Gas flow sensor combination device based on temperature and pressure compensation and flow correction method

Abstract

The invention discloses a gas flow sensor combination device based on temperature and pressure compensation and a flow correction method. The gas flow sensor combination device comprises a flow sensor combination, a pipeline mechanism, a data processing terminal, an environment pressure sensor and an environment temperature sensor. The pipeline mechanism comprises an air inlet pipeline and an air outlet pipeline, and a plurality of branches arranged in parallel are connected between the two pipelines; the flow sensor combination comprises laminar flow sensors arranged on the branches respectively and electromagnetic valves used for controlling the branches to be opened and closed, and the laminar flow sensors comprise laminar flow elements arranged on the corresponding branches. The laminar flow element is provided with a pressure difference sensor device used for measuring the pressure difference of an inlet and an outlet, a tail pressure sensor used for measuring the pressure and the temperature of fluid flowing through the laminar flow element, and a tail temperature sensor. The laminar flow sensor is used for measuring parameters such as temperature, pressure and pressure difference of fluid in real time, the parameters are calculated and corrected to obtain the flow in a standard state, and measured flow data are more scientific and accurate through temperature and pressure compensation.

Description

Technical Field

[0001] The invention relates to the technical field of flow rate testing, in particular to a gas flow rate sensor assembly device based on temperature and pressure compensation and a flow rate correction method. Background Art

[0002] As a compressible substance, the volume of gas is greatly affected by temperature and pressure. Especially when the fluid is compressed or expanded, the temperature of the fluid will rise or fall. The accurate measurement of gas flow should consider temperature and pressure compensation. Common micro-flow measurement mainly uses thermal temperature difference (or thermopile) and pressure difference sensors to measure gas flow. Although the thermal temperature difference gas flow measurement method can realize the flow measurement of most gases, it also has the following shortcomings: thermal gas flow sensors have problems of high power consumption and heat dissipation; thermal gas flow sensors also need to consider temperature compensation, which increases the difficulty of subsequent processing circuits. The pressure difference type measures the fluid flow by measuring the differential pressure at both ends of the laminar flow element. Its characteristic is that the flow rate is proportional to the differential pressure, and the gas flow rate can be accurately measured, but the measured flow range is relatively small. In real applications, there are requirements for a large range of flow measurement and high accuracy. At the same time, real-time measurement of multiple working conditions such as standard state and working condition should also be considered. Although the above problems are initially solved by simply connecting several sensors in parallel, the measurement accuracy and simple connection of the measurement range make it difficult for the measurement data to be widely recognized. Summary of the invention

[0003] The present invention aims at solving the problems existing in the prior art. The present invention proposes a gas flow sensor assembly device based on temperature and pressure compensation and a flow correction method, which can achieve high-precision measurement of wide-range gas changes under various working conditions.

[0004] The present invention discloses a gas flow sensor assembly device based on temperature and pressure compensation, comprising: a flow sensor assembly, a pipeline mechanism, a data processing terminal, an ambient pressure sensor, and an ambient temperature sensor;

[0005] The pipeline mechanism includes: an air inlet pipeline and an air outlet pipeline, and a plurality of branches connected in parallel between the air inlet pipeline and the air outlet pipeline;

[0006] The flow sensor assembly includes: laminar flow sensors respectively arranged on each branch, and electromagnetic valves for controlling the opening and closing of the branch, which are electrically connected to the data processing terminal, wherein the laminar flow sensor includes a laminar flow element arranged on the corresponding branch, and the laminar flow element is provided with: a pressure difference sensor device for measuring the inlet and outlet pressure difference, a tail pressure sensor for measuring the pressure and temperature of the fluid flowing through the laminar flow element, and a tail temperature sensor;

[0007] The data processing terminal is also electrically connected to an environmental pressure sensor and an environmental temperature sensor for measuring the fluid pressure and temperature of the working environment.

[0008] Further, the differential pressure sensor device comprises: an inlet pressure sensor and an outlet pressure sensor respectively arranged at the inlet and outlet of the laminar flow element;

[0009] The tail pressure sensor and the tail temperature sensor are located at the outlet of the laminar flow element.

[0010] Furthermore, the pipeline mechanism is provided with two branches, specifically: a first branch and a second branch;

[0011] The electromagnetic valves in the flow sensor assembly are specifically: a first electromagnetic valve arranged on the first branch, and a second electromagnetic valve arranged on the second branch;

[0012] The laminar flow sensors in the flow sensor combination are specifically: a first laminar flow sensor arranged on the first branch; and a second laminar flow sensor arranged on the second branch.

[0013] Furthermore, the pipeline mechanism also includes:

[0014] The adapter enables at least one branch to be connected to the air inlet pipeline and / or the air outlet pipeline through the adapter.

[0015] Further, the range of laminar flow sensor I is 0 to 2000 SCCM, and the range of laminar flow sensor II is 0 to 500 SCCM;

[0016] The measurement accuracy of the tail temperature sensor is 0.01K, and the measurement accuracy of the inlet pressure sensor, outlet pressure sensor, and tail pressure sensor is 10pa.

[0017] The present invention discloses a flow correction method, which is implemented based on the gas flow sensor assembly device based on temperature and pressure compensation as described above, and comprises:

[0018] Based on the pressure at both ends of the laminar flow element measured by the differential pressure sensor device, and the pressure and temperature of the fluid flowing through the laminar flow element measured by the tail temperature sensor and the tail pressure sensor, the standard state flow data is corrected and obtained;

[0019] Based on the pressure at both ends of the laminar flow element measured by the differential pressure sensor device, the pressure and temperature of the fluid flowing through the laminar flow element measured by the tail temperature sensor and the tail pressure sensor, and the temperature and pressure of the working environment sensed in real time by the ambient temperature sensor and the ambient pressure sensor, the operating flow data is corrected and obtained.

[0020] Furthermore, the standard flow data is corrected based on the following standard flow correction formula:

[0021]

[0022] Where Q0 is the volume flow rate under standard conditions; r is the inner diameter of the laminar flow element; η is the viscosity coefficient of the fluid; L is the length of the laminar flow element; P i is the inlet pressure of the laminar flow element; P0 is the outlet pressure of the laminar flow element; P1 is the pressure of the fluid flowing through the laminar flow element; T0 is the temperature of the fluid in the standard state; T1 is the temperature of the fluid flowing through the laminar flow element.

[0023] Furthermore, the working condition flow correction formula is as follows:

[0024]

[0025] Among them, Q g is the volume flow rate under working condition; P i is the inlet pressure of the laminar flow element; P0 is the outlet pressure of the laminar flow element; P1 is the pressure of the fluid in the standard state; P2 is the fluid pressure in the working environment; r is the inner diameter of the laminar flow element; η is the viscosity coefficient of the fluid; L is the length of the laminar flow element; T1 is the temperature of the fluid flowing through the laminar flow element; T2 is the temperature of the fluid in the standard state.

[0026] The present invention has at least the following beneficial effects:

[0027] The present invention measures the temperature, pressure, pressure difference and other parameters of the fluid in real time through a laminar flow sensor, and obtains the flow rate under the standard state after calculation and correction. The measured flow data is made more scientific and accurate through temperature and pressure compensation. The temperature and pressure and other parameters of the working environment sensed in real time by the ambient temperature sensor and the ambient pressure sensor are calculated and corrected to obtain the flow data under the ambient state, thereby avoiding the error caused by the change of pressure, temperature and the like after the fluid passes through the flow sensor. The combination of the ambient pressure sensor, the ambient temperature sensor and the flow sensor also avoids the error caused by the pressure and temperature data of the flow sensor. At the same time, the organic combination of multiple flow sensors and solenoid valves can ensure that the fluid flow is always within the optimal measurement range of the optimal flow sensor, and has the advantages of wide range and high measurement accuracy.

[0028] Other beneficial effects of the present invention will be described in detail in the specific implementation section. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 The invention discloses a gas flow sensor assembly device based on temperature and pressure compensation.

[0031] Figure 2 It is a structural schematic diagram of the laminar flow sensor disclosed in the present invention.

[0032] Among them, 1-first laminar flow sensor, 101-inlet pressure sensor, 102-outlet pressure sensor, 103-tail pressure sensor, 104-tail temperature sensor, 105-laminar flow element, 2-second laminar flow sensor, 3-first solenoid valve, 4-second solenoid valve, 5-inlet pipeline, 6-outlet pipeline, 7-ambient pressure sensor, 8-ambient temperature sensor, 9-data processing terminal, 10-transmission control cable. DETAILED DESCRIPTION

[0033] To make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention.

[0034] Embodiment 1

[0035] like Figure 1 and Figure 2 As shown, this embodiment discloses a gas flow sensor assembly device based on temperature and pressure compensation, including: a flow sensor assembly, a pipeline mechanism, a data processing terminal 9, an ambient pressure sensor 7, and an ambient temperature sensor 8;

[0036] The pipeline mechanism includes: an air inlet pipeline 5 and an air outlet pipeline 6, and a plurality of branches connected in parallel between the air inlet pipeline 5 and the air outlet pipeline 6;

[0037] The flow sensor assembly includes: laminar flow sensors respectively arranged on each branch, and electromagnetic valves for controlling the opening and closing of the branch, which are electrically connected to the data processing terminal 9, wherein the laminar flow sensor includes a laminar flow element 105 arranged on the corresponding branch, and the laminar flow element 105 is provided with: a pressure difference sensor device for measuring the inlet and outlet pressure difference, a tail pressure sensor 103 and a tail temperature sensor 104 for measuring the pressure and temperature of the fluid flowing through the laminar flow element 105. Preferably, the electrical connection is achieved through the transmission control cable 10 in this embodiment.

[0038] The data processing terminal 9 is also electrically connected to the ambient pressure sensor 7 and the ambient temperature sensor 8 for measuring the fluid pressure and temperature of the working environment.

[0039] Further, the differential pressure sensor device comprises: an inlet pressure sensor 101 and an outlet pressure sensor 102 respectively arranged at the inlet and outlet of the laminar flow element 105;

[0040] The tail pressure sensor 103 and the tail temperature sensor 104 are located at the outlet of the laminar flow element 105 .

[0041] Furthermore, the pipeline mechanism is provided with two branches, specifically: a first branch and a second branch;

[0042] The electromagnetic valves in the flow sensor assembly are specifically: a first electromagnetic valve 3 arranged on the first branch, and a second electromagnetic valve 4 arranged on the second branch;

[0043] The laminar flow sensors in the flow sensor combination are specifically: a first laminar flow sensor 1 arranged on the first branch; and a second laminar flow sensor 2 arranged on the second branch.

[0044] Furthermore, the pipeline mechanism also includes:

[0045] The adapter enables at least one branch to be connected to the air inlet pipe 5 and / or the air outlet pipe 6 through the adapter.

[0046] Further, the range of laminar flow sensor I is 0 to 2000 SCCM, and the range of laminar flow sensor II is 0 to 500 SCCM;

[0047] The measurement accuracy of the tail temperature sensor 104 is 0.01K, and the measurement accuracy of the inlet pressure sensor 101, the outlet pressure sensor 102, and the tail pressure sensor 103 is 10 Pa.

[0048] Embodiment 2

[0049] The present invention discloses a flow correction method, which is implemented based on the device described in the first embodiment and includes:

[0050] Based on the pressure at both ends of the laminar flow element measured by the differential pressure sensor device, and the pressure and temperature of the fluid flowing through the laminar flow element measured by the tail temperature sensor and the tail pressure sensor, the standard state flow data is corrected and obtained;

[0051] Based on the pressure at both ends of the laminar flow element measured by the differential pressure sensor device, the pressure and temperature of the fluid flowing through the laminar flow element measured by the tail temperature sensor and the tail pressure sensor, and the temperature and pressure of the working environment sensed in real time by the ambient temperature sensor and the ambient pressure sensor, the operating flow data is corrected and obtained.

[0052] Furthermore, the standard flow data is corrected based on the following standard flow correction formula:

[0053]

[0054] Where Q0 is the volume flow rate under standard conditions; r is the inner diameter of the laminar flow element; η is the viscosity coefficient of the fluid; L is the length of the laminar flow element; P i is the inlet pressure of the laminar flow element; P0 is the outlet pressure of the laminar flow element; P1 is the pressure of the fluid flowing through the laminar flow element; T0 is the temperature of the fluid in the standard state; T1 is the temperature of the fluid flowing through the laminar flow element.

[0055] Furthermore, the working condition flow correction formula is as follows:

[0056]

[0057] Among them, Q g is the volume flow rate under working condition; P i is the inlet pressure of the laminar flow element; P0 is the outlet pressure of the laminar flow element; P1 is the pressure of the fluid in the standard state; P2 is the fluid pressure in the working environment; r is the inner diameter of the laminar flow element; η is the viscosity coefficient of the fluid; L is the length of the laminar flow element; T1 is the temperature of the fluid flowing through the laminar flow element; T2 is the temperature of the fluid in the standard state.

[0058] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A gas flow sensor assembly device based on temperature and pressure compensation, characterized in that: include: Flow sensor combination, pipeline mechanism, data processing terminal, ambient pressure sensor, ambient temperature sensor; The pipeline mechanism includes: an air inlet pipeline and an air outlet pipeline, and a plurality of branches connected in parallel between the air inlet pipeline and the air outlet pipeline; The flow sensor assembly includes: laminar flow sensors respectively arranged on each branch, and electromagnetic valves for controlling the opening and closing of the branch, which are electrically connected to the data processing terminal, wherein the laminar flow sensor includes a laminar flow element arranged on the corresponding branch, and the laminar flow element is provided with: a pressure difference sensor device for measuring the inlet and outlet pressure difference, a tail pressure sensor for measuring the pressure and temperature of the fluid flowing through the laminar flow element, and a tail temperature sensor; The data processing terminal is also electrically connected to an environmental pressure sensor and an environmental temperature sensor for measuring the fluid pressure and temperature of the working environment.

2. The gas flow sensor assembly device based on temperature and pressure compensation according to claim 1 is characterized in that: The differential pressure sensor device comprises: an inlet pressure sensor and an outlet pressure sensor respectively arranged at the inlet and outlet of the laminar flow element; The tail pressure sensor and the tail temperature sensor are located at the outlet of the laminar flow element.

3. The gas flow sensor assembly device based on temperature and pressure compensation according to claim 1, characterized in that: The pipeline mechanism is provided with two branches, specifically: a first branch and a second branch; The electromagnetic valves in the flow sensor assembly are specifically: a first electromagnetic valve arranged on the first branch, and a second electromagnetic valve arranged on the second branch; The laminar flow sensors in the flow sensor combination are specifically: a first laminar flow sensor arranged on the first branch; and a second laminar flow sensor arranged on the second branch.

4. The gas flow sensor assembly device based on temperature and pressure compensation according to claim 3 is characterized in that: The pipeline organization also includes: The adapter enables at least one branch to be connected to the air inlet pipeline and / or the air outlet pipeline through the adapter.

5. The gas flow sensor assembly device based on temperature and pressure compensation according to claim 4 is characterized in that: The range of laminar flow sensor I is 0-2000 SCCM, and the range of laminar flow sensor II is 0-500 SCCM; The measurement accuracy of the tail temperature sensor is 0.01K, and the measurement accuracy of the inlet pressure sensor, outlet pressure sensor, and tail pressure sensor is 10pa.

6. A flow correction method, characterized in that: The method is implemented based on the gas flow sensor assembly device based on temperature and pressure compensation as described in any one of claims 1 to 5, and the method comprises: Based on the pressure at both ends of the laminar flow element measured by the differential pressure sensor device, and the pressure and temperature of the fluid flowing through the laminar flow element measured by the tail temperature sensor and the tail pressure sensor, the standard state flow data is corrected and obtained; Based on the pressure at both ends of the laminar flow element measured by the differential pressure sensor device, the pressure and temperature of the fluid flowing through the laminar flow element measured by the tail temperature sensor and the tail pressure sensor, and the temperature and pressure of the working environment sensed in real time by the ambient temperature sensor and the ambient pressure sensor, the operating flow data is corrected and obtained.

7. The flow correction method according to claim 6, characterized in that: The standard flow data is corrected based on the following standard flow correction formula: Where Q0 is the volume flow rate under standard conditions; r is the inner diameter of the laminar flow element; η is the viscosity coefficient of the fluid; L is the length of the laminar flow element; P i is the inlet pressure of the laminar flow element; P0 is the outlet pressure of the laminar flow element; P1 is the pressure of the fluid flowing through the laminar flow element; T0 is the temperature of the fluid in the standard state; T1 is the temperature of the fluid flowing through the laminar flow element.

8. The flow correction method according to claim 6, characterized in that: The working flow correction formula is as follows: Among them, Q g is the volume flow rate under working condition; P i is the inlet pressure of the laminar flow element; P0 is the outlet pressure of the laminar flow element; P1 is the pressure of the fluid in the standard state; P2 is the fluid pressure in the working environment; r is the inner diameter of the laminar flow element; η is the viscosity coefficient of the fluid; L is the length of the laminar flow element; T1 is the temperature of the fluid flowing through the laminar flow element; T2 is the temperature of the fluid in the standard state.

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