High-precision photomask film layer repairing process

Abstract

The invention discloses a high-precision photomask film layer repairing process which comprises the following steps: S1, preparation before repairing: S11, preparing a first jig which is used for assisting in positioning an artificial photoetching pattern of an AOR machine; s12, preparing a second jig, wherein the second jig is used for accurately controlling the size of the shading point; s2, positioning a damage point: S21, drawing a grid line on the surface of the first jig; s3, printing ink shading repair: S31, a second jig is placed on a to-be-repaired photomask, and whether an ink leakage hole in the second jig completely coincides with the position needing repair or not is determined according to a microscope lens of the AOR laser repair machine; and S4, finishing after repairing. According to the high-precision photomask film layer repairing process, two jigs are used in a matched mode, the size of a shading point can be accurately controlled and patterns can be finely controlled during manual AOR repairing, the MASK film layer repairing precision and success rate are improved, and when the high-precision photomask film layer repairing process is applied to the TP production process, the service life of MASK can be prolonged, and the production cost is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of photomask film layer repair, and in particular to a high-precision photomask film layer repair process. Background Art

[0002] In the ITO conductive mask production process, MASK (i.e. mask, quartz mask chrome-plated film layer for light shielding, photolithography of product drawings) serves as the benchmark and blueprint for photolithography replication graphics. It is the key to connecting industrial design and process manufacturing. The accuracy and quality level of MASK will directly affect the yield rate of the final downstream products. With the iteration of product process technology, the accuracy of MASK has been improved from 30um to 5um. The GAP value is small during the exposure stroke, and damage to the MASK chrome film surface causes point-like film layer shedding or substrate damage and light leakage, increasing the risk of mask fixed points. After the fixed points are formed, the MASK cannot be used and faces scrapping.

[0003] The MASK chromium film surface leaks light after being damaged. Special ink is used to block light and solidify it. AOR laser repair machine is used to re-etch the pattern. The inventor found that the following difficulties are faced in this process: Due to the high precision (about 100um-300um), the ink repairs the light leakage point, and the size of the repair point cannot be accurately controlled; After the ink shading repair, the pattern is missing and it is impossible to photoetch the precise pattern. The difference after repair is large and the accuracy cannot meet the use requirements.

[0004] Therefore, we propose a high-precision mask film repair process to solve the above problems. Summary of the invention

[0005] 1. Technical problems to be solved by the invention: The purpose of the present invention is to provide a high-precision mask film repair process to solve the problems in the current market raised by the above background technology.

[0006] 2. Technical solution: To achieve the above object, the present invention provides the following technical solution: a high-precision mask film repair process, the repair process comprising the following steps: S1. Preparation before repair, including the following sub-steps: S11, preparing a first jig, wherein the first jig is used to assist in positioning of an AOR machine manual photolithography pattern; S12, preparing a second jig, wherein the second jig is used to accurately control the size of the shading point; S13, prepare the mask to be repaired and place it on the AOR laser repair machine; S2, damage point location, including the following sub-steps: S21, drawing a grid line on the surface of the first jig; S22, covering the first jig with the grid line in S21 on the computer display screen of the AOR laser repair machine, and fixing the first jig on the computer display screen of the AOR laser repair machine; S23, moving the microscope head of the AOR laser repair machine to the position of the damaged point of the mask to be repaired; S24, using a marking pen to print a pattern around the damaged point of the mask to be repaired on the first jig; S3, ink shading repair, including the following sub-steps: S31, placing the second jig on the mask to be repaired, and confirming whether the ink leakage hole on the second jig completely overlaps with the place to be repaired using the microscope lens of the AOR laser repair machine; S32. When the AOR laser repair machine microscope lens, the ink leakage hole on the second jig, and the place to be repaired are on the same straight line, pour the ink on the second jig and use the tool to scrape and apply. During the scraping process, the ink leaks from the ink leakage hole on the second jig to the photomask to be repaired; S33, removing the second fixture; S34, according to the pattern printed by the first jig in S24, the AOR laser repair machine performs laser cleaning on the ink outside the pattern, and the ink outside the pattern is unnecessary ink. After the AOR laser repair machine laser processing, the required pattern is left, and the repair here is completed; S35, repeating the operations of S31-S34 to repair the remaining parts until the photomask to be repaired is completely repaired to obtain a repaired photomask; S4, post-repair finishing, including the following steps: S41. Check the original damaged part of the repaired mask and the intact surrounding pattern on the computer display of the AOR laser repair machine to see if the surface is flat and smooth, and whether there are obvious scratches, spots, bubbles and other defects; S42, the photomask that has been checked and confirmed to be of qualified quality is cured at high temperature using a drying gun at the ink repaired part to prevent it from falling off during subsequent use; S43, storing the photomask after high temperature curing, and completing the repair operation.

[0007] Furthermore, the first fixture is a transparent PET film.

[0008] The above technical solution makes it easy to print the surrounding graphics of the damaged point of the mask to be repaired on the first jig.

[0009] Furthermore, the second jig includes a mesh frame and a mesh fixed in the mesh frame, the mesh frame is made of aluminum, and the size of the mesh frame is 24CM*34CM, and a 100um-200um ink leakage hole is arranged inside the mesh plate.

[0010] Through the above technical solution, the size of the shading point and the fine control of the pattern can be accurately controlled.

[0011] Furthermore, the size, spacing and number of the patterns around the damaged points of the mask to be repaired are printed on the first type of fixture.

[0012] Through the above technical solution, the shading points repaired at the damaged place can maintain a certain regularity with the surrounding shading points.

[0013] Furthermore, the tool is a scraper or a cotton swab.

[0014] Through the above technical solution, the ink can better pass through the ink leakage hole and cover the photomask to be repaired.

[0015] 3. Beneficial effects: By adopting the technical solution provided by the present invention, compared with the prior art, the high-precision mask film repair process of the present invention improves the accuracy and success rate of MASK film repair by using two jigs in combination, and can extend the service life of MASK and reduce production costs when applied in the TP production process. The specific contents are as follows: Draw a grid line on the first jig PET film, cover the PET grid film on the AOR machine computer display screen and fix it, move the AOR laser repair machine microscope head to the position of the damaged point, and print the size, spacing and number of holes around the damaged part on the PET film with the grid line. After the ink is shaded, the AOR laser accurately removes the shading ink according to the rubbing pattern to ensure that the shading points repaired at the damaged part maintain a certain regularity with the surrounding shading points, thereby improving the repair accuracy. According to the pattern printed on the PET film, the AOR microscope lens is controlled to align with the damaged position of the mask to be repaired, and the ink is scraped on the second jig with a tool. Since the second jig is provided with a 100um-200um special mesh cloth, the silk screen printing process is used as a reference (the basic principle that the ink holes in the pattern part of the silk screen are transparent to the ink slurry, and the ink holes in the non-pattern part are not transparent to the slurry) to leave a 100um-200um shading point on the mask to be repaired. By using the two jigs in combination, the size of the shading point and the fine control of the pattern can be accurately controlled during manual AOR repair, which improves the accuracy and success rate of MASK film layer repair. It can be applied in the TP production process to extend the service life of the MASK and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the first jig of the present invention before ink coating; Figure 2 Schematic diagram of the first jig after ink coating of the present invention Figure 3 This is a schematic diagram of the second fixture structure of the present invention; Figure 4 This is a schematic diagram of the second type of fixture repair operation principle of the present invention. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Example

[0018] See also Figure 1-4 The present invention provides a technical solution: a high-precision mask film repair process, the repair process comprising the following steps: S1. Preparation before repair, including the following sub-steps: S11, preparing a first jig, wherein the first jig is used to assist in positioning of an AOR machine manual photolithography pattern; S12, preparing a second jig, wherein the second jig is used to accurately control the size of the shading point; S13, prepare the mask to be repaired and place it on the AOR laser repair machine; S2, damage point location, including the following sub-steps: S21, drawing a grid line on the surface of the first jig; S22, covering the first jig with the grid line in S21 on the computer display screen of the AOR laser repair machine, and fixing the first jig on the computer display screen of the AOR laser repair machine; S23, moving the microscope head of the AOR laser repair machine to the position of the damaged point of the mask to be repaired; S24, using a marking pen to print a pattern around the damaged point of the mask to be repaired on the first jig; S3, ink shading repair, including the following sub-steps: S31, placing the second jig on the mask to be repaired, and confirming whether the ink leakage hole on the second jig completely overlaps with the place to be repaired using the microscope lens of the AOR laser repair machine; S32. When the AOR laser repair machine microscope lens, the ink leakage hole on the second jig, and the place to be repaired are on the same straight line, pour the ink on the second jig and use the tool to scrape and apply. During the scraping process, the ink leaks from the ink leakage hole on the second jig to the photomask to be repaired; S33, removing the second fixture; S34, according to the pattern printed by the first jig in S24, the AOR laser repair machine performs laser cleaning on the ink outside the pattern, and the ink outside the pattern is unnecessary ink. After the AOR laser repair machine laser processing, the required pattern is left, and the repair here is completed; S35, repeating the operations of S31-S34 to repair the remaining parts until the photomask to be repaired is completely repaired to obtain a repaired photomask; S4, post-repair finishing, including the following steps: S41. Check the original damaged part of the repaired mask and the intact surrounding pattern on the computer display of the AOR laser repair machine to see if the surface is flat and smooth, and whether there are obvious scratches, spots, bubbles and other defects; S42, the photomask that has been checked and confirmed to be of qualified quality is cured at high temperature using a drying gun at the ink repaired part to prevent it from falling off during subsequent use; S43, storing the photomask after high temperature curing to complete the repair operation; The first fixture is a transparent PET film; The second jig includes a screen frame and a mesh fixed in the screen frame, the screen frame is made of aluminum, and the size of the screen frame is 24CM*34CM, and the screen plate is provided with 100um-200um ink leakage holes inside; The size, spacing and number of the patterns around the damaged points of the photomask to be repaired printed on the first jig. The patterns around the damaged points of the photomask to be repaired can be circular, cross-shaped or other patterns; The tool is set as a scraper or a cotton swab.

[0019] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0020] In the description of the present invention, unless otherwise specified, "plurality" means two or more than two; the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision mask film repair process, Features: The repair process comprises the following steps: S1. Preparation before repair, including the following sub-steps: S11, preparing a first jig, wherein the first jig is used to assist in positioning of an AOR machine manual photolithography pattern; S12, preparing a second jig, wherein the second jig is used to accurately control the size of the shading point; S13, prepare the mask to be repaired and place it on the AOR laser repair machine; S2, damage point location, including the following sub-steps: S21, drawing a grid line on the surface of the first jig; S22, covering the first jig with the grid line in S21 on the computer display screen of the AOR laser repair machine, and fixing the first jig on the computer display screen of the AOR laser repair machine; S23, moving the microscope head of the AOR laser repair machine to the position of the damaged point of the mask to be repaired; S24, using a marking pen to print a pattern around the damaged point of the mask to be repaired on the first jig; S3, ink shading repair, including the following sub-steps: S31, placing the second jig on the mask to be repaired, and confirming whether the ink leakage hole on the second jig completely overlaps with the place to be repaired using the microscope lens of the AOR laser repair machine; S32. When the AOR laser repair machine microscope lens, the ink leakage hole on the second jig, and the place to be repaired are on the same straight line, pour the ink on the second jig and use the tool to scrape and apply. During the scraping process, the ink leaks from the ink leakage hole on the second jig to the photomask to be repaired; S33, removing the second fixture; S34, according to the pattern printed by the first jig in S24, the AOR laser repair machine performs laser cleaning on the ink outside the pattern, and the ink outside the pattern is unnecessary ink. After the AOR laser repair machine laser processing, the required pattern is left, and the repair here is completed; S35, repeating the operations of S31-S34 to repair the remaining parts until the photomask to be repaired is completely repaired to obtain a repaired photomask; S4, post-repair finishing, including the following steps: S41. Check the original damaged part of the repaired mask and the intact surrounding pattern on the computer display of the AOR laser repair machine to see if the surface is flat and smooth, and whether there are obvious scratches, spots, bubbles and other defects; S42, the photomask that has been checked and confirmed to be of qualified quality is cured at high temperature using a drying gun at the ink repaired part to prevent it from falling off during subsequent use; S43, storing the photomask after high temperature curing, and completing the repair operation.

2. A high-precision mask film repair process according to claim 1, Features: The first fixture is a transparent PET film.

3. A high-precision mask film repair process according to claim 1, Features: The second jig includes a screen frame and a screen cloth fixed in the screen frame. The screen frame is made of aluminum, and the size of the screen frame is 24CM*34CM. In addition, a 100um-200um ink leakage hole is arranged inside the screen plate.

4. A high-precision mask film repair process according to claim 1, Features: The size, spacing and number of the patterns around the damaged points of the mask to be repaired are printed on the first jig.

5. The high-precision mask film repair process according to claim 1, Features: The tool is a scraper or a cotton swab.

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