Optical multiplexer, optical multiplexing member, visible light source module, and optical engine

Abstract

The invention provides an optical multiplexer which can be connected with or integrated with an optical modulator using a lithium niobate film and can cope with high output. An optical multiplexer (100) according to the present invention is provided with: three optical input ports (21-1i, 21-2i, 21-3i) into which a plurality of laser beams having different wavelengths can be respectively incident; two light output ports (22-1o, 22-2o) capable of combining and emitting the three laser beams; three optical input side optical waveguides (21-1, 21-2, 21-3) extending from each of the three optical input ports (21-1i, 21-2i, 21-3i); two light output side optical waveguides (22-1, 22-2) extending from each of the two light output ports (22-1o, 22-2o); and an optical multiplexing unit (50) to which the three optical input-side optical waveguides (21-1, 21-2, 21-3) and the two optical output-side optical waveguides (22-1, 22-2) are connected.

Description

Technical Field

[0001] The invention relates to an optical combiner, an optical combiner component, a visible light source module and an optical engine. This application claims priority based on Japanese Patent Application No. 2023-106470 filed in Japan on June 28, 2023, and the contents are cited herein. Background Art

[0002] Currently, in xR technologies such as VR (Virtual Reality) or AR (Augmented Reality), glasses-type terminals are being studied. In particular, in recent years, retinal scanning displays that allow users to visually recognize images by imaging two-dimensionally scanned light on the user's retina have attracted attention. In retinal scanning displays, generally speaking, three colors of visible light emitted from light sources such as LEDs (Light Emitting Diodes) or LDs (Laser Diodes) corresponding to the colors R (red), G (green), and B (blue) are combined on one optical axis. The combined three-color visible light is transmitted to the image display unit. The image display unit performs two-dimensional scanning on the transmitted light and makes it incident on the user's pupil. The incident light forms an image on the user's retina, and the user recognizes the image. In this case, the retina is the screen that displays the image.

[0003] For example, Patent Document 1 discloses a structure of a retinal projection type display using a Mach-Zehnder type light modulator. Prior art literature Patent Literature

[0004] Patent Document 1: Japanese Patent No. 6728596 Patent Document 2: Japanese Patent No. 6787397 Patent Document 3: Japanese Patent No. 6572377 Patent Document 4: Japanese Patent Application Publication No. 2012-48071 Patent Document 5: Japanese Patent Application Publication No. 2020-27170 Summary of the invention Problems to be solved by the invention

[0005] In the retinal projection display disclosed in Patent Document 1, a plurality of optical waveguides are close to each other but are not combined at the emission portion, so the optical axis differs for each wavelength, and control of the emission light becomes complicated.

[0006] Furthermore, a visible light modulator using a lithium niobate film is disclosed in Patent Document 2. Although there is a demand for an RGB optical combiner that can be connected to or integrated with a visible light modulator using a lithium niobate film, research has not yet been conducted.

[0007] Directional couplers are generally studied for multiplexing visible light (see, for example, Patent Document 3). These are made of glass materials and have excellent stability, but when a lithium niobate substrate with a large Δn is used, the coupling length becomes long and cannot be miniaturized.

[0008] Patent Documents 4 and 5 disclose structures of RGB combiners using MMI (Multi-Mode Interferometer), but both of them use glass-based materials and do not mention structures using lithium niobate films. The MMI type optical multiplexer uses a plurality of waveguide ports on the optical input side to input a plurality of input signals, and uses a single waveguide port on the optical output side for the output signal, and combines all the input signals to output as an output signal.

[0009] Currently, no optical combiner capable of handling high output has been studied.

[0010] An object of the present invention is to provide an optical combiner capable of handling high output and connectable to or integrated with an optical modulator using a lithium niobate film, an optical combining component including the optical combiner, a visible light source module, and an optical engine. Technical solutions to the problem

[0011] In order to solve the above problems, the present invention provides the following technical means.

[0012] Mode 1 of the present invention is that the optical combiner is an optical combiner that combines multiple lasers with different wavelengths, and the optical combiner comprises: multiple optical input ports, which can respectively input the multiple lasers; more than two optical output ports, which can combine and output the multiple lasers; multiple optical input side optical waveguides, which extend from each of the multiple optical input ports; more than two optical output side optical waveguides, which extend from each of the more than two optical output ports; and an optical combining section, which connects the multiple optical input side optical waveguides and the more than two optical output side optical waveguides.

[0013] A second aspect of the present invention is the optical multiplexer according to the first aspect, wherein the plurality of optical input ports include two or more optical input ports for at least one laser beam.

[0014] A third aspect of the present invention is the optical multiplexer of the second aspect, wherein the plurality of light input ports are constituted by two or more light input ports for all the laser beams.

[0015] A fourth aspect of the present invention is the optical multiplexer according to any one of the first to third aspects, wherein the interval between the optical output ports having the largest interval among the two or more optical output ports is 25 μm or less.

[0016] A fifth aspect of the present invention is the optical multiplexer of any one of the first to fourth aspects, wherein a distance between adjacent optical input ports among two or more optical input ports provided for one laser beam is 0.5 μm or less.

[0017] A sixth aspect of the present invention is the optical multiplexer of any one of aspects 1 to 5, wherein the thickness of the slab portion provided inside the light input side optical waveguide is thicker than the thickness of the slab portion provided outside the light input side optical waveguide.

[0018] A seventh aspect of the present invention is the optical multiplexer according to any one of the first to sixth aspects, wherein the optical multiplexing section is a multi-mode interference type multiplexing section.

[0019] Mode 8 of the present invention is a photosynthetic component, comprising: a substrate, which is composed of a material different from lithium niobate; and a photosynthetic functional layer, which is formed on the main surface of the substrate and is composed of a lithium niobate film, and any one of Modes 1 to 7 photosynthesizer is formed in the photosynthetic functional layer.

[0020] A ninth aspect of the present invention is a visible light source module comprising: the optical combining component of the eighth aspect; and a plurality of visible light laser light sources that emit visible light lasers combined by the optical combining component.

[0021] A tenth aspect of the present invention is an optical combining member with a light modulation function, comprising a Mach-Zehnder optical modulator in the optical combining function layer of the optical combining member of the eighth aspect.

[0022] Mode 11 of the present invention is a visible light source module comprising: the optical combining component with light modulation function of mode 10; and a plurality of visible light laser light sources that emit visible light lasers combined by the optical combining component with light modulation function.

[0023] A twelfth aspect of the present invention is an optical engine comprising: the visible light source module of the ninth aspect; and a light scanning mirror that changes the angle of light emitted from the visible light source module and reflects the light so as to display an image.

[0024] A thirteenth aspect of the present invention is an optical engine comprising: the visible light source module of the eleventh aspect; and a light scanning mirror that changes the angle of light emitted from the visible light source module and reflects the light so as to display an image. Effects of the Invention

[0025] According to the present invention, it is possible to provide an optical multiplexer capable of handling high output that can be connected to or integrated with an optical modulator using a lithium niobate film. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic plan view showing the optical multiplexer according to the first embodiment. Figure 2 It is a schematic plan view showing an optical multiplexer according to the second embodiment. Figure 3 It is a schematic plan view showing an optical multiplexer according to a third embodiment. Figure 4 yes Figure 1 The components shown are formed on the edges of the optical wave combining member of the optical wave combining function layer composed of lithium niobate. Figure 1 Schematic diagram of the cross section taken along line XX'. Figure 5 This is a schematic cross-sectional view taken along the YZ plane when the cross section of the MMI-type optical multiplexing unit is a trapezoidal shape. Figure 6 It is a schematic cross-sectional view taken along the YZ plane in the case where the MMI type optical multiplexing section has a flat plate section on the substrate side. Figure 7 This is a schematic cross-sectional view taken along the YZ plane in a case where the cross section of the MMI-type optical multiplexing section is trapezoidal in shape and has a flat plate section on the substrate side. Figure 8 It is a schematic plan view of a modified example of the optical combining member according to the embodiment of the present invention. Fig. 9 It is a schematic plan view of the visible light source module according to the first embodiment. Fig.10 It is a schematic plan view of a visible light source module according to the second embodiment. Fig.11 This is a conceptual diagram for explaining the optical engine involved in this embodiment. Fig. 12A This is a conceptual diagram for explaining the optical engine involved in this embodiment. Fig. 12B This is a conceptual diagram for explaining the optical engine involved in this embodiment. Fig.13 This is a diagram showing the relationship between the laser beam diameter and the distance Z from the laser emitting surface according to each example. DETAILED DESCRIPTION

[0027] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings as appropriate. In order to facilitate the understanding of the features, the drawings used in the following description may be enlarged to show the features as an expedient part, and the dimensional ratios of the components may be inconsistent with the actual ones. The materials, dimensions, etc. illustrated in the following description are only examples, and the present invention is not limited thereto, and the implementation can be appropriately changed within the scope of obtaining the effects of the present invention.

[0028] [Optical Combiner (First Embodiment)] Figure 1 It is a schematic plan view showing the optical multiplexer according to the first embodiment. Figure 1 The optical combiner 100 shown is an optical combiner for combining three lasers of different wavelengths, and comprises: three optical input ports (21-1i, 21-2i, 21-3i) capable of respectively inputting three lasers of different wavelengths; two optical output ports (22-1o, 22-2o) capable of combining and emitting the three lasers; three optical input side optical waveguides (21-1, 21-2, 21-3) extending from each of the three optical input ports (21-1i, 21-2i, 21-3i); two optical output side optical waveguides (22-1, 22-2) extending from each of the two optical output ports (22-1o, 22-2o); and an optical combining section 50 connecting the three optical input side optical waveguides (21-1, 21-2, 21-3) and the two optical output side optical waveguides (22-1, 22-2).

[0029] exist Figure 1 In the figure, the X direction is a direction perpendicular to the side surface 100A where the light input port is arranged, the Y direction is a direction perpendicular to the X direction, and the Z direction is a direction perpendicular to a plane formed by the X direction and the Y direction.

[0030] The optical combiner 100 has two optical output ports for outputting laser light, and has a structure of two optical output side optical waveguides connected to each of the two optical output ports. By having a plurality of optical output side optical waveguides, the energy density of the laser light guided in the optical waveguide can be dispersed, and damage to the optical waveguide can be suppressed. This is an effective countermeasure for damage to the optical waveguide of high output laser light (for example, laser light of 100 mW or more).

[0031] As an example, the dimensions of the light input side optical waveguide and the light output side optical waveguide may be 0.1 to 5 μm in width and 0.1 to 5 μm in height.

[0032] The optical multiplexer 100 has a structure that can cope with three situations where the input laser wavelengths are different, but is not limited to being used for three lasers with different wavelengths, and can also be used for two lasers with different wavelengths. A structure can be used in which the number of optical input ports or the number of optical input-side optical waveguides connected to the optical input ports is changed according to the number of lasers. The input laser light having different wavelengths may be visible light, but is not limited to visible light, and may be configured to be used for visible light laser light and laser light other than visible light.

[0033] The optical combiner 100 has four side surfaces 100A, 100B, 100C, and 100D, and has a structure in which three optical input ports are arranged on the first side surface 100A, and two optical output ports are arranged on the third side surface 100C. However, a structure in which two optical output ports are arranged on the second side surface 100B or the fourth side surface 100D can also be adopted.

[0034] It is preferred that the interval d between the two optical output ports 22-1o and 22-2o is o The distance d is 25 μm or less. This is to make the optical combiner 100 appear as a single beam and enable a clear image to be seen when the optical combiner 100 is applied to retinal projection type XR glasses. o like Figure 1 As shown, this is the distance between the center of the optical output port 22 - 1o and the center of the optical output port 22 - 2o.

[0035] The optical combining section 50 is a multi-mode interference (MMI) type combiner, but a directional coupler or a Y-shaped combiner may also be used. The optical combining section 50 is a 3-input 2-output MMI type optical combiner. In the optical multiplexer 100 , the MMI-type optical multiplexing unit 50 has a single-stage structure, but a two-stage or higher-stage structure may be employed.

[0036] The optical input side optical waveguide and the optical output side optical waveguide connected to the optical combining part 50 as an MMI type optical combiner preferably have a tapered portion whose width is wider as it approaches the input and output ports of the optical combining part 50. This is because the optical input side optical waveguide and the optical output side optical waveguide connected to the optical combining part 50 are set in a manner to propagate a laser of a single mode (0th order mode, fundamental mode), and the optical combining part 50 is set in a manner to propagate a laser of a multi-mode (0th order mode to high-order mode). Therefore, when input from the optical input side optical waveguide to the optical combining part 50, or output from the optical combining part 50 to the optical output side optical waveguide, coupling loss occurs due to the mode mismatch between the incident single mode and the multi-mode. In contrast, when a tapered portion is provided at the input and output ports, the mode mismatch between the incident single mode and the multi-mode is eased and the coupling loss is reduced. The wider the width of the tapered portion is, the more the mode mismatch is eased and the greater the effect of reducing the coupling loss is.

[0037] Figure 1 The three optical waveguides (21-1, 21-2, 21-3) on the light input side and the two optical waveguides (22-1, 22-2) on the light output side are all structures extending linearly along the x direction, but are not limited to such structures. Figure 3 Like the light output side optical waveguides (22-11, 22-12, 22-13) shown, it has a curved portion.

[0038] [Optical combiner (second embodiment)] Figure 2 1 is a schematic plan view showing an optical multiplexer according to the second embodiment. L1, L2, and L3 in the figure conceptually represent three lasers. The description of the same components as those in the first embodiment may be omitted.

[0039] Figure 2 The optical combiner 101 shown is an optical combiner for combining three lasers of different wavelengths, and has two optical input ports for each of the three lasers (L1, L2, L3), and a total of six optical input ports (21-11i, 21-12i, 21-21i, 21-22i, 21-31i, 21-32i), and has: two optical output ports (22-1o, 22-2o) capable of combining and emitting the three lasers; and outputting the three lasers from the six optical input ports (21-11i, 21-12i, 21-21i, 21-22i, 21-31i, 21-32i). 31i, 21-32i); 6 light input side optical waveguides (21-11, 21-12, 21-21, 21-22, 21-31, 21-32) respectively extending from 2 light output side optical waveguides (22-1, 22-2) respectively extending from 2 light output ports (22-1o, 22-2o); and an optical combining section 51 connecting the 6 light input side optical waveguides (21-11, 21-12, 21-21, 21-22, 21-31, 21-32) and the 2 light output side optical waveguides (22-1, 22-2).

[0040] Optical multiplexer 101 has two optical input ports for inputting laser beams for each laser beam. By having multiple optical input ports for inputting laser beams for each laser beam, the power density of the laser beam guided to the optical waveguide on the optical input side can be dispersed, thereby suppressing damage to the optical waveguide on the optical input side. That is, the optical combiner involved in the second embodiment is a structure that not only has an optical output side optical waveguide, but also has multiple optical input side optical waveguides for each laser. Therefore, the power density of the laser guided by the optical input side optical waveguide is dispersed, and damage to the optical input side optical waveguide can be suppressed.

[0041] The interval d between the optical input ports 21-11i and 21-12ii , the interval d between the optical input ports 21-21i and 21-22i i , and the interval d between the optical input ports 21-31i, 21-23i i , preferably less than 0.5 μm. This is because the laser light spreads in a Gaussian shape, so the closer to the center, the stronger the power. Therefore, the power of the laser light L1 should be input to the optical waveguide on the light input side as much as possible. In addition, if the interval between the optical input ports is less than 0.5 μm, the reduction in the coupling efficiency between the laser light and the optical waveguide on the light input side can be suppressed.

[0042] As in the first embodiment, the interval d between the two optical output ports 22-1o and 22-2o is preferably o The distance d is 25 μm or less. This is to make the optical combiner 100 appear as a single beam and enable a clear image to be seen when the optical combiner 100 is applied to retinal projection type XR glasses. o picture Figure 2 As shown, this is the distance between the center of the optical output port 22 - 1o and the center of the optical output port 22 - 2o.

[0043] The optical multiplexing unit 51 is a 6-input 2-output MMI type optical multiplexer.

[0044] [Optical combiner (third embodiment)] Figure 3 1 is a schematic plan view showing an optical multiplexer according to a third embodiment. L1, L2, and L3 in the figure conceptually represent three lasers. The description of the same components as those in the above embodiment may be omitted.

[0045] Figure 3The optical combiner 102 shown is an optical combiner for combining three lasers of different wavelengths, and has three optical input ports for each of the three lasers (L1, L2, L3), a total of nine optical input ports (21-111i, 21-112i, 21-113i, 21-121i, 21-122i, 21-123i, 21-131i, 21-132i, 21-133i), and three optical output ports (22-11o, 22-12o, 22-13o) capable of combining and emitting the three lasers; 33i) respectively extending from 9 optical input side optical waveguides (21-111, 21-112, 21-113, 21-121, 21-122, 21-123, 21-131, 21-132, 21-133); 3 optical output side optical waveguides (22-11o, 22-12o, 22-13o) respectively extending from 3 optical output ports (22-11o, 22-12o, 22-13o); and an optical combining unit 52 which connects 9 optical input side optical waveguides (21-111, 21-112, 21-113, 21-121, 21-122, 21-123, 21-131, 21-132, 21-133) and 3 optical output side optical waveguides (22-11, 22-12, 22-13).

[0046] The optical combiner 102 has three optical output ports for outputting laser light, and has a structure having three optical output side optical waveguides connected to each of the three optical output ports. By having a plurality of optical output side optical waveguides, the power density of the laser light guided in the optical waveguide can be dispersed, thereby suppressing damage to the optical waveguide. The optical combiner involved in the third embodiment is the same as the optical combiner involved in the second embodiment, and is not only provided with an optical output side optical waveguide, but also has a plurality of optical input side optical waveguides for each laser. Therefore, the power density of the laser guided to the optical input side optical waveguide is dispersed, and damage to the optical input side optical waveguide can be suppressed.

[0047] As in the first embodiment, it is preferable that the interval d between the two optical output ports 22-11o and 22-12o at the two ends of the three optical output ports 22-11o, 22-12o, and 22-13o is o The distance d between two adjacent optical output ports 22-11o and 22-13o is preferably o1 and the interval d between the two optical output ports 22-12o and 22-13o o1 Less than 10 μm. When the optical combiner 100 is applied to retinal projection type XR glasses, it appears as a single beam, and a clear image can be seen. o like Figure 2 As shown, this is the distance between the center of the optical output port 22 - 1o and the center of the optical output port 22 - 2o.

[0048] and Figure 2 As in the optical multiplexer 101 shown, it is preferable that the interval between adjacent optical input ports of the laser beams L1, L2, and L3 be 0.5 μm or less. That is, it is preferred that the interval between the optical input ports 21-111i and 21-112i, the interval between the optical input ports 21-112i and 21-113i, the interval between the optical input ports 21-121i and 21-122i, the interval between the optical input ports 21-122i and 21-123i, the interval between the optical input ports 21-131i and 21-132i, and the interval between the optical input ports 21-132i and 21-133i be 0.5 μm or less. Since the laser light spreads in a Gaussian shape, the closer to the center, the stronger the power. Therefore, the power of the laser light L1 is input to the optical input side optical waveguide as much as possible. In addition, if the interval between the optical input ports is 0.5 μm or less, the reduction in the coupling efficiency between the laser light and the optical input side optical waveguide can be suppressed.

[0049] The optical multiplexing unit 52 is a 6-input 3-output MMI type optical multiplexer.

[0050] 〔Photosynthesis component〕 The optical combining component involved in the embodiment of the present invention has a substrate composed of a material different from lithium niobate, and an optical combining function layer formed on the main surface of the substrate and composed of a lithium niobate film, and the optical combiner involved in the above embodiment is formed in the optical combining function layer. For the components described below, the components having the same functions as in the above embodiment are sometimes marked with the same reference numerals and their descriptions are omitted. Figure 4 In the optical wave combining component 200 shown in FIG. Figure 1 The case where the optical combiner 100 shown is formed on the optical combining function layer is described as an example.

[0051] Figure 4 yes Figure 1 The optical combiner 100 shown in the figure has an optical combiner member 200 formed on the optical combiner function layer made of lithium niobate along the YZ plane ( Figure 1 Schematic diagram of the cross section taken from (X-X'). Figure 4The optical combining component 200 shown comprises a substrate 10 formed of a material different from lithium niobate, and an optical combining functional layer 20 formed on the main surface of the substrate 10 and formed of lithium niobate, and the above-mentioned optical input port, the above-mentioned optical output port, the above-mentioned optical combining portion, the above-mentioned input tapered portion, the above-mentioned output tapered portion, the optical input side optical waveguide and the above-mentioned output side optical waveguide are formed in the optical combining functional layer 20.

[0052] In the optical combining component 200, when the refractive index difference between the waveguide core film and the waveguide cladding film is Δn, if the waveguide core film is lithium niobate, Δn can be designed to be a value larger than that of materials such as glass, and the curvature radius of the optical waveguide can be reduced. Furthermore, by using a multi-mode interference optical combining part, the increase in coupling length can be prevented compared to the case of using a directional coupler, thereby achieving both increased design freedom and miniaturization.

[0053] The optical combining functional layer 20 includes a waveguide core film 24 composed of a lithium niobate film on which the optical input port, the optical output port, the optical combining section, the optical input side optical waveguide, and the output side optical waveguide are formed, and a waveguide cladding (buffer) film 25 formed on the waveguide core film 24 so as to cover them. Hereinafter, the reference numeral 24 may also be used for the lithium niobate film.

[0054] Examples of the substrate 10 include a sapphire substrate, a Si substrate, and a thermally oxidized silicon substrate. Since the photosynthetic wave function layer 20 is composed of a lithium niobate (LiNbO3) film, there is no particular limitation as long as the refractive index is lower than that of the lithium niobate film. As a substrate that can form a single-crystal lithium niobate film as an epitaxial film, a sapphire single-crystal substrate or a silicon single-crystal substrate is preferred. Although the crystal orientation of the single-crystal substrate is not particularly limited, for example, since the c-axis oriented lithium niobate film has a three-fold symmetry, the underlying single-crystal substrate is also expected to have the same symmetry. In the case of a sapphire single-crystal substrate, a c-plane substrate is preferred, and in the case of a silicon single-crystal substrate, a (111)-plane substrate is preferred.

[0055] The lithium niobate film is, for example, a c-axis oriented lithium niobate film. The lithium niobate film is, for example, an epitaxial film grown epitaxially on the substrate 10. An epitaxial film refers to a single crystal film whose crystal orientation is uniformly aligned using a substrate as a base. An epitaxial film is a film having a single crystal orientation in the z direction and in the xy plane direction, and is a film in which the crystal is uniformly oriented in the x-axis, y-axis, and z-axis directions. Whether the film formed on the substrate 10 is an epitaxial film can be proved, for example, by confirming the peak intensity and pole at the orientation position of 2θ-θ X-ray diffraction.

[0056] Specifically, when measuring by 2θ-θ X-ray diffraction, all peak intensities other than the target surface are less than 10% of the maximum peak intensity of the target surface, preferably less than 5%. For example, when the lithium niobate film is a c-axis oriented epitaxial film, the peak intensity other than the (00L) surface is less than 10% of the maximum peak intensity of the (00L) surface, preferably less than 5%. Here, (00L) is a general term for equivalent surfaces such as (001) and (002).

[0057] In addition, under the conditions for confirming the peak intensity at the above-mentioned orientation position, only the orientation in one direction is indicated. Therefore, even if the above-mentioned conditions are obtained, when the crystal orientation in the plane is inconsistent, the intensity of the X-ray at a specific angle position is not high, and the poles are not visible. For example, in the case where the lithium niobate film is a lithium niobate film, since LiNbO3 is a trigonal crystal structure, the poles of LiNbO3 (014) in the single crystal become three. In the case of lithium niobate, it is known that epitaxial growth is carried out in a state of so-called twin crystals in which the crystals are symmetrically combined after rotating 180° around the c-axis. In this case, the three poles become symmetrically combined in pairs, so the poles become six. In addition, in the case where a lithium niobate film is formed on a silicon single crystal substrate of the (100) plane, the substrate becomes four-fold symmetric, so 4x3=12 poles are observed. In addition, in the present application, a lithium niobate film epitaxially grown in a twin crystal state is also included in the epitaxial film.

[0058] The composition of lithium niobate is Li x Nb y O z . A is an element other than Li, Nb, and O. x is greater than or equal to 0.5 and less than or equal to 1.2, preferably greater than or equal to 0.9 and less than or equal to 1.05. y is greater than or equal to 0 and less than or equal to 0.5. z is greater than or equal to 1.5 and less than or equal to 4.0, preferably greater than or equal to 2.5 and less than or equal to 3.5. Elements of A are, for example, K, Na, Rb, Cs, Be, Mg, Ca, Sr, Ba, Ti, Zr, Hf, V, Cr, Mo, W, Fe, Co, Ni, Zn, Sc, and Ce, and combinations of two or more of these elements are also possible. Furthermore, the lithium niobate film may be a lithium niobate single crystal thin film bonded to a substrate.

[0059] The thickness of the lithium niobate film is, for example, 2 μm or less. The thickness of the lithium niobate film is the thickness of the portion other than the ridge. The thickness of the lithium niobate film may be optimally designed according to the wavelength used, the shape of the ridge, and the like.

[0060] The waveguide is a ridge protruding from the first surface 24A of the lithium niobate film 24. The first surface 24A is the upper surface of the portion (slab layer) of the lithium niobate film 24 other than the ridge. like Figure 4 As shown in FIG. 1 , the cross-sectional shape of the light input side optical waveguides 21-1, 21-2, and 21-3 is a rectangular cross-sectional shape, but any shape that can guide light may be used, such as a trapezoid, a triangle, a semicircle, etc. The width Wa of the three ridges in the y direction is preferably 0.2 μm or more and 5.0 μm or less, and the height of the three ridges (the protruding height Ha from the first surface 24A) is preferably 0.1 μm or more and 1.0 μm or less, for example. The same is true for the other optical waveguides.

[0061] By making the other optical waveguides 21-1, 21-2, and 21-3 on the light input side Figure 1 The size of the optical waveguide shown is about the wavelength of the laser light, and can propagate in a single mode.

[0062] <MMI type optical combiner> (1) MMI-type optical combining section with a trapezoidal cross section The optical combining section described above is an MMI type optical combiner (hereinafter sometimes referred to as an "MMI type optical combining section"). MMI type optical combiner Figure 5 As shown in FIG. 1 , it is sometimes preferable that the cross section taken in the direction perpendicular to the traveling direction of light has a trapezoidal shape. Also, it is sometimes preferable that the inclination angle θ of the trapezoidal shape is 40° to 85°. This is to improve the dimensional margin of the width W of the MMI-type optical combining portion so that the optimum width of the MMI-type optical combining portion becomes larger and processing becomes easier. The results were obtained by comparing the propagation losses of the three colors of RGB light through simulation when the cross section of the MMI optical multiplexing unit taken in a direction perpendicular to the light traveling direction was trapezoidal and rectangular. In the model used in this simulation, the height T of the MMI-type optical combining part (ridge) is set to 0.7 μm, and the width of the MMI-type optical combining part at 1 / 2 of the height T is set to W. The center CC of the ridge is fixed, and the inclination angle θ between the lower surface and the inclined part is kept fixed while expanding or contracting dW / 2 (i.e., dW in total) on both sides to simulate the propagation loss during RGB combining. In a 2x1 MMI type optical combiner that combines two colors of light, when θ is 85°, 70°, and 40°, the margin is 0.3 μm, and the optimal width W is 6.6 μm, 6.6 μm, and 6.9 μm, respectively.

[0063] (2) MMI-type optical combining section with a flat plate section The MMI type optical combiner can also be Figure 6 As shown, a flat plate portion is provided on the substrate side. Figure 6The illustrated MMI type optical combining section 50A has a ridge 50A- 1 and further has a slab section 50A- 2 on the substrate side. By having a flat plate portion, the width dimension margin may be further expanded, and processing may be easier. In addition, the optimal width W may be further expanded, and processing may be easier. Figure 6 In the case of the structure of the model shown, the propagation loss (dB) of the fundamental mode (TM0) and the high-order mode (TM1, TM2) of the three colors of RGB when RGB is combined is simulated. The height Tslab of the slab portion is set to 0.2 μm, and the height T of the MMI type optical combining portion is the height obtained by adding the height of the ridge 50A-1 and the height of the slab portion 50A-2. The width W of the MMI type optical combining portion is 6.5 μm. By comparison, the propagation loss of each light in the case without the flat plate portion and the case with the flat plate portion is compared. In the case with the flat plate portion, the difference in propagation loss in RGB is reduced compared to the case without the flat plate portion. In addition, the difference in propagation loss from the case with the flat plate portion to the case without the flat plate portion shows that the propagation loss of the high-order mode increases and the propagation is suppressed. Therefore, it can be seen that the provision of the flat plate portion is effective for single mode.

[0064] In addition, if Figure 7 As shown, the MMI optical combining section 50B having a trapezoidal cross section may have a ridge 50B-1 and a flat plate section 50B-2 on the substrate side. The flat plate section may further increase the width dimension margin and the optimum width W, making processing easier.

[0065] Figure 8 It is a schematic plan view of a modified example of the optical combining member according to the embodiment of the present invention. Figure 8 The optical combining member 300 shown in the figure includes a substrate 10 made of a material different from lithium niobate (see Figure 4 ), and the optical combining functional layer 20 formed on the main surface of the substrate 10 and composed of a lithium niobate film, is an optical combining component with an optical modulation function having an optical modulation function in the optical combining functional layer 20.

[0066] The optical multiplexing member 300 with a light modulation function includes the optical multiplexing unit 50 according to the above-mentioned embodiment (see Figure 1 ) and a Mach-Zehnder type optical modulator 40. The Mach-Zehnder optical modulator 40 includes three Mach-Zehnder optical waveguides 40 - 1 , 40 - 2 , and 40 - 3 .

[0067] As the Mach-Zehnder optical modulator 40, a known Mach-Zehnder optical modulator or optical waveguide can be used to split (demultiplex) a light beam with the same wavelength and phase into two pairs of light beams, and then combine (combine) them with different phases. Depending on the phase difference, the intensity of the combined light beam is different.

[0068] Figure 8 The Mach-Zehnder optical waveguides 40 ( 40 - 1 , 40 - 2 , 40 - 3 ) shown each include a first optical waveguide 41 , a second optical waveguide 42 , an input path 43 , an output path 44 , a branching portion 45 , and a coupling portion 46 . The output path 44 of the Mach-Zehnder optical waveguide 40-1 is connected to the optical waveguide 21-1 on the light input side of the optical multiplexing section 50. In addition, the output path 44 of the Mach-Zehnder optical waveguide 40-2 is connected to the optical waveguide 21-2 on the light input side of the optical multiplexing section 50. In addition, the output path 44 of the Mach-Zehnder optical waveguide 40-3 is connected to the optical waveguide 21-3 on the light input side of the optical multiplexing section 50. Figure 8 The first optical waveguide 41 and the second optical waveguide 42 shown in the figure are structured to extend linearly in the x direction except in the vicinity of the branching portion 45 and the vicinity of the coupling portion 46 , but are not limited to such a structure. Figure 8 The first optical waveguide 41 and the second optical waveguide 42 shown have substantially the same length. The branch portion 45 is located between the input path 43 and the first optical waveguide 41 and the second optical waveguide 42. The input path 43 is connected to the first optical waveguide 41 and the second optical waveguide 42 via the branch portion 45. The coupling portion 46 is located between the first optical waveguide 41 and the second optical waveguide 42 and the output path 44. The first optical waveguide 41 and the second optical waveguide 42 are connected to the output path 44 via the coupling portion 46.

[0069] The electrodes 29 and 26 are electrodes for applying a modulation voltage to each Mach-Zehnder optical waveguide 40-1, 40-2, and 40-3 (hereinafter, sometimes referred to as "each Mach-Zehnder optical waveguide 40"). The electrode 29 is an example of a first electrode, and the electrode 26 is an example of a second electrode. One end of the electrode 29 is connected to a power supply 131, and the other end is connected to a terminal resistor 132. One end of the electrode 26 is connected to a power supply 131, and the other end is connected to a terminal resistor 132. The power supply 131 is a part of a driving circuit for applying a modulation voltage to each Mach-Zehnder optical waveguide 40. In order to simplify the illustration, the electrodes 29 and 26 are depicted only in the portion of the Mach-Zehnder optical waveguide 40-3.

[0070] The electrodes 27 and 28 are electrodes for applying a DC bias voltage to each Mach-Zehnder optical waveguide 40. One end of the electrode 27 and one end of the electrode 28 are connected to a power supply 133. The power supply 133 is a part of a DC bias application circuit for applying a DC bias voltage to each Mach-Zehnder optical waveguide 40. When a DC bias voltage is superimposed on the electrodes 29 and 26, the electrodes 27 and 28 may not be provided. In addition, a ground electrode may be provided around the electrodes 29, 26, 27, and 28.

[0071] The optical wave combining member 300 has a light input port 40-1i, 40-2i, and 40-3i for each of the three laser beams, and has a light input side optical waveguide for each light input port. Figure 2 , Figure 3 As illustrated, a plurality of light input ports are provided, such as two light input ports and three light input ports for each of three laser beams, and a light input-side optical waveguide is provided for each light input port. In this case, each light input side optical waveguide can be a Mach-Zehnder type optical waveguide. In addition, a part of the light input side optical waveguide can also be a Mach-Zehnder type optical waveguide.

[0072] Furthermore, a configuration may be adopted in which three or more optical output ports are provided and a light output side optical waveguide is provided for each optical input port.

[0073] [Visible light source module (first embodiment)] The visible light source module according to the first embodiment includes the optical combining member according to the above-mentioned embodiment and a plurality of visible light laser light sources that emit visible light combined by the optical combining member. Fig. 9 is a schematic plan view of a visible light source module according to this embodiment. Fig. 9 Indicates that Figure 4 The optical combining member 200 shown is an example of a visible light source module.

[0074] Fig. 9 The visible light source module 1000 shown includes an optical combining member 200 having an optical combining section 50, and three visible light laser light sources 30 (30-1, 30-2, 30-3) that emit visible light combined by the optical combining member 200. The optical combining member 200 includes a substrate 10 made of a material different from lithium niobate (see Figure 4 ) and a light combining functional layer 20 formed on the main surface of the substrate 10 and composed of lithium niobate (refer to Figure 4 ) and has a side surface 200A as a light incident surface. for Fig. 9 In the illustrated components, components having the same functions as those described above are denoted by the same reference numerals and their description may be omitted.

[0075] As the visible light laser light source 30, various laser elements can be used. For example, commercially available laser diodes (LDs) of red light, green light, blue light, etc. can be used. Red light can use light with a peak wavelength of 600 nm to 750 nm, green light can use light with a peak wavelength of 500 nm to 600 nm, and blue light can use light with a peak wavelength of 380 nm to 500 nm. In the visible light source module 1000, for example, the visible light laser light sources 30-1, 30-2, and 30-3 are LDs that emit red light, green light, and blue light, respectively. LDs 30-1, 30-2, and 30-3 are arranged on the upper surface of the subcarrier 120 with a gap between them in a direction substantially orthogonal to the emission direction of the light emitted from each LD.

[0076] In the visible light source module 1000, the number of visible light laser light sources is 3, but if there are multiple visible light laser light sources, it is not limited to 3, and it can be 2 or 4 or more. The multiple visible light laser light sources can be light sources with different wavelengths of light emitted, or can be visible light laser light sources with the same wavelength of light emitted. In addition, the emitted light can use light other than red (R), green (G), and blue (B), and the order of mounting red (R), green (G), and blue (B) described using the drawings does not necessarily have to be this order and can be appropriately changed.

[0077] The LD 30 can be mounted on the subcarrier 120 in a bare chip. The subcarrier 120 is made of, for example, aluminum nitride (AlN), aluminum oxide (Al2O3), silicon (Si), or the like.

[0078] The subcarrier 120 can be directly bonded to the substrate 10 via a metal bonding layer. According to this structure, spatial coupling and fiber coupling are not performed, so that further miniaturization can be achieved. By adopting a structure in which the subcarrier 120 and the substrate 10 are joined by a metal joining layer, the relative position of the subcarrier 120 and the substrate 10 can be adjusted during manufacturing so that the optical axis of each visible light laser coincides with the axis of each of the first light input side optical waveguide 21-1, the second light input side optical waveguide 21-2, and the third light input side optical waveguide 21-3, thereby performing alignment (active alignment) of the optical axis position of the laser.

[0079] In the visible light source module 1000, the three optical input ports 21-1i, 21-2i, and 21-3i of the optical combiner 50 are opposite to the exit ports of each LD30 (30-1, 30-2, and 30-3), and are positioned in such a way that the light emitted from the exit surface of each LD30 can be incident on the optical input ports 21-1i, 21-2i, and 21-3i. In addition, the axes of the optical input side optical waveguides 21-1, 21-2, and 21-3 are roughly overlapped with the optical axis of the laser light emitted from the exit port of each LD30. With such a structure and arrangement, the red light, green light, and blue light emitted from the LD30-1, 30-2, and 30-3 can be incident on the three optical input side optical waveguides 21-1, 21-2, and 21-3 of the optical combiner 50.

[0080] In the visible light source module 1000, the light exit surface 31 of the LD30 and the light incident surface 200A of the optical combining component 200 are arranged at a prescribed interval. The light incident surface 200A is opposite to the light exit surface 31, and a gap S is provided between the light exit surface 31 and the light incident surface 200A in the x direction. Since the visible light source module 1000 is exposed to the air, the gap S is filled with air. Since the gap S is filled with the same gas (air), it is easy for the various colors of light emitted from the LD30 to be incident on the incident path in a state that satisfies the prescribed coupling efficiency. When the visible light source module 1000 is used for AR glasses or VR glasses, the size of the gap (interval) S in the x direction is, for example, greater than 0 μm and less than 5 μm, taking into account the amount of light required by the AR glasses or VR glasses.

[0081] [Visible light source module (second embodiment)] Fig.10 It is a schematic plan view of a visible light source module according to the second embodiment. Fig.10 The visible light source module 2000 shown has Figure 8 The optical combining component 300 with light modulation function shown in the figure and a plurality of visible light laser light sources 30 (30-1, 30-2, 30-3) emitting visible light combined by the optical combining component 300 with light modulation function. The optical combining component 300 has a substrate 10 made of a material different from lithium niobate (see Figure 4 ), and a light combining functional layer 20 formed on the main surface of the substrate 10 and composed of lithium niobate (refer to Figure 4 ), having side 300A. for Fig.10 In the illustrated components, components having the same functions as those described above are denoted by the same reference numerals and their description may be omitted.

[0082] The visible light source module 2000 has three Mach-Zehnder optical waveguides 40-1, 40-2, 40-3, which are the same number as the number of visible light laser light sources 30-1, 30-2, 30-3. The visible light laser light sources 30-1, 30-2, 30-3 and the optical input ports 40-1i, 40-2i, 40-3i of the Mach-Zehnder optical waveguides 40-1, 40-2, 40-3 (see Figure 8 ) is positioned in such a way that light emitted from a visible light laser light source is incident on a corresponding Mach-Zehnder type optical waveguide.

[0083] A structure can be adopted in which the subcarrier 120 equipped with the visible light laser light sources 30-1, 30-2, and 30-3 is directly bonded to the substrate 10 formed with the optical combining function layer 20 of the optical combining member 300 having the optical modulation function through a metal bonding layer. With this structure, spatial coupling and optical fiber coupling are not performed, thereby achieving further miniaturization. Furthermore, during manufacturing, the relative position of the subcarrier 120 and the substrate 10 can be adjusted so that the optical axis of each visible light laser coincides with the axis of the input path 43 of each Mach-Zehnder type optical waveguide 40-1, 40-2, and 40-3, thereby aligning the optical axis position of the laser (active alignment).

[0084] The size of the light combining functional layer 20 is, for example, 100 mm. 2 If the size of the light combining functional layer 20 is 100 mm 2 The following are suitable for xR glasses such as AR glasses and VR glasses.

[0085] The photosynthesis functional layer 20 can be manufactured by a known method, for example, by using a semiconductor process such as epitaxial growth, photolithography, etching, vapor phase growth, and metallization.

[0086] When the visible light source module involved in the present invention is used for xR glasses such as AR glasses and VR glasses, the width of the first multi-mode interference type optical combining part and the second multi-mode interference type optical combining part constituting the optical combiner is preferably about 1 to 1000 μm, and the length is preferably about 10 to 10000 μm, for example.

[0087] For example, in a retinal projection display, in order to display an image in a desired color, it is necessary to independently modulate the respective intensities of the RGB3 colors representing visible light at high speed. When the modulation is performed only with a visible light laser light source (current modulation), the load of the IC controlling these modulations will increase, but the modulation (voltage modulation) using the Mach-Zehnder optical modulator 40 (optical wave combining component 300 with optical modulation function) can also be used in combination. In this case, coarse adjustment can also be performed with current (visible light laser light source) and fine adjustment can be performed with voltage (Mach-Zehnder optical modulator 40). In addition, coarse adjustment can also be performed with voltage (Mach-Zehnder optical modulator 40) and fine adjustment can be performed with current (visible light laser light source). Because the responsiveness is better when the voltage is fine-tuned, the former is preferably used when responsiveness is emphasized, and because the fine-tuning with current can be completed with a low current, the power consumption will be suppressed, so the latter is preferably used when the power consumption is suppressed.

[0088] 〔Optical Engine〕 In this specification, an optical engine is a device comprising: an optical system including a plurality of light sources and a combining unit for combining a plurality of light emitted from the plurality of light sources into a single light; a light scanning mirror for changing the angle of light emitted from the optical system and reflecting it in such a manner as to display an image; and a control element for controlling the light scanning mirror.

[0089] Fig.11 A conceptual diagram for explaining an optical engine 5001 according to the present embodiment is shown. The diagram shows a state where the optical engine 5001 is mounted on a frame 10010 of glasses 10000. Reference numeral L represents image display light.

[0090] The optical engine 5001 includes a visible light source module 1001 and a light scanning mirror 3001. As the visible light source module 1001 included in the optical engine 5001, the visible light source module according to the above-mentioned embodiment is used.

[0091] The laser irradiated from the visible light source module 1001 installed in the eyeglass frame is reflected by the light scanning mirror, scanned and enters the human eye, and a direct image (video) is projected on the retina.

[0092] The light scanning mirror 3001 is, for example, a MEMS mirror. In order to project a 2D image, it is preferably a two-axis MEMS mirror that swings so as to reflect laser light at a changing angle in the horizontal direction (X direction) and the vertical direction (Y direction).

[0093] The optical engine 5001 is an optical system that performs optical processing on the laser light emitted from the visible light source module 1001 and includes a collimating lens 2001a, a slit 2001b, and an ND filter 2001c. This optical system is only an example, and other structures are also possible.

[0094] The optical engine 5001 has a laser driver 1100, a light scanning mirror driver 1200, and a video controller 1300 that controls these drivers. [Example]

[0095] Hereinafter, the present invention will be described in further detail using examples. However, the present invention is not limited to the following examples at all.

[0096] Embodiment 1 is to use Figure 1 The structure shown is an example of an optical combining element of an MMI type optical combiner (3-input 2-output type). Embodiments 2, 4 to 8 are using Figure 2 The structure shown is an example of an optical combining element of an MMI type optical combiner (6-input 2-output type). Embodiment 3 is provided with Figure 3 The structure shown is an optical combining component of an MMI type optical combiner (9-input 3-output type). Comparative Example 1 is an example in which an optical multiplexing component including a 3-input 1-output MMI-type optical multiplexer is used.

[0097] Examples 1 to 8 and Comparative Examples have shown that the lasers L1, L2, and L3 (see Figure 2 , Figure 3 ) The structure of configuring the laser light source in the order of RGB is adopted. The coupling efficiency with the laser in Table 1 is the result obtained by simulation investigation. The simulation software uses Fimmwave (full vector 3D mode solver) (Photon Design Company). The coupling efficiency with the laser refers to the proportion of the laser power that propagates to the optical waveguide on the light input side.

[0098] For each parameter in Table 1, refer to Example 2. Figure 2 The number of optical output ports corresponds to the number of optical output ports 22-1o and 22-2o. The interval between the optical output ports at both ends corresponds to the distance indicated by the reference symbol d0 in the figure. The number of optical input ports for one light source corresponds to the number of optical input ports for each of the lasers L1, L2, and L3. The distance from the laser output surface to the optical input port corresponds to Fig. 9 and Fig.10 The spacing between adjacent optical input ports corresponds to the spacing between adjacent optical input ports indicated by reference numeral d in the figure. i The thickness of the plate inside the waveguide is 0.04mm / s. Fig. 12A As shown in the figure, the thickness of the plate outside the waveguide is the same, and Example 8 is Fig. 12B As shown, the thickness of the plate outside the waveguide is thick.

[0099] [Table 1]

[0100] Fig.13 It is used to illustrate the relationship between the laser beam diameter and the distance Z (equivalent to Fig. 9 and Fig.10 A diagram showing the relationship between the gap S). The laser beam diameter is defined by the following formula (2).

[0101] [Mathematical formula 1]

[0102] In equations (1) and (2), ω0 is the beam width (the value at which the beam diameter becomes the minimum after diffraction), and Z is the distance from the laser source (equivalent to Fig. 9 and Fig.10 Gap S) (Refer to Fig.13 ). λ is the wavelength of the laser. Table 2 shows the laser beam diameters [μm] of the RGB lasers when the beam width ω0 is 0.2 μm and the distance Z from the laser emission surface is 1 μm, 2.5 μm, and 4 μm, respectively. Z=1 μm corresponds to Comparative Example 1 and Example 1, Z=2.5 μm corresponds to Example 2 and Examples 4 to 8, and Z=4 μm corresponds to Example 3.

[0103] [Table 2]

[0104] From the results shown in Table 1, it can be seen that even when there are more than two laser light input ports, when the interval between adjacent light input ports is less than 0.5 μm (Examples 2 to 6, 8), the coupling efficiency with the laser is 40%, which is a sufficient size compared to 60% when there is only one laser light input port (Example 1, Comparison Example 1). In addition, Example 8 is different from Example 2 in that the thickness of the flat plate portion provided inside the optical waveguide on the light input side is thicker than the thickness of the flat plate portion provided outside the optical waveguide on the light input side. Compared with Example 2, Example 8 has a higher coupling efficiency with the laser. It can be seen that the structure of the thickness of the flat plate portion improves the coupling efficiency with the laser.

[0105] Embodiment 1 is a structure having two optical output ports, and two optical output side optical waveguides are used to guide light from the optical combiner to the optical output port according to the number of the optical output ports. Therefore, compared with the comparative example having one optical output port and one optical output side optical waveguide is used to guide light from the optical combiner to the optical output port, since the power density of the laser is dispersed to the two optical output side optical waveguides with the same coupling efficiency (60%) as the laser, the degradation of the optical output side optical waveguide can be suppressed compared with the comparative example. Therefore, Embodiment 1 is also suitable for use as an optical combiner for high-output laser. Embodiments 2 and 4 to 8 are structures having two optical output ports, and guiding the light from the optical combiner to the optical output port by two optical output side optical waveguides corresponding to the number of the optical output ports. Therefore, compared with the comparative example having a structure having one optical output port and guiding the light from the optical combiner to the optical output port by one optical output side optical waveguide, the power density of the laser light is dispersed to the two optical output side optical waveguides without significantly reducing the coupling efficiency with the laser light (60% in the comparative example, and 30% to 50% in embodiments 2 and 4 to 8), so that the degradation of the optical output side optical waveguide can be suppressed compared with the comparative example. Furthermore, embodiments 2 and 4 to 8 are structures having two optical input ports for each laser light source, and guiding each laser light incident on the two optical input ports by each laser light source to the optical combiner by two optical input side optical waveguides, respectively. Since the power density of each laser light is dispersed to the two optical input side optical waveguides, the degradation of the optical input side optical waveguide can be suppressed compared with the comparative example. Therefore, Examples 2 and 4 to 8 are also suitable for use as optical multiplexers for high-output lasers. Embodiment 3 has three optical output ports, and three optical output side optical waveguides are used to guide the light from the optical combiner to the optical output port according to the number of the optical output ports. Therefore, compared with the comparative example in which the optical output port is one and one optical output side optical waveguide is used to guide the light from the optical combiner to the optical output port, the power density of the laser light is dispersed to the three optical output side optical waveguides without significantly reducing the coupling efficiency with the laser light (60% in the comparative example and 40% in the embodiment 3), so the degradation of the optical output side optical waveguide can be suppressed compared with the comparative example. Furthermore, embodiment 3 has three optical input ports for each laser light source, and each laser light incident on the three optical input ports by each laser light source is guided to the optical combiner by three optical input side optical waveguides, respectively. Since the power density of each laser light is dispersed to the three optical input side optical waveguides, the degradation of the optical input side optical waveguide can be suppressed compared with the comparative example. Therefore, embodiment 3 is also suitable for use as an optical combiner for high-output lasers. Description of Reference Numerals

[0106] 10 substrates 20Photosynthesis functional layer 30 Visible light laser source 40 Mach-Zehnder optical modulator 50, 51, 52 Photosynthesis Unit 100, 101, 102 optical combiner 200, 300 Photosynthetic Wave Components 1000, 2000 visible light source module

Claims

1. A light combiner, wherein: The optical combiner is an optical combiner that combines a plurality of laser beams with different wavelengths. The optical combiner comprises: A plurality of optical input ports, which can be respectively incident with the plurality of lasers; Two or more optical output ports, which can combine and emit the multiple lasers; a plurality of light input-side optical waveguides extending from each of the plurality of light input ports; Two or more light output-side optical waveguides extending from each of the two or more light output ports; and The optical combining section connects the plurality of light input side optical waveguides and the two or more light output side optical waveguides.

2. The optical combiner according to claim 1, wherein: The plurality of light input ports include two or more light input ports for at least one laser beam.

3. The optical combiner according to claim 2, wherein: The plurality of light input ports are composed of two or more light input ports for all laser beams.

4. The optical combiner according to claim 1, wherein: The distance between the light output ports with the largest distance between them among the two or more light output ports is 25 μm or less.

5. The optical combiner according to claim 2, wherein: The interval between adjacent light input ports among the two or more light input ports provided for one laser beam is 0.5 μm or less.

6. The optical combiner according to claim 1, wherein: The thickness of the slab portion provided on the inner side of the light input side optical waveguide is greater than the thickness of the slab portion provided on the outer side of the light input side optical waveguide.

7. The optical combiner according to claim 1, wherein: The optical combining section is a multi-mode interference type combining section.

8. A light-combining wave component, wherein: have: a substrate composed of a material different from the lithium niobate; and a light-combining functional layer formed on the main surface of the substrate and composed of a lithium niobate film, The optical combiner according to any one of claims 1 to 7 is formed in an optical combiner functional layer.

9. A visible light source module, wherein: The invention comprises: the optical combining component according to claim 8; and a plurality of visible light laser light sources which emit visible light laser light combined by the optical combining component.

10. An optical wave combining component with optical modulation function, wherein: The optical combining member according to claim 8 includes a Mach-Zehnder optical modulator in the optical combining functional layer.

11. A visible light source module, wherein: The device comprises: the optical combining component with light modulation function as claimed in claim 10; and a plurality of visible light laser light sources which emit visible light laser light combined by the optical combining component with light modulation function.

12. An optical engine, wherein: The device comprises: the visible light source module according to claim 9; and a light scanning mirror configured to change the angle of light emitted from the visible light source module and reflect the light so as to display an image.

13. An optical engine, wherein: The device comprises: the visible light source module according to claim 11; and a light scanning mirror configured to change the angle of light emitted from the visible light source module and reflect the light so as to display an image.

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