Grinding and polishing method for preventing TGV product from being broken

Abstract

The invention discloses a TGV product anti-fragmentation grinding and polishing method, and belongs to the technical field of TGV product grinding and polishing, the method comprises the following steps: S1, bonding: attaching a UV film to the surface of a TGV product, and removing the edge part of the UV film, so that the UV film is completely attached to the surface of the TGV product; s2, grinding is conducted, specifically, the TGV product is loaded, chemical corrosion and mechanical grinding are conducted on the TGV product through CMP equipment, and efficient removal of redundant materials on the surface of the TGV product and planarization of the surface of the TGV product are achieved; s3, spin-drying and cleaning: putting the TGV product on a spin-drying machine, spraying a cleaning solution to the surface of the TGV product by adopting a high-speed rotating spray head, and removing surface pollutants through physical scrubbing; s4, peptizing, wherein the TGV product is placed in a UV peptizing machine, and peptizing operation is completed; and S5, separation is conducted, specifically, the TGV product is separated from the UV film, and the UV film is removed from the surface of the TGV product. The UV film is attached to the surface of the TGV product, and the problem that the TGV product is broken or warped in the grinding and polishing process can be effectively solved.

Description

Technical Field

[0001] The invention belongs to the technical field of grinding and polishing of TGV products, and in particular relates to a grinding and polishing method for preventing TGV products from being broken. Background Art

[0002] TGV glass through-hole technology has been widely used in many fields, including but not limited to optical communications, RF modules, optoelectronic system integration, MEMS packaging, consumer electronics, medical devices, etc. The application of this technology benefits from its excellent high-frequency electrical properties, simple process flow, strong mechanical stability, small warping and low cost. Large-size glass is easy to obtain, making TGV technology widely used in RF components, optoelectronic integration, MEMS, etc. In addition, the successful application of TGV technology is also reflected in its ability to achieve ultra-high-precision three-dimensional processing capabilities, with a minimum aperture of 5 microns and a minimum pitch of 6 microns. It supports through-hole metallization, surface wiring, three-dimensional stacking, and has flexible and extensive material selection.

[0003] In terms of RF modules and optoelectronic system integration, the application of TGV technology has improved the performance and reliability of the system. For example, by applying the stacking method of multi-layer glass substrates to the design and manufacture of millimeter-wave packaged antennas, the warping problem caused by the poor process precision of traditional antenna substrate materials and the mismatch of thermal expansion coefficient with wiring metal has been successfully solved. In the field of consumer electronics, the application of TGV technology makes products thinner and more efficient, while improving product reliability and service life. For example, the application of glass-based folding screen display backplane has good fatigue resistance and can be folded repeatedly 200,000 times, providing new design possibilities for consumer electronic products. In the field of medical devices, the application of TGV technology improves the performance and precision of equipment, especially in medical equipment that requires high-frequency and high-precision signal transmission, TGV technology plays an important role.

[0004] The thickness of most existing TGV products is 100-700um. During the grinding and polishing process of TGV products, due to their thin thickness, they are very likely to break and warp during the grinding and polishing operation, which affects the quality of TGV products and increases costs. Summary of the invention

[0005] The present invention overcomes the shortcomings of the prior art and provides a grinding and polishing method for preventing TGV products from breaking, so as to solve the problems existing in the prior art.

[0006] In order to achieve the above object, the technical solution adopted by the present invention is: a grinding and polishing method for preventing TGV products from breaking, comprising the following steps:

[0007] S1. Bonding: Attach the UV film to the surface of the TGV product, remove the edge of the UV film, and make the UV film completely attached to the surface of the TGV product;

[0008] S2, grinding: Load the TGV product, and use CMP equipment to chemically corrode and mechanically grind the TGV product to achieve efficient removal of excess material on the surface of the TGV product and flatten the surface of the TGV product;

[0009] S3, spin drying and cleaning: Place the TGV product on the spin dryer, use a high-speed rotating nozzle to spray cleaning liquid on the surface of the TGV product, and remove surface pollutants by physical scrubbing;

[0010] S4, degumming: Place the TGV product in the UV degumming machine to complete the degumming operation;

[0011] S5, separation: separating the TGV product from the UV film, so that the UV film is removed from the surface of the TGV product.

[0012] In a preferred embodiment of the present invention, in step S1, a film laminating machine is used to process the UV film so that the UV film is evenly attached to the surface of the TGV product.

[0013] In a preferred embodiment of the present invention, the thickness of the UV film is 150-500 um.

[0014] In a preferred embodiment of the present invention, the outer diameter of the UV film is smaller than the outer diameter of the TGV product.

[0015] The present invention solves the defects existing in the background technology and has the following beneficial effects:

[0016] The anti-fragmentation grinding and polishing method of the TGV product of the present invention attaches a UV film on the surface of the TGV product, which can effectively avoid the problem of breakage or warping of the TGV product during the grinding and polishing process, improve the stability of the TGV product during the grinding and polishing process, and thus effectively reduce the grinding and polishing cost of the TGV product. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention is further described below in conjunction with the accompanying drawings and embodiments;

[0018] Figure 1 A flowchart of a preferred embodiment of the present invention; DETAILED DESCRIPTION

[0019] The following will disclose multiple embodiments of the present invention with drawings. For the purpose of clear description, many physical details will be described together in the following description. However, it should be understood that these physical details should not be used to limit the present invention. That is, in some embodiments of the present invention, these physical details are not necessary. In addition, for the purpose of simplifying the drawings, some conventional structures and components will be depicted in a simple schematic manner in the drawings.

[0020] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present invention. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0021] The present embodiment provides a method for polishing a TGV product to prevent it from breaking. The method for polishing a TGV product to prevent it from breaking is to attach a UV film to the surface of the TGV product. This can effectively prevent the TGV product from breaking or warping during the polishing process, improve the stability of the TGV product during the polishing process, and thus effectively reduce the polishing cost of the TGV product.

[0022] like Figure 1 As shown, the grinding and polishing method for preventing TGV products from breaking in this embodiment includes the following steps:

[0023] S1. Bonding: attaching the UV film to the surface of the TGV product, removing the edge of the UV film, and making the UV film completely attached to the surface of the TGV product. The UV film has low viscosity, thereby avoiding a large amount of glue on the surface of the TGV product. In addition, the thickness of the UV film in this embodiment is 150-500 um, and the outer diameter of the UV film is smaller than the outer diameter of the TGV product, so that the UV film can support the TGV product, which is equivalent to temporary bonding of the TGV product and protects the TGV product.

[0024] S2, grinding: Load the TGV product, and use CMP equipment to chemically corrode and mechanically grind the TGV product to achieve efficient removal of excess material on the surface of the TGV product and flatten the surface of the TGV product;

[0025] S3, spin drying and cleaning: Place the TGV product on the spin dryer, use a high-speed rotating nozzle to spray cleaning liquid on the surface of the TGV product, and remove surface pollutants by physical scrubbing;

[0026] S4, degumming: Place the TGV product in the UV degumming machine to complete the degumming operation;

[0027] S5, separation: separating the TGV product from the UV film, so that the UV film is removed from the surface of the TGV product.

[0028] In step S1 of this embodiment, a film laminating machine is used to process the UV film so that the UV film is evenly attached to the surface of the TGV product, and the TTV is controlled within 3 um.

[0029] Although the present invention has been described above with reference to various embodiments, it should be understood that many changes and modifications may be made without departing from the scope of the present invention. That is, the methods, systems or devices discussed above are all examples. Various configurations may appropriately omit, replace or add various processes or components. For example, in alternative configurations, the method may be performed in an order different from the order described, and / or various stages may be added, omitted and / or combined. Moreover, the features described with respect to certain configurations may be combined in various other configurations. Different aspects and elements of the configurations may be combined in a similar manner. In addition, with the development of technology, many elements are merely examples and do not limit the scope of the present disclosure or claims.

[0030] Specific details are given in the specification to provide a thorough understanding of the exemplary configurations including implementations. However, the configurations can be practiced without these specific details, for example, well-known circuits, processes, algorithms, structures, and techniques have been shown without unnecessary details to avoid obscuring the configurations. This description provides only example configurations and does not limit the scope, applicability, or configurations of the claims. On the contrary, the foregoing description of the configurations will provide those skilled in the art with an enabling description for implementing the described techniques. Various changes may be made to the functions and arrangements of the elements without departing from the spirit or scope of the present disclosure.

[0031] In addition, although each operation may describe the operation as a sequential process, many operations may be performed in parallel or simultaneously. In addition, the order of the operations may be rearranged. A process may have additional steps. In addition, examples of methods may be implemented by hardware, software, firmware, middleware, code, hardware description language, or any combination thereof. When implemented in software, firmware, middleware, or code, program code or code segments for performing the necessary tasks may be stored in a non-transitory computer-readable medium such as a storage medium, and the described tasks are performed by a processor.

[0032] In summary, it is intended that the above detailed description is considered to be exemplary rather than restrictive, and it should be understood that the claims (including all equivalents) are intended to limit the spirit and scope of the present invention. The above embodiments should be understood to be only used to illustrate the present invention and not to limit the scope of protection of the present invention. After reading the content of the record of the present invention, the technician can make various changes or modifications to the present invention, and these equivalent changes and modifications also fall into the scope limited by the claims of the present invention.

Claims

1. A grinding and polishing method for preventing TGV products from breaking, characterized in that: The following steps are involved: S1. Bonding: Attach the UV film to the surface of the TGV product, remove the edge of the UV film, and make the UV film completely attached to the surface of the TGV product; S2, grinding: Load the TGV product, and use CMP equipment to chemically corrode and mechanically grind the TGV product to achieve efficient removal of excess material on the surface of the TGV product and flatten the surface of the TGV product; S3, spin drying and cleaning: Place the TGV product on the spin dryer, use a high-speed rotating nozzle to spray cleaning liquid on the surface of the TGV product, and remove surface pollutants through physical scrubbing; S4, degumming: Place the TGV product in the UV degumming machine to complete the degumming operation; S5, separation: separating the TGV product from the UV film, so that the UV film is removed from the surface of the TGV product.

2. A method for grinding and polishing TGV products to prevent chipping according to claim 1, characterized in that: In step S1, a film laminating machine is used to process the UV film so that the UV film is evenly attached to the surface of the TGV product.

3. A method for grinding and polishing TGV products to prevent chipping according to claim 1, characterized in that: The thickness of the UV film is 150-500um.

4. A method for grinding and polishing TGV products to prevent chipping according to claim 1, characterized in that: The outer diameter of the UV film is smaller than that of the TGV product.

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