Laser measuring device and instrument

Abstract

The invention relates to the field of laser detection, and provides a laser measuring device and instrument.The laser measuring device comprises a cavity shell, a collecting plate, a connecting rod, a driving module and a sealing pipe, the cavity shell comprises a first shell body and a second shell body, the first shell body and the second shell body are each provided with a cavity, the collecting plate is located in the cavity, and at least part of the connecting rod is located in the cavity; the collecting plate is installed at the end of the connecting rod, the moving end of the driving module is connected with the end of the connecting rod, one end of the sealing pipe is connected to the cavity shell in a sealed mode, the end, away from the cavity shell, of the sealing pipe is connected to the driving module in a sealed mode, and at least part of the connecting rod is located in the sealing pipe. The connecting rod is driven to move through the driving module, so that the collecting plate located in the cavity is driven to move, the position of the collecting plate is adjusted, the position of the collecting plate in the cavity is changed, and compared with an existing mode that the position of the collecting plate is changed by adjusting the whole cavity to move, adjustment is more flexible, and operation is easy.

Description

Technical Field

[0001] The present application relates to the field of laser detection, and in particular to a laser measuring device and instrument. Background Art

[0002] In the field of laser intensity detection technology, accurate measurement of the energy distribution and intensity of the laser beam is a key link to ensure the stability of laser equipment performance, improve production efficiency and ensure safe operation. In traditional laser intensity detection devices, electrodes, as one of the core components, are usually designed to be fixedly installed inside the cavity to capture and convert laser energy into measurable electrical signals. However, this fixed design has significant limitations: since the positional relationship between the electrode and the cavity is not adjustable, when the laser beam fails to accurately align with the detection area in the cavity due to various reasons (such as equipment vibration, installation errors or changes in the position of the laser source), it will lead to increased measurement errors and even inability to perform effective measurements.

[0003] To address the above problems, the existing technology often adopts the method of adjusting the position of the cavity as a whole to try to realign the laser beam to the detection area. However, this method is not only cumbersome and inefficient, but also often difficult to achieve the ideal adjustment effect, which greatly limits the application scope of laser intensity detection devices in complex and changeable industrial environments. Summary of the invention

[0004] In view of this, the purpose of this application is to overcome the deficiencies in the prior art and provide a laser measuring device and instrument.

[0005] To achieve the above objectives, the technical solutions adopted in this application are as follows:

[0006] This application provides:

[0007] A laser measuring device, comprising:

[0008] A cavity shell, the cavity shell comprising a first shell and a second shell, the first shell is communicated with the second shell, and the first shell and the second shell both have a cavity;

[0009] A collecting plate, the collecting plate being located inside the cavity;

[0010] A connecting rod, wherein at least a portion of the connecting rod is located inside the cavity, and the collecting plate is mounted on an end of the connecting rod;

[0011] A driving module, wherein a moving end of the driving module is connected to an end of the connecting rod, and the driving module is used to drive the connecting rod to move;

[0012] A sealing tube, one end of which is sealingly connected to the cavity shell, an end of which is away from the cavity shell is sealingly connected to the driving module, and the connecting rod is at least partially located in the sealing tube.

[0013] Furthermore, each of the cavities has two collecting plates inside, the two collecting plates in the first shell are parallel to each other and arranged along a first preset direction, and the two collecting plates in the second shell are parallel to each other and arranged along a second preset direction, wherein the first preset direction is perpendicular to the second preset direction.

[0014] Furthermore, a connecting piece is provided between the first shell and the second shell, the first shell and the second shell are connected through the connecting piece, a light inlet is connectedly installed on the outer wall of the first shell, a light outlet is connectedly installed on the outer wall of the second shell, and the light inlet, the light outlet and the connecting piece are coaxial.

[0015] Furthermore, the collecting plate comprises a plate body, on which N electrodes are arranged, satisfying: N≥2; each of the electrodes is provided with a dividing groove, and the dividing groove divides the electrode into a first electrode area and a second electrode area.

[0016] Furthermore, the electrode is rectangular, the dividing groove is arranged on the diagonal line of the electrode, and the electrode is an immersion gold electrode.

[0017] Furthermore, an air intake member and M air extraction members are installed on the first shell and the second shell, satisfying: M≥1, and when M≥2, the air extraction members are evenly spaced and arranged on the first shell and the second shell.

[0018] Furthermore, a mounting piece is fixedly mounted on the end of the connecting rod away from the driving module, and the collecting plate is fixedly mounted on the mounting piece.

[0019] Furthermore, the sealing tube is a corrugated tube.

[0020] Furthermore, the board body is a ceramic circuit board.

[0021] The present application provides a laser measuring instrument, comprising:

[0022] The laser measuring device described in any one of the above items, wherein each collecting plate of the laser measuring device is connected to an amplifying circuit module;

[0023] A data collector, the data collector is electrically connected to the amplifying circuit module;

[0024] A computer is electrically connected to the data collector.

[0025] The present application drives the connecting rod to move through the driving module, thereby driving the collection plate located inside the cavity to move, thereby realizing the position adjustment of the collection plate and changing the position of the collection plate in the cavity. Compared with the existing method of adjusting the entire cavity to move to change the position of the collection plate, the present application is more flexible in adjustment and simple to operate.

[0026] In order to make the above-mentioned objects, features and advantages of the present application more obvious and understandable, preferred embodiments are given below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 The overall structure diagram of the laser detection device of the present application is shown;

[0029] Figure 2 A schematic diagram of the structure of the collecting plate of the present application is shown;

[0030] Figure 3 A schematic structural diagram of the connecting rod, driving module and sealing tube of the present application in an assembled state is shown.

[0031] Description of main component symbols:

[0032] 100, cavity shell; 110, first shell; 120, second shell; 200, collecting plate; 210, plate body; 220, dividing groove; 230, first electrode area; 240, second electrode area; 300, connecting rod; 400, driving module; 500, sealing tube; 600, mounting part; 700, amplifying circuit module; 800, air inlet; 900, exhaust part; 1000, light inlet; 1100, light outlet; 1200, connecting part; 1300, data acquisition device; 1400, computer. DETAILED DESCRIPTION

[0033] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0034] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0035] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0036] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0037] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] In a gas (argon, xenon) medium, the gas will be ionized to produce electrons and ions under the action of an external laser, and under the action of the electric field, the electrons and ions drift to the collecting plate 200 in the electric field and are absorbed by the collecting plate 200, and currents of different sizes are generated on the collecting plate 200. The intensity of the laser is proportional to the number of electrons and ions generated by ionization. Therefore, the intensity of the laser can be judged by the size of the current formed by the electrons and ions on the collecting plate 200.

[0039] In the field of laser intensity and position detection, the laser beam may not be able to accurately enter the detection area at a predetermined angle due to factors such as equipment vibration and installation errors, resulting in an increase in the detected error and an inability to effectively measure the laser. In order to achieve adjustment, the entire cavity is usually moved to change the position of the collection plate 200 in the cavity. However, due to the weight of the equipment and the size of the installation space, this adjustment method is inefficient and cannot flexibly adjust the position of the collection plate 200 in the cavity.

[0040] The present application mainly sets a driving module 400 on the outside of the first shell 110 and the second shell 120, and a connecting rod 300 is installed at the end of the driving module 400, and the connecting rod 300 is inserted into the cavity. The collecting plate 200 is installed on the connecting rod 300, and the position of the connecting rod 300 is adjusted by the driving module 400 to move, thereby realizing the position movement of the collecting plate 200, and making the position adjustment of the collecting plate 200 more flexible and convenient.

[0041] The present application provides a laser measuring device, including a cavity shell 100, a collecting plate 200, a connecting rod 300, a driving module 400 and a sealing tube 500, wherein the cavity shell 100 includes a first shell 110 and a second shell 120, wherein the first shell 110 is connected to the second shell 120, and the first shell 110 and the second shell 120 both have a cavity, the collecting plate 200 is located inside the cavity, the connecting rod 300 is at least partially located inside the cavity, the collecting plate 200 is installed at the end of the connecting rod 300, the moving end of the driving module 400 is connected to the end of the connecting rod 300, the driving module 400 is used to drive the connecting rod 300 to move, one end of the sealing tube 500 is sealed and connected to the cavity shell 100, the end of the sealing tube 500 away from the cavity shell 100 is sealed and connected to the driving module 400, and the connecting rod 300 is at least partially located in the sealing tube 500.

[0042] See also Figure 1 and Figure 3As shown, the present application has two shells, namely a first shell 110 and a second shell 120. A collecting plate 200 is provided in the first shell 110 and the second shell 120. Each collecting plate 200 is installed on a connecting rod 300, and each connecting rod 300 is installed on a driving module 400 corresponding to its position. The driving module 400 can be installed on the first shell 110 and the second shell 120, and can also be set on a mounting frame outside the first shell 110 and the second shell 120. The specific details are not limited here. Since the first shell 110 and the second shell 120 have the same structure, the difference between the two is that the setting direction of the collecting plate 200 is different. The first shell 110 is taken as an example here.

[0043] When the position of the collecting plate 200 needs to be adjusted, the driving module 400 first drives the connecting rod 300 to move, thereby driving the collecting plate 200 located inside the cavity to move, thereby changing the position of the collecting plate 200, and also changing the distance between the two collecting plates 200 in the cavity. Only two driving modules 400 are needed to drive the two collecting plates 200 to move closer to or away from each other through the connecting rod 300, so as to adjust the distance between the two collecting plates 200.

[0044] Since the detection of the laser in the first shell 110 requires a corresponding gas atmosphere, the first shell 110 needs to be sealed as a whole. Since the connecting rod 300 passes through the first shell 110 and is connected to the external driving module 400, a avoidance hole (not shown) for the connecting rod 300 to pass through must be opened on the first shell 110. Furthermore, in order to adjust the position of the connecting rod 300, the avoidance hole must be larger than the diameter of the connecting rod 300. The specific diameter of the avoidance hole can be set according to actual conditions and is not limited here. For this reason, it is necessary to set the avoidance hole in a manner that does not affect the position of the connecting rod 300. When the connecting rod 300 moves and adjusts, the avoidance hole must also be sealed. Therefore, the present application adopts a sealing tube 500 for sealing. Specifically, one end of the sealing tube 500 is sealed and connected to the driving module 400, and the other end can be sealed and connected to the outer surface of the first shell 110. Specifically, the other end of the sealing tube 500 can be sealed and installed at the periphery of the avoidance hole to cover the avoidance hole to achieve the closure of the avoidance hole, that is, to close the space formed by the first shell 110, the sealing tube 500 and the driving module 400 to prevent the inside of the first shell 110 from communicating with the outside through the avoidance hole.

[0045] In this embodiment, the driving module 400 can drive the connecting rod 300 to move in the X, Y and Z directions, that is, it can drive the collecting plate 200 to move in the X, Y and Z directions. More specifically, it can also perform movements such as rotation about the X, Y and Z axes as needed; for example: the driving module 400 can be a three-axis, four-axis, five-axis or six-axis multi-dimensional and angle adjustment fine-tuning platform, through which the connecting rod 300 can be driven to adjust the dimensions and angles, thereby achieving the adjustment of the position and angle of the collecting plate 200.

[0046] In this embodiment, in order to enable the sealing tube 500 to achieve a sealing effect during the movement of the connecting rod 300, the sealing tube 500 is selected to be a bellows. The flexibility of the bellows can meet the required moving distance during the adjustment process.

[0047] Each of the cavities has two collecting plates 200 inside. The two collecting plates 200 in the first shell 110 are parallel to each other and arranged along a first preset direction. The two collecting plates 200 in the second shell 120 are parallel to each other and arranged along a second preset direction, wherein the first preset direction is perpendicular to the second preset direction.

[0048] See also Figure 1 As shown, the two collecting plates 200 in the first shell 110 are arranged vertically, and the two collecting plates 200 in the second shell 120 are arranged horizontally. The purpose of such arrangement is to be able to detect the size of the position offset of the laser in the horizontal and vertical directions. Taking the two collecting plates 200 in the first shell 110 as an example, they can be recorded as being divided into an upper plate and a lower plate. Here, the laser is offset toward the upper plate as an example. The upper plate is at a positive voltage and the lower plate is at a negative voltage, thereby forming an electric field. Specifically, under the action of the electric field, electrons drift toward the upper plate, ions drift toward the lower plate, and the laser irradiates the middle position between the upper plate and the lower plate.

[0049] Ideally, the laser is in the middle of the upper plate and the lower plate, but in reality, a certain deviation will occur and it will be shot between the upper plate and the lower plate at a certain offset angle. As the angle shifts, in the vertical direction, the laser will get closer and closer to the upper plate and away from the lower plate. For this reason, under the action of the electric field, the drift distances of electrons and ions are also different, so that the number of electrons or ions absorbed at different positions of the upper plate and the lower plate is different, so that the current generated at different positions of the upper plate and the lower plate is also different. Therefore, the distance and position of the laser offset can be calculated based on the current size, thereby achieving precise measurement.

[0050] The offset distance and position calculation of the collecting plate 200 in the second housing 120 and the collecting plate 200 in the first housing 110 are the same, and will not be elaborated here.

[0051] A connecting piece 1200 is provided between the first shell 110 and the second shell 120, and the first shell 110 and the second shell 120 are connected through the connecting piece 1200. A light inlet 1000 is installed on the outer wall of the first shell 110, and a light outlet 1100 is installed on the outer wall of the second shell 120. The light inlet 1000, the light outlet 1100 and the connecting piece 1200 are coaxial.

[0052] See also Figure 1 As shown, in order to allow the laser to enter the second shell 120 while entering the first shell 110 , a connecting piece 1200 is connected between the first shell 110 and the second shell 120 , so that the laser can enter the second shell 120 while entering the first shell 110 .

[0053] Specifically, the laser enters the first housing 110 through the light inlet 1000 , then enters the second housing 120 through the connecting piece 1200 , and finally exits through the light outlet 1100 .

[0054] The collecting plate 200 includes a plate body 210 , on which N electrodes are disposed, satisfying: N ≥ 2; each electrode is provided with a dividing groove 220 , and the dividing groove 220 divides the electrode into a first electrode region 230 and a second electrode region 240 .

[0055] The electrode is rectangular, the dividing groove 220 is arranged on the diagonal line of the electrode, and the electrode is an immersion gold electrode.

[0056] In this embodiment, there are two electrode tools, and each rectangular electrode is divided into two along the diagonal line, which not only expands the collection area, but also increases the capture intensity of electrons and ions, thereby improving the detection accuracy.

[0057] See also Figure 2 As shown, the electrode is divided into two by a dividing groove 220. When electrons or ions drift, since the laser is not shot completely horizontally or vertically, the number of electrons and ions generated by the ionization of argon gas under the action of the laser falling into the first electrode area 230 and the second electrode area 240 is different. Therefore, the current generated in the first electrode area 230 and the second electrode area 240 is also different. Therefore, the offset distance of the laser can be judged by the current size.

[0058] In this embodiment, there are two electrodes, which are spaced apart from each other. The existing electrodes are made of aluminum alloy material, and the electrodes in this application are immersion gold electrodes, that is, the first electrode area 230 and the second electrode area 240 are both immersion gold electrodes. Specifically, on the plate body 210, the first motor area 230 and the second electrode area 240 are both deposited nickel-gold alloy. The nickel-gold alloy has the advantages of preventing oxidation, low resistivity, and long service life.

[0059] The board body 210 is a ceramic circuit board. Compared with traditional circuit boards, ceramic circuit boards have the advantages of high voltage resistance, light weight, and good flatness.

[0060] An air intake member 800 and M air extraction members 900 are installed on the first shell 110 and the second shell 120 , satisfying: M≥1. When M≥2, the air extraction members 900 are evenly spaced apart on the first shell 110 and the second shell 120 .

[0061] Continue reading Figure 1 As shown, in the present embodiment, there are two air suction members 900, which are illustrated by taking the first shell 110 as an example. Specifically, the two air suction members 900 are respectively arranged on the outer surface of the first shell 110, and the two air suction members 900 are symmetrically arranged about the first shell 110, that is, the two air suction members 900 are arranged relative to each other, and the air intake member 800 is arranged at the bottom of the first shell 110, and the air intake member 800 is used to input gas and the air suction member 900 is used to exhaust gas. At this time, the air intake member 800 is located between the two air suction members 900.

[0062] Before the test, the first shell 110 can be evacuated, and then a gas medium, such as argon, xenon or other rare gases, can be introduced. In this embodiment, argon can be introduced through the air inlet 800; then the air pumping pieces 900 on both sides can be used to evacuate argon, and then the air inlet 800 can be simultaneously passed through argon, so that the air pressure at the positions of the air pumping pieces 900 at both ends of the cavity is 10 -7 Pa, the air pressure in the middle is 10 -5 Pa to 10 -2 Between Pa.

[0063] In this embodiment, the air extraction member 900 is a connecting pipe, that is, the connecting pipe can be connected to an external vacuum device for air extraction. Correspondingly, the air inlet member 800 can also be a pipe connected to an air pump or other equipment for air injection. The air pressure at the positions of the air extraction members 900 at both ends can be 10 -5 Pa, 10 -4 Pa, 10 -3 Pa and 10 -2 Pa, etc., can be taken as 10 in this embodiment -3 Pa.

[0064] It should be noted that the larger air pressure in the middle can provide sufficient gas medium, so the air pressure in the middle position cannot be too small. However, the greater the air pressure, the greater the loss of the laser. Therefore, the air pressure in the middle position is set at 10 -5 Pa to 10 -2 Pa, while providing the gas medium, the laser loss will not be too large. The purpose of the gas pressure at both ends being lower than the middle gas pressure is to keep a certain vacuum degree in the whole cavity. In this embodiment, the vacuum degree can be less than 10 -7 Pa.

[0065] A mounting member 600 is fixedly mounted on the end of the connecting rod 300 away from the driving module 400 , and the collecting plate 200 is fixedly mounted on the mounting member 600 .

[0066] Continue reading Figure 1 As shown, in order to be able to install the corresponding module on the collection plate 200, the collection plate 200 is installed on the mounting member 600. The mounting member 600 is in the shape of a plate. The mounting member 600 and the collection plate 200 can be connected by a connecting column, and a certain gap can be formed between the collection plate 200 and the mounting member 600.

[0067] The present application provides a laser measuring instrument, comprising any of the laser measuring devices described above, a data collector 1300 and a computer 1400, each collecting board 200 of the laser measuring device is connected to an amplifying circuit module 700, the data collector 1300 is electrically connected to the amplifying circuit module 700, and the computer 1400 is electrically connected to the data collector 1300.

[0068] See also Figure 1 As shown, the amplifying circuit module 700 is installed on each collecting plate 200. Its purpose is to amplify the current generated by the electrons or ions drifting to the collecting plate 200 so that it can be collected by the data collector 1300. In the embodiment, as long as the module can produce an amplifying effect on the current generated by the collecting plate 200 under the premise of meeting the needs, the specific circuit, circuit board and other structures are not limited.

[0069] In order to prevent the external environment from affecting the circuit during the collection process transmitted to the data collector 1300, a corresponding filtering module can be set to reduce interference. The computer 1400 processes the current signal generated by each collection board 200 collected by the data collector 1300, so as to calculate and determine the intensity of the laser and the offset distance. In this embodiment, as long as the circuit, circuit board and other structures can play a filtering effect under the premise of meeting the needs, there is no limitation here.

[0070] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0071] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A laser measuring device, characterized in that: include: A cavity housing (100), the cavity housing (100) comprising a first shell (110) and a second shell (120), the first shell (110) being in communication with the second shell (120), and the first shell (110) and the second shell (120) both having a cavity; A collecting plate (200), the collecting plate (200) being located inside the cavity; A connecting rod (300), wherein at least a portion of the connecting rod (300) is located inside the cavity, and the collecting plate (200) is mounted on an end of the connecting rod (300); A driving module (400), wherein a moving end of the driving module (400) is connected to an end of the connecting rod (300), and the driving module (400) is used to drive the connecting rod (300) to move; A sealing tube (500), one end of the sealing tube (500) is sealedly connected to the cavity shell (100), the end of the sealing tube (500) away from the cavity shell (100) is sealedly connected to the driving module (400), and the connecting rod (300) is at least partially located in the sealing tube (500).

2. The laser measuring device according to claim 1, characterized in that: Each of the cavities has two collecting plates (200) inside, the two collecting plates (200) in the first shell (110) are parallel to each other and arranged along a first preset direction, and the two collecting plates (200) in the second shell (120) are parallel to each other and arranged along a second preset direction, wherein the first preset direction is perpendicular to the second preset direction.

3. The laser measuring device according to claim 1, characterized in that: A connecting piece (1200) is provided between the first shell (110) and the second shell (120); the first shell (110) and the second shell (120) are connected via the connecting piece (1200); a light inlet (1000) is connectedly installed on the outer wall of the first shell (110); a light outlet (1100) is connectedly installed on the outer wall of the second shell (120); the light inlet (1000), the light outlet (1100) and the connecting piece (1200) are coaxial.

4. The laser measuring device according to claim 1, characterized in that: The collecting plate (200) comprises a plate body (210), on which N electrodes are arranged, satisfying: N≥2; each electrode is provided with a dividing groove (220), and the dividing groove (220) divides the electrode into a first electrode area (230) and a second electrode area (240).

5. The laser measuring device according to claim 4, characterized in that: The electrode is rectangular, the dividing groove (220) is arranged on the diagonal line of the electrode, and the electrode is a gold-immersion electrode.

6. The laser measuring device according to claim 1, characterized in that: An air intake member (800) and M air extraction members (900) are installed on both the first shell (110) and the second shell (120), satisfying: M≥1. When M≥2, the air extraction members (900) are evenly spaced on the first shell (110) and the second shell (120).

7. The laser measuring device according to claim 1, characterized in that: A mounting member (600) is fixedly mounted on the end of the connecting rod (300) away from the driving module (400), and the collecting plate (200) is fixedly mounted on the mounting member (600).

8. The laser measuring device according to claim 1, characterized in that: The sealing tube (500) is a corrugated tube.

9. The laser measuring device according to claim 4, characterized in that: The board body (210) is a ceramic circuit board.

10. A laser measuring instrument, characterized in that: include: The laser measuring device according to any one of claims 1 to 9, wherein each collecting plate (200) of the laser measuring device is connected to an amplifying circuit module (700); A data collector (1300), the data collector (1300) being electrically connected to the amplifying circuit module (700); A computer (1400), wherein the computer (1400) is electrically connected to the data collector (1300).

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