Amplification observation device

Abstract

Provided is a magnification observation device capable of magnifying and observing a large object while having vibration resistance. The magnification observation device comprises a supporting column extending in the vertical direction; comprising a track and a holding body; and an observation head. The rail is supported so as to be rotatable about a first rotation axis parallel to the horizontal direction such that the first rotation axis passes through the movable table. The magnification observation device further includes a block detachably attached to a horizontal upper surface of the mounting table, and a surface for an object to be observed is disposed closer to the observation head in a vertical direction. The position of the block can be changed in the horizontal direction by moving the carrying table. The adjustable angular position includes an angular position at which a movement direction of the holder is orthogonal to the horizontal upper surface.

Description

Technical Field

[0001] The invention relates to a magnifying observation device. Background Art

[0002] Japanese Patent Application Laid-Open No. 2015-127780 discloses a magnifying observation device (microscope device 100). Figure 3 As shown, the magnification observation device described in Japanese Patent Application Laid-Open No. 2015-127780 includes an observation head (microscope head unit 4) that magnifies and observes an object (observation object S).

[0003] The observation head is supported by a support column (support base 40).

[0004] In the magnifying observation device described in Japanese Patent Application Laid-Open No. 2015-127780, the first rotation axis (swing axis 45) is provided on the support column at the height of the object to ensure eccentricity.

[0005] Meanwhile, in the magnification observation device described in Japanese Patent Laid-Open No. 2015-127780, when observing a large object in a magnified manner, it is also necessary to increase the size of the swing section 46 and the head arm 49 constituting the support column (support base 40).

[0006] If the swing section 46 and the head arm 49 are enlarged, the center of gravity of the rotating (swinging) part is inevitably greatly separated from the first rotation axis. Therefore, if the magnifying observation device described in Japanese Patent Laid-Open No. 2015-127780 is configured to magnify and observe a large object, it may lose vibration resistance. Summary of the invention

[0007] The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a magnifying observation device that can generate an image for observing a large object in a magnified manner while having vibration resistance.

[0008] According to one embodiment of the present invention, the magnifying observation device magnifies and observes the object. The magnifying observation device includes a base, a mounting table, a support column, a movable table, an observation head, a block and an image generating unit. The mounting table is arranged on the base and has a horizontal upper surface. The support column extends from the base in a vertical direction. The movable table includes a track and a retaining body. The track is supported by the support column so as to be rotatable around a first rotation axis parallel to a first direction, which is a direction along the horizontal upper surface. The retaining body can be moved along the track. The observation head includes a camera. The camera captures an image of the object through an objective lens to generate an image of the object. The observation head is held by the retaining body so that the optical axis of the camera is along the moving direction of the retaining body of the movable table. The block is detachably attached to the horizontal upper surface of the mounting table, and the object is mounted on the block. The image generating unit generates an observation image based on the image of the camera from the observation head. The first rotation axis passes through the movable table. The position of the block attached to the horizontal upper surface is variable in a second direction, which is a direction along the horizontal upper surface. The first direction and the second direction are orthogonal to each other. The rails of the movable stage may be adjusted relative to the support columns to an angular position in which the moving direction of the holding body of the movable stage is orthogonal to the horizontal upper surface.

[0009] According to the magnifying observation device of the present invention, a large object can be observed in a magnified manner while being resistant to vibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 is a schematic diagram showing a front view of the magnified observation device;

[0011] Figure 2 is a perspective view of the enlarged viewing device as seen from the front side above;

[0012] Figure 3 is a stereoscopic view of the enlarged viewing device as seen from the upper rear side;

[0013] Figure 4 is a right side view of the enlarged viewing device;

[0014] Figure 5 is a front view of the magnified observation device;

[0015] Figure 6 is a perspective view of an enlarged viewing device with the block removed from the mounting table;

[0016] Figure 7 is an enlarged perspective view of the enlarged viewing apparatus with the rotating plate removed from the block;

[0017] Figure 8 is an enlarged perspective view of the enlarged observation device, wherein the object is removed from the rotating plate;

[0018] Fig. 9is an enlarged stereogram of an enlarged viewing device, in which the blocks are stacked in two levels;

[0019] Fig.10 It is an exploded perspective view of the support column;

[0020] Fig.11 is an enlarged right side view of the lower portion of the enlarged viewing device;

[0021] Fig.12 is a bottom view showing a plurality of base legs provided in the magnifying viewing device; and

[0022] Fig.13 is a bottom view showing a variation of a plurality of base legs provided in the magnifying observation device. DETAILED DESCRIPTION

[0023] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. It should be noted that the same or corresponding parts are represented by the same reference numerals in the accompanying drawings, and their descriptions are not repeated. In addition, terms indicating positions or directions, such as "upper" and "lower", are sometimes used in the following description. These terms are used to facilitate understanding of the embodiments, and are not limited to "upper", "lower", etc. in the vertical direction in a strict sense, unless otherwise expressly specified.

[0024] Will refer to Figure 1 The outline of the magnifying observation device 10 according to the embodiment of the present invention will be described. Figure 1 1 is a schematic diagram showing a front view of the magnifying observation device 10 .

[0025] like Figure 1 As shown, the magnification observation device 10 provides an observation image of the object OB in a magnified manner. The magnification observation device 10 includes a base 1, a stage 2, a support column 5, a movable stage 6, an observation head 4, a block 3, and an image generation unit 7.

[0026] The mounting table 2 is disposed on the base 1 and has a horizontal upper surface 20. The support column 5 extends from the base 1 in a vertical direction.

[0027] The movable stage 6 includes a rail 61 and a holder 62. The rail 61 is supported by the support column 5 so as to be rotatable about a first rotation axis 11 parallel to a first direction (Y direction) along the horizontal upper surface 20. The holder 62 is movable along the rail 61.

[0028] The observation head 4 includes a camera 42. The camera 42 captures an image of the object OB via the objective lens 40 to generate an image of the object OB. The observation head 4 is held by the holding body 62 so that the optical axis L of the camera 42 is along the moving direction of the holding body 62 of the movable stage 6. The magnifying observation device 10 can adjust the focus of the camera 42 by moving the observation head 4 using the movable stage 6. In addition, the rail 61 is supported relative to the support column 5 in a manner rotatable around a first rotation axis 11 parallel to a first direction (Y direction) that is a direction along the horizontal upper surface 20, and therefore, the camera 42 also rotates around the first rotation axis 11 according to the rotation of the rail 61. As a result, the magnifying observation device 10 can provide an observation image in which the surface of the end face and side face of the object OB including the groove and the like is magnified.

[0029] The block 3 is detachably attached to the horizontal upper surface 20 of the mounting table 2, and the object OB is mounted on the block 3. The image generation unit 7 generates an observation image based on the image from the camera 42 of the observation head 4. The first rotation axis 11 passes through the movable table 6. The position of the block 3 attached to the horizontal upper surface 20 can be changed in the second direction (X direction), which is the direction along the horizontal upper surface 20.

[0030] The first direction (Y direction) and the second direction (X direction) are orthogonal to each other. The rail 61 of the movable stage 6 can be adjusted relative to the support column 5 to an angular position where the moving direction of the holder 62 of the movable stage 6 is orthogonal to the horizontal upper surface 20.

[0031] Since the first rotation axis 11 passes through the movable stage 6, even when the magnifying observation device 10 is enlarged in order to tilt and observe a large object OB, the distance from the center of gravity of the part rotating around the first rotation axis 11 to the first rotation axis 11 is short. Therefore, even when the magnifying observation device is enlarged in order to tilt and observe a large object OB, the magnifying observation device 10 has vibration resistance. In addition, since the first rotation axis 11 passes through the movable stage 6, the magnifying observation device 10 loses eccentricity. However, the block 3 on which the object OB is placed makes the object OB approach the observation head 4 along the Z direction, and is attached to the mounting table 2 while the position is changed along the X direction. Therefore, since the observation head 4 rotates around the first rotation axis 11, that is, the observation head 4 is tilted, the magnifying observation device 10 can provide an image in which the object OB is magnified, tilted, and observed. As described above, the magnifying observation device 10 can generate an image in which a large object OB is magnified, tilted, and observed while having vibration resistance.

[0032] Reference Figures 2 to 5 , the magnifying observation device 10 according to an embodiment more suitable for the actual machine of the present invention will be described. Figure 2 It is a perspective view of the magnifying observation device 10 viewed from the upper front side. Figure 3 It is a perspective view of the magnifying observation device 10 viewed from the upper rear side. Figure 4 It is a right side view of the enlarged observation device 10 . Figure 5 It is a front view of the magnified observation device 10 .

[0033] like Figure 2 As shown, the magnification observation device 10 is a device for magnifying and observing the object OB. The magnification observation device 10 includes a base 1, a mounting table 2, a block 3, an observation head 4, a support column 5, a movable stage 6, and an image generation unit 7.

[0034] The stage 2 is provided on the base 1 and has a horizontal upper surface 20. The block 3 can be attached to and detached from the horizontal upper surface 20 of the stage 2, and the object OB is placed on the block 3. The observation head 4 enlarges and observes the object OB. The support column 5 is provided on the base 1 and supports the observation head 4. The movable stage 6 allows the observation head 4 to approach or leave the horizontal upper surface 20 of the stage 2 along the optical axis L of the camera 42 of the observation head 4. The movable stage 6 allows the observation head 4 to approach or leave the horizontal upper surface 20 of the stage 2 along the Z direction when the rail 61 of the movable stage 6 is adjusted relative to the support column 5 to an angular position in which the moving direction of the holder 62 of the movable stage 6 is orthogonal to the horizontal upper surface 20. The Z direction is a direction from the horizontal upper surface 20 of the stage 2 to the observation head 4. The image generation unit 7 generates an observation image of the object OB for enlarged observation.

[0035] The observation head 4 is rotatable about a first rotation axis 11 parallel to the Y direction. The Y direction is a direction along the horizontal upper surface 20 of the stage 2. The first rotation axis 11 passes through the movable stage 6. The position of the block 3 attached to the horizontal upper surface 20 of the stage 2 can be changed in the X direction. The X direction is a direction along the horizontal upper surface 20 of the stage 2. The X direction, the Y direction, and the Z direction are orthogonal to each other.

[0036] Since the first rotation axis 11 passes through the movable stage 6, even when the magnifying observation device 10 is enlarged to observe a large object OB, the distance from the center of gravity of the portion rotating around the first rotation axis 11 to the first rotation axis 11 is short. Therefore, even when the magnifying observation device is enlarged to observe a large object OB, the magnifying observation device 10 has vibration resistance. In addition, since the first rotation axis 11 passes through the movable stage 6, the magnifying observation device 10 loses eccentricity. However, the block 3 on which the object OB is placed makes the object OB approach the observation head 4 along the Z direction, and is attached to the mounting table 2 while the position is changed along the X direction. Therefore, since the observation head 4 rotates around the first rotation axis 11, that is, the observation head 4 is tilted, the magnifying observation device 10 can provide an image of the end surface of the object OB having, for example, a disk shape, observed in an enlarged manner. As described above, the magnifying observation device 10 can generate an observation image for observing a large object OB in an enlarged manner while having vibration resistance.

[0037] In the following, reference will be made to Figures 2 to 5 The magnifying observation device 10 will be described in more detail.

[0038] like Figure 2 As shown, the stage 2 can make the horizontal upper surface 20 move relative to the base 1 in the X direction and the Y direction, and the block 3 is allowed to be attached to the horizontal upper surface 20. This stage 2 is also called an XY direction stage. The stage 2 as an XY direction stage includes a base portion 26 at the bottom, an X direction stage 22 in the middle, and a Y direction stage 21 at the top. The base portion 26 is fixed to the base 1. The X direction stage 22 is placed on the base portion 26 and can be moved relative to the base portion 26 in the X direction. The Y direction stage 21 is placed on the X direction stage 22 and can be moved relative to the X direction stage 22 in the Y direction. The horizontal upper surface 20 of the Y direction stage 21 can be attached to the block 3 and detached from the block 3.

[0039] The magnified observation device 10 may further include a display 72. The display 72 displays an image based on the image data generated by the image generation unit 7. That is, the display 72 displays a magnified image of the object OB. The image generation unit 7 and the display 72 are Figure 3 and not shown in subsequent figures.

[0040] The magnification observation device 10 further includes an information processing unit 71. The information processing unit 71 includes a control circuit, an electric circuit, etc. The control circuit and the electric circuit control and drive the movable stage 6 and the mounting stage 2 as an XY direction stage.

[0041] like Figures 2 to 5As shown, the observation head 4 includes a plurality of (for example, four) objective lenses 40, a rotating wheel 41, and an imaging device having a camera 42. The plurality of objective lenses 40 have different magnifications. The rotating wheel 41 selects any one objective lens 40 from the plurality of objective lenses 40 by rotating. The selected objective lens 40 is used to magnify and observe the object OB.

[0042] The imaging device includes a non-telecentric lens (not shown), a camera 42 (imaging element), and a transmission unit (not shown). The objective lens 40 selected by the rotating wheel 41 and the non-telecentric lens observe the object OB. The camera 42 (imaging element) captures an image of the object OB observed in a magnified manner, thereby creating image data (data of the original image) of the object OB observed in a magnified manner. The transmission unit transmits the created image data to the image generation unit 7. The image generation unit 7 generates an observed image (an image processed for observation) of the object OB observed in a magnified manner based on the received data.

[0043] The magnifying observation device 10 may include a controller (not shown). The controller allows a user to operate the stage 2 as an XY direction stage, the movable stage 6, and the rotating wheel 41. The operations that can be performed by the controller are the movement of the stage 2 and the movable stage 6 as the XY direction stage, and the rotation of the rotating wheel 41.

[0044] The magnifying observation device 10 further includes a rotating holding body 8. The rotating holding body 8 is provided on the supporting column 5 in a manner rotatable around a first rotation axis 11. The rotating holding body 8 holds the movable stage 6.

[0045] The rotating holding body 8 eliminates the need for a rotating mechanism in each of the movable stage 6 and the observation head 4. Therefore, the magnification observation device 10 can have a simple configuration.

[0046] The rotating holding body 8 is rotatably connected to the support column 5 at the end in the Y direction, and holds the movable stage 6 at the end in the opposite direction of the Y direction. The first rotation axis 11 also passes through the rotating holding body 8 together with the movable stage 6. The rotating holding body 8 has a shaft body 88 (see Fig.10 ). The shaft body 88 reaches the inside of the support column 5. The shaft body 88 constitutes a rotating mechanism.

[0047] The rotating holding body 8 includes a Z-direction driving mechanism (not shown) therein. The Z-direction driving mechanism moves the observation head 4 in the Z-direction via the movable stage 6.

[0048] like Figure 2 , Figure 3 and Figure 5 As shown, the magnifying observation device 10 further includes a locking mechanism 9. The locking mechanism 9 can fix the rotation of the rotation holding body 8 relative to the support column 5.

[0049] The rotating holding body 8 is fixed to the supporting column 5 by a locking mechanism 9. Therefore, the observation head 4 held by the rotating holding body 8 via the movable stage 6 is fixed at an angle suitable for magnifying and observing the object OB. As a result, the magnifying observation device 10 can obtain an image in which the object OB is appropriately observed in a magnified manner.

[0050] like Fig.10 As shown, the locking mechanism 9 is provided on the support column 5. The locking mechanism 9 includes a rod 90, a locking shaft (not shown) and a brake bracket 58. The rod 90 is arranged on the outside of the support column 5, and the locking shaft and the brake bracket 58 are arranged on the inside of the support column 5. The rod 90 rotates in one direction to fix the rotating retaining body 8, and rotates in the other direction to release the fixation of the rotating retaining body 8. The locking shaft rotates together with the rod 90. The locking shaft rotates in one direction to reduce the diameter of the brake bracket 58. The locking shaft rotates in the other direction to increase the diameter of the brake bracket 58. When the diameter of the brake bracket 58 is reduced, the shaft body 88 of the rotating retaining body 8 is fixed. When the diameter of the brake bracket 58 is increased, the fixation of the shaft body 88 of the rotating retaining body 8 is released.

[0051] like Figure 4 As shown, the support column 5 includes a limiting member 50. The rotation holding body 8 includes an abutment member 80. The abutment member 80 abuts on the limiting member 50 at an angular position where the moving direction of the holding body 62 relative to the rail 61 of the movable stage 6 is orthogonal to the horizontal upper surface 20.

[0052] The magnified observation device 10 further includes a tilt angle measuring unit 13, a tilt angle display unit (not shown), and a display angle correction unit 17. The tilt angle measuring unit 13 measures the tilt angle that is an angle formed by the moving direction of the holding body 62 relative to the rail 61 of the movable stage 6 and the direction orthogonal to the horizontal upper surface 20. The tilt angle display unit displays the tilt angle. When the abutting member 80 abuts on the limiting member 50, the display angle correction unit 17 causes the tilt angle display unit to display that there is no tilt angle.

[0053] Since the state in which the abutment member 80 abuts on the limiting member 50 is defined as an inclination angle of 0°, the convenience of the user is improved. However, due to the angular position deviation of the inclination angle measurement unit 13, the abutment member 80 and the limiting member 50, there is a case where the inclination angle measured by the inclination angle measurement unit 13 does not strictly indicate 0°. In this case, the display angle correction unit 17 causes the inclination angle display unit to display that there is no inclination angle (for example, 0°). Therefore, due to the angular position deviation, etc., even in the case where the inclination angle measured by the inclination angle measurement unit 13 does not strictly indicate 0° (for example, within the range of ±1°), the inclination angle is displayed as 0°. As a result, the magnifying observation device 10 can improve the convenience of the user.

[0054] The tilt angle measuring unit 13 includes a base side angle sensor 14, a rotation side angle sensor 15 and a subtractor 16. The base side angle sensor 14 is provided on the base 1. The base side angle sensor 14 measures a base side angle, which is an angle formed by a vertical direction and a Z direction. The rotation side angle sensor 15 is provided on the rotating holding body 8. The rotation side angle sensor 15 measures a rotation side angle, which is an angle formed by a direction observed by the observation head 4 and a vertical direction. The subtractor 16 subtracts the base side angle from the rotation side angle to calculate the tilt angle (the angle formed by a direction observed by the observation head 4 and the Z direction). The base side angle sensor 14 and the rotation side angle sensor 15 are, for example, acceleration sensors.

[0055] In the display angle correction unit 17, an angle (for example, ±1°) considered to be affected by the angular position deviation or the like is preset. When the tilt angle is within the preset angle range, for example, when the tilt angle is -1° or more and +1° or less, the display angle correction unit 17 causes the tilt angle display unit to display that there is no tilt angle (for example, 0°). The tilt angle display unit may be Figure 2 The display 72 shown in FIG.

[0056] like Figure 5 As shown, the rotating holding body 8 has a rod-shaped handle 81 . The central axis 82 of the rod-shaped handle 81 points to the first rotation axis 11 and is along a plane orthogonal to the first rotation axis 11 .

[0057] The rod-shaped handle 81 allows the user to easily rotate the rotating holding body 8. Therefore, the magnifying observation device 10 can improve the convenience of the user.

[0058] The rod-shaped handle 81 has a shape that is easy to grasp, such as a cylindrical shape. The rod-shaped handle 81 has a plurality of anti-slip circumferential bands 83 along the direction of the central axis 82. The rod-shaped handle 81 is tilted from the rotating holding body 8 (at Figure 5 In the state shown in the figure, the structure protrudes between the Z direction and the direction opposite to the X direction.

[0059] Therefore, the user pushes the rod-shaped handle 81 downward to direct the direction observed by the observation head 4 toward the object OB placed on the block 3. As a result, the magnification observation device 10 can further improve the convenience of the user.

[0060] In the following, reference will be made to Figure 6 Let's explain block 3 in detail. Figure 6 It is a perspective view of the enlarged observation device 10 , in which the block 3 is removed from the mounting table 2 .

[0061] like Figure 6As shown, the horizontal upper surface 20 of the mounting table 2 has a plurality of positioning holes 23 along the second direction (X direction). The block 3 has positioning pins 33 that can be inserted into the positioning holes 23.

[0062] The position of the block 3 attached to the horizontal upper surface 20 of the mounting table 2 can be easily changed in the X direction by the positioning holes 23 and the positioning pins 33. Therefore, the magnification observation device 10 can improve the convenience of the user.

[0063] In the bottom view, the positioning pin 33 is positioned at the center of the block 3. Therefore, the block 3 is positioned at the center in the bottom view by the positioning pin 33, and is thus firmly secured on the horizontal upper surface 20 of the stage 2. As a result, the magnification observation device 10 can appropriately magnify and observe a large object OB.

[0064] The horizontal upper surface 20 of the stage 2 also has a plurality of anti-rotation holes 24 along the X direction. The block 3 also has anti-rotation pins 34 that can be inserted into the anti-rotation holes 24. The distance between the positioning pins 33 and the anti-rotation pins 34 is equal to the distance between the positioning holes 23 and the anti-rotation holes 24. Therefore, the block 3 is attached to the horizontal upper surface 20 of the stage 2 by inserting the positioning pins 33 and the anti-rotation pins 34 into the positioning holes 23 and the anti-rotation holes 24. As a result, the block 3 does not rotate and is therefore further stabilized on the horizontal upper surface 20 of the stage 2. As a result, the magnifying observation device 10 can more appropriately magnify and observe a large object OB.

[0065] The anti-rotation hole 24 may have a diameter having a margin in the X direction compared to the positioning hole 23 (i.e., may be an elongated hole). The edge of the anti-rotation hole 24 may be chamfered into a mortar shape. As a result, the anti-rotation pin 34 is easily inserted into the anti-rotation hole 24 while performing the anti-rotation function. Therefore, the position of the block 3 attached to the horizontal upper surface 20 of the mounting table 2 can be easily changed in the X direction. As a result, the magnifying observation device 10 can improve the convenience of the user.

[0066] The mounting table 2 further includes a fixing screw hole 25. The block 3 further includes a fixing screw 35 that can be screwed into the fixing screw hole 25. When the positioning pin 33 is inserted into the positioning hole 23, the fixing screw 35 corresponds to the position of the fixing screw hole 25.

[0067] The positioning pin 33 is inserted into the positioning hole 23 by aligning the position of the fixing screw 35 with the fixing screw hole 25. Therefore, when the block 3 is attached to the horizontal upper surface 20 of the mounting table 2, the block 3 can be easily attached by aligning the position of the fixing screw 35 with the fixing screw hole 25. Therefore, the position of the block 3 attached to the horizontal upper surface 20 of the mounting table 2 can be easily changed in the X direction. As a result, the magnifying observation device 10 can improve the convenience of the user.

[0068] In the case where the stage 2 has the anti-rotation hole 24 and the block 3 has the anti-rotation pin 34, the positioning pin 33 and the anti-rotation pin 34 are inserted into the positioning hole 23 and the anti-rotation hole 24 by aligning the position of the fixing screw 35 with the fixing screw hole 25. Therefore, the position of the block 3 attached to the horizontal upper surface 20 of the stage 2 can be easily changed in the X direction. As a result, the magnifying observation device 10 can improve the convenience of the user.

[0069] In addition, since the fixing screw 35 is screwed into the fixing screw hole 25, the block 3 is prevented from rattling relative to the mounting table 2. Therefore, the block 3 is reliably fixed to the horizontal upper surface 20 of the mounting table 2, and is thus further stabilized. As a result, the magnification observation device 10 can more appropriately magnify and observe a large object OB.

[0070] In the following, reference will be made to Figure 7 and Figure 8 The rotating plate 100 placed on the block 3 will be described in detail. Figure 7 It is an enlarged perspective view of the enlarged observation device 10 , in which the rotating plate 100 is removed from the block 3 . Figure 8 1 is an enlarged perspective view of the magnified observation apparatus 10 , in which the object OB is removed from the rotating plate 100 .

[0071] like Figure 7 and Figure 8 As shown, the magnifying observation device 10 further includes a rotating plate 100. The rotating plate 100 is mounted on the block 3 so as to be rotatable about a second rotating axis 12 orthogonal to the horizontal upper surface 20. The object OB is placed on the rotating plate 100.

[0072] The object OB can be easily rotated around the second rotation axis 12 together with the rotating plate 100. Therefore, the portion of the object OB observed in a magnified manner can be easily changed by rotation. As a result, the magnified observation device 10 can improve the convenience of the user.

[0073] The rotating plate 100 includes a metal disk 101 , a resin protective member 108 , and radial pins 109 arranged radially.

[0074] like Figure 8As shown, the metal disk 101 has grooves 102 to 106 on the surface (upper surface 107) on which the object OB is placed. For example, when there are water droplets in the object OB, the grooves 102 to 106 guide the water droplets. The grooves 102 to 106 further reduce the contact area between the metal disk 101 and the object OB, thereby preventing adhesion between the metal disk 101 and the object OB. The grooves 102 to 106 include a pair of finger insertion grooves 102, double circular grooves 103 and 104, a transverse groove 105, and a longitudinal groove 106. The pair of finger insertion grooves 102 face each other and are formed from the outer edge of the metal disk 101 toward the center (the second rotation axis 12). The finger insertion groove 102 is a portion for the user's finger to be inserted when the user removes the object OB from the rotating plate 100. The double circular grooves 103 and 104 include a large diameter circular groove 103 and a small diameter circular groove 104. The double circular grooves 103 and 104 communicate with a pair of finger insertion grooves 102. A transverse groove 105 connects the pair of finger insertion grooves 102. A longitudinal groove 106 vertically passes through the transverse groove 105 at the center of the metal disk 101 and reaches the outer edge of the metal disk 101.

[0075] like Figure 7 As shown, a resin protective member 108 is attached to the lower surface of the metal disk 101. The resin protective member 108 prevents the metal disk 101 from directly touching the block 3. If the metal disk 101 rotates while directly touching the block 3, problems such as powder generation occur due to sliding between the metal disk 101 and the block 3. However, the resin protective member 108 prevents the metal disk 101 from directly touching the block 3, and thus problems such as powder generation are prevented. The resin protective member 108 is arranged to be rotationally symmetrical with respect to the center of the metal disk 101 because the metal disk 101 is not tilted with respect to the block 3.

[0076] The number of radial pins 109 is, for example, four. Each radial pin 109 points to the center of the metal disk 101 and protrudes from the outer edge of the metal disk 101. When the metal disk 101 rotates, the radial pins 109 are the parts to be grasped. The radial pins 109 are also used to position the object OB relative to the rotating plate 100.

[0077] like Figure 8 As shown, the rotating plate 100 includes a reflecting portion 107 on at least the surface (upper surface 107 ) on which the object OB is placed, and the reflecting portion reflects light toward the observation head 4 .

[0078] When the observation head 4 magnifies and observes the object OB, light enters the observation head 4 through the reflection portion 107 serving as a reflection plate. In particular, when the observation head 4 is tilted and observes the object OB, the reflection portion 107 strongly exhibits the function as a reflection plate relative to the end of the object OB. Therefore, the observation head 4 clearly magnifies and observes the object OB. As a result, the magnification observation device 10 can appropriately magnify and observe a large object OB.

[0079] The reflecting portion 107 is not particularly limited as long as it is a portion that reflects light to the viewing head 4. The reflecting portion 107 is preferably a white portion, and more preferably white alumite. White alumite reflects light more easily than members of other colors. In addition, the reflecting portion 107 may be, for example, diffuse lighting.

[0080] The mounting table 2 has a reflection suppression portion on the horizontal upper surface 20 that hardly reflects light to the observation head 4. The reflection suppression portion is not particularly limited as long as it is a portion that hardly reflects light to the observation head 4. The reflection suppression portion is preferably a black portion, and more preferably black alumite. Black alumite is less likely to reflect light than components of other colors. The reflection suppression portion is more preferably a layer of black alumite that has been subjected to satin treatment, matt coating, and / or matting treatment.

[0081] The white alumite as the reflecting portion 107 and the black alumite as the reflection suppressing portion make the contrast between the object OB and other objects clear. Therefore, since the magnifying observation device 10 magnifies and observes the object OB more clearly, a large object OB can be observed more appropriately in a magnified manner.

[0082] The object OB is, for example, a semiconductor wafer. The semiconductor wafer as the object OB has a diameter of 150 mm, 200 mm, 300 mm, etc. The semiconductor wafer as the object OB is protected by a ring frame RF (also referred to as a belt frame). In the ring frame RF, the positioning groove is defined by a standard. The ring frame RF is placed on the rotating plate 100 together with the protected object OB in such a manner that the positioning groove is located on the radial pins 109 or the rotating plate 100.

[0083] like Figure 7 As shown, the block 3 has a rotation axis hole 36 at the position of the second rotation axis 12. The rotation plate 100 further includes a rotation axis pin 110 that can be inserted into the rotation axis hole 36.

[0084] The rotation axis hole 36 and the rotation axis pin 110 facilitate attachment and detachment of the rotation plate 100 to and from the block 3. Therefore, the magnification observation device 10 can improve user convenience.

[0085] In the bottom view, the rotation axis pin 110 is located at the center of the rotating plate 100. Therefore, the rotating plate 100 rotates around the rotation axis pin 110 at the center in the bottom view. As a result, the part of the object OB observed in a magnified manner can be more easily changed by rotation. As a result, the magnifying observation device 10 can further improve the convenience of the user.

[0086] The block 3 further includes a guide portion 37 that guides the rotation axis pin 110 of the rotation plate 100 to the rotation axis hole 36 .

[0087] The rotation axis pin 110 is inserted into the rotation axis hole 36 by being guided by the guide portion 37. Therefore, even in a case where the rotation axis hole 36 is difficult to visually identify, such as when the rotating plate 100 is larger than the block 3, the rotation axis pin 110 can be easily inserted into the rotation axis hole 36 through the guide portion 37. As a result, the magnifying observation device 10 can improve the convenience of the user.

[0088] The guide portion 37 is a sector-shaped recess extending around the position of the rotation axis hole 36. Since the guide portion 37 has a sector shape, the rotation axis pin 110 moves to the center after abutting against either side of the sector shape, so that the rotation axis pin 110 is more easily inserted into the rotation axis hole 36. Therefore, as a result, the magnifying observation device 10 can further improve the convenience of the user.

[0089] The rotation axis pin 110 of the rotating plate 100 may also be inserted into the positioning hole 23 of the mounting table 2 .

[0090] Since the rotation axis pin 110 can be inserted into the positioning hole 23, the rotation plate 100 can be directly attached to and detached from the horizontal upper surface 20 of the stage 2. Therefore, since the block 3 is not required, the magnification observation device 10 can have a simple structure. The case where the block 3 is not required is the case where it is not necessary to observe the object OB with the observation head 4 tilted.

[0091] If the rotation axis pin 110 can be inserted into the positioning hole 23 , the rotation plate 100 functions as the block 3 .

[0092] In the following, reference will be made to Fig. 9 A case where a plurality of blocks 3 are stacked will be described. Fig. 9 is an enlarged perspective view of the enlarged observation device 10, in which the blocks 3 are arranged in two stages.

[0093] like Fig. 9As shown, a plurality of blocks 3 are stacked. Among the plurality of blocks 3, the positioning pin 33 of the upper block 3 is inserted into the rotation axis hole 36 of the lower block 3.

[0094] Since the plurality of blocks 3 are stacked, the position of the object OB can be flexibly changed in the Z direction. Therefore, the magnification observation device 10 can improve the convenience of the user.

[0095] In the case where the upper block 3 also has a stop pin 34, the lower block 3 also has a block stop hole 38 for inserting the stop pin 34 of the upper block 3. Similar to the stop hole 24, the block stop hole 38 may also have a diameter having a margin in the X direction compared to the rotation axis hole 36 (i.e., it may be an elongated hole). The edge of the block stop hole 38 may also be chamfered into a mortar shape.

[0096] although Fig. 9 An upper block 3 and a lower block 3, that is, blocks 3 stacked in two stages are shown, but the blocks 3 may also be stacked in three or more stages.

[0097] In the following, reference will be made to Fig.10 The support column 5 will be described in detail. Fig.10 It is an exploded perspective view of the support column 5.

[0098] like Fig.10 As shown, the support column 5 includes an upper support column 51 and a lower support column 59. The upper support column 51 is a portion having a restricting member 50 and a brake bracket 58. The lower support column 59 is a portion provided on the base 1.

[0099] The support column 5 may have a spacer 52 between the upper support column 51 and the lower support column 59. The spacer 52 includes a thick spacer 53 and a thin spacer 54. The thick spacer 53 has a thickness (length in the up-down direction) of 40 mm to 80 mm (e.g., 60 mm). The thin spacer 54 is thinner than the thick spacer 53. The thin spacer 54 has, for example, half the thickness (length in the up-down direction) of the thick spacer 53.

[0100] The lower support column 59 has a group of outer screw holes 55t, a group of inner screw holes 56t and a pair of engaging tools 57 on the upper end surface.

[0101] The thick spacer 53 has a group of outer screws 55b and a bonding tool storage space (not shown) on the lower surface. The group of outer screws 55b is screwed with a group of outer screw holes 55t on the lower side. The bonding tool storage space stores a pair of bonding tools 57 on the lower side. The upper surface of the thick spacer 53 has the same configuration as the upper end surface of the lower support column 59, and includes a group of outer screw holes 55t, a group of inner screw holes 56t and a pair of bonding tools 57.

[0102] The thin spacer 54 has a set of inner screws 56b and a bonding tool storage space (not shown) on the lower surface. The set of inner screws 56b is screwed with a set of inner screw holes 56t on the lower side. The thin spacer 54 has a set of outer screw holes 55t and a pair of bonding tools 57 on the upper surface.

[0103] The upper support column 51 has a set of outer screws 55b and a pair of engaged tools (not shown) on the lower surface. The pair of engaged tools engages with a pair of engaging tools 57 on the lower side.

[0104] Between the upper support column 51 and the lower support column 59, the spacers 52 can be freely overlapped, except that the thin spacers 54 cannot overlap each other. Specifically, between the upper support column 51 and the lower support column 59, the thick spacers 53 can overlap, the thick spacers 53 can overlap on the thin spacers 54, and the thin spacers 54 can overlap on the thick spacers 53. In addition, the number of thick spacers 53 and the number of thin spacers 54 are not particularly limited.

[0105] Therefore, the spacer 52 allows the position of the upper support column 51 to be changed in the Z direction. Since the rotating holding body 8 is connected to the upper support column 51, and the rotating holding body 8 holds the observation head 4, the position of the observation head 4 can be changed in the Z direction by the spacer 52. As a result, the magnifying observation device 10 can improve the convenience of the user.

[0106] In addition, since a pair of engaging tools of the upper support column 51 is engaged with a pair of engaging tools 57 on the lower side, the upper support column 51 stands by itself even before being screwed when attached to the spacer 52 or the lower support column 59. Therefore, the support column 5 is prevented from falling down when the position in the Z direction is changed. As a result, the magnifying observation device 10 can improve stability.

[0107] In the following, reference will be made to Figures 11 to 13 The plurality of base legs 120 provided in the magnifying observation device 10 will be described. Fig.11 It is an enlarged right side view of the lower part of the enlarged observation device 10 . Fig.12 1 is a bottom view showing a plurality of base legs 120 provided in the magnifying observation device 10 . Fig.13 1 is a bottom view showing a modification of the plurality of base legs 120 provided in the magnifying observation device 10 .

[0108] like Fig.11As shown, the magnifying observation device 10 also includes a plurality of base legs 120. The plurality of base legs 120 are arranged on the lower surface of the base 1. The plurality of base legs 120 include a seating leg 121 and a short leg 122. The seating leg 121 is seated on a vibration isolator VR (or another horizontal plane) on which the magnifying observation device 10 is placed. The short leg 122 is shorter than the seating leg 121 in the up-down direction, and therefore does not sit on the vibration isolator VR (or another horizontal plane). The length difference d in the up-down direction between the seating leg 121 and the short leg 122 is greater than the tolerance of the base leg 120 in the up-down direction, and is approximately 0.05 mm to 0.15 mm (for example, 0.10 mm). The vibration isolator VR may be an active vibration isolator or a passive vibration isolator.

[0109] like Fig.12 As shown, in the bottom view, the centroid C1 of the seating leg 121 is located at the vertex of the convex polygon P. The centroid C2 of the short leg 122 is located on the line of the convex polygon P except the vertex of the convex polygon P or inside. Fig.12 An example in which the convex polygon P is a quadrilateral P is shown. Fig.12 In the example of FIG. 1 , the centroid C1 of the seating leg 121 is located at the vertex of the quadrilateral P, and the centroid C2 of the short leg 122 is located on the line of the quadrilateral P. Fig.13 An example is shown in which the convex polygon P is a hexagon P. Fig.13 In the example, the center C1 of the seat leg 121 is located at the vertex of the hexagon P, and the center C2 of the short leg 122 is located inside the hexagon P. The convex polygon P is not limited to the quadrilateral P ( Fig.12 ) or hexagon P( Fig.13 ), and may be a triangle or a pentagon, or may be a heptagon or more.

[0110] Only the seating legs 121 whose center C1 is located at the apex of the convex polygon P are seated on the vibration isolator VR (or another horizontal plane). Therefore, the magnifying observation device 10 does not rattle on the vibration isolator VR (or another horizontal plane). As a result, the magnifying observation device 10 can improve vibration resistance.

[0111] In the case of being placed at a position other than the vibration isolator VR (another horizontal plane, etc.), the magnifying observation device 10 may further include vibration isolating legs (not shown) to be respectively placed on the plurality of base legs 120. The vibration isolating legs are made of an elastic material (gel-like material, etc.).

[0112] All the plurality of base legs 120 placed on the anti-vibration legs are seated by the elasticity of the anti-vibration legs. Therefore, the magnifying observation device 10 can improve the vibration resistance by the anti-vibration legs on which all the base legs 120 are seated.

[0113] At the same time, the above-mentioned embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is not indicated by the above description, but by the claims, and is intended to include the meaning equivalent to the claims and all modifications within the scope. Among the configurations described in the above-mentioned embodiments, the configurations other than the configurations described as one aspect of the present invention in the "means for solving the problem" are arbitrary and can be appropriately deleted and changed.

[0114] The present invention provides a magnifying observation device and has industrial applicability.

Claims

1. A magnifying observation device for magnifying and observing an object, the magnifying observation device comprising: Pedestal; a mounting table disposed on the base and having a horizontal upper surface for an object to be observed; a support column extending vertically from the base; a movable stage including a track and a holding body movable along the track, the track being supported relative to the support column in a manner rotatable about a first rotation axis such that the first rotation axis passes through the movable stage, the first rotation axis being parallel to a first direction along the horizontal upper surface; an observation head, the observation head including a camera, the observation head being held by the holding body and the optical axis of the camera being along the moving direction of the holding body of the movable stage, the camera capturing an image of the object via an objective lens to generate the image of the object; a block detachably attached to the horizontal upper surface of the mounting table and configured to arrange a surface for the object to be observed closer to the observation head along the vertical direction; as well as an image generating unit configured to generate an observation image based on the image from the camera of the observation head, wherein, by moving the mounting table, the position of the block attached to the horizontal upper surface can be changed in a second direction along the horizontal upper surface, the second direction being orthogonal to the first direction, and The angular position of the track of the movable stage can be adjusted relative to the support column, and one of the angular positions to be adjusted includes an angular position at which the moving direction of the holding body of the movable stage is orthogonal to the horizontal upper surface.

2. The magnifying observation device according to claim 1, further comprising a rotating holding body, wherein the rotating holding body is arranged on the supporting column in a manner that it can rotate around the first rotation axis. The rotating holding body holds the movable stage. 3 . The magnifying observation device according to claim 2 , further comprising a locking mechanism capable of fixing the rotation of the rotation holding body relative to the supporting column.

4. The magnifying observation device according to claim 2, further comprising: a limiting member, the limiting member being arranged on the supporting column; an abutment member disposed on the rotation holding body and configured to abut on the restriction member at an angular position at which a movement direction of the holding body relative to the rail of the movable stage is orthogonal to the horizontal upper surface; an inclination angle measuring unit configured to measure an inclination angle representing an angle formed by a moving direction of the holding body relative to the rail of the movable stage and a direction orthogonal to the horizontal upper surface; an inclination angle display unit configured to display the inclination angle; and A display angle correction unit controls the tilt angle display unit to display a tilt angle of zero degrees when the abutting member abuts against the limiting member.

5. The magnifying observation device according to claim 2, wherein The rotating holding body includes a rod-shaped handle, and The central axis of the stick handle points toward the first rotation axis and is along a plane orthogonal to the first rotation axis.

6. The magnifying observation device according to claim 1, wherein The horizontal upper surface of the mounting table has a plurality of positioning holes along the second direction, and The block has a positioning pin that can be inserted into the positioning hole.

7. The magnifying observation device according to claim 6, wherein The mounting platform also includes a fixing screw hole, The block further includes a fixing screw for fixing the fixing screw hole, and When the positioning pin is inserted into the positioning hole, the fixing screw corresponds to the position of the fixing screw hole.

8. The magnifying observation device according to claim 6, further comprising a rotating plate mounted on the block in a manner rotatable about a second rotation axis orthogonal to the horizontal upper surface, The rotating plate includes a surface for an object to be observed. 9 . The magnifying observation device according to claim 8 , wherein the rotating plate includes a reflecting portion at least on a surface on which the object is placed, the reflecting portion reflecting light toward the observation head.

10. The magnifying observation device according to claim 8, wherein The block has a rotation axis hole at the position of the second rotation axis, and The rotating plate further includes a rotating axis pin insertable into the rotating axis hole. 11 . The magnifying observation device according to claim 10 , wherein the block further includes a guide portion that guides the rotation axis pin of the rotation plate to the rotation axis hole.

12. The magnifying observation device according to claim 10, wherein the rotation axis pin of the rotating plate can also be inserted into the positioning hole of the mounting table.

13. The magnifying observation device according to claim 10, wherein The block includes a plurality of blocks stacked one above the other, and The positioning pin of the upper block among the plurality of blocks is inserted into the rotation axis hole of the lower block among the plurality of blocks.

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