Graphite paper seed crystal bonding device and process

Abstract

The invention provides a graphite paper seed crystal bonding device and process, and relates to the technical field of crystal bonding, the graphite paper seed crystal bonding device is used for bonding a seed crystal and graphite paper, the graphite paper seed crystal bonding device comprises a bearing platform, the bearing platform comprises a first limiting assembly used for bearing and limiting the seed crystal, and further comprises a second limiting assembly used for bearing and limiting the graphite paper; the device further comprises a bonding and pressing device, the bonding and pressing device comprises a bonding and pressing platform, a first bonding and pressing roller set and a second bonding and pressing roller set are arranged at the lower end of the bonding and pressing platform, the first bonding and pressing roller set comprises a first pressing roller far away from one side of the bonding and pressing platform, and the second bonding and pressing roller set comprises a second pressing roller far away from one side of the bonding and pressing platform. The second bonding and pressing roller set comprises a second pressing roller far away from one side of the bonding and pressing platform, and the first pressing roller and the second pressing roller are close to each other. According to the method, the influence of bubbles on subsequent growth of silicon carbide is reduced, local firmness damage is reduced, and the stress introduction and cracking risks are reduced.

Description

Technical Field

[0001] The invention relates to the technical field of crystal bonding, and in particular to a graphite paper seed crystal bonding device and process. Background Art

[0002] During the growth process, the silicon carbide crystal is generated by continuous cooling at the lower end of the seed crystal. Before the silicon carbide crystal is prepared, the seed crystal needs to be bonded or overlapped at a predetermined position.

[0003] The mainstream method of fixing silicon carbide seed crystals is currently bonding. By bonding the silicon carbide seed crystals to the surface of a graphite crystal holder or graphite paper, the silicon carbide seed crystals can be effectively fixed under a certain pressure and high temperature.

[0004] During the bonding process, the silicon carbide seed crystal needs to be fixed with the graphite crystal holder or graphite paper at one time. After bonding and fixing, the two should be prevented from moving relative to each other to ensure the relative consistency of the thickness and range of the colloid distribution. However, during the coating process, some bubbles exist inside the colloid. Although there are some technical means in the prior art that can minimize the bubbles in the colloid, the small amount of remaining bubbles will still affect the subsequent growth and fixation of silicon carbide, especially for large-sized silicon carbide seed crystals exceeding 6 inches in size, the local firmness is impaired, and the risk of stress introduction and cracking is increased. Summary of the invention

[0005] In view of the above problems, the present invention provides a graphite paper seed crystal bonding device and process, which reduces the impact of bubbles on the subsequent growth of silicon carbide, while reducing local firmness damage and the risk of stress introduction and cracking.

[0006] To solve the above problems, the technical solution adopted by the present invention is: A graphite paper seed crystal bonding device, used for bonding a seed crystal to graphite paper, comprises a bearing platform, the bearing platform comprises a first limit assembly for limiting the bearing position of the seed crystal, and also comprises a second limit assembly for limiting the bearing position of the graphite paper; also comprises a bonding and pressing device, the bonding and pressing device comprises a bonding and pressing platform, a first bonding and pressing roller group and a second bonding and pressing roller group are arranged at the lower end of the bonding and pressing platform, the first bonding and pressing roller group comprises a first pressing roller away from a side of the bonding and pressing platform, the second bonding and pressing roller group comprises a second pressing roller away from a side of the bonding and pressing platform, the first pressing roller and the second pressing roller are close to each other; wherein, in the process of controlling the bonding of the seed crystal to the graphite paper, the first pressing roller and the second pressing roller are first controlled to be opposite to the axis of the seed crystal, and then the bonding and pressing platform is controlled to descend; in the process of descending the bonding and pressing platform, the first pressing roller and the second pressing roller move from the middle position toward both sides to complete the bonding of the graphite paper to the seed crystal.

[0007] Preferably, the axis of the first lamination roller and the axis of the second lamination roller are parallel to each other, a first connecting frame is provided between the first lamination roller and the bonding and lamination platform, and a second connecting frame is provided between the second lamination roller and the bonding and lamination platform.

[0008] Preferably, the first lamination roller and the second lamination roller are located in the same horizontal plane, and the first connecting frame and the second connecting frame are arranged crosswise with each other.

[0009] Preferably, the first lamination roller and the second lamination roller are located in the same inclined plane, the first lamination roller is located above the second lamination roller, the horizontal projection plane of the first lamination roller is located to the right of the horizontal projection plane of the second lamination roller, and the first lamination roller moves toward the left direction.

[0010] Preferably, the second limiting assembly includes limiting protrusions located on both sides of the seed crystal, the graphite paper includes an adhesive body, and limiting bodies matching the limiting protrusions are fixed on both sides of the adhesive body. After the adhesive body is limited, the cross-section is an arc with a downward convex middle.

[0011] Preferably, the limiting body is located in the horizontal projection plane of the bonding and pressing platform, and a locking structure is provided at the lower end of the limiting body. The locking structure has a locking state and a dislocated state. When the force applied to the limiting body exceeds a set threshold, the locking structure changes from the locking state to the dislocated state.

[0012] Preferably, a receiving opening is provided on the surface of the carrying platform, the first limiting assembly comprises a limiting platform located in the receiving opening for carrying the seed crystal, and an adjusting assembly for adjusting the height of the limiting platform is provided at the lower end of the limiting platform.

[0013] A graphite paper seed crystal bonding process uses the above-mentioned graphite paper seed crystal bonding device, including the following steps: S1, placing the seed crystal on the upper end of a first limiting component for load-bearing and limiting, placing the graphite paper on the upper end of a second limiting component for load-bearing and limiting, and placing the graphite paper at a predetermined position above the seed crystal; S2, moving the bonding and pressing device above the graphite paper, and controlling the first pressing roller and the second pressing roller to be relative to the axis of the seed crystal; S3, controlling the bonding and pressing platform to descend; during the descent of the bonding and pressing platform, the first pressing roller and the second pressing roller are first pressed against the upper surface of the graphite paper, and then the first pressing roller and the second pressing roller move from the middle position toward both sides to complete the bonding of the graphite paper and the seed crystal.

[0014] Preferably, during step S1, the seed crystal is first placed in a coating machine for coating to ensure that the colloid thickness on the surface of the seed crystal reaches a set thickness range. After coating, a strip of compensating colloid is applied along the diameter direction of the seed crystal. After placing the seed crystal, the deflection angle of the seed crystal is adjusted to ensure that the compensating colloid and the axis of the pressing roller are in a straight line.

[0015] Preferably, step S3 is performed in a vacuum environment with a vacuum degree less than 1 Pa.

[0016] The beneficial effects of the present invention are: Compared with the prior art, the present invention can allow the middle position of the graphite paper to be bonded and fixed to the surface of the seed crystal first, and in the process of the first pressing roller and the second pressing roller moving in both directions, the graphite paper and the seed crystal are completely fixed. In the bonding process, the bubbles in the colloid can be moved in both directions and discharged under the action of extrusion, and the bubbles in the colloid can be discharged to the greatest extent, avoiding the bubbles from remaining in the position between the seed crystal and the graphite paper, reducing the influence of the bubbles on the subsequent growth of silicon carbide, and at the same time reducing the damage to local firmness, and reducing the risk of stress introduction and cracking. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0018] Figure 2 For the present invention Figure 1 Schematic diagram of the main structure.

[0019] Figure 3 For the present invention Figure 1 Schematic diagram of the side structure.

[0020] Figure 4 For the present invention Figure 3 AA section structure schematic diagram.

[0021] Figure 5 It is a schematic diagram of Embodiment 2 of the arrangement positions of the first lamination roller and the second lamination roller of the present invention.

[0022] Figure 6 For the present invention Figure 4 Schematic diagram of the enlarged structure at B.

[0023] Figure 7 For the present invention Figure 5 Enlarged structural diagram at C.

[0024] Figure 8 It is a schematic diagram of the bonding process of the seed crystal and graphite paper of the present invention.

[0025] In the figure: 100, bearing platform; 1001, accommodating opening; 110, first limiting assembly; 111, guide column; 112, limiting platform; 113, adjusting assembly; 1131, torque transmission part; 1132, threaded part; 114, fixing plate; 120, second limiting assembly; 130, supporting foot; 200, graphite paper; 210, bonding body; 220, limiting body; 300, bonding and pressing device; 310, first bonding and pressing roller group; 311, first connecting frame; 312, first pressing roller; 320, second bonding and pressing roller group; 321, second connecting frame; 322, second pressing roller; 330, bonding and pressing platform; 400, seed crystal; 410, glue coating gap. DETAILED DESCRIPTION

[0026] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0027] In order to solve the problems existing in the background technology; Figure 1 -Attached Figure 8 A graphite paper seed crystal bonding device is used to bond a seed crystal 400 to a graphite paper 200, comprising a carrying platform 100 and a bonding and pressing device 300; the seed crystal 400 and the graphite paper 200 are limited and fixed by the carrying platform 100, and a force is applied to the graphite paper 200 from the outside by the bonding and pressing device 300 to achieve bonding and fixing of the seed crystal 400 and the graphite paper 200.

[0028] Specifically, the supporting platform 100 includes a first limiting component 110 for limiting the bearing position of the seed crystal 400, and also includes a second limiting component 120 for limiting the bearing position of the graphite paper 200; the seed crystal 400 is located at the upper end of the first limiting component 110 and is in a relatively horizontal state. When the graphite paper 200 is limited by the second limiting component 120, its vertical cross-section can be a straight line or an arc. The middle part of the arc-shaped graphite paper 200 is concave downward. The above shape depends on the thickness of the graphite paper 200 and its length span.

[0029] Specifically, the bonding and pressing device 300 includes a bonding and pressing platform 330, and a first bonding and pressing roller group 310 and a second bonding and pressing roller group 320 are arranged at the lower end of the bonding and pressing platform 330. The first bonding and pressing roller group 310 includes a first pressing roller 312 away from the side of the bonding and pressing platform 330, and the second bonding and pressing roller group 320 includes a second pressing roller 322 away from the side of the bonding and pressing platform 330. The first pressing roller 312 and the second pressing roller 322 are close to each other.

[0030] The first pressing roller 312 and the second pressing roller 322 are in contact with the surface of the graphite paper 200. In the process of controlling the bonding and pressing device 300 to descend, the first pressing roller 312 and the second pressing roller 322 first contact with the upper end of the graphite paper 200, which can push the graphite paper 200 to move toward the direction of the seed crystal 400 below, and achieve the bonding and fixing of the seed crystal 400 and the graphite paper 200 under the action of pressure.

[0031] The first pressing roller 312 and the second pressing roller 322 here have rolling friction with the surface of the graphite paper 200. The surfaces of the first pressing roller 312 and the second pressing roller 322 should be designed to be smooth enough to reduce the horizontal force on the surface of the graphite paper 200. Similarly, a layer of relatively smooth paper can be placed on the upper end of the graphite paper 200 to further reduce the horizontal friction of the first pressing roller 312 and the second pressing roller 322 on the surface of the graphite paper 200. The paper sheet here can be taken out later to ensure the stability of the bonding and fixation of the back side of the graphite paper 200. It should be noted that the surface of the graphite paper 200 bonded to the seed crystal 400 is defined as the front side.

[0032] In the process of controlling the bonding between the seed crystal 400 and the graphite paper 200, the first pressing roller 312 and the second pressing roller 322 are first controlled to be relative to the axis of the seed crystal 400, that is, the first pressing roller 312 and the second pressing roller 322 are controlled to be located at a relatively central position, and then the bonding pressing platform 330 is controlled to descend. By controlling the bonding pressing platform 330 to descend, the first pressing roller 312 and the second pressing roller 322 are controlled to be pressed against the surface of the graphite paper 200.

[0033] During the descent of the bonding and pressing platform 330, the first pressing roller 312 and the second pressing roller 322 move from the middle position toward the two sides to complete the bonding of the graphite paper 200 and the seed crystal 400; the first bonding and pressing roller group 310 and the second bonding and pressing roller group 320 are arranged to be tilted in a predetermined direction. During the gradual descent of the first pressing roller 312 and the second pressing roller 322, opposite forces are applied to the first bonding and pressing roller group 310 and the second bonding and pressing roller group 320, so as to control the first bonding and pressing roller group 310 and the second bonding and pressing roller group 320 to tilt in a predetermined direction. During this process, the first pressing roller 312 and the second pressing roller 322 can move from the middle position toward the two sides, and can contact various positions on the surface of the graphite paper 200, so as to achieve full pressing of the graphite paper 200 and the seed crystal 400, and achieve bonding and fixing of the graphite paper 200 and the seed crystal 400.

[0034] It should be noted here that, under the limitation of the second limiting assembly 120, the graphite paper 200 and the seed crystal 400 are in a non-contact state, and the two sides of the graphite paper 200 are in a limited state. During the downward pressing of the first pressing roller 312 and the second pressing roller 322, the middle part of the graphite paper 200 moves downward, and the two sides of the graphite paper 200 are in an initial state. At this time, the overall vertical cross-section of the graphite paper 200 is a downward convex arc.

[0035] Compared with the existing overall parallel direct bonding and fixing, by adopting the above-mentioned limiting method, the middle position of the graphite paper 200 can be first bonded and fixed to the surface of the seed crystal 400, and the graphite paper 200 and the seed crystal 400 can be completely fixed in the process of the first pressing roller 312 and the second pressing roller 322 moving in the two sides. In the bonding process, the bubbles in the colloid can be moved and discharged in the two sides under the action of extrusion, and the bubbles in the colloid can be discharged to the greatest extent, avoiding the bubbles from remaining in the position between the seed crystal 400 and the graphite paper 200, thereby reducing the impact on the subsequent growth of silicon carbide, and at the same time reducing the damage to local firmness, and reducing the risk of stress introduction and cracking.

[0036] During the bonding process, the graphite paper 200 and the seed crystal 400 can be controlled to be in a vacuum environment to accelerate the discharge of bubbles in the colloid. At the same time, the discharge of bubbles can be accelerated by increasing vibration.

[0037] Specifically, the axis of the first pressing roller 312 and the axis of the second pressing roller 322 are parallel to each other. The first pressing roller 312 and the second pressing roller 322 are designed to be parallel to each other, which can ensure that the forces on both sides of the upper end of the graphite paper 200 are relatively consistent, and ensure the stability of the overall bonding between the graphite paper 200 and the seed crystal 400.

[0038] A first connecting frame 311 is arranged between the first lamination roller 312 and the bonding lamination platform 330, and a second connecting frame 321 is arranged between the second lamination roller 322 and the bonding lamination platform 330; the width dimension of the first connecting frame 311 here is smaller than the width dimension of the second connecting frame 321, and through the above-mentioned structural design, in the process that the first lamination roller 312 and the second lamination roller 322 move toward both sides, the first connecting frame 311 and the second connecting frame 321 can cross each other without interfering with each other; the width dimensions of the above-mentioned first connecting frame 311 and the second connecting frame 321 can be adjusted to each other, one large and one small; the width direction of the second connecting frame 321 and the first connecting frame 311 is the length direction of the second lamination roller 322 and the first lamination roller 312.

[0039] As Example 1 of the arrangement position of the first lamination roller 312 and the second lamination roller 322, the first lamination roller 312 and the second lamination roller 322 are located in the same horizontal plane, and the first connecting frame 311 and the second connecting frame 321 are arranged crosswise with each other; the bottoms of the first lamination roller 312 and the second lamination roller 322 are in a state of being pressed against each other, and at the same time, the first connecting frame 311 and the second connecting frame 321 are arranged in opposite directions of movement of the first lamination roller 312 and the second lamination roller 322, and during the process of the first lamination roller 312 and the second lamination roller 322 moving downward and pressing against each other, the second connecting frame 321 and the first connecting frame 311 are gradually deflected until they are horizontal.

[0040] Through the above structural arrangement, the first pressing roller 312 and the second pressing roller 322 are located in a symmetrical state with each other. The first pressing roller 312 and the second pressing roller 322 are in contact with the surface of the graphite paper 200 at the same time. The force conditions on both sides of the graphite paper 200 are the same, so that the graphite paper 200 and the seed crystal 400 can be quickly and stably limited and fixed.

[0041] As an embodiment 2 of the arrangement position of the first pressing roller 312 and the second pressing roller 322, the first pressing roller 312 and the second pressing roller 322 are located in the same inclined plane, the first pressing roller 312 is located above the second pressing roller 322, the horizontal projection plane of the first pressing roller 312 is located on the right side of the horizontal projection plane of the second pressing roller 322, and the first pressing roller 312 moves toward the left direction; you can choose to refer to the attached Figure 7 You can also choose to arrange it in a style Figure 7 Mirrored style layout.

[0042] During the descent of the first lamination roller 312 and the second lamination roller 322, the second lamination roller 322 first contacts the surface of the graphite paper 200, and the second lamination roller 322 drives the second connecting frame 321 to move toward the right direction first, so as to achieve bonding and fixation of the right area of ​​the graphite paper 200, and the second connecting frame 321 is deflected as a whole and gradually becomes horizontal; after the second lamination roller 322 moves horizontally for a certain distance, the first lamination roller 312 contacts the surface of the graphite paper 200, and the first lamination roller 312 applies force to the surface of the graphite paper 200, so as to achieve bonding and fixation of the left area of ​​the graphite paper 200.

[0043] Furthermore, by setting the horizontal projection plane of the first pressing roller 312 to be located on the right side of the horizontal projection plane of the second pressing roller 322, the first pressing roller 312 moves toward the left direction, and the position where the first pressing roller 312 first contacts is located at the area where the graphite paper 200 has been bonded and fixed. Compared with the parallel scheme in Example 1, the blank area between the first pressing roller 312 and the second pressing roller 322 in Example 1 that cannot be pressed tightly can be bonded and exhausted, thereby achieving full-size bonding and fixing of the graphite paper 200 and the seed crystal 400, and the bonding and exhaust effect is better.

[0044] For the solution of Example 1, the size of the first pressing roller 312 and the second pressing roller 322 can be designed to be small enough. In theory, the blank area between the first pressing roller 312 and the second pressing roller 322 will gradually decrease, and will not affect the normal bonding of the graphite paper 200 and the seed crystal 400; for the solution of Example 2, the size of the pressing roller can be designed to be larger, so that there can be rolling friction between the graphite paper 200 and the horizontal friction effect can be reduced.

[0045] It should also be noted that the first connecting frame 311 and the second connecting frame 321 mentioned above can be provided with a rotational elastic joint and a linear elastic joint on the side close to the bonding and pressing platform 330 to ensure that the second connecting frame 321 and the first connecting frame 311 are in a posture inclined in a predetermined direction; at the same time, for the second connecting frame 321 and the first connecting frame 311 that are too long, the excess parts of the second connecting frame 321 and the first connecting frame 311 can be accommodated by providing a linear elastic joint, and at the same time, it will not affect the initial tight bonding of the graphite paper 200 and the seed crystal 400.

[0046] Please refer to the attached Figure 4 The second limiting component 120 includes limiting protrusions located on both sides of the seed crystal 400, and the graphite paper 200 includes an adhesive body 210. Limiting bodies 220 that are compatible with the limiting protrusions are fixed on both sides of the adhesive body 210. After the adhesive body 210 is limited, the cross-section is an arc-shaped with a downward convex middle. A circular opening can be opened at the lower end of the limiting body 220, and the circular opening can be compatible with the limiting protrusion to achieve the locking and positioning of the two.

[0047] The graphite paper 200 is modified by the above structure. By installing the limiting body 220 on both sides of the adhesive body 210, the adhesive body 210 can be limited and fixed, ensuring that the adhesive body 210 is in a relatively stable state at a predetermined position above the seed crystal 400, which is convenient for the subsequent bonding and fixing between the graphite paper 200 and the seed crystal 400.

[0048] The bonding body 210 and the limiting body 220 can be fixed by the existing clamping device to ensure the fixation of the overall structure. At the same time, the bonding body 210 and the limiting body 220 can be disassembled to facilitate the reuse of the limiting body 220.

[0049] Specifically; the limiting body 220 is located in the horizontal projection plane of the bonding and pressing platform 330, and a locking structure is provided at the lower end of the limiting body 220. The locking structure has a locking state and a dislocation state. When the force applied to the limiting body 220 exceeds the set threshold, the locking structure changes from the locking state to the dislocation state.

[0050] When the locking structure is in the locked state, the second limiting component 120 can be in a raised state under the support of the locking structure, and can support the limiting body 220 as a whole, so that the graphite paper 200 can be staggered a certain distance from the seed crystal 400, which is convenient for subsequent bonding and fixing.

[0051] When the locking structure is in a dislocated state, the locking structure moves downward, and the second limiting assembly 120 moves downward synchronously, allowing the graphite paper 200 and the seed crystal 400 to fit each other, avoiding the two sides being too high to affect the bonding and fixing in the middle of the graphite paper 200.

[0052] It should be noted here that in the process of bonding and pressing the platform 330 and the limiting body 220 being pressed against each other, when the limiting body 220 is subjected to a force exceeding a threshold value, the locking structure changes from a locked state to a dislocated state; the above-mentioned locking structure can select a disposable locking protrusion, which is destroyed and deformed under the action of external force, or a locking structure with a certain elasticity can be selected to achieve repeated use.

[0053] A groove may be installed on the surface of the supporting platform 100 for accommodating the locking structure. The groove may be a vertically through groove. The elastic locking structure may be installed on the inner wall of the groove to limit the overall structure.

[0054] An accommodating opening 1001 is formed on the surface of the carrying platform 100 . The first limiting assembly 110 includes a limiting platform 112 located in the accommodating opening 1001 for carrying the seed crystal 400 . An adjusting assembly 113 for adjusting the height of the limiting platform 112 is disposed at the lower end of the limiting platform 112 .

[0055] The limiting platform 112 can be adjusted to a suitable height position through the adjustment component 113, so that the supporting seed crystal 400 is located below the plane of the supporting platform 100, and a glue coating gap 410 is controlled to be left between the upper end surface of the supporting seed crystal 400 and the upper end surface of the supporting platform 100, so that the colloid is filled through the glue coating gap 410; at the same time, it also avoids excessive pressure between the first pressing roller 312, the second pressing roller 322 and the supporting seed crystal 400, which would squeeze the colloid in the middle to the outside excessively, thereby ensuring the relatively uniform distribution of the colloid between the supporting seed crystal 400 and the graphite paper 200.

[0056] The above-mentioned adjustment component 113 may include a torque transmission part 1131 and a threaded part 1132, and the first limit component 110 also includes a fixed plate 114 and a guide column 111; during the rotation of the adjustment component 113, the threaded part 1132 can move relative to the threaded fixed plate 114, pushing the upper limit platform 112 to move up and down, thereby realizing the adjustment of the height position of the supporting seed crystal 400.

[0057] The aforementioned adjustment component 113 may also be selected as a hydraulic lifting adjustment structure, which can achieve precise adjustment of the height of the limiting platform 112 .

[0058] The present invention is further described below in conjunction with the seed crystal bonding process.

[0059] A graphite paper seed crystal bonding process, using the above-mentioned graphite paper seed crystal bonding device, comprises the following steps: S1. Place the seed crystal 400 on the upper end of the first limiting assembly 110 for load-bearing and limiting, place the graphite paper 200 on the upper end of the second limiting assembly 120 for load-bearing and limiting, and place the graphite paper 200 at a predetermined position above the seed crystal 400; the size of the graphite paper 200 is larger than the size of the seed crystal 400, and the horizontal projection area of ​​the graphite paper 200 should completely cover the seed crystal 400.

[0060] S2. Move the bonding and pressing device 300 above the graphite paper 200, and control the first pressing roller 312 and the second pressing roller 322 to be opposite to the axis of the seed crystal 400; that is, control the first pressing roller 312 and the second pressing roller 322 to be located at the center of the seed crystal 400, and subsequently control the first pressing roller 312 and the second pressing roller 322 to move from the center position toward both sides to ensure that the first pressing roller 312 and the second pressing roller 322 are in a relatively symmetrical state during the movement process, thereby ensuring the quality of the bonding between the graphite paper 200 and the seed crystal 400; the length of the first pressing roller 312 and the second pressing roller 322 here should be greater than the diameter of the seed crystal 400 to achieve complete extrusion bonding of the seed crystal 400.

[0061] S3, controlling the bonding and pressing platform 330 to descend; during the descent of the bonding and pressing platform 330, the first pressing roller 312 and the second pressing roller 322 first press against the upper surface of the graphite paper 200, and then the first pressing roller 312 and the second pressing roller 322 move from the middle position toward both sides to complete the bonding of the graphite paper 200 and the seed crystal 400. This step is performed in a vacuum environment with a vacuum degree of less than 1Pa; performing the bonding process in a vacuum environment can further accelerate the discharge of bubbles in the colloid, further reduce the bubble content, and ensure the quality of silicon carbide crystal growth.

[0062] Attached Figure 8 From top to bottom, there are the docking stage, bonding stage and pressing stage; the bonding of silicon carbide seed crystals is as follows: Figure 8 The order is from top to bottom.

[0063] During step S1, the seed crystal 400 is first placed in a glue leveling machine for glue leveling to ensure that the colloid thickness on the surface of the seed crystal 400 reaches a set thickness range. After the glue leveling is completed, a strip of compensating colloid is filled along the diameter direction of the seed crystal 400. After the seed crystal 400 is placed, the deflection angle of the seed crystal 400 is adjusted to ensure that the compensating colloid and the axis of the pressing roller are in a straight line. Through the above arrangement, the first pressing roller 312 and the second pressing roller 322 can push the middle compensating colloid in both directions, and can compensate for the gap after some bubbles are discharged, further ensuring the uniformity of the colloid between the seed crystal 400 and the graphite paper 200, thereby improving the bonding quality of the silicon carbide seed crystal.

[0064] It should be noted that the first pressing roller 312 and the second pressing roller 322 here need to be parallel to the length direction of the compensating colloid to ensure the extrusion and pushing of the compensating colloid.

[0065] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A graphite paper seed crystal bonding device, used for bonding a seed crystal (400) to a graphite paper (200), characterized in that: include: A bearing platform (100), the bearing platform (100) comprising a first position limiting component (110) for bearing and limiting the seed crystal (400), and further comprising a second position limiting component (120) for bearing and limiting the graphite paper (200); A bonding and pressing device (300), the bonding and pressing device (300) comprising a bonding and pressing platform (330), a first bonding and pressing roller group (310) and a second bonding and pressing roller group (320) being arranged at the lower end of the bonding and pressing platform (330), the first bonding and pressing roller group (310) comprising a first pressing roller (312) on a side away from the bonding and pressing platform (330), the second bonding and pressing roller group (320) comprising a second pressing roller (322) on a side away from the bonding and pressing platform (330), the first pressing roller (312) and the second pressing roller (322) being close to each other; In the process of controlling the bonding between the seed crystal (400) and the graphite paper (200), the first pressing roller (312) and the second pressing roller (322) are first controlled to be relative to the axis of the seed crystal (400), and then the bonding pressing platform (330) is controlled to descend; during the process of the bonding pressing platform (330) descending, the first pressing roller (312) and the second pressing roller (322) move from the middle position toward the two sides to complete the bonding of the graphite paper (200) and the seed crystal (400).

2. The graphite paper seed crystal bonding device according to claim 1, characterized in that: The axis of the first lamination roller (312) and the axis of the second lamination roller (322) are parallel to each other; a first connecting frame (311) is provided between the first lamination roller (312) and the bonding and lamination platform (330); and a second connecting frame (321) is provided between the second lamination roller (322) and the bonding and lamination platform (330).

3. The graphite paper seed crystal bonding device according to claim 2, characterized in that: The first lamination roller (312) and the second lamination roller (322) are located in the same horizontal plane, and the first connecting frame (311) and the second connecting frame (321) are arranged crosswise with each other.

4. The graphite paper seed crystal bonding device according to claim 1, characterized in that: The first lamination roller (312) and the second lamination roller (322) are located in the same inclined plane, the first lamination roller (312) is located above the second lamination roller (322), the horizontal projection plane of the first lamination roller (312) is located on the right side of the horizontal projection plane of the second lamination roller (322), and the first lamination roller (312) moves towards the left direction.

5. The graphite paper seed crystal bonding device according to claim 1, characterized in that: The second limiting assembly (120) comprises limiting protrusions located on both sides of the seed crystal (400), the graphite paper (200) comprises an adhesive body (210), limiting bodies (220) adapted to the limiting protrusions are fixed on both sides of the adhesive body (210), and the cross-section of the adhesive body (210) after limiting is an arc shape with a downward convexity in the middle.

6. The graphite paper seed crystal bonding device according to claim 5, characterized in that: The limiting body (220) is located in the horizontal projection plane of the bonding and pressing platform (330), and a locking structure is provided at the lower end of the limiting body (220), wherein the locking structure has a locking state and a dislocation state, and when the force applied to the limiting body (220) exceeds a set threshold value, the locking structure changes from the locking state to the dislocation state.

7. The graphite paper seed crystal bonding device according to claim 1, characterized in that: The surface of the carrying platform (100) is provided with a receiving opening (1001), the first limiting component (110) comprises a limiting platform (112) located in the receiving opening (1001) for supporting the seed crystal (400), and an adjusting component (113) for adjusting the height of the limiting platform (112) is arranged at the lower end of the limiting platform (112).

8. A graphite paper seed crystal bonding process, characterized in that: The graphite paper seed crystal bonding device according to any one of claims 1 to 7 comprises the following steps: S1, placing the seed crystal (400) on the upper end of the first limiting assembly (110) for load-bearing and position-limiting, placing the graphite paper (200) on the upper end of the second limiting assembly (120) for load-bearing and position-limiting, and placing the graphite paper (200) at a predetermined position above the seed crystal (400); S2, moving the bonding and pressing device (300) above the graphite paper (200), and controlling the first pressing roller (312) and the second pressing roller (322) to be opposite to the axis of the seed crystal (400); S3, controlling the bonding and pressing platform (330) to descend; during the process of the bonding and pressing platform (330) descending, the first pressing roller (312) and the second pressing roller (322) first press against the upper surface of the graphite paper (200), and then the first pressing roller (312) and the second pressing roller (322) move from the middle position toward the two sides to complete the bonding of the graphite paper (200) and the seed crystal (400).

9. The graphite paper seed crystal bonding process according to claim 8, characterized in that: During step S1, the seed crystal (400) is first placed in a glue leveling machine for glue leveling to ensure that the glue thickness on the surface of the seed crystal (400) reaches a set thickness range. After the glue leveling is completed, a strip of compensating glue is applied along the diameter direction of the seed crystal (400). After the seed crystal (400) is placed, the deflection angle of the seed crystal (400) is adjusted to ensure that the compensating glue and the axis of the laminating roller are in a straight line.

10. The graphite paper seed crystal bonding process according to claim 8, characterized in that: Step S3 is performed in a vacuum environment, and the vacuum degree is less than 1Pa.

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