Decoherence device and light source system

Abstract

The invention discloses a decoherence device and a light source system, and belongs to the field of light sources. The decoherence device comprises a shell, the shell is provided with a light inlet and a light outlet, the light inlet and the light outlet are used for allowing light beams to pass through, the shell is used for being connected with a gas spraying and sucking device so that monatomic gas with the concentration changing randomly can be formed in the shell, and the light beams pass through the monatomic gas with the concentration changing randomly. The monatomic gas in the shell is equivalent to a lens, the concentration of the monatomic gas changes randomly, so that the refractive index of each area changes randomly in the distribution range of the monatomic gas, light beams penetrate through the monatomic gas with different concentrations, an optical path difference is formed, and decoherence of the light beams is realized; the light beam emitted from the light outlet is made incoherent light.

Description

Technical Field

[0001] The present application relates to the field of light sources, and in particular to a decoherence device and a light source system. Background Art

[0002] The light source system can provide laser beams that meet certain requirements for various devices. The light source system usually includes a coherent light source and a decoherence device.

[0003] Since the light beam provided by the coherent light source has good coherence, interference will occur, and speckle will be produced during imaging. Therefore, the light beam emitted by the coherent light source needs to be shaped by a decoherence device to turn the light beam into incoherent light.

[0004] The decoherence device usually uses a reflection method to achieve decoherence, including multiple reflectors. The coherent light is obliquely incident on the reflector surface and is reflected by multiple reflectors to become incoherent light. The reflector needs to be processed by high-precision optics, which is difficult and costly. In addition, this reflection method also causes a large loss of light beam energy. Summary of the invention

[0005] The present application provides a decoherence device and a light source system, which can reduce costs and reduce the energy loss of light beams. The technical solution is as follows:

[0006] In a first aspect, a decoherence device is provided, which includes a shell having a light inlet and a light outlet, both for allowing a light beam to pass through, the shell being used to be connected to a gas ejection and suction device, the gas ejection and suction device being used to form a monatomic gas with randomly varying concentration in the shell, and the light beam passing through the monatomic gas with randomly varying concentration.

[0007] Based on the above characteristics, the monatomic gas in the outer shell is equivalent to a lens. Since the concentration of the monatomic gas changes randomly, the refractive index of each area changes randomly within the distribution range of the monatomic gas. When the light beam passes through monatomic gases of different concentrations, an optical path difference will be formed, thereby realizing the decoherence of the light beam, making the light beam emitted from the light outlet incoherent light.

[0008] In some examples, the decoherence device includes a housing and a gas ejection and suction device. The gas ejection and suction device has an ejection port and a suction port, the ejection port and the suction port are located on or in the housing, the ejection port is used to eject a monatomic gas with a randomly changing flow rate into the housing, and the suction port is used to absorb the monatomic gas.

[0009] Based on the above features, the gas injection device ejects monatomic gas, and the gas suction device recovers the monatomic gas to avoid diffusion of the monatomic gas. Under the action of the gas injection device and the gas suction device, a monatomic gas flow is formed at the gap. In the process of random change in the flow rate of the monatomic gas ejected by the gas injection device, the distribution of the monatomic gas in the gap will also continue to change, and the concentration of the monatomic gas in different areas of the gap is also different. The different concentration of the monatomic gas has different refractive index. In other words, the refractive index of each area of ​​the gas lens is constantly changing randomly. When the light beam passes through different areas of the gas lens at the same time, and passes through the same area of ​​the gas lens at different times, an optical path difference will be formed, thereby realizing decoherence of the light beam, so that the light beam emitted from the light outlet is incoherent light.

[0010] Optionally, the gas ejection and suction device has n ejection ports and n suction ports, n≥1 and is an integer, and the n ejection ports and the n suction ports are arranged one by one relative to each other to form a monatomic gas flow with randomly varying flow rates between the n ejection ports and the n suction ports, and the light beam is suitable for passing through the monatomic gas flow formed between the n ejection ports and the n suction ports.

[0011] Based on the above features, by arranging the jet port and the air inlet relative to each other, an airflow is formed between the jet port and the air inlet, thereby preventing the gas ejected from the jet port from diffusing, so that inside the shell, except for the area between the n jet ports and the n air inlet ports, other areas are always maintained in a vacuum or near-vacuum environment.

[0012] Optionally, n≥2, the n jets and the n air inlets are arranged in pairs, the lines between each pair of jets and air inlets intersect at one point, and the light beam is suitable for passing through the intersection of the lines. The gas concentration is higher at the intersection, and the gas concentration is lower at a position away from the intersection. When the light beam passes through the intersection, the effect of the monatomic gas flow on the light beam is more obvious, which is conducive to converting coherent light into incoherent light.

[0013] Optionally, the gas ejection and suction device comprises a gas ejection device and a gas suction device, the gas ejection device has the ejection port, the gas ejection device is used to eject the monoatomic gas with a randomly changing flow rate into the shell through the ejection port, and the gas suction device has the suction port, the gas suction device is used to suck gas from the shell through the suction port. Since the ejection port and the suction port are located on different devices, it is convenient to adjust the relative positions of the ejection port and the suction port during arrangement.

[0014] In some examples, the gas injection device includes a gas nozzle, and the gas nozzle is located in the housing, or one end of the gas nozzle is located in the housing and the other end is located outside the housing. The gas nozzle is arranged inside the housing, or plugged into the housing, and the arrangement of the gas nozzle better matches the size of the housing.

[0015] In some examples, the gas ejection device has an interface for receiving an electrical signal, and the gas ejection device is used to randomly change the flow rate of the monatomic gas flow under the action of the electrical signal with randomly changing frequency and / or intensity, and the intensity includes voltage or current. The method of controlling the operation of the gas ejection device by the electrical signal with randomly changing frequency and / or intensity is simple and easy to implement.

[0016] In some examples, the decoherence device further includes a controller, which is connected to the interface and configured to provide the electrical signal. By configuring the controller to provide the electrical signal, it is not necessary to connect other external devices, such as a computer, to provide the electrical signal for control.

[0017] As an example, the gas nozzle includes a nozzle body, a valve stem and a reset member, the jet port is located at one end of the nozzle body, the valve stem is located in the nozzle body, and one end matches the jet port, the reset member is located between the valve stem and the inner wall of the nozzle body, and the valve stem is used to reciprocate axially relative to the jet port under the action of the air pressure in the nozzle body and the reset member, thereby changing the degree of opening of the jet port.

[0018] Based on the above features, the gap formed between the valve stem and the jet port changes continuously through the reciprocating movement of the valve stem, so that the opening degree of the jet port changes continuously, and the flow rate of the gas ejected from the jet port changes continuously.

[0019] Optionally, the nozzle body has a high-pressure chamber, a transition chamber, a low-pressure chamber and a pressure relief hole, the high-pressure chamber is connected to the jet port, and the pressure relief hole connects the transition chamber and the low-pressure chamber; one end of the valve stem is located in the high-pressure chamber, and the other end is located in the transition chamber; the gas nozzle also includes a control component, which is used to control the opening and closing of the pressure relief hole.

[0020] Based on the above features, when the pressure relief hole is opened, the transition chamber is connected to the low-pressure chamber, and the air pressure in the transition chamber decreases. When the pressure relief hole is closed, the air pressure in the transition chamber increases. The two ends of the valve stem are respectively in the high-pressure chamber and the transition chamber, and the pressure difference between the high-pressure chamber and the transition chamber on the valve stem serves as the driving force for the movement of the valve stem.

[0021] Optionally, the control member is located in the low-pressure chamber, and includes a rod and a controllable telescopic portion. One end of the rod is connected to the controllable telescopic portion, and the other end matches the pressure relief hole. The controllable telescopic portion is used to deform under the action of an electrical signal, driving the rod to move relative to the pressure relief hole, so that the pressure relief hole is opened or closed.

[0022] Based on the above features, one end of the rod is connected to the controllable telescopic part, and when the controllable telescopic part is deformed, the rod is driven to move. The other end of the rod extends into the pressure relief hole, and when the rod is in contact with the hole wall of the pressure relief hole, the pressure relief hole is closed. When the rod moves under the drive of the controllable telescopic part and a gap is formed between the rod and the hole wall of the pressure relief hole, the pressure relief hole is opened, and the pressure relief hole connects the transition chamber and the low-pressure chamber.

[0023] One end of the valve stem is located in the high-pressure chamber and is subjected to the pressure of the gas in the high-pressure chamber, and the gas pressure in the high-pressure chamber pushes the valve stem toward the transition chamber. The other end of the valve stem is located in the transition chamber and is subjected to the pressure of the gas in the transition chamber, and the gas pressure in the transition chamber pushes the valve stem toward the high-pressure chamber. During the opening and closing of the pressure relief hole, the thrust of the gas in the high-pressure chamber on the valve stem is substantially constant, while the thrust of the transition chamber on the valve stem changes with the opening and closing of the pressure relief hole. When the pressure relief hole is closed, the transition chamber is in a high-pressure state, and under the action of the thrust of the transition chamber and the reset member, the valve stem moves toward the side of the high-pressure chamber, the gap between the valve stem and the jet port is reduced, and the amount of gas ejected from the jet port is reduced; when the pressure relief hole is opened, the transition chamber is in a low-pressure state, the thrust on the valve stem is reduced, so that the valve stem moves toward the side of the transition chamber under the action of the thrust of the high-pressure chamber, the gap between the valve stem and the jet port is increased, and the amount of gas ejected from the jet port is increased, thereby realizing the control of the flow rate of the monatomic gas flow.

[0024] Optionally, the controllable telescopic portion is made of composite piezoelectric material or rare earth giant magnetostrictive material. When an electric signal is applied to the composite piezoelectric material and the rare earth giant magnetostrictive material, both of them will deform, and the deformation is related to the strength of the electric signal, so that the movement of the rod can be controlled by the electric signal.

[0025] In some examples, the decoherence device further includes an air inlet pipe and an air suction pipe. One end of the air inlet pipe is located outside the housing, and the other end is connected to the high-pressure chamber of the gas nozzle;

[0026] One end of the air intake pipe is located outside the shell, and the other end is connected to the low-pressure chamber of the gas nozzle and the gas nozzle respectively.

[0027] Based on the above features, the end of the air inlet pipe located outside the shell can facilitate the connection of the decoherence device to the high pressure source. The end of the air intake pipe located outside the shell can facilitate the connection of the decoherence device to the low pressure source. Since one end of the air inlet pipe and the air intake pipe extends to the outside of the shell, the high pressure source and the low pressure source can be arranged outside the shell, which is conducive to reducing the volume of the shell and facilitating the arrangement and maintenance of the high pressure source and the low pressure source.

[0028] Optionally, the gas suction nozzle has a suction port at an end opposite to the gas nozzle, and the suction port is conical, with the end with a larger diameter being close to the gas nozzle.

[0029] Based on the above features, the air intake port is set to be conical, and the end of the air intake port with a larger diameter is directed toward the gas nozzle, which is conducive to the gas suction nozzle collecting the airflow ejected from the gas nozzle.

[0030] On the other hand, a light source system is provided, which includes a coherent light source and any one of the decoherence devices described in the previous aspect. The coherent light source is aligned with the light inlet of the housing of the decoherence device, that is, the light beam emitted by the coherent light source is incident on the light inlet of the housing of the decoherence device.

[0031] Based on the above characteristics, the coherent light output by the coherent light source is emitted into the decoherence device from the light inlet, passes through the gap between the gas injection device and the gas suction device, and then emitted from the light outlet is the converted incoherent light.

[0032] Optionally, the light source system further comprises an air source and an air pump, wherein the air source is connected to an air inlet of the air pump, and an air outlet of the air pump is connected to the gas ejection and suction device.

[0033] Optionally, the light source system further comprises a filter, and the gas ejection and suction device is connected to the air inlet of the air pump through the filter.

[0034] Based on the above features, by connecting the gas suction device to the air inlet of the air pump, the monatomic gas recovered by the gas suction device can be recycled, thereby reducing the consumption of the monatomic gas. The filter filters the recovered monatomic gas to avoid the adverse effects of impurities mixed in the monatomic gas.

[0035] Optionally, the light source system further comprises a differential pump, which is connected between the coherent light source and the light inlet of the housing. The differential pump can play an isolating role to prevent the monoatomic gas in the decoherence device from diffusing into the coherent light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 is a schematic structural diagram of a decoherence device provided in an embodiment of the present application;

[0037] Figure 2 It is a structural schematic diagram of a housing provided in an embodiment of the present application;

[0038] Figure 3 is a schematic structural diagram of a decoherence device provided in an embodiment of the present application;

[0039] Figure 4 It is a structural schematic diagram of a gas ejection and suction device provided in an embodiment of the present application;

[0040] Figure 5 is a schematic diagram of the jetting process of a gas nozzle provided in an embodiment of the present application;

[0041] Figure 6 Schematic diagram of the distribution of gas nozzles and gas suction nozzles provided in the embodiment of the present application;

[0042] Figure 7 is a schematic diagram of the structure of a gas nozzle provided in an embodiment of the present application;

[0043] Figure 8 It is a structural schematic diagram of a valve stem provided in an embodiment of the present application;

[0044] Fig. 9 It is a schematic diagram of the structure of a gas nozzle provided in an embodiment of the present application;

[0045] Fig.10 is a schematic structural diagram of a decoherence device provided in an embodiment of the present application;

[0046] Fig.11 It is a structural schematic diagram of a light source system provided in an embodiment of the present application. DETAILED DESCRIPTION

[0047] Figure 1 is a schematic diagram of the structure of a decoherence device provided in an embodiment of the present application. Figure 1 As shown, the decoherence device includes a housing 10. The housing 10 has a light inlet 10a and a light outlet 10b, and the housing 10 is used for allowing a light beam to pass through. The light beam enters the housing 10 from the light inlet 10a and exits from the light outlet 10b. The housing 10 is used to be connected to a gas ejection device to form a monoatomic gas with a randomly changing concentration in the housing 10.

[0048] The light beam injected into the housing 10 from the light inlet 10a passes through the monatomic gas with randomly changing concentration. Random concentration change means that the gas concentration in each area in the space where the monatomic gas is distributed changes randomly. The various areas here mean that the space where the monatomic gas is distributed can be divided into multiple subspaces, and one subspace is one area. The gas concentration in a single area is constantly changing, and this change is random. At a certain moment, the gas concentration in a region has changed compared to the previous moment. This change may be an increase or a decrease.

[0049] The monatomic gas in the outer shell 10 is equivalent to a lens. Since the concentration of the monatomic gas changes randomly, the refractive index of each area in the distribution range of the monatomic gas changes randomly. When the light beam passes through monatomic gases of different concentrations, an optical path difference will be formed, thereby achieving decoherence of the light beam, making the light beam emitted from the light outlet 10b incoherent light.

[0050] The housing 10 can be in any shape. In this application, only a rectangular parallelepiped is used as an example. In other examples, for example, a cylindrical shape can also be used. The light inlet 10a and the light outlet 10b can be two light-permeable areas on the housing 10 or two light-permeable holes on the housing 10.

[0051] As an example, the housing 10 is in a rectangular shape, and the light inlet 10a and the light outlet 10b can be located on two opposite side walls of the housing 10. When the light beam is irradiated from the light inlet 10a into the housing 10, it can be emitted from the light outlet 10b. The light beam is incident from the light inlet 10a into the housing 10, and can be emitted toward the light outlet 10b in a straight line, or it can be refracted and reflected by other optical devices, and then change direction and be emitted toward the light outlet 10b. In this example, the light inlet 10a and the light outlet 10b are directly opposite, and the light beam is incident from the light inlet 10a into the housing 10, and propagates along the line connecting the center of the light inlet 10a and the center of the light outlet 10b.

[0052] Figure 2 Schematic diagram of the structure of a housing provided in an embodiment of the present application. Figure 2 As shown, the outer wall of the housing 10 may also have a first interface 11 and a second interface 12, both of which are tubular. The first interface 11 is arranged around the light inlet 10a, and the second interface 12 is arranged around the light outlet 10b. The first interface 11 is used to connect upstream devices such as coherent light sources, and the second interface 12 is used to connect downstream devices. More sophisticated optical systems usually operate in a vacuum or a near-vacuum environment. The first interface 11 and the second interface 12 are respectively used to connect upstream devices and downstream devices in the optical system, so that the light beam can propagate in a vacuum or a near-vacuum environment.

[0053] Figure 3is a schematic diagram of the structure of a decoherence device provided in an embodiment of the present application. Figure 3 As shown, the decoherence device comprises a housing 10 and a gas ejection and suction device 20 . Figure 3 A portion of the housing 10 is removed to expose the structure inside the housing 10 .

[0054] Figure 4 Schematic diagram of the structure of a gas ejection and suction device provided in an embodiment of the present application. Figure 4 As shown, the gas ejection and suction device 20 has an ejection port 211d and an air suction port 221a, which are located in the housing 10. The ejection port 211d is used to eject the monoatomic gas with a randomly changing flow rate into the housing 10, and the air suction port 221a is used to absorb the monoatomic gas.

[0055] The gas ejection and suction are performed through the jet port 211d and the air inlet 221a of the gas ejection and suction device 20. The jet port 211d ejects a monatomic gas with a randomly changing flow rate, and the air inlet 221a absorbs the monatomic gas ejected from the jet port 211d to form a monatomic gas flow, so that a monatomic gas with a continuously and randomly changing concentration is formed between the jet port 211d and the air inlet 221a. The monatomic gas flow refers to a gas flow formed by a monatomic gas, and the monatomic gas can be, for example, one of helium, argon, and krypton. In addition, the air inlet 221a absorbs the monatomic gas to prevent the jet port 211d from continuously ejecting gas, so that the overall gas concentration in the housing 10 continues to rise over time, so that the overall gas concentration in the housing 10 is in dynamic equilibrium, that is, it remains stable or fluctuates between an upper limit and a lower limit. For a decoherence device with a defined structure, the upper and lower limits here can be controlled by the jet rate and the suction rate of the gas jet-suction device 20, the jet rate corresponds to the flow rate of the jet port 211d, and the suction rate corresponds to the flow rate of the suction port 221a.

[0056] The gas ejection and suction device 20 may include two parts, namely, a gas ejection device 21 and a gas suction device 22. The gas ejection device 21 has an ejection port 211d, and the gas ejection device 21 is used to eject a monoatomic gas with a randomly changing flow rate into the housing 10 through the ejection port 211d. The gas suction device 22 has an air suction port 221a, and the gas suction device 22 is used to suck gas from the housing 10 through the air suction port 221a. Since the ejection port 211d and the air suction port 221a are respectively located on the gas ejection device 21 and the gas suction device 22, it is convenient to adjust the relative positions of the ejection port 211d and the air suction port 221a during arrangement.

[0057] Optionally, the gas ejection and suction device 20 has n ejection ports 211d and n suction ports 221a, where n≥1 and is an integer. The n ejection ports 211d and n suction ports 221a are arranged one by one to form a monatomic gas flow with a randomly changing flow rate between the n ejection ports 211d and the n suction ports 221a. The light beam is suitable for passing through the monatomic gas flow formed between the n ejection ports 211d and the n suction ports 221a.

[0058] The jet ports 211d and the air inlet 221a are arranged one by one opposite to each other, so that an airflow is formed in the gap between the jet ports 211d and the air inlet 221a to prevent the gas ejected from the jet ports 211d from diffusing. The airflows ejected from the n jet ports 211d can converge with each other, which can further prevent the gas from diffusing.

[0059] In some examples, n≥2, n jet ports 211d and n air inlets 221a are arranged in pairs, the lines between each pair of jet ports 211d and air inlets 221a intersect at one point, and the light beam is suitable to pass through the intersection point O of the lines. The line between the jet ports 211d and the air inlets 221a referred to here may refer to the line between the center of the jet ports 211d and the center of the air inlets 221a, Figure 4 The direction from the jet port 211d along the connecting line to the air inlet 221a is the jet direction of the jet port 211d, that is, Figure 4 The direction indicated by the arrow in the middle. The airflow ejected from the air jet port 211d is columnar, and the jet direction 211d is the axis of the columnar airflow.

[0060] exist Figure 4 In the example shown, only n=2 is used as an example for explanation, and the jet directions of all gas nozzles 211 intersect at the same point, which is O, so that there is a higher gas concentration at the intersection O, and a lower gas concentration at a position away from the intersection O. When the light beam passes through the intersection, the effect of the monatomic gas flow on the light beam is more obvious, which is conducive to converting coherent light into incoherent light.

[0061] Optionally, the gas ejection and suction device 20 has an interface for receiving an electrical signal. The gas ejection and suction device 20 is used to randomly change the flow rate of the monatomic gas flow under the action of the electrical signal with randomly changing frequency and / or intensity, and the intensity includes the voltage or current. Thus, the random change of the flow rate of the monatomic gas flow is achieved by using the randomly changing electrical signal, which facilitates the control of the gas ejection and suction device 20.

[0062] In some examples, the randomly changing electrical signal may be provided by a computer, and the gas ejection and suction device 20 may work under the action of the electrical signal provided by the computer by connecting an interface for receiving the electrical signal to the computer.

[0063] In some other examples, the decoherence device may further include a controller, which is connected to an interface of the gas ejection and suction device 20 for receiving electrical signals, and the controller is used to provide the electrical signal.

[0064] As an example, the decoherence device includes a housing 10, a gas ejection device 20 and a controller 30 (see Figure 7 The housing 10 has a chamber in which the gas ejection and suction device 20 is located. Figure 3 shown.

[0065] like Figure 4 As shown, the gas ejection and suction device 20 includes a gas ejection device 21 and a gas suction device 22. The gas ejection device 21 includes a gas nozzle 211, and the gas nozzle 211 is located in the housing 10. The gas suction device 22 includes a gas suction nozzle 221, and the gas suction nozzle 221 is located in the housing 10. The gas nozzle 211 has an ejection port 211d, and the gas suction nozzle 221 has a suction port 221a. The gas nozzle 211 and the gas suction nozzle 221 are arranged opposite to each other.

[0066] There is a gap 20a between the gas jet 211d and the gas suction port 221a for the light beam to pass through. That is, the light beam is emitted from the light inlet 10a to the light outlet 10b. Taking the light path of the light beam as a reference, the gas nozzle 211 and the gas suction nozzle 221 are respectively located on both sides of the light path.

[0067] The gas ejection and suction device 20 is used to form a monatomic gas flow from the ejection port 211d to the suction port 221a in the gap 20a. The controller 30 is connected to the gas ejection device 21. The controller is used to randomly change the flow rate of the monatomic gas ejected by the gas ejection device 21.

[0068] When the decoherence device is in use, the light beam emitted by the coherent light source is coherent light, which enters the housing 10 from the light inlet 10a, passes through the gap 20a between the air jet 211d and the air inlet 221a, and then exits the housing 10 from the light outlet 10b. The light beam is affected by the monoatomic gas flow in the gap 20a, thereby being converted into incoherent light.

[0069] The housing 10 is used to provide a relatively low pressure environment, so that the gas ejection and suction device 20 is located in a relatively low pressure environment, such as a vacuum or a near-vacuum environment, so as to avoid the influence of air on the light beam, so that the light beam is only affected by the monatomic gas flow.

[0070] The gas injection device 21 ejects monatomic gas, and the gas suction device 22 recovers the ejected monatomic gas to prevent the monatomic gas from diffusing. Under the action of the gas injection device 21 and the gas suction device 22, a monatomic gas flow is formed at the gap 20a. Since other areas in the housing 10 are vacuum or approximately vacuum, the gas is distributed at the gap 20a, which makes the gas in the gap 20a equivalent to a lens. In the process of random changes in the flow rate of the monatomic gas ejected by the gas injection device 21, the distribution of the monatomic gas in the gap 20a will also continue to change, that is, the concentration changes, and the concentration of the monatomic gas in different areas of the gap 20a is also different. The concentration of the monatomic gas is different, and the refractive index is also different. When the light beam passes through the monatomic gas of different concentrations, an optical path difference will be formed, thereby realizing the decoherence of the light beam, so that the light beam emitted from the light outlet 10b is incoherent light.

[0071] The gas injection device 21 may include n gas nozzles 211, where n≥2 and is an integer. The injection directions of the n gas nozzles 211 intersect at one point, and the intersection point O is located in the gap 20a. As an example, Figure 4 As shown, the gas injection device 21 may include two gas nozzles 211 .

[0072] Figure 5 Schematic diagram of the jetting process of a gas nozzle provided in an embodiment of the present application. The figure shows a cross section of the gas flow, that is, a cross section perpendicular to the jetting direction, and black dots indicate atoms in the gas flow. Figure 5 As shown, the concentration of the gas flow ejected from the gas nozzle 211 is not uniform at various locations. The gas concentration referred to in this application refers to the number of atoms of monatomic gas per unit volume. It can also be expressed as the average distance between atoms. The smaller the average distance between atoms, the greater the gas concentration. In the cross section of the gas flow formed by the gas nozzle 211, the closer to the central area, the higher the gas concentration. The jet directions of all gas nozzles 211 intersect at the same point, so that the gas concentration is higher at the intersection O, and the gas concentration is lower at locations away from the intersection O.

[0073] The gas suction device 22 includes n gas suction nozzles 221 corresponding to the n gas nozzles 211 one by one. The gas suction nozzles 221 are located in the jetting direction of the corresponding gas nozzles 211 and are arranged opposite to the gas nozzles 211 .

[0074] For example, Figure 4In the example shown, the intersection of the jet directions of the two gas nozzles 211 is located in the gap 20a. The two gas nozzles 221 are arranged opposite to the two gas nozzles 211, respectively, so that the gas ejected from the two gas nozzles 211 can be absorbed by the gas nozzles 221 more quickly, preventing the gas from diffusing in the housing 10, so that the area outside the gap 20a in the housing 10 is always maintained in a vacuum or near-vacuum environment.

[0075] like Figure 4 As shown, the intersection O of the jet directions of the n gas nozzles 211 is located on the line m connecting the center of the light inlet 10a and the center of the light outlet 10b. That is, the n jet ports 211d and the n air inlet ports 221a are arranged in pairs, and the lines connecting each pair of the jet ports 211d and the air inlet ports 221a intersect at one point.

[0076] When the decoherence device is connected to a coherent light source, the coherent light source needs to be aligned with the light inlet 10a so that the light beam can propagate in the desired direction. In order to reduce the error between the propagation direction of the light beam and the desired direction, the light beam is incident from the center of the light inlet 10a and is emitted from the center of the light outlet 10b. The light beam propagates in the housing 10 along the line connecting the center of the light inlet 10a and the center of the light outlet 10b. Since the intersection O is located on the line, the gas concentration at the intersection O in the gap 20a is higher than that at other positions, and the effect on the light beam is more obvious.

[0077] Figure 6 Schematic diagram of the distribution of gas nozzles and gas suction nozzles provided in the embodiment of the present application. Figure 6 As shown, the jetting direction of the gas nozzle 211 is perpendicular to a line m connecting the center of the light inlet 10a and the center of the light outlet 10b.

[0078] from Figure 5 It can be seen from the distribution of gas concentration shown in that, on the cross section of the gas flow formed by the gas nozzle 211, the closer to the middle area, the higher the gas concentration, and the closer to the edge area, the lower the gas concentration. By making the jet direction of the gas nozzle 211 perpendicular to the connecting line m, the gas concentration in the gap 20a can be made to present a distribution of high in the middle and low at the edge. That is, the gas concentration at the center of the gas lens, that is, the intersection of the jet directions of multiple gas nozzles 211, is the highest, and the further away from the intersection, the lower the gas concentration.

[0079] The multiple gas nozzles 211 may be rotationally symmetric about the intersection point O, and the rotation angles of adjacent gas nozzles 211 are the same. That is, among the multiple gas nozzles 211, the angles between the injection directions of any adjacent gas nozzles 211 are all equal.

[0080] In the embodiment of the present application, the jet directions of the two gas nozzles 211 are perpendicular to each other, that is, the line connecting one jet port 211d and the air inlet 221a opposite thereto, and the line connecting the other jet port 211d and the air inlet 221a opposite thereto, are perpendicular to each other.

[0081] Airflows in different directions will cause the light beam to diverge in different directions, changing the divergence angle of the light beam. By arranging the jet directions of the two gas nozzles 211 vertically, after the circular light beam passes through the gap 20a, under the action of the monatomic gas flow, it will diverge in two directions perpendicular to each other, so that the final formed light beam is still a circular light beam.

[0082] Figure 7 Schematic diagram of the structure of a gas nozzle provided in an embodiment of the present application. Figure 7 As shown, the gas nozzle 211 includes a nozzle body 2111, a valve stem 2112 and a reset member 2113. The jet port 211d is located at one end of the nozzle body 2111, and the valve stem 2112 is located in the nozzle body 2111, and one end matches the jet port 211d. The reset member 2113 is located between the valve stem 2112 and the inner wall of the nozzle body 2111. The valve stem 2112 is used to reciprocate relative to the jet port 211d in the axial direction under the action of the air pressure in the nozzle body 2111 and the reset member 2113, so as to change the degree of opening of the jet port 211d.

[0083] As the valve stem 2112 moves back and forth axially relative to the jet port 211d, the gap formed between the valve stem 2112 and the jet port 211d changes continuously, so that the degree of opening of the jet port 211d changes continuously, and the flow rate of the gas ejected from the jet port 211d changes continuously.

[0084] The nozzle body 2111 has a high pressure chamber 211a, a transition chamber 211b, a low pressure chamber 211c and a pressure relief hole 211h. The high pressure chamber 211a is connected to the jet port 211d, and the pressure relief hole 211h connects the transition chamber 211b and the low pressure chamber 211c. One end of the valve stem 2112 is located in the high pressure chamber 211a, and the other end is located in the transition chamber 211b. The gas nozzle 211 also includes a control member 2114, which is used to control the opening and closing of the pressure relief hole 211h.

[0085] The control member 2114 controls the opening and closing of the pressure relief hole 211h. When the pressure relief hole 211h is opened, the transition chamber 211b is connected to the low pressure chamber 211c, and the air pressure is reduced. When the pressure relief hole 211h is closed, the air pressure in the transition chamber 211b is increased. The two ends of the valve stem 2112 are respectively in the high pressure chamber 211a and the transition chamber 211b. The air pressure difference in the two chambers will act on the valve stem 2112, which becomes the power to provide the movement of the valve stem 2112.

[0086] like Figure 7 As shown, the control member 2114 is located in the low-pressure chamber 211c. The control member 2114 includes a rod 21141 and a controllable telescopic portion 21142. One end of the rod 21141 is connected to the controllable telescopic portion 21142, and the other end is matched with the pressure relief hole 211h. The controllable telescopic portion 21142 is used to deform under the action of an electrical signal, driving the rod 21141 to move relative to the pressure relief hole 211h, so that the pressure relief hole 211h is opened or closed. One end of the rod 21141 is connected to the controllable telescopic portion 21142. When the controllable telescopic portion 21142 is deformed, the rod 21141 is driven to move. The other end of the rod 21141 extends into the pressure relief hole 211h. When the rod 21141 is in contact with the hole wall of the pressure relief hole 211h, the pressure relief hole 211h is closed. When the rod 21141 moves driven by the controllable telescopic portion 21142 and a gap is formed between the rod 21141 and the hole wall of the pressure relief hole 211h, the pressure relief hole 211h is opened, and the pressure relief hole 211h is connected to the transition chamber 211b and the low-pressure chamber 211c.

[0087] like Figure 7 As shown, a high-pressure chamber 211a, a transition chamber 211b, and a low-pressure chamber 211c are formed in the nozzle body 2111. The nozzle body 2111 also has an air jet 211d, an air inlet 211e, an air outlet 211f, a damping hole 211g, and a pressure relief hole 211h. The air jet 211d and the air inlet 211e are both connected to the high-pressure chamber 211a and the outside world, the air outlet 211f is connected to the low-pressure chamber 211c and the outside world, the damping hole 211g is connected to the high-pressure chamber 211a and the transition chamber 211b, and the pressure relief hole 211h is connected to the transition chamber 211b and the low-pressure chamber 211c.

[0088] The nozzle body 2111 may be a split structure, that is, it includes multiple detachably connected parts, which can facilitate the assembly of the nozzle body 2111, the valve stem 2112, the reset member 2113 and the control member 2114. The high pressure and low pressure mentioned in the embodiments of the present application only indicate that there is a relationship between the pressures, and it is not measured by a specific pressure value whether it is high pressure or low pressure. For example, the high pressure chamber 211a and the low pressure chamber 211c indicate that when the decoherence device is working, the pressure in the high pressure chamber 211a is higher than the pressure in the low pressure chamber 211c.

[0089] like Figure 7As shown, the valve stem 2112 is located in the nozzle body 2111. One end of the valve stem 2112 is located in the high pressure chamber 211a and matches the jet port 211d. The end of the valve stem 2112 is located at the jet port 211d, and the air flow can pass through the gap between the valve stem 2112 and the jet port 211d. When the valve stem 2112 extends into the jet port 211d, the gap between the valve stem 2112 and the jet port 211d decreases, so that the amount of air ejected from the jet port 211d decreases. When the valve stem 2112 exits the jet port 211d, the gap between the valve stem 2112 and the jet port 211d increases, so that the amount of air ejected from the jet port 211d increases.

[0090] The air jet port 211d may be a tapered hole, and the end of the valve stem 2112 located at the air jet port 211d is also tapered, so that the valve stem 2112 and the air jet port 211d can be better matched.

[0091] The other end of the valve stem 2112 is located in the transition chamber 211b. The reset member 2113 is connected to the valve stem 2112 and the nozzle body 2111, and the reset member 2113 is used to provide an axial force to the valve stem 2112.

[0092] The valve stem 2112 is used to reciprocate relative to the nozzle body 2111 along the axial direction under the pressure difference between the high pressure chamber 211a and the transition chamber 211b and the action of the reset member 2113. The control member 2114 is located in the low pressure chamber 211c and is used to control the opening and closing of the pressure relief hole 211h.

[0093] When the decoherence device is in use, the air inlet 211e of the nozzle body 2111 is connected to a high-pressure source, and the air outlet 211f is connected to a low-pressure source. High-pressure gas enters from the air inlet 211e of the nozzle body 2111, so that the high-pressure chamber 211a is always kept in a high-pressure state. The low-pressure chamber 211c is connected to the low-pressure source through the air outlet 211f and is always kept in a low-pressure state. Since the transition chamber 211b is connected to the high-pressure chamber 211a through the damping hole 211g and is connected to the low-pressure chamber 211c through the pressure relief hole 211h, when the pressure relief hole 211h is closed, the transition chamber 211b is in a high-pressure state, and when the pressure relief hole 211h is opened, the transition chamber 211b is in a low-pressure state.

[0094] like Figure 7As shown, one end of the valve stem 2112 is located in the high-pressure chamber 211a, and is subjected to the pressure of the gas in the high-pressure chamber 211a, and the gas pressure in the high-pressure chamber 211a pushes the valve stem 2112 toward the transition chamber 211b. The other end of the valve stem 2112 is located in the transition chamber 211b, and is subjected to the pressure of the gas in the transition chamber 211b, and the gas pressure in the transition chamber 211b pushes the valve stem 2112 toward the high-pressure chamber 211a. During the opening and closing of the pressure relief hole 211h, the thrust F1 of the gas in the high-pressure chamber 211a on the valve stem 2112 is basically constant, and the thrust F2 of the transition chamber 211b on the valve stem 2112 will change with the opening and closing of the pressure relief hole 211h. When the pressure relief hole 211h is closed, the transition chamber 211b is in a high-pressure state, and under the action of the thrust F2 and the reset member 2113, the valve stem 2112 moves toward the high-pressure chamber 211a, the gap between the valve stem 2112 and the jet port 211d is reduced, and the amount of air ejected from the jet port 211d is reduced; when the pressure relief hole 211h is opened, the transition chamber 211b is in a low-pressure state, the thrust F2 on the valve stem 2112 is reduced, so that the valve stem 2112 moves toward the transition chamber 211b under the action of the thrust F1, the gap between the valve stem 2112 and the jet port 211d is increased, and the amount of air ejected from the jet port 211d is increased.

[0095] The control member 2114 is used to control the opening and closing of the pressure relief hole 211h. It can be seen that the frequency of opening and closing the pressure relief hole 211h by the control member 2114 will affect the frequency of movement of the valve stem 2112.

[0096] When the valve stem 2112 reciprocates in the nozzle body 2111, there are two extreme states, namely, the end of the valve stem 2112 fits the inner wall of the jet port 211d, and the valve stem 2112 abuts against the inner wall of the transition chamber 211b. In other words, during the reciprocating motion of the valve stem 2112, the displacement has a maximum value. During the process of the control member 2114 opening and closing the pressure relief hole 211h, when the frequency reaches a certain level, the following two situations will occur: the valve stem 2112 has not moved to fit the inner wall of the jet port 211d, and the pressure relief hole 211h is opened again; the valve stem 2112 has not moved to abut against the inner wall of the transition chamber 211b, and the pressure relief hole 211h is closed again. This makes the displacement of the valve stem 2112 less than the maximum value.

[0097] It can be seen that the frequency of the opening and closing of the pressure relief hole 211h by the control member 2114 will also affect the displacement of the valve stem 2112. The greater the displacement of the valve stem 2112 toward the transition chamber 211b, the larger the gap between the valve stem 2112 and the jet port 211d, and the greater the amount of gas ejected from the jet port 211d, and vice versa. The smaller the amount of gas ejected from the jet port 211d. It can be seen that by adjusting the frequency of the opening and closing of the pressure relief hole 211h by the control member 2114, the amount of gas ejected from the jet port 211d can be adjusted, thereby changing the gas concentration at various locations in the gap 20a. The continuous random opening and closing of the pressure relief hole 211h can cause the gas concentration of the monatomic gas at various locations in the gap 20a to change randomly, thereby converting coherent light into incoherent light.

[0098] like Figure 7 As shown, in the low-pressure chamber 211c, there is also a guide plate 2115, which is connected to the inner wall of the low-pressure chamber 211c, and has a guide hole 2115a, in which the rod 21141 is inserted, and the guide hole 2115a and the rod 21141 are matched to make the reciprocating motion of the rod 21141 more stable. The guide plate 2115 does not block the low-pressure chamber 211c, for example, the guide plate 2115 may have a plurality of through holes to ensure the communication of the low-pressure chamber 211c.

[0099] The pressure relief hole 211h can be a tapered hole, that is, the hole wall of the pressure relief hole 211h is tapered. The end of the rod 21141 that matches the pressure relief hole 211h is also tapered, so that the rod 21141 can better cooperate with the pressure relief hole 211h to close the pressure relief hole 211h.

[0100] Since the controllable retractable portion 21142 can be deformed under the action of an electrical signal, the deformation of the controllable retractable portion 21142 can be controlled by the electrical signal, so that the pressure relief hole 211h is continuously opened and closed, thereby adjusting the flow rate of the monatomic gas ejected from the gas nozzle 211.

[0101] Optionally, the controllable telescopic portion 21142 is made of composite piezoelectric material or rare earth giant magnetostrictive material.

[0102] When an electrical signal is applied to the composite piezoelectric material and the rare earth giant magnetostrictive material, both will deform, and the amount of deformation is related to the strength of the electrical signal. When the electrical signal is removed, the deformation will be restored. The controllable telescopic part 21142 is made of composite piezoelectric material or rare earth giant magnetostrictive material, so that the movement of the rod part 21141 can be controlled by an electrical signal.

[0103] like Figure 7As shown, the controller 30 is electrically connected to the controllable telescopic part 21142. The controller 30 is used to provide an electrical signal with a frequency and / or intensity that changes randomly. The intensity includes the voltage or current. The interface through which the controllable telescopic part 21142 is electrically connected to the controller 30 is also the interface of the aforementioned gas ejection and suction device 20 for receiving the electrical signal.

[0104] As before, by adjusting the frequency of the control member 2114 opening and closing the pressure relief hole 211h, the amount of gas ejected from the jet port 211d can be adjusted, thereby changing the gas concentration at various locations in the gap 20a. The frequency of the control member 2114 opening and closing the pressure relief hole 211h is the movement frequency of the rod 21141, that is, the frequency of the deformation of the controllable telescopic portion 21142. Since the frequency of the deformation of the controllable telescopic portion 21142 is related to the frequency of the electrical signal provided by the controller 30, the higher the frequency of the electrical signal, the higher the frequency of the deformation of the controllable telescopic portion 21142. Therefore, the controller 30 provides an electrical signal with a randomly changing frequency, which can cause the gas concentration at various locations in the gap 20a to continuously and randomly change, thereby converting coherent light into incoherent light.

[0105] Exemplarily, the frequency of the electrical signal varies randomly within 100 Hz-1 MHz.

[0106] The deformation degree of the controllable telescopic part 21142 is affected by the intensity of the electric signal. The greater the intensity of the electric signal, the greater the deformation degree of the controllable telescopic part 21142, and accordingly, the greater the displacement of the rod 21141. Compared with the case where the rod 21141 moves at the same frequency, the greater the displacement of the rod 21141 relative to the pressure relief hole 211h, the larger the gap formed between the rod 21141 and the pressure relief hole 211h, and the faster the pressure of the transition chamber 211b drops. In this way, the displacement of the valve stem 2112 moving toward the transition chamber 211b is greater, which makes the gap formed between the valve stem 2112 and the jet 211d larger, and the flow rate of the monoatomic gas ejected from the jet 211d is greater. It can be seen that the intensity of the electric signal will also affect the gas flow ejected from the jet 211d. Therefore, the controller 30 provides an electric signal with randomly changing intensity, which can also make the gas concentration at various locations in the gap 20a constantly change, and convert coherent light into incoherent light.

[0107] In some examples, the controller 30 may provide an electrical signal with randomly varying frequency and intensity to further increase the randomness of the airflow volume ejected from the air jet 211 d .

[0108] like Figure 7As shown, a receiving chamber 211i is formed in the nozzle body 2111, and the receiving chamber 211i is located between the high-pressure chamber 211a and the transition chamber 211b. The receiving chamber 211i is connected to the low-pressure chamber 211c through a channel 211j. The valve stem 2112 passes through the receiving chamber 211i. The reset member 2113 is located in the receiving chamber 211i.

[0109] The channel 211j keeps the pressure between the accommodating chamber 211i and the low-pressure chamber 211c balanced, so that when the valve stem 2112 moves, it will not cause pressure build-up in the accommodating chamber 211i, thereby not affecting the movement of the valve stem 2112.

[0110] Figure 8 Schematic diagram of the structure of a valve stem provided in an embodiment of the present application. Figure 8 As shown, the valve stem 2112 includes a first rod body 21121, a second rod body 21122 and a columnar portion 21123, one end of the first rod body 21121 is connected to one end of the columnar portion 21123, and one end of the second rod body 21122 is connected to the other end of the columnar portion 21123. The end surface area of ​​the first rod body 21121 and the end surface area of ​​the second rod body 21122 are both smaller than the end surface area of ​​the columnar portion 21123.

[0111] The first rod body 21121 is located in the high pressure chamber 211a, and the columnar portion 21123 is inserted on the wall surface at the junction of the high pressure chamber 211a and the accommodating chamber 211i, and one end is located in the high pressure chamber 211a, and the other end is located in the accommodating chamber 211i. The second rod body 21122 is inserted on the wall surface at the junction of the transition chamber 211b and the accommodating chamber 211i, and one end is located in the transition chamber 211b, and the other end is located in the accommodating chamber 211i. The reset member 2113 is a spring, and the reset member 2113 is located in the accommodating chamber 211i and is sleeved outside the second rod body 21122, with one end abutting against the columnar portion 21123, and the other end abutting against the inner wall of the accommodating chamber 211i.

[0112] Since the end surface area of ​​the first rod body 21121 is smaller than the end surface area of ​​the columnar portion 21123, the air pressure of the high-pressure chamber 211a acts on the end surface of the columnar portion 21123, generating a thrust F1. The air pressure of the transition chamber 211b acts on the end surface of the second rod body 21122, generating a thrust F2. In the accommodating chamber 211i, the end surface of the columnar portion 21123 is also subjected to the thrust of the air pressure, but the air pressure in the accommodating chamber 211i is the same as the air pressure in the low-pressure chamber 211c, both are very small and can be ignored. In this way, the valve stem 2112 reciprocates under the thrust F1, thrust F2 and the elastic force of the reset member 2113.

[0113] The magnitude of the thrust F1 satisfies the following relationship:

[0114] F1=(S0-S1)·P1·cosθ (1)

[0115] Where S0 is the end surface area of ​​the columnar portion 21123, S1 is the area of ​​the end of the first rod 21121 connected to the columnar portion 21123, and S0-S1 represents Figure 8 The area of ​​the conical end surface of the columnar portion 21123 is shown in FIG. P1 is the gas pressure in the high pressure chamber 211a. That is, the thrust F1 is the component of the pressure exerted by the gas in the high pressure chamber 211a on the columnar portion 21123 in the axial direction of the valve stem 2112.

[0116] The magnitude of the thrust F2 satisfies the following relationship:

[0117] F2=S2·P2 (2)

[0118] Wherein S2 is the end surface area of ​​the second rod body 21122, and P2 is the air pressure in the transition chamber 211b.

[0119] It can be seen that when designing the gas nozzle 211, the force on the valve stem 2112 can be changed by adjusting the sizes of S0, S1, S2, and θ, so that the valve stem 2112 can reciprocate smoothly in the nozzle body 2111, thereby achieving control of the amount of gas ejected from the injection port 211d.

[0120] The air inlet 221a may be tapered, with the end with a larger diameter being close to the air outlet 211d. Fig. 9 Schematic diagram of the structure of a gas nozzle provided in an embodiment of the present application. Figure 6 and Fig. 9 As shown, the end of the gas suction nozzle 221 opposite to the gas nozzle 211 has a suction port 221 a , and the suction port 221 a is conical, with the end with a larger diameter close to the gas nozzle 211 .

[0121] The gas suction nozzle 221 is tubular, and one end of the suction port 221a is opposite to the gas nozzle 211, sucking away the gas sprayed by the gas nozzle 211 to prevent the gas from diffusing in the housing 10. The suction port 221a is set to be conical, and the end of the suction port 221a with a larger diameter is facing the gas nozzle 211, which is conducive to the gas suction nozzle 221 to collect the airflow sprayed by the gas nozzle 211.

[0122] like Figure 3 and Figure 4 As shown, the decoherence device further includes an air inlet pipe 41 and an air suction pipe 42. One end of the air inlet pipe 41 is located outside the housing 10, and the other end is respectively connected to the high pressure chambers 211a of the n gas nozzles 211. One end of the air suction pipe 42 is located outside the housing 10, and the other end is respectively connected to the low pressure chambers 211c of the n gas nozzles 211 and the n gas nozzles 211.

[0123] The end of the air inlet pipe 41 located outside the housing 10 can facilitate the connection of the decoherence device to a high-pressure source, such as the air outlet of an air pump. The end of the air intake pipe 42 located outside the housing 10 can facilitate the connection of the decoherence device to a low-pressure source, such as the air intake of an air pump. Since one end of the air inlet pipe 41 and the air intake pipe 42 extends to the outside of the housing 10, the high-pressure source and the low-pressure source can be arranged outside the housing 10, which is conducive to reducing the volume of the housing 10 and facilitating the arrangement of the high-pressure source and the low-pressure source.

[0124] The air pumps connected to the air inlet pipe 41 and the air intake pipe 42 can be the same air pump or different air pumps. When the air pumps connected to the air inlet pipe 41 and the air intake pipe 42 are the same air pump, it means that the gas recovered by the air intake pipe 42 is recycled, reducing the consumption of monatomic gas.

[0125] The air inlet pipe 41 and the air suction pipe 42 may be hard pipes, so as to also play the role of supporting the gas nozzle 211 and the gas suction nozzle 221 .

[0126] Fig.10 is a schematic diagram of the structure of a decoherence device provided in an embodiment of the present application. Fig.10 As shown, in the decoherence device, one end of the gas nozzle 211 is located inside the housing 10, and the other end is located outside the housing 10. One end of the gas suction nozzle 221 is also located inside the housing 10, and the other end is located outside the housing 10. When the volume of the housing 10 is small and the gas ejection and suction device 20 cannot be accommodated, by inserting the gas nozzle 211 and the gas suction nozzle 221 on the housing 10, a monoatomic gas with a randomly changing concentration can also be formed in the housing 10.

[0127] In order to further reduce the volume of the housing 10, the gas injection port 211d and the gas suction port 221a may also be located on the housing 10. That is, the gas injection and suction device 20 is arranged outside the housing 10 and does not extend into the housing 10.

[0128] Fig.11 Schematic diagram of a light source system provided in an embodiment of the present application. Fig.11 As shown, the light source system includes a coherent light source 110 and a decoherence device 140. The decoherence device 140 may be Figures 1 to 10 Any decorrelation device 140 shown.

[0129] The coherent light source 110 is aligned with the light inlet 10 a of the housing 10 of the decoherence device 140 , that is, the light beam emitted by the coherent light source 110 can be incident on the light inlet 10 a of the housing 10 of the decoherence device 140 .

[0130] The light source system may further include an air source 120 and an air pump 130 . The air source 120 is connected to an air inlet of the air pump 130 , and an air outlet of the air pump 130 is connected to the gas injection device 21 .

[0131] The coherent light source 110 is used to emit a light beam, which is coherent light. The light beam emitted by the coherent light source 110 enters the decoherence device 140 through the light inlet 10a.

[0132] As an example, the application of coherent light source 110 in the field of ultra-high precision imaging will lead to interference phenomenon, affecting imaging. The decoherence device in the present application is used to shape the light beam to form incoherent light, which can further expand the application range of coherent light in different bands.

[0133] The coherent light source 110 is aligned with the light inlet 10 a of the housing 10 of the decoherence device 140 , which means that the light beam emitted by the coherent light source 110 can enter the interior of the decoherence device 140 through the light inlet 10 a .

[0134] The gas source 120 is used to provide monatomic gas. The gas source 120 used may be different depending on the wavelength of the light beam emitted by the coherent light source 110. For example, if the wavelength of the light beam emitted by the coherent light source 110 is 13.5 nm, a krypton gas source may be used; if the wavelength of the light beam emitted by the coherent light source 110 is 50 nm, a helium gas source may be used.

[0135] The gas pump 130 is used to input the gas in the gas source 120 into the gas injection device 21 to form a monatomic gas flow in the gap 20 a between the gas injection device 21 and the gas suction device 22 .

[0136] For example, the output pressure of the gas pump 130 may not exceed 100 Pa. During the operation of the light source system, the light beam propagates in an environment close to a vacuum. If the output pressure of the gas pump 130 is too high, the flow rate of the monatomic gas will be too high, and the gas concentration in the gap 20a will be too high, resulting in excessive loss of the light beam when passing through the gap 20a. Usually, the gas concentration in the gap 20a does not exceed 10 22 atm / m 3 The gas concentration here refers to the gas concentration at the position with the highest gas concentration in the gap 20a.

[0137] like Fig.11 As shown, the light source system further includes a filter 150. The gas suction device 22 is connected to the air inlet of the air pump 130 through the filter 150.

[0138] By connecting the gas suction device 22 to the air inlet of the air pump 130, the monatomic gas recovered by the gas suction device 22 can be recycled, reducing the consumption of the monatomic gas. The filter 150 can filter the recovered monatomic gas to prevent the impurities mixed in the monatomic gas from having adverse effects.

[0139] like Fig.11As shown, the light source system further includes a differential pump 160 . The differential pump 160 is connected between the coherent light source 110 and the light inlet 10 a of the housing 10 .

[0140] Since air will affect the light beam, in order to avoid the influence of air on the light beam, the light beam in the light source system is kept in a vacuum or near-vacuum environment as much as possible, so the optical devices inside the coherent light source 110 usually work in a vacuum or near-vacuum environment. In order to prevent the monoatomic gas inside the decoherence device 140 from diffusing into the coherent light source 110 and affecting the coherent light source 110, a differential pump 160 is provided between the coherent light source 110 and the decoherence device 140 to isolate the coherent light source 110 and the decoherence device 140.

[0141] In the light source system, a plurality of differential pumps 160 may be connected in series between the coherent light source 110 and the decoherence device 140 to improve the isolation effect.

[0142] Exemplarily, the differential pump 160 can be connected to the housing 10 via the first interface 11 on the housing 10. The second interface 12 on the housing 10 can be used as an output port of the light source system to output incoherent light. The second interface 12 is used to connect to a downstream device. At least one differential pump can also be connected between the second interface 12 and the downstream device to play an isolation role.

[0143] The coherent light source 110 may also be connected to the controller 30 of the decoherence device 140, and the controller 30 is also used to control the operation of the coherent light source 110. For example, after the gas ejection and suction device 20 is controlled to start working, the coherent light source 110 is controlled to emit light; after the coherent light source 110 is controlled to stop emitting light, the gas ejection and suction device 20 is controlled to stop working.

[0144] The air pump 130 may also be connected to the controller 30 , and the controller 30 controls the start and stop of the air pump 130 and the size of the output pressure.

[0145] The terms used in the implementation mode of the present application are only used to explain the embodiments of the present application, and are not intended to limit the present application. Unless otherwise defined, the technical terms or scientific terms used in the implementation mode of the present application should be the common meanings understood by people with ordinary skills in the field to which the present application belongs. The words "first", "second", "third" and similar words used in the patent application specification and claims of the present application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate a quantity limit, but indicate that there is at least one. Words such as "include" or "include" and similar words mean that the elements or objects appearing in front of "include" or "include" include the elements or objects listed after "include" or "include" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0146] The above description is only an embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A decoherence device, characterized in that: comprising a housing (10); The housing (10) has a light inlet (10a) and a light outlet (10b), both for allowing a light beam to pass through; The housing (10) is used to be connected to a gas ejection and suction device (20), and the gas ejection and suction device (20) is used to form a monatomic gas with randomly varying concentration in the housing (10), and the light beam passes through the monatomic gas with randomly varying concentration.

2. The decoherence device according to claim 1, characterized in that: The invention also comprises a gas ejection and suction device (20), wherein the gas ejection and suction device (20) comprises an ejection port (211d) and an air suction port (221a), wherein the ejection port (211d) and the air suction port (221a) are located on the outer shell (10) or in the outer shell (10), wherein the ejection port (211d) is used to eject a monatomic gas with a randomly changing flow rate into the outer shell (10), and the air suction port (221a) is used to absorb the monatomic gas.

3. The decoherence device according to claim 2, characterized in that: The gas ejection and suction device (20) comprises n ejection ports (211d) and n suction ports (221a), wherein n≥1 and is an integer, and the n ejection ports (211d) and the n suction ports (221a) are arranged one by one relative to each other so as to form a monatomic gas flow with a randomly changing flow rate between the n ejection ports (211d) and the n suction ports (221a), and the light beam is suitable for passing through the monatomic gas flow formed between the n ejection ports (211d) and the n suction ports (221a).

4. The decoherence device according to claim 3, characterized in that: n≥2, the n air jets (211d) and the n air inlets (221a) are arranged in pairs, the connecting lines between each pair of air jets (211d) and air inlets (221a) intersect at one point, and the light beam is suitable for passing through the intersection of the connecting lines.

5. The decoherence device according to any one of claims 2 to 4, characterized in that: The gas ejection and suction device (20) comprises a gas ejection device (21) and a gas suction device (22), wherein the gas ejection device (21) has the ejection port (211d), and the gas ejection device (21) is used to eject a monatomic gas with a randomly changing flow rate into the outer shell (10) through the ejection port (211d), and the gas suction device (22) has the suction port (221a), and the gas suction device (22) is used to suck gas from the outer shell (10) through the suction port (221a).

6. The decoherence device according to claim 5, characterized in that: The gas injection device (21) comprises a gas nozzle (211), wherein the gas nozzle (211) is located inside the housing (10), or one end of the gas nozzle is located inside the housing (10) and the other end of the gas nozzle is located outside the housing (10).

7. The decoherence device according to any one of claims 2 to 6, characterized in that: The gas ejection and suction device (20) has an interface for receiving an electrical signal, and the gas ejection and suction device (20) is used to randomly change the flow rate of the monoatomic gas flow under the action of the electrical signal with randomly changing frequency and / or intensity, wherein the intensity includes voltage magnitude or current magnitude.

8. The decoherence device according to claim 6, characterized in that: The gas nozzle (211) comprises a nozzle body (2111), a valve stem (2112) and a reset member (2113); the jet port (211d) is located at one end of the nozzle body (2111); the valve stem (2112) is located in the nozzle body (2111) and one end of the valve stem matches the jet port (211d); the reset member (2113) is located between the valve stem (2112) and the inner wall of the nozzle body (2111); the valve stem (2112) is used to reciprocate relative to the jet port (211d) along the axial direction under the action of the gas pressure in the nozzle body (2111) and the reset member (2113), so as to change the degree of opening of the jet port (211d).

9. The decoherence device according to claim 8, characterized in that: The nozzle body (2111) comprises a high-pressure chamber (211a), a transition chamber (211b), a low-pressure chamber (211c) and a pressure relief hole (211h); the high-pressure chamber (211a) is connected to the jet port (211d); and the pressure relief hole (211h) connects the transition chamber (211b) and the low-pressure chamber (211c); One end of the valve stem (2112) is located in the high-pressure chamber (211a), and the other end is located in the transition chamber (211b); The gas nozzle (211) further comprises a control component (2114) for controlling the opening and closing of the pressure relief hole (211h).

10. The decoherence device according to claim 9, characterized in that: The control member (2114) is located in the low-pressure chamber (211c), and comprises a rod portion (21141) and a controllable telescopic portion (21142); one end of the rod portion (21141) is connected to the controllable telescopic portion (21142), and the other end is matched with the pressure relief hole (211h); the controllable telescopic portion (21142) is used to deform under the action of an electrical signal, thereby driving the rod portion (21141) to move relative to the pressure relief hole (211h), so that the pressure relief hole (211h) is opened or closed.

11. The decoherence device according to claim 10, characterized in that: The controllable telescopic part (21142) is made of composite piezoelectric material or rare earth giant magnetostrictive material.

12. The decoherence device according to any one of claims 9 to 11, characterized in that: The decoherence device further comprises an air inlet pipe (41) and an air intake pipe (42); One end of the air inlet pipe (41) is located outside the housing (10), and the other end is connected to the high-pressure chamber (211a) of the gas nozzle (211); One end of the air intake pipe (42) is located outside the housing (10), and the other end is connected to the low-pressure chamber (211c) of the gas nozzle (211) and the gas nozzle (211), respectively.

13. The decoherence device according to any one of claims 2 to 12, characterized in that: The air inlet (221a) is tapered, and the end with a larger diameter is close to the air outlet (211d).

14. A light source system, characterized in that: It comprises a coherent light source (110) and a decoherence device (140) as claimed in any one of claims 1 to 13; The light beam emitted by the coherent light source (110) is incident on the light inlet (10a) of the housing (10) of the decoherence device (140).

15. The light source system according to claim 14, characterized in that: It also includes an air source (120) and an air pump (130), wherein the air source (120) is connected to an air inlet of the air pump (130), and an air outlet of the air pump (130) is connected to the gas ejection and suction device (20).

16. The light source system according to claim 15, characterized in that: It also includes a filter (150), and the gas ejection and suction device (20) is connected to the air inlet of the air pump (130) through the filter (150).

17. The light source system according to any one of claims 14 to 16, characterized in that: The invention also comprises a differential pump (160), wherein the differential pump (160) is connected between the coherent light source (110) and the light inlet (10a) of the housing (10).

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