Photovoltaic silicon wafer drying method

Abstract

The invention relates to a photovoltaic silicon wafer drying method, and belongs to the technical field of semiconductor production. According to the photovoltaic silicon wafer drying method, the photovoltaic hanging baskets are overturned and put down before drying, so that the two rows of photovoltaic silicon wafers are arranged in the horizontal direction, then the photovoltaic hanging baskets and the photovoltaic silicon wafers are continuously blown and dried by the blowing device on the drying station, the photovoltaic hanging baskets and the photovoltaic silicon wafers do not need to be put into a drying tank, and the photovoltaic silicon wafer drying method has the advantages that the drying speed is high, and the drying efficiency is high. And the drying efficiency is high.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor production technology, and in particular, relates to a photovoltaic silicon wafer drying method. Background Art

[0002] With the improvement of production efficiency of photovoltaic production equipment, the number of photovoltaic silicon wafers contained in a single photovoltaic basket is increasing. A single photovoltaic basket can hold two groups of photovoltaic silicon wafers, which greatly improves the efficiency of single production. During process cleaning, in order to reduce the width of the tank, the photovoltaic basket is placed in the process cleaning tank in a vertical state for cleaning. However, during drying, when the air outlet is at the top, in order to improve the drying effect, the photovoltaic basket needs to be laid down so that the two groups of photovoltaic silicon wafers are in a horizontal state.

[0003] Meanwhile, the photovoltaic silicon wafers in the prior art are placed in a separate drying tank for drying, which has low drying efficiency and cannot meet the needs of large-scale drying of photovoltaic silicon wafers. Summary of the invention

[0004] The technical problem to be solved by the present invention is to solve the problem of low drying efficiency of photovoltaic silicon wafers in the prior art, thereby providing a photovoltaic silicon wafer drying device with high drying efficiency.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] A photovoltaic silicon wafer drying method comprises the following steps:

[0007] S1: Flip the photovoltaic hanging basket so that the two rows of photovoltaic silicon wafers arranged in the height direction are arranged in the horizontal direction;

[0008] S2: placing the photovoltaic hanging basket carrying two rows of photovoltaic silicon wafers at the loading station;

[0009] S3: The transport device transports the photovoltaic hanging basket from the loading station to the drying station;

[0010] S4: At the drying station, a blowing device blows and dries the photovoltaic hanging basket and the photovoltaic silicon wafers;

[0011] S5: After drying, the photovoltaic hanging basket is transported from the drying station to the unloading station by the transport device;

[0012] The loading station, drying station and unloading station of steps S2-S5 are arranged in sequence along the workbench, and the photovoltaic hanging basket is placed on the loading station, the drying station or the unloading station.

[0013] Preferably, in the photovoltaic silicon wafer drying method of the present invention, in step S1, after the photovoltaic silicon wafer is turned over, air is blown into the photovoltaic hanging basket for pre-drying.

[0014] Preferably, in the photovoltaic silicon wafer drying method of the present invention, in step S, after the photovoltaic silicon wafer is turned over, the photovoltaic silicon wafer in the photovoltaic hanging basket is lifted up by a lifting component to make the bottom of the photovoltaic silicon wafer break away from contact with the photovoltaic hanging basket.

[0015] Preferably, in the photovoltaic silicon wafer drying method of the present invention, the loading station, the drying station and the unloading station are arranged along the workbench, and the workbench is provided with a transport trough. In step S, the transport mechanism, the slide rails arranged under the workbench, and the driving parts for driving the transport mechanism to move on the slide rails, the transport mechanism passes through the transport trough and is provided with a transport platform for carrying a photovoltaic hanging basket on the top, the transport platform is located above the workbench, and the transport mechanism can also drive the transport platform to rise and fall to place the photovoltaic hanging basket on the transport platform on the hanging basket fixing seat or remove the photovoltaic hanging basket from the hanging basket fixing seat.

[0016] Preferably, in the photovoltaic silicon wafer drying method of the present invention, the transportation device also includes a blocking mechanism for blocking the transportation trough, the blocking mechanism includes: a pulley assembly located inside the bottom frame of the loading station and the drying station, and a shielding belt capable of moving on the pulley assembly, the shielding belt being respectively composed of an upper shielding part and a lower shielding part according to being located above and below the pulley assembly, and the upper shielding part being able to move together with the transportation mechanism and always being located below the transportation trough.

[0017] Preferably, in the photovoltaic silicon wafer drying method of the present invention, the transportation mechanism includes a slide table arranged on a slide rail, a lifting drive member arranged on the slide table, a horizontal mounting plate arranged on the lifting drive member, a vertical mounting plate arranged on the horizontal mounting plate and passing through the transportation trough, a transportation table arranged on the vertical mounting plate and located above the workbench, the vertical mounting plate is provided with a sliding member that can slide freely and is located below the workbench, and the upper shielding portion is connected to both ends of the sliding member.

[0018] Preferably, in the photovoltaic silicon wafer drying method of the present invention, in step S4, the circulating fan generates dry air, and the dry air enters above the workbench through the upper outer cover to dry the photovoltaic hanging basket placed on the workbench, and then passes through the air outlet on the workbench into the lower outer cover and flows back to the circulating fan to form circulating air.

[0019] The beneficial effects of the present invention are:

[0020] The photovoltaic silicon wafer drying method of the present invention turns over and lays down the photovoltaic hanging basket before drying so that two rows of photovoltaic silicon wafers are arranged in a horizontal direction. Then, a blowing device is used at a drying station to continuously blow dry the photovoltaic hanging basket and the photovoltaic silicon wafers without placing them in a drying tank. The method has the advantages of fast drying speed and high drying efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The technical solution of the present application is further described below in conjunction with the accompanying drawings and embodiments.

[0022] Figure 1 This is a three-dimensional diagram of a photovoltaic silicon wafer pre-drying tank with a flipping function according to an embodiment of the present application;

[0023] Figure 2 It is hidden Figure 1 A three-dimensional image of a photovoltaic silicon wafer pre-drying tank with a flip function behind the two tank walls;

[0024] Figure 3 is a three-dimensional diagram of the flipping mechanism of an embodiment of the present application;

[0025] Figure 4 is a three-dimensional diagram of the blowing mechanism of an embodiment of the present application;

[0026] Figure 5 is a three-dimensional diagram of a photovoltaic silicon wafer drying device according to an embodiment of the present application (arrows indicate the direction of hot air flow inside);

[0027] Figure 6 is a three-dimensional diagram of a workbench according to an embodiment of the present application;

[0028] Figure 7 is a schematic structural diagram of a shielding component according to an embodiment of the present application;

[0029] Figure 8 is a three-dimensional diagram of a transport mechanism according to an embodiment of the present application;

[0030] Fig. 9 is a three-dimensional diagram of a pulley assembly according to an embodiment of the present application;

[0031] Fig.10 It is a three-dimensional enlarged view of a workbench at a drying station of an embodiment of the present application;

[0032] Fig.11 This is a structural diagram of a common photovoltaic hanging basket.

[0033] The reference numerals in the figure are:

[0034] 1 tank body;

[0035] 2. Flipping mechanism;

[0036] 4. Blowing device;

[0037] 5. Transport device;

[0038] 6 Basket fixing seat;

[0039] 9 Photovoltaic hanging basket;

[0040] 11 tank body;

[0041] 12. Flipping mechanism;

[0042] 13. Blowing mechanism;

[0043] 21 Loading station;

[0044] 22 Drying station;

[0045] 23 unloading station;

[0046] 30 workbench;

[0047] 31 transport tank;

[0048] 32 Passing vent;

[0049] 36 crossbar;

[0050] 40 upper cover;

[0051] 41 lift door;

[0052] 42 vias;

[0053] 43 lower cover;

[0054] 51 Transportation agencies;

[0055] 52 slide rails;

[0056] 53 driving member;

[0057] 54 pulley assembly;

[0058] 55 occlusion tape;

[0059] 56 support plate;

[0060] 61 through hole;

[0061] 91 first hook slot;

[0062] 92 second hook slot;

[0063] 93 Third hook slot;

[0064] 111 trough bottom;

[0065] 112 slot wall;

[0066] 113 drain;

[0067] 114 Gas supply connector;

[0068] 115 first support block;

[0069] 116 second support block;

[0070] 121 flip driving member;

[0071] 122 shaft;

[0072] 123 L-shaped support frame;

[0073] 131 fixed plate;

[0074] 132 movable panels;

[0075] 133 lifting drive parts;

[0076] 134 guide rod;

[0077] 135 mounting plate;

[0078] 136 crossbar;

[0079] 137 air supply pipe;

[0080] 231 first support plate;

[0081] 513 horizontal mounting plate;

[0082] 514 vertical mounting plate;

[0083] 516 Slide;

[0084] 530 slide;

[0085] 531 transport platform;

[0086] 532 lifting drive parts;

[0087] 541 Mounting Block;

[0088] 542 first pulley;

[0089] 543 Second pulley;

[0090] 551 upper shielding part;

[0091] 552 lower shielding part;

[0092] 553 Slide;

[0093] 1231 first support plate;

[0094] 1232 Second support plate

[0095] 1233 L-shaped fixing block;

[0096] 1234 flexible layer;

[0097] 1361 jet;

[0098] 5311 fixing strip;

[0099] 5332Location slot. DETAILED DESCRIPTION

[0100] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0101] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application. In addition, the terms "first", "second", etc. are used only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, "multiple" means two or more.

[0102] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0103] The technical solution of the present application will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0104] This embodiment provides a photovoltaic silicon wafer drying method, comprising the following steps:

[0105] S1: flipping the photovoltaic hanging basket 9 so that the two rows of photovoltaic silicon wafers arranged in the height direction are arranged in the horizontal direction;

[0106] S2: placing the photovoltaic hanging basket 9 carrying two rows of photovoltaic silicon wafers into the loading station 21;

[0107] S3: The transport device 5 transports the photovoltaic hanging basket 9 from the loading station 21 to the drying station 22;

[0108] S4: At the drying station 22, the blowing device 4 blows and dries the photovoltaic hanging basket 9 and the photovoltaic silicon wafers;

[0109] S5: After drying, the transport device 5 transports the photovoltaic hanging basket 9 from the drying station 22 to the unloading station 23;

[0110] The loading station 21, drying station 22 and unloading station 23 of steps S2-S5 are arranged in sequence along the workbench 30, and the photovoltaic silicon wafers are placed on the corresponding stations.

[0111] The photovoltaic silicon wafer drying method of this embodiment is to flip and lay down the photovoltaic hanging basket 9 before drying so that the two rows of photovoltaic silicon wafers are arranged in a horizontal direction. Then, the photovoltaic hanging basket 9 and the photovoltaic silicon wafers are continuously blow-dried by the blowing device 4 at the drying station 22 without being placed in a drying tank. This method has the advantages of fast drying speed and high drying efficiency.

[0112] Furthermore, in step S1, after the photovoltaic silicon wafer 9 is turned over, air is blown into the photovoltaic hanging basket 9 for pre-drying (pre-drying refers to blowing room temperature gas to blow off water droplets on the hanging basket 9 and the photovoltaic silicon wafer).

[0113] Furthermore, in step S1, after the photovoltaic silicon wafer 9 is turned over, the photovoltaic silicon wafer in the photovoltaic hanging basket 9 is lifted up by a lifting component, so that the bottom of the photovoltaic silicon wafer is out of contact with the photovoltaic hanging basket 9.

[0114] Furthermore, a transport trough 31 is provided on the workbench 30. In step S3, a transport mechanism 51, a slide rail 52 provided under the workbench 30, and a driving member 53 for driving the transport mechanism 51 to move on the slide rail 52, the transport mechanism 51 passes through the transport trough 31 and is provided with a transport platform 531 for carrying a photovoltaic hanging basket 9 on the top, the transport platform 531 is located above the workbench 30, and the transport mechanism 51 can also drive the transport platform 531 to rise and fall to place the photovoltaic hanging basket 9 on the transport platform 531 on the hanging basket fixing seat 6 or remove the photovoltaic hanging basket 9 from the hanging basket fixing seat 6.

[0115] Furthermore, the transport device 5 also includes a blocking mechanism for blocking the transport trough 31, and the blocking mechanism includes: a pulley assembly 54 located inside the bottom frame of the loading station 21 and the drying station 22, and a shielding belt 55 capable of moving on the pulley assembly 54, wherein the shielding belt 55 is respectively composed of an upper shielding portion 551 and a lower shielding portion 552 located above and below the pulley assembly 54, and the upper shielding portion 551 can move together with the transport mechanism 51 and is always located below the transport trough 31.

[0116] Furthermore, the transport mechanism 51 includes a slide 530 arranged on the slide rail 52, a lifting drive member 532 arranged on the slide 530, a horizontal mounting plate 513 arranged on the lifting drive member 532, a vertical mounting plate 514 arranged on the horizontal mounting plate 513 and passing through the transport trough 31, a transport platform 531 arranged on the vertical mounting plate 514 and located above the workbench 30, and a sliding member 553 that can slide freely and is located below the workbench 30 is arranged on the vertical mounting plate 514, and the upper shielding portion 551 is connected to both ends of the sliding member 553.

[0117] Furthermore, in step S4, the circulating fan generates dry air, which enters above the workbench 30 through the upper outer cover 40 to dry the photovoltaic hanging basket 9 placed on the workbench 30, and then passes through the air outlet 32 ​​on the workbench 30 to enter the lower outer cover 43 and flow back to the circulating fan to form circulating air.

[0118] The drying method of this embodiment uses a photovoltaic silicon wafer pre-drying tank with a flip function, such as Figure 1 As shown, including:

[0119] Tank body 11, such as Figure 2 As shown, it is composed of a groove bottom 111 and a groove wall 112, with an open top. A drain port 113 is provided on the groove bottom 111, and water droplets blown off by the blowing mechanism 13 can be discharged from the drain port 113;

[0120] The turning mechanism 12, such as Figure 3 As shown, it is used to drive the photovoltaic hanging basket 9 to change between a first state and a second state; when the photovoltaic hanging basket 9 is in the first state, the two groups of photovoltaic silicon wafers contained in the photovoltaic hanging basket 9 are arranged in parallel at an angle less than 10° to the horizontal plane; when the photovoltaic hanging basket 9 is in the second state, the two groups of photovoltaic silicon wafers contained in the photovoltaic hanging basket 9 are arranged vertically; the flip mechanism 12 includes: a flip driving member 121, a rotating shaft 122 driven to rotate by the flip driving member 121, and an L-shaped support frame 123 arranged on the rotating shaft 122 for fixing the photovoltaic hanging basket 9;

[0121] Blowing mechanism 13, such as Figure 5 As shown, it includes a lifting assembly and a mounting plate 135 that can be raised and lowered by the lifting assembly. A plurality of cross bars 136 are arranged on the top of the mounting plate 135. The cross bars 136 are provided with rows of air jets 1361. The cross bars 136 are hollow and connected to the air supply pipe 137. When the lifting assembly is raised, the cross bars 136 can lift the photovoltaic silicon wafers in the photovoltaic hanging basket 9.

[0122] The photovoltaic silicon wafer pre-drying tank with a flipping function of the present embodiment has a flipping function and a pre-drying function for photovoltaic silicon wafers, wherein the flipping function can change the photovoltaic hanging basket 9 from a vertical state to a horizontal state, so that the two groups of photovoltaic silicon wafers arranged vertically become two groups of photovoltaic silicon wafers arranged horizontally. The pre-drying function is used to lift the photovoltaic silicon wafer when the photovoltaic hanging basket 9 is in a horizontal state, so that the bottom of the photovoltaic silicon wafer is separated from the contact with the photovoltaic hanging basket 9 (the contact part between the bottom of the photovoltaic silicon wafer and the photovoltaic hanging basket 9 will accumulate water, resulting in poor air drying effect), and the air jet on the crossbar 36 sprays gas to blow off the water droplets on the photovoltaic hanging basket 9 and the photovoltaic silicon wafer, achieving a pre-drying effect, and the blown-off water droplets are collected by the tank body 1. The photovoltaic silicon wafer pre-drying tank with a flipping function of the present embodiment achieves flipping and pre-drying effects at the same time, providing preliminary preparation for further drying.

[0123] The L-shaped support frame 123 includes a first support plate 1231 and a second support plate 1232 which are perpendicular to each other. The first support plate 1231 is provided with an L-shaped fixing block 1233, which can support the short side of the photovoltaic hanging basket 9. The second support plate 1232 is provided with a flexible layer 1234 (made of PTFE material), which contacts the bottom of the long side of the photovoltaic hanging basket 9 to achieve a buffering effect.

[0124] When the L-shaped support frame 123 supports the photovoltaic hanging basket 9 in the first state, the first support plate 1231 forms an angle of 3° to 10° with the horizontal plane, such as 3°, 5°, 8°, 10°, that is, the first support plate 231 is slightly tilted to prevent the photovoltaic hanging basket 9 from tipping over. Of course, when a fixed block is set to prevent the photovoltaic hanging basket 9 from tipping over or the photovoltaic hanging basket 9 itself does not tip over, the angle can also be set to 0°, that is, a horizontal setting.

[0125] When the L-shaped support frame 123 supports the photovoltaic hanging basket 9 in the first state, the first support plate 1231 is supported by the first support block 115 arranged on the groove bottom 111 .

[0126] When the L-shaped support frame 123 supports the photovoltaic hanging basket 9 in the second state, the second support plate 1232 is supported by the second support block 116 arranged on the groove bottom 111.

[0127] The lifting assembly includes: a fixed plate 131 fixed in the trough body 11, a movable plate 132 that can be lifted and lowered, and a lifting drive 133 that drives the movable plate 132 to lift and lower. The mounting plate 135 is connected to the movable plate 132 via a guide rod 134, and the guide rod 134 passes through the fixed plate 131.

[0128] The cross bars 136 are divided into two groups, each group corresponds to a photovoltaic hanging basket 9, and each group has four cross bars. The air jets 1361 on every two cross bars 136 in each group are arranged opposite to each other, and every two cross bars 136 correspond to a group of photovoltaic silicon wafers.

[0129] The flip driving member 121 is arranged outside the groove wall 112, and the driving shaft of the flip driving member 121 (motor) passes through the groove wall 112 and is connected to the rotating shaft 122. Both ends of the rotating shaft 122 are supported by bearings.

[0130] The groove wall 112 is also provided with an air supply connector 114 , and all the air supply pipes 137 are connected to the air supply connector 114 , and are connected to an external air supply device through the air supply connector 114 .

[0131] In the photovoltaic silicon wafer drying method of this embodiment, steps S2-S4 use photovoltaic silicon wafer drying equipment, including:

[0132] Workbench 30, such as Figure 5 and Figure 6 As shown, the workbench 30 is provided with a loading station 21, a drying station 22 and a unloading station 23 in sequence; a transport trough 31 penetrating the loading station 21, the drying station 22 and the unloading station 23 is provided on the workbench 30, and a hanging basket fixing seat 6 is provided on the workbench 30 at the loading station 21, the drying station 22 and the unloading station 23, and the hanging basket fixing seat 6 is used for placing the photovoltaic hanging basket 9; the workbench 30 is supported by a bottom frame, and the bottom frame is hollow inside;

[0133] The transport device 5 is capable of transporting the photovoltaic hanging basket 9 between the loading station 21, the drying station 22 and the unloading station 23;

[0134] The blowing device 4 is arranged at the drying station 22, and the blowing device 4 is used to provide drying air to the drying station 22; an air outlet 32 ​​is also provided on the workbench 30 at the drying station 22, and the air outlet 32 ​​is located between two hanging basket fixing seats 6 that fix the same photovoltaic hanging basket 9. The existence of the air outlet 32 ​​can make the drying air flow pass from the top to the bottom of the workbench 30, or from the bottom to the top of the workbench 30;

[0135] The transport device 5, such as Figure 7The figure includes a transport mechanism 51, a slide rail 52 arranged under the workbench 30, a driving member 53 for driving the transport mechanism 51 to move on the slide rail 52, and a blocking mechanism for blocking the transport slot 31. The transport mechanism 51 passes through the transport slot 31 and is provided with a transport platform 531 for carrying the photovoltaic hanging basket 9 on the top. The transport platform 531 is located above the workbench 30. The transport mechanism 51 can also drive the transport platform 531 to rise and fall so as to place the photovoltaic hanging basket 9 on the transport platform 531 on the hanging basket fixing seat 6 or remove the photovoltaic hanging basket 9 from the hanging basket fixing seat 6.

[0136] The blocking mechanism includes: a pulley assembly 54 located inside the bottom frame of the loading station 21 and the drying station 22, a shielding belt 55 that can move on the pulley assembly 54, and the shielding belt 55 is respectively an upper shielding part 551 and a lower shielding part 552 according to the position above and below the pulley assembly 54, and the upper shielding part 551 can move together with the transportation mechanism 51 and is always located below the transportation trough 31. The blocking mechanism blocks the bottom of the transportation trough 31, which can reduce the amount of drying air passing through the transportation trough 31, improve the utilization rate of drying air, and reduce energy consumption. Note that the blocking mechanism cannot strictly seal the transportation trough 31.

[0137] In the photovoltaic silicon wafer drying equipment of this embodiment, the workbench 30 is divided into a loading station 21, a drying station 22 and a unloading station 23, and the transport device 5 transports the photovoltaic hanging basket 9 between the loading station 21, the drying station 22 and the unloading station 23. The transport device 5 is arranged at the bottom of the workbench 30 and isolated from the top of the workbench 30, so as to avoid the pollution of the top by the transport device 5 (some debris will inevitably be generated when the transport device 5 moves). However, this requires the provision of a transport trough 31 for the support mechanism to pass through and support the movement of the photovoltaic hanging basket 9. Therefore, a shielding belt 55 of a blocking mechanism needs to be provided to block the bottom of the transport trough 31, reduce the outflow of drying gas from the transport trough 31, reduce the loss of hot air, and improve the drying effect.

[0138] Furthermore, a support plate 56 is also provided at the bottom of the upper shielding portion 551 and / or the lower shielding portion 552 to support the upper shielding portion 551 and / or the lower shielding portion 552 to prevent the upper shielding portion 551 and the lower shielding portion 552 from sagging due to gravity. Especially when the length is long, the middle area of ​​the upper shielding portion 551 and the lower shielding portion 552 has an obvious sagging effect, and the support plate 56 can effectively improve the sagging effect.

[0139] Furthermore, the transport mechanism 51, such as Figure 8As shown, it includes a slide 530 arranged on a slide rail 52, a lifting drive member 532 arranged on the slide 530, a horizontal mounting plate 513 arranged on the lifting drive member 532, a vertical mounting plate 514 arranged on the horizontal mounting plate 513 and passing through the transport trough 31, a transport platform 531 arranged on the vertical mounting plate 514 and located above the workbench 30, the vertical mounting plate 514 is provided with a sliding member 553 that can slide freely and is located below the workbench 30, the upper shielding portion 551 is connected to both ends of the sliding member 553, the upper shielding portion 551 tightens the sliding member 553 so that the sliding member 553 is at a stable height and is not affected by the lifting and lowering of the transport platform 531.

[0140] Furthermore, a vertical mounting plate 514 is arranged above one side of the horizontal mounting plate 513, and a lower shielding portion 552 is passed below the horizontal mounting plate 513. The lower side of the horizontal mounting plate 513 is slidably connected to the slide 530 through a slide bar 516. A linear bearing is arranged on the slide 530, and the top of the slide bar 516 is fixed to the lower side of the vertical mounting plate 514 and extends into the linear bearing. Since installation space needs to be reserved for the lower shielding portion 552, the horizontal mounting plate 513 needs to extend to one side, which causes unbalanced force. Therefore, the slide bar 516 needs to be arranged on the other side to balance the force, so as to improve the stability of the movement of the transport platform 531.

[0141] Furthermore, if Fig. 9 As shown, the pulley assembly 54 includes a mounting seat 541, a first pulley 542 and a second pulley 543 arranged along the height direction on the mounting seat 541, and the arrangement of the first pulley 542 and the second pulley 543 can form a certain distance between the upper shielding portion 551 and the lower shielding portion 552, so that necessary mechanical components can be placed between the upper shielding portion 551 and the lower shielding portion 552.

[0142] Furthermore, fixing bars 5311 are respectively provided on both sides of the transport platform 531, and positioning grooves 5332 are provided on the fixing bars 5311. The connecting rods on the photovoltaic hanging basket 9 can be placed in the positioning grooves 5332 to fix the fixing bars 5311. The number of positioning grooves 5332 is affected by the cross bar on the photovoltaic hanging basket 9.

[0143] Furthermore, the top of the hanging basket fixing seat 6 is wavy to reduce the contact area with the bottom of the photovoltaic hanging basket 9.

[0144] Furthermore, if Fig.10 As shown, a through hole 61 is opened on the hanging basket fixing seat 6 on the drying station 22 to form a gas circulation channel, so that the air flow can flow from the outside of the hanging basket fixing seat 6 to the inside, enter the air outlet 32 ​​and flow out, thereby preventing water accumulation at the hanging basket fixing seat 6.

[0145] Furthermore, the drying station 22 has an upper outer cover 40, and lifting doors 41 are provided on both ends of the upper outer cover 40 along the transport direction of the transport device 5. When the photovoltaic hanging basket 9 is transported by the transport device 5 and passes through the upper outer cover 40, the lifting door 41 is opened. During the drying process, the lifting door 41 is closed to prevent the loss of drying air.

[0146] Furthermore, the lifting door 41 is provided with a through hole 42 for the transport platform 531 to pass through, and a curtain is provided at the through hole 42. The curtain is flexible. When the transport platform 531 is not transporting the photovoltaic hanging basket 9, it can directly pass through the through hole 42 without opening the lifting door 41, thereby improving the transmission efficiency.

[0147] Specifically, the blowing device 4 includes an upper outer cover 40 disposed above the workbench 30, a lower outer cover 43 disposed below the workbench 30, and a circulating fan; the dry air generated by the circulating fan enters above the workbench 30 through the upper outer cover 40, and then passes through the air outlet 32 ​​on the workbench into the lower outer cover 43 and flows back to the circulating fan to form circulating air (a heating device may also be provided to heat the circulating air to keep the circulating air at a certain temperature). The blowing device 4 includes a fan, a heating device, etc., and the hot air is circulated to dry the photovoltaic hanging basket 9 and the photovoltaic silicon wafers loaded thereon. Since it is a prior art, it will not be described here.

[0148] It is worth mentioning that Fig.10 There are two drying stations 22, each of which is divided into two parts, left and right, and each part can be placed with two photovoltaic hanging baskets 9 in front and back. Therefore, there are two transport devices 5, and each transport device 5 can transport two photovoltaic hanging baskets 9. The photovoltaic silicon wafers in the photovoltaic hanging baskets 9 are in a vertical state. An outer cover is set above each drying station 22, and there are four air vents 32 on the workbench 30 of each drying station 22. The two middle air vents 32 can be considered to be the same due to their close distance. Therefore, there are three air duct pipes in the bottom frame to connect the four air vents 32. The airflow above the upper outer cover 40 passes through the photovoltaic hanging basket 9 of the workbench 30, passes through the air vents 32, and is then collected together by the air duct pipe at the bottom.

[0149] In this embodiment, the lifting drive member 532 adopts a cylinder and the drive member 53 adopts a motor, but other types of drive members can also be used.

[0150] like Fig.11As shown, it is worth noting that the side panel of the photovoltaic hanging basket 9 (limit rods are set on three sides of the photovoltaic hanging basket 9) is provided with a first hook groove 91, a second hook groove 92 and a third hook groove 93. When the photovoltaic hanging basket 9 is vertical, the manipulator hooks the first hook groove 91 and the second hook groove 92 to place the photovoltaic hanging basket 9 on the flipping mechanism 2. After the flipping mechanism 2 flips the photovoltaic hanging basket 9 to a certain angle (the specific value of the angle can generally be selected as 90°), the manipulator hooks the photovoltaic hanging basket 9 through the second hook groove 92 and the third hook groove 93 to transport it away.

[0151] Based on the above ideal embodiments of this application, the relevant staff can make various changes and modifications without departing from the technical concept of this application through the above description. The technical scope of this application is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A photovoltaic silicon wafer drying method, characterized in that: The following steps are involved: S1: Flip the photovoltaic hanging basket so that the two rows of photovoltaic silicon wafers arranged in the height direction are arranged in the horizontal direction; S2: placing the photovoltaic hanging basket carrying two rows of photovoltaic silicon wafers at the loading station; S3: The transport device transports the photovoltaic hanging basket from the loading station to the drying station; S4: At the drying station, a blowing device blows and dries the photovoltaic hanging basket and the photovoltaic silicon wafers; S5: After drying, the photovoltaic hanging basket is transported from the drying station to the unloading station by the transport device; The loading station, drying station and unloading station of steps S2-S5 are arranged in sequence along the workbench, and the photovoltaic hanging basket is placed on the loading station, the drying station or the unloading station.

2. The photovoltaic silicon wafer drying method according to claim 1, characterized in that: In step S1, after the photovoltaic silicon wafer is turned over, air is blown into the photovoltaic hanging basket for pre-drying.

3. The photovoltaic silicon wafer drying method according to claim 2, characterized in that: In step S, after the photovoltaic silicon wafer is turned over, the photovoltaic silicon wafer in the photovoltaic hanging basket is lifted up by a lifting component, so that the bottom of the photovoltaic silicon wafer is out of contact with the photovoltaic hanging basket.

4. The photovoltaic silicon wafer drying method according to claim 1, characterized in that: The loading station, drying station and unloading station are arranged along the workbench, and a transport trough is arranged on the workbench. In step S, the transport mechanism, the slide rail arranged under the workbench, and the driving member for driving the transport mechanism to move on the slide rail, the transport mechanism passes through the transport trough and is provided with a transport platform for carrying the photovoltaic hanging basket on the top, the transport platform is located above the workbench, and the transport mechanism can also drive the transport platform to rise and fall to place the photovoltaic hanging basket on the transport platform on the hanging basket fixing seat or remove the photovoltaic hanging basket from the hanging basket fixing seat.

5. The photovoltaic silicon wafer drying method according to claim 1, characterized in that: The transport device also includes a blocking mechanism for blocking the transport trough, the blocking mechanism including: a pulley assembly located inside the bottom frame of the loading station and the drying station, and a shielding belt capable of moving on the pulley assembly, the shielding belt being respectively composed of an upper shielding part and a lower shielding part located above and below the pulley assembly, the upper shielding part being able to move together with the transport mechanism and always being located below the transport trough.

6. The photovoltaic silicon wafer drying method according to claim 5, characterized in that: The transport mechanism includes a slide table arranged on a slide rail, a lifting drive member arranged on the slide table, a horizontal mounting plate arranged on the lifting drive member, a vertical mounting plate arranged on the horizontal mounting plate and passing through a transport trough, a transport table arranged on the vertical mounting plate and located above the workbench, a sliding member that can slide freely and is located below the workbench is arranged on the vertical mounting plate, and the upper shielding portion is connected to both ends of the sliding member.

7. The photovoltaic silicon wafer drying method according to claim 1, characterized in that: In step S4, the circulating fan generates dry air, which enters above the workbench through the upper outer cover to dry the photovoltaic hanging basket placed on the workbench, and then passes through the air outlet on the workbench into the lower outer cover and flows back to the circulating fan to form circulating air.

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