Gas supply cabinet and automatic control system of gas supply cabinet

Abstract

The invention relates to the technical field of gas supply cabinets, in particular to a gas supply cabinet and an automatic control system of the gas supply cabinet, which comprises a sampling cabin and a detection cabin arranged in a cabinet body, a gas circulation cabinet arranged on the side wall of the cabinet body and connected with the inside of the cabinet body and the outside, so that gas in the cabinet body is circulated to the outside; by arranging the sampling cabin and the detection cabin in the cabinet body, sampling treatment and detection treatment are conducted on gas respectively, the gas circulation cabinet is arranged on the side wall of the cabinet body, and the interior and the exterior of the cabinet body are connected through the gas circulation cabinet, so that the gas in the cabinet body is circulated out of the exterior, and the air permeability in the cabinet body is guaranteed; the gas filtering assembly is used for filtering the sampled gas, so that solid particle impurities are prevented from entering the detection equipment, and irreparable damage to the detection equipment is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of gas supply cabinets, in particular to a gas supply cabinet and a gas supply cabinet automatic control system. Background Art

[0002] In the semiconductor manufacturing process, the use of gas supply cabinets is relatively widespread. The gas supply cabinet includes a cabinet body and gas cylinders that can be detachably installed inside the cabinet body, and the gas cylinders are placed in a vertical extension. When in use, the cabinet body can protect the gas cylinders and increase the safety of use. During the use of the gas cylinders, in order to ensure the stability of the gas supply, the traditional single gas cylinder gas supply method is obviously unable to meet the gas demand. This requires the provision of multiple gas cylinders for gas supply, and when multiple gas cylinders are supplied, the gas supply priority order needs to be sorted out. While ensuring the stability of the gas supply, the use of gas cannot be wasted. When the gas cylinders are working, due to the particularity of their use environment, the safety of the gas in the workspace is uncertain. It is necessary to be able to detect the gas content in the working environment in a timely manner and to detect changes in the gas composition in a timely manner. Therefore, a gas supply cabinet and a gas supply cabinet automatic control system are needed. Summary of the Invention

[0003] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a gas supply cabinet and a gas supply cabinet automatic control system for solving the problem of monitoring the gas composition in the use environment of gas cylinders in the prior art.

[0004] To achieve the above-mentioned and other related purposes, the present invention provides the following technical solutions:

[0005] A gas supply cabinet, comprising:

[0006] A cabinet body, wherein a sampling cabin and a detection cabin are arranged in the cabinet body, and a gas circulation cabinet is arranged on the side wall of the cabinet body, wherein the gas circulation cabinet connects the interior of the cabinet body with the outside world so that the gas inside the cabinet body circulates out to the outside world;

[0007] A gas sampling valve is provided in the sampling cabin, and a gas filter component is provided in the sampling valve;

[0008] A detection box is provided in the detection cabin, a receiving cavity for receiving the gas cylinder is provided on the lower side of the detection box, and the gas circulation cabinet is connected to the receiving cavity and the detection box respectively;

[0009] The cabinet is also provided with an alarm.

[0010] To implement the above technical solution, a sampling cabin and a detection cabin are set up in the cabinet to sample and detect the gas respectively, and a gas circulation cabinet is set up on the side wall of the cabinet. The gas circulation cabinet is used to connect the inside of the cabinet with the outside world, so that the gas inside the cabinet can circulate to the outside world, thereby ensuring the air permeability of the cabinet.

[0011] By setting a gas filter component in the sampling valve, the sampled gas is filtered by the gas filter component to prevent solid particle impurities from entering the detection equipment and causing irreparable damage to the detection equipment. A accommodating cavity for accommodating gas cylinders is set on the lower side of the detection box to provide sufficient support space for the use of gas cylinders and ensure the stability of gas use. An alarm is also set on the cabinet, which can send out an alarm signal in time to remind surrounding staff when safety hazards are detected in the surrounding gas.

[0012] In one embodiment of the present invention, the gas filter assembly includes a filter base, a plurality of gas filter elements are arranged on the filter base, an air inlet is arranged at the bottom of the gas sampling valve, an air outlet pipe is arranged on the filter base, the air outlet pipe is connected to the detection box, and the gas sampling valve is located near the middle of the sampling cabin.

[0013] To implement the above technical solution, multiple groups of gas filter elements are set on the filter base, and the gas is filtered using the multiple groups of gas filter elements to ensure that no solid particle impurities will remain when the gas enters the detection equipment after collection, thereby improving the safety of the detection equipment. An outlet pipe is set on the filter base to connect to the detection box, and the filtered gas directly enters the detection box, reducing the loss of air flow during transmission and ensuring that the gas can maintain a sufficient flow rate when it is transported to the detection box to match the preset flow rate value in the detection box.

[0014] In one embodiment of the present invention, a detection substrate is provided in the detection box, a plurality of sampling air pipes are provided on the back of the detection substrate, an air pipe joint is provided on the detection substrate, the plurality of sampling air pipes are connected to the rear side of the air pipe joint, a gas valve seat is also provided on the detection substrate, the gas valve seat is connected to the sampling air pipe, a gas filter seat is also provided between the gas valve seat and the plurality of sampling tubes on the detection substrate, the plurality of sampling tubes are all connected to the input end of the gas filter seat, a detector is provided on the front side of the detection substrate, and the output end of the gas filter seat is connected to the detector.

[0015] To implement the above technical solution, by setting up multiple groups of sampling air pipes, they can be connected to each gas filter element through the air pipes to ensure the accuracy of gas sampling. When one of the gas filters is blocked, the remaining air pipes can still complete the ventilation operation to ensure that sufficient gas can flow into the detection box and the accuracy of the detection data is guaranteed. The gas valve seat can adjust the gas flow rate according to the gas flow. When a gas filter element is blocked, the gas flow rate is reduced, and the gas valve seat increases the flow rate to make up for the problem of insufficient gas flow. Multiple groups of sampling tubes are connected to the input end of the gas filter seat, and the gas filter seat is used to integrate the gas delivered by the multiple groups of sampling tubes so that the gas can be a single airflow from the output end of the gas filter seat. A detector is set on the front side of the detection substrate, and the detector is used to detect the gas flow rate and gas content, including the detection of the gas flow rate and gas composition.

[0016] In one embodiment of the present invention, a group of spare detection boxes are also provided in the detection box body, a gas-driven pump is provided in the spare detection box, an auxiliary air inlet is provided on the spare detection box, the auxiliary air inlet buckle is connected to the sampling tube, and an auxiliary detector is also provided in the spare detection box, and the air inlet end of the auxiliary detector is connected to the air outlet end of the auxiliary air inlet.

[0017] To implement the above technical solution, a spare detection box is set up and a group of gas outlet ends of the sampling tube are connected to the spare detection box. When the detector can work normally, the auxiliary air inlet of the spare detection box is in a closed state, and the gas flows through the sampling tube connected to the detector end. When a problem occurs at the detector end, the auxiliary detector starts to work, and the gas that should have entered the detector enters the auxiliary detector for gas detection.

[0018] In one embodiment of the present invention, a display screen is provided on the upper side of the detection chamber, the display screen is electrically connected to a detection substrate, and the detection substrate is electrically connected to the detector and the auxiliary detector.

[0019] To implement the above technical solution, a display screen is set on the upper side of the detection cabin, and the display screen and the detection substrate are electrically connected to the detector and the auxiliary detector, so that the gas detection situation is displayed on the actual screen, which is convenient for manual review of the detection situation.

[0020] In one embodiment of the present invention, the gas circulation cabinet is provided with two sets of ventilation fans, and the two sets of ventilation fans are respectively connected to the accommodating cavity, the detection box and the outside.

[0021] To implement the above technical solution, two sets of ventilation fans are set up to connect the accommodating cavity and the detection box to the outside world respectively, so as to ensure the gas fluidity in the accommodating cavity and the detection box, and avoid the inability to discharge the cabinet in time after gas leakage occurs inside the cabinet, thereby affecting the working environment inside the cabinet, and preventing the internal pressure from being unbalanced when the cabinet is closed for a long time.

[0022] A gas supply cabinet automatic control system using the gas supply cabinet, comprising a gas detection module, a data processing module and an alarm module;

[0023] The gas detection module includes detecting the remaining gas in the gas cylinder in the receiving chamber, obtaining the pressure value of the gas in the gas cylinder detected by the pressure sensor set in the gas cylinder, and also includes detecting the composition and flow rate of the gas at the detector to determine the gas safety and gas fluidity in the target environment;

[0024] The data processing module compares the gas detection data of the gas in the gas cylinder and the gas composition and flow velocity of the external gas collected by the gas detection module with a preset threshold value;

[0025] The alarm module includes a data processing result signal receiving module, and sends the alarm signal to the alarm device provided on the cabinet and the user end.

[0026] To implement the above technical solution, a gas detection module is set up to detect the remaining gas in the gas cylinder in the accommodating cavity, and the pressure value of the gas in the gas cylinder detected by the pressure sensor set in the gas cylinder is obtained. According to the pressure value of the gas in the gas cylinder, the remaining gas in the gas cylinder is determined, and then according to the residual gas capacity in the gas cylinder, it is determined whether it is necessary to start the spare gas cylinder for replenishing the gas supply. The gas detection module also needs to detect the composition and flow rate of the gas at the detector, and determine the gas safety in the target environment based on the gas composition detected by the detector. According to the flow rate feedback result, it is determined whether the gas flow rate at the gas sampling valve end and the gas cylinder end is normal. When an abnormality occurs, it is promptly checked for abnormalities to improve the stability of equipment operation.

[0027] The data processing module collects the gas in the gas cylinder and the gas composition and flow rate of the external gas, and compares the obtained gas detection data with the preset threshold value to determine whether the gas flow rate in the gas cylinder is normal and whether the gas composition of the external gas contains dangerous substances.

[0028] The alarm module includes receiving the data processing result signal of the data processing module, and sending the alarm signal to the alarm set on the cabinet and the user end. The alarm set on the cabinet can serve as a warning to the surrounding working environment, reminding the surrounding staff to pay attention to safety protection, and can transmit the signal to the user end in time according to the detection results, reminding the user to inspect the cabinet in time.

[0029] In one embodiment of the present invention, when the data processing module determines that the gas remaining in the gas cylinder is insufficient, it automatically connects to the spare gas cylinder, uses the spare gas cylinder to assist in gas supply, and sends an alarm signal to the user end.

[0030] To implement the above technical solution, a spare gas cylinder is set up. When the data processing module determines that the gas remaining in the gas cylinder is insufficient, the spare gas cylinder is automatically connected, and the spare gas cylinder is used to assist in gas supply, thereby ensuring the continuity of the gas supply action and providing replacement time for replacing the gas cylinder, which can greatly reduce the frequency of manual inspections.

[0031] In one embodiment of the present invention, when the data processing module determines that the gas at the detector contains toxic substances, it transmits a signal to the user end and sends an alarm signal to the alarm at the same time. The alarm sounds an alarm to remind the staff to pay attention to the surrounding working environment. When the data processing module determines that the gas flow rate at the detector is reduced, it transmits a signal to the user end to remind the user end to maintain the gas filter component.

[0032] To implement the above technical solution, when in the process of detecting gas components, once the data processing module determines that the gas at the detector contains toxic substances, it will promptly transmit the signal to the user end, so that the user can promptly discover the presence of toxic gases in the working environment, take timely protective measures, and protect personal operation safety. When the data processing module determines that the gas flow rate at the detector is reduced, it will transmit the signal to the user end, prompting the user end to maintain the gas filter assembly, detect the specific reason for the reduction in gas flow rate, and prompt the user to maintain the gas pipe at the gas cylinder end.

[0033] As described above, a gas supply cabinet and a gas supply cabinet automatic control system of the present invention have the following beneficial effects: by arranging a gas filter component in the sampling valve, the gas filter component is used to filter the sampled gas to prevent solid particle impurities from entering the detection equipment and causing irreparable damage to the detection equipment; a accommodating cavity for accommodating gas cylinders is arranged on the lower side of the detection box to provide sufficient support space for the use of gas cylinders and ensure the stability of gas use; an alarm is also provided on the cabinet, which can promptly issue an alarm signal when it detects that there are safety hazards in the surrounding gas to alert surrounding staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 Shown is a structural schematic diagram of a gas supply cabinet and a gas supply cabinet automatic control system disclosed in an embodiment of the present invention.

[0035] Figure 2 Shown is a schematic diagram of the detection box structure of the gas supply cabinet and the gas supply cabinet automatic control system disclosed in an embodiment of the present invention.

[0036] Figure 3 Shown is a schematic diagram of the filter base structure of the gas supply cabinet and the gas supply cabinet automatic control system disclosed in an embodiment of the present invention

[0037] Figure 4 Shown is a schematic diagram of the structure of the spare detection box of the gas supply cabinet and the gas supply cabinet automatic control system disclosed in the embodiment of the present invention

[0038] Figure 5 Schematic diagram of the gas drive pump structure of the gas supply cabinet and the gas supply cabinet automatic control system disclosed in the embodiment of the present invention

[0039] Figure 6 Shown is a schematic diagram of the sampling gas pipe structure of the gas supply cabinet and the gas supply cabinet automatic control system disclosed in the embodiment of the present invention

[0040] Component number description

[0041] 1. Cabinet; 2. Sampling cabin; 3. Detection cabin; 4. Gas circulation cabinet; 5. Gas sampling valve; 6. Detection box; 7. Accommodation chamber; 8. Alarm; 9. Filter base; 10. Gas filter element; 11. Air inlet; 12. Detection substrate; 13. Sampling gas pipe; 14. Gas valve seat; 15. Gas filter seat; 16. Detector; 17. Spare detection box; 18. Gas drive pump; 19. Auxiliary air inlet; 20. Auxiliary detector; 21. Display screen. DETAILED DESCRIPTION

[0042] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. It should be noted that the following embodiments and features in the embodiments can be combined with each other unless there is a conflict.

[0043] See also Figures 1 to 6 The present invention provides a gas supply cabinet, including a sampling cabin 2 and a detection cabin 3 arranged in a cabinet body 1, a gas circulation cabinet 4 arranged on the side wall of the cabinet body 1, the gas circulation cabinet 4 connecting the interior of the cabinet body 1 with the outside world so that the gas inside the cabinet body 1 circulates out to the outside world, a gas sampling valve 5 is arranged in the sampling cabin 2, a gas filter component is arranged in the sampling valve, a detection box body 6 is arranged in the detection cabin 3, and a accommodating cavity 7 for accommodating a gas cylinder is arranged at the lower side of the detection box body 6, the gas circulation cabinet 4 is respectively connected to the accommodating cavity 7 and the detection box body 6, and an alarm 8 is also arranged on the cabinet body 1.

[0044] By setting a sampling cabin 2 and a detection cabin 3 in the cabinet 1, the gas is sampled and detected respectively. A gas circulation cabinet 4 is set on the side wall of the cabinet 1. The gas circulation cabinet 4 is used to connect the inside of the cabinet 1 with the outside world, so that the gas inside the cabinet 1 circulates to the outside world, ensuring the ventilation inside the cabinet 1.

[0045] By setting a gas filter component in the sampling valve, the sampled gas is filtered by the gas filter component to prevent solid particle impurities from entering the detection equipment and causing irreparable damage to the detection equipment. A accommodating cavity 7 for accommodating gas cylinders is set on the lower side of the detection box 6 to provide sufficient support space for the use of gas cylinders and ensure the stability of gas use. An alarm 8 is also provided on the cabinet 1, which can send out an alarm signal in time when it detects that there are safety hazards in the surrounding gas to remind surrounding staff.

[0046] The gas filter assembly includes a filter base 9, on which multiple groups of gas filter elements 10 are arranged, an air inlet 11 is arranged at the bottom of the gas sampling valve 5, an air outlet pipe is arranged on the filter base 9, and the air outlet pipe is connected to the detection box 6. The gas sampling valve 5 is located near the middle of the sampling cabin 2.

[0047] By arranging multiple groups of gas filter elements 10 on the filter base 9, the gas is filtered using the multiple groups of gas filter elements 10 to ensure that no solid particle impurities will remain when the gas is collected and enters the detection equipment, thereby improving the safety of the detection equipment. By arranging an outlet pipe on the filter base 9 to connect to the detection box 6, the filtered gas directly enters the detection box 6, reducing the loss of the air flow during the transmission process, and ensuring that the gas can maintain a sufficient flow rate when it is transported to the detection box 6 to match the preset flow rate value in the detection box 6.

[0048] A detection substrate 12 is arranged in the detection box 6, and multiple groups of sampling air pipes 13 are arranged on the back of the detection substrate 12. An air pipe joint is arranged on the detection substrate 12, and the multiple groups of sampling air pipes 13 are connected to the rear side of the air pipe joint. A gas valve seat 14 is also provided on the detection substrate 12, and the gas valve seat 14 is connected to the sampling air pipe 13. A gas filter seat 15 is also provided between the gas valve seat 14 and the multiple groups of sampling tubes on the detection substrate 12, and the multiple groups of sampling tubes are all connected to the input end of the gas filter seat 15. A detector 16 is arranged on the front side of the detection substrate 12, and the output end of the gas filter seat 15 is connected to the detector 16.

[0049] By setting up multiple groups of sampling air pipes 13, they can be connected to each gas filter element 10 through the air pipe to ensure the accuracy of gas sampling. When one of the gas filter elements 10 is blocked, the remaining air pipes can still complete the ventilation operation to ensure that sufficient gas can flow into the detection box 6 and the accuracy of the detection data. The gas valve seat 14 can adjust the gas flow rate according to the gas flow. When a gas filter element 10 is blocked, the gas flow rate is reduced. At this time, the gas valve seat 14 increases the flow rate to make up for the problem of insufficient gas flow. Multiple groups of sampling tubes are connected to the input end of the gas filter seat 15, and the gas filter seat 15 is used to integrate the gas transported by the multiple groups of sampling tubes so that the gas can be a single airflow from the output end of the gas filter seat 15. A detector 16 is set on the front side of the detection substrate 12, and the detector 16 is used to detect the gas flow rate and gas content, including the detection of the gas flow rate and gas composition.

[0050] A set of spare detection boxes 17 are also provided in the detection box body 6, a gas-driven pump 18 is provided in the spare detection box 17, an auxiliary air inlet 19 is provided on the spare detection box 17, the auxiliary air inlet buckle is connected to the sampling tube, and an auxiliary detector 20 is also provided in the spare detection box 17, and the air inlet end of the auxiliary detector 20 is connected to the air outlet end of the auxiliary air inlet 19.

[0051] By setting up a spare detection box 17, a group of gas outlet ends of the sampling tube are connected to the spare detection box 17. When the detector 16 can work normally, the auxiliary air inlet 19 of the spare detection box 17 is in a closed state, and the gas flows through the sampling tube connected to the detector 16 end. When a problem occurs at the detector 16 end, the auxiliary detector 20 starts to work, and the gas that should enter the detector 16 enters the auxiliary detector 20 for gas detection.

[0052] A display screen 21 is provided on the upper side of the detection cabin 3, and the display screen 21 is electrically connected to the detection substrate 12. The detection substrate 12 is electrically connected to the detector 16 and the auxiliary detector 20. By providing the display screen 21 on the upper side of the detection cabin 3, and utilizing the display screen 21 and the detection substrate 12 to be electrically connected to the detector 16 and the auxiliary detector 20, the gas detection situation is displayed on the actual screen, making it convenient for manual inspection of the detection situation.

[0053] The gas circulation cabinet 4 is provided with two sets of ventilation fans, and the two sets of ventilation fans are respectively connected to the accommodating cavity 7, the detection box 6 and the outside world. By setting up two sets of ventilation fans respectively connected to the accommodating cavity 7 and the detection box 6 and the outside world, the gas fluidity in the accommodating cavity 7 and the detection box 6 can be guaranteed, avoiding the inability to discharge the cabinet 1 in time after gas leakage occurs inside the cabinet 1, thereby affecting the working environment inside the cabinet 1, and the internal pressure imbalance when the cabinet 1 is in a closed state for a long time.

[0054] A gas supply cabinet automatic control system using the gas supply cabinet includes a gas detection module, a data processing module, and an alarm module. The gas detection module detects the remaining gas in the gas cylinder in the receiving chamber, obtains the pressure value of the gas in the gas cylinder detected by a pressure sensor provided in the gas cylinder, and also detects the composition and flow rate of the gas at the detector to determine the gas safety and gas fluidity in the target environment.

[0055] The data processing module compares the gas detection data collected by the gas detection module with the preset threshold value for the gas in the gas cylinder and the gas composition and flow velocity of the external gas;

[0056] The alarm module includes a data processing result signal receiving module, and sends the alarm signal to the alarm device provided on the cabinet and the user end.

[0057] By setting up a gas detection module to detect the remaining gas in the gas cylinder in the accommodating cavity, the pressure value of the gas in the gas cylinder detected by the pressure sensor set in the gas cylinder is obtained, and the remaining gas in the gas cylinder is determined according to the pressure value of the gas in the gas cylinder. Therefore, according to the residual gas capacity in the gas cylinder, it is determined whether it is necessary to start the spare gas cylinder for replenishing the gas supply. The gas detection module also needs to detect the composition and flow rate of the gas at the detector. According to the gas composition detected by the detector, the gas safety in the target environment is determined. According to the flow rate feedback result, it is determined whether the gas flow rate at the gas sampling valve end and the gas cylinder end is normal. When an abnormality occurs, it is promptly checked for abnormalities to improve the stability of equipment operation.

[0058] The data processing module collects the gas in the gas cylinder and the gas composition and flow rate of the external gas, and compares the obtained gas detection data with the preset threshold value to determine whether the gas flow rate in the gas cylinder is normal and whether the gas composition of the external gas contains dangerous substances.

[0059] The alarm module includes receiving the data processing result signal of the data processing module, and sending the alarm signal to the alarm set on the cabinet and the user end. The alarm set on the cabinet can serve as a warning to the surrounding working environment, reminding the surrounding staff to pay attention to safety protection, and can transmit the signal to the user end in time according to the detection results, reminding the user to inspect the cabinet in time.

[0060] When the data processing module determines that the gas remaining in the gas cylinder is insufficient, it automatically connects to the spare gas cylinder, uses the spare gas cylinder to assist in gas supply, and sends an alarm signal to the user end.

[0061] By setting up a spare gas cylinder, when the data processing module determines that the gas remaining in the gas cylinder is insufficient, the spare gas cylinder is automatically connected and used to assist in gas supply, ensuring the continuity of the gas supply action and providing replacement time for replacing the gas cylinder, which can greatly reduce the frequency of manual inspections.

[0062] When the data processing module determines that the gas at the detector contains toxic substances, it transmits a signal to the user end and sends an alarm signal to the alarm at the same time. The alarm sounds an alarm to remind the staff to pay attention to the surrounding working environment. When the data processing module determines that the gas flow rate at the detector decreases, it transmits a signal to the user end to remind the user end to maintain the gas filter component.

[0063] When detecting gas composition, once the data processing module determines that the gas composition at the detector contains toxic substances, it will transmit the signal to the user end in time, so that the user can promptly discover the presence of toxic gas in the working environment, take timely protection, and protect personal operation safety. When the data processing module determines that the gas flow rate at the detector is reduced, it will transmit the signal to the user end, prompting the user end to maintain the gas filter component, detect the specific reason for the reduction in gas flow rate, and prompt the user to maintain the gas pipe at the gas cylinder end.

[0064] The present invention sets a gas filter component in the sampling valve and uses the gas filter component to filter the sampled gas, thereby preventing solid particle impurities from entering the detection equipment and causing irreparable damage to the detection equipment. A accommodating cavity for accommodating gas cylinders is set on the lower side of the detection box to provide sufficient support space for the use of gas cylinders and ensure the stability of gas use. An alarm is also provided on the cabinet, which can promptly send out an alarm signal when it detects that there is a safety hazard in the surrounding gas to remind surrounding staff.

[0065] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Any equivalent modifications or variations made by persons skilled in the art without departing from the spirit and technical concepts disclosed herein shall be encompassed by the claims of the present invention.

Claims

1. A gas supply cabinet, characterized in that: include: A cabinet, wherein a sampling cabin and a detection cabin are arranged in the cabinet, and a gas circulation cabinet is arranged on the side wall of the cabinet, wherein the gas circulation cabinet connects the inside of the cabinet with the outside world so that the gas inside the cabinet circulates out to the outside world; A gas sampling valve is arranged in the sampling cabin, and a gas filtering component is arranged in the sampling valve; A detection box is arranged in the detection cabin, a receiving cavity for receiving the gas cylinder is arranged at the lower side of the detection box, and the gas circulation cabinet is connected with the receiving cavity and the detection box respectively; The cabinet is also provided with an alarm.

2. The gas supply cabinet according to claim 1, characterized in that: The gas filter assembly includes a filter base, a plurality of gas filter elements are arranged on the filter base, an air inlet is arranged at the bottom of the gas sampling valve, an air outlet pipe is arranged on the filter base, the air outlet pipe is connected to the detection box, and the gas sampling valve is located near the middle of the sampling cabin.

3. The gas supply cabinet according to claim 1, characterized in that: A detection substrate is arranged in the detection box, a plurality of sampling air pipes are arranged on the back side of the detection substrate, an air pipe joint is arranged on the detection substrate, the plurality of sampling air pipes are connected to the rear side of the air pipe joint, a gas valve seat is also arranged on the detection substrate, the gas valve seat is connected to the sampling air pipe, a gas filter seat is also arranged between the gas valve seat and the plurality of sampling tubes on the detection substrate, the plurality of sampling tubes are all connected to the input end of the gas filter seat, a detector is arranged on the front side of the detection substrate, and the output end of the gas filter seat is connected to the detector.

4. The gas supply cabinet according to claim 1, characterized in that: A set of spare test boxes is also arranged in the test box body, a gas driven pump is arranged in the spare test box, an auxiliary air inlet is arranged on the spare test box, the auxiliary air inlet buckle is connected to the sampling tube, an auxiliary detector is also arranged in the spare test box, and the air inlet end of the auxiliary detector is connected to the air outlet end of the auxiliary air inlet.

5. The gas supply cabinet according to claim 1, characterized in that: A display screen is arranged on the upper side of the detection chamber, and the display screen is electrically connected to a detection substrate, and the detection substrate is electrically connected to a detector and an auxiliary detector.

6. The gas supply cabinet according to claim 1, characterized in that: The gas circulation cabinet is provided with two sets of ventilation fans, and the two sets of ventilation fans are respectively connected to the ventilation accommodating cavity, the detection box body and the outside world.

7. A gas supply cabinet automatic control system using the gas supply cabinet according to any one of claims 1 to 6, characterized in that: It includes a gas detection module, a data processing module and an alarm module; The gas detection module includes detecting the remaining amount of gas in the gas cylinder in the containing cavity, obtaining the pressure value of the gas in the gas cylinder detected by the pressure sensor arranged in the gas cylinder, and also includes detecting the composition and flow rate of the gas at the detector to determine the gas safety and gas fluidity in the target environment; The data processing module compares the gas detection data obtained from the gas cylinder and the gas composition and flow velocity of the external gas collected by the gas detection module with a preset threshold value; The alarm module includes a data processing result signal receiving module, and sends the alarm signal to the alarm device arranged on the cabinet and the user end.

8. The automatic control system for a gas supply cabinet according to claim 7, characterized in that: When the data processing module determines that the gas remaining in the gas cylinder is insufficient, it automatically connects to the spare gas cylinder, uses the spare gas cylinder to assist in gas supply, and sends an alarm signal to the user end.

9. The automatic control system for a gas supply cabinet according to claim 7, characterized in that: When the data processing module determines that the gas at the detector contains toxic substances, it transmits a signal to the user end and sends an alarm signal to the alarm. The alarm sounds an alarm to remind the staff to pay attention to the surrounding working environment. When the data processing module determines that the gas flow rate at the detector is reduced, it transmits a signal to the user end to remind the user end to maintain the gas filter component.

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