates of the mirror reflection spot formed on the imaging panel at different imaging distances, so as to obtain the second pixel coordinates of the micro-vibration mirror to be tested through the deflected pixel coordinates.

[0020] In some embodiments, before calculating the fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror at the preset posture and the preset imaging distance according to the pixel coordinate, the method includes:

[0021] The light spot of the incident light of the standard micro-vibration mirror at the preset position is obtained to form a corresponding incident light spot image.

[0022] In this way, the calibration method of the present application forms a corresponding incident light spot image by acquiring the light spot of the incident light when the standard micro-vibration mirror is in a preset position, so as to subsequently calculate the spatial vector of the incident light in the camera coordinate system through the incident light spot image.

[0023] In some embodiments, the calibration method comprises:

[0024] Two or more light spot trace members are arranged on the incident light path of the standard micro-vibration mirror to form the incident light spot image composed of two or more light spots.

[0025] In this way, the calibration method of the present application can obtain an incident light spot image composed of two or more light spots by setting a light spot trace component on the incident light path of the standard micro-vibration mirror, so as to facilitate the subsequent calculation of the spatial vector of the incident light in the camera coordinate system through the incident light spot image.

[0026] In some embodiments, the fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror calculated according to the posture pixel coordinate and the deflection pixel coordinate at the preset posture and the preset imaging distance includes:

[0027] The spatial vector of the incident light in the camera coordinate system is calculated by the least square method according to the incident light spot image;

[0028] Converting the deflected pixel coordinates and the pose pixel coordinates into first space coordinates and second space coordinates according to a preset algorithm;

[0029] Calculate the first spatial coordinates and the second spatial coordinates according to a spatial vector calculation formula and a nonlinear least squares formula to obtain a first spatial vector group for mirror reflection spot fitting and a second spatial vector group for posture reflection spot fitting;

[0030] Performing a vector subtraction operation on the spatial vector of the incident light and the first spatial vector group to obtain a mirror normal deflection vector group;

[0031] Performing a vector subtraction operation on the spatial vector of the incident light and the second spatial vector group to obtain a posture normal vector group;

[0032] Rotate the posture normal vector group using a nonlinear least squares method to obtain a rotation matrix;

[0033] Calculate the light spot space vector group corresponding to the mirror reflection light spot in the rotated standard micro-mirror coordinate system according to the rotation matrix and the mirror normal deflection vector group;

[0034] Convert the vector rotation angle of the rotated light spot space vector group to obtain the pitch angle and horizontal angle of each vector in the standard micro-vibration mirror coordinate system, and obtain the first deflection angle of the standard micro-vibration mirror in the preset posture;

[0035] At the imaging position corresponding to the preset imaging distance and the preset posture, a fitting formula between the first pixel coordinate and the first deflection angle is established.

[0036] In this way, the calibration method of the present application establishes a fitting formula between the first pixel coordinates and the first deflection angle at an imaging position corresponding to a preset imaging distance and a preset posture, so as to calculate the second deflection angle of the micro-vibration mirror to be tested based on the fitting formula and the second pixel coordinates of the micro-vibration mirror to be tested.

[0037] The present application also provides a calibration system for the mirror deflection angle of a micro-vibration mirror. The calibration system includes a micro-vibration mirror to be tested, a standard micro-vibration mirror and a processor, wherein the processor is used to obtain a fitting formula between a first pixel coordinate and a first deflection angle of the standard micro-vibration mirror at a preset posture and a preset imaging distance; obtain a second pixel coordinate corresponding to the micro-vibration mirror to be tested at the preset posture and the preset imaging distance; and calculate the second deflection angle of the micro-vibration mirror to be tested according to the fitting formula between the first pixel coordinate and the first deflection angle and the second pixel coordinate.

[0038] In this way, the calibration system of the present application adjusts the placement posture of the micro-vibration mirror to be tested to be consistent with that of the standard micro-vibration mirror as a preset posture, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror to be tested into the pixel-angle fitting formula corresponding to the standard micro-vibration mirror to obtain the second deflection angle of the micro-vibration mirror to be tested. This method does not need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor does it require a complex test scene. It has high accuracy and is simple to operate. The test efficiency is greatly improved, which not only ensures the high-precision requirements for the deflection angle calibration of the micro-vibration mirror to be tested, but also greatly improves the calibration speed of a single micro-vibration mirror to be tested.

[0039] In some embodiments, the calibration system also includes a laser emitter, a two-dimensional rotating stage, a fixed fixture, an imaging panel, a motor controller, a camera and a computing unit, wherein the computing unit is connected to both the camera and the two-dimensional rotating stage; the laser emitter is used to emit laser light; the two-dimensional rotating stage includes a pitch axis or a horizontal axis, which is used to control the standard micro-vibration mirror or the micro-vibration mirror to be tested to deflect around the pitch axis or the horizontal axis to form the mirror deflection angle; the fixed fixture is used to fix the standard micro-vibration mirror or the micro-vibration mirror to be tested at the intersection of the pitch axis and the horizontal axis of the two-dimensional rotating stage; the imaging panel is used to display the posture reflection spot image formed by the laser being reflected at different imaging distances when the standard micro-vibration mirror is in the preset posture; the mirror deflection spot image formed by the laser being reflected on the imaging panel at different mirror deflection angles when the laser is passed through the micro-vibration mirror to be tested at the preset imaging distance and the preset posture, wherein the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle; the motor controller is used to control the imaging panel relative to the preset imaging distance and the preset posture. The two-dimensional rotating stage moves forward and backward; the camera is used to obtain the light spot of the incident light of the standard micro-vibration mirror at the preset posture to form a corresponding incident light spot image; obtain the posture reflection light spot image formed by the standard micro-vibration mirror at different imaging distances when the standard micro-vibration mirror is at the preset posture; obtain the mirror reflection light spot image formed by the standard micro-vibration mirror at the preset posture and the preset imaging distance at different mirror deflection angles; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle; the calculation unit is used to extract the pixel geometric centroid of the light spot on the posture reflection light spot image, and obtain the posture pixel coordinates of the posture reflection light spot formed by the imaging panel at different imaging distances; and extract the pixel geometric centroid of the light spot on the mirror reflection light spot image, and obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances; according to the posture pixel coordinates and the deflected pixel coordinates, a fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror at the preset posture and the preset imaging distance is calculated.

[0040] In this way, the calibration system of the present application places the micro-vibration mirror to be tested on a fixed fixture, so that the micro-vibration mirror to be tested is located at the intersection of the pitch axis and the horizontal axis of the two-dimensional rotating table, and there is no need to calibrate the micro-vibration mirror to be tested. In addition, the present application installs the micro-vibration mirror to be tested on a fixed installation fixture so that the posture of the micro-vibration mirror to be tested is consistent with that of the standard micro-vibration mirror, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror to be tested into the fitting formula between the first pixel coordinates and the first deflection angle of the standard micro-vibration mirror to calculate the second deflection angle of the micro-vibration mirror to be tested. Therefore, there is no need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor is there a need for complex test scenes. The operation is simple, and while ensuring high-precision calibration of the second deflection angle of the micro-vibration mirror to be tested, the calibration speed of the second deflection angle of a single micro-vibration mirror to be tested can also be improved.

[0041] In some embodiments, the calculation unit is further used to calculate the spatial vector of the incident light in the camera coordinate system according to the incident light spot image by the least squares method; convert the deflected pixel coordinates and the posture pixel coordinates into the first spatial coordinates and the second spatial coordinates according to a preset algorithm; calculate the first spatial coordinates and the second spatial coordinates according to the spatial vector calculation formula and the nonlinear least squares formula to obtain the first spatial vector group of the mirror reflection spot fitting and the second spatial vector group of the posture reflection spot fitting; perform vector subtraction operation on the spatial vector of the incident light and the first spatial vector group to obtain the mirror normal deflection vector group; perform vector subtraction operation on the spatial vector of the incident light and the first spatial vector group to obtain the mirror normal deflection vector group; perform vector subtraction operation on the spatial vector of the incident light and the first spatial vector group Performing vector subtraction operation on the second space vector group to obtain a posture normal vector group; performing nonlinear least squares method to rotate the posture normal vector group to obtain a rotation matrix; calculating the spot space vector group corresponding to the mirror reflection spot in the rotated standard micro-vibration mirror coordinate system according to the rotation matrix and the mirror normal deflection vector group; performing vector rotation angle conversion on the rotated spot space vector group to obtain the pitch angle and horizontal angle of each vector in the standard micro-vibration mirror coordinate system, and obtaining the first deflection angle of the standard micro-vibration mirror in the preset posture; establishing a fitting formula between the first pixel coordinate and the first deflection angle at the imaging position corresponding to the preset imaging distance and the preset posture.

[0042] In this way, the calculation unit of the calibration system of the present application establishes a fitting formula between the first pixel coordinates and the first deflection angle at an imaging position corresponding to a preset imaging distance and a preset posture, so as to calculate the second deflection angle of the micro-vibration mirror to be tested according to the fitting formula and the second pixel coordinates of the micro-vibration mirror to be tested.

[0043] In some embodiments, the laser emitter emits the light into the standard micro-vibration mirror after passing through two or more light spot traces, and the camera acquires the two or more light spots in the two or more light spot traces to form the incident light spot image.

[0044] In this way, the calibration system of the present application has two or more light spot trace members between the laser emitter and the standard micro-vibration mirror. When the laser emitter emits light, the light passes through the two or more light spot trace members and then is emitted into the standard micro-vibration mirror, and the incident light spot image composed of two or more light spots can be obtained through the camera.

[0045] The present application also provides a computer-readable storage medium. The computer-readable storage medium includes a memory and a processor. The memory stores a computer program, and when the computer program is executed by the processor, the calibration method described in the above embodiment is implemented.

[0046] In this way, the computer-readable storage medium of the present application adjusts the placement posture of the micro-vibration mirror to be tested to be consistent with that of the standard micro-vibration mirror as a preset posture, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror to be tested into the pixel-angle fitting formula corresponding to the standard micro-vibration mirror to obtain the second deflection angle of the micro-vibration mirror to be tested. This method does not need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor does it require a complex test scene. It has high accuracy and simple operation, and the test efficiency is greatly improved. It not only ensures the high-precision requirements for the deflection angle calibration of the micro-vibration mirror to be tested, but also greatly improves the calibration speed of a single micro-vibration mirror to be tested. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0048] Figure 1 is a flow chart of a calibration method in certain embodiments of the present application;

[0049] Figure 2 is a schematic diagram of the structure of a calibration system in certain embodiments of the present application;

[0050] Figure 3 It is an effect diagram of the second deflection angle of the micro-vibration mirror to be tested obtained after calculation by the fitting formula in some embodiments of the present application;

[0051] Figure 4 is a flow chart of a calibration method in certain embodiments of the present application;

[0052] Figure 5 is a schematic diagram of an image of a specular reflection spot of a calibration method in certain embodiments of the present application;

[0053] Figure 6 is a flow chart of a calibration method in certain embodiments of the present application;

[0054] Figure 7 is a flow chart of a calibration method in certain embodiments of the present application;

[0055] Figure 8 It is a schematic diagram of the pitch angle and horizontal angle of the mirror deflection angle of the standard micro-vibration mirror in the calibration method in certain embodiments of the present application;

[0056] Fig. 9 It is a schematic diagram of the structure in which a micro-vibration mirror to be tested or a standard micro-vibration mirror is installed on a two-dimensional rotating table through a fixed fixture in certain embodiments of the present application. DETAILED DESCRIPTION

[0057] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0058] In the description of the present application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0059] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or can communicate with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0060] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed.

[0061] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0062] See also Figure 1 , a method for calibrating the mirror deflection angle of a micro-vibration mirror is provided. The calibration method includes:

[0063] 01: Obtain a fitting formula between a first pixel coordinate and a first deflection angle of a standard micro-galvanometer at a preset posture and a preset imaging distance, where the first deflection angle includes a first pitch angle and a first horizontal angle.

[0064] 02: Get the second pixel coordinates corresponding to the micro-galvanometer to be tested at the preset posture and preset imaging distance.

[0065] 03: The second deflection angle of the micro-vibration mirror to be measured is calculated according to the fitting formula between the first pixel coordinate and the first deflection angle and the second pixel coordinate, and the second deflection angle includes a second pitch angle and a second horizontal angle.

[0066] See also Figure 2 The present application also provides a calibration system 100 for the mirror deflection angle of a micro-vibration mirror. The calibration system 100 includes a standard micro-vibration mirror 10, a micro-vibration mirror to be tested 20, a two-dimensional rotating stage 30, a light spot trace member 40, a processor, a laser emitter 50, a fixed fixture 60, an imaging panel 70, a motor controller 80, a camera 90 and a computing unit.

[0067] Step 01, step 02 and step 03 can be implemented by a processor. That is, the processor is used to obtain a fitting formula between the first pixel coordinates and the first deflection angle of the standard micro-vibration mirror 10 at a preset posture and a preset imaging distance, and the first deflection angle includes a first pitch angle and a first horizontal angle; obtain the second pixel coordinates corresponding to the micro-vibration mirror 20 to be tested at a preset posture and a preset imaging distance; calculate the second deflection angle of the micro-vibration mirror 20 to be tested according to the fitting formula between the first pixel coordinates and the first deflection angle and the second pixel coordinates, and the second deflection angle includes a second pitch angle and a second horizontal angle.

[0068] Among them, the preset posture refers to the initial posture of the standard micro-vibration mirror 10 when it is placed on the two-dimensional rotating table 30. The preset imaging distance refers to the distance between the standard micro-vibration mirror 10 or the micro-vibration mirror 20 to be tested and the imaging panel 70. The preset imaging distance can be, for example, 1m, 1.2m and 1.5m or other distances, which are not limited here. The first pitch angle refers to the pitch deflection angle of the standard micro-vibration mirror 10 upward or downward. The first horizontal angle refers to the horizontal deflection angle of the standard micro-vibration mirror 10 to the left or right. The second pitch angle refers to the pitch deflection angle of the micro-vibration mirror 20 to be tested upward or downward. The second horizontal angle refers to the horizontal deflection angle of the micro-vibration mirror 20 to be tested to the left or right.

[0069] Specifically, the first pixel coordinates corresponding to the mirror reflection spot and the posture reflection spot of the standard micro-vibration mirror 10 at a preset posture and a preset imaging distance are obtained, and the first pixel coordinates are converted into spatial coordinates. Then, the normal deflection vector group is obtained according to the spatial coordinate and the spatial vector formula, and the normal deflection vector group is rotated by the nonlinear least squares formula to obtain a rotation matrix. Finally, the rotated spot space vector group is obtained according to the rotation matrix and the normal deflection vector group, and the spot space vector group is converted into a first pitch angle and a first horizontal angle, so as to establish a fitting formula between the first pixel coordinate and the first deflection angle according to the first pixel coordinate, the first pitch angle and the first horizontal angle.

[0070] When it is necessary to obtain the second deflection angle of the micro-vibration mirror 20 to be tested, first obtain the second pixel coordinates corresponding to the mirror reflection spot and the posture reflection spot when the micro-vibration mirror 20 to be tested is at a preset posture and a preset imaging distance. Then, substitute the second pixel coordinates into the fitting formula for calculation to obtain the second deflection angle of the micro-vibration mirror 20 to be tested.

[0071] In detail, Figure 3 As shown, the difference between the second deflection angle of the micro-vibration mirror 20 to be tested calculated after the fitting formula and the second deflection angle of the micro-vibration mirror 20 to be tested calculated without the fitting formula can be as low as 0.05°. Figure 3 The * in the figure represents the second deflection angle of the micro-vibration mirror 20 to be tested which is not calculated by the fitting formula of the present application, and o represents the second deflection angle of the micro-vibration mirror 20 to be tested which is calculated by the fitting formula of the present application.

[0072] It can be understood that the present application obtains the fitting formula corresponding to the first pixel coordinates and the first deflection angle of the standard micro-vibration mirror 10 in order to calculate the second deflection angle of the micro-vibration mirror 20 to be tested according to the second pixel coordinates and the fitting formula of the micro-vibration mirror 20 to be tested. Therefore, the scanning angle range of the standard micro-vibration mirror 10 can be greater than the scanning angle range of the micro-vibration mirror 20 to be tested, so as to more accurately determine the second deflection angle of the micro-vibration mirror 20 to be tested.

[0073] In this way, the calibration method of the present application adjusts the placement posture of the micro-vibration mirror 20 to be tested to be consistent with that of the standard micro-vibration mirror 10 as a preset posture, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror 20 to be tested into the pixel-angle fitting formula corresponding to the standard micro-vibration mirror 10 to obtain the second deflection angle of the micro-vibration mirror 20 to be tested. This method does not need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor does it require a complex test scene. It has high accuracy and simple operation, and the test efficiency is greatly improved. It not only ensures the high-precision requirements for the deflection angle calibration of the micro-vibration mirror 20 to be tested, but also greatly improves the calibration speed of a single micro-vibration mirror 20 to be tested.

[0074] In addition, the posture of the standard micro-vibration mirror 10 of the present application can be reflected by applying multiple voltages to the vibration mirror to obtain multiple light spots. Multiple voltages are also applied to the micro-vibration mirror 20 to be tested to obtain multiple light spots. The center of mass of the multiple light spots obtained by the micro-vibration mirror 20 to be tested is equal to the center of mass of the multiple light spots obtained by the standard micro-vibration mirror 10, so that the posture of the micro-vibration mirror 20 to be tested is the same as that of the standard micro-vibration mirror 10.

[0075] See also Figure 4 In some embodiments, step 01 includes:

[0076] 011: Obtain the reflected light spot images formed by the standard micro-vibration mirror at different preset imaging distances when the mirror is in a preset posture.

[0077] 012: Obtain the mirror reflection spot image formed by the standard micro-vibration mirror at different mirror deflection angles when the mirror is at a preset posture and a preset imaging distance; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle.

[0078] 013: Extract the pixel geometric centroid of the light spot on the pose reflection light spot image to obtain the pose pixel coordinates of the pose reflection light spot formed by the imaging panel at different imaging distances; and extract the pixel geometric centroid of the light spot on the mirror reflection light spot image to obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances.

[0079] 014: A fitting formula between a first pixel coordinate and a first deflection angle of a standard micro-vibration mirror at a preset posture and a preset imaging distance is calculated according to the posture pixel coordinates and the deflection pixel coordinates.

[0080] Please combine Figure 2 , step 011 and step 012 can be implemented by the processor. Step 013 and step 014 can be implemented by the calculation unit. That is, the processor is used to obtain the posture reflection spot image formed by reflection at different preset imaging distances when the standard micro-vibration mirror 10 is in a preset posture; obtain the mirror reflection spot image formed by reflection at different mirror deflection angles when the standard micro-vibration mirror 10 is in a preset posture and preset imaging distance; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle. The calculation unit is used to extract the pixel geometric centroid of the spot on the posture reflection spot image, and obtain the posture pixel coordinates of the posture reflection spot formed by the imaging panel 70 at different imaging distances; and extract the pixel geometric centroid of the spot on the mirror reflection spot image, and obtain the deflected pixel coordinates of the mirror reflection spot formed by the imaging panel 70 at different imaging distances; according to the posture pixel coordinates and the deflected pixel coordinates, the fitting formula between the first pixel coordinates and the first deflection angle of the standard micro-vibration mirror 10 at the preset posture and preset imaging distance is calculated.

[0081] Specifically, the preset imaging distance includes 1m, 1.2m or 1.5m, or other distances, which are not limited here. Figure 2 As shown, when the preset imaging distance is 1.5m, it can correspond to Figure 2 The imaging panel 70 in the image is at position A1. When the preset imaging distance is 1.2 m, the corresponding Figure 2 The imaging panel 70 in the image is at position A2. When the preset imaging distance is 1m, the corresponding Figure 2 The imaging panel 70 in is at position A3.

[0082] First, the present application can control the two-dimensional rotating stage 30 to rotate to adjust the standard micro-vibration mirror 10 to a preset posture, and apply a DC voltage to the standard micro-vibration mirror 10 so that the standard micro-vibration mirror 10 maintains the preset posture, and control the imaging panel 70 through the motor controller 80 to move to the A1 position, A2 position and A3 position respectively along the light emitting direction of the laser emitter 50 to obtain the posture reflection spot image formed by reflection at different preset imaging distances.

[0083] Secondly, a periodic deflection voltage can be applied to the standard micro-vibration mirror 10 so that the standard micro-vibration mirror 10 deflects at different mirror deflection angles, and the imaging panel 70 is controlled by the motor controller 80 to move to the A1 position, the A2 position and the A3 position respectively along the light emitting direction of the laser emitter 50 to obtain the mirror reflection spot images formed by reflection at different mirror deflection angles. That is, the present application can obtain the mirror reflection spot images formed by the standard micro-vibration mirror 10 at different imaging distances, so that the mirror deflection angle of the micro-vibration mirror 20 to be tested can be calibrated at different imaging distances, providing calibration options for multiple imaging distances.

[0084] The standard micro-vibration mirror 10 in the embodiment of the present application selects a mirror reflection spot image formed at an imaging distance to calibrate the mirror deflection angle of the micro-vibration mirror 20 to be measured. Figure 5 As shown, Figure 5 The mirror reflection spot in is a mirror reflection spot formed by the standard micro-vibration mirror 10 at a certain mirror deflection angle when the preset imaging distance between the imaging panel 70 and the standard micro-vibration mirror 10 is 1.5 m, that is, when the imaging panel 70 is at the corresponding A1 position.

[0085] Then, the pixel geometric centroid of the light spot on the pose reflection spot image is extracted to obtain the pose pixel coordinates of the pose reflection spot formed by the imaging panel 70 at different imaging distances. The pose pixel coordinates of the pose reflection spot can be, for example, B11 (x1, y1), B12 (x2, y2), Bkn (xn, yn) or other pose pixel coordinates, which are not limited here.

[0086] The pixel geometric centroid of the light spot on the mirror reflection light spot image is extracted to obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel 70 at different imaging distances. The deflected pixel coordinates of the mirror reflection can be, for example, C11 (x1, y1), C12 (x2, y2), Cki (xi, yi) or other deflected pixel coordinates, which are not limited here. It should be noted that n represents the number of posture reflection light spots, i represents the number of mirror reflection light spots, and k represents the number of positions of the imaging panel 70.

[0087] Finally, the mirror normal deflection vector group is obtained according to the posture pixel coordinates and the space vector calculation formula, the standard micro-vibration mirror posture normal vector group is obtained according to the deflection pixel coordinates and the space vector calculation formula, and the rotation matrix is ​​obtained according to the standard micro-vibration mirror posture normal vector group and the nonlinear least squares rotation, so as to obtain the rotated spot space vector group according to the rotation matrix and the mirror normal deflection vector group, and the spot space vector group is converted into a first deflection angle, so as to obtain the fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror 10 at a preset posture and a preset imaging distance according to the first pixel coordinate and the first deflection angle.

[0088] In this way, the calibration method of the present application obtains the reflection spot image and the mirror reflection spot image of the standard micro-vibration mirror 10, and obtains the pose pixel coordinates of the pose reflection spot by extracting the pixel geometric centroid of the spot on the pose reflection spot image, and obtains the deflected pixel coordinates of the mirror reflection spot by extracting the pixel geometric centroid of the spot on the mirror reflection spot image, and then calculates the fitting formula of the standard micro-vibration mirror 10 through the pose pixel coordinates and the deflected pixel coordinates.

[0089] See also Figure 6 In some embodiments, step 02 includes:

[0090] 021: Obtain a mirror reflection spot image formed by reflection at different mirror deflection angles when the micro-vibration mirror to be tested is at a preset posture and a preset imaging distance; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle.

[0091] 022: Extract the pixel geometric centroid of the light spot on the mirror reflection light spot image corresponding to the micro-vibration mirror to be tested, obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances, and obtain the second pixel coordinates.

[0092] Please combine Figure 2 , step 021 and step 022 can be implemented by a processor. That is, the processor is used to obtain the mirror reflection spot image formed by the micro-vibration mirror 20 to be tested at a preset posture and a preset imaging distance with different mirror deflection angles; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle; extract the pixel geometric centroid of the spot on the mirror reflection spot image corresponding to the micro-vibration mirror 20 to be tested, obtain the deflected pixel coordinates of the mirror reflection spot formed by the imaging panel 70 at different imaging distances, and obtain the second pixel coordinates.

[0093] Specifically, first, a periodic deflection voltage can be applied to the micro-vibration mirror 20 to be tested so that the micro-vibration mirror 20 to be tested is deflected at different mirror deflection angles, and the imaging panel 70 is controlled by the motor controller 80 to move to the A1 position, A2 position and A3 position respectively along the light emitting direction of the laser emitter 50 to obtain the mirror reflection spot image formed by reflection at different mirror deflection angles.

[0094] Then, the pixel geometric centroid of the light spot on the mirror reflection spot image is extracted to obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel 70 at different imaging distances. The deflected pixel coordinates of the reflected light spot can be, for example, B11 (x1, y1), B12 (x2, y2), Bkn (xn, yn) or other posture pixel coordinates, which are not limited here.

[0095] The pixel geometric centroid of the light spot on the mirror reflection light spot image is extracted to obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel 70 at different imaging distances, and the second pixel coordinates are obtained by deflecting the pixel coordinates. The deflected pixel coordinates of the mirror reflection can be, for example, C11 (x1, y1), C12 (x2, y2), Cki (xi, yi) or other deflected pixel coordinates, which are not limited here. It should be noted that n represents the number of posture reflection light spots, i represents the number of mirror reflection light spots, and k represents the number of positions of the imaging panel 70.

[0096] In this way, the calibration method of the present application obtains the mirror reflection spot image formed by the micro-vibration mirror 20 to be tested at a preset posture and a preset imaging distance with different mirror deflection angles, and obtains the deflected pixel coordinates of the mirror reflection spot formed by the imaging panel 70 at different imaging distances by extracting the pixel geometric centroid of the light spot on the mirror reflection spot image corresponding to the micro-vibration mirror 20 to be tested, so as to obtain the second pixel coordinates of the micro-vibration mirror 20 to be tested through the deflected pixel coordinates.

[0097] In some embodiments, before step 014, the calibration method further includes:

[0098] 04: Obtain the incident light spot of the standard micro-galvanometer at the preset position to form a corresponding incident light spot image.

[0099] Please combine Figure 2 Step 04 can be implemented by a processor. That is, the processor is used to obtain the light spot of the incident light when the standard micro-vibration mirror 10 is in a preset position to form a corresponding incident light spot image.

[0100] The light spot of the incident light refers to the light emitted by the laser emitter 50, which is incident on the standard micro-vibration mirror 10 and forms a light spot on the imaging panel 70 after passing through the light spot trace member 40 disposed between the laser emitter 50 and the standard micro-vibration mirror 10. It should be noted that the light spot trace member 40 may be an attenuation sheet, which is not limited here.

[0101] In this way, the calibration method of the present application can obtain an incident light spot image composed of two or more light spots by setting a light spot trace member 40 on the incident light path of the standard micro-vibration mirror 10.

[0102] In certain embodiments, the calibration method comprises:

[0103] 05: Set two or more light spot tracers on the incident light path of the standard micro-vibration mirror to form an incident light spot image composed of two or more light spots.

[0104] Please combine Figure 2 Step 05 can be implemented by a processor. That is, the processor is used to set two or more light spot trace members 40 on the incident light path of the standard micro-vibration mirror 10 to form an incident light spot image composed of two or more light spots.

[0105] Specifically, the present application takes the calibration system 100 provided with two light spot trace members 40 as an example.

[0106] like Figure 2As shown, two light spot trace members 40 are sequentially arranged along the incident light path of the laser emitter 50 and the standard micro-vibration mirror 10. When it is necessary to obtain an incident light spot image, the incident light spot image consisting of two light spots formed on the imaging panel 70 after being emitted by the laser emitter 50 through the two light spot trace members 40 is obtained by the camera 90.

[0107] In this way, the calibration method of the present application can obtain an incident light spot image composed of two or more light spots by setting a light spot trace member 40 on the incident light path of the standard micro-vibration mirror 10, so as to facilitate the subsequent calculation of the spatial vector of the incident light in the camera coordinate system through the incident light spot image.

[0108] See also Figure 7 In some embodiments, step 014 includes:

[0109] 0141: The spatial vector of the incident light in the camera coordinate system is calculated based on the incident light spot image using the least squares method.

[0110] 0142: Convert the deflected pixel coordinates and the pose pixel coordinates into the first space coordinates and the second space coordinates according to a preset algorithm.

[0111] 0143: According to the spatial vector calculation formula and the nonlinear least squares formula, the first spatial vector group for mirror reflection spot fitting and the second spatial vector group for posture reflection spot fitting are calculated for the first spatial coordinate and the second spatial coordinate respectively.

[0112] 0144: Perform vector subtraction operation on the spatial vector of the incident light and the first spatial vector group to obtain the mirror normal deflection vector group.

[0113] 0145: Perform vector subtraction operation on the spatial vector of the incident light and the second spatial vector group to obtain the posture normal vector group.

[0114] 0146: Perform nonlinear least squares rotation on the pose normal vector group to obtain the rotation matrix.

[0115] 0147: The spot space vector group corresponding to the mirror reflection spot in the rotated standard micro-mirror coordinate system is calculated according to the rotation matrix and the mirror normal deflection vector group.

[0116] 0148: Convert the vector rotation angle of the rotated spot space vector group to obtain the pitch angle and horizontal angle of each vector in the standard micro-vibration mirror coordinate system, and obtain the first deflection angle of the standard micro-vibration mirror in the preset posture.

[0117] 0149: Establish a fitting formula between the first pixel coordinate and the first deflection angle at an imaging position corresponding to a preset imaging distance and a preset posture.

[0118] Please combine Figure 2 , step 0141, step 0142, step 0143, step 0144, step 0145, step 0146, step 0147, step 0148 and step 0149 can be implemented by a computing unit. That is, the computing unit is used to calculate the spatial vector of the incident light in the camera coordinate system according to the incident light spot image by the least squares method; convert the deflected pixel coordinates and the posture pixel coordinates into the first spatial coordinates and the second spatial coordinates according to the preset algorithm; calculate the first spatial vector group of the mirror reflection spot fitting and the second spatial vector group of the posture reflection spot fitting according to the spatial vector calculation formula and the nonlinear least squares formula for the first spatial coordinates and the second spatial coordinates; perform vector subtraction operation on the spatial vector of the incident light and the first spatial vector group to obtain the mirror normal deflection vector group; and calculate the first spatial vector of the incident light and the second spatial vector group according to the spatial vector of the second spatial coordinate. A vector subtraction operation is performed on the vector group to obtain a posture normal vector group; the posture normal vector group is rotated by nonlinear least square method to obtain a rotation matrix; the spot space vector group corresponding to the mirror reflection spot in the rotated standard micro-vibration mirror coordinate system is calculated according to the rotation matrix and the mirror normal deflection vector group; the vector rotation angle is converted for the rotated spot space vector group to obtain the pitch angle and horizontal angle of each vector in the standard micro-vibration mirror coordinate system, and the first deflection angle of the standard micro-vibration mirror in a preset posture is obtained; at the imaging position corresponding to the preset imaging distance and the preset posture, a fitting formula between the first pixel coordinate and the first deflection angle is established.

[0119] The preset algorithm may be a spatial vector calculation formula, which may include a conversion relationship algorithm between the camera coordinate system and the world coordinate system, a conversion relationship algorithm between the pixel coordinate system and the physical coordinate system, a conversion relationship algorithm between the camera coordinate system and the world coordinate system, and a conversion relationship algorithm between the pixel coordinate system and the world coordinate system. The specific contents of the preset algorithm may refer to the relevant technology, and for the sake of brevity, they will not be described here. The preset imaging distance may refer to Figure 2 The imaging distance between the imaging panel 70 and the standard micro-vibration mirror 10 when the imaging panel 70 is at position A1.

[0120] Specifically, firstly, the spatial coordinates of the incident light in the camera coordinate system are obtained according to the image recognition algorithm and the incident light spot image, and the spatial vector of the incident light in the camera coordinate system is calculated according to the spatial coordinates in the camera coordinate system and the least squares method. Among them, the spatial coordinates of the incident light in the camera coordinate system can be, for example, D1 (x1, y1, z1), D2 (x2, y2, z2), Dn (xn, yn, zn) or other spatial coordinates, which are not limited here. It should be noted that D1 represents the first light spot of the incident light, and (x1, y1, z1) represents the spatial coordinates of the first light spot in the camera coordinate system. The spatial vector of the incident light can be represented by E0.

[0121] According to the conversion relationship algorithm between the camera coordinate system and the world coordinate system, the conversion relationship algorithm between the pixel coordinate system and the physical coordinate system, the conversion relationship algorithm between the camera coordinate system and the world coordinate system, and the conversion relationship algorithm between the pixel coordinate system and the world coordinate system, the deflected pixel coordinates are converted into the first space coordinates, and the pose pixel coordinates are converted into the second space coordinates.

[0122] A first space vector group for fitting the mirror reflection spot is obtained according to the space vector calculation formula and the first space coordinate, and a second space vector group for fitting the pose reflection spot is obtained according to the space vector calculation formula and the second space coordinate. For example, the first space vector group can be represented by E1, and the second space vector group can be represented by E2.

[0123] At this time, E1-E0 can be used to obtain the mirror normal deflection vector group, and E2-E0 can be used to obtain the pose normal vector group, and the pose normal vector group is rotated by nonlinear least squares method to obtain the rotation matrix. Among them, the mirror normal deflection vector group can be represented by E1-E0, the pose normal vector group can be represented by E2-E0, and the rotation matrix can be represented by F1.

[0124] The light spot space vector group corresponding to the mirror reflection light spot in the rotated standard micro-mirror coordinate system is calculated according to the rotation matrix and the mirror normal deflection vector group, that is, Vr = (F1(E1-E0)')'. It should be noted that Vr represents the light spot space vector group.

[0125] Then, the vector rotation angle of Vr is converted to obtain the pitch angle and horizontal angle of each vector in the standard micro-vibration mirror coordinate system, so as to obtain the first deflection angle of the standard micro-vibration mirror 10 in the preset position.

[0126] Finally, a fitting formula between the first pixel coordinate and the first deflection angle is established at the imaging position and the preset posture corresponding to the preset imaging distance. For example, the preset imaging distance is Figure 2When the imaging panel 70 is at the A1 position, the imaging distance from the standard micro-vibration mirror 10 can be used to establish the first pixel coordinate and the first deflection angle according to the imaging position and the preset posture corresponding to the imaging distance from the standard micro-vibration mirror 10 at the A1 position, and establish a fitting formula between the first pixel coordinate and the first deflection angle, that is, (Azi, Ele) = f(S). The first pixel coordinate S can be any one of the pixel coordinates of P31, P32, ... P3n, (Azi, Ele) represents the first deflection angle, Ele represents the pitch angle, and Azi represents the horizontal angle. Figure 8 As shown, for example, S can be (x, y, z), then

[0127] In this way, the calibration method of the present application obtains the reflection spot image and the mirror reflection spot image of the standard micro-vibration mirror 10, and obtains the pose pixel coordinates of the pose reflection spot by extracting the pixel geometric centroid of the spot on the pose reflection spot image, and obtains the deflected pixel coordinates of the mirror reflection spot by extracting the pixel geometric centroid of the spot on the mirror reflection spot image, and then calculates the fitting formula of the standard micro-vibration mirror 10 through the pose pixel coordinates and the deflected pixel coordinates, so as to subsequently calculate the second deflection angle of the micro-vibration mirror 20 to be tested through the fitting formula and the second pixel coordinates of the micro-vibration mirror to be tested.

[0128] The calibration system 100 for the mirror deflection angle of the micro-vibration mirror in the implementation method of the present application is consistent with the description of the above-mentioned implementation method and will not be repeated here.

[0129] In this way, the calibration system 100 of the present application adjusts the placement posture of the micro-vibration mirror 20 to be tested to be consistent with the standard micro-vibration mirror 10 as a preset posture, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror 20 to be tested into the pixel-angle fitting formula corresponding to the standard micro-vibration mirror 10 to obtain the second deflection angle of the micro-vibration mirror 20 to be tested. This method does not need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor does it require a complex test scene. It has high accuracy and simple operation, and the test efficiency is greatly improved. It not only ensures the high-precision requirements for the deflection angle calibration of the micro-vibration mirror 20 to be tested, but also greatly improves the calibration speed of a single micro-vibration mirror 20 to be tested.

[0130] See also Figure 2 In some embodiments, the computing unit is connected to both the camera 90 and the two-dimensional rotating stage 30. The laser emitter 50 is used to emit laser light. The two-dimensional rotating stage 30 includes a pitch axis Y or a horizontal axis X, which is used to control the standard micro-vibration mirror 10 or the micro-vibration mirror to be tested 20 to deflect around the pitch axis Y or the horizontal axis X to form a mirror deflection angle. The fixing fixture 60 is used to fix the standard micro-vibration mirror 10 or the micro-vibration mirror to be tested 20 at the intersection of the pitch axis Y and the horizontal axis X of the two-dimensional rotating stage 30.

[0131] The imaging panel 70 is used to display the reflected light spot images formed by the laser being reflected at different imaging distances when the standard micro-vibration mirror 10 is in a preset posture; and to display the mirror deflection light spot images formed by the laser being reflected at different mirror deflection angles on the imaging panel 70 when the laser is reflected at a preset imaging distance and preset posture by the micro-vibration mirror 20 to be tested. The mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle.

[0132] The motor controller 80 is used to control the imaging panel 70 to move forward and backward relative to the two-dimensional rotating stage 30 .

[0133] The camera 90 is used to obtain the light spot of the incident light when the standard micro-vibration mirror 10 is in a preset posture to form a corresponding incident light spot image; obtain the posture reflection light spot image formed by the reflection at different imaging distances when the standard micro-vibration mirror 10 is in a preset posture; obtain the mirror reflection light spot image formed by the reflection of the standard micro-vibration mirror 10 at different mirror deflection angles at the preset posture and preset imaging distance; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle.

[0134] Specifically, Figure 2 As shown, the standard micro-vibration mirror 10 can be first installed on the fixed fixture 60, that is, the standard micro-vibration mirror 10 is installed at the intersection of the pitch axis Y and the horizontal axis X of the two-dimensional rotating stage 30 (such as Figure 8 As shown in FIG. 1 , the initial state of the standard micro-vibration mirror 10 can be set to a preset position by adjusting the two-dimensional rotating stage 30. Then, the motor controller 80 is started to control the imaging panel 70 to move to Figure 2 A1 position in the image processing unit 10 is set, and a DC voltage is applied to the standard micro-vibration mirror 10. The camera 90 obtains the pose reflection spot image and the mirror reflection spot image on the imaging panel 70, extracts the pixel geometric centroid of the spot on the pose reflection spot image and the pixel geometric centroid of the mirror emission spot through the pose reflection spot image and the mirror reflection spot image, and outputs the pose pixel coordinates of the pose reflection spot and the deflected pixel coordinates of the mirror reflection spot.

[0135] Then, the micro-vibration mirror 20 to be tested is mounted on the fixed fixture 60, that is, the micro-vibration mirror 20 to be tested is also mounted at the intersection of the pitch axis Y and the horizontal axis X of the two-dimensional rotating stage 30 (such as Fig. 9 As shown in the figure, by adjusting the two-dimensional rotating stage 30, the initial state of the micro-vibration mirror 20 to be tested can also be the preset posture, so that the posture of the micro-vibration mirror 20 to be tested is consistent with the previous posture of the standard micro-vibration mirror 10, and no other calibration action is required for the micro-vibration mirror 20 to be tested, so that the final calibration efficiency of the deflection angle of the micro-vibration mirror 20 to be tested is high and the error is small.

[0136] In this way, the calibration system 100 of the present application places the micro-vibration mirror 20 to be tested on the fixed fixture 60, so that the micro-vibration mirror 20 to be tested is located at the intersection of the pitch axis Y and the horizontal axis X of the two-dimensional rotating table 30, and there is no need to calibrate the micro-vibration mirror 20 to be tested. In addition, the present application installs the micro-vibration mirror 20 to be tested on the fixed installation fixture 60, so that the posture of the micro-vibration mirror 20 to be tested is consistent with the posture of the standard micro-vibration mirror 10, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror 20 to be tested into the fitting formula between the first pixel coordinates of the standard micro-vibration mirror 10 and the first deflection angle to calculate the second deflection angle of the micro-vibration mirror 20 to be tested. Therefore, there is no need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor is there a need for complex test scenes. The operation is simple, and while ensuring high-precision calibration of the second deflection angle of the micro-vibration mirror 20 to be tested, the calibration speed of the second deflection angle of a single micro-vibration mirror 20 to be tested can also be improved.

[0137] See also Figure 2 In some embodiments, the laser emitter 50 emits light into the standard micro-vibration mirror 10 after passing through two or more light spot trace members 40, and the camera 90 obtains two or more light spots in the two or more light spot trace members 40 to form the incident light spot image. The light spot trace member 40 can be an attenuation sheet or a glass sheet.

[0138] For example, Figure 2 As shown, two light spot trace members 40 are arranged on the incident light path between the laser emitter 50 and the standard micro-vibration mirror 10. When it is necessary to obtain an incident light spot image, the incident light spot image consisting of two light spots formed on the imaging panel 70 after being emitted by the laser emitter 50 through the two light spot trace members 40 can be obtained by using the cameras 90 arranged above and below the two-dimensional rotating stage 30.

[0139] In this way, the calibration system 100 of the present application has two or more light spot trace members 40 between the laser emitter 50 and the standard micro-vibration mirror 10. When the laser emitter 50 emits light, the light passes through the two or more light spot trace members 40 and then is emitted into the standard micro-vibration mirror 10, and the incident light spot image composed of two or more light spots can be obtained through the camera 90.

[0140] The present application also provides a computer-readable storage medium. The computer-readable storage medium includes a memory and a processor. The memory stores a computer program, and when the computer program is executed by the processor, the calibration method in the above embodiment is implemented, which will not be described in detail for the sake of brevity.

[0141] In this way, the computer-readable storage medium of the present application adjusts the placement posture of the micro-vibration mirror 20 to be tested to be consistent with that of the standard micro-vibration mirror 10 as a preset posture, and then substitutes the obtained second pixel coordinates of the micro-vibration mirror 20 to be tested into the pixel-angle fitting formula corresponding to the standard micro-vibration mirror 10 to obtain the second deflection angle of the micro-vibration mirror 20 to be tested. This method does not need to calculate the rotation matrix of the micro-vibration mirror coordinate system and the camera coordinate system, nor does it require a complex test scene. It has high accuracy and simple operation, and the test efficiency is greatly improved. It not only ensures the high-precision requirements for the deflection angle calibration of the micro-vibration mirror 20 to be tested, but also greatly improves the calibration speed of a single micro-vibration mirror 20 to be tested.

[0142] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A method for calibrating the mirror deflection angle of a micro-vibration mirror. It is characterized in that The calibration method comprises: Obtaining a fitting formula between a first pixel coordinate and a first deflection angle of a standard micro-vibration mirror at a preset posture and a preset imaging distance, wherein the first deflection angle includes a first pitch angle and a first horizontal angle; Obtaining a second pixel coordinate corresponding to the micro-vibration mirror to be tested at the preset posture and the preset imaging distance; The second deflection angle of the micro-vibration mirror to be measured is calculated according to the fitting formula between the first pixel coordinate and the first deflection angle and the second pixel coordinate, and the second deflection angle includes a second pitch angle and a second horizontal angle.

2. The calibration method according to claim 1, It is characterized in that The fitting formula for obtaining the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror at a preset posture and a preset imaging distance includes: Acquire the reflected light spot images formed by the standard micro-vibration mirror at the preset posture and at different preset imaging distances; Acquire a mirror reflection spot image formed by the standard micro-vibration mirror at the preset posture and the preset imaging distance at different mirror deflection angles; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle; Extracting the pixel geometric centroid of the light spot on the pose reflection light spot image to obtain the pose pixel coordinates of the pose reflection light spot formed by the imaging panel at different imaging distances; and extracting the pixel geometric centroid of the light spot on the mirror reflection light spot image to obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances; A fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror at the preset posture and the preset imaging distance is calculated according to the posture pixel coordinate and the deflection pixel coordinate.

3. The calibration method according to claim 1, It is characterized in that The step of obtaining the second pixel coordinates corresponding to the micro-vibration mirror to be measured at the preset posture and the preset imaging distance includes: Acquire a mirror reflection spot image formed by the micro-vibration mirror to be tested at the preset posture and the preset imaging distance at different mirror deflection angles; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle; The pixel geometric centroid of the light spot on the mirror reflection light spot image corresponding to the micro-vibration mirror to be tested is extracted, the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances are obtained, and the second pixel coordinates are obtained.

4. The calibration method according to claim 2, It is characterized in that Before calculating the fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror at the preset posture and the preset imaging distance according to the pixel coordinate, the calibration method includes: The light spot of the incident light of the standard micro-vibration mirror at the preset position is obtained to form a corresponding incident light spot image.

5. The calibration method according to claim 4, It is characterized in that The calibration method comprises: Two or more light spot trace members are arranged on the incident light path of the standard micro-vibration mirror to form the incident light spot image composed of two or more light spots.

6. The calibration method according to claim 4, It is characterized in that The fitting formula between the first pixel coordinate and the first deflection angle of the standard micro-vibration mirror calculated according to the posture pixel coordinate and the deflection pixel coordinate at the preset posture and the preset imaging distance includes: The spatial vector of the incident light in the camera coordinate system is calculated by the least square method according to the incident light spot image; Converting the deflected pixel coordinates and the pose pixel coordinates into first space coordinates and second space coordinates according to a preset algorithm; Calculate the first spatial coordinates and the second spatial coordinates according to a spatial vector calculation formula and a nonlinear least squares formula to obtain a first spatial vector group for mirror reflection spot fitting and a second spatial vector group for posture reflection spot fitting; Performing a vector subtraction operation on the spatial vector of the incident light and the first spatial vector group to obtain a mirror normal deflection vector group; Performing a vector subtraction operation on the spatial vector of the incident light and the second spatial vector group to obtain a posture normal vector group; Rotate the posture normal vector group using a nonlinear least squares method to obtain a rotation matrix; Calculate the light spot space vector group corresponding to the mirror reflection light spot in the rotated standard micro-mirror coordinate system according to the rotation matrix and the mirror normal deflection vector group; Convert the vector rotation angle of the rotated light spot space vector group to obtain the pitch angle and horizontal angle of each vector in the standard micro-vibration mirror coordinate system, and obtain the first deflection angle of the standard micro-vibration mirror in the preset posture; At the imaging position corresponding to the preset imaging distance and the preset posture, a fitting formula between the first pixel coordinate and the first deflection angle is established.

7. A calibration system for the mirror deflection angle of a micro-vibration mirror, It is characterized in that The calibration system includes a micro-vibration mirror to be tested, a standard micro-vibration mirror and a processor, wherein the processor is used for: Obtaining a fitting formula between a first pixel coordinate and a first deflection angle of a standard micro-vibration mirror at a preset posture and a preset imaging distance; Acquire a second pixel coordinate corresponding to the micro-vibration mirror to be tested at the preset posture and the preset imaging distance; The second deflection angle of the micro-vibration mirror to be tested is obtained by calculating according to a fitting formula between the first pixel coordinate and the first deflection angle and the second pixel coordinate.

8. The calibration system according to claim 7, It is characterized in that The calibration system further comprises a laser transmitter, a two-dimensional rotating stage, a fixed fixture, an imaging panel, a motor controller, a camera and a computing unit, wherein the computing unit is connected to both the camera and the two-dimensional rotating stage; The laser transmitter is used to emit laser; The two-dimensional rotating stage comprises a pitch axis or a horizontal axis, which is used to control the standard micro-vibration mirror or the micro-vibration mirror to be tested to deflect around the pitch axis or the horizontal axis to form the mirror deflection angle; The fixing fixture is used to fix the standard micro-vibration mirror or the micro-vibration mirror to be tested at the intersection of the pitch axis and the horizontal axis of the two-dimensional rotating stage; The imaging panel is used to display the reflected light spot images formed by the laser being reflected at different imaging distances when the standard micro-vibration mirror is in the preset posture; and to display the mirror deflection light spot images formed by the laser being reflected on the imaging panel at different mirror deflection angles when the laser is passed through the micro-vibration mirror to be tested at the preset imaging distance and the preset posture, wherein the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle; The motor controller is used to control the imaging panel to move forward and backward relative to the two-dimensional rotating stage; The camera is used to obtain the incident light spot image corresponding to the incident light spot formed by the standard micro-vibration mirror at the preset posture; obtain the posture reflection light spot image formed by the reflection at different imaging distances formed by the standard micro-vibration mirror at the preset posture; obtain the mirror reflection light spot image formed by the reflection of the standard micro-vibration mirror at different mirror deflection angles at the preset posture and the preset imaging distance; the mirror deflection angle includes an upward or downward pitch angle and a left or right horizontal angle; The calculation unit is used to extract the pixel geometric centroid of the light spot on the pose reflection light spot image, and obtain the pose pixel coordinates of the pose reflection light spot formed by the imaging panel at different imaging distances; and extract the pixel geometric centroid of the light spot on the mirror reflection light spot image, and obtain the deflected pixel coordinates of the mirror reflection light spot formed by the imaging panel at different imaging distances; calculate the fitting formula between the first pixel coordinates and the first deflection angle of the standard micro-vibration mirror at the preset pose and the preset imaging distance according to the pose pixel coordinates and the deflected pixel coordinates.

9. The calibration system according to claim 8, It is characterized in that The computing unit is also used for: The spatial vector of the incident light in the camera coordinate system is calculated by the least square method according to the incident light spot image; Converting the deflected pixel coordinates and the pose pixel coordinates into first space coordinates and second space coordinates according to a preset algorithm; Calculate the first spatial coordinates and the second spatial coordinates according to a spatial vector calculation formula and a nonlinear least squares formula to obtain a first spatial vector group for mirror reflection spot fitting and a second spatial vector group for posture reflection spot fitting; Performing a vector subtraction operation on the spatial vector of the incident light and the first spatial vector group to obtain a mirror normal deflection vector group; Performing a vector subtraction operation on the spatial vector of the incident light and the second spatial vector group to obtain a posture normal vector group; Rotate the posture normal vector group using a nonlinear least squares method to obtain a rotation matrix; Calculate the light spot space vector group corresponding to the mirror reflection light spot in the rotated standard micro-mirror coordinate system according to the rotation matrix and the mirror normal deflection vector group; Convert the vector rotation angle of the rotated light spot space vector group to obtain the pitch angle and horizontal angle of each vector in the standard micro-vibration mirror coordinate system, and obtain the first deflection angle of the standard micro-vibration mirror in the preset posture; At the imaging position corresponding to the preset imaging distance and the preset posture, a fitting formula between the first pixel coordinate and the first deflection angle is established.

10. The calibration system according to claim 9, It is characterized in that The laser emitter emits the light into the standard micro-vibration mirror after passing through two or more light spot trace members, and the camera acquires the two or more light spots in the two or more light spot trace members to form the incident light spot image.

11. A computer-readable storage medium, It is characterized in that The device comprises a processor and a memory, wherein the memory stores a computer program, and when the computer program is executed by the processor, the calibration method according to any one of claims 1 to 5 is implemented.

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