High-purity fluorocarbon gas extraction equipment

Abstract

The invention provides high-purity fluorocarbon gas extraction equipment, and relates to the technical field of gas extraction, the high-purity fluorocarbon gas extraction equipment comprises a pretreatment part, a cooling part connected with the pretreatment part, a purification part connected with the cooling part, and a gas collection part connected with the purification part; a heating part is arranged in the pretreatment part, and the heating part is used for heating the interior of the pretreatment part; a filler supply part is arranged at the bottom of the purification part; the gas collecting part is used for collecting high-purity fluorocarbon gas; through the arrangement of the pretreatment component and the heating component, automatic regeneration in the filtering process is achieved, the filtering efficiency is improved, and the service life is prolonged; through the arrangement of the cooling part and the purification part, the efficient and accurate purification effect is achieved, the energy consumption waste is reduced, and the extraction purity and the extraction efficiency are improved.

Description

Technical Field

[0001] The invention relates to the technical field of gas extraction, and in particular to a high-purity fluorocarbon gas extraction device. Background Art

[0002] High-purity fluorocarbon gases, due to their unique physical and chemical properties, play an important role in the electronics industry, especially in the fields of plasma etching, semiconductor surface cleaning and cryogenic refrigeration. With the development of science and technology, the purity requirements for these gases are getting higher and higher to meet the manufacturing needs of high-performance microelectronic devices.

[0003] Traditional extraction equipment is not precise and optimized in terms of structural design and overall process parameter control, resulting in a large amount of impurities and particulate matter inside the gas, affecting the extraction purity and efficiency; moreover, the sealing and sustainability of the above-mentioned equipment are relatively poor, requiring a lot of energy consumption, high cost, and often accompanied by leakage problems, which not only affects the environment, but also threatens the health of operators. Summary of the invention

[0004] The purpose of the present invention is to provide a high-purity fluorocarbon gas extraction device to solve the technical problems existing in the prior art.

[0005] In order to achieve the above-mentioned object of the invention, the technical solution adopted by the present invention is:

[0006] A high-purity fluorocarbon gas extraction device comprises: a pretreatment component, a cooling component connected to the pretreatment component, a purification component connected to the cooling component, and a gas collection component connected to the purification component; a heating component is provided inside the pretreatment component, and the heating component is used to heat the inside of the pretreatment component; a filler supply component is provided at the bottom of the purification component; and the gas collection component is used to collect high-purity fluorocarbon gas.

[0007] Furthermore, the pretreatment component includes: a first tank body, an activated carbon coarse mesh, an activated carbon fine mesh and a zeolite molecular sieve arranged in sequence along the axial direction of the first tank body, and a guide net arranged on the top of the first tank body; the top of the first tank body is connected to the air pump through an exhaust pipe, and the output end of the air pump is connected to the cooling component through a first connecting air pipe; a feed pipe is provided at the bottom of the first tank body, and the heating component is provided on its inner wall; a filter mesh is provided inside the guide net, and the surface of the filter mesh is slidably connected to a sliding part, and the sliding part is used to clean the filter mesh.

[0008] Furthermore, the heating component includes: a heat source, heating plates equidistantly distributed on the inner wall of the first tank body, and a connecting column for connecting the heat source and the heating plates; the heating component is used to heat the inside of the first tank body and desorb and regenerate the activated carbon coarse mesh, activated carbon fine mesh and zeolite molecular sieve.

[0009] Furthermore, the cooling component includes: a second tank body, a coolant pipe distributed in a circuitous manner inside the second tank body, and a coolant inlet and a coolant outlet respectively arranged at both ends of the coolant pipe; a control valve is provided at the connection between the top of the second tank body and the first connecting air pipe, one side of which is connected to the second connecting air pipe; a support rod for supporting the coolant pipe is provided on the opposite side of the inner wall of the second tank body.

[0010] Furthermore, a plurality of drain valves are provided at the bottom of the second tank body.

[0011] Furthermore, the purification component includes: a third tank body, a main air pipe connected to the second connecting air pipe, a plurality of branch air pipes connected to the main air pipe, and a bubble connected to the branch air pipe; the bottom of the third tank body is connected to the filler supply component through a flange, and the top of the third tank body is connected to the gas collecting component through a gas collecting pipe, and a one-way valve is provided on the gas collecting pipe.

[0012] Furthermore, the bubble cap includes: a shell, an air hole arranged inside the shell, and an air port connected to the branch air pipe; the air hole is connected to the air port through a connecting pipe.

[0013] Furthermore, both ends of the filler supply component are connected to the interior of the third tank body through a filler recovery pipe and a filler supply pipe, and a water pump is provided on the filler recovery pipe.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] (1) The present invention provides a pretreatment component and a heating component, and the gas raw material is filtered through multiple filtrations of the activated carbon coarse mesh, the activated carbon fine mesh, the zeolite molecular sieve and the filter gauze, and after being heated by the heating component, it is automatically regenerated through the desorption regeneration function and can be reused, thereby improving the filtering efficiency and service life, and reducing the cost;

[0016] (ii) The present invention combines the advantages of cooling and separation and purification by setting up cooling components and purification components, thereby achieving efficient and accurate purification effects, reducing energy consumption and waste, and improving extraction purity and extraction efficiency;

[0017] (III) The present invention recycles the waste heat of the filler through the arrangement of the filler supply component, reduces energy consumption, and has the beneficial effect of protecting the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a front view of the present invention;

[0019] Figure 2 It is a schematic diagram of the internal structure of the pretreatment component of the present invention;

[0020] Figure 3 It is a schematic diagram of the internal structure of the cooling component of the present invention;

[0021] Figure 4 It is a schematic diagram of the internal structure of the purification component of the present invention;

[0022] Figure 5 It is an enlarged schematic diagram of the blister of the present invention;

[0023] In the figure: 1. Pretreatment component; 101. First tank body; 102. Activated carbon coarse mesh; 103. Activated carbon fine mesh; 104. Zeolite molecular sieve; 105. Guide net; 106. Filter mesh; 107. Sliding part; 108. Air extraction pipe; 2. Cooling component; 201. Second tank body; 202. Coolant inlet; 203. Coolant outlet; 204. Coolant pipe; 205. Support rod; 206. Control valve; 3. Purification component; 301. Third tank body; 302. Flange; 303. Main air pipe ; 304, branch air pipe; 305, bubble; 3051, shell; 3052, air port; 3053, connecting pipe; 3054, air hole; 4, filler supply component; 5, gas collecting component; 6, heating component; 601, connecting column; 602, heating plate; 603, heat source; 7, air pump; 8, drain valve; 9, feed pipe; 10, one-way valve; 11, first connecting air pipe; 12, second connecting air pipe; 13, filler recovery pipe; 14, water pump; 15, filler supply pipe; 16, gas collecting pipe. DETAILED DESCRIPTION

[0024] In order to make the content of the present invention more clearly understood, the technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. The same parts are represented by the same figure marks. It should be noted that the words "front", "rear", "left", "right", "up" and "down" used in the following description refer to the directions in the drawings, and the words "inside" and "outside" refer to the directions toward or away from the geometric center of a specific component, respectively.

[0025] like Figure 1As shown, in this embodiment, a high-purity fluorocarbon gas extraction device is provided, including: a pretreatment component 1, a cooling component 2 connected to the pretreatment component 1, a purification component 3 connected to the cooling component 2, and a gas collecting component 5 connected to the purification component 3; a heating component 6 is provided inside the pretreatment component 1, and the heating component 6 is used to heat the inside of the pretreatment component 1 to promote desorption and regeneration of the activated carbon coarse mesh 102, the activated carbon fine mesh 103 and the zeolite molecular sieve 104, thereby improving the utilization rate and filtering effect and reducing the investment cost; a filler supply component 4 is provided at the bottom of the purification component 3; the gas collecting component 5 is used to collect high-purity fluorocarbon gas.

[0026] like Figure 2 As shown, further, the pretreatment component 1 includes: a first tank body 101, an activated carbon coarse mesh 102, an activated carbon fine mesh 103 and a zeolite molecular sieve 104 arranged in sequence along the axial direction of the first tank body 101, and a guide mesh 105 arranged on the top of the first tank body 101; the activated carbon coarse mesh 102 has a high specific surface area and a rich microporous structure, and can adsorb a variety of organic and inorganic impurities, the activated carbon fine mesh 103 has the same properties as the activated carbon coarse mesh 102, but the micropore size of the activated carbon fine mesh 103 is smaller than the micropore size of the activated carbon coarse mesh 102; the zeolite molecular sieve 104 has good adsorption selectivity for moisture and carbon dioxide in the gas raw material; the top of the first tank body 101 is connected by an exhaust pipe 108 is connected to the air pump 7, and the output end of the air pump 7 is connected to the cooling component 2 through the first connecting air pipe 11. When working, the air pump 7 is started to pump the gas raw material inside the first tank body 101 into the cooling component 2; a feeding pipe 9 is provided at the bottom of the first tank body 101, and the heating component 6 is provided on its inner wall; a filter mesh 106 is provided inside the guide net 105, and the surface of the filter mesh 106 is slidably connected to a sliding member 107, and the sliding member 107 is used to clean the filter mesh 106. The filter mesh 106 serves as the fourth layer of filtering structure inside the pretreatment component 1, and the sliding member 107 arranged on the upper surface is used to clean the impurities adsorbed on the surface of the filter mesh 106 to improve the adsorption and impurity removal effect.

[0027] like Figure 2As shown, further, the heating component 6 includes: a heat source 603, heating plates 602 equidistantly distributed on the inner wall of the first tank body 101, and a connecting column 601 for connecting the heat source 603 and the heating plate 602; when working, the heat source 603 transfers heat to the heating plate 602 through the connecting column 601, and the heating plate 602 heats the gas raw material inside the first tank body 101 and the activated carbon coarse mesh 102, the activated carbon fine mesh 103 and the zeolite molecular sieve 104, thereby promoting the desorption and regeneration function of the activated carbon coarse mesh 102, the activated carbon fine mesh 103 and the zeolite molecular sieve 104.

[0028] like Figure 3 As shown, further, the cooling component 2 includes: a second tank body 201, a cooling liquid pipe 204 distributed circuitously inside the second tank body 201, and a cooling liquid inlet 202 and a cooling liquid outlet 203 respectively arranged at both ends of the cooling liquid pipe 204; a control valve 206 is provided at the connection between the top of the second tank body 201 and the first connecting air pipe 11, and one side of the control valve is connected to the second connecting air pipe 12; a support rod 205 for supporting the cooling liquid pipe 204 is provided on the opposite side of the inner wall of the second tank body 201; a plurality of drain valves 8 are provided at the bottom of the second tank body 201; when working, the cooling liquid is injected through the cooling liquid inlet 202, and the cooling liquid cools the gas raw material after filtering and heating inside the second tank body 201 through the cooling liquid pipe 204. During the cooling process, the moisture inside the gas raw material falls into the bottom of the second tank body 201 and is discharged from the device through the drain valve 8; the cooling liquid is discharged through the cooling liquid outlet 203, thereby completing the cooling process.

[0029] like Figure 4-5As shown, further, the purification component 3 includes: a third tank body 301, a main air pipe 303 connected to the second connecting air pipe 12, a plurality of branch air pipes 304 connected to the main air pipe 303 and a bubble cap 305 connected to the branch air pipe 304, the bubble cap 305 includes: an outer shell 3051, an air hole 3054 arranged inside the outer shell 3051 and an air port 3052 connected to the branch air pipe 304; the air hole 3054 is connected to the air port 3052 through a connecting pipe 3053; the bubble cap 305 disperses the gas raw material into small bubbles, increases the contact area between the gas raw material and the liquid filler, thereby improving the mass transfer efficiency, and the working size of the air hole 3054 can be adjusted according to the properties of the gas raw material; the setting of the bubble cap 305 also helps to reduce the back-mixing phenomenon between the gas raw material and the liquid filler during the flow process, thereby improving the separation and purification effect; the bottom of the third tank body 301 The top of the filler supply component 4 is connected to the filler supply component 4 through a flange 302, and the top of the filler supply component 4 is connected to the gas collecting component 5 through a gas collecting pipe 16, and a one-way valve 10 is provided on the gas collecting pipe 16; both ends of the filler supply component 4 are connected to the interior of the third tank body 301 through a filler recovery pipe 13 and a filler supply pipe 15, and a water pump 14 is provided on the filler recovery pipe 13. The filler supply component 4 is filled with liquid filler for separating high-purity fluorocarbon gas and heating it; when working, the cooled gas raw material enters the main gas pipe 303 through the second connecting gas pipe 12, and the main gas pipe 303 transports the gas raw material to the inside of the bubble 305 through the branch gas pipe 304. The gas raw material is ejected through the air hole 3054 and mixed and separated with the liquid filler. Because the temperature of the liquid filler is relatively high, the fluorocarbon gas flows upward at this time and enters the gas collecting component 5 through the gas collecting pipe 16, thereby realizing the extraction of high-purity fluorocarbon gas.

[0030] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A high-purity fluorocarbon gas extraction device, characterized in that: include: A pretreatment component (1), a cooling component (2) connected to the pretreatment component (1), a purification component (3) connected to the cooling component (2), and a gas collection component (5) connected to the purification component (3); a heating component (6) is provided inside the pretreatment component (1), and the heating component (6) is used to heat the inside of the pretreatment component (1); a filler supply component (4) is provided at the bottom of the purification component (3); and the gas collection component (5) is used to collect high-purity fluorocarbon gas.

2. The high-purity fluorocarbon gas extraction equipment according to claim 1, characterized in that: The pretreatment component (1) comprises: a first tank body (101), an activated carbon coarse mesh (102), an activated carbon fine mesh (103) and a zeolite molecular sieve (104) arranged in sequence along the axial direction of the first tank body (101), and a guide net (105) arranged on the top of the first tank body (101); the top of the first tank body (101) is connected to the air pump (7) through an exhaust pipe (108), and the output end of the air pump (7) is connected to the cooling component (2) through a first connecting air pipe (11); a feed pipe (9) is provided at the bottom of the first tank body (101), and the heating component (6) is provided on the inner wall thereof; a filter gauze (106) is provided inside the guide net (105), and a sliding member (107) is slidably connected to the surface of the filter gauze (106), and the sliding member (107) is used to clean the filter gauze (106).

3. The high-purity fluorocarbon gas extraction equipment according to claim 2, characterized in that: The heating component (6) comprises: a heat source (603), heating plates (602) equidistantly distributed on the inner wall of the first tank body (101), and a connecting column (601) for connecting the heat source (603) and the heating plates (602); the heating component (6) is used to heat the interior of the first tank body (101) and desorb and regenerate the coarse activated carbon mesh (102), the fine activated carbon mesh (103), and the zeolite molecular sieve (104).

4. The high-purity fluorocarbon gas extraction equipment according to claim 2, characterized in that: The cooling component (2) comprises: a second tank body (201), a cooling liquid pipe (204) distributed in a circuitous manner inside the second tank body (201), and a cooling liquid inlet (202) and a cooling liquid outlet (203) respectively arranged at both ends of the cooling liquid pipe (204); a control valve (206) is provided at the connection between the top of the second tank body (201) and the first connecting air pipe (11), and one side of the control valve is connected to the second connecting air pipe (12); and a support rod (205) for supporting the cooling liquid pipe (204) is provided on the opposite side of the inner wall of the second tank body (201).

5. The high-purity fluorocarbon gas extraction equipment according to claim 4, characterized in that: A plurality of drain valves (8) are provided at the bottom of the second tank body (201).

6. The high-purity fluorocarbon gas extraction equipment according to claim 1, characterized in that: The purification component (3) comprises: a third tank body (301), a main gas pipe (303) connected to the second connecting gas pipe (12), a plurality of branch gas pipes (304) connected to the main gas pipe (303), and a bubble cap (305) connected to the branch gas pipe (304); the bottom of the third tank body (301) is connected to the filler supply component (4) through a flange (302), and the top of the third tank body (301) is connected to the gas collecting component (5) through a gas collecting pipe (16), and a one-way valve (10) is provided on the gas collecting pipe (16).

7. The high-purity fluorocarbon gas extraction equipment according to claim 6, characterized in that: The bubble cap (305) comprises: an outer shell (3051), an air hole (3054) arranged inside the outer shell (3051), and an air port (3052) connected to the branch air pipe (304); the air hole (3054) is connected to the air port (3052) via a connecting pipe (3053).

8. The high-purity fluorocarbon gas extraction equipment according to claim 6, characterized in that: Both ends of the filler supply component (4) are connected to the interior of the third tank (301) through a filler recovery pipe (13) and a filler supply pipe (15), and a water pump (14) is provided on the filler recovery pipe (13).

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