Brazing equipment and welding process for semiconductor heating plate processing

By designing a brazing equipment for semiconductor heating disks, the lifting blocks and connecting plates are used to achieve flexible adjustment of welding height and angle, the existing welding process is solved, and the existing welding process is cumbersome, high cost and labor consumption is achieved, and an efficient and flexible welding process is achieved.

CN119175421BActive Publication Date: 2025-05-20爱利彼半导体设备(上海)有限公司
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
CN202411703957.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-11-26
Publication Date
2025-05-20
Estimated Expiration
2044-11-26

AI Technical Summary

Technical Problem

The existing semiconductor heating pad welding process requires the use of customized bags, which leads to cumbersome processes and high costs, and is prone to deformation of the workpiece under high temperature conditions. The existing brazing method requires manual operation and labor-intensive operation.

Method used

A brazing equipment is designed, including a base plate, a placement table, a main frame and a welding mechanism. Through the coordination of the lifting block and the connecting plate, flexible adjustment of welding height and angle is achieved, and manual participation is reduced.

Benefits of technology

Flexible welding of semiconductor heating disks is achieved, high-temperature deformation problems are avoided, manual participation is reduced, labor costs are saved, and welding efficiency is improved.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119175421B_ABST
    Figure CN119175421B_ABST
Patent Text Reader

Abstract

The present invention relates to the technical field of brazing equipment, and discloses a brazing equipment and a welding process for processing semiconductor heating disks, comprising a bottom plate, the top of the bottom plate is rotatably connected to a placement table, the top of the placement table is placed with a heating disk workpiece, and the top of the bottom plate is fixedly connected to a main frame. Through the design of the welding mechanism, the heating disk workpiece is placed on the top of the placement table, and then the welding gun body works with the brazing material rod to perform the brazing task, and during this period, the welding height can be adjusted by controlling the lifting block to lift, and the connecting plate can be controlled to swing with the rotating shaft as the axis, so as to achieve the purpose of adjusting the welding angle. Compared with hot isostatic pressing welding, its welding method will not cause the situation that the non-welding part of the heating disk workpiece is deformed due to excessive temperature. Secondly, there is no need for excessive human participation in the welding process, which greatly saves the expenditure of labor costs.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the technical field of brazing equipment, and in particular to a brazing equipment and a welding process for semiconductor heating plate processing. Background Art

[0002] A semiconductor heating plate, also known as a semiconductor wafer heating plate, is a device specifically used in semiconductor manufacturing processes to perform heat treatment on silicon wafers. It is usually made of high-temperature corrosion-resistant materials, such as high-purity aluminum, high-silicon metal, and ceramic quartz glass, etc., to ensure the purity and reliability during the wafer heat treatment process. It usually uses heating wires or heating cores as heating elements and transfers heat through the bottom of the heating plate. During the processing and manufacturing of semiconductor heating plates, welding is required for each component.

[0003] Chinese Patent Application with Publication No. CN118417661A proposed a welding method for an aluminum wafer heating plate. First, prepare a customized sleeve for accommodating the aluminum wafer heating plate. The customized sleeve includes a T-shaped sleeve barrel, a first cover plate, and a second cover plate. The first cover plate and the second cover plate respectively correspond to the small opening and the large opening of the T-shaped sleeve barrel. Then, seal the assembled aluminum wafer heating plate into the customized sleeve, and perform degassing, hot isostatic pressing welding, and sleeve removal on the whole customized sleeve in sequence to complete the welding of the aluminum wafer heating plate. Based on the customized sleeve, hot isostatic pressing welding is used to achieve the welding of the irregularly structured aluminum wafer heating plate, which can ensure that the welding bonding rate between the upper and lower plate bodies of the aluminum wafer heating plate is > 95%, and the welding strength is > 50 MPa, ensuring the service performance of the aluminum wafer heating plate.

[0004] When the above device performs welding, it welds by sleeving a customized sleeve outside the heating plate workpiece. Correspondingly, it needs to additionally go through steps such as sleeving and sleeve removal, and the process is relatively cumbersome. Secondly, the customized sleeve also increases the welding cost. In the case of not using a customized sleeve as proposed in the above application, the high-temperature conditions of hot isostatic pressing are prone to cause deformation. The welding method using brazing can well avoid such problems. However, existing brazing generally uses manual welding, which is relatively labor-consuming. Therefore, a brazing equipment and a welding process for semiconductor heating plate processing are proposed here to solve the above problems. Summary of the Invention

[0005] In order to solve the problems raised above, the present invention provides a brazing equipment and a welding process for semiconductor heating plate processing.

[0006] The brazing equipment provided by the present invention adopts the following technical solutions:

[0007] A brazing device includes a bottom plate. A placement table is rotatably connected to the top of the bottom plate. A heating plate workpiece is placed on the top of the placement table. A main body frame is fixedly connected to the top of the bottom plate. A welding mechanism is arranged on the main body frame.

[0008] The welding mechanism includes a lifting block. The lifting block is slidably connected to the inside of the main body frame. One side of the lifting block is fixedly connected to a first electric push rod. One end of the first electric push rod is fixedly connected to a mounting seat. A connecting plate is arranged on one side of the mounting seat. The connecting plate extends into the inner side of the mounting seat and is connected to the mounting seat through a rotating shaft. A first control rod and a second control rod are rotatably connected to the connecting plate. A mounting ring is fixedly connected to the bottom of the first control rod. A filler metal rod and a welding torch body are arranged at the bottom of the connecting plate. The welding torch body passes through the mounting ring and is fixedly connected to the mounting ring. A first rectangular plate is fixedly connected to the bottom of the second control rod. A second rectangular plate is arranged on one side of the first rectangular plate. A round rod is fixedly connected between the first rectangular plate and the second rectangular plate. The filler metal rod sequentially passes through the first rectangular plate and the second rectangular plate.

[0009] By adopting the above technical solution, during welding, the heating plate workpiece is placed on the top of the placement table. Subsequently, after the welding torch body works, it cooperates with the filler metal rod to perform the brazing task. And during this period, the welding height can be adjusted by controlling the lifting of the lifting block, and the connecting plate can also be controlled to swing around the rotating shaft, so as to achieve the purpose of adjusting the welding angle, thereby realizing the purpose of flexible welding. Compared with hot isostatic pressing welding, the welding method will not cause the deformation of the non-welded part of the heating plate workpiece due to excessive temperature. Secondly, during the welding process, there is no need for too much manual participation, which greatly saves the expenditure of labor costs.

[0010] Preferably, two guide wheels are rotatably connected to the inside of the second rectangular plate. A first motor is fixedly connected to the top of the second rectangular plate. The first motor is fixedly connected to one of the guide wheels through an output shaft. The two guide wheels are respectively arranged on both sides of the filler metal rod, and the guide wheels are in contact with the filler metal rod. A tank body is fixedly connected to the top of the bottom plate. The tank body is connected to the welding torch body through a pipeline.

[0011] By adopting the above technical solution, there is a frictional force between the filler metal rod and the guide wheels. This frictional force can form an effect of pushing the filler metal rod when the guide wheels rotate.

[0012] Preferably, a threaded adjusting rod is rotatably connected to the inside of the main body frame. The threaded adjusting rod passes through the lifting block and is threadedly connected to the lifting block. A second motor is fixedly connected to the top of the main body frame. The second motor is fixedly connected to the threaded adjusting rod through an output shaft.

[0013] By adopting the above technical solution, after the threaded adjusting rod rotates, it drives the lifting block to move up and down.

[0014] Preferably, a strip-shaped plate is slidably connected to the inner side of the mounting base. An L-shaped plate is fixedly connected to the top of the mounting base. A second electric push rod is fixedly connected to the top of the L-shaped plate. The bottom of the second electric push rod is fixedly connected to the top of the strip-shaped plate. A first gear is fixedly connected to the outer part of the rotating shaft. A first rack is fixedly connected to one side of the strip-shaped plate. The first rack is meshed with the first gear.

[0015] By adopting the above technical solution, after the second electric push rod works, it can push and pull the strip-shaped plate up and down.

[0016] Preferably, two square plates are fixedly connected to one side of the connecting plate. A first bidirectional threaded rod is rotatably connected between the two square plates. A limiting groove is formed on one side of the connecting plate. Two first threaded blocks are arranged between the two square plates. The first bidirectional threaded rod sequentially penetrates through the two first threaded blocks, and the first bidirectional threaded rod is threadedly connected to the first threaded blocks. A first clamping plate is fixedly connected to one side of the first threaded block. The first clamping plate penetrates through the limiting groove and matches with the limiting groove. The two first clamping plates are respectively attached to the outer sides of the first control rod and the second control rod.

[0017] By adopting the above technical solution, the two ends of the first bidirectional threaded rod have opposite thread directions, and can drive the two first threaded blocks to move towards each other or away from each other.

[0018] Preferably, a limiting rod is fixedly connected to one side of the mounting base. The limiting rod penetrates through the lifting block.

[0019] By adopting the above technical solution, the limiting rod provides limitation to the mounting base to keep it moving stably horizontally.

[0020] Preferably, a positioning mechanism is arranged on the top of the bottom plate. The positioning mechanism includes a stabilizing plate. The stabilizing plate is fixedly connected to the top of the bottom plate. The placing table penetrates through the top wall of the stabilizing plate and is rotatably connected to the stabilizing plate. A cross bar is fixedly connected to the inner side of the stabilizing plate. A moving plate is slidably connected to the outer part of the cross bar. A third electric push rod is fixedly connected between the moving plate and the inner wall of the stabilizing plate. A second gear is fixedly connected to the outer part of the placing table. A second rack is fixedly connected to one side of the moving plate. The second rack is meshed with the second gear. A base frame is fixedly connected to the top of the bottom plate. A control board is arranged on the top of the base frame. The control board extends into the base frame and is slidably connected to the base frame. An extension plate is integrally formed on the rear side of the control board. A fourth electric push rod is fixedly connected to the bottom of the extension plate. The fourth electric push rod is fixedly connected to the top of the bottom plate. A square rod is rotatably connected to the top of the bottom plate. The square rod penetrates through the top wall of the stabilizing plate and is rotatably connected to the stabilizing plate.

[0021] By adopting the above technical solution, the fourth electric push rod pushes and pulls the extension plate up and down, which can prompt the control board to rise and fall.

[0022] Preferably, a sleeve and an adapter frame are rotatably connected to the top wall of the control board. The square rod passes through the sleeve and is matched with the sleeve. A third gear is fixedly connected to the outside of the square rod. The third gear meshes with the second gear. A fourth gear is fixedly connected to the outside of the sleeve. A fifth gear is fixedly connected to the outside of the adapter frame. The fourth gear meshes with the fifth gear.

[0023] By adopting the above technical solution, the rotation of the fourth gear drives the rotation of the fifth gear.

[0024] Preferably, an auxiliary frame is fixedly connected to the outside of the adapter frame. The auxiliary frame is arranged at the bottom of the fifth gear. A second bidirectional threaded rod is rotatably connected inside the auxiliary frame. The second bidirectional threaded rod extends outside the auxiliary frame. Two second threaded blocks are slidably connected inside the auxiliary frame. A push plate is fixedly connected to the second threaded block. The push plate extends outside the auxiliary frame. The push plate extends into the adapter frame. A second clamping plate is fixedly connected to the push plate.

[0025] By adopting the above technical solution, the thread directions at both ends of the second bidirectional threaded rod are opposite, and the two second threaded blocks can be driven to move towards or away from each other.

[0026] Another technical problem to be solved by the present invention is to provide a soldering process for a semiconductor heating plate applied to a soldering device, including the following steps:

[0027] Workpiece placement

[0028] Stack the parts of the heating plate workpiece to be soldered on the top of the placement table, and insert the topmost part through the adapter frame. Then rotate the second bidirectional threaded rod to control the two second clamping plates to clamp the part of the heating plate workpiece passing through the adapter frame. Finally, after the fourth electric push rod pulls down slightly, the effect that the second clamping plate presses the heating plate workpiece downward can be achieved, so as to ensure the stability of the heating plate workpiece.

[0029] Welding adjustment

[0030] During the welding process, the rotation of the placement table is controlled by controlling the movement of the moving plate. During the rotation of the placement table, due to the transmission relationship between the second gear, the third gear, the fourth gear and the fifth gear, the effect that the adapter frame rotates synchronously with the placement table can be achieved. In this way, while the heating plate workpiece is rotating, the second clamping plate can still hold it stably.

[0031] Welding process

[0032] The tank body transports the fuel required during welding to the welding torch body through a pipeline. And during welding, the adjustable connecting plate swings around the rotating shaft inside the mounting seat to adjust the welding angle. At the same time, when controlling the lifting block to move up and down, the welding height can be adjusted. Based on this step and in cooperation with the above effect of controlling the rotation of the placement table, different positions of the heating plate workpiece can be effectively welded properly, and the whole process requires little manual participation.

[0033] In summary, the present invention includes the following beneficial technical effects:

[0034] A brazing device and a welding process for semiconductor heating plate processing. During welding, the heating plate workpiece is placed on the top of the placement table. Subsequently, after the welding torch body works, it cooperates with the filler metal rod to perform the brazing task. And during this period, the welding height can be adjusted by controlling the lifting of the lifting block, and the connecting plate can also be controlled to swing around the rotating shaft, so as to achieve the purpose of adjusting the welding angle, thereby realizing the purpose of flexible welding. Compared with hot isostatic pressing welding, the welding method will not cause the deformation of non-welded parts of the heating plate workpiece due to excessive temperature. Secondly, little manual participation is required during the welding process, which greatly saves the expenditure of labor costs.

[0035] A brazing device and a welding process for semiconductor heating plate processing. Through the design of the positioning mechanism, after the third electric push rod works, it pushes and pulls the moving plate. At this time, the placement table drives the heating plate workpiece on the top to rotate. During this period, through the transmission relationship of the second gear, the third gear, the fourth gear and the fifth gear, the connecting frame can be synchronously rotated, so as to realize the control of the rotation of the heating plate workpiece and ensure its stability during placement, effectively ensuring the smooth progress of the welding work. And during the rotation process, different positions of the heating plate workpiece can be transferred to the welding torch body for welding, and the welding process is more flexible.

[0036] A brazing device and a welding process for semiconductor heating plate processing achieve the purpose of quickly welding the heating plate workpiece, and can flexibly adjust the welding position and angle during the welding process. On the basis of realizing the above functions, little manual participation is required, which greatly saves manpower, and the structure design is simple, which is also conducive to production manufacturing and control of use costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 is a schematic diagram of the structure of the present invention;

[0038] Figure 2 is a sectional side view of the stabilizing plate in the present invention;

[0039] Figure 3 is Figure 2 the enlarged view at A in

[0040] Figure 4 It is a structural sectional view of the connection frame in the present invention;

[0041] Figure 5 It is a bottom view structure diagram of the connection frame in the present invention;

[0042] Figure 6 It is a structural schematic diagram of the main body frame in the present invention;

[0043] Figure 7 It is a structural schematic diagram of the connection plate in the present invention;

[0044] Figure 8 It is a sectional structural view of the connection plate in the present invention;

[0045] Figure 9 It is a structural schematic diagram of the second rectangular plate in the present invention;

[0046] Figure 10 is Figure 9 the enlarged view at B in

[0047] Explanation of reference numerals: 1, bottom plate; 2, placement table; 3, heating plate workpiece; 4, main body frame; 5, welding mechanism; 51, lifting block; 52, first electric push rod; 53, mounting seat; 54, connection plate; 55, rotating shaft; 56, first control rod; 57, second control rod; 58, mounting ring; 59, solder rod; 591, welding torch body; 592, first rectangular plate; 593, second rectangular plate; 594, round rod; 595, guide wheel; 596, first motor; 597, tank body; 598, threaded adjusting rod; 599, second motor; 581, strip plate; 582, L-shaped plate; 583, second electric push rod; 584, first rack; 585, first gear; 586, first bidirectional threaded rod; 587, first threaded block; 588, first clamping plate; 589, limiting rod; 6, positioning mechanism; 61, stabilizing plate; 62, cross bar; 63, moving plate; 64, third electric push rod; 65, second gear; 66, second rack; 67, base frame; 68, control board; 69, fourth electric push rod; 691, square rod; 692, sleeve; 693, connection frame; 694, third gear; 695, fourth gear; 696, fifth gear; 697, auxiliary frame; 698, second bidirectional threaded rod; 699, second threaded block; 681, pushing plate; 682, second clamping plate. Detailed implementation manner

[0048] The following will Figure 1 - attached Figure 10 further elaborate on the present invention in conjunction with the attached

[0049] The present invention discloses a brazing device. Refer to Figures 1 - 10, a brazing device, including a bottom plate 1, a placing table 2 is rotatably connected to the top of the bottom plate 1, a heating plate workpiece 3 is placed on the top of the placing table 2, a main body frame 4 is fixedly connected to the top of the bottom plate 1, and a welding mechanism 5 is arranged on the main body frame 4;

[0050] The welding mechanism 5 includes a lifting block 51, the lifting block 51 is slidably connected to the inside of the main body frame 4, a first electric push rod 52 is fixedly connected to one side of the lifting block 51, one end of the first electric push rod 52 is fixedly connected to a mounting seat 53, a connecting plate 54 is arranged on one side of the mounting seat 53, the connecting plate 54 extends into the inner side of the mounting seat 53 and is connected to the mounting seat 53 through a rotating shaft 55, a first control rod 56 and a second control rod 57 are rotatably connected to the connecting plate 54, a mounting ring 58 is fixedly connected to the bottom of the first control rod 56, a filler metal rod 59 and a welding torch body 591 are arranged at the bottom of the connecting plate 54, the welding torch body 591 passes through the mounting ring 58 and is fixedly connected to the mounting ring 58;

[0051] A first rectangular plate 592 is fixedly connected to the bottom of the second control rod 57, a second rectangular plate 593 is arranged on one side of the first rectangular plate 592, a round rod 594 is fixedly connected between the first rectangular plate 592 and the second rectangular plate 593, the filler metal rod 59 sequentially passes through the first rectangular plate 592 and the second rectangular plate 593. When welding, the heating plate workpiece 3 is placed on the top of the placing table 2, and then after the welding torch body 591 works, it cooperates with the filler metal rod 59 to perform the brazing task. During this period, the welding height can be adjusted by controlling the lifting of the lifting block 51, and the connecting plate 54 can also be controlled to swing around the rotating shaft 55, so as to achieve the purpose of adjusting the welding angle, so as to achieve the purpose of flexible welding. Compared with hot isostatic pressing welding, the welding method will not cause the deformation of the non-welded part of the heating plate workpiece 3 due to excessive temperature. Secondly, the welding process does not require too much manual participation, which greatly saves the expenditure of labor costs.

[0052] Two guide wheels 595 are rotatably connected to the inside of the second rectangular plate 593, a first motor 596 is fixedly connected to the top of the second rectangular plate 593, the first motor 596 is fixedly connected to one of the guide wheels 595 through an output shaft, the two guide wheels 595 are respectively arranged on both sides of the filler metal rod 59, and the guide wheels 595 are in contact with the filler metal rod 59. A tank body 597 is fixedly connected to the top of the bottom plate 1, and the tank body 597 is connected to the welding torch body 591 through a pipeline. There is friction between the filler metal rod 59 and the guide wheels 595, and this friction can form an effect of pushing the filler metal rod 59 when the guide wheels 595 rotate. A threaded adjustment rod 598 is rotatably connected to the inside of the main body frame 4, the threaded adjustment rod 598 passes through the lifting block 51 and is threadedly connected to the lifting block 51, a second motor 599 is fixedly connected to the top of the main body frame 4, and the second motor 599 is fixedly connected to the threaded adjustment rod 598 through an output shaft. After the threaded adjustment rod 598 rotates, it drives the lifting block 51 to move up and down;

[0053] A strip-shaped plate 581 is slidably connected to the inner side of the mounting seat 53. An L-shaped plate 582 is fixedly connected to the top of the mounting seat 53. A second electric push rod 583 is fixedly connected to the top of the L-shaped plate 582. The bottom of the second electric push rod 583 is fixedly connected to the top of the strip-shaped plate 581. A first gear 585 is fixedly connected to the outside of the rotating shaft 55. A first rack 584 is fixedly connected to one side of the strip-shaped plate 581. The first rack 584 meshes with the first gear 585. After the second electric push rod 583 works, it can push and pull the strip-shaped plate 581 up and down;

[0054] Two square plates are fixedly connected to one side of the connecting plate 54. A first bidirectional threaded rod 586 is rotatably connected between the two square plates. A limiting groove is formed on one side of the connecting plate 54. Two first threaded blocks 587 are arranged between the two square plates. The first bidirectional threaded rod 586 sequentially passes through the two first threaded blocks 587, and the first bidirectional threaded rod 586 is threadedly connected to the first threaded blocks 587. A first clamping plate 588 is fixedly connected to one side of the first threaded block 587. The first clamping plate 588 passes through the limiting groove and matches the limiting groove. The two first clamping plates 588 are respectively attached to the outer sides of the first control rod 56 and the second control rod 57. The thread directions at both ends of the first bidirectional threaded rod 586 are opposite, and it can drive the two first threaded blocks 587 to move towards or away from each other. A limiting rod 589 is fixedly connected to one side of the mounting seat 53. The limiting rod 589 passes through the lifting block 51, and the limiting rod 589 provides a limit to the mounting seat 53 to keep it moving stably and horizontally.

[0055] A positioning mechanism 6 is arranged on the top of the bottom plate 1. The positioning mechanism 6 includes a stabilizing plate 61. The stabilizing plate 61 is fixedly connected to the top of the bottom plate 1. The placing table 2 passes through the top wall of the stabilizing plate 61 and is rotatably connected to the stabilizing plate 61. A cross bar 62 is fixedly connected to the inner side of the stabilizing plate 61. A moving plate 63 is slidably connected to the outside of the cross bar 62. A third electric push rod 64 is fixedly connected between the moving plate 63 and the inner side wall of the stabilizing plate 61. A second gear 65 is fixedly connected to the outside of the placing table 2. A second rack 66 is fixedly connected to one side of the moving plate 63. The second rack 66 meshes with the second gear 65. A base frame 67 is fixedly connected to the top of the bottom plate 1. A control board 68 is arranged on the top of the base frame 67. The control board 68 extends into the base frame 67 and is slidably connected to the base frame 67. An extension plate is integrally formed on the rear side of the control board 68. A fourth electric push rod 69 is fixedly connected to the bottom of the extension plate. The fourth electric push rod 69 is fixedly connected to the top of the bottom plate 1. A square rod 691 is rotatably connected to the top of the bottom plate 1. The square rod 691 passes through the top wall of the stabilizing plate 61 and is rotatably connected to the stabilizing plate 61. The fourth electric push rod pushes and pulls the extension plate up and down, which can cause the control board 68 to rise and fall;

[0056] A sleeve 692 and an adapter frame 693 are rotatably connected to the top wall of the control board 68. A square rod 691 passes through the sleeve 692 and matches with the sleeve 692. A third gear 694 is fixedly connected to the outside of the square rod 691. The third gear 694 meshes with the second gear 65. A fourth gear 695 is fixedly connected to the outside of the sleeve 692. A fifth gear 696 is fixedly connected to the outside of the adapter frame 693. The fourth gear 695 meshes with the fifth gear 696. When the fourth gear 695 rotates, it drives the fifth gear 696 to rotate;

[0057] An auxiliary frame 697 is fixedly connected to the outside of the adapter frame 693. The auxiliary frame 697 is arranged at the bottom of the fifth gear 696. A second bidirectional threaded rod 698 is rotatably connected inside the auxiliary frame 697. The second bidirectional threaded rod 698 extends outside the auxiliary frame 697. Two second threaded blocks 699 are slidably connected inside the auxiliary frame 697. A push plate 681 is fixedly connected to the second threaded block 699. The push plate 681 extends outside the auxiliary frame 697. The push plate 681 extends into the adapter frame 693. A second clamping plate 682 is fixedly connected to the push plate 681. The two ends of the second bidirectional threaded rod 698 have opposite thread directions and can drive the two second threaded blocks 699 to move towards or away from each other.

[0058] Another technical problem to be solved by the present invention is to provide a brazing device applied to the welding process of semiconductor heating plate processing, including the following steps:

[0059] Workpiece placement

[0060] Stack the parts to be welded of the heating plate workpiece 3 on the top of the placement table 2, and insert its top through the adapter frame 693. Then rotate the second bidirectional threaded rod 698 to control the two second clamping plates 682 to clamp the part of the heating plate workpiece 3 passing through the adapter frame 693. Finally, after the fourth electric push rod 69 pulls down slightly, the effect that the second clamping plate 682 presses the heating plate workpiece 3 downward can be achieved, so as to ensure the stability of the heating plate workpiece 3;

[0061] Welding adjustment

[0062] During the welding process, control the rotation of the placement table 2 by controlling the movement of the moving plate 63. During the rotation of the placement table 2, due to the transmission relationship between the second gear 65, the third gear 694, the fourth gear 695 and the fifth gear 696, the effect that the adapter frame 693 rotates synchronously with the placement table 2 can be achieved. In this way, while the heating plate workpiece 3 is rotating, the second clamping plate 682 can still stably clamp it;

[0063] Welding processing

[0064] The tank 597 delivers the fuel required for welding to the welding gun body 591 through a pipeline, and during welding, the adjustable connecting plate 54 swings with the rotating shaft 55 as the axis inside the mounting seat 53 to adjust the welding angle, and the welding height can be adjusted by controlling the lifting block 51 to move up and down. Based on this step and the effect of controlling the rotation of the placement table 2 above, different positions of the heating plate workpiece 3 can be properly welded, and the whole process does not require excessive human involvement.

[0065] In the actual operation process, firstly, the device is powered on. When working, the heating disk workpiece 3 to be welded is stacked and spliced ​​on the top of the placement table 2 in sequence. After being placed, the fourth electric push rod 69 works to pull the extension plate, and the extension plate drives the control plate 68 to be raised and lowered, and the control plate 68 drives the connection frame 693 to move. After the connection frame 693 moves to the top of the heating disk workpiece 3 and is inserted into the connection frame 693, the second two-way threaded rod 698 is rotated, and the second two-way threaded rod 698 drives the two second threaded blocks 699 to move toward each other. The threaded block drives the push plate 681 to move, and the push plate 681 drives the second clamping plate 682 to move to the position where the heating disk workpiece 3 is inserted into the connection frame 693 and clamped. After clamping, repeat the above steps of the fourth electric push rod 69 to make the connection frame 693 move slightly downward. It can be seen from the above connection relationship that at this time, the clamping plate forms an effect of driving the top of the heating disk workpiece 3 to press downward, thereby improving the overall stability of the heating disk workpiece 3 after splicing;

[0066] After being placed, the welding gun body 591 can perform welding operation after working. During this period, the first electric push rod 52 pushes the mounting seat 53 horizontally after working. It can be known from the above connection relationship that the distance between the welding gun body 591 and the heating plate workpiece 3 can be adjusted at this time. During specific welding, the first control rod 56 and the second control rod 57 can be rotated separately during the welding work to adjust the angle between the brazing material rod 59 and the welding gun body 591, so that one end of the brazing material rod 59 can be at an angle that is melted by the high temperature of the welding gun body 591. After adjustment, the first two-way threaded rod 586 is rotated, and the first two-way threaded rod 586 drives the first threaded block 587 to move, and the first threaded block 587 drives the first clamping plate 588 to move until the two second clamping plates 682 are respectively attached to the outer surfaces of the first control rod 56 and the second control rod 57. There is friction, which can ensure the stability of the first control rod 56 and the second control rod 57 after adjustment, and ensure the stability of the welding work;

[0067] During the welding process, as the filler metal rod 59 is consumed, the first motor 596 drives the connected guide wheel 595 to rotate after working. This guide wheel 595 drives the filler metal rod 59 to move, so that the end of the filler metal rod 59 can always be in the welding end position of the welding torch body 591 during the movement. At the same time, the second motor 599 drives the threaded adjusting rod 598 to rotate after working. The threaded adjusting rod 598 drives the lifting block 51 to move up and down. The lifting block 51 drives the first electric push rod 52 to move. The first electric push rod 52 drives the mounting seat 53 to move. Then, through the above connection relationship, it can be known that at this time, the welding height of the welding torch body 591 can be adjusted. And after the second electric push rod 583 works, it can push and pull the strip plate 581 up and down. The second electric push rod 583 pushes and pulls the strip plate 581 up and down. The strip plate 581 drives the first rack 584 to move. The first rack 584 drives the first gear 585 to rotate. The first gear 585 drives the rotating shaft 55 to rotate. The rotating shaft 55 drives the mounting seat 53 to swing and flip around the rotating shaft. Then, through the above connection relationship, it can be known that in this way, the purpose of adjusting the welding angle can be achieved. During the whole welding process, there is no need for too much manual participation, which saves manpower relatively;

[0068] Finally, after the third electric push rod 64 works, it pushes and pulls the moving plate 63. The moving plate 63 drives the second rack 66 to move. After the second rack 66 moves, it drives the second gear 65 to rotate. The second gear 65 drives the placement table 2 to rotate. Then, the placement table 2 drives the heating plate workpiece 3 on the top to rotate. During this period, the second gear 65 also drives the third gear 694 to rotate. The third gear 694 drives the square rod 691 to rotate. The square rod 691 drives the sleeve 692 to rotate. The sleeve 692 drives the fourth gear 695 to rotate. The fourth gear 695 drives the fifth gear 696 to rotate. The fifth gear 696 drives the connection frame 693 to rotate. The connection frame 693 drives the auxiliary frame 697 to rotate. Then, through the above connection relationship, it can be known that at this time, the clamping plate and the heating plate workpiece 3 rotate synchronously, and they are in a state of relative rest with each other. Correspondingly, in this way, while controlling the heating plate workpiece 3 to rotate, the stability of its placement can be ensured, effectively ensuring the smooth progress of the welding work. And the operation of controlling the rotation of the heating plate workpiece 3 is coordinated with the operations of adjusting the height and angle of the above welding torch body 591, so that different positions of the heating plate workpiece 3 can be effectively welded, and the welding process is more flexible.

[0069] The above are all the preferred embodiments of the present invention, and the protection scope of the present invention is not limited by this. Therefore, all equivalent changes made according to the structure, shape and principle of the present invention should be covered within the protection scope of the present invention.

Claims

1. A brazing device, comprising a base plate, characterized in that: The top of the bottom plate is rotatably connected to a placing table, a heating plate workpiece is placed on the top of the placing table, the top of the bottom plate is fixedly connected to a main frame, and a welding mechanism is arranged on the main frame; The welding mechanism comprises a lifting block, the lifting block is slidably connected to the inside of the main frame, a first electric push rod is fixedly connected to one side of the lifting block, one end of the first electric push rod is fixedly connected to a mounting seat, a connecting plate is arranged on one side of the mounting seat, the connecting plate extends into the inner side of the mounting seat and is connected to the mounting seat through a rotating shaft, a first control rod and a second control rod are rotatably connected on the connecting plate, a mounting ring is fixedly connected to the bottom of the first control rod, a brazing material rod and a welding gun body are arranged at the bottom of the connecting plate, the welding gun body passes through the mounting ring and is fixedly connected to the mounting ring, a first rectangular plate is fixedly connected to the bottom of the second control rod, a second rectangular plate is arranged on one side of the first rectangular plate, a round rod is fixedly connected between the first rectangular plate and the second rectangular plate, and the brazing material rod passes through the first rectangular plate and the second rectangular plate in sequence; The top of the bottom plate is provided with a positioning mechanism, and the positioning mechanism includes a stabilizing plate, the stabilizing plate is fixedly connected to the top of the bottom plate, the placing platform passes through the top wall of the stabilizing plate and is rotatably connected to the stabilizing plate, a cross bar is fixedly connected to the inner side of the stabilizing plate, and the outer side of the cross bar is slidably connected to the moving plate, and a third electric push rod is fixedly connected between the moving plate and the inner side wall of the stabilizing plate, and the placing platform is fixedly connected to the outside of the second gear, and one side of the moving plate is fixedly connected to the second rack, and the second rack is meshed with the second gear. The top of the bottom plate is fixedly connected to the base frame, and a control plate is provided on the top of the base frame, and the control plate extends into the inside of the base frame and is slidably connected to the base frame. An extension plate is integrally formed on the rear side of the control plate, and a fourth electric push rod is fixedly connected to the bottom of the extension plate, and the fourth electric push rod is fixedly connected to the top of the bottom plate, and the top of the bottom plate is rotatably connected to a square rod, and the square rod passes through the top wall of the stabilizing plate and is rotatably connected to the stabilizing plate; A sleeve and a connecting frame are rotatably connected to the top wall of the control panel, the square rod passes through the sleeve and matches with the sleeve, a third gear is fixedly connected to the outside of the square rod, the third gear is meshed with the second gear, a fourth gear is fixedly connected to the outside of the sleeve, a fifth gear is fixedly connected to the outside of the connecting frame, and the fourth gear is meshed with the fifth gear.

2. A brazing equipment according to claim 1, characterized in that: Two guide wheels are rotatably connected inside the second rectangular plate, a first motor is fixedly connected to the top of the second rectangular plate, the first motor is fixedly connected to one of the guide wheels through an output shaft, the two guide wheels are respectively arranged on both sides of the solder rod, and the guide wheels are in contact with the solder rod, a tank body is fixedly connected to the top of the bottom plate, and the tank body is connected to the welding gun body through a pipeline.

3. A brazing equipment according to claim 1, characterized in that: A threaded adjustment rod is rotatably connected inside the main frame, the threaded adjustment rod passes through the lifting block and is connected to the lifting block through threads, and a second motor is fixedly connected to the top of the main frame, and the second motor is fixedly connected to the threaded adjustment rod through an output shaft.

4. A brazing equipment according to claim 1, characterized in that: A strip plate is slidably connected to the inner side of the mounting seat, an L-shaped plate is fixedly connected to the top of the mounting seat, a second electric push rod is fixedly connected to the top of the L-shaped plate, the bottom of the second electric push rod is fixedly connected to the top of the strip plate, a first gear is fixedly connected to the outside of the rotating shaft, a first rack is fixedly connected to one side of the strip plate, and the first rack is meshed with the first gear.

5. A brazing equipment according to claim 1, characterized in that: Two square plates are fixedly connected to one side of the connecting plate, and a first bidirectional threaded rod is rotatably connected between the two square plates. A limiting groove is provided on one side of the connecting plate, and two first threaded blocks are arranged between the two square plates. The first bidirectional threaded rod passes through the two first threaded blocks in sequence, and the first bidirectional threaded rod is connected to the first threaded block by threads. A first clamping plate is fixedly connected to one side of the first threaded block, and the first clamping plate passes through the limiting groove and matches the limiting groove. The two first clamping plates are respectively fitted with the outer sides of the first control rod and the second control rod.

6. A brazing equipment according to claim 1, characterized in that: A limiting rod is fixedly connected to one side of the mounting seat, and the limiting rod passes through the lifting block.

7. A brazing equipment according to claim 1, characterized in that: An auxiliary frame is fixedly connected to the outside of the connecting frame, and the auxiliary frame is arranged at the bottom of the fifth gear. A second two-way threaded rod is rotatably connected to the inside of the auxiliary frame, and the second two-way threaded rod extends out of the auxiliary frame. Two second threaded blocks are slidably connected to the inside of the auxiliary frame, and a pushing plate is fixedly connected to the second threaded block. The pushing plate extends out of the auxiliary frame, and the pushing plate extends into the connecting frame, and a second clamping plate is fixedly connected to the pushing plate.

8. A brazing device according to any one of claims 1 to 7 is applied to a welding process for processing a semiconductor heating plate, characterized in that: The following steps are involved: Workpiece placement The parts of the heating plate workpiece to be welded are stacked on the top of the placement table, and after the top part is inserted through the connection frame, the second bidirectional threaded rod is rotated to control the two second clamping plates to clamp the parts of the heating plate workpiece inserted through the connection frame. Finally, after the fourth electric push rod is slightly pulled downward, the second clamping plate presses the heating plate workpiece downward to ensure the stability of the heating plate workpiece. Welding adjustment During the welding process, the placement table is controlled to rotate by controlling the movement of the moving plate. During the rotation of the placement table, the connection frame and the placement table are synchronously rotated through the transmission relationship between the second gear, the third gear, the fourth gear and the fifth gear, so as to ensure that the second clamping plate can stably clamp the workpiece on the heating plate while the workpiece rotates. Welding Process The tank body transports the fuel required for welding to the welding gun body through a pipeline, and during welding, the adjustment connecting plate is swung on the inner side of the mounting seat with the rotating shaft as the axis to adjust the welding angle. At the same time, the welding height is adjusted by controlling the lifting block to move up and down. Based on this step and the effect of controlling the rotation of the placement table above, effective welding can be properly performed on different positions of the heating plate workpiece, and the whole process does not require excessive human participation.

Citation Information

Patent Citations

  • Welding method for aluminum wafer heating disc

    CN118417661A

  • Semiconductor brazing heating plate with auxiliary limiting structure

    CN217018958U

  • A composite tool for ceramic brazing

    CN220993066U