Corrosion life prediction method and device, storage medium and electronic equipment

Abstract

The invention discloses a corrosion life prediction method and device, a storage medium and electronic equipment, and is applied to the field of corrosion life prediction. The method comprises the following steps: based on a micro-gap size parameter of an object to be subjected to life prediction, a preset temperature parameter of a target special gas environment and a preset special gas partial pressure parameter, performing calculation processing by adopting a preset gas-liquid equivalent conversion coefficient model to obtain a gas-liquid equivalent conversion coefficient; calculating and processing based on the relationship between the protection potential and the scanning speed, the relationship between the protection potential and the temperature parameter and the relationship between the open circuit potential and the time parameter of the object to be subjected to life prediction to obtain pitting nucleation time; based on the pitting nucleation time, a preset pitting inoculation time model is adopted for calculation treatment, and the pitting inoculation time is obtained; and life prediction is performed based on the gas-liquid equivalent conversion coefficient and the pitting inoculation time, and the corrosion life is predicted. According to the corrosion life prediction method, the failure life of the material can be reasonably evaluated, and a guiding effect on equipment material selection, process optimization and the replacement period of parts is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of corrosion life prediction, and in particular to a corrosion life prediction method, device, storage medium and electronic equipment. Background Art

[0002] Stainless steel materials are widely used in special gas delivery pipelines, valve diaphragms, gas epitaxial reaction chambers and other components in semiconductor manufacturing equipment. Semiconductor industry manufacturing equipment usually uses highly corrosive electronic-grade special gases (Cl2, HCl, HBr, HF, etc.). The special gas environment is a quasi-vacuum gas environment, usually containing special gases and water vapor at a volume concentration of ppm, and usually at a high temperature. In a special gas environment, dynamic micro-droplets that continue to evaporate and condense will appear on the surface of stainless steel, leading to electrochemical corrosion. The volatilization and shedding of corrosion products will produce impurity particles in the etching chamber. The impurity particles contaminate the flowing gas and enter the chamber with the gas path, reducing the quality of the wafer. Most of the existing corrosion life prediction methods use empirical or mechanistic methods. Empirical methods lack corrosion mechanisms, require long-term field data, have a long evaluation cycle, and cannot be extended to other service environments. Mechanistic methods can be extended for prediction, but they are generally targeted at solution environments and cannot be applied to special gas environments. Summary of the invention

[0003] In view of this, the present invention provides a corrosion life prediction method, device, storage medium and electronic device, the main purpose of which is to solve the existing corrosion life prediction methods. Most of the existing corrosion life prediction methods use empirical or mechanistic methods. Empirical methods lack corrosion mechanisms, require long-term field data, have a long evaluation cycle and cannot be extended to other service environments. Mechanistic methods can be extended to predict, but they are generally targeted at solution environments and cannot be applied to special gas environments.

[0004] To solve the above problems, the present application provides a corrosion life prediction method, comprising:

[0005] Based on the micro-gap size parameters of the object to be predicted for life, the preset temperature parameters of the target special gas environment, and the preset special gas partial pressure parameters, a preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life;

[0006] Calculation is performed based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time;

[0007] Based on the pitting nucleation time, a preset pitting incubation time model is used to perform calculation processing to obtain the pitting incubation time of the object to be predicted for life;

[0008] The life prediction is performed based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0009] Optionally, the micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment, and the preset special gas partial pressure parameter are calculated and processed using a preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life, specifically including:

[0010] Calculating and processing based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment to obtain the saturated vapor pressure of water vapor in the target special gas environment;

[0011] Performing calculation based on the micro-gap size parameter of the object to be predicted for life and the surface tension of predetermined water to obtain the additional pressure at the micro-gap of the object to be predicted for life;

[0012] Performing calculation based on the water vapor saturated vapor pressure and the additional pressure to obtain an actual vapor pressure at the micro-gap of the object to be predicted for life;

[0013] The gas-liquid equivalent conversion coefficient of the object to be predicted for life is obtained by performing calculation processing based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure and the preset gas-liquid equivalent conversion coefficient model.

[0014] Optionally, the predetermined water vapor partial pressure based on the target special gas environment, the actual vapor pressure and the preset gas-liquid equivalent conversion coefficient model are calculated and processed to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life, specifically including:

[0015] Calculating and processing based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure to obtain the local relative humidity at the micro-gap of the object to be predicted for life;

[0016] A first preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing based on the local relative humidity to obtain a gas-liquid equivalent conversion coefficient of the object to be predicted for life.

[0017] Optionally, the method for obtaining the gas-liquid equivalent conversion coefficient of the object to be predicted for life also includes:

[0018] Collecting and obtaining the actual relative humidity of the target special gas environment;

[0019] Based on the actual relative humidity, the water vapor saturated vapor pressure and the additional pressure are calculated using a second preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life.

[0020] Optionally, the first function based on the relationship between the protection potential and the scanning speed of the object to be predicted for life, the second function based on the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and the third function based on the relationship between the open circuit potential and the time parameter of the object to be predicted for life are calculated and processed to obtain the pitting nucleation time, specifically including:

[0021] At the same temperature, the object to be predicted for life is scanned at different scanning speeds using a cyclic polarization method to obtain a first protection potential corresponding to each scanning speed;

[0022] Based on each of the first protection potentials, linear fitting is performed using the first function to obtain a second protection potential value of the object to be predicted for life when the scanning speed is zero at the same temperature, so as to obtain a second protection potential value corresponding to each sampling temperature parameter;

[0023] Based on each of the second protection potential values, linear fitting is performed using the second function to obtain a third protection potential value corresponding to each different temperature parameter;

[0024] Screening each of the third protection potential values ​​based on a preset temperature parameter of the target special gas environment to obtain a target protection potential value;

[0025] A calculation process is performed based on the third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life and the target protection potential value to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value.

[0026] Optionally, the calculation and processing based on the pitting nucleation time and the preset pitting incubation time model corresponding to the preset temperature parameter to obtain the pitting incubation time of the object to be predicted for life specifically includes:

[0027] Constructing a function curve based on the pitting nucleation time, the preset constraint conditions and the preset pitting induction time function in the preset pitting incubation time model to generate a first curve of the relationship between the pitting induction time and the applied potential;

[0028] Constructing a function curve based on the third function of the relationship between the open circuit potential and the time parameter in the preset pitting incubation time model to generate a second curve;

[0029] Solving based on the first curve and the second curve, obtaining a target pitting induction time when the applied potential is the same as the open circuit potential;

[0030] The target pitting induction time is determined as the pitting incubation time.

[0031] Optionally, the life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment specifically includes:

[0032] A multiplication operation is performed based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0033] In order to solve the above problems, the present application provides a corrosion life prediction device, comprising:

[0034] A gas-liquid equivalent conversion coefficient calculation module is used to calculate and process the preset gas-liquid equivalent conversion coefficient model based on the micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment, and the preset special gas partial pressure parameter, so as to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life;

[0035] A pitting nucleation time calculation module, used to calculate and process based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time;

[0036] A pitting corrosion incubation time calculation module, used to calculate and process based on the pitting corrosion nucleation time using a preset pitting corrosion incubation time model to obtain the pitting corrosion incubation time of the object to be predicted for life;

[0037] The life prediction module is used to perform life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0038] In order to solve the above problem, the present application provides a storage medium, wherein the storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the above-mentioned corrosion life prediction method are implemented.

[0039] In order to solve the above problem, the present application provides an electronic device, which at least includes a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps of the above-mentioned corrosion life prediction method when executing the computer program in the memory.

[0040] Beneficial effects of the present application: The present application comprehensively considers factors such as the special gas environment temperature, relative humidity, stainless steel surface microstructure and its own corrosion resistance, establishes a mechanism model, and divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in a solution. The gas-liquid equivalent conversion coefficient is determined by environmental factors, and the corrosion of stainless steel in a special gas environment is converted to a solution environment based on the gas-liquid equivalent conversion coefficient. The pitting incubation time of stainless steel in a solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in a special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. The present application establishes a corrosion life prediction method for stainless steel in an electronic-grade special gas environment, which can reasonably evaluate the material failure life, avoid affecting the quality of wafers, and guide equipment material selection, process optimization and component replacement cycles.

[0041] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0043] Figure 1 A schematic diagram of a corrosion life prediction method provided in an embodiment of the present application is shown;

[0044] Figure 2 A schematic flow chart of a corrosion life prediction method provided by another embodiment of the present application is shown;

[0045] Figure 3 A structural block diagram of a corrosion life prediction device provided by another embodiment of the present application is shown. DETAILED DESCRIPTION

[0046] Various aspects and features of the present application are described herein with reference to the accompanying drawings.

[0047] It should be understood that various modifications may be made to the embodiments of the present application. Therefore, the above description should not be considered as limiting, but only as an example of an embodiment. Other modifications within the scope and spirit of the present application will occur to those skilled in the art.

[0048] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present application and, together with the general description of the present application given above and the detailed description of the embodiments given below, serve to explain the principles of the present application.

[0049] These and other characteristics of the present application will become apparent from the following description of a preferred form of embodiment given as a non-limiting example with reference to the accompanying drawings.

[0050] It should also be understood that although the present application has been described with reference to some specific examples, those skilled in the art will be able to readily implement many other equivalent forms of the present application.

[0051] The above and other aspects, features and advantages of the present application will become more apparent in view of the following detailed description when taken in conjunction with the accompanying drawings.

[0052] Specific embodiments of the present application are described hereinafter with reference to the accompanying drawings; however, it should be understood that the embodiments applied for are merely examples of the present application, which may be implemented in a variety of ways. Well-known and / or repeated functions and structures are not described in detail to avoid unnecessary or redundant details that obscure the present application. Therefore, the specific structural and functional details applied for herein are not intended to be limiting, but merely serve as a basis and representative basis for the claims to teach those skilled in the art to use the present application in a variety of ways with substantially any suitable detailed structure.

[0053] This specification may use the phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments," all of which may refer to one or more of the same or different embodiments according to the present application.

[0054] The present application embodiment provides a corrosion life prediction method, such as Figure 1 As shown, including:

[0055] Step S101: Based on the micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment and the preset special gas partial pressure parameter, a preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life;

[0056] In the specific implementation process of this step, the object to be predicted for life can be stainless steel and stainless steel products, etc., and the target special gas environment can be an electronic-grade special gas environment with strong corrosiveness. The special gas environment includes: chlorine Cl2 special gas environment, hydrogen chloride HCl special gas environment, hydrobromic acid HBr special gas environment and hydrofluoric acid HF special gas environment, etc. Calculation and processing are performed based on the preset temperature parameters and the preset special gas partial pressure parameters of the target special gas environment to obtain the saturated vapor pressure of water vapor in the target special gas environment; calculation and processing are performed based on the micro-gap size parameters of the object to be predicted for life and the predetermined surface tension of water to obtain the additional pressure at the micro-gap of the object to be predicted for life; calculation and processing are performed based on the saturated vapor pressure of water vapor and the additional pressure to obtain the actual vapor pressure at the micro-gap of the object to be predicted for life; calculation and processing are performed based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure and the preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life.

[0057] Step S102: Calculating and processing based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time;

[0058] In the specific implementation process of this step, at the same temperature, the cyclic polarization method is used to scan the object to be predicted for life at different scanning speeds to obtain the first protection potential corresponding to each scanning speed; based on each of the first protection potentials, the first function is used to perform linear fitting to obtain the protection potential value of the object to be predicted for life when the scanning speed is zero at the same temperature, so as to obtain the protection potential value corresponding to each temperature parameter; based on the preset temperature parameters of the target special gas environment, each of the protection potential values ​​is screened to obtain the target protection potential value; based on the third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life and the target protection potential value, calculation and processing are performed to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value.

[0059] Step S103: Based on the pitting nucleation time, a preset pitting incubation time model is used to perform calculation processing to obtain the pitting incubation time of the object to be predicted for life;

[0060] In the specific implementation process of this step, a function curve is constructed based on the pitting nucleation time, preset constraints and the preset pitting induction time function in the preset pitting incubation time model to generate a first curve of the relationship between pitting induction time and applied potential; a function curve is constructed based on the third function of the relationship between open circuit potential and time parameter in the preset pitting incubation time model to generate a second curve; based on the first curve and the second curve, a solution is performed to obtain the target pitting induction time when the applied potential is the same as the open circuit potential; the target pitting induction time is determined as the pitting incubation time. The TV incubation time is the target pitting induction time corresponding to the intersection of the first curve and the second curve.

[0061] Step S104: performing life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0062] In the specific implementation process of this step, a multiplication operation is performed based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0063] This application comprehensively considers factors such as special gas environment temperature, relative humidity, stainless steel surface microstructure and its own corrosion resistance to establish a mechanism model, and divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in a solution. The gas-liquid equivalent conversion coefficient is determined by environmental factors, and the corrosion of stainless steel in a special gas environment is converted to a solution environment based on the gas-liquid equivalent conversion coefficient. The pitting incubation time of stainless steel in a solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in a special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. This application establishes a corrosion life prediction method for stainless steel in an electronic-grade special gas environment, which can reasonably evaluate the material failure life, avoid affecting wafer quality, and guide equipment material selection, process optimization, and component replacement cycles.

[0064] Another embodiment of the present application discloses another corrosion life prediction method, such as Figure 2 As shown, including:

[0065] Step S201: performing calculation processing based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment to obtain the saturated vapor pressure of water vapor in the target special gas environment;

[0066] In the specific implementation of this step, the target special gas environment can be an electronic grade special gas environment with strong corrosiveness, and the special gas environment includes: chlorine Cl2 special gas environment, hydrogen chloride HCl special gas environment, hydrobromic acid HBr special gas environment and hydrofluoric acid HF special gas environment. When the target special gas is hydrogen chloride HCl special gas, the mathematical expression of the relationship between the preset temperature parameter, the preset special gas partial pressure parameter and the saturated vapor pressure of water vapor can be expressed as the following formula (1):

[0067]

[0068] Where T is the ambient temperature, P HCl is the preset special gas partial pressure parameter of HCl gas, P H2O,sa is the saturated vapor pressure of water vapor in the special gas environment. Specifically, the known parameters are preset as the special gas partial pressure parameters P HCl , the ambient temperature T is substituted into formula (1) for calculation, and the saturated vapor pressure P of water vapor is obtained. H2Osa The numerical value of .

[0069] Step S202: performing calculation processing based on the micro-gap size parameter of the object to be predicted for life and the surface tension of predetermined water to obtain the additional pressure at the micro-gap of the object to be predicted for life;

[0070] In the specific implementation process of this step, the object to be predicted for life can be a material made of stainless steel, a stainless steel product, or a stainless steel device, etc. The mathematical formula for calculating the additional pressure can be shown as follows:

[0071]

[0072] Among them, P s is the additional pressure at the micro-gap, σ is the surface tension of the predetermined water, and w is the micro-gap size parameter. The micro-gap size parameter extracted from the stainless steel surface microstructure and the surface tension of the predetermined water are substituted into formula (2) for calculation to obtain the additional pressure.

[0073] Step S203: performing calculation processing based on the water vapor saturated vapor pressure and the additional pressure to obtain the actual vapor pressure at the micro-gap of the object to be predicted for life;

[0074] In the specific implementation process of this step, the calculation formula of the actual vapor pressure can be expressed as the following formula (3):

[0075]

[0076] in, is the actual vapor pressure at the micro-gap, is the saturated vapor pressure of water vapor in the special gas environment, P s Add pressure to micro gaps.

[0077] Step S204: performing calculation processing based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure and the preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life;

[0078] In the specific implementation process of this step, the local relative humidity at the micro-gap of the object to be predicted is obtained by calculating and processing based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure; the mathematical expression of the local relative humidity RH' can be expressed as the following formula (4):

[0079]

[0080] in, is the partial pressure of water vapor in the special gas environment, is the actual vapor pressure at the micro-gap.

[0081] Based on the local relative humidity, a first preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life. The first preset gas-liquid equivalent conversion coefficient model can be expressed as the following formula (5):

[0082]

[0083] Where K is the gas-liquid equivalent conversion coefficient v moi is the condensation rate of micro droplets in micro gaps under special gas environment; v sol is the condensation rate of micro-droplets on the surface of the material in the solution environment; specifically, the condensation rate of micro-droplets in the micro-gap in the special gas environment v moi The mathematical expression of can be shown as follows:

[0084]

[0085] Among them, v m is the volume of a single layer of water molecules on the surface of the material, and RH' is the local relative humidity. The faster the micro-droplets condense, the faster the corrosion rate and the shorter the corrosion life. Therefore, the corrosion rate is directly proportional to the condensation rate of the micro-droplets and inversely proportional to the corrosion life. The condensation rate v of the micro-droplets on the surface of the material in the solution environment sol The mathematical expression of can be expressed as follows:

[0086]

[0087] Step S205: scanning the object to be predicted for lifetime at different scanning speeds using a cyclic polarization method at the same temperature to obtain a first protection potential corresponding to each scanning speed;

[0088] In the specific implementation process of this step, the object to be predicted for lifetime is scanned by using a cyclic polarization method with different scanning speeds to obtain first protection potential values ​​corresponding to different scanning speeds.

[0089] Step S206: performing linear fitting based on each of the first protection potentials using the first function to obtain a second protection potential value of the object to be predicted for life when the scanning speed is zero at the same temperature, so as to obtain a second protection potential value corresponding to each sampling temperature parameter;

[0090] In the specific implementation process of this step, the mathematical expression of the first function of the relationship between the reaction protection potential and the scanning speed can be expressed as follows:

[0091] E rp(v) =E rp(v＝0) +kv 1 / 2 (8);

[0092] Among them, E rp(v＝0) It is the protection potential of stainless steel in natural environment, k is a constant, and v is the scanning speed during the test. Scan at different scanning speeds at different temperatures to obtain the first protection potential at each different scanning speed corresponding to each different sampling temperature. And the first function is used to fit several first protection potentials corresponding to different sampling temperatures to obtain the second protection potential value of the object to be predicted under each sampling temperature parameter.

[0093] Step S207: performing linear fitting using the second function based on each of the second protection potential values ​​to obtain a third protection potential value corresponding to each different temperature parameter;

[0094] In the specific implementation of this step, the mathematical expression of the second function can be expressed as the following formula (9):

[0095]

[0096] Among them, E rp(v＝0) For protection potential, is the adsorption energy of chloride ions at 25°C, which is -10.92 kJ / mol. is the adsorption enthalpy of chloride ions at a temperature of 25°C, which is 0.04 kJ / mol. Based on each of the second protection potential values, the second function is used for linear fitting to obtain the third protection potential values ​​corresponding to each different temperature parameter. The second function is used for linear fitting to expand the protection potential values ​​corresponding to the missing sampling temperatures during the test. Specifically, the protection potential values ​​corresponding to each temperature parameter when the scanning speed is zero are obtained.

[0097] Step S208: screening each of the third protection potential values ​​based on the preset temperature parameter of the target special gas environment to obtain a target protection potential value;

[0098] In the specific implementation process of this step, each of the temperature parameters is screened based on the preset temperature parameter to obtain a target temperature parameter corresponding to the preset temperature parameter; and the protection potential value corresponding to the target temperature parameter is determined as the target protection potential value.

[0099] Step S209: performing calculation based on the third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life and the target protection potential value to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value;

[0100] In the specific implementation of this step, the mathematical expression of the third function can be expressed as follows:

[0101]

[0102] Among them, E OCP is the open circuit potential, Ee,H is the equilibrium potential of the cathode reaction, Ecorr is the corrosion potential, A and B are constants, and γ is the Tafel slope of the cathode reaction. Specifically, the calculation is performed based on the third function and the target protection potential value, and the time parameter when the open circuit potential is the same as the target protection potential value is determined as the pitting nucleation time.

[0103] Step S210: performing calculation processing based on the pitting nucleation time using a preset pitting incubation time model to obtain the pitting incubation time of the object to be predicted for life;

[0104] In the specific implementation process of this step, a function curve is constructed based on the pitting nucleation time, the preset constraint conditions and the preset pitting induction time function in the preset pitting incubation time model to generate a first curve of the relationship between the pitting induction time and the applied potential; the preset constraint conditions are that the applied potential value is greater than the protection potential value and the open circuit potential is greater than the protection potential; the mathematical expression of the preset pitting induction time function can be shown as follows:

[0105]

[0106] in is the time when the open circuit potential exceeds the protection potential, A', B', C' are all fitting parameters, t ind is the pitting induction time. A function curve is constructed based on the third function of the relationship between the open circuit potential and the time parameter in the preset pitting incubation time model to generate a second curve; a solution is performed based on the first curve and the second curve to obtain the target pitting induction time when the applied potential is the same as the open circuit potential; the target pitting induction time is determined as the pitting incubation time. Specifically, the time parameter corresponding to the intersection of the first curve and the second curve is the pitting incubation time t pit initiation .

[0107] Step S211: performing life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0108] In the specific implementation process of this step, a multiplication operation is performed based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment. The mathematical expression of the corrosion life can be shown in the following formula (12):

[0109] T Corr-lfe =K×t pit initiation (12);

[0110] Among them, T Corr-life is the corrosion life of stainless steel, K is the gas-liquid equivalent conversion coefficient, t pit initiation It is the pitting incubation time of stainless steel.

[0111] In a specific implementation process, the method for obtaining the gas-liquid equivalent conversion coefficient of the object to be predicted for life also includes:

[0112] Step 1: Collect and obtain the actual relative humidity of the target special gas environment;

[0113] Specifically, the actual relative humidity may be obtained by calculating the local relative humidity, or the actual relative humidity may be collected on site.

[0114] Step 2: Based on the actual relative humidity, the water vapor saturated vapor pressure and the additional pressure are calculated using a second preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life.

[0115] Specifically, the mathematical expression of the second preset enterprise equivalent conversion coefficient model can be expressed as the following formula (13):

[0116]

[0117] Among them, P s Add pressure to the micro gaps. It is the saturated vapor pressure of water vapor in the special gas environment.

[0118] This application comprehensively considers factors such as special gas environment temperature, relative humidity, stainless steel surface microstructure and its own corrosion resistance to establish a mechanism model, and divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in a solution. The gas-liquid equivalent conversion coefficient is determined by environmental factors, and the corrosion of stainless steel in a special gas environment is converted to a solution environment based on the gas-liquid equivalent conversion coefficient. The pitting incubation time of stainless steel in a solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in a special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. This application establishes a corrosion life prediction method for stainless steel in an electronic-grade special gas environment, which can reasonably evaluate the material failure life, avoid affecting wafer quality, and guide equipment material selection, process optimization, and component replacement cycles.

[0119] Another embodiment of the present application provides a corrosion life prediction device, such as Figure 3 As shown, including:

[0120] A gas-liquid equivalent conversion coefficient calculation module 1 is used to calculate and process the preset gas-liquid equivalent conversion coefficient model based on the micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment, and the preset special gas partial pressure parameter, so as to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life;

[0121] A pitting nucleation time calculation module 2 is used to calculate and process based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time;

[0122] A pitting corrosion incubation time calculation module 3 is used to calculate and process the pitting corrosion nucleation time using a preset pitting corrosion incubation time model to obtain the pitting corrosion incubation time of the object to be predicted for life;

[0123] The life prediction module 4 is used to perform life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0124] During the specific implementation process, the gas-liquid equivalent conversion coefficient calculation module 1 is specifically used to: perform calculations based on the preset temperature parameters of the target special gas environment and the preset special gas partial pressure parameters to obtain the saturated vapor pressure of water vapor in the target special gas environment; perform calculations based on the micro-gap size parameters of the object to be predicted for life and the predetermined surface tension of water to obtain the additional pressure at the micro-gap of the object to be predicted for life; perform calculations based on the saturated vapor pressure of water vapor and the additional pressure to obtain the actual vapor pressure at the micro-gap of the object to be predicted for life; perform calculations based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure and the preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life.

[0125] During the specific implementation process, the gas-liquid equivalent conversion coefficient calculation module 1 is also used to: perform calculations based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure to obtain the local relative humidity at the micro-gap of the object to be predicted for life; perform calculations based on the local relative humidity using a first preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life.

[0126] During the specific implementation process, the gas-liquid equivalent conversion coefficient calculation module 1 is also used to: collect and obtain the actual relative humidity of the target special gas environment; based on the actual relative humidity, the water vapor saturated vapor pressure and the additional pressure are calculated and processed using a second preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life.

[0127] In the specific implementation process, the pitting nucleation time calculation module 2 is specifically used to: scan the object to be predicted for life at different scanning speeds using the cyclic polarization method at the same temperature to obtain the first protection potential corresponding to each scanning speed; based on each of the first protection potentials, linear fitting is performed using the first function to obtain the second protection potential value of the object to be predicted for life at the same temperature when the scanning speed is zero, so as to obtain the second protection potential value corresponding to each sampling temperature parameter; based on each of the second protection potential values, linear fitting is performed using the second function to obtain the third protection potential value corresponding to each different temperature parameter; based on the preset temperature parameters of the target special gas environment, each of the third protection potential values ​​is screened to obtain the target protection potential value; based on the third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life and the target protection potential value, calculation and processing are performed to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value.

[0128] In the specific implementation process, the life prediction module 4 is specifically used to: perform multiplication processing based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0129] This application comprehensively considers factors such as special gas environment temperature, relative humidity, stainless steel surface microstructure and its own corrosion resistance to establish a mechanism model, and divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in a solution. The gas-liquid equivalent conversion coefficient is determined by environmental factors, and the corrosion of stainless steel in a special gas environment is converted to a solution environment based on the gas-liquid equivalent conversion coefficient. The pitting incubation time of stainless steel in a solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in a special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. This application establishes a corrosion life prediction method for stainless steel in an electronic-grade special gas environment, which can reasonably evaluate the material failure life, avoid affecting wafer quality, and guide equipment material selection, process optimization, and component replacement cycles.

[0130] Another embodiment of the present application provides a storage medium, wherein the storage medium stores a computer program, and when the computer program is executed by a processor, the following method steps are implemented:

[0131] Step 1: Based on the micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment and the preset special gas partial pressure parameter, a preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life;

[0132] Step 2: Calculate and process based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time;

[0133] Step 3: Based on the pitting nucleation time, a preset pitting incubation time model is used to perform calculation processing to obtain the pitting incubation time of the object to be predicted for life;

[0134] Step 4: Perform life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0135] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

[0136] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above.

[0137] The specific implementation process of the above method steps can refer to the embodiments of any of the above corrosion life prediction methods, and this embodiment will not be repeated here.

[0138] This application comprehensively considers factors such as special gas environment temperature, relative humidity, stainless steel surface microstructure and its own corrosion resistance to establish a mechanism model, and divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in a solution. The gas-liquid equivalent conversion coefficient is determined by environmental factors, and the corrosion of stainless steel in a special gas environment is converted to a solution environment based on the gas-liquid equivalent conversion coefficient. The pitting incubation time of stainless steel in a solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in a special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. This application establishes a corrosion life prediction method for stainless steel in an electronic-grade special gas environment, which can reasonably evaluate the material failure life, avoid affecting wafer quality, and guide equipment material selection, process optimization, and component replacement cycles.

[0139] Another embodiment of the present application provides an electronic device, which may be a server, and includes a processor, a memory, a network interface, and a database connected via a system bus. The processor of the electronic device is used to provide computing and control capabilities. The memory of the electronic device includes a non-volatile and / or volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program, and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the electronic device is used to communicate with an external client via a network connection. When the electronic device program is executed by the processor, it implements the functions or steps of a corrosion life prediction method on the server side.

[0140] In one embodiment, an electronic device is provided, which may be a client. The electronic device includes a processor, a memory, a network interface, a display screen, and an input device connected via a system bus. The processor of the electronic device is used to provide computing and control capabilities. The memory of the electronic device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the electronic device is used to communicate with an external server via a network connection. When the electronic device program is executed by the processor, the functions or steps on the client side of a corrosion life prediction method are implemented.

[0141] Another embodiment of the present application provides an electronic device, comprising at least a memory and a processor, wherein the memory stores a computer program, and the processor implements the following method steps when executing the computer program in the memory:

[0142] Step 1: Based on the micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment and the preset special gas partial pressure parameter, a preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life;

[0143] Step 2: Calculate and process based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time;

[0144] Step 3: Based on the pitting nucleation time, a preset pitting incubation time model is used to perform calculation processing to obtain the pitting incubation time of the object to be predicted for life;

[0145] Step 4: Perform life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

[0146] The specific implementation process of the above method steps can refer to the embodiments of any of the above corrosion life prediction methods, and this embodiment will not be repeated here.

[0147] This application comprehensively considers factors such as special gas environment temperature, relative humidity, stainless steel surface microstructure and its own corrosion resistance to establish a mechanism model, and divides the corrosion life model of stainless steel in a special gas environment into a gas-liquid equivalent coefficient model and a pitting incubation model in a solution. The gas-liquid equivalent conversion coefficient is determined by environmental factors, and the corrosion of stainless steel in a special gas environment is converted to a solution environment based on the gas-liquid equivalent conversion coefficient. The pitting incubation time of stainless steel in a solution is predicted by the pitting incubation model, and finally the corrosion life of stainless steel in a special gas environment is determined by combining the liquid equivalent conversion coefficient and the pitting incubation model. This application establishes a corrosion life prediction method for stainless steel in an electronic-grade special gas environment, which can reasonably evaluate the material failure life, avoid affecting wafer quality, and guide equipment material selection, process optimization, and component replacement cycles.

[0148] The above embodiments are only exemplary embodiments of the present application and are not intended to limit the present application. The protection scope of the present application is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present application within the essence and protection scope of the present application, and such modifications or equivalent substitutions shall also be deemed to fall within the protection scope of the present application.

Claims

1. A corrosion life prediction method, characterized in that: include: Based on the micro-gap size parameters of the object to be predicted for life, the preset temperature parameters of the target special gas environment, and the preset special gas partial pressure parameters, a preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life; Calculation is performed based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time; Based on the pitting nucleation time, a preset pitting incubation time model is used to perform calculation processing to obtain the pitting incubation time of the object to be predicted for life; The life prediction is performed based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

2. The method according to claim 1, characterized in that The micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment and the preset special gas partial pressure parameter are calculated and processed using a preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life, specifically including: Calculating and processing based on the preset temperature parameter and the preset special gas partial pressure parameter of the target special gas environment to obtain the saturated vapor pressure of water vapor in the target special gas environment; Performing calculation based on the micro-gap size parameter of the object to be predicted for life and the surface tension of predetermined water to obtain the additional pressure at the micro-gap of the object to be predicted for life; Performing calculation based on the water vapor saturated vapor pressure and the additional pressure to obtain an actual vapor pressure at the micro-gap of the object to be predicted for life; The gas-liquid equivalent conversion coefficient of the object to be predicted for life is obtained by performing calculation processing based on the predetermined water vapor partial pressure of the target special gas environment, the actual vapor pressure and the preset gas-liquid equivalent conversion coefficient model.

3. The method according to claim 2, characterized in that The predetermined water vapor partial pressure based on the target special gas environment, the actual vapor pressure and the preset gas-liquid equivalent conversion coefficient model are calculated and processed to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life, specifically including: Calculating and processing based on the predetermined water vapor partial pressure of the target special gas environment and the actual vapor pressure to obtain the local relative humidity at the micro-gap of the object to be predicted for life; A first preset gas-liquid equivalent conversion coefficient model is used to perform calculation processing based on the local relative humidity to obtain a gas-liquid equivalent conversion coefficient of the object to be predicted for life.

4. The method according to claim 2, characterized in that The method for obtaining the gas-liquid equivalent conversion coefficient of the object to be predicted for life also includes: Collecting and obtaining the actual relative humidity of the target special gas environment; Based on the actual relative humidity, the water vapor saturated vapor pressure and the additional pressure are calculated using a second preset gas-liquid equivalent conversion coefficient model to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life.

5. The method according to claim 1, characterized in that The first function based on the relationship between the protection potential and the scanning speed of the object to be predicted for life, the second function based on the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and the third function based on the relationship between the open circuit potential and the time parameter of the object to be predicted for life are calculated and processed to obtain the pitting nucleation time, specifically including: At the same temperature, the object to be predicted for life is scanned at different scanning speeds using a cyclic polarization method to obtain a first protection potential corresponding to each scanning speed; Based on each of the first protection potentials, linear fitting is performed using the first function to obtain a second protection potential value of the object to be predicted for life when the scanning speed is zero at the same temperature, so as to obtain a second protection potential value corresponding to each sampling temperature parameter; Based on each of the second protection potential values, linear fitting is performed using the second function to obtain a third protection potential value corresponding to each different temperature parameter; Screening each of the third protection potential values ​​based on a preset temperature parameter of the target special gas environment to obtain a target protection potential value; A calculation process is performed based on the third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life and the target protection potential value to obtain the pitting nucleation time when the open circuit potential exceeds the target protection potential value.

6. The method according to claim 1, characterized in that The calculation process based on the pitting nucleation time and the preset pitting incubation time model corresponding to the preset temperature parameter to obtain the pitting incubation time of the object to be predicted specifically includes: Constructing a function curve based on the pitting nucleation time, the preset constraint conditions and the preset pitting induction time function in the preset pitting incubation time model to generate a first curve of the relationship between the pitting induction time and the applied potential; Constructing a function curve based on the third function of the relationship between the open circuit potential and the time parameter in the preset pitting incubation time model to generate a second curve; Solving based on the first curve and the second curve, obtaining a target pitting induction time when the applied potential is the same as the open circuit potential; The target pitting induction time is determined as the pitting incubation time.

7. The method according to claim 1, characterized in that The life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time is performed to obtain the corrosion life of the object to be predicted in the target special gas environment, specifically including: A multiplication operation is performed based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

8. A corrosion life prediction device, characterized in that: include: A gas-liquid equivalent conversion coefficient calculation module is used to calculate and process the preset gas-liquid equivalent conversion coefficient model based on the micro-gap size parameter of the object to be predicted for life, the preset temperature parameter of the target special gas environment, and the preset special gas partial pressure parameter, so as to obtain the gas-liquid equivalent conversion coefficient of the object to be predicted for life; A pitting nucleation time calculation module, used to calculate and process based on a first function of the relationship between the protection potential and the scanning speed of the object to be predicted for life, a second function of the relationship between the protection potential and the temperature parameter of the object to be predicted for life, and a third function of the relationship between the open circuit potential and the time parameter of the object to be predicted for life, to obtain the pitting nucleation time; A pitting corrosion incubation time calculation module, used to calculate and process based on the pitting corrosion nucleation time using a preset pitting corrosion incubation time model to obtain the pitting corrosion incubation time of the object to be predicted for life; The life prediction module is used to perform life prediction based on the gas-liquid equivalent conversion coefficient and the pitting incubation time to obtain the corrosion life of the object to be predicted in the target special gas environment.

9. A storage medium, characterized in that: The storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the corrosion life prediction method according to any one of claims 1 to 7 are implemented.

10. An electronic device, characterized in that: The method comprises at least a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the corrosion life prediction method according to any one of claims 1 to 7 when executing the computer program on the memory.

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