Silicon wafer with corner protection device

Abstract

The invention provides a silicon wafer with a corner protection device, and particularly relates to the technical field of silicon wafers, which comprises a silicon wafer main body, a transistor arranged in the silicon wafer main body, and a polishing layer arranged on the outer side of the silicon wafer main body, the outer side of the silicon wafer main body is provided with a strip-shaped structure used for covering the corners and an extrusion limiting structure connected with the outside of the strip-shaped structure, the strip-shaped structure is strip-shaped and surrounds the outer side of the silicon wafer main body, the end part of the strip-shaped structure is connected to a clamping and fixing structure, and the clamping and fixing structure is movably connected with the silicon wafer main body. The silicon wafer with the corner protection device provided by the invention can protect the corners of the silicon wafer, and is suitable for a single silicon wafer and a combination of a plurality of silicon wafers.

Description

Technical Field

[0001] This invention belongs to the field of silicon wafer technology, and specifically relates to a silicon wafer with edge and corner protection devices. Background Technology

[0002] With the development of society, the advancement of technology, and the advent of the information age, silicon wafers have become an important material foundation for the information society. A silicon wafer is a wafer made using silicon semiconductor integrated circuits; it is mostly circular in shape, and its outer surface can be further processed to create various circuit components, making it widely used in the electronics field. However, silicon wafers still have certain problems and limitations:

[0003] (1) Traditional silicon wafers are easily worn and bumped at the edges during transportation or transfer, which affects the preservation effect of the silicon wafers;

[0004] (2) When fabricating integrated circuits, it is often necessary to splice and install multiple silicon wafers, which is not convenient to increase the area of ​​silicon wafers according to actual needs, resulting in poor applicability. Furthermore, it is inconvenient to protect the integrated silicon wafers during installation, which can easily damage the silicon wafers. Existing technologies require multiple protective structures, resulting in higher costs and inconvenient operation.

[0005] (3) In addition, traditional silicon wafers are inconvenient to install and dock with the operating table during use, and it is inconvenient to limit and fix them. The silicon wafers are prone to deviate during processing.

[0006] Therefore, this solution provides a silicon wafer with a corner protection device, which solves the technical problem of how to protect the corners of silicon wafers and is applicable to single or multiple silicon wafers. Summary of the Invention

[0007] The purpose of this invention is to provide a silicon wafer with a corner protection device, which solves the technical problem of how to protect the corners of a silicon wafer, and is applicable to a single silicon wafer as well as a combination of multiple silicon wafers.

[0008] A silicon wafer with a corner protection device includes a silicon wafer body, a transistor disposed inside the silicon wafer body, and a polished layer disposed outside the silicon wafer body. A strip-shaped structure for covering corners is disposed on the outer side of the silicon wafer body, and a compression limiting structure is externally connected to the strip-shaped structure. The strip-shaped structure is strip-shaped and surrounds the outer side of the silicon wafer body. The end of the strip-shaped structure is connected to a locking and fixing structure, and the locking and fixing structure is movably connected to the silicon wafer body.

[0009] The strip structure includes a chain body and multiple embedded strips disposed on the chain body. The chain body is formed by multiple chain plate assemblies I and multiple chain plate assemblies II connected end to end by chain pins. The chain plate assembly I includes two parallel chain plates I, and the chain plate assembly II includes two parallel chain plates II.

[0010] An insert strip is fixed to the outer side of each of the two chain plates, and the upper and lower insert strips are engaged with the upper and lower edges of the silicon wafer body.

[0011] Multiple chain plate assemblies one and multiple chain plate assemblies two are attached to the outer edge of the silicon wafer body.

[0012] The extrusion limiting structure has two parts, and is respectively disposed on both sides of the silicon wafer body;

[0013] The extrusion limiting structure includes a horizontally arranged extrusion wheel, a wheel axle that passes vertically through the center of the extrusion wheel, and a connecting rod 1 and a connecting rod 2, one end of which are respectively connected to the upper and lower ends of the wheel axle. The connecting rod 1 and the connecting rod 2 are respectively arranged above and below the extrusion wheel. An I-beam is fixed on the bottom surface of the connecting rod 1. The I-beam is engaged on the upper and lower sides of the silicon wafer body.

[0014] The extrusion wheel is provided with chain teeth and meshing teeth on both sides respectively. The chain teeth are connected to the outer side of the chain body, and the meshing teeth are connected to the limiting tooth rod. The limiting tooth rod is fixedly installed on the operating table.

[0015] The two compression limiting structures are connected by a guide fastening assembly.

[0016] The guide fastening assembly includes a guide assembly and a fastening assembly. The two connecting rods one and the two connecting rods two are connected through the guide assembly, and the two connecting rods one are connected through the fastening assembly.

[0017] The guide assembly includes an upper telescopic rod and a lower telescopic rod arranged parallel to each other. One end of the lower telescopic rod is connected to one end of one of the connecting rods, and the other end is slidably disposed in a downward groove provided at the end of the other connecting rod.

[0018] One end of the upper telescopic rod is connected to one end of one of the connecting rods, and the other end is slidably disposed in the upper sliding groove provided at the end of the other connecting rod.

[0019] The fastening assembly includes a positioning block fixed to one end of one of the connecting rods and a positioning plate fixed to the other end of the connecting rod. The positioning plate is provided with an elongated through hole, and a fastening bolt is provided in the elongated through hole. The positioning block is provided with a threaded hole, and the fastening bolt is movably connected to the threaded hole.

[0020] The locking and fixing structure includes a sprocket disposed near the outer side of the silicon wafer body and a locking plate fixed to the outer side of the sprocket. The outer side of the locking plate has a locking groove, which engages with the outer side of the adjacent silicon wafer body.

[0021] It also includes a rotating rod, an elastic rope fixedly connected to one end of the rotating rod, and a connecting rod fixedly connected to the other end of the elastic rope. The other ends of the two connecting rods are provided with pin holes, and the two pin holes are connected by a pin shaft. The other ends of the two rotating rods are respectively rotatably connected to the chain pins at both ends of the chain body. The sprocket is detachably connected to the chain body.

[0022] The silicon wafer body is multiple and arranged in a straight line, with two adjacent silicon wafer bodies connected by I-beams;

[0023] The extrusion limiting structure has multiple components, and each is disposed on the outer side of the region between two adjacent silicon wafers.

[0024] The strip structure includes a toothed belt, external meshing teeth and internal meshing teeth fixed on both sides of the toothed belt, and the external meshing teeth are connected to a limiting gear;

[0025] The internal meshing teeth are provided with a limiting groove in the middle, and the limiting groove is engaged with the upper and lower sides of the silicon wafer.

[0026] Even better, in order to reduce the overall weight, the strip structure, the extrusion limiting structure, and the snap-fit ​​fixing structure are all made of plastic or rubber, which can minimize the rigid damage to the silicon wafer, and will not be described in detail here.

[0027] The positive effects of this invention are as follows:

[0028] (1) The strip structure in this scheme achieves the following technical effects:

[0029] Firstly, because the chain itself is a flexible structure, it can basically cover the outside of the silicon wafer, thus protecting the outside of the silicon wafer.

[0030] Secondly, because the chain has a strip-shaped structure, it can connect multiple silicon wafers at the same time, allowing multiple silicon wafers to be simultaneously secured on the outside of the chain. One strip-shaped structure can protect the corners of multiple silicon wafers, eliminating the need for multiple protective structures as required by existing technologies.

[0031] (2) The extrusion limiting structure designed in this scheme achieves the following technical effects:

[0032] First, it is equipped with a pressing wheel, which meshes with the chain body, pressing the chain body to connect the chain body with the area where the two silicon wafers are close to each other;

[0033] Secondly, because there are meshing teeth on the outside of the extrusion roller, the meshing teeth are connected to the limiting tooth rod, which is located on the operating table, so as to realize the positioning of the silicon wafer as a whole, which facilitates the subsequent processing.

[0034] (3) The design of the snap-fit ​​fixing structure in this scheme achieves the following technical effects:

[0035] One method involves designing a card plate and sprockets to achieve protection and positioning connection on the outside of the silicon wafer;

[0036] Secondly, the two ends of the chain body are respectively meshed and connected to the two sides of the sprocket, so that the chain body completes the closed loop. At the same time, since the two ends of the chain body are connected to the sprocket, the stability of the chain body and the extrusion wheel is ensured, and the arbitrary movement of the chain body and the extrusion wheel is avoided.

[0037] Third, it is equipped with a rotating rod, an elastic rope, and a connecting rod. The two connecting rods are connected by a pin and secured by an elastic rope, and their positions can be adjusted according to the actual situation.

[0038] (4) This solution cleverly utilizes the flexibility of the chain structure in the prior art to protect the edge of silicon wafers, thereby achieving the effect of protecting multiple silicon wafers at the same time. The overall structure is easy to operate, has a low cost, and is widely applicable. The outer side of the link structure is in contact with external objects, which also helps to limit the position of the silicon wafer. Attached Figure Description

[0039] Figure 1 This is a three-dimensional structural diagram of the silicon wafer in Embodiment 1 of the present invention.

[0040] Figure 2 This is a top view of the silicon wafer in Embodiment 1 of the present invention.

[0041] Figure 3 This is a schematic diagram of the connection structure between the strip structure and the silicon wafer in Embodiment 1 of the present invention.

[0042] Figure 4 This is a schematic diagram of the extrusion limiting structure in Embodiment 1 of the present invention.

[0043] Figure 5 This is a schematic diagram of the snap-fit ​​fixing structure in Embodiment 1 of the present invention.

[0044] Figure 6 This is a schematic diagram of the overall connection structure of two or more silicon wafers in Embodiment 2 of the present invention.

[0045] Figure 7 This is a schematic diagram of the connection structure between the silicon wafer and the toothed belt in Embodiment 3 of the present invention.

[0046] The attached diagram is labeled as follows: 1. Limiting toothed rod; 2. Extrusion wheel; 21. Connecting rod one; 22. Lower telescopic rod; 23. Upper telescopic rod; 24. I-beam block; 25. Chain tooth; 26. Meshing tooth; 3. Connecting rod two; 31. Positioning block; 4. Chain plate assembly one; 5. Chain plate assembly two; 6. Silicon wafer body; 7. Embedded strip; 8. Positioning plate; 81. Fastening bolt; 11. Clamping plate; 111. Clamping groove; 12. Sprocket; 13. Rotating rod; 14. Elastic rope; 15. Connecting rod; 16. Toothed belt; 161. External meshing tooth; 162. Internal meshing tooth; 163. Limiting groove; 164. Limiting gear. Detailed Implementation

[0047] To more clearly illustrate the technical features of this solution, the following detailed implementation method will be used to explain the solution.

[0048] Example 1:

[0049] See Figures 1-5 A silicon wafer with a corner protection device includes a silicon wafer body 6, a transistor disposed inside the silicon wafer body 6, and a polished layer disposed outside the silicon wafer body 6. A strip-shaped structure for covering corners is disposed outside the silicon wafer body 6, and a compression limiting structure is connected to the outside of the strip-shaped structure. The strip-shaped structure is strip-shaped and surrounds the outside of the silicon wafer body 6. The end of the strip-shaped structure is connected to a locking and fixing structure, and the locking and fixing structure is movably connected to the silicon wafer body 6.

[0050] The strip structure includes a chain body and multiple embedded strips 7 disposed on the chain body. The chain body is formed by multiple chain plate assemblies 1 4 and multiple chain plate assemblies 2 5 connected end to end by chain pins. Chain plate assembly 1 4 includes two parallel chain plates 1 and chain plate assembly 2 5 includes two parallel chain plates 2.

[0051] Two insert strips 7 are fixed to the outer sides of the two chain plates, and the upper and lower insert strips 7 are snapped into the upper and lower edges of the silicon wafer body 6.

[0052] Multiple chain plate assemblies 4 and multiple chain plate assemblies 5 are attached to the outer edge of the silicon wafer body 6.

[0053] It should be noted that, according to existing technology, the actual chain body is composed of multiple chain links, which include three parts: chain pin, rolling ring, and chain plate. The existing technology will not be described in detail here. This solution is designed with reference to chain links. More preferably, rolling rings can also be added to the chain body.

[0054] In addition, the silicon wafer includes a silicon wafer body 6, transistors disposed inside the silicon wafer body 6, and a polishing layer disposed outside the silicon wafer body 6. These are existing technologies and will not be described in detail here.

[0055] There are two extrusion limiting structures, which are respectively disposed on both sides of the silicon wafer body 6;

[0056] The extrusion limiting structure includes a horizontally arranged extrusion wheel 2, a wheel axle that passes vertically through the center of the extrusion wheel 2, and a connecting rod 21 and a connecting rod 3 connected at one end to the upper and lower ends of the wheel axle, respectively. The connecting rod 21 and the connecting rod 3 are respectively arranged above and below the extrusion wheel 2. An I-beam 24 is fixed on the bottom surface of the connecting rod 21. The I-beam 24 is locked on the upper and lower sides of the silicon wafer body 6.

[0057] The two sides of the extrusion wheel 2 are respectively provided with chain teeth 25 and meshing teeth 26. The chain teeth 25 are connected to the outer side of the chain body, and the meshing teeth 26 are connected to the limiting tooth rod 1. The limiting tooth rod 1 is fixedly set on the operating table.

[0058] The two compression limiting structures are connected by a guide fastening assembly.

[0059] The guide fastening assembly includes a guide assembly and a fastening assembly. Two connecting rods 1 21 and two connecting rods 2 3 are connected by the guide assembly, and two connecting rods 1 21 are connected by the fastening assembly.

[0060] The guide assembly includes an upper telescopic rod 23 and a lower telescopic rod 22 arranged parallel to each other. One end of the lower telescopic rod 22 is connected to one end of one of the connecting rods 21, and the other end is slidably disposed in a downward groove provided at the end of the other connecting rod 21.

[0061] One end of the upper telescopic rod 23 is connected to one end of one of the connecting rods 2 3, and the other end is slidably disposed in the upper sliding groove provided at the end of the other connecting rod 2 3.

[0062] The fastening assembly includes a positioning block 31 fixed to the end of one of the connecting rods 21 and a positioning plate 8 fixed to the end of the other connecting rod 3. The positioning plate 8 is provided with an elongated through hole, and a fastening bolt 81 is provided in the elongated through hole. The positioning block 31 is provided with a threaded hole, and the fastening bolt 81 is movably connected to the threaded hole.

[0063] The locking and fixing structure includes a sprocket 12 located near the outer side of the silicon wafer body 6 and a locking plate 11 fixed to the outer side of the sprocket 12. A locking groove 111 is provided on the outer side of the locking plate 11, and the locking groove 111 engages with the outer side of the silicon wafer body 6.

[0064] It also includes a rotating rod 13, an elastic rope 14 with one end fixedly connected to one end of the rotating rod 13, and a connecting rod 15 with one end fixedly connected to the other end of the elastic rope 14. The other ends of the two connecting rods 15 are provided with pin holes, and the two pin holes are connected by a pin shaft. The other ends of the two rotating rods 13 are respectively rotatably connected to the chain pins at both ends of the chain body. The sprocket 12 is detachably connected to the chain body.

[0065] The specific working process of this invention:

[0066] This solution incorporates a strip-shaped structure. Since the chain itself is a flexible structure, it can essentially cover the outer side of the silicon wafer, thus protecting the outer side of the silicon wafer. The structure of the chain itself is similar to that of an existing bicycle chain. By adapting it to the protection of the silicon wafer, the matching and compatibility of the structure have produced unexpected technical effects.

[0067] Specifically, the existing chain body has been improved by setting an embedded strip 7 on one side of the chain plate assembly 4. Since there are two chain plate assemblies 4 at the top and bottom, and each of the two chain plate assemblies 4 at the top and bottom positions is equipped with an embedded strip 7, the two embedded strips 7 are stuck on the top and bottom sides of the corner of the silicon wafer. Therefore, the inner distance between the two embedded strips 7 is basically equal to the thickness of the corner of the silicon wafer.

[0068] In this scheme, a compression limiting structure is designed, which is equipped with a compression wheel 2. The compression wheel 2 is meshed with the chain body, and the compression of the chain body makes the chain body connect with the area where the two silicon wafer bodies 6 are close to each other.

[0069] Because there are meshing teeth 26 on the outside of the extrusion roller 2, the meshing teeth 26 are connected to the limiting tooth rod 1, and the limiting tooth rod 1 is located on the operating table, the positioning of the silicon wafer as a whole is realized, which facilitates the subsequent processing.

[0070] This design incorporates a snap-fit ​​fixing structure, which uses a snap-fit ​​plate 11 and a sprocket 12 to achieve protection and positioning connection on the outside of the silicon wafer body 6.

[0071] The two ends of the chain body are respectively meshed and connected to the two sides of the sprocket 12, so that the chain body completes the closed loop. At the same time, since the two ends of the chain body are connected to the sprocket 12, and since the clamping plate 11 is connected to the adjacent silicon wafer body 6 through the clamping groove 111, the clamping plate 11 and the sprocket 12 are very stable. This ensures the stable operation of the chain body and the extrusion wheel 2 and avoids arbitrary movement of the chain body and the extrusion wheel 2.

[0072] The chain is equipped with a rotating rod 13, an elastic rope 14, and a connecting rod 15. The two connecting rods 15 are connected by a pin and secured by the elastic rope 14. The elastic rope 14 can prevent the chain body from falling off and separating from the sprocket 12. Furthermore, the elastic rope 14 allows both ends of the chain body to be engaged and connected to the sprocket 12 at any position without falling off.

[0073] Example 2:

[0074] See Figure 6 There are multiple silicon wafer bodies 6, which are arranged in a straight line. Two adjacent silicon wafer bodies 6 are connected by I-blocks 24 for positioning. The two silicon wafer bodies 6 are respectively snapped into the two sides of the I-blocks 24.

[0075] The extrusion limiting structure has multiple structures, which are respectively located on the outer side of the region between two adjacent silicon wafer bodies 6.

[0076] Specifically, since the chain is a strip structure, it can connect multiple silicon wafer bodies 6 at the same time, so that multiple silicon wafer bodies 6 can be simultaneously secured on the outside of the chain. One strip structure can protect the corners of multiple silicon wafer bodies 6, without the need to provide multiple protective structures as in existing technologies.

[0077] Example 3:

[0078] See Figure 7 The strip structure includes a toothed belt 16, external meshing teeth 161 and internal meshing teeth 162 fixed on both sides of the toothed belt 16, and a limiting gear 164 connected to the outer side of the external meshing teeth 161.

[0079] A limiting groove 163 is provided in the middle of the internal meshing tooth 162, and the limiting groove 163 is engaged with the upper and lower sides of the silicon wafer body 6.

[0080] In this embodiment 3, the chain body in embodiment 1 can be replaced with a toothed belt 16, and the extrusion wheel 2 in embodiment 1 can be replaced with a limiting gear 164. The rest of the structure remains basically unchanged, and some parts can be adjusted according to the actual situation, which will not be described in detail here.

[0081] Example 4:

[0082] The above embodiments include a compression limiting structure. In this embodiment 4, the compression limiting structure can be removed. The rotating rod 13, elastic rope 14, and connecting rod 15 in the locking and fixing structure are directly connected to the original compression limiting structure. The two connecting rods 15 are connected by a pin and secured by the elastic rope 14. The elastic rope 14 can prevent the chain body from falling off and separating from the silicon wafer body 6, so that the chain body and the outer side of the silicon wafer body 6 can be tightly fitted, achieving comprehensive protection for the silicon wafer body 6. This minimizes the cost and weight of the design and makes it easy to carry. The accompanying drawings for this embodiment 4 will not be provided separately.

[0083] The technical features of this invention not described can be implemented by or using existing technology, and will not be repeated here. Of course, the above description is not a limitation of this invention, and this invention is not limited to the examples above. Any changes, modifications, additions or substitutions made by those skilled in the art within the scope of this invention should also be within the protection scope of this invention.

Claims

1. A silicon wafer with an edge protection device, comprising a silicon wafer body (6), a transistor arranged inside the silicon wafer body (6), and a polishing layer arranged outside the silicon wafer body (6), characterized in that: The outer side of the silicon wafer body (6) is movably connected to a strip structure for covering corners and an extrusion limiting structure connected to the outside of the strip structure; the strip structure is strip-shaped and surrounds the outer side of the silicon wafer body (6); the end of the strip structure is movably connected to a snap-fit ​​fixing structure; and the snap-fit ​​fixing structure is movably connected to the silicon wafer body (6).

2. The silicon wafer with an edge protection device according to claim 1, characterized in that: The strip-shaped structure comprises a chain body and a plurality of embedded strips (7) arranged on the chain body, wherein the chain body is formed by a plurality of chain plate assemblies one (4) and a plurality of chain plate assemblies two (5) being hinged end to end in sequence through chain pins, wherein the chain plate assembly one (4) comprises two mutually parallel chain plates one, and the chain plate assembly two (5) comprises two mutually parallel chain plates two; Embedding strips (7) are fixed to the outer sides of the two chain plates, respectively, and the upper and lower embedding strips (7) are clamped on the upper and lower edges of the silicon wafer body (6); A plurality of the chain plate assemblies one (4) and a plurality of the chain plate assemblies two (5) are attached to the outer side of the edge of the silicon wafer body (6).

3. The silicon wafer with edge protection device according to claim 2, characterized in that: There are two extrusion limiting structures, which are respectively arranged on both sides of the silicon wafer body (6); The extrusion limiting structure comprises a horizontally arranged extrusion wheel (2), a wheel axle vertically passing through the center of the extrusion wheel (2), a connecting rod (21) and a connecting rod (3) each having one end connected to the upper and lower ends of the wheel axle, the connecting rod (21) and the connecting rod (3) being arranged at the upper and lower parts of the extrusion wheel (2), respectively, an I-shaped block (24) being fixed on the bottom surface of the connecting rod (21), and the I-shaped block (24) being clamped on the upper and lower sides of the silicon wafer body (6); Chain teeth (25) and meshing teeth (26) are respectively provided on both sides of the extrusion wheel (2), the chain teeth (25) are connected to the outer side of the chain body, the meshing teeth (26) are connected to the limit toothed rod (1), and the limit toothed rod (1) is fixedly arranged on the operating table; The two extrusion limiting structures are connected via a guide fastening assembly.

4. The silicon wafer with the edge protection device according to claim 3, characterized in that: The guide fastening assembly comprises a guide assembly and a fastening assembly, the two connecting rods one (21) and the two connecting rods two (3) are connected via the guide assembly, and the two connecting rods one (21) are connected via the fastening assembly.

5. The silicon wafer with the edge protection device according to claim 4, characterized in that: The guide assembly comprises an upper telescopic rod (23) and a lower telescopic rod (22) which are arranged parallel to each other, one end of the lower telescopic rod (22) is connected to one end of one of the connecting rods (21), and the other end thereof is slidably arranged in a sliding groove arranged at the end of the other connecting rod (21); One end of the upper telescopic rod (23) is connected to one end of one of the second connecting rods (3), and the other end is slidably arranged in an upper sliding groove arranged at the end of the other second connecting rod (3).

6. The silicon wafer with edge protection device according to claim 4, characterized in that: The fastening assembly comprises a positioning block (31) fixed to the end of one of the connecting rods (21), and a positioning plate (8) fixed to the end of the other connecting rod (3), wherein the positioning plate (8) is provided with an elongated through hole, wherein a fastening bolt (81) is provided in the elongated through hole, and the positioning block (31) is provided with a threaded hole, wherein the fastening bolt (81) is movably connected to the threaded hole.

7. The silicon wafer with edge protection device according to claim 1, characterized in that: The clamping and fixing structure comprises a sprocket (12) arranged close to the outside of the silicon wafer body (6), and a clamping plate (11) fixed to the outside of the sprocket (12), wherein a clamping groove (111) is provided on the outside of the clamping plate (11), and the clamping groove (111) is clamped with the outside of the adjacent silicon wafer body (6); It also comprises a rotating rod (13), an elastic rope (14) having one end fixedly connected to one end of the rotating rod (13), and a connecting rod (15) having one end fixedly connected to the other end of the elastic rope (14), the other ends of the two connecting rods (15) are each provided with a pin hole, the two pin holes are connected via a pin shaft, the other ends of the two rotating rods (13) are respectively rotatably connected to the chain pins at the two ends of the chain body, and the sprocket (12) is detachably connected to the chain body.

8. The silicon wafer with edge protection device according to claim 1, characterized in that: There are a plurality of silicon wafer bodies (6), which are arranged in sequence in a straight line, and two adjacent silicon wafer bodies (6) are connected by an I-shaped block (24); There are a plurality of extrusion limiting structures, which are respectively arranged on the outside of the area between two adjacent silicon wafers.

9. The silicon wafer with edge protection device according to claim 1, characterized in that: The strip-shaped structure comprises a toothed belt (16), external meshing teeth (161) and internal meshing teeth (162) fixed on both sides of the toothed belt (16), wherein the external meshing teeth (161) are connected to a limit gear (164); A limiting groove (163) is provided in the middle of the inner meshing tooth (162), and the limiting groove (163) is clamped on the upper and lower sides of the silicon wafer.

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