A clamping and suction nozzle suitable for hollow chips

Abstract

The present invention discloses an integrated suction nozzle suitable for hollow chips. The invention relates to the field of semiconductor chip packaging, and specifically includes: a nozzle piston cylinder, a piston connecting shaft, a fixed slide rod, a clamping and suction claw, and an air suction pipe. When the welding head mechanism of the placement machine equipment performs vacuuming, the internal piston connecting shaft of the nozzle piston cylinder moves upward, driving the clamping and suction claw to contract inwardly toward the fixed slide rod to clamp the side of the hollow chip. At the same time, the front side of the clamping and suction claw is close to the two sides of the air bridge chip, and the air suction pipe connected to the nozzle piston cylinder performs vacuuming and suction on the two sides of the air bridge chip to achieve an integrated suction and clamping effect. The nozzle solves the problem of picking up and mounting chips with a hollow structure or a sensitive structure on the front side and unable to adsorb the side during automatic chip mounting.

Description

Technical Field

[0001] The invention relates to the field of semiconductor chip packaging, in particular to a clamping and suction integrated nozzle suitable for hollow chips. Background Art

[0002] In the packaging process of semiconductor chips, it is necessary to pick up the bare chip from the blue film or UV film or chip box, and then place it in the designated area on the tube shell or substrate or frame to complete the chip mounting process. Conventional suction nozzles are adsorbed on the front surface of the chip to complete the picking action. For bare chips with hollow surfaces or sensitive microstructures, conventional suction nozzles cannot pick them up. Although some hollow chip suction nozzles that are specially used to adsorb the contact surfaces around the chip surface can pick them up, they will be affected by the accuracy of the placement machine equipment and the size of the contact surface of the hollow chip. When the accuracy of the placement machine is low or the size of the contact surface of the hollow chip is small, it is easy to be misaligned, resulting in the chip being unable to be picked up normally. The picking method of the present invention is to open the suction claws and then clamp the side of the chip internally, and then adsorb the contact surfaces at both ends of the front of the chip after clamping. It has a high fault tolerance rate and is not easily affected by the accuracy of the placement machine equipment and the size of the contact surface of the hollow chip, making it easier to pick up the chip. Summary of the invention

[0003] The invention discloses a clamping and suction integrated nozzle suitable for hollow chips, which can overcome the disadvantages of the above-mentioned prior art and solve the problem of picking up and mounting chips with air bridges or sensitive structures on the front side.

[0004] The technical solution adopted by the present invention is as follows:

[0005] A suction nozzle for clamping and sucking hollow chips, comprising a nozzle piston cylinder, a piston connecting shaft, a fixed sliding rod, a clamping and sucking claw and a suction pipe and other structures; the two side walls of the nozzle piston cylinder are provided with suction pipe cavities, and the suction pipe cavities are connected to the clamping and sucking claws through the suction pipe; the clamping and sucking claws are two on the left and right, and the clamping and sucking claws are provided with an action axis, an action axis bolt, a sliding hole, an edge wall, a ventilation pipe cavity and an anti-collision pad; the clamping and sucking claws are in a "convex" shape, the action axis, the action axis bolt, the sliding hole and the anti-collision pad are all located on the same side of the "convex" character, and the other side of the "convex" character is used for clamping and sucking the chip; when the clamping and sucking claws are opened to the limit, the anti-collision pad contacts with the vertical section of the fixed sliding rod to play an anti-collision role; The side wall along the edge wall is located on the "convex" surface and is used to contact the two ends of the front side of the hollow chip; the ventilation tube cavity passes through the edge wall and the clamping claw body and is connected to the suction pipe; the sliding hole passes through the anti-impact pad and is used to connect with the fixed slide rod; the fixed slide rod is U-shaped and is fixedly connected to the bottom of the suction nozzle piston cylinder by a slide rod bolt to provide a sliding stroke and support for the clamping claw; a rotating shaft rod is provided at the bottom end of the piston connecting shaft, and the rotating shaft rod is connected to the action shaft of the clamping claw, which is in a rotatable and active state after connection, and the action shaft is fixed by the action shaft bolt. When the piston connecting shaft moves up and down toward the air cavity of the suction nozzle piston cylinder, the tensile force generated drives the clamping claw to open or close.

[0006] Furthermore, the nozzle piston cylinder is provided with an air cavity, an air suction tube cavity and a sliding rod bolt; there are at least two air suction tube cavities, which penetrate the side wall of the nozzle piston cylinder, and the position of the air suction tube cavity is higher than the maximum height when the piston connecting axis moves to the upper side of the air cavity of the nozzle piston cylinder to the limit; there are at least four sliding rod bolts, which fix the two fixed sliding rods in a vertical through-bolt manner.

[0007] Furthermore, the piston connecting shaft is provided with a piston, a piston connecting rod, a piston limiting ring, a rotating shaft and a rotating shaft rod; the piston and the piston connecting rod are in an integrated fixed state; the diameter of the piston limiting ring is larger than the diameter of the piston connecting rod, providing a limit for the movement of the piston connecting rod; the rotating shaft rod is divided into two on the left and right, which are connected to the piston connecting rod through the rotating shaft, and the rotating shaft rod is in a rotatable and movable state after being connected.

[0008] Furthermore, the fixed slide rod is U-shaped and is provided with a slide rod bolt hole; there are at least two fixed slide rods, which are symmetrically connected to the bottom of the suction nozzle piston cylinder and are fixed by the slide rod bolts passing through the slide rod bolt holes; the fixed slide rod provides sliding travel and support for the clamping claw.

[0009] Furthermore, the suction pipe is connected to the suction pipe cavity of the suction nozzle piston cylinder and the ventilation pipe cavity of the clamping and suction claws; there are at least two suction pipes, which are respectively connected to the left and right clamping and suction claws.

[0010] The beneficial effects of the present invention are:

[0011] 1. The suction claws will not touch the middle area of ​​the front side of the bare chip, which can avoid damage to the chip with air bridge or sensitive structure in the middle of the front side.

[0012] 2. The two gripping claws clamp the sides of the chip in a parallel and inward-retracted manner. Compared with some hollow chip suction nozzles that specifically adsorb the chip surface, they can pick up the chip more accurately.

[0013] 3. This nozzle adopts clamping and suction integration. When the clamping claw contacts the side of the chip, the edge wall of the clamping claw contacts the two ends of the front side of the chip for adsorption, which can reduce the internal clamping force and improve the comprehensive picking force of the chip.

[0014] 4. The nozzle has a wide range of applications, not only suitable for picking up hollow chips, but also suitable for picking up traditional chips. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of a clamping and suction integrated nozzle suitable for hollow chips of the present invention;

[0016] Figure 2 It is a schematic diagram of the nozzle piston cylinder structure of the present invention;

[0017] Figure 3 This is a schematic diagram of the piston connecting shaft structure of the present invention;

[0018] Figure 4 It is a schematic diagram of the fixed sliding rod structure of the present invention;

[0019] Figure 5 It is a schematic diagram of the structure of the clamping and suction claw of the present invention;

[0020] In the figure: 1-suction nozzle piston cylinder, 101-air cavity, 102-intake tube cavity, 103-slide rod bolt, 2-piston connecting shaft, 201-piston connecting rod, 202-piston limiting ring, 203-rotating shaft, 204-rotating shaft rod, 205-piston, 3-fixed slide rod, 301-slide rod bolt hole, 4-clamping claw, 401-action shaft, 402-sliding hole, 403-along the side wall, 404-ventilation tube cavity, 405-anti-collision pad, 406-action shaft bolt, 5-intake tube. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention are described in detail below through the accompanying drawings in the embodiments of the present invention. The example structures listed in the embodiments all belong to the protection scope of the present invention.

[0022] like Figure 1 The three-dimensional structure of a suction nozzle with a clamping and suctioning function suitable for hollow chips of the present invention is shown, which is composed of a suction nozzle piston cylinder 1, a piston connecting shaft 2, a fixed sliding rod 3, a clamping and suction claw 4 and an air suction pipe 5; the two side walls of the suction nozzle piston cylinder 1 are provided with an air suction tube cavity 102, and the air suction tube cavity 102 is connected to the clamping and suction claw 4 through the air suction pipe 5 to provide an adsorption force for the clamping and suction claw 4; the fixed sliding rod 3 is U-shaped and is fixedly connected to the bottom of the suction nozzle piston cylinder 1 through the sliding rod bolt 103 to provide a sliding stroke and support for the clamping and suction claw 4 ; A rotating shaft rod 204 is provided at the bottom end of the piston connecting shaft 2, and the rotating shaft rod 204 is connected to the action shaft 401 of the clamping claw 4. When the piston connecting shaft 2 moves up and down toward the air cavity 101 of the suction nozzle piston cylinder 1, the tensile force generated drives the clamping claw 4 to open or close; the clamping claw 4 is provided with a sliding hole 402 and a ventilation tube cavity 404, and is mounted on the fixed sliding rod 3 through the sliding hole 402, and the ventilation tube cavity 404 is connected to the suction tube cavity 102 of the suction nozzle piston cylinder 1 through the suction pipe 5.

[0023] like Figure 2 The schematic diagram of the nozzle piston cylinder structure of the present invention is shown, the nozzle piston cylinder 1 is provided with an air cavity 101, an air suction tube cavity 102 and a sliding rod bolt 103; there are at least two air suction tube cavities 102, which pass through the side wall of the nozzle piston cylinder 1, and the position of the air suction tube cavity 102 is higher than the maximum height of the piston connecting shaft 2 moving toward the top of the air cavity 101 of the nozzle piston cylinder 1; there are at least four sliding rod bolts 103, which are connected to the sliding rod bolt holes 301 of the fixed sliding rod 3 in a vertical through-bolt manner.

[0024] like Figure 3 The schematic diagram of the piston connecting shaft structure of the present invention is shown, the piston connecting shaft 2 is provided with a piston 205, a piston connecting rod 201, a piston limiting ring 202, a rotating shaft 203 and a rotating shaft rod 204; the piston 205 and the piston connecting rod 201 are in an integrated fixed state; the diameter of the piston limiting ring 202 is larger than the diameter of the piston connecting rod 201, providing a limit for the movement of the piston connecting rod 201, and the material of the piston limiting ring 202 is silicone, which is convenient for flexible installation; the rotating shaft rod 204 is divided into two on the left and right, and the rotating shaft rod 204 is connected to the piston connecting rod 201 through the rotating shaft 203, and the rotating shaft rod 204 is in a rotatable and movable state after being connected.

[0025] like Figure 4The schematic diagram of the fixed slide rod structure of the present invention is shown, wherein the fixed slide rod 3 is U-shaped and is provided with a slide rod bolt hole 301; there are at least two fixed slide rods 3, which are symmetrically connected to the bottom of the suction nozzle piston cylinder 1, and are fixed by the slide rod bolt 103 that is bolted through the slide rod bolt hole 301, thereby providing a sliding stroke and support for the clamping claw 4.

[0026] like Figure 5 The schematic diagram of the structure of the clamping and suction claw of the present invention is shown, the clamping and suction claw 4 is two on the left and right, and the clamping and suction claw 4 is provided with an action axis 401, an action axis bolt 406, a sliding hole 402, a side wall 403, a ventilation tube cavity 404 and an anti-collision pad 405; the clamping and suction claw 4 is in a "convex" shape, the action axis 401, the action axis bolt 406, the sliding hole 402 and the anti-collision pad 405 are all located on the same side of the "convex" character, and the other side of the "convex" character is used for clamping and suctioning the chip; the action axis 401 is connected to the rotating shaft rod 204 of the piston connecting shaft 2, and is in a rotatable and movable state; The action axis 401 is installed and fixed by the action axis bolt 406; the sliding hole 402 passes through the clamping claw 4 body and the anti-collision pad 405, and is used to connect with the fixed slide bar 3; when the clamping claw 4 is opened to the limit, the anti-collision pad 405 contacts the vertical section of the fixed slide bar 3 to play an anti-collision and limiting role, and the material of the anti-collision pad 405 is a soft material such as plastic or silicone; the side wall 403 is used to contact the two ends of the front of the hollow chip; the ventilation tube cavity 404 passes through the side wall 403 and the clamping claw 4 body, and is connected to the suction pipe 5.

[0027] The suction pipe 5 is connected to the suction pipe cavity 102 of the suction nozzle piston cylinder 1 and the ventilation pipe cavity 404 of the clamping and suction claw 4; there are at least two suction pipes 5, which are respectively connected to the left and right clamping and suction claws 4; the suction pipe 5 is made of soft materials such as plastic or silicone.

[0028] It should be noted that although embodiments of the present invention have been shown and described, various changes, modifications and substitutions may be made to these embodiments without departing from the principles of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A clamping and sucking nozzle suitable for hollow chips, characterized in that: The invention comprises a nozzle piston cylinder (1), a piston connecting shaft (2), a fixed sliding rod (3), a clamping and suction claw (4) and a suction pipe (5); specifically, the two side walls of the nozzle piston cylinder (1) are provided with a suction pipe cavity (102), and the suction pipe cavity (102) is connected to the clamping and suction claw (4) through the suction pipe (5); the clamping and suction claw (4) is two on the left and right, and the clamping and suction claw (4) is provided with an action axis (401), an action axis bolt (406), a sliding hole (402), a side wall (403), a ventilation pipe cavity (404) and an anti-collision pad (405); the clamping and suction claw (4) is in a "convex" shape, and the action axis (401), the action axis bolt (406), the sliding hole (402) and the anti-collision pad (405) are all located on the same side of the "convex" character, and the other side of the "convex" character is used for clamping and sucking the chip; the side wall (403) is located on the "convex" character. The side wall of the surface is used to contact the two ends of the front side of the hollow chip; the ventilation tube cavity (404) passes through the edge wall (403) and the clamping and suction claw (4) body, and is connected to the suction pipe (5); the sliding hole (402) passes through the anti-collision pad (405) and is used to be connected to the fixed slide bar (3); the fixed slide bar (3) is U-shaped and fixedly connected to the bottom of the suction nozzle piston cylinder (1) to provide sliding travel and support for the clamping and suction claw (4); the bottom end of the piston connecting shaft (2) is provided with a rotating shaft rod (204), and the rotating shaft rod (204) is connected to the action shaft (401) of the clamping and suction claw (4), and is in a rotatable and movable state after connection, and the action shaft (401) is fixed by the action shaft bolt (406); the piston connecting shaft (2) provides a tensile force for the clamping and suction claw (4), driving the clamping and suction claw (4) to open or close.

2. The one-piece suction nozzle for hollow chips according to claim 1, characterized in that: The nozzle piston cylinder (1) is provided with an air cavity (101), an air suction tube cavity (102) and a sliding rod bolt (103); there are at least two air suction tube cavities (102) which penetrate the side wall of the nozzle piston cylinder (1); there are at least four sliding rod bolts (103) which penetrate vertically into the sliding rod bolt holes (301) of the fixed sliding rod (3).

3. The one-piece suction nozzle for hollow chips according to claim 1, characterized in that: The piston connecting shaft (2) is provided with a piston (205), a piston connecting rod (201), a piston limiting ring (202), a rotating shaft (203) and a rotating shaft rod (204); the piston (205) and the piston connecting rod (201) are in an integrated fixed state; the diameter of the piston limiting ring (202) is larger than the diameter of the piston connecting rod (201); the rotating shaft rod (204) is divided into two on the left and right sides, and the rotating shaft rod (204) is connected to the piston connecting rod (201) through the rotating shaft (203), and is in a rotatable and movable state after the connection.

4. The one-piece suction nozzle for hollow chips according to claim 1, characterized in that: The fixed slide rod (3) is U-shaped, and a slide rod bolt hole (301) is provided at the top; there are at least two fixed slide rods (3), which are symmetrically connected to the bottom of the suction nozzle piston cylinder (1) and are fixed by vertically penetrating the slide rod bolt (103) through the slide rod bolt hole (301).

5. The one-piece suction nozzle for hollow chips according to claim 1, characterized in that: There are at least two suction pipes (5), and the suction pipes (5) are connected to the suction pipe cavity (102) of the suction nozzle piston cylinder (1) and the ventilation pipe cavity (404) of the clamping and suction claw (4).

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