Multi-shaft vacuum manipulator

Abstract

The invention discloses a multi-axis vacuum manipulator, and relates to the technical field of semiconductor equipment, the multi-axis vacuum manipulator comprises a mounting main body and at least two transfer assemblies, and each transfer assembly comprises two mechanical arm assemblies; each mechanical arm assembly comprises a first arm, a second arm and an end effector; the first arm is provided with a driving end and a first transmission end, and the driving end and the first transmission end are both provided with joint centers; the second arm is provided with a second transmission end and an execution end, and the second transmission end and the execution end are each provided with a joint center. The end effector is provided with a finger part; the distance between the centers of the two joints of the second arm is different from the distance between the centers of the two joints of the first arm. The joint centers of the driving ends of the first arms are coaxially arranged; and in each transfer assembly, the two first arms rotate alternately, the driving belt wheels do not move, and the finger parts of the corresponding end executors are driven to do linear motion when stretching out or retracting back. The wafer carrying device is used for carrying wafers. The problem that the space occupancy rate is large after the degree of freedom of a mechanical arm is increased in the prior art can be solved at least.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a multi-axis vacuum manipulator. Background Art

[0002] With the continuous improvement of semiconductor process technology, front-end and back-end process equipment manufacturers have put forward higher and more complex requirements for semiconductor automated transmission technology.

[0003] In the prior art, the SCARA (Selective Compliance Assembly Robot Arm) manipulator used for wafer transmission in the industry has a structural feature of equal arm length. This equal arm length SCARA manipulator is widely used in semiconductor automated transmission equipment, such as the atmospheric manipulator integrated in the EFEM (Equipment Front Module) equipment and the vacuum manipulator integrated in the TM (Transfer Module) vacuum transmission equipment; especially for the equal arm length SCARA double-arm manipulator, the atmospheric manipulator often arranges two single-arm length SCARA manipulators symmetrically on the left and right, the rotation axis center of the left manipulator maintains a certain distance from the rotation axis center of the right manipulator, the rotation centers of the left and right manipulator wrists are parallel to the line connecting the centers of their respective rotation axes, and the end effectors of the left and right manipulator wrists remain overlapped, pointing parallel to the aforementioned line and moving in a straight line along the direction of the line.

[0004] The conventional manipulator has at least the following problems: large space occupancy, low film transfer efficiency, and limited film retrieval action.

[0005] Therefore, it is necessary to provide a new multi-axis vacuum manipulator to solve the above problems existing in the prior art. Summary of the invention

[0006] The purpose of the present invention is to provide a multi-axis vacuum manipulator that can at least solve the following technical problems: 1. Solve the problem of large space occupancy rate after the robot's degree of freedom increases in the existing technology; 2. Solve the problem of low wafer transfer efficiency of the robot when wafers are transferred at multiple stations in the prior art; 3. Solve the problem of limited film-taking action of the robot in the prior art.

[0007] To achieve the above object, the technical solution of the present invention is as follows: A multi-axis vacuum manipulator comprises a mounting body and at least two transfer assemblies, wherein the transfer assemblies comprise two mechanical arm assemblies; Each of the mechanical arm assemblies includes a first arm, a second arm, and an end effector; The first arm has a driving end and a first transmission end, the driving end is rotatably arranged on the mounting body, and the driving end and the first transmission end both have a joint center; the second arm has a second transmission end and an execution end, the second transmission end is rotatably arranged on the first transmission end, and the second transmission end and the execution end both have a joint center; the end effector is rotatably arranged on the execution end, and the end effector has a finger portion; The distance between the centers of the two joints of the second arm is different in length from the distance between the centers of the two joints of the first arm; The joint centers of the driving ends of the plurality of first arms are coaxially arranged; Among them, in each of the transfer components, the two first arms rotate alternately or simultaneously, and the driving pulley remains stationary, driving the corresponding finger parts of the end actuator to move in a straight line when extending or retracting; or driving the fingers of the two end actuators to extend or retract simultaneously.

[0008] By adopting the above technical solution, the multi-axis vacuum manipulator includes at least two transfer components, each transfer component includes two robot arm components, that is, the multi-axis vacuum manipulator contains multiple robot arm components, and the multiple robot arm components can operate independently. At the same time, the joint centers of the driving ends of the multiple first arms are coaxially arranged, and the effective lengths of the first arm and the second arm are different, which effectively solves the problem of large space occupancy of traditional robots; at the same time, it solves the problem of low wafer transfer efficiency during wafer multi-station transfer, and can also realize more wafer picking actions.

[0009] Optionally, it also includes a transmission assembly and a rotor assembly; The transmission assembly is disposed in the mechanical arm assembly, and the transmission assembly is used to make the finger portion of the end effector move in a straight line when extending or retracting; The rotor assembly includes a first control group and a second control group, and the first control group and the second control group are respectively connected to the two transfer assemblies so that the joint centers of the plurality of driving ends are coaxially arranged.

[0010] By adopting the above technical solution, the first control group and the second control group respectively control the movement of the two transfer components, and make the joint centers of multiple driving ends coaxially arranged, that is, multiple transfer components are distributed at different heights, which solves the problem of large space occupancy after the degree of freedom of the robot arm component increases.

[0011] Optionally, the transmission assembly includes a driving pulley, an execution pulley and a transmission component, the driving pulley is rotatably arranged at the driving end, the execution pulley is rotatably arranged at the execution end, and the driving pulley and the execution pulley are both transmission-connected to the transmission component; the driving pulley and the execution pulley are both variable diameter pulleys.

[0012] By adopting the above technical solution, both the driving pulley and the execution pulley are variable diameter wheels. The variable diameter wheels are used when the first arm and the second arm are of unequal lengths, so that the finger part on the end effector can maintain linear motion when extending or retracting.

[0013] Optionally, the first control group includes a first rotating shaft, a second rotating shaft and a third rotating shaft which are coaxially arranged, the second rotating shaft passes through the first rotating shaft, and the third rotating shaft passes through the second rotating shaft; In one of the transfer assemblies, the two first arms are fixedly disposed on the first rotating shaft and the third rotating shaft respectively; the two driving pulleys are coaxially disposed with the second rotating shaft and fixedly disposed on the side wall of the second rotating shaft, and the rotation of the second rotating shaft drives the two driving pulleys to rotate synchronously; In the working state, one of the first rotating shaft or the third rotating shaft rotates, the other does not move, and the second rotating shaft does not move, driving the corresponding first arm to rotate, thereby driving the corresponding end effector to move; the first rotating shaft and the third rotating shaft rotate simultaneously, thereby driving the two end effectors to extend or retract simultaneously, or one to extend and the other to retract.

[0014] By adopting the above technical solution, during the working process, different final actuator movements or movements of both actuators can be selected according to different requirements, so that more film-taking actions can be achieved.

[0015] Optionally, the second control group includes a fourth rotating shaft, a fifth rotating shaft and a sixth rotating shaft which are coaxially arranged, the fifth rotating shaft passes through the fourth rotating shaft, and the sixth rotating shaft passes through the fifth rotating shaft; In another transfer assembly, the two first arms are fixedly arranged on the fourth rotating shaft and the sixth rotating shaft respectively; the two driving pulleys are coaxially arranged with the fifth rotating shaft and fixedly arranged on the side wall of the fifth rotating shaft, and the rotation of the fifth rotating shaft drives the two driving pulleys to rotate synchronously; In the working state, one of the fourth rotating shaft or the sixth rotating shaft rotates, the other does not move, and the fifth rotating shaft does not move, driving one of the first arms to rotate, so as to drive the corresponding end effector to move; the fourth rotating shaft and the sixth rotating shaft rotate at the same time, so as to drive the two end effectors to extend or retract at the same time, or one to extend and the other to retract.

[0016] By adopting the above technical solution, during the working process, different final actuator movements or movements of both actuators can be selected according to different requirements, so that more film-taking actions can be achieved.

[0017] Optionally, multiple direct-drive motors are arranged in the installation body, and the fifth rotating shaft passes through the third rotating shaft, so that the first rotating shaft, the second rotating shaft, the third rotating shaft, the fourth rotating shaft, the fifth rotating shaft and the sixth rotating shaft are coaxially arranged and correspond one-to-one to the multiple direct-drive motors, and the multiple direct-drive motors are coaxially arranged.

[0018] By adopting the above technical solution, the two transfer components have four robotic arm components, which can realize more film picking actions, which is convenient for adapting to different working conditions, such as double picking and single placing, three picking and double placing, three picking and single placing, four picking and three placing, four picking and double placing and other actions.

[0019] Optionally, a lifting assembly is disposed in the installation body, and the lifting assembly is connected to the rotor assembly to drive the rotor assembly to move axially along the rotating shaft of the first arm.

[0020] By adopting the above technical solution, the lifting assembly controls and drives the rotor assembly to move axially along the rotating shaft of the first arm, thereby controlling the position of the transfer assembly to change, so as to adapt to working conditions at different heights.

[0021] Optionally, the lifting assembly includes at least one linear guide rail, a lifting motor and a lead screw; The axis of the linear guide is parallel to the axis of the rotating shaft of the first arm, and the rotor assembly is slidably disposed on the linear guide; The axis of the screw rod is parallel to the axis of the linear guide rail, and the end of the screw rod is fixed to the rotating shaft of the lifting motor, and the rotor assembly is threadedly connected to the screw rod; In the working state, the direct drive motor is started to drive the lead screw to rotate, so as to drive the rotor assembly to move axially along the linear guide rail.

[0022] By adopting the above technical solution, the direct drive motor starts to drive the lead screw to rotate, the lead screw is threadedly connected to the rotor assembly, and the rotor assembly is slidably arranged on the linear guide rail, so the direct drive motor starts to drive the rotor assembly to move in the vertical direction.

[0023] Optionally, the transmission component includes a first transmission wheel and a second transmission wheel which are coaxially arranged, the first transmission wheel is rotatably arranged at the first transmission end, the second transmission wheel is fixedly arranged at the first transmission end and extends to the second transmission end, the driving pulley is transmission-connected to the first transmission wheel, the execution pulley is transmission-connected to the second transmission wheel, and the end effector is fixedly connected to the execution pulley; In the working state, the driving pulley is stationary, the first arm rotates, and the rotation of the first transmission wheel drives the second arm to rotate; the second transmission wheel is stationary, and the rotation of the second arm drives the execution pulley to rotate, so as to drive the finger part of the end actuator to move in a straight line when extending or retracting.

[0024] By adopting the above technical solution, the first arm rotates to drive the finger portion of the end effector to perform linear motion when extending or retracting, thereby facilitating the wafer clamping process.

[0025] Optionally, a first transmission belt is arranged on the first arm, and at least one end of the first transmission belt is wound around the side wall of the driving pulley or the side wall of the first transmission pulley; a second transmission belt is arranged on the second arm, and at least one end of the second transmission belt is wound around the side wall of the second transmission pulley or the side wall of the execution pulley.

[0026] By adopting the above technical solution, the first transmission belt and the second transmission belt play a transmission role. The first transmission belt, the second transmission belt cooperate with the driving pulley and the execution pulley to convert the rotation of the first arm into the movement of the finger part of the end effector, which facilitates the wafer clamping process.

[0027] Optionally, at least part of the side wall of the variable diameter wheel is a variable diameter portion, and the variable diameter portion is the side wall that contacts the first transmission belt or the second transmission belt when the variable diameter wheel is stationary or moving.

[0028] By adopting the above technical solution, the side wall of the variable diameter wheel in contact with the first transmission belt is configured with a variable diameter when the variable diameter wheel is stationary or moving, which can adapt to the different lengths of the first arm and the second arm, thereby ensuring that the finger of the end effector moves in a straight line when extending or retracting.

[0029] Optionally, it is characterized in that the radius r1 of the variable diameter wheel is calculated by the following steps: The connection direction between the mounting body and the wafer is defined as a first direction, a direction perpendicular to the first direction is defined as a second direction, a first angle between the first arm and the second direction is defined as θ, and a second angle between the second arm (300) and the second direction is defined as β; The second angle The first angle The corresponding relationship between them is: β=arc =arc

[0030] The transmission ratio G1 of the first arm is:

[0031] The radius r1 of the variable diameter wheel:

[0032] Wherein G1 is the transmission ratio of the first arm (200), R1 is the radius of the first transmission wheel (530); l is the length of the second arm (300); L is the length of the first arm (200); and a is the length difference between the first arm (200) and the second arm (300) in the horizontal direction.

[0033] By adopting the above technical solution and calculating the radius of the variable diameter wheel by the above formula, it is convenient to manufacture a variable diameter wheel adapted to different lengths of the first arm and the second arm, thereby satisfying the requirement that the finger of the end effector moves in a straight line when extending or retracting.

[0034] The beneficial effects of the multi-axis vacuum manipulator provided by the present invention include at least: 1. The joint centers of the driving ends of multiple first arms are coaxially arranged, and the effective lengths of the first arms and the second arms are different, which effectively solves the problem of large space occupancy of traditional manipulators; 2. At least four end effector actions, which can be combined in different ways, such as double pick and single release, three pick and double release, three pick and single release, four pick and three release, four pick and double release, etc., to achieve more film picking actions; 3. Multiple end effectors move independently and can transfer wafers simultaneously, which improves the efficiency of wafer transfer. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Schematic diagram of the position distribution of multiple mechanical arm components and transmission components in the mechanical arm components in an embodiment of the present invention; Figure 2 It is a schematic diagram of the positions of the rotor assembly and the lifting assembly in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a single mechanical arm assembly in an embodiment of the present invention; Figure 4 Schematic diagram of the connection between the transmission assembly and the first transmission belt and the second transmission belt in an embodiment of the present invention; Figure 5 Schematic diagram of the position of the screw rod and the nut in the embodiment of the present invention; Figure 6 It is a simplified schematic diagram of a single mechanical arm assembly in an embodiment of the present invention; Figure 7 Schematic diagram of the angles of the components in a single robotic arm assembly in an embodiment of the present invention; Figure 8 Schematic diagram of the working state of the robot arm assembly in the same direction HOME position, 90° HOME position and reverse HOME position according to the embodiment of the present invention; Fig. 9 It is a schematic diagram of the working state of the mechanical arm assembly in the embodiment of the present invention in the same direction zero position and the reverse zero position; Fig.10 Schematic diagrams of some working states of the robot arm assembly in an embodiment of the present invention when it moves at any angle; Fig.11 Schematic diagram of other working states of the robot arm assembly in the embodiment of the present invention when it moves at any angle.

[0036] Reference numerals: 100, robot arm assembly; 200, first arm; 210, driving end; 220, first transmission end; 300, second arm; 310, second transmission end; 320, execution end; 400, end effector; 500, transmission assembly; 510, driving pulley; 520, execution pulley; 530, first transmission wheel; 540, second transmission wheel; 550, first transmission belt; 560, second transmission belt; 600, rotor assembly; 610, first control group; 611, first rotating shaft; 612, second rotating shaft; 613, third rotating shaft; 620, second control group; 621, fourth rotating shaft; 622, fifth rotating shaft; 623, sixth rotating shaft; 700, lifting assembly; 710, linear guide rail; 720, lead screw; 721, nut; 730, lifting motor; 800, direct drive motor; 900, control assembly. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0038] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0039] Reference Figure 1 , Figure 2 and Figure 3. An embodiment of the present invention provides a multi-axis vacuum manipulator, comprising: a mounting body, at least two transfer assemblies are arranged on the mounting body, each transfer assembly includes two mechanical arm assemblies 100, and a driving structure is also arranged inside the mounting body, which is mainly used to drive the mechanical arm assembly 100 to move; the mechanical arm assembly 100 includes a first arm 200, a second arm 300 and an end effector 400; wherein the first arm 200 has a driving end 210 and a first transmission end 220, and the driving end 210 is rotatably arranged at the end of the mounting body through a rotating shaft and can be rotated on the mounting body; the second arm 300 has a second transmission end 310 and an execution end 320, wherein the second transmission end 310 is rotatably arranged at the first transmission end 220, and the end effector 400 is rotatably arranged at the execution end 320; The first arm 200 has a shell, a cover plate, a bearing and other components inside the first arm 200, and the other components involved are described in detail below; the second arm 300 also has a shell, a cover plate, a bearing and other components inside the second arm 300, and the other components involved are described in detail below; the end effector 400 includes components such as a transition plate, a finger adjustment plate, a finger pressure plate and a finger part, which are mainly used to clamp the wafer. During the movement of the robot arm assembly 100, the first arm 200 rotates around the axis of the installation body, the second arm 300 rotates around the rotating shaft at the first transmission end 220, and the end effector 400 rotates around the rotating shaft of the execution end 320, so that the fingers on the end effector 400 can move to the specified position to clamp the wafer; The length relationship between the second arm 300 and the first arm 200 is that the length of the first arm 200 can be selected to be greater than the length of the second arm 300, or the length of the first arm 200 can be selected to be equal to the length of the second arm 300, or the length of the first arm 200 can be selected to be less than the length of the second arm 300. In this embodiment, the length of the first arm 200 is greater than the length of the second arm 300; at the same time, the driving end 210, the first transmission end 220, the second transmission end 310 and the execution end 320 all have joint centers. In this embodiment, the joint centers of multiple driving ends 210 are coaxially arranged, so that the rotating shafts of multiple first arms 200 are coaxially arranged; the length of the first arm 200 is less than the length of the second arm 300, which means that the length of the distance between the two joint centers of the first arm 200 is less than the length of the two joint centers of the second arm 300, that is, the length of the distance between the two joint centers of the second arm 300 is different from the length of the distance between the two joint centers of the first arm 200, the length of the distance between the two joint centers of the first arm 200 is the effective length of the first arm 200, and the length of the distance between the two joint centers of the second arm 300 is the effective length of the second arm 300; At the same time, since at least two transfer assemblies are arranged on the installation body, it includes at least four robot arm assemblies 100. In each transfer assembly, the two first arms 200 rotate alternately, and the driving pulley 510 remains stationary, driving the corresponding finger parts of the end effector 400 to perform linear motion when extending or retracting; or the two first arms 200 rotate at the same time, driving the two finger parts of the end effector 400 to extend or retract at the same time. The specific rotation method is described in detail later.

[0040] During the rotation of the first arm 200, the second arm 300 and the end effector 400, a transmission assembly 500 for transmission needs to be provided. Figure 2 , Figure 3 and Figure 4 The transmission assembly 500 is arranged inside the robot arm assembly 100, and is used to drive the robot arm assembly 100 to move, and make the finger part of the end effector 400 move linearly relative to the installation body when extending or retracting. The transmission assembly 500 at least includes a driving pulley 510, an execution pulley 520 and a transmission component. The driving pulley 510 is rotatably arranged at the driving end 210 through a rotating shaft, and the driving pulley 510 is placed in the housing of the first arm 200, and the execution pulley 520 is rotatably arranged at the execution end 320 through a rotating shaft, and the execution pulley 520 is placed in the housing of the second arm 300, and the driving pulley 510 and the execution pulley 520 are both connected to the transmission component; the end effector 400 is fixedly arranged with the execution pulley 520, which can be clamped, integrally formed or rigidly connected, etc. In this embodiment, the execution pulley 520 is fixedly arranged on the end effector 400 by rigid connection; the transmission component includes a first transmission wheel 530 and a second transmission wheel 540, the first transmission wheel 530 and the second transmission wheel 540 are coaxially arranged, and the first transmission wheel The first transmission wheel 530 is rotatably arranged at the first transmission end 220 through a rotating shaft, and is arranged inside the housing of the first arm 200. The second transmission wheel 540 is fixedly arranged at the first transmission end 220 and extends to the inside of the housing of the second arm 300. Specifically, a fixed shaft is fixedly arranged at the end surface of the second transmission wheel 540, and the end of the fixed shaft is fixedly arranged at the first transmission end 220. The first transmission wheel 530 is sleeved on the fixed shaft, and the radius of the first transmission wheel 530 is greater than the radius of the second transmission wheel 540. At the same time, the second arm 300 is fixed to the first transmission wheel 530. The first transmission wheel 530 is connected so that when the first transmission wheel 530 rotates, it can drive the second arm 300 to rotate; wherein the driving pulley 510 is connected to the first transmission wheel 530, and the execution pulley 520 is connected to the second transmission wheel 540. In the working state, the driving pulley 510 is stationary, the first arm 200 rotates, and the rotation of the first transmission wheel 530 drives the second arm 300 to rotate; the second transmission wheel 540 is stationary, and the rotation of the second arm 300 drives the execution pulley 520 to rotate, so as to drive the finger part of the end effector 400 to move in a straight line when extending or retracting.

[0041] Since there is a certain distance between the driving pulley 510 and the first transmission wheel 530, the second transmission wheel 540 and the execution pulley 520, a transmission member is required for transmission during the working process, referring to Figure 2 , Figure 3 and Figure 4 The first arm 200 is provided with a first transmission belt 550, and the two ends of the first transmission belt 550 are respectively connected to the driving pulley 510 and the first transmission pulley 530; the second arm 300 is provided with a second transmission belt 560, and the two ends of the second transmission belt 560 are respectively connected to the second transmission pulley 540 and the execution pulley 520; wherein the first transmission belt 550 and the second transmission belt 560 can be transmission belts connected end to end; or they can be transmission belts separated from the end; or wherein one of the first transmission belt 550 and the second transmission belt 560 is a transmission belt connected end to end, and the other is a transmission belt connected end to end. The transmission belt is separated from the head; when it is a transmission belt connected from head to tail, one end of the first transmission belt 550 is sleeved on the side wall of the driving pulley 510, and the other end is sleeved on the side wall of the first transmission wheel 530. One end of the second transmission belt 560 is sleeved on the side wall of the second transmission wheel 540, and the other end is sleeved on the side wall of the execution pulley 520. The driving pulley 510 rotates, and the first transmission belt 550 drives the first transmission wheel 530 to rotate, and the second transmission wheel 540 rotates synchronously, and the execution pulley 520 is not driven to rotate by the second transmission belt 560, thereby driving the end effector 400 to rotate; When it is a transmission belt with its head and tail separated, one or two first transmission belts 550 may be selected, and at least one end of the first transmission belt 550 is wound around the side wall of the driving pulley 510 or the side wall of the first transmission wheel 530. One end of the first transmission belt 550 may be wound around the side wall of the driving pulley 510, or one end of the first transmission belt 550 may be wound around the side wall of the first transmission wheel 530, or both ends of the first transmission belt 550 may be wound around the side wall of the driving pulley 510 and the side wall of the first transmission wheel 530 respectively. The second transmission belt 560 may be provided with one or two, and at least one end of the second transmission belt 560 is wound around the side wall of the execution pulley 520 or the side wall of the second transmission pulley 540. One end of the second transmission belt 560 may be wound around the side wall of the execution pulley 520, or one end of the second transmission belt 560 may be wound around the side wall of the second transmission pulley 540, or both ends of the second transmission belt 560 may be wound around the side wall of the execution pulley 520 and the side wall of the second transmission pulley 540 respectively. In the present embodiment, two first transmission belts 550 and two second transmission belts 560 are used, and both are transmission belts separated at the head and tail, which are suitable for the internal vacuum mode of the manipulator; one end of the first transmission belt 550 is wound around the side wall of the driving pulley 510, and the other end is connected to the side wall of the first transmission wheel 530, and the other end of the first transmission belt 550 is wound around the side wall of the first transmission wheel 530, and the other end is connected to the side wall of the driving pulley 510; one end of the second transmission belt 560 is wound around the side wall of the execution pulley 520, and the other end is connected to the side wall of the second transmission wheel 540; another end of the second transmission belt 560 is wound around the side wall of the second transmission wheel 540, and the other end is connected to the side wall of the execution pulley 520; in addition, the first transmission belt 550 and the second transmission belt 560 can be made of belts, or steel belts or other structures that can realize the transmission function. In the present embodiment, the first transmission belt 550 and the second transmission belt 560 are both steel belts.

[0042] Specifically in this embodiment, the rotating shafts of the driving ends 210 of the two first arms 200 in each transfer assembly are coaxially arranged, and the driving pulleys 510 of the two mechanical arm assemblies 100 are coaxially arranged, and the two driving pulleys 510 are connected. The connection method of the two driving pulleys 510 can be a fixed connection or a detachable connection. In this embodiment, two driving pulleys 510 are selected to be fixedly connected, and the two driving pulleys 510 can rotate synchronously. During the working process, one of the two first arms 200 rotates, and the other does not. The driving pulleys 510 are different, driving the fingers on the corresponding end effectors 400 to perform linear motion when extending or retracting; the two first arms 200 both rotate, the driving pulleys 510 do not move, and the fingers of the two end effectors 400 are extended or retracted at the same time, or one extends and the other retracts; the two first arms 200 both rotate, the driving pulleys 510 rotate, and the transmission ratio of the driving pulley 510 to the first transmission wheel 530 is 2:1, and the transmission ratio of the second transmission wheel 540 to the execution pulley 520 is 1: 2, that is, when the transmission ratio of the three positions is 2:1:2, the transfer assembly performs an integral rotational motion around the mounting body, and the joint centers of the driving ends 210 in the two transfer assemblies are coaxially arranged, that is, the two transfer assemblies can be independently controlled, and at least one of the driving pulley 510 and the execution pulley 520 is a variable diameter wheel. The driving pulley 510 can be selected as a variable diameter wheel, or the execution pulley 520 can be selected as a variable diameter wheel, or the driving pulley 510 and the execution pulley 520 are both variable diameter wheels. In this embodiment, the driving pulley 510 and the execution pulley 520 are selected. The executing pulleys 520 are all variable diameter wheels, so as to adapt to the different effective lengths of the first arm 200 and the second arm 300, and ensure that the finger part of the end effector 400 moves in a straight line when extending or retracting; in addition, at least part of the side wall of the variable diameter wheel is a variable diameter portion. When the driving pulley 510 is a variable diameter wheel, the variable diameter portion is the side wall that contacts the first transmission belt 550 when the variable diameter wheel is stationary or moving; when the executing pulley 520 is a variable diameter wheel, the variable diameter portion is the side wall that contacts the second transmission belt 560 when the variable diameter wheel is stationary or moving.

[0043] During the operation of the robot arm assembly 100, the first arm 200 and the driving pulley 510 in the transfer assembly need to be able to rotate independently. In order to meet the requirement that the first arm 200 and the driving pulley 510 can rotate independently, refer to Figure 2 , Figure 3 and Figure 4The vacuum manipulator also includes a rotor assembly 600, which is arranged inside the installation body and is used to drive the first arm 200, the second arm 300 and the end effector 400 to rotate; wherein the rotor assembly 600 includes a first control group 610 and a second control group 620, the first control group 610 and the second control group 620 are respectively connected to two transfer assemblies, and the joint centers of the plurality of driving ends 210 are coaxially arranged, wherein the first control group 610 includes a first rotating shaft 611, a second rotating shaft 612 and a third rotating shaft The rotating shaft 613, the second rotating shaft 612 is penetrated by the first rotating shaft 611, and the third rotating shaft 613 is penetrated by the second rotating shaft 612. In one group of transfer components, that is, the transfer component corresponding to the first control group 610, the two first arms 200 in the transfer component are respectively fixedly arranged on the first rotating shaft 611 and the third rotating shaft 613, and the fixing method thereof can be bolt fixing, integral molding or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted; the two driving pulleys 510 are both coaxially arranged with the second rotating shaft 612 and fixedly arranged on the side wall of the second rotating shaft 612, and the fixing method thereof can be bolt fixing, integral molding or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted. When the second rotating shaft 612 rotates, the two driving pulleys 510 can be driven to rotate synchronously. During the operation of the transfer component corresponding to the first control group 610, one of the first rotating shaft 611 and the third rotating shaft 613 rotates, and the other does not rotate. The second rotating shaft 612 does not rotate, driving the first rotating shaft 611 or the third rotating shaft 613 to rotate synchronously. The first arm 200 corresponding to the shaft 613 rotates to drive the corresponding finger part on the end effector 400 to move; the first rotating shaft 611 and the third rotating shaft 613 rotate simultaneously, which can drive the fingers of the two end effectors 400 to extend or retract at the same time, or one to extend and the other to retract. The first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 rotate in the same direction at the same time, and when the speed ratio of the first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 is 1:2:1, the robot arm performs a rotational motion as a whole; The second control group 620 includes a fourth rotating shaft 621, a fifth rotating shaft 622 and a sixth rotating shaft 623, the fifth rotating shaft 622 is penetrated by the fourth rotating shaft 621, and the sixth rotating shaft 623 is penetrated by the fifth rotating shaft 622. In another group of transfer components, that is, the transfer component corresponding to the second control group 620, the two first arms 200 in the transfer component are respectively fixedly arranged on the fourth rotating shaft 621 and the sixth rotating shaft 623, and the fixing method thereof can be bolt fixing, one-piece forming or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted; the two driving pulleys 510 are both coaxially arranged with the fifth rotating shaft 622, and are fixedly arranged on the side wall of the fifth rotating shaft 622, and the fixing method thereof can be bolt fixing, one-piece forming or rigid connection, etc. In this embodiment, the rigid connection fixing method is preferably adopted. 2 rotates, the two driving pulleys 510 can be driven to rotate synchronously. During the operation of the transfer assembly corresponding to the second control group 620, one of the fourth rotating shaft 621 and the sixth rotating shaft 623 rotates, the other does not rotate, and the fifth rotating shaft 622 does not rotate, driving the first arm 200 corresponding to the fourth rotating shaft 621 or the sixth rotating shaft 623 to rotate, so as to drive the corresponding finger part on the end effector 400 to move; the fourth rotating shaft 621 and the sixth rotating shaft 623 rotate simultaneously, which can drive the fingers of the two end effectors 400 to extend or retract at the same time, or one to extend and the other to retract. The fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 rotate in the same direction at the same time, and when the speed ratio of the fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 is 1:2:1, the robot arm performs a rotational motion as a whole.

[0044] In the process of the rotor assembly 600 driving the robot arm assembly 100 to rotate, it is necessary to control the rotation of the rotating shaft in the rotor assembly 600. Figure 1 , Figure 2 and Figure 5A control component 900 is also arranged inside the installation body, and the control component 900 includes a main board, an ARM board, an IO board, a power supply board, an interface board, cables and a fan, etc. A driver is also arranged inside the installation body, and the control component 900 is used to control the start and stop of the driver; at the same time, the number of the driver corresponds to the number of the rotating shafts in the rotor assembly 600. In the present embodiment, the driver is a direct-drive motor 800, which is mainly used to drive the rotating shaft in the rotor assembly 600 to rotate. The driver and the rotating shaft can be directly connected or indirectly connected, as long as they can drive the rotating shaft to rotate; at the same time, each direct-drive motor 800 includes a motor housing, an output shaft, a transfer shaft, a bearing cover, a reading head adjustment plate, a bearing, a motor, a code disc, a reading head and an aviation plug interface board; the code disc is an absolute value code disc, and the angular resolution of the code disc is 0.00030 arc seconds. Accurately feedback the angle and position information of the shaft rotation; that is, a plurality of direct-drive motors 800 are arranged in the installation body, and the fifth rotating shaft 622 is penetrated in the fourth rotating shaft 621, so that the first rotating shaft 611, the second rotating shaft 612, the third rotating shaft 613, the fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 are coaxially arranged, and correspond one to one with the number of the plurality of direct-drive motors 800. In addition, the plurality of direct-drive motors 800 are coaxially arranged to facilitate the control of the corresponding rotation of the rotating shaft; a lifting assembly 700 is also arranged in the installation body, and the lifting assembly 700 is connected to the rotor assembly 600, and the lifting assembly 700 is used to drive the rotor assembly 600 to move along the axial direction of the rotating shaft of the first arm 200, and the axial direction of the rotating shaft of the first arm 200 is the axial direction of the joint center of the first arm 200.

[0045] In order to facilitate the lifting assembly 700 to drive the rotor assembly 600 to move, refer to Figure 1 , Figure 2 and Figure 5The lifting assembly 700 includes at least one linear guide 710, a lifting motor 730 and a screw rod 720, wherein the axis of the linear guide 710 is parallel to the axis of the rotating shaft of the first arm 200, and the rotor assembly 600 is slidably set on the linear guide 710. Specifically in this embodiment, the lifting motor 730 in the rotor assembly 600 is slidably set on the linear guide 710, so that multiple direct-drive motors 800 can move along the axial direction of the linear guide 710 to drive the transfer assembly to lift and lower, the axis of the screw rod 720 is parallel to the axis of the linear guide 710, and the end of the screw rod 720 is fixedly set at the rotating shaft of the lifting motor 730 of the lifting assembly 700, and the fixing method can be bolt fixing, clamping or rigid connection, etc. In this embodiment, the rigid connection of the two is preferably used, and a nut 721 is fixedly set on the rotor assembly 600, and the nut 721 is threadedly connected It is connected to the screw rod 720, and the screw rod 720 drives the rotor assembly 600 to move along the linear guide rail 710 by driving the nut 721. Specifically in this embodiment, the screw rod 720 is threadedly connected to the direct drive motor 800 in the rotor assembly 600. In the working state, the lifting motor 730 is started to drive the screw rod 720 to rotate. Since the screw rod 720 is threadedly connected to the direct drive motor 800 in the rotor assembly 600, and the direct drive motor 800 in the rotor assembly 600 is slidably set on the linear guide rail 710, it can drive the rotor assembly 600 to move axially along the linear guide rail 710, thereby completing the control of the lifting and lowering of the transfer assembly. In addition, in this embodiment, two transfer assemblies are used, the two transfer assemblies are distributed in the vertical direction, and the mechanical arm assemblies 100 in the two transfer assemblies can be independently extended or rotated, and the two do not interfere with each other.

[0046] In order to solve the problem of limited path planning during the movement of the robot arm assembly 100, refer to Figure 3 , Figure 6 and Figure 7 , the radius of the variable wheel is related to the effective length of the first arm 200 and the effective length of the second arm 300; when the effective length of the first arm 200 and the effective length of the second arm 300 change, the shape and radius of the variable wheel also change. Specifically, according to the difference between the effective length of the first arm 200 and the effective length of the second arm 300, the radius of the variable wheel can be calculated according to the following content: In this embodiment, the effective length of the first arm 200 is L, and the effective length of the second arm 300 is l. During operation, the effective length L of the first arm 200 and the effective length l of the second arm 300 are fixed values; the direction of the connection between the mounting body and the wafer is defined as the first direction, the direction perpendicular to the first direction is defined as the second direction, the first angle between the first arm 200 and the second direction is θ, the second angle between the second arm 300 and the second direction is β, and a is the length difference between the first arm 200 and the second arm 300 in the horizontal direction; When the first angle θ changes, the second angle β changes accordingly, and the related change relationship is: ▪ =L▪ -

[0047] =

[0048] β=arc =arc

[0049] According to the correlation between the first angle θ and the second angle β, the transmission ratio G1 of the first arm 200 and the transmission ratio G2 of the second arm 300 can be obtained: Transmission ratio G1 of the first arm 200:

[0050] The transmission ratio G2 of the second arm 300 is:

[0051] By using the transmission ratio G1 of the first arm 200 and the transmission ratio G2 of the second arm 300, the radius r1 of the variable diameter wheel when the variable diameter wheel is the driving pulley 510 or the radius r2 of the variable diameter wheel when the variable diameter wheel is the execution pulley 520 can be calculated; When the driving pulley 510 is a variable diameter pulley, the radius of the variable diameter pulley r1 is:

[0052] When the executing pulley 520 is a variable diameter pulley, the radius of the variable diameter pulley r2 is:

[0053] Wherein, R1 and R2 are the radius of the first transmission wheel 530 and the radius of the second transmission wheel 540 respectively; When the driving pulley 510 or the executing pulley 520 is a variable diameter pulley, the radius of the variable diameter pulley can be calculated according to the above algorithm to make it suitable for different working conditions.

[0054] By adopting the above scheme, refer to Figure 8 , Fig. 9 , Fig.10 and Fig.11 There are four robotic arm components in the two transfer components, which can realize more wafer picking actions and adapt to different working conditions, such as double picking and single placing, three picking and double placing, three picking and single placing, four picking and three placing, four picking and double placing, etc. Different wafer picking and placing modes can be selected according to different working conditions to realize multi-station work and improve wafer processing efficiency.

[0055] The implementation principle of the multi-axis vacuum manipulator in the embodiment of the present application is that the lifting assembly 700 installed in the main body controls the height position of the transfer assembly in the vertical direction, and the rotor assembly 600 installed in the main body controls the rotation of the robot arm assembly 100, wherein the first rotating shaft 611, the second rotating shaft 612 and the third rotating shaft 613 control the movement of one of the transfer assemblies, and the fourth rotating shaft 621, the fifth rotating shaft 622 and the sixth rotating shaft 623 control the movement of another transfer assembly, so that the wafer transfer efficiency is improved when the wafer is transferred at multiple stations. At the same time, in the case of multiple robot arm assemblies 100, the space occupancy rate is small. In addition, more wafer picking actions can be realized.

[0056] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A multi-axis vacuum manipulator, characterized in that: It comprises a mounting body and at least two transfer assemblies, wherein the transfer assemblies comprise two mechanical arm assemblies (100); Each of the mechanical arm assemblies (100) comprises a first arm (200), a second arm (300), and an end effector (400); The first arm (200) has a driving end (210) and a first transmission end (220), the driving end (210) is rotatably disposed on the mounting body, and the driving end (210) and the first transmission end (220) both have a joint center; the second arm (300) has a second transmission end (310) and an execution end (320), the second transmission end (310) is rotatably disposed on the first transmission end (220), and the second transmission end (310) and the execution end (320) both have a joint center; the end effector (400) is rotatably disposed on the execution end (320), and the end effector (400) has a finger portion; The distance between the centers of the two joints of the second arm (300) is different from the distance between the centers of the two joints of the first arm (200); The joint centers of the driving ends (210) of the plurality of first arms (200) are coaxially arranged; Wherein, in each of the transfer components, the two first arms (200) rotate alternately or simultaneously, driving the fingers of the corresponding end effectors (400) to move linearly when extending or retracting, or driving the fingers of the two end effectors (400) to extend or retract simultaneously.

2. The multi-axis vacuum manipulator according to claim 1, characterized in that: Also includes a transmission assembly (500) and a rotor assembly (600); The transmission assembly (500) is arranged in the mechanical arm assembly (100), and the transmission assembly (500) is used to make the finger portion of the end effector (400) move in a straight line when extending or retracting; The rotor assembly (600) comprises a first control group (610) and a second control group (620), wherein the first control group (610) and the second control group (620) are respectively connected to the two transfer assemblies so that the joint centers of the plurality of drive ends (210) are coaxially arranged.

3. The multi-axis vacuum manipulator according to claim 2, characterized in that: The transmission assembly (500) comprises a driving pulley (510), an execution pulley (520) and a transmission component; the driving pulley (510) is rotatably disposed at the driving end (210); the execution pulley (520) is rotatably disposed at the execution end (320); the driving pulley (510) and the execution pulley (520) are both transmission-connected to the transmission component; and the driving pulley (510) and the execution pulley (520) are both variable-diameter pulleys.

4. The multi-axis vacuum manipulator according to claim 3, characterized in that: The first control group (610) comprises a first rotating shaft (611), a second rotating shaft (612) and a third rotating shaft (613) which are coaxially arranged, wherein the second rotating shaft (612) passes through the first rotating shaft (611), and the third rotating shaft (613) passes through the second rotating shaft (612); In one of the transfer assemblies, the two first arms (200) are fixedly arranged on the first rotating shaft (611) and the third rotating shaft (613) respectively; the two driving pulleys (510) are coaxially arranged with the second rotating shaft (612) and fixedly arranged on the side wall of the second rotating shaft (612); the rotation of the second rotating shaft (612) drives the two driving pulleys (510) to rotate synchronously; In the working state, one of the first rotating shaft (611) or the third rotating shaft (613) rotates, the other remains stationary, and the second rotating shaft (612) remains stationary, driving the corresponding first arm (200) to rotate, thereby driving the corresponding end effector (400) to move; the first rotating shaft (611) and the third rotating shaft (613) rotate simultaneously, thereby driving the two end effectors (400) to extend or retract simultaneously, or one to extend and the other to retract.

5. The multi-axis vacuum manipulator according to claim 4, characterized in that: The second control group (620) comprises a fourth rotating shaft (621), a fifth rotating shaft (622) and a sixth rotating shaft (623) which are coaxially arranged, wherein the fifth rotating shaft (622) passes through the fourth rotating shaft (621), and the sixth rotating shaft (623) passes through the fifth rotating shaft (622); In another transfer assembly, the two first arms (200) are respectively fixedly arranged on the fourth rotating shaft (621) and the sixth rotating shaft (623); the two driving pulleys (510) are both coaxially arranged with the fifth rotating shaft (622) and fixedly arranged on the side wall of the fifth rotating shaft (622); the rotation of the fifth rotating shaft (622) drives the two driving pulleys (510) to rotate synchronously; In the working state, one of the fourth rotating shaft (621) or the sixth rotating shaft (623) rotates, the other remains stationary, and the fifth rotating shaft (622) remains stationary, driving one of the first arms (200) to rotate, thereby driving the corresponding end effector (400) to move; the fourth rotating shaft (621) and the sixth rotating shaft (623) rotate simultaneously, thereby driving the two end effectors (400) to extend or retract simultaneously, or one to extend and the other to retract.

6. The multi-axis vacuum robot according to claim 5, characterized in that: A plurality of direct-drive motors (800) are arranged in the installation body, and the fifth rotating shaft (622) is passed through the third rotating shaft (613), so that the first rotating shaft (611), the second rotating shaft (612), the third rotating shaft (613), the fourth rotating shaft (621), the fifth rotating shaft (622) and the sixth rotating shaft (623) are coaxially arranged and correspond one-to-one to the plurality of direct-drive motors (800), and the plurality of direct-drive motors (800) are coaxially arranged.

7. The multi-axis vacuum robot according to claim 2, characterized in that: A lifting assembly (700) is arranged in the installation body, and the lifting assembly (700) is connected to the rotor assembly (600) and is used to drive the rotor assembly (600) to move axially along the rotating shaft of the first arm (200).

8. The multi-axis vacuum robot according to claim 7, characterized in that: The lifting assembly (700) comprises at least one linear guide rail (710), a lifting motor (730) and a lead screw (720); The axis of the linear guide rail (710) is parallel to the axis of the rotating shaft of the first arm (200), and the rotor assembly (600) is slidably disposed on the linear guide rail (710); The axis of the screw rod (720) is parallel to the axis of the linear guide rail (710), and the end of the screw rod (720) is fixed to the rotating shaft of the lifting motor (730), and the rotor assembly (600) is threadedly connected to the screw rod (720); In the working state, the lifting motor (730) is started to drive the lead screw (720) to rotate, thereby driving the rotor assembly (600) to move axially along the linear guide rail (710).

9. The multi-axis vacuum robot according to claim 3, characterized in that: The transmission component comprises a first transmission wheel (530) and a second transmission wheel (540) which are coaxially arranged, wherein the first transmission wheel (530) is rotatably arranged at the first transmission end (220), the second transmission wheel (540) is fixedly arranged at the first transmission end (220) and extends to the second transmission end (310), the driving pulley (510) is transmission-connected to the first transmission wheel (530), the execution pulley (520) is transmission-connected to the second transmission wheel (540), and the end effector (400) is fixedly connected to the execution pulley (520); In a working state, the driving pulley (510) is stationary, the first arm (200) rotates, and the first transmission wheel (530) rotates to drive the second arm (300) to rotate; the second transmission wheel (540) is stationary, and the second arm (300) rotates to drive the execution pulley (520) to rotate, so as to drive the finger portion of the end effector (400) to move in a straight line when extending or retracting.

10. The multi-axis vacuum robot according to claim 9, characterized in that: A first transmission belt (550) is arranged on the first arm (200), and at least one end of the first transmission belt (550) is wound around the side wall of the driving pulley (510) or the side wall of the first transmission pulley (530); a second transmission belt (560) is arranged on the second arm (300), and at least one end of the second transmission belt (560) is wound around the side wall of the second transmission pulley (540) or the side wall of the execution pulley (520).

11. The multi-axis vacuum robot according to claim 10, characterized in that: At least part of the side wall of the diameter-changing wheel is a diameter-changing portion, and the diameter-changing portion is the side wall that contacts the first transmission belt (550) or the second transmission belt (560) when the diameter-changing wheel is stationary or moving.

12. The multi-axis vacuum robot according to claim 11, characterized in that: The radius r1 of the variable diameter wheel is calculated by the following steps: The connection direction between the mounting body and the wafer is defined as a first direction, a direction perpendicular to the first direction is defined as a second direction, a first angle between the first arm (200) and the second direction is defined as θ, and a second angle between the second arm (300) and the second direction is defined as β; The corresponding relationship between the second angle β and the first angle θ is: β=arc =arc The transmission ratio G1 of the first arm (200) is: The radius r1 of the variable diameter wheel: Wherein G1 is the transmission ratio of the first arm (200), R1 is the radius of the first transmission wheel (530); l is the length of the second arm (300); L is the length of the first arm (200); and a is the length difference between the first arm (200) and the second arm (300) in the horizontal direction.

Images