A high-precision pressure sensing element and a pressure sensing system

Abstract

The present invention relates to the technical field of sensors, and discloses a high-precision pressure sensing element and a pressure sensing system. A high-precision pressure sensing element includes: a substrate, a groove is formed at the bottom of the inner cavity of the substrate; a pressure film, the pressure film is installed on the top of the substrate and the pressure film seals the opening of the groove; a pressure-sensitive beam is installed on the top of the substrate, a piezoresistor is installed in the inner cavity of the pressure-sensitive beam, the pressure-sensitive beam is fixedly connected to the substrate through an anchor ring, and the pressure-sensitive beam is fixedly connected to the pressure film through an anchor point; a pressure sensing system, based on the high-precision pressure sensing element described in the claims, includes a workbench, and a lifting mechanism, a moving mechanism and a display mechanism are installed on the top of the workbench. The present invention realizes the precise movement and positioning of the sensing element in the vertical and horizontal directions, can simulate the pressure effects at different heights and angles, and meets the requirements of multi-dimensional detection.

Description

Technical Field

[0001] The present invention relates to the technical field of sensors, and particularly to a high-precision pressure sensing element and a pressure sensing system. Background Art

[0002] Currently, most pressure sensors use the piezoresistive principle for pressure detection, detecting pressure by using the change in resistivity of piezoresistive materials under the action of force. In addition to using the piezoresistive principle for pressure detection, a few manufacturers use capacitive detection, but all use the single-capacitance detection method: a sealed vacuum chamber is formed by a pressure-sensitive film and a substrate. When the external air pressure changes, the pressure-sensitive film above the vacuum chamber will bend, resulting in a change in the capacitance formed by the pressure-sensitive film and the substrate. Detecting this capacitance change can obtain the external pressure.

[0003] After retrieval, the patent with the Chinese patent number CN204881934U discloses a pressure sensing element, which includes a first capacitor and a second capacitor arranged side by side on a substrate; the first capacitor includes a first pressure-sensitive film located above and a first fixed electrode plate located below, and the first fixed electrode plate is provided with a first through hole; the second capacitor includes a second pressure-sensitive film located below and a second fixed electrode plate located above, and the second fixed electrode plate is provided with a second through hole; the substrate is provided with a first groove and a second groove, the first groove is in gap communication with the first capacitor through the first through hole to form a first sealed cavity, and the second pressure-sensitive film seals the second groove to form a second sealed cavity; the first capacitor and the second capacitor together form a differential capacitor. The pressure sensing element of this utility model is detected based on the differential capacitor, is insensitive to external common-mode interference signals, and can achieve high-precision and high-stability output.

[0004] After retrieval, the patent with the Chinese patent number CN204758194U discloses a MEMS pressure sensing element, which includes: a substrate provided with a groove; a pressure-sensitive film arranged above the substrate, and the pressure-sensitive film seals the opening of the groove to form a sealed cavity; a pressure-sensitive beam parallel to the pressure-sensitive film suspended in the sealed cavity, and a piezoresistor is arranged on the pressure-sensitive beam; the center of the pressure-sensitive beam is fixedly connected to the center of the pressure-sensitive film, and the outer periphery is fixedly connected to the bottom wall of the groove of the substrate. In the MEMS pressure sensing element of this utility model, when pressure acts on the pressure-sensitive film, the pressure-sensitive film drives the pressure-sensitive beam to move, causing the bending of the pressure-sensitive beam, and then causing a change in the resistance value of the piezoresistor on the pressure-sensitive beam, thus completing the function of pressure sensitivity and shielding the electromagnetic interference of the external electrical part of the pressure sensing element.

[0005] The above-mentioned pressure sensing element generally forms a change in the resistance value of the piezoresistor through the change in pressure, and then completes the function of pressure sensitivity. However, in the actual use process, the pressure sensing element needs to be installed at a specific position to work, and different positions will also affect the use of the pressure sensing element. Therefore, before installing the pressure sensing element, it is necessary to perform necessary detections on the pressure sensing element to meet the needs of use at different positions. However, the existing devices lack the process and structure for detecting the pressure sensing element. Based on this, the present invention designs a high-precision pressure sensing element and a pressure sensing system to solve the above problems. Summary of the Invention

[0006] The purpose of the present invention is to provide a high-precision pressure sensing element and a pressure sensing system, which solve the problem of the lack of detection of the pressure sensing element in the background technology.

[0007] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0008] A high-precision pressure sensing element, comprising:

[0009] A substrate, a groove is opened at the bottom of the inner cavity of the substrate;

[0010] A pressure film, the pressure film is installed on the top of the substrate and the pressure film seals the opening of the groove;

[0011] A pressure-sensitive beam is installed on the top of the substrate, a piezoresistor is installed in the inner cavity of the pressure-sensitive beam, the pressure-sensitive beam is fixedly connected to the substrate through an anchor ring, the pressure-sensitive beam is fixedly connected to the pressure film through an anchor point, and both the anchor ring and the anchor point are distributed in a multi-group matrix array;

[0012] A first electrode and a second electrode, both the first electrode and the second electrode are located between the substrate and the pressure film and are on the same layer;

[0013] A cross stiffener is installed at the bottom of the substrate and is used to enhance the mechanical stability of the pressure film and reduce the non-linear error;

[0014] A marginal structure is installed at the bottom edge of the pressure film, which is used to support and reinforce the pressure film and further reduce the pressure non-linearity;

[0015] A connection circuit is connected to the first electrode and the second electrode and is used to detect the current change generated between the two due to the pressure on the pressure film.

[0016] Preferably, an elastic support layer is provided at the bottom of the inner cavity of the groove and is used to provide a restoring force under pressure.

[0017] Preferably, the varistor is a high-precision semiconductor varistor, and the resistance change has a highly linear relationship with the applied pressure; the pressure-sensitive beam is made of a lightweight and high-strength silicon-based material, and the pressure-sensitive beam is a plate-shaped structure optimized for stress concentration.

[0018] Preferably, both the anchoring ring and the anchor point are made by precision machining technology to ensure the firm connection between the substrate, the pressure-sensitive beam and the pressure film.

[0019] By using a high-precision semiconductor varistor as the core sensing element, whose resistance change has a highly linear relationship with the applied pressure, the accuracy and precision of pressure measurement are significantly improved; the pressure-sensitive beam is made of a lightweight and high-strength silicon-based material and is designed as a plate-shaped structure optimized for stress concentration, further enhancing the sensitivity and accuracy of pressure transmission; the introduction of cross-reinforcing members and edge structures effectively enhances the mechanical stability of the substrate and the pressure film, prevents structural damage caused by excessive pressure, reduces non-linear errors at the same time, and ensures the stability and reliability of long-term use.

[0020] Preferably, a pressure sensing system, based on a high-precision pressure sensing element as claimed in the claims, includes a workbench. A lifting mechanism, a moving mechanism and a display mechanism are installed on the top of the workbench. The lifting mechanism is installed on the top of the workbench and is used for the vertical detection of the pressure sensing element. The moving mechanism is installed on one side of the lifting mechanism and is used for the horizontal detection of the pressure sensing element. The display mechanism is installed on one side of the moving mechanism and is used for the display of pressure sensing data.

[0021] Preferably, the lifting mechanism includes a base installed on the back of the workbench. A hydraulic telescopic rod is installed on the top of the base. A protection frame is installed on the top of the hydraulic telescopic rod. An adjustment assembly is also installed on the top of the protection frame.

[0022] Preferably, the adjustment assembly includes an electric push rod installed in the inner cavity of the protection frame. A lifting seat is installed on the top of the output rod of the electric push rod. A lifting rod is installed on the front of the lifting seat. A first detection seat is installed on the front of the lifting rod. The high-precision pressure sensing element is installed in the inner cavity of the first detection seat.

[0023] Preferably, the moving mechanism includes a servo motor and a connecting seat installed on the top of the workbench. A one-way lead screw is installed between the servo motor and the connecting seat. The output shaft of the servo motor is fixedly connected to the one-way lead screw through a coupling. A moving plate is threadedly connected to the outer circle of the one-way lead screw. Installation grooves are formed on the top and one side of the moving plate.

[0024] Preferably, the moving mechanism further includes a fixed seat installed on one side of the servo motor. A second detection seat is installed on the front of the fixed seat, and the high-precision pressure sensing element is installed in the inner cavity of the second detection seat. A track is installed on the top of the workbench, and a slider is installed at the bottom of the moving plate. The slider can slide in the inner cavity of the track.

[0025] The equipped lifting mechanism and moving mechanism, through precision driving components such as hydraulic telescopic rods, electric push rods, and servo motors, achieve precise movement and positioning of the sensing element in the vertical and horizontal directions, can simulate pressure effects at different heights and angles, and meet the requirements of multi-dimensional detection; this design enables the sensing element to flexibly adapt to various installation positions, ensuring accurate measurement data can be obtained in different environments.

[0026] Preferably, the display mechanism includes a support frame installed on one side of the top of the workbench. A display screen is installed on the top of the support frame, and the display screen is electrically connected to the high-precision pressure sensing element.

[0027] The display mechanism displays the measurement data of the sensing element in real time through the display screen, intuitively converts the pressure change into a change in resistance value or other forms of data display, and improves the readability of the data and the efficiency of experimental analysis.

[0028] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0029] 1. In the present invention, the equipped lifting mechanism and moving mechanism, through precision driving components such as hydraulic telescopic rods, electric push rods, and servo motors, achieve precise movement and positioning of the sensing element in the vertical and horizontal directions, can simulate pressure effects at different heights and angles, and meet the requirements of multi-dimensional detection; this design enables the sensing element to flexibly adapt to various installation positions, ensuring accurate measurement data can be obtained in different environments.

[0030] 2. In the present invention, the display mechanism displays the measurement data of the sensing element in real time through the display screen, intuitively converts the pressure change into a change in resistance value or other forms of data display, and improves the readability of the data and the efficiency of experimental analysis; the design of electrical connection enables fast and accurate data transmission, provides important references for scientific researchers or operators, and simplifies the experimental operation and data recording process.

[0031] 3. In the present invention, by adopting a high-precision semiconductor varistor as the core sensing element, the change in its resistance value has a highly linear relationship with the applied pressure, significantly improving the accuracy and precision of pressure measurement; the pressure-sensitive beam is made of a lightweight and high-strength silicon-based material and is designed as a plate structure that optimizes stress concentration, further enhancing the sensitivity and accuracy of pressure transmission; the introduction of cross-reinforcing members and edge structures effectively enhances the mechanical stability of the substrate and the pressure film, prevents structural damage caused by excessive pressure, reduces non-linear errors at the same time, and ensures the stability and reliability of long-term use. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic structural diagram of the pressure sensing system of the present invention;

[0033] Figure 2 is a schematic internal structure diagram of the pressure sensing element of the present invention;

[0034] Figure 3 of the present invention Figure 2 is an enlarged structural diagram at position A in;

[0035] Figure 4 is a three-dimensional structural diagram of the pressure sensing element of the present invention;

[0036] Figure 5 is a side view of the pressure sensing system of the present invention;

[0037] Figure 6 of the present invention Figure 5 is an enlarged structural diagram at position B in;

[0038] Figure 7 of the present invention Figure 5 is an enlarged structural diagram at position C in;

[0039] Figure 8 is a schematic structural diagram of the display mechanism of the present invention.

[0040] Among them: 2, lifting mechanism; 3, moving mechanism; 4, display mechanism; 5, adjustment component; 101, base; 102, groove; 103, pressure film; 104, pressure-sensitive beam; 105, anchoring ring; 106, anchor point; 107, first electrode; 108, second electrode; 109, cross stiffener; 110, edge structure; 111, varistor; 201, workbench; 202, base; 203, hydraulic telescopic rod; 204, protection frame; 301, servo motor; 302, connecting seat; 303, one-way lead screw; 304, moving plate; 305, installation groove; 306, fixed seat; 307, second detection seat; 308, track; 309, slider; 401, support frame; 402, display screen; 501, electric push rod; 502, lifting seat; 503, lifting rod; 504, first detection seat. Specific implementation mode

[0041] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0042] Embodiment 1;

[0043] Please refer to Figures 1-8 , in the embodiment of the present invention, a high-precision pressure sensing element includes:

[0044] Base 101, and a groove 102 is opened at the bottom of the inner cavity of the base 101;

[0045] Pressure film 103, the pressure film 103 is installed on the top of the base 101 and the pressure film 103 is sealed at the opening of the groove 102;

[0046] A pressure-sensitive beam 104 is installed on the top of the base 101. A varistor 111 is installed in the inner cavity of the pressure-sensitive beam 104. The pressure-sensitive beam 104 is fixedly connected to the base 101 through an anchoring ring 105. The pressure-sensitive beam 104 is fixedly connected to the pressure film 103 through an anchor point 106. Both the anchoring ring 105 and the anchor point 106 are distributed in a multi-group matrix array;

[0047] First electrode 107 and second electrode 108, both the first electrode 107 and the second electrode 108 are located between the base 101 and the pressure film 103 and are located on the same layer;

[0048] Cross stiffener 109, the cross stiffener 109 is installed at the bottom of the base 101 and is used to enhance the mechanical stability of the pressure film 103 and reduce the non-linear error;

[0049] The edge structure 110 is installed at the bottom edge of the pressure film 103, used to support and reinforce the pressure film 103 and further reduce pressure non-linearity;

[0050] The connection circuit is connected to the first electrode 107 and the second electrode 108, used to detect the current change generated between the two due to the pressure on the pressure film 103.

[0051] An elastic support layer is provided at the bottom of the inner cavity of the groove 102 and used to provide a restoring force under pressure.

[0052] The varistor 111 is a high-precision semiconductor varistor type resistor and the resistance value change has a high linear relationship with the applied pressure; the pressure-sensitive beam 104 is made of a lightweight and high-strength silicon-based material and the pressure-sensitive beam 104 is a plate-shaped structure optimized for stress concentration.

[0053] Both the anchoring ring 105 and the anchor point 106 are made by precision machining technology to ensure a firm connection between the substrate 101, the pressure-sensitive beam 104 and the pressure film 103.

[0054] The working principle of the embodiment of the present invention is: when an external pressure acts on the pressure film 103, the diaphragm deforms, and then the deformation is transmitted to the pressure-sensitive beam 104 through the anchor point 106. The pressure-sensitive beam 104, as a key conversion component, the varistor 111 installed inside it can sensitively capture the deformation caused by the pressure and convert it into a change in the resistance value. The varistor 111 is made of a high-precision semiconductor material and the resistance value change has a high linear relationship with the applied pressure. When the pressure-sensitive beam 104 bends due to the deformation of the pressure film 103, the resistance value of the varistor 111 changes accordingly. This resistance change is detected by the circuit connected between the first electrode 107 and the second electrode 108 and converted into a measurable electrical signal.

[0055] To improve the stability of the sensing element and reduce the non-linear error, the present invention introduces the cross reinforcing member 109 and the edge structure 110. The cross reinforcing member 109 enhances the mechanical strength of the substrate 101 and the pressure film 103, preventing structural damage caused by excessive pressure. The edge structure 110 supports and reinforces the edge of the pressure film 103, further ensuring the uniformity and accuracy of pressure transmission. The elastic support layer at the bottom of the inner cavity of the groove 102 provides the necessary restoring force for the pressure film 103, ensuring that it can quickly return to the initial state after the pressure is released, thus ensuring the long-term stability and reliability of the sensing element.

[0056] The anchoring ring 105 and the anchor point 106 are made by precision machining technology, ensuring a firm and reliable connection between the substrate 101, the pressure-sensitive beam 104 and the pressure film 103, reducing the measurement error caused by loose connection.

[0057] Example 2;

[0058] Please refer to Figures 1-8 In the embodiment of the present invention, a pressure sensing system, based on a high-precision pressure sensing element of claim 1, includes a workbench 201. A lifting mechanism 2, a moving mechanism 3 and a display mechanism 4 are installed on the top of the workbench 201. The lifting mechanism 2 is installed on the top of the workbench 201 and is used for the vertical detection of the pressure sensing element. The moving mechanism 3 is installed on one side of the lifting mechanism 2 and is used for the horizontal detection of the pressure sensing element. The display mechanism 4 is installed on one side of the moving mechanism 3 and is used for the display of pressure sensing data.

[0059] The lifting mechanism 2 includes a base 202 installed on the back of the workbench 201. A hydraulic telescopic rod 203 is installed on the top of the base 202. A protection frame 204 is installed on the top of the hydraulic telescopic rod 203. An adjustment assembly 5 is also installed on the top of the protection frame 204.

[0060] The adjustment assembly 5 includes an electric push rod 501 installed in the inner cavity of the protection frame 204. A lifting seat 502 is installed on the top of the output rod of the electric push rod 501. A lifting rod 503 is installed on the front of the lifting seat 502. A first detection seat 504 is installed on the front of the lifting rod 503. The high-precision pressure sensing element is installed in the inner cavity of the first detection seat 504.

[0061] The working principle of the embodiment of the present invention is: The lifting mechanism 2 drives the protection frame 204 and the high-precision pressure sensing element inside to move up and down through the hydraulic telescopic rod 203 to simulate the pressure effects at different heights. The electric push rod 501 and the lifting rod 503 further provide a fine-tuning function to ensure that the sensing element can be accurately aligned with the measurement point. Fixed by the first detection seat 504, the sensing element stably performs pressure measurement.

[0062] Example 3;

[0063] Please refer to Figures 1-8 In the embodiment of the present invention, the moving mechanism 3 includes a servo motor 301 and a connecting seat 302 installed on the top of the workbench 201. A one-way lead screw 303 is installed between the servo motor 301 and the connecting seat 302. The output shaft of the servo motor 301 is fixedly connected to the one-way lead screw 303 through a coupling. A moving plate 304 is threadedly connected to the outer circle of the one-way lead screw 303. Installation grooves 305 are formed on the top and one side of the moving plate 304.

[0064] The moving mechanism 3 further includes a fixed seat 306 installed on one side of the servo motor 301. A second detection seat 307 is installed on the front surface of the fixed seat 306. The high-precision pressure sensing element is installed in the inner cavity of the second detection seat 307. A track 308 is installed on the top of the workbench 201. A slider 309 is installed at the bottom of the moving plate 304, and the slider 309 can slide in the inner cavity of the track 308.

[0065] The display mechanism 4 includes a support frame 401 installed on one side of the top of the workbench 201. A display screen 402 is installed on the top of the support frame 401, and the display screen 402 is electrically connected to the high-precision pressure sensing element.

[0066] The working principle of the embodiment of the present invention is as follows: The moving mechanism 3 uses the servo motor 301 to drive the rotation of the unidirectional lead screw 303, thereby driving the moving plate 304 to slide along the track 308. This process realizes the movement of the sensing element in the horizontal direction. Cooperating with the lifting mechanism 2, it can realize the all-round detection of the pressure at different positions. The second detection seat 307 ensures the stability and accuracy of the sensing element during the movement.

[0067] The display mechanism 4 displays the measurement data of the high-precision pressure sensing element in real time through the display screen 402. The display screen 402 is electrically connected to the sensing element and can intuitively reflect the pressure change and the corresponding resistance value change, providing important reference for scientific researchers or operators. The pressure sensing system of the present invention realizes the high-precision and multi-dimensional measurement and data display of pressure through the organic combination of the high-precision pressure sensing element and the intelligent detection mechanism, providing strong support for the research and application in related fields.

[0068] Working principle: The high-precision pressure sensing system proposed by the present invention realizes the high-precision, multi-dimensional measurement and real-time data display of pressure by integrating the precisely designed pressure sensing element with the intelligent detection and display mechanism 4. The core of the system lies in the high-precision pressure sensing element, which through precision machining and ingenious design, works together to accurately capture the pressure change and convert it into a measurable electrical signal. Specifically, when an external pressure acts on the pressure film 103, the diaphragm deforms, and the deformation is transmitted to the pressure-sensitive beam 104 through the anchor point 106. The high-precision semiconductor piezoresistor 111 built in the pressure-sensitive beam 104 changes its resistance value accordingly. This change is detected through the circuit connected between the first electrode 107 and the second electrode 108 and converted into an electrical signal output.

[0069] To enhance the stability of the system and reduce non - linear errors, cross - strengthening members 109 and edge structures 110 are introduced in the design. The cross - strengthening members 109 reinforce the mechanical structures of the base 101 and the pressure film 103, preventing damage caused by excessive pressure; the edge structures 110 support and reinforce the edges of the pressure film 103, ensuring the uniformity and accuracy of pressure transmission. In addition, the elastic support layer at the bottom of the groove 102 provides a restoring force for the pressure film 103, ensuring the long - term stability and reliability of the sensing element.

[0070] The system is also equipped with an intelligent detection and display mechanism 4, including a lifting mechanism 2, a moving mechanism 3, and a display mechanism 4. The lifting mechanism 2 realizes the precise vertical positioning and fine - tuning of the sensing element through the linkage of the hydraulic telescopic rod 203 and the electric push rod 501, simulating the pressure effects at different heights. The moving mechanism 3 uses the servo motor 301 to drive the rotation of the unidirectional lead screw 303, driving the moving plate 304 to slide along the track 308, realizing the flexible movement of the sensing element in the horizontal direction. Combined with the lifting mechanism 2, this design allows for the comprehensive detection of pressures at multiple positions and angles.

[0071] Finally, the display mechanism 4 displays the measurement data of the sensing element in real - time through the display screen 402, intuitively converting the pressure change into a change in resistance value or other forms of data display, providing important references for researchers or operators. This link not only improves the readability of the data but also greatly facilitates experimental analysis and result recording. The system can not only achieve high - precision measurement of pressure but also has the ability of multi - dimensional detection and real - time data display, providing strong technical support for research and application in related fields.

[0072] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-precision pressure sensing element, characterized in that: include: A base (101), wherein a groove (102) is formed at the bottom of an inner cavity of the base (101); A pressure membrane (103), the pressure membrane (103) being mounted on the top of the substrate (101) and the pressure membrane (103) being sealed at the opening of the groove (102); A pressure-sensitive beam (104) is installed on the top of the substrate (101), a piezoresistor (111) is installed in the inner cavity of the pressure-sensitive beam (104), the pressure-sensitive beam (104) and the substrate (101) are fixedly connected via an anchor ring (105), the pressure-sensitive beam (104) and the pressure membrane (103) are fixedly connected via an anchor point (106), and the anchor ring (105) and the anchor point (106) are both distributed in a plurality of matrix arrays; A first electrode (107) and a second electrode (108), wherein the first electrode (107) and the second electrode (108) are both located between the substrate (101) and the pressure membrane (103), and are located in the same layer; A cross reinforcement (109), which is installed at the bottom of the substrate (101) and is used to enhance the mechanical stability of the pressure membrane (103) and reduce nonlinear errors; A rim structure (110), the rim structure (110) being installed at the bottom edge of the pressure membrane (103) for supporting and reinforcing the pressure membrane (103) and further reducing pressure nonlinearity; A connecting circuit, the connecting circuit being connected to the first electrode (107) and the second electrode (108) and being used to detect a change in current therebetween caused by the pressure membrane (103) being pressurized; An elastic support layer is provided at the bottom of the inner cavity of the groove (102) and is used to provide a restoring force under pressure. The varistor (111) is a high-precision semiconductor varistor and the change in resistance is highly linearly related to the pressure applied. The pressure-sensitive beam (104) is made of a lightweight and high-strength silicon-based material and is a plate-type structure that optimizes stress concentration. The anchor ring (105) and the anchor point (106) are both made through precision machining technology to ensure that the base (101), the pressure-sensitive beam (104) and the pressure membrane (103) are firmly connected.

2. A pressure sensing system, characterized in that: A high-precision pressure sensing element according to claim 1, comprising a workbench (201), the top of which is mounted a lifting mechanism (2), a moving mechanism (3) and a display mechanism (4), wherein the lifting mechanism (2) is mounted on the top of the workbench (201) and is used for vertical detection of the high-precision pressure sensing element, the moving mechanism (3) is mounted on one side of the lifting mechanism (2) and is used for lateral detection of the high-precision pressure sensing element, and the display mechanism (4) is mounted on one side of the moving mechanism (3) and is used for displaying pressure sensing data; The lifting mechanism (2) comprises a base (202) mounted on the back of the workbench (201), a hydraulic telescopic rod (203) being mounted on the top of the base (202), a protective frame (204) being mounted on the top of the hydraulic telescopic rod (203), and an adjustment component (5) being mounted on the top of the protective frame (204); The adjustment component (5) comprises an electric push rod (501) installed in the inner cavity of the protection frame (204); a lifting seat (502) is installed on the top of the output rod of the electric push rod (501); a lifting rod (503) is installed on the front of the lifting seat (502); a first detection seat (504) is installed on the front of the lifting rod (503); and the high-precision pressure sensor element is installed in the inner cavity of the first detection seat (504); The moving mechanism (3) comprises a servo motor (301) and a connecting seat (302) mounted on the top of the workbench (201); a one-way screw (303) is mounted between the servo motor (301) and the connecting seat (302); an output shaft of the servo motor (301) and the one-way screw (303) are fixedly connected via a coupling; an outer ring of the one-way screw (303) is threadedly connected to a moving plate (304); and a top and one side of the moving plate (304) are provided with mounting grooves (305); The moving mechanism (3) further comprises a fixing seat (306) mounted on one side of the servo motor (301); a second detection seat (307) is mounted on the front of the fixing seat (306); the high-precision pressure sensor element is mounted in the inner cavity of the second detection seat (307); a track (308) is mounted on the top of the workbench (201); a slider (309) is mounted on the bottom of the moving plate (304); and the slider (309) can slide in the inner cavity of the track (308); The display mechanism (4) comprises a support frame (401) installed on one side of the top of the workbench (201), a display screen (402) is installed on the top of the support frame (401), and the display screen (402) is electrically connected to a high-precision pressure sensor element.

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