Radio frequency parameter acquisition circuit and radio frequency power supply system

Abstract

The invention provides a radio frequency parameter acquisition circuit and a radio frequency power supply system, and relates to the technical field of radio frequency, the radio frequency parameter acquisition circuit comprises a signal processing unit, a first peak value acquisition unit and a first effective value acquisition unit; the signal processing unit is used for acquiring a voltage envelope signal when the radio frequency power supply outputs electric energy to the load, and reserving a part with a voltage value greater than zero in a waveform of the voltage envelope signal as a forward envelope signal; the first peak value acquisition unit is used for filtering a direct current component of the forward envelope signal to obtain a first alternating current signal only comprising an alternating current component of the forward envelope signal, and acquiring a first peak value of the first alternating current signal; the first effective value acquisition unit is used for acquiring a first effective value of the forward envelope signal; the radio frequency parameter at least comprises a voltage standing wave ratio when the radio frequency power supply outputs electric energy to the load, and the voltage standing wave ratio is calculated according to the first peak value and the first effective value. The radio frequency parameter acquisition requirement when the radio frequency power supply outputs electric energy to the load can be met.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency parameter acquisition circuit and a radio frequency power supply system having the radio frequency parameter acquisition circuit. Background Art

[0002] At present, with the popularization of radio frequency (RF) technology, more and more RF power supplies are used to provide power to various loads, and the impedance matching between the RF power supply and the load becomes more and more important, especially when the impedance of the load changes, it is also necessary to keep the RF parameters of the output path of the RF power supply stable at all times to ensure that the RF power supply and the load impedance match. Therefore, when the RF power supply outputs power to the load, the RF parameters are important parameters to determine whether the RF power supply and the load are impedance matched. How to meet the requirements for obtaining RF parameters including at least the voltage standing wave ratio (VSWR) to better output power to the load has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency parameter acquisition circuit and a radio frequency power supply system, which can meet the radio frequency parameter acquisition requirements when the radio frequency power supply outputs electric energy to a load.

[0004] In a first aspect, a radio frequency parameter acquisition circuit is provided, the radio frequency parameter acquisition circuit comprising a signal processing unit, a first peak acquisition unit and a first effective value acquisition unit. The signal processing unit is used to connect to the output path of the radio frequency power supply to collect the voltage envelope signal when the radio frequency power supply outputs electric energy to the load, and retain the part of the waveform of the voltage envelope signal with a voltage value greater than zero as the forward envelope signal. The first peak acquisition unit is connected to the signal processing unit, and the first peak acquisition unit is used to filter out the DC component of the forward envelope signal to obtain a first AC signal including only the AC component of the forward envelope signal, and obtain the first peak value of the first AC signal. The first effective value acquisition unit is connected to the signal processing unit, and the first effective value acquisition unit is used to obtain the first effective value of the forward envelope signal. The radio frequency parameters when the radio frequency power supply outputs electric energy to the load at least include a voltage standing wave ratio, and the voltage standing wave ratio is calculated based on the first peak value and the first effective value.

[0005] In a possible implementation manner, the voltage standing wave ratio is a ratio of a sum of the first effective value and the first peak value to a difference between the first effective value and the first peak value.

[0006] In a possible implementation, the signal processing unit includes a signal sampling module and a signal interception module, the input end of the signal sampling module is used to connect to the output path of the RF power supply, the output end of the signal sampling module is connected to the input end of the signal interception module, and the output end of the signal interception module is connected to the first peak acquisition unit and the first effective value acquisition unit respectively. The signal sampling module is used to collect the voltage envelope signal when the RF power supply outputs electric energy to the load. The signal interception module is used to receive the voltage envelope signal, retain the part of the waveform of the voltage envelope signal with a voltage value greater than zero as the positive envelope signal, and output the positive envelope signal to the first peak acquisition unit and the first effective value acquisition unit respectively.

[0007] In a possible implementation, the signal interception module includes a first diode, the anode of the first diode is connected to the input end of the signal interception module, and the cathode of the first diode is connected to the output end of the signal interception module. The unidirectional conduction direction of the first diode is from the anode to the cathode of the first diode, and the first diode allows a portion of the voltage envelope signal whose voltage value is greater than zero to pass through, and prohibits a portion of the voltage envelope signal whose voltage value is less than or equal to zero to pass through.

[0008] In a possible implementation, the first peak acquisition unit includes a signal filtering module, a rectifier module, and a peak acquisition module that are sequentially connected to the signal processing unit. The signal filtering module is used to receive the forward envelope signal through an input terminal, filter out the DC component of the forward envelope signal, and output the first AC signal that only includes the AC component of the forward envelope signal through an output terminal. The rectifier module is used to rectify the first AC signal received at the input terminal to obtain a first rectified signal, and output the first rectified signal through an output terminal. The peak acquisition module is used to receive the first rectified signal through an input terminal, and obtain the peak value of the first rectified signal as the first peak value of the first AC signal.

[0009] In a possible implementation, the signal filtering module includes a first capacitor, one end of which is connected to the input end of the signal filtering module, and the other end of which is connected to the output end of the signal filtering module. The first capacitor is used to prevent the DC component of the forward envelope signal from passing through, and to allow the AC component of the forward envelope signal to pass through, so as to obtain the first AC signal including only the AC component of the forward envelope signal.

[0010] In a possible implementation, the first effective value acquisition unit includes a signal isolation module and an effective value acquisition module connected to the signal processing unit in sequence. The signal isolation module is used to isolate the first peak acquisition unit from the effective value acquisition module, and output the forward envelope signal received by the input end through the output end. The effective value acquisition module is used to receive the forward envelope signal through the input end and acquire the first effective value of the forward envelope signal.

[0011] In a possible implementation manner, the radio frequency parameter further includes a reflection coefficient modulus, and the reflection coefficient modulus is calculated according to the first peak value and the first effective value.

[0012] In a possible implementation manner, the RF parameter acquisition circuit further includes a second effective value acquisition unit, the second effective value acquisition unit is connected to the signal processing unit, and the second effective value acquisition unit is used to receive the voltage envelope signal and acquire a second effective value of the voltage envelope signal. The RF parameters further include a total power value, an incident power value, a reflected power value, and a forward power value, and the total power value, the incident power value, the reflected power value, and the forward power value are calculated based on the second effective value, the reflection coefficient modulus value, and the characteristic impedance value of the output path of the RF power supply.

[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system includes a radio frequency power supply and a radio frequency parameter acquisition circuit. The radio frequency parameter acquisition circuit includes a signal processing unit, a first peak acquisition unit and a first effective value acquisition unit. The signal processing unit is used to connect with the output path of the radio frequency power supply to collect the voltage envelope signal when the radio frequency power supply outputs electric energy to the load, and retain the part of the waveform of the voltage envelope signal whose voltage value is greater than zero as the forward envelope signal. The first peak acquisition unit is connected to the signal processing unit, and the first peak acquisition unit is used to filter out the DC component of the forward envelope signal to obtain a first AC signal including only the AC component of the forward envelope signal, and obtain the first peak value of the first AC signal. The first effective value acquisition unit is connected to the signal processing unit, and the first effective value acquisition unit is used to obtain the first effective value of the forward envelope signal. Wherein, the radio frequency parameters when the radio frequency power supply outputs electric energy to the load include at least a voltage standing wave ratio, and the voltage standing wave ratio is calculated based on the first peak value and the first effective value.

[0014] The RF parameter acquisition circuit and RF power supply system of the present application process the waveform of the voltage envelope signal by configuring a signal processing unit to retain the part with a voltage value greater than zero as a forward envelope signal, and process the waveform of the forward envelope signal by configuring a first peak acquisition unit to obtain a first AC signal including only the AC component of the forward envelope signal, and then calculate the voltage standing wave ratio based on the first effective value of the forward envelope signal and the first peak value of the first AC signal, so as to meet the acquisition requirement of the RF parameters including at least the voltage standing wave ratio when the RF power supply outputs electric energy to the load, so as to better output electric energy to the load. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 It is a block diagram of a radio frequency parameter acquisition circuit in an embodiment of the present application.

[0017] Figure 2 Schematic diagram of waveforms of a voltage envelope signal, a positive envelope signal and a first AC signal in one embodiment of the present application.

[0018] Figure 3 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a control unit.

[0019] Figure 4 It is a block diagram of a radio frequency parameter acquisition circuit in yet another embodiment of the present application.

[0020] Figure 5 FIG. 4 is a circuit diagram of a signal processing unit in an embodiment of the present application.

[0021] Figure 6 It is a block diagram of a radio frequency parameter acquisition circuit in another embodiment of the present application.

[0022] Figure 7 Schematic diagram of a circuit of a first peak value acquisition unit in an embodiment of the present application.

[0023] Figure 8 It is a block diagram of a radio frequency parameter acquisition circuit in yet another embodiment of the present application.

[0024] Fig. 9 Schematic diagram of a circuit of a first effective value acquisition unit in an embodiment of the present application.

[0025] Fig.10 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a second effective value acquisition unit.

[0026] Fig.11 It is a block diagram of a radio frequency power supply system in one embodiment of the present application.

[0027] Description of reference numerals: 1000, RF power supply system, RF, RF power supply, 10, RF parameter acquisition circuit, 100, signal processing unit, 110, signal sampling module, R1, first resistor, R2, second resistor, Ue, voltage envelope signal, 120, signal interception module, D1, first diode, Ue+, forward envelope signal, 200, first peak acquisition unit, 210, signal filtering module, C1, first capacitor, AS1, first AC signal, 220, rectifier module, D2, The second diode, RS1, the first rectified signal, 230, the peak value acquisition module, C2, the second capacitor, R3, the third resistor, Um1, the first peak value, 300, the first effective value acquisition unit, 310, the signal isolation module, D3, the third diode, 320, the effective value acquisition module, C3, the third capacitor, R4, the fourth resistor, Urms1, the first effective value, 400, the control unit, 500, the second effective value acquisition unit, Urms2, the second effective value, GND, ground, RL, load. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0029] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0030] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0031] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0032] Please also read Figure 1 , Figure 2 , Figure 1 is a block diagram of a radio frequency parameter acquisition circuit in an embodiment of the present application, Figure 2 Schematic diagram of the waveforms of the voltage envelope signal, the positive envelope signal and the first AC signal in one embodiment of the present application. Figure 1 , Figure 2 As shown, the present application provides a radio frequency parameter acquisition circuit 10, and the radio frequency parameter acquisition circuit 10 includes a signal processing unit 100, a first peak acquisition unit 200, and a first effective value acquisition unit 300. The signal processing unit 100 is used to connect with the output path of the radio frequency power supply RF to collect the voltage envelope signal Ue when the radio frequency power supply RF outputs electric energy to the load RL, and retain the part of the waveform of the voltage envelope signal Ue where the voltage value is greater than zero as the positive envelope signal Ue+. The first peak acquisition unit 200 is connected to the signal processing unit 100, and the first peak acquisition unit 200 is used to filter out the DC component of the positive envelope signal Ue+ to obtain a first AC signal AS1 including only the AC component of the positive envelope signal Ue+, and obtain the first peak value Um1 of the first AC signal AS1. The first effective value acquisition unit 300 is connected to the signal processing unit 100, and the first effective value acquisition unit 300 is used to obtain the first effective value Urms1 of the positive envelope signal Ue+. The radio frequency parameters when the radio frequency power supply RF outputs electric energy to the load RL at least include a voltage standing wave ratio, and the voltage standing wave ratio is calculated based on the first peak value Um1 and the first effective value Urms1.

[0033] Thus, the RF parameter acquisition circuit 10 in the present application processes the waveform of the voltage envelope signal Ue by configuring the signal processing unit 100 to retain the part with a voltage value greater than zero as the forward envelope signal Ue+, and processes the waveform of the forward envelope signal Ue+ by configuring the first peak acquisition unit 200 to obtain a first AC signal AS1 including only the AC component of the forward envelope signal Ue+, and then according to the first effective value Urms1 of the forward envelope signal Ue+ and the first peak value Um1 of the first AC signal AS1, the voltage standing wave ratio can be calculated to meet the acquisition requirement of the RF parameters including at least the voltage standing wave ratio when the RF power supply RF outputs electric energy to the load RL, so as to better output electric energy to the load RL.

[0034] Specifically, the RF power source RF is used to generate a high-frequency sine wave with a certain power value, and transmits the high-frequency sine wave to the load RL through the output path of the RF power source RF, so as to output electrical energy to the load RL. However, the impedance matching state between the RF power source RF and the load RL will affect the waveform of the high-frequency sine wave. When the impedance of the RF power source RF and the load RL does not match, such as Figure 2 The amplitude of the high-frequency sine wave shown will also fluctuate, so by using the voltage envelope signal Ue to display the amplitude change of the high-frequency sine wave, the required RF parameters, especially the voltage standing wave ratio and the reflection coefficient, can be quickly and accurately obtained. In addition, when the impedance matching state between the RF power supply RF and the load RL does not change, the voltage envelope signal Ue is also a periodic signal.

[0035] It should be noted that if Figure 2 As shown, the waveform of the voltage envelope signal Ue is processed, and the portion of the waveform of the voltage envelope signal Ue with a voltage value greater than zero is retained as the positive envelope signal Ue+, that is, the voltage envelope signal Ue is rectified to retain the portion of the waveform of the voltage envelope signal Ue with a voltage value greater than zero, wherein the voltage value of the waveform of the voltage envelope signal Ue is greater than zero, indicating that the transmission direction of the voltage envelope signal Ue is from the radio frequency power supply RF to the load RL.

[0036] In one or more embodiments, the first AC signal AS1 may be a sinusoidal AC signal.

[0037] It should be noted that when the impedance matching state between the RF power supply RF and the load RL does not change, the peak value and the trough value of the first AC signal AS1 are opposite to each other, and the first peak value Um1 can be the peak value of the first AC signal AS1 or the absolute value of the trough value of the first AC signal AS1.

[0038] In one or more embodiments, the voltage standing wave ratio is a ratio of a sum of the first effective value Urms1 and the first peak value Um1 to a difference between the first effective value Urms1 and the first peak value Um1.

[0039] Therefore, the RF parameter acquisition circuit 10 in the present application performs a series of processing and value acquisition on the voltage envelope signal Ue by configuring the above-mentioned signal processing unit 100, the first peak acquisition unit 200 and the first effective value acquisition unit 300 to obtain the first effective value Urms1 and the first peak value Um1, and performs simple addition, subtraction and division operations on the first effective value Urms1 and the first peak value Um1, that is, the voltage standing wave ratio can be calculated.

[0040] Specifically, if the voltage standing wave ratio is SWR, then SWR=(Urms1+Um1) / (Urms1-Um1).

[0041] See also Figure 3 , Figure 3 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a control unit. Figure 3 As shown, the RF parameter acquisition circuit 10 may further include a control unit 400, which is respectively connected to the first peak value acquisition unit 200 and the first effective value acquisition unit 300, and the control unit 400 is used to receive the first effective value Urms1 and the first peak value Um1, and calculate the voltage standing wave ratio according to the first peak value Um1 and the first effective value Urms1.

[0042] See also Figure 4 , Figure 4 FIG. 1 is a block diagram of a radio frequency parameter acquisition circuit in another embodiment of the present application. Figure 4 As shown, the signal processing unit 100 includes a signal sampling module 110 and a signal interception module 120. The input end of the signal sampling module 110 is used to connect to the output path of the radio frequency power supply RF, the output end of the signal sampling module 110 is connected to the input end of the signal interception module 120, and the output end of the signal interception module 120 is connected to the first peak acquisition unit 200 and the first effective value acquisition unit 300 respectively. The signal sampling module 110 is used to collect the voltage envelope signal Ue when the radio frequency power supply RF outputs electric energy to the load RL. The signal interception module 120 is used to receive the voltage envelope signal Ue, and retain the part of the waveform of the voltage envelope signal Ue where the voltage value is greater than zero as the positive envelope signal Ue+, and output the positive envelope signal Ue+ to the first peak acquisition unit 200 and the first effective value acquisition unit 300 respectively.

[0043] Therefore, the RF parameter acquisition circuit 10 in the present application collects the voltage envelope signal Ue by configuring the signal sampling module 110, and retains the part of the waveform of the voltage envelope signal Ue with a voltage value greater than zero as the positive envelope signal Ue+ by configuring the signal interception module 120, so as to obtain the required positive envelope signal Ue+.

[0044] In one or more embodiments, the signal sampling module 110 has a high impedance, so that the power value of the voltage envelope signal Ue is small, and thus the RF parameter acquisition circuit 10 substantially does not affect the RF power supply RF from outputting electrical energy to the load RL.

[0045] Please also read Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a signal processing unit in an embodiment of the present application. Figure 5As shown, the signal interception module 120 includes a first diode D1, the anode of the first diode D1 is connected to the input end of the signal interception module 120, and the cathode of the first diode D1 is connected to the output end of the signal interception module 120. The unidirectional conduction direction of the first diode D1 is from the anode to the cathode of the first diode D1, and the first diode D1 allows the voltage envelope signal Ue to pass through a portion whose voltage value is greater than zero, and prohibits the voltage envelope signal Ue to pass through a portion whose voltage value is less than or equal to zero.

[0046] Therefore, the RF parameter acquisition circuit 10 in the present application can retain the portion of the waveform of the voltage envelope signal Ue where the voltage value is greater than zero as the forward envelope signal Ue+ by setting the first diode D1.

[0047] like Figure 5 As shown, the signal sampling module 110 may include a first resistor R1 and a second resistor R2, the first resistor R1 and the second resistor R2 are connected in series between the input end of the signal sampling module 110 and the ground GND, and the connection point between the first resistor R1 and the second resistor R2 is the output end of the signal sampling module 110.

[0048] The signal sampling module 110 is used to obtain the voltage envelope signal Ue according to the relationship between the resistance value of the first resistor R1 and the resistance value of the second resistor R2.

[0049] In one or more embodiments, the difference between the resistance value of the first resistor R1 and the resistance value of the second resistor R2 is greater than a first preset value, so that the power value of the voltage envelope signal Ue is less than a second preset value.

[0050] See also Figure 6 , Figure 6 FIG. 1 is a block diagram of a radio frequency parameter acquisition circuit in another embodiment of the present application. Figure 6 As shown, the first peak acquisition unit 200 includes a signal filtering module 210, a rectifying module 220 and a peak acquisition module 230 which are sequentially connected to the signal processing unit 100. The signal filtering module 210 is used to receive the positive envelope signal Ue+ through the input end, filter out the DC component of the positive envelope signal Ue+, and output the first AC signal AS1 including only the AC component of the positive envelope signal Ue+ through the output end. The rectifying module 220 is used to rectify the first AC signal AS1 received at the input end to obtain the first rectified signal RS1, and output the first rectified signal RS1 through the output end. The peak acquisition module 230 is used to receive the first rectified signal RS1 through the input end, and obtain the peak value of the first rectified signal RS1 as the first peak value Um1 of the first AC signal AS1.

[0051] Therefore, the RF parameter acquisition circuit 10 in the present application filters out the DC component of the forward envelope signal Ue+ by configuring the signal filtering module 210 to obtain the first AC signal AS1, and rectifies the first AC signal AS1 by configuring the rectifier module 220 to obtain the first rectified signal RS1, so as to more directly obtain the first peak value Um1 of the first AC signal AS1.

[0052] Please also read Figure 7 , Figure 7 FIG. 1 is a circuit diagram of a first peak value acquisition unit in an embodiment of the present application. Figure 7 As shown, the signal filtering module 210 includes a first capacitor C1, one end of the first capacitor C1 is connected to the input end of the signal filtering module 210, and the other end of the first capacitor C1 is connected to the output end of the signal filtering module 210. The first capacitor C1 is used to prevent the DC component of the positive envelope signal Ue+ from passing through, and allow the AC component of the positive envelope signal Ue+ to pass through, so as to obtain a first AC signal AS1 including only the AC component of the positive envelope signal Ue+.

[0053] Therefore, the RF parameter acquisition circuit 10 in the present application, by setting the first capacitor C1, utilizes the characteristics of the capacitor that it passes AC but blocks DC, and can prevent the DC component of the positive envelope signal Ue+ from passing through, and allow the AC component of the positive envelope signal Ue+ to pass through, so as to obtain a first AC signal AS1 that only includes the AC component of the positive envelope signal Ue+.

[0054] like Figure 7 As shown, the rectifier module 220 may include a second diode D2, the anode of the second diode D2 is connected to the input end of the rectifier module 220, and the cathode of the second diode D2 is connected to the output end of the rectifier module 220. The unidirectional conduction direction of the second diode D2 is from the anode to the cathode of the second diode D2, and the second diode D2 allows the portion of the first AC signal AS1 whose voltage value is greater than zero to pass through, and prohibits the portion of the first AC signal AS1 whose voltage value is less than or equal to zero to pass through.

[0055] like Figure 7 As shown, the peak acquisition module 230 may include a second capacitor C2 and a third resistor R3, one end of the second capacitor C2 and one end of the third resistor R3 are both connected to the connection point between the input end and the output end of the peak acquisition module 230, and the other end of the second capacitor C2 and the other end of the third resistor R3 are both grounded GND.

[0056] See also Figure 8 , Figure 8 FIG. 1 is a block diagram of a radio frequency parameter acquisition circuit in yet another embodiment of the present application. Figure 8As shown, the first effective value acquisition unit 300 includes a signal isolation module 310 and an effective value acquisition module 320 which are sequentially connected to the signal processing unit 100. The signal isolation module 310 is used to isolate the first peak acquisition unit 200 from the effective value acquisition module 320, and output the positive envelope signal Ue+ received by the input end through the output end. The effective value acquisition module 320 is used to receive the positive envelope signal Ue+ through the input end, and obtain the first effective value Urms1 of the positive envelope signal Ue+.

[0057] Therefore, the RF parameter acquisition circuit 10 in the present application can improve the accuracy of the first peak value Um1 and the first effective value Urms1 by setting the signal isolation module 310 to isolate the first peak acquisition unit 200 from the effective value acquisition module 320, and by setting the effective value acquisition module 320, it can achieve the acquisition of the first effective value Urms1 of the forward envelope signal Ue+.

[0058] Please also read Fig. 9 , Fig. 9 FIG. 1 is a circuit diagram of a first effective value acquisition unit in an embodiment of the present application. Fig. 9 As shown, the signal isolation module 310 may include a third diode D3, the anode of the third diode D3 is connected to the input end of the signal isolation module 310, and the cathode of the third diode D3 is connected to the output end of the signal isolation module 310. The unidirectional conduction direction of the third diode D3 is from the anode to the cathode of the third diode D3, so as to isolate the first peak value acquisition unit 200 from the effective value acquisition module 320.

[0059] like Fig. 9 As shown, the effective value acquisition module 320 may include a third capacitor C3 and a fourth resistor R4, one end of the third capacitor C3 and one end of the fourth resistor R4 are both connected to the connection point between the input end and the output end of the effective value acquisition module 320, and the other end of the third capacitor C3 and the other end of the fourth resistor R4 are both grounded GND.

[0060] In one or more embodiments, the radio frequency parameters further include a reflection coefficient modulus value, and the reflection coefficient modulus value is calculated based on the first peak value Um1 and the first effective value Urms1.

[0061] Therefore, the RF parameter acquisition circuit 10 in the present application can also calculate the reflection coefficient modulus value according to the first peak value Um1 and the first effective value Urms1, and can comprehensively determine the matching condition between the RF power supply RF and the load RL according to the voltage standing wave ratio and the reflection coefficient modulus value.

[0062] Specifically, if the reflection coefficient modulus is |Γ|, then |Γ|=Um1 / Urms1.

[0063] See also Fig.10 , Fig.10 for Figure 1 The radio frequency parameter acquisition circuit shown also includes a block diagram of a second effective value acquisition unit. Fig.10 As shown, the RF parameter acquisition circuit 10 also includes a second effective value acquisition unit 500, which is connected to the signal processing unit 100, and is used to receive the voltage envelope signal Ue and obtain the second effective value Urms2 of the voltage envelope signal Ue. The RF parameters also include a total power value, an incident power value, a reflected power value, and a forward power value, which are calculated based on the second effective value Urms2, the reflection coefficient modulus value, and the characteristic impedance value of the output path of the RF power supply RF.

[0064] Therefore, the RF parameter acquisition circuit 10 in the present application directly obtains the effective value of the voltage envelope signal Ue, that is, the second effective value Urms2, by configuring the second effective value acquisition unit 500, and can calculate the total power value, the incident power value, the reflected power value and the forward power value according to the second effective value Urms2, the reflection coefficient modulus value and the characteristic impedance value of the output path of the RF power supply RF.

[0065] In one or more embodiments, the second effective value acquisition unit 500 may be connected to the output terminal of the signal sampling module 110 to receive the voltage envelope signal Ue.

[0066] The total power value, incident power value, reflected power value and forward power value are all the total power value, incident power value, reflected power value and forward power value of the electric energy output by the radio frequency power supply RF to the load RL.

[0067] In one or more embodiments, the characteristic impedance value may be 50Ω, 75Ω, etc.

[0068] Specifically, the total power value is calculated based on the second effective value Urms2 and the characteristic impedance value of the output path of the RF power supply RF, the incident power value and the reflected power value are both calculated based on the total power value, the reflection coefficient modulus value and the characteristic impedance value, and the forward power value is calculated based on the incident power value and the reflected power value.

[0069] Furthermore, if the total power value is P, the incident power value is Pf, the reflected power value is Pr, the forward power value is Pd, and the characteristic impedance value is Z0, then P = Urms2 2 / Z0, and P=Pf+Pr, Pf=U+ 2 / Z0,Pr=|Γ| 2 ×U+ 2 / Z0, Pd=Pf-Pr. Wherein U+ is the forward wave voltage value, and the total power value is the ratio of the square of the second effective value Urms2 to the characteristic impedance value. Furthermore, the forward wave voltage value can be calculated according to the total power value, the reflection coefficient modulus value and the characteristic impedance value, and the incident power value can be calculated according to the forward wave voltage value and the characteristic impedance value. The incident power value is the ratio of the square of the forward wave voltage value to the characteristic impedance value. The reflected power value can be calculated according to the forward wave voltage value, the reflection coefficient modulus value and the characteristic impedance value. The reflected power value is the product of the square of the reflection coefficient modulus value, the square of the forward wave voltage value and the inverse of the characteristic impedance value, and the forward power value is the difference between the incident power value and the reflected power value.

[0070] In one or more embodiments, Figure 3 The control unit 400 shown can also be connected to the second effective value acquisition unit 500, for receiving the second effective value Urms2, and calculating the total power value, the incident power value, the reflected power value and the forward power value according to the second effective value Urms2, the reflection coefficient modulus value and the characteristic impedance value of the output path of the radio frequency power supply RF.

[0071] In one or more embodiments, the control unit 400 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0072] In one or more embodiments, the circuit structure and function of the second effective value acquisition unit 500 may refer to the relevant content of the effective value acquisition module 320 in any of the aforementioned embodiments, and will not be repeated here.

[0073] In one or more embodiments, the peak value acquisition module 230 has a first acquisition parameter according to the capacitance value of the second capacitor C2 and the resistance value of the third resistor R3, and acquires the first peak value Um1 of the first AC signal AS1 according to the first acquisition parameter. The effective value acquisition module 320 has a second acquisition parameter according to the capacitance value of the third capacitor C3 and the resistance value of the fourth resistor R4, and acquires the first effective value Urms1 of the forward envelope signal Ue+ according to the second acquisition parameter. The second effective value acquisition unit 500 may also include a fourth capacitor and a fifth resistor (not shown in the figure), and has a third acquisition parameter according to the capacitance value of the fourth capacitor and the resistance value of the fifth resistor, and acquires the second effective value Urms2 of the voltage envelope signal Ue according to the third acquisition parameter.

[0074] In one or more embodiments, the third acquisition parameter may be greater than the second acquisition parameter, or the third acquisition parameter may be the same as the second acquisition parameter, and the second acquisition parameter may be greater than the first acquisition parameter, so as to obtain required values ​​for different signals respectively.

[0075] Furthermore, the difference between the second acquisition parameter and the first acquisition parameter is greater than the third preset value, so that the acquired first peak value Um1, the first effective value Urms1, and the second effective value Urms2 are more accurate.

[0076] Furthermore, the first acquisition parameter, the second acquisition parameter and the third acquisition parameter may all be time constants to reflect the overall voltage change of the capacitor and the resistor.

[0077] In one or more embodiments, a first signal follower (not shown) may be further provided between the signal sampling module 110 and the signal interception module 120 to keep the waveform of the voltage envelope signal Ue transmitted to the signal interception module 120 .

[0078] In one or more embodiments, a second signal follower (not shown) may be further provided between the signal sampling module 110 and the second effective value acquisition unit 500 to keep the waveform of the voltage envelope signal Ue transmitted to the second effective value acquisition unit 500 .

[0079] The RF parameter acquisition circuit 10 of the present application, through the above-mentioned structure, utilizes a series of waveform transformations and value taking of the voltage envelope signal Ue, and can meet the requirements for obtaining RF parameters including voltage standing wave ratio, reflection coefficient modulus, total power value, incident power value, reflected power value and forward power value when the RF power supply RF outputs electric energy to the load RL, so as to better output electric energy to the load RL.

[0080] See also Fig.11 , Fig.11 FIG. 1 is a block diagram of a radio frequency power supply system in an embodiment of the present application. Fig.11As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RF and a radio frequency parameter acquisition circuit 10 in any of the aforementioned embodiments.

[0081] Please refer again Figure 1 .like Figure 1 As shown, the RF parameter acquisition circuit 10 includes a signal processing unit 100, a first peak acquisition unit 200, and a first effective value acquisition unit 300. The signal processing unit 100 is used to connect to the output path of the RF power supply RF to collect the voltage envelope signal Ue when the RF power supply RF outputs electric energy to the load RL, and retain the part of the waveform of the voltage envelope signal Ue where the voltage value is greater than zero as the positive envelope signal Ue+. The first peak acquisition unit 200 is connected to the signal processing unit 100, and the first peak acquisition unit 200 is used to filter out the DC component of the positive envelope signal Ue+ to obtain a first AC signal AS1 including only the AC component of the positive envelope signal Ue+, and obtain the first peak value Um1 of the first AC signal AS1. The first effective value acquisition unit 300 is connected to the signal processing unit 100, and the first effective value acquisition unit 300 is used to obtain the first effective value Urms1 of the positive envelope signal Ue+. The radio frequency parameters when the radio frequency power supply RF outputs electric energy to the load RL at least include a voltage standing wave ratio, and the voltage standing wave ratio is calculated based on the first peak value Um1 and the first effective value Urms1.

[0082] The more specific structure of the radio frequency parameter acquisition circuit 10 may refer to the relevant content of the radio frequency parameter acquisition circuit 10 in any of the aforementioned embodiments, which will not be described in detail here.

[0083] like Fig.11 As shown, the radio frequency power source RF can be used to connect with the load RL to output electrical energy to the load RL.

[0084] The RF parameter acquisition circuit 10 and the RF power supply RF device of the present application, through the above-mentioned structure, utilize a series of waveform transformations and value taking of the voltage envelope signal Ue to meet the requirements for obtaining RF parameters including voltage standing wave ratio, reflection coefficient modulus, total power value, incident power value, reflected power value and forward power value when the RF power supply RF outputs electric energy to the load RL, so as to better output electric energy to the load RL.

[0085] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency parameter acquisition circuit, characterized in that: include: A signal processing unit, connected to an output path of the RF power supply, to collect a voltage envelope signal when the RF power supply outputs electric energy to a load, and retain a portion of the voltage envelope signal waveform having a voltage value greater than zero as a positive envelope signal; a first peak value acquisition unit connected to the signal processing unit, the first peak value acquisition unit being used to filter out a DC component of the forward envelope signal to obtain a first AC signal including only an AC component of the forward envelope signal, and to obtain a first peak value of the first AC signal; a first effective value acquisition unit, connected to the signal processing unit, and configured to acquire a first effective value of the forward envelope signal; The RF parameters when the RF power supply outputs electric energy to the load include at least a voltage standing wave ratio, and the voltage standing wave ratio is calculated based on the first peak value and the first effective value.

2. The radio frequency parameter acquisition circuit according to claim 1, characterized in that: The voltage standing wave ratio is a ratio of a sum of the first effective value and the first peak value to a difference between the first effective value and the first peak value.

3. The radio frequency parameter acquisition circuit according to claim 1, characterized in that: The signal processing unit includes a signal sampling module and a signal interception module, the input end of the signal sampling module is used to connect to the output path of the RF power supply, the output end of the signal sampling module is connected to the input end of the signal interception module, and the output end of the signal interception module is connected to the first peak value acquisition unit and the first effective value acquisition unit respectively; The signal sampling module is used to collect the voltage envelope signal when the RF power supply outputs electric energy to the load; The signal interception module is used to receive the voltage envelope signal, retain the portion of the voltage envelope signal waveform with a voltage value greater than zero as the forward envelope signal, and output the forward envelope signal to the first peak value acquisition unit and the first effective value acquisition unit respectively.

4. The radio frequency parameter acquisition circuit according to claim 3, characterized in that: The signal interception module includes a first diode, the anode of the first diode is connected to the input end of the signal interception module, and the cathode of the first diode is connected to the output end of the signal interception module; The unidirectional conduction direction of the first diode is from the anode to the cathode of the first diode, and the first diode allows a portion of the voltage envelope signal whose voltage value is greater than zero to pass through, and prohibits a portion of the voltage envelope signal whose voltage value is less than or equal to zero to pass through.

5. The radio frequency parameter acquisition circuit according to claim 1, characterized in that: The first peak value acquisition unit includes a signal filtering module, a rectification module and a peak value acquisition module which are sequentially connected to the signal processing unit; The signal filtering module is used to receive the forward envelope signal through an input terminal, filter out a DC component of the forward envelope signal, and output the first AC signal including only the AC component of the forward envelope signal through an output terminal; The rectifier module is used to rectify the first AC signal received at the input end to obtain a first rectified signal, and output the first rectified signal through the output end; The peak value acquisition module is used to receive the first rectified signal through an input terminal, and acquire a peak value of the first rectified signal as the first peak value of the first AC signal.

6. The radio frequency parameter acquisition circuit according to claim 5, characterized in that: The signal filtering module comprises a first capacitor, one end of the first capacitor is connected to the input end of the signal filtering module, and the other end of the first capacitor is connected to the output end of the signal filtering module; The first capacitor is used to prevent the DC component of the forward envelope signal from passing through, and to allow the AC component of the forward envelope signal to pass through, so as to obtain the first AC signal including only the AC component of the forward envelope signal.

7. The radio frequency parameter acquisition circuit according to claim 1, characterized in that: The first effective value acquisition unit includes a signal isolation module and an effective value acquisition module which are sequentially connected to the signal processing unit; The signal isolation module is used to isolate the first peak value acquisition unit from the effective value acquisition module, and output the positive envelope signal received by the input end through the output end; The effective value acquisition module is used to receive the forward envelope signal through an input terminal and acquire the first effective value of the forward envelope signal.

8. The radio frequency parameter acquisition circuit according to claim 1, characterized in that: The radio frequency parameters also include a reflection coefficient modulus value, and the reflection coefficient modulus value is calculated based on the first peak value and the first effective value.

9. The radio frequency parameter acquisition circuit according to claim 8, characterized in that: The RF parameter acquisition circuit further includes a second effective value acquisition unit, the second effective value acquisition unit is connected to the signal processing unit, and the second effective value acquisition unit is used to receive the voltage envelope signal and acquire a second effective value of the voltage envelope signal; Among them, the RF parameters also include a total power value, an incident power value, a reflected power value and a forward power value, and the total power value, the incident power value, the reflected power value and the forward power value are calculated based on the second effective value, the reflection coefficient modulus value and the characteristic impedance value of the output path of the RF power supply.

10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and a radio frequency parameter acquisition circuit as described in any one of claims 1 to 9.

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