Photomask container with magnetic latch

Abstract

A photomask container includes a magnetic latch to close the container and clamp a photomask housed within the container. The magnetic latch includes at least one magnet and another ferromagnetic material, which may be another magnet or a magnetically attractable material. At least one of the magnet and the another ferromagnetic material may be manipulated to fasten or open the container. The manipulation may include at least one of sliding of the housing, rotation of the magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.

Description

Technical Field

[0001] The present disclosure relates to a container for storing and / or transporting reticles, and in particular a container including a magnetic latch for closing the container. Background Art

[0002] Reticles are often shipped, handled, and stored in reticle containers that include an inner box and an outer box. The inner box is configured so that it can be used during processing of the reticle, such as in lithography such as extreme ultraviolet (EUV) processes. Features of the inner box that make the inner box suitable for use in reticle processing, such as filters, formation of seals, and / or other features of the inner box, can make the inner box more complex and expensive, and less suitable for storage of reticles. Summary of the invention

[0003] The present disclosure relates to a container for storing and / or transporting reticles, and in particular a container including a magnetic latch for closing the container.

[0004] The magnetic latch may allow a container for reticles (e.g., a reticle container, a box or other container for use in a reticle storage, or the like) to be secured and the reticle clamped within the container. The magnetic latch may allow the container to be closed while providing relatively reduced particle generation and / or causing any particle generation to occur away from the interior of the container and thus less likely to contaminate the reticle. The magnetic latch may further allow closing and clamping across a range of different thicknesses of reticles that may be accommodated within the reticle container.

[0005] In an embodiment, a photomask container includes: a first container section including a ferromagnetic material; and a second container section including one or more magnets. The photomask container is configured to switch between a latched state and an unlocked state, in which the one or more magnets attract the ferromagnetic material of the first container section, and in which the attraction between the ferromagnetic material and the one or more magnets is reduced so that the first container section can be separated from the second container section. The first container section and the second container section define an interior space configured to accommodate a photomask.

[0006] In an embodiment, the ferromagnetic material of the first container section comprises one or more magnets. In an embodiment, when in the unlocked state, the one or more magnets of the second container section repel the ferromagnetic material of the first container section.

[0007] In an embodiment, the one or more magnets of the second container section comprise at least one rotatable magnet.

[0008] In an embodiment, the second container section comprises a slidable body, the slidable body comprising the one or more magnets. In an embodiment, the slidable body comprises a plurality of magnets. In an embodiment, the slidable body comprises a polymer material.

[0009] In an embodiment, the ferromagnetic material of the first container section is provided on a slidable body comprised in the first container section. In an embodiment, the slidable body comprises a polymer material.

[0010] In an embodiment, the ferromagnetic material of the first container section is configured to be energized to provide an electromagnet.

[0011] In an embodiment, the one or more magnets are configured to be energized to switch the container to the unlocked state.

[0012] In an embodiment, a method for securing and opening a mask container includes: magnetically latching the first container segment to the second container segment by an attractive force between a ferromagnetic material contained in the first container segment and one or more magnets contained in the second container segment; and unlocking the first container segment from the second container segment by reducing the attractive force between the ferromagnetic material and the one or more magnets so that the first container segment can be separated from the second container segment.

[0013] In an embodiment, switching the magnetic latch includes: moving one or more magnets and the ferromagnetic material away from each other. In an embodiment, moving the one or more magnets and the ferromagnetic material away from each other includes: sliding a body including one of the one or more magnets or the ferromagnetic material.

[0014] In an embodiment, the ferromagnetic material contained in the first container segment comprises one or more magnets. In an embodiment, unlocking the first container segment from the second container segment comprises: positioning the one or more magnets of the ferromagnetic material contained in the first container segment to be opposite to the one or more magnets of the second container segment having the same polarity. In an embodiment, positioning the one or more magnets of the ferromagnetic material contained in the first container segment to be opposite to the one or more magnets of the second container segment having the same polarity comprises: sliding a body containing the one or more magnets of the ferromagnetic material contained in the first container segment or the one or more magnets of the second container segment. In an embodiment, positioning the one or more magnets of the ferromagnetic material contained in the first container segment to be opposite to the one or more magnets of the second container segment having the same polarity comprises: rotating at least one of the one or more magnets of the ferromagnetic material contained in the first container segment or the one or more magnets of the second container segment.

[0015] In an embodiment, unlocking the first container section and the second container section includes energizing an electromagnet such that the one or more magnets and the ferromagnetic material repel each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 An exploded view of a reticle container and a reticle according to an embodiment is shown.

[0017] Figure 2 A cover of a reticle container according to an embodiment is shown.

[0018] Figure 3 A bottom plate of a photomask container according to an embodiment is shown.

[0019] Figure 4 A reticle container is shown in a loadport according to an embodiment.

[0020] Figure 5 A rotatable magnet according to an embodiment is shown.

[0021] Fig. 6A A rotatable magnet assembly is shown in a high magnetic field configuration according to an embodiment.

[0022] Figure 6B A rotatable magnet assembly is shown in a low magnetic field configuration according to an embodiment. DETAILED DESCRIPTION

[0023] The present disclosure relates to a container for storing and / or transporting reticles, and in particular a container including a magnetic latch for closing the container.

[0024] As defined herein, "ferromagnetic material" includes materials that are capable of being attracted or repelled by a magnet, including materials that are magnetized to form a magnet and materials that otherwise respond to a magnetic field. Non-limiting examples of ferromagnetic materials include iron, nickel, cobalt, alloys thereof, rare earth materials, minerals such as lodestone and the like, and natural and synthetic permanent magnets such as neodymium and the like. In some embodiments, the ferromagnetic material itself has not been magnetized to provide a magnetic field, but can be attracted by a magnetic field provided by a separate magnet. In some embodiments, the ferromagnetic material has been magnetized and is itself a magnet that provides a magnetic field that can interact with the magnetic field of another magnet to be attracted to or repelled by the other magnet.

[0025] Figure 1 An exploded view of a reticle container and a reticle is shown according to an embodiment. The reticle container 100 includes a lid 102 and a bottom plate 104. The reticle container is configured to accommodate a reticle 106. The lid 102 includes one or more lid magnetic latching features 108. The bottom plate 104 includes one or more bottom plate magnetic latching features 110.

[0026] The reticle container 100 is a container configured to contain a reticle 106, such as a reticle for a process such as photolithography, such as an extreme ultraviolet (EUV) process. The reticle container 100 may be used to transport and / or store the reticle. In an embodiment, the reticle container 100 is an EUV reticle container. In an embodiment, the reticle container 100 is a storage box for storing the reticle 106 before, during, or after processing. In an embodiment, the reticle container 100 may be received at a load port of an EUV processing device to be opened and used to add or remove the reticle 106 from the reticle container 100. The reticle container 100 contains the reticle 106 in an interior space within the reticle container 100. In an embodiment, the reticle container 100 clamps the reticle 106 to secure the reticle 106 in a specific position. In an embodiment, when the reticle 106 is contained within the reticle container 100, the reticle container 100 forms a seal around its periphery. In an embodiment, when the reticle 106 is housed within the reticle container 100 , the reticle container 100 does not form a seal and includes gaps in at least some areas of the perimeter.

[0027] The lid 102 forms a first container section of the reticle container 100. The lid 102 forms a portion of an interior space configured to accommodate the reticle 106. The lid 102 includes a lid magnetic latch feature 108. The lid magnetic latch feature 108 is configured to interact with the bottom plate magnetic latch feature 110 through a magnetic field so that the lid 102 and the bottom plate 104 can be fastened to each other in a latched state and can be separated from each other in a released state. In an embodiment, the lid magnetic latch feature 108 includes one or more magnets. In an embodiment, the lid magnetic latch feature 108 includes one or more ferromagnetic materials. In an embodiment, the lid magnetic latch feature 108 is configured to be connected to a power source so that an electromagnet can be energized in the lid magnetic latch feature 108. In an embodiment, the lid magnetic latch feature 108 includes a slidable body containing one or more magnets or ferromagnetic materials. In an embodiment, the lid magnetic latch feature 108 includes a rotatable body containing one or more magnets or ferromagnetic materials.

[0028] The bottom plate 104 forms a second container section of the photomask container 100. The bottom plate 104 forms an interior space capable of accommodating the photomask 106 when combined with the cover 102. The bottom plate 104 includes a bottom plate magnetic latch feature 110. The cover magnetic latch feature 108 is configured to interact with the bottom plate cover latch feature 108 through a magnetic field so that the cover 102 and the bottom plate 104 can be fastened to each other in a latched state and can be separated from each other in a released state. In an embodiment, the bottom plate magnetic latch feature 110 includes one or more magnets. In an embodiment, the bottom plate magnetic latch feature 110 includes one or more ferromagnetic materials. In an embodiment, the bottom plate magnetic latch feature 110 is configured to be connected to a power source so that the electromagnet can be energized in the bottom plate magnetic latch feature 110. In an embodiment, the bottom plate magnetic latch feature 110 includes a slidable body containing one or more magnets or ferromagnetic materials. In an embodiment, the bottom plate magnetic latch feature 110 includes a rotatable body containing one or more magnets or ferromagnetic material.

[0029] When the cover magnetic latching feature 108 and the bottom plate magnetic latching feature 110 are in the unlocked state, the attractive force between the cover magnetic latching feature 108 and the bottom plate magnetic latching feature 110 is at or below a level at which the cover 102 and the bottom plate 104 can be easily separated. In an embodiment, when in the unlocked state, the cover magnetic latching feature 108 and the bottom plate magnetic latching feature 110 repel each other. In an embodiment, the attractive force between the cover magnetic latching feature 108 and the bottom plate magnetic latching feature 110 is reduced by changing the position of the cover magnetic latching feature 108 and / or the bottom plate magnetic latching feature 110 (for example, by rotating or sliding a body containing a magnet or ferromagnetic material contained therein or energizing an electromagnet). When the lid magnetic latching feature 108 and the bottom plate magnetic latching feature 110 are in the latched state, the attractive force between the lid magnetic latching feature 108 and the bottom plate magnetic latching feature 110 may be sufficient to hold the lid 102 and the bottom plate 104 together during handling and storage of the reticle container 100, such as during movement of the reticle container 100 by a worker or automation during handling and storage of the reticle 106, for example. In embodiments, the attractive force in the latched state may be sufficient to resist impacts such as a typical distance of a cassette being dropped, an accidental impact of the lid 102 or bottom plate 104, or the like. In embodiments, the attractive force in the latched state includes an attractive force between respective opposite magnetic poles of magnets included in each of the lid magnetic latching feature 108 and the bottom plate magnetic latching feature 110. In an embodiment, the attractive force in the latched state includes an attractive force between one or more magnets disposed in one of the cover magnetic latch feature 108 or the bottom plate magnetic latch feature 110 and a ferromagnetic material that is not magnetized itself in the other of the cover magnetic latch feature 108 or the bottom plate magnetic latch feature 110. When in the latched state, the light cover 106 can be clamped between the cover 102 and the bottom plate 104 by the attractive force between the cover magnetic latch feature 108 and the bottom plate magnetic latch feature 110. When in the latched state, the attractive force can be sufficient to overcome the weight of the cover 102 and / or the bottom plate 104. For example, the attractive force in the latched state can be 200 grams-force (gf) or greater. In an embodiment, the attractive force can be 500 gf or greater. In an embodiment, the attractive force in the latched state can be under 2 pounds-force (lbf). f ) and 4lb fWhen in the latched state, the attractive force may limit or prevent translational movement of the cover 102 and / or the bottom plate 104 relative to each other. When in the unlocked state, the attractive force may be reduced so that the cover 102 and the bottom plate 104 may be separated by, for example, automation for performing storage of the reticle 106 in the reticle container 100. In an embodiment, in the unlocked state, the cover 102 and the bottom plate 104 repel each other. In an embodiment, in the unlocked state, the attractive force between the cover 102 and the bottom plate 104 is sufficiently reduced to allow the cover 102 to be separated from the bottom plate 104 due to gravity, for example, such that the attractive force is less than the weight of the cover 102 or the bottom plate 104. The cover 102 and the bottom plate 104 may be separated by lifting one of the cover 102 or the bottom plate 104, or by discarding a support under one of the cover 102 and the bottom plate 104 while supporting the other of the cover 102 and the bottom plate 104. In an embodiment, the attractive force of the lid 102 and the base plate 104 may be reduced so that an actuator (such as automation in a load port) can separate the lid 102 and the base plate 104 .

[0030] Figure 2 A cover of a reticle container according to an embodiment is shown. The cover 200 includes a cover body 202, a cover magnetic material holder 204, and a cover magnetic material 206. A moving channel 208 may optionally be included in the cover body 202. An electrical contact 210 may optionally be included in the cover body 202 or the cover magnetic material holder 204.

[0031] The cover 200 is a photomask container (e.g., as discussed above and Figure 1 106). The cover body 202 forms a portion of the cover 200 that is configured to form a portion of an enclosed space for housing a reticle, such as the reticle 106. The cover body 202 can be configured to be coupled to a base plate, such as discussed below and Figure 3 The base plate 300 shown in FIG.

[0032] The cover magnetic material holder 204 is configured to accommodate the cover magnetic material 206. The cover magnetic material holder 204 can be any suitable material for accommodating the cover magnetic material 206. In an embodiment, the cover magnetic material 204 includes a polymer material, such as polycarbonate. In an embodiment, the cover magnetic material holder 204 includes a metal material, such as aluminum. In an embodiment, the cover magnetic material holder 204 is integrally formed with the cover body 202 and is made of the same material. In an embodiment, the cover magnetic material holder 204 may include one or more compartments for accommodating the cover magnetic material 206. In an embodiment, the cover magnetic material can be loaded into the cover magnetic material holder 204. In an embodiment, the cover magnetic material holder 204 can hold the cover magnetic material 206 so that the cover magnetic material 206 can be rotated, for example, by allowing a protrusion or recess disposed in the cover magnetic material 206 to be exposed. In an embodiment, the cover magnetic material holder 204 includes one or more rotatable compartments configured to accommodate the cover magnetic material 206. In an embodiment, the rotatable compartment of the cover magnetic material holder 204 may include a protrusion or recess configured to interface with by a user or automation so that the compartment can be rotated.

[0033] The cover magnetic material 206 may be a ferromagnetic material as defined above. In an embodiment, the cover magnetic material 206 includes a magnet, such as a permanent magnet. In an embodiment, the cover magnetic material includes a material that responds to a magnetic field but is not magnetized itself. In an embodiment, the cover magnetic material 206 is configured so that it can be energized to provide an electromagnet. When the cover magnetic material 206 includes a magnet, the base plate may include a ferromagnetic material as defined above, which is another magnet or a material that is not magnetized but responds to a magnetic field provided by the cover magnetic material. When the cover magnetic material 206 includes a ferromagnetic material that is not magnetized itself, the magnetic material contained in the base plate includes a magnet. The cover magnetic material 206 may be provided as one or more pieces of ferromagnetic material contained in the cover magnetic material holder 204.

[0034] In an embodiment, the cover magnetic material holder 204 may be slidable to move the cover magnetic material 206 so that the photomask container can be switched from a latched state to an unlocked state. In an example of this embodiment, the cover magnetic material holder 204 may be configured to travel in a movement channel 208 that may be formed in the cover body 202. In this embodiment, the sliding of the cover magnetic material holder 204 along the movement channel 208 may align or misalign the cover magnetic material 206 with the magnetic material contained in the bottom plate to increase or decrease the attractive force based on the position of the cover magnetic material 206 relative to the magnetic material contained in the bottom plate and place the photomask container in a latched or unlocked state.

[0035] In an embodiment, the cover magnetic material 206 may be configured to be energized to provide an electromagnet to latch or unlock the container. For example, the cover magnetic material 206 may be a magnetic material that is normally attracted to one or more magnets disposed on the base plate to latch the cover 200 to the base plate. When the photomask container is to be unlocked, the cover magnetic material 206 may be energized to form an electromagnet that repels one or more magnets disposed on the base plate to unlock the cover 200 from the base plate. The cover magnetic material 206 may be energized by an electric current provided by an external source (e.g., automation at a load port or storage device that handles the photomask container, or a handheld tool used by an operator) to form this electromagnet. In such embodiments, the electric current may be provided from the external source to the cover magnetic material 206 through contact at an electrical contact 210 that may be disposed on the cover body 202 or the cover magnetic material holder 204.

[0036] In an embodiment, the cover magnetic material 206 may include a magnet configured to be rotated so that the attraction to the magnetic material included in the bottom plate can be changed to switch the reticle container 200 between the latched state and the unlocked state. Figure 5 Examples of such rotatable magnets and their operation are provided in and discussed below. When rotatable magnets are used as the cover magnetic material 206, the cover magnetic material holder 204 can be any suitable container for allowing the magnet to rotate appropriately, as discussed below.

[0037] Figure 3 A bottom plate of a photomask container according to an embodiment is shown. The bottom plate 300 includes a bottom plate body 302, a bottom plate magnetic material holder 304, and a magnetic material 306. A moving channel 308 may optionally be included in the bottom plate body 302. An electrical contact 310 may optionally be included in the bottom plate body 302 or the bottom plate magnetic material holder 304.

[0038] The base plate 300 may be a photomask container (e.g., as discussed above and Figure 1 The bottom plate 300 may be connected to the photomask container 100 shown in FIG. Figure 2 The cover 200 shown in FIG. 1 is combined with the cover 200 to form a photomask container. The base plate body 302 forms a major portion of the base plate 300. The base plate body 302 can partially define the photomask (e.g., as described above and Figure 1 An area in which the mask 106 shown in FIG. 1 can be accommodated.

[0039] The bottom plate magnetic material holder 304 is configured to accommodate the bottom plate magnetic material 306. The bottom plate magnetic material holder 304 can be any suitable material for accommodating the bottom plate magnetic material 306. In an embodiment, the bottom plate magnetic material 304 includes a polymer material, such as polycarbonate. In an embodiment, the bottom plate magnetic material holder 304 includes a metal material, such as aluminum. In an embodiment, the bottom plate magnetic material holder 304 is integrally formed with the bottom plate body 302 and is made of the same material. In an embodiment, the bottom plate magnetic material holder 304 may include one or more compartments for accommodating the bottom plate magnetic material 306. In an embodiment, the bottom plate magnetic material can be loaded into the bottom plate magnetic material holder 304. In an embodiment, the bottom plate magnetic material holder 304 can hold the bottom plate magnetic material 306 so that the bottom plate magnetic material 306 can be rotated, for example, by allowing a protrusion or recess disposed in the bottom plate magnetic material 306 to be exposed. In an embodiment, the bottom plate magnetic material holder 304 includes one or more rotatable compartments configured to accommodate the bottom plate magnetic material 306. In an embodiment, the rotatable compartments of the bottom plate magnetic material holder 304 may include protrusions or recesses configured to be interfaced with by a user or automation so that the compartments can be rotated.

[0040] The bottom plate magnetic material 306 may be a ferromagnetic material as defined above. In an embodiment, the bottom plate magnetic material 306 includes a magnet, such as a permanent magnet. In an embodiment, the bottom plate magnetic material includes a material that responds to a magnetic field but is not magnetized itself. In an embodiment, the bottom plate magnetic material 306 is configured so that it can be energized to provide an electromagnet. When the bottom plate magnetic material 306 includes a magnet, a cover such as the cover 200 may include a ferromagnetic material as defined above, which is another magnet or a material that is not magnetized but responds to a magnetic field provided by the bottom plate magnetic material. When the bottom plate magnetic material 306 includes a ferromagnetic material that is not magnetized itself, the magnetic material contained in the cover such as the cover 200 includes a magnet. The bottom plate magnetic material 306 may be provided as one or more pieces of ferromagnetic material contained in the bottom plate magnetic material holder 304.

[0041] In an embodiment, the bottom plate magnetic material holder 304 may be slidable to move the bottom plate magnetic material 306 so that the photomask container can be switched from a latched state to an unlocked state. In an example of this embodiment, the bottom plate magnetic material holder 304 may be configured to travel in a movement channel 308 that may be formed in the cover body 302. In this embodiment, the sliding of the bottom plate magnetic material holder 304 along the movement channel 308 may align or misalign the bottom plate magnetic material 306 with the magnetic material contained in the cover to increase or decrease the attractive force based on the position of the bottom plate magnetic material 306 relative to the magnetic material contained in the cover and place the photomask container in a latched or unlocked state.

[0042] In an embodiment, the bottom plate magnetic material 306 may be configured to be energized to provide an electromagnet to latch or unlock the container. For example, the bottom plate magnetic material 306 may be a magnetic material that is normally attracted to one or more magnets disposed on a cover, such as the cover 200, to latch the bottom plate 300 to the bottom plate. When the photomask container is to be unlocked, the bottom plate magnetic material 306 may be energized to form an electromagnet that repels one or more magnets disposed on the bottom plate to unlock the bottom plate 300 from the bottom plate. The bottom plate magnetic material 306 may be energized by an electric current provided by an external source, such as automation at a load port or storage device that handles the photomask container, or a handheld tool used by an operator, to form this electromagnet. In such embodiments, the electric current may be provided from the external source to the bottom plate magnetic material 306 through contact at an electrical contact 310 that may be disposed on the bottom plate body 302 or the bottom plate magnetic material holder 304.

[0043] In an embodiment, the bottom plate magnetic material 306 may include a magnet configured to be rotated so that the attraction to the magnetic material included in the bottom plate can be changed to switch the reticle container 300 between a latched state and an unlocked state. Figure 5 Examples of such rotatable magnets and their operation are provided in and discussed below. When rotatable magnets are used as the bottom plate magnetic material 306, the bottom plate magnetic material holder 304 can be any suitable container for allowing the magnet to rotate appropriately, as discussed below.

[0044] Figure 4 A reticle container in a load port according to an embodiment is shown. The reticle container 400 includes a lid 402 and a bottom plate 404. The lid 402 includes one or more lid magnetic latch features 406. The bottom plate 404 includes one or more bottom plate magnetic latch features 408. The load port 410 is configured to receive the reticle container 400. The load port 410 includes an actuator 412 configured to manipulate at least one of the lid magnetic latch features 406 or the bottom plate magnetic latch features 408 to perform closing of the reticle container 400.

[0045] The reticle container 400 can be any suitable reticle container as described herein. The reticle container 400 is configured to hold a reticle handled by a load port 410 of a tool 414 used to process the reticle, such as by lithography such as extreme ultraviolet (EUV) lithography. The reticle container 400 can be a storage box configured to store the reticle, such as by placing it in a storage device (not shown). The reticle container 400 includes a lid 402 and a bottom plate 404 that combine to form an interior space configured to accommodate the reticle. The reticle container 400 is configured to be secured by an attractive force between a lid magnetic latch feature 406 disposed on the lid 402 and a bottom plate magnetic latch feature disposed on the bottom plate 404.

[0046] The loading port 410 is a portion of the tool 414 that is configured to receive the reticle container 400 and remove or place a reticle from or into the reticle container 400. The loading port 410 includes an actuator 412. The actuator 412 can be any suitable actuator for interfacing with the lid magnetic latch feature 406 and / or the bottom plate magnetic latch feature 408 so that the reticle container 400 can be switched from a latched state to an unlocked state or from an unlocked state to a latched state. In an embodiment, the actuator is configured to push a slidable body included in the lid magnetic latch feature 406 and / or the bottom plate magnetic latch feature 408 to change the alignment of the magnet and the ferromagnetic material so that the lid 402 and the bottom plate 404 have an increased or decreased attraction to each other. In an embodiment, the actuator 412 is configured to rotate the magnet or magnet assembly, such as described below and respectively at Figure 5 6. The actuator 412 can be configured to engage with an interface feature disposed on the rotatable magnet or rotatable magnet assembly to drive rotation to change the alignment of the magnet or the strength of the emitted magnetic field, so that the cover 402 and the base plate 404 have an increased or decreased attraction to each other. In an embodiment, the actuator 412 is configured to engage with an interface feature disposed on the rotatable magnet or rotatable magnet assembly to drive rotation to change the alignment of the magnet or the strength of the emitted magnetic field, so that the cover 402 and the base plate 404 have an increased or decreased attraction to each other. Figure 2 and 3 404 ), so that the actuator 412 can energize the lid magnetic latch feature 406 and / or the bottom plate magnetic latch feature 408. Energization can provide an electromagnet at the lid magnetic latch feature 406 and / or the bottom plate magnetic latch feature 408, which is configured to reduce the attractive force between the lid 402 and the bottom plate 404 or repel each other, so that the lid 402 and the bottom plate 404 can be unlocked and separated.

[0047] Figure 5A rotatable magnet according to an embodiment is shown. The rotatable magnet 500 has a cylindrical shape, including a north pole side 502 and a south pole side 504. The rotatable magnet 500 may further include an interface feature 506. The rotatable magnet 500 is configured to be rotated so that the positions of the north pole side 502 and the south pole side 504 can be reversed relative to the other magnet positions by rotation. In an embodiment, the rotatable magnet 500 can be rotated by a user or automation engaged with the interface feature 506. The interface feature 506 can be a recess or protrusion with a cross-sectional area that allows the rotatable magnet 500 to be easily rotated by engaging with a tool or a user. For example, the cross-sectional area of ​​the interface feature can be a slot, a star, a cross, an ellipse, or any other suitable shape that allows the rotatable magnet to rotate by engaging with the interface feature 506. In an embodiment, the rotatable magnet 500 can be housed in a housing that is rotated to reverse the positions of the north pole side 502 and the south pole side 504. The rotatable magnet 500 can be used to switch between a latched position and an unlocked position by changing the position of the north pole side 502 and the south pole side 504 relative to the north pole and the south pole of another magnet disposed on the opposite portion of the reticle container. In the latched state, the rotatable magnet 500 can be positioned so that the north pole side 502 is positioned toward the south pole of the magnet on the opposite portion of the reticle container, and the south pole side 504 is positioned toward the north pole of the magnet on the opposite portion of the reticle container, so that the portions of the reticle container attract each other. In the unlocked state, the rotatable magnet 500 can be positioned so that the north pole side 502 is positioned toward the north pole of the magnet on the opposite portion of the reticle container, and the south pole side 504 is positioned toward the south pole of the magnet on the opposite portion of the reticle container, so that the portions of the reticle container repel each other.

[0048] In an embodiment, the rotatable magnet 500 is a piece of magnetic material that is magnetized so that it has a north pole side 502 and a south pole side 504. In an embodiment, the rotatable magnet 500 may instead be a bar magnet housed within a cylindrical housing, with the north pole of the bar magnet disposed in the portion of the cylindrical housing corresponding to the north pole side 502 and the south pole of the bar magnet disposed in the portion of the cylindrical housing corresponding to the south pole side 504. The interface feature 506 may be formed as part of the cylindrical housing. Such a rotatable magnet may be used as discussed above.

[0049] Fig. 6A and 6B A rotatable magnet assembly according to an embodiment is shown. The rotatable magnet assembly 600 includes a rotatable magnet segment 602 and a fixed magnet segment 604. The rotatable magnet segment 602 includes a north pole segment 606, a south pole segment 608, and optionally an interface feature 610. The fixed magnet 604 includes a fixed north pole 612 and a fixed south pole 614. In an embodiment, the rotatable magnet assembly 600 may further include an outer sleeve 616 of a ferromagnetic material.

[0050] The rotatable magnet assembly 600 may be oriented as follows: Fig. 6A , where the north pole segment 606 of the rotatable magnet segment 602 is aligned with the fixed north pole 612, and the south pole segment 608 of the rotatable magnet segment 602 is aligned with the fixed south pole 614.

[0051] The rotatable magnet assembly 600 may alternatively be oriented as Figure 6B , where the north pole segment 606 of the rotatable magnet segment 602 is aligned with the fixed south pole 614, and the south pole segment 608 of the rotatable magnet segment 602 is aligned with the fixed north pole 612.

[0052] exist Fig. 6A In the high magnetic field configuration, relative to the Figure 6B When the magnetic field is low, the rotatable magnet assembly 600 provides a stronger magnetic field outside the rotatable magnet assembly 600. For example, when a photomask container including the rotatable magnet assembly 600 in a magnetic latch is in a latched state, the rotatable magnet assembly 600 can be used to lock the photomask container. Fig. 6A The rotatable magnet assembly 600 can be rotated from the fixed magnet 604 by, for example, a user, tool, or automation engaging the interface feature 610 to rotate the rotatable magnet segment 602 relative to the fixed magnet 604. Fig. 6A Switch to the high field configuration Figure 6B When the rotatable magnet assembly 600 is switched to the low magnetic field configuration Figure 6B When in the low magnetic field configuration, the magnetic field outside the rotatable magnet assembly 600 is reduced, thereby reducing the attraction to external ferromagnetic materials (such as ferromagnetic materials contained on the opposite portion of the mask container containing the rotatable magnet assembly 600), so that the container can be placed in an unlocked state.

[0053] aspect:

[0054] It should be understood that any of aspects 1 to 11 may be combined with any of aspects 12 to 19.

[0055] Aspect 1. A photomask container comprising

[0056] a first container section comprising a ferromagnetic material; and

[0057] a second container section comprising one or more magnets,

[0058] wherein the photomask container is configured to switch between a latched state in which the one or more magnets attract the ferromagnetic material of the first container segment and an unlocked state in which the attraction force between the ferromagnetic material and the one or more magnets is reduced so that the first container segment can be separated from the second container segment, and

[0059] The first container segment and the second container segment define an inner space configured to accommodate a photomask.

[0060] Aspect 2. The photomask container of aspect 1, wherein the ferromagnetic material of the first container section comprises one or more magnets.

[0061] Aspect 3. The photomask container of aspect 2, wherein when in the unlocked state, the one or more magnets of the second container segment repel the ferromagnetic material of the first container segment.

[0062] Aspect 4. The photomask container according to any one of aspects 1 to 3, wherein the one or more magnets of the second container segment include at least one rotatable magnet.

[0063] Aspect 5. The reticle container according to any one of aspects 1 to 4, wherein the second container segment comprises a slidable body comprising the one or more magnets.

[0064] Aspect 6. The reticle container according to aspect 5, wherein the slidable body comprises a plurality of magnets.

[0065] Aspect 7. The reticle container according to aspect 5 or aspect 6, wherein the slidable body comprises a polymer material.

[0066] Aspect 8. The photomask container according to any one of aspects 1 to 7, wherein the ferromagnetic material of the first container segment is disposed on a slidable body contained in the first container segment.

[0067] Aspect 9. The photomask according to aspect 8, wherein the slidable body comprises a polymer material.

[0068] Aspect 10. The photomask container of any one of aspects 1 to 9, wherein the ferromagnetic material of the first container section is configured to be energized to provide an electromagnet.

[0069] Aspect 11. The reticle container of any one of aspects 1 to 10, wherein the one or more magnets are configured to be energized to switch the container to the unlocked state.

[0070] Aspect 12. A method for fastening and opening a photomask container, comprising:

[0071] magnetically latching the first container segment to the second container segment by an attractive force between a ferromagnetic material contained in the first container segment and one or more magnets contained in the second container segment; and

[0072] The first container segment is unlocked from the second container segment by reducing the attractive force between the ferromagnetic material and the one or more magnets such that the first container segment can be separated from the second container segment.

[0073] Aspect 13. The method of aspect 12, wherein switching the magnetic latch comprises: moving one or more magnets and the ferromagnetic material away from each other.

[0074] Aspect 14. The method according to aspect 13, wherein moving the one or more magnets and the ferromagnetic material away from each other includes: sliding a body including one of the one or more magnets or the ferromagnetic material.

[0075] Aspect 15. The method according to any one of aspects 12 to 14, wherein the ferromagnetic material contained in the first container segment comprises one or more magnets.

[0076] Aspect 16. A method according to Aspect 15, wherein unlocking the first container segment from the second container segment includes: positioning the one or more magnets of the ferromagnetic material contained in the first container segment to be opposite to the one or more magnets of the second container segment having the same polarity.

[0077] Aspect 17. A method according to Aspect 16, wherein positioning the one or more magnets of the ferromagnetic material contained in the first container segment relative to one or more magnets of the second container segment having the same polarity includes: sliding the body containing the one or more magnets of the ferromagnetic material contained in the first container segment or the one or more magnets of the second container segment.

[0078] Aspect 18. A method according to any one of Aspects 16 to 17, wherein positioning the one or more magnets of the ferromagnetic material contained in the first container segment relative to the one or more magnets of the second container segment having the same polarity includes: rotating at least one of the one or more magnets of the ferromagnetic material contained in the first container segment or the one or more magnets of the second container segment.

[0079] Aspect 19. The method according to any one of aspects 12 to 18, wherein unlocking the first container segment and the second container segment includes: energizing an electromagnet so that the one or more magnets and the ferromagnetic material repel each other.

[0080] The examples disclosed in this application should be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all changes within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims

1. A photomask container, comprising a first container section comprising a ferromagnetic material; and a second container section comprising one or more magnets, wherein the photomask container is configured to switch between a latched state in which the one or more magnets attract the ferromagnetic material of the first container segment and an unlocked state in which the attraction force between the ferromagnetic material and the one or more magnets is reduced so that the first container segment can be separated from the second container segment, and The first container section and the second container section define an inner space configured to accommodate a photomask.

2. The photomask container of claim 1, wherein the ferromagnetic material of the first container section comprises one or more magnets.

3. The reticle container of claim 2, wherein the one or more magnets of the second container segment repel the ferromagnetic material of the first container segment when in the unlocked state.

4. The photomask container of claim 1, wherein the one or more magnets of the second container segment include at least one rotatable magnet.

5. The reticle container of claim 1, wherein the second container segment comprises a slidable body comprising the one or more magnets.

6. The reticle container of claim 5, wherein the slidable body comprises a plurality of magnets.

7. The reticle container of claim 5, wherein the slidable body comprises a polymer material.

8. The reticle container of claim 1, wherein the ferromagnetic material of the first container section is disposed on a slidable body contained in the first container section.

9. The reticle container of claim 8, wherein the slidable body comprises a polymer material.

10. The reticle container of claim 1, wherein the ferromagnetic material of the first container section is configured to be energized to provide an electromagnet.

11. The reticle container of claim 1 , wherein the one or more magnets of the second container are configured to be energized to switch the container to the unlocked state.

12. A method for fastening and opening a photomask container, comprising: magnetically latching the first container segment to the second container segment by an attractive force between a ferromagnetic material contained in the first container segment and one or more magnets contained in the second container segment; and The first container segment is unlocked from the second container segment by reducing the attractive force between the ferromagnetic material and the one or more magnets such that the first container segment can be separated from the second container segment.

13. The method of claim 12, wherein switching the magnetic latch comprises moving one or more magnets and the ferromagnetic material away from each other.

14. The method of claim 13, wherein moving the one or more magnets and the ferromagnetic material away from each other comprises sliding a body comprising one of the one or more magnets or the ferromagnetic material.

15. The method of claim 12, wherein the ferromagnetic material contained in the first container segment comprises one or more magnets.

16. The method of claim 15, wherein unlocking the first container segment from the second container segment comprises positioning the one or more magnets of the ferromagnetic material contained in the first container segment to oppose the one or more magnets of the second container segment having the same polarity.

17. The method of claim 16, wherein positioning the one or more magnets of the ferromagnetic material contained in the first container segment relative to one or more magnets of the second container segment having the same polarity comprises sliding a body containing the one or more magnets of the ferromagnetic material contained in the first container segment or the one or more magnets of the second container segment.

18. The method of claim 16, wherein positioning the one or more magnets of the ferromagnetic material contained in the first container segment relative to the one or more magnets of the second container segment having the same polarity comprises: rotating at least one of the one or more magnets of the ferromagnetic material contained in the first container segment or the one or more magnets of the second container segment.

19. The method of claim 12, wherein unlocking the first container segment and the second container segment comprises energizing an electromagnet such that the one or more magnets and the ferromagnetic material repel each other.

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