Sealing device for glue coating and developing equipment

Abstract

The present invention discloses a sealing device for a glue coating and developing device, and relates to the field of wafer processing technology. The sealing device for the glue coating and developing device comprises a mounting plate arranged on a glue spreading mechanism, and is characterized in that it also comprises: an adsorption workbench, which rotates above the mounting plate, and a sealing ring is arranged above the adsorption workbench. The sealing device for the glue coating and developing device can automatically clean the surface of the sealing ring, and at the same time, can coat the antioxidant on the surface of the adsorption cotton on the surface of the sealing ring to avoid oxidation, and can protect it to ensure its sealing effect and service life; can automatically detect pits or protrusion defects on the surface of the sealing ring to ensure its sealing effect, and can automatically detect the adsorption force of the adsorption workbench on the wafer to ensure the adsorption effect, which is more stable and reliable, thereby ensuring the quality of subsequent spin coating.

Description

Technical Field

[0001] The invention relates to the technical field of wafer processing, in particular to a sealing device for glue coating and developing equipment. Background Art

[0002] The coating and developing machine is a commonly used equipment in the manufacture of semiconductors, generally used in processes such as photoresist coating and development. The sealing device used in the coating and developing equipment is mainly an adsorption workbench. During operation, the wafer will be transferred to the adsorption workbench in the coating or developing chamber for adsorption treatment, which is used to provide adsorption and support for the grinding and polishing of semiconductor wafers. A sealing ring is provided above the adsorption workbench, and an adsorption hole is opened above the workbench. During adsorption, the adsorption hole is evacuated by a vacuum pump to form a negative pressure between the wafer and the adsorption workbench, thereby adsorbing the wafer above the sealing ring.

[0003] However, when the existing sealing device for coating and developing equipment is in use, dust and other impurities are easily adhered to the top of the sealing ring, thereby affecting the sealing effect; the sealing ring is easily oxidized, which will also affect its sealing effect and service life; when there are pits or protrusions on the surface of the sealing ring, it is not easy to be discovered in time, which will also affect the sealing effect; when adsorption is performed, it is not convenient to detect the size of the adsorption force. When the adsorption force is small, the wafer is prone to shift or even fall during the spin coating process, which not only affects the quality of spin coating, but also causes waste of photoresist. Summary of the invention

[0004] The object of the present invention is to provide a sealing device for a gum coating and developing device to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: a sealing device for a glue coating and developing device, comprising a mounting plate arranged on a glue spreading mechanism, and further comprising:

[0006] An adsorption workbench rotates above the mounting plate, and a sealing ring is provided above the adsorption workbench;

[0007] A protection mechanism, arranged above the mounting plate, for protecting the sealing ring;

[0008] The protection mechanism comprises:

[0009] A movable adjustment mechanism is arranged above the mounting plate, and a second L-shaped plate is connected to the movable adjustment mechanism, and is used to move and adjust the second L-shaped plate;

[0010] A rotating mechanism is disposed below the second L-shaped plate, and a mounting block is connected to the rotating mechanism, and the rotating mechanism is used to rotate the mounting block;

[0011] A cleaning block, fixed below the mounting block, for cleaning the sealing ring;

[0012] The coating mechanism is arranged below the mounting block so that the coating mechanism can slide on the surface of the sealing ring and is used for coating the surface of the sealing ring with an antioxidant.

[0013] Preferably, the rotating mechanism comprises:

[0014] A telescopic mechanism is disposed below the second L-shaped plate, and a disc is connected to the telescopic mechanism for guiding and resetting the disc;

[0015] The annular guide rail is fixedly sleeved on the side wall of the disc, and the rotating block rotates on the side wall of the annular guide rail.

[0016] Preferably, the smearing mechanism comprises:

[0017] A first U-shaped plate, fixed below the mounting block via a fixing block;

[0018] A rotating roller, which rotates on two opposite side walls of the first U-shaped plate through a first rotating shaft;

[0019] Adsorption cotton, fixedly sleeved on the side wall of the rotating roller;

[0020] The liquid supply mechanism is arranged above the mounting block and is used for supplying antioxidant to the adsorption cotton.

[0021] Preferably, the liquid supply mechanism comprises:

[0022] A liquid storage tank, fixed on the top of the mounting block through a fixing plate;

[0023] A fixed cover is arranged between the adsorbent cotton and the first U-shaped plate, and the fixed cover is fixed to two opposite side walls of the first U-shaped plate. A plurality of liquid outlet holes arranged in an array are opened at the bottom of the fixed cover, and the fixed cover is connected to the liquid storage tank through a liquid supply pipe.

[0024] Preferably, it also includes:

[0025] A detection mechanism, arranged below the mounting block, for detecting the sealing ring;

[0026] The detection mechanism includes:

[0027] A reset mechanism is disposed below the mounting block, and a second U-shaped plate is connected to the reset mechanism to guide and reset the movement of the second U-shaped plate;

[0028] A detection roller, disposed in the second U-shaped plate and rotated on two opposite side walls of the second U-shaped plate through a second rotating shaft;

[0029] Two support plates, fixed above the mounting block;

[0030] A pointer, disposed between the two support plates and rotated on opposite side walls of the two support plates through a rotating pin;

[0031] A scale plate is fixed above the mounting block and is arranged in an arc shape so that the pointer can slide on the side wall of the scale plate;

[0032] The visual sensor is fixed above the mounting block and located on one side of the scale plate.

[0033] Preferably, the glue-splitting mechanism further comprises:

[0034] A glue spray nozzle is connected to the top of the mounting plate through a moving module;

[0035] A vacuum pump is arranged below the adsorption workbench and is connected to the adsorption workbench through an exhaust pipe, a vent valve is fixedly connected to the side wall of the exhaust pipe, and a pressure sensor is fixedly inserted into the side wall of the exhaust pipe;

[0036] A first movable ring is connected to the lower side of the adsorption workbench through a first cylinder;

[0037] A first pushing mechanism is disposed above the first moving ring, and the first pushing mechanism is connected to the second moving ring, and is used to push the second moving ring to move;

[0038] A plurality of ejector rods are fixed above the second movable ring and are arranged through the top of the adsorption workbench;

[0039] An electromagnet is fixed above the first movable ring, and an iron block is fixedly connected to the bottom of the second movable ring at a position opposite to the electromagnet;

[0040] The driving mechanism is arranged above the mounting plate and is used for driving the adsorption workbench to rotate.

[0041] Preferably, the first pushing mechanism comprises:

[0042] A plurality of first sleeves are fixed to the upper end of the first movable ring, a first sleeve rod is inserted into each of the first sleeves, and the upper end of the first sleeve rod is fixed to the bottom of the second movable ring;

[0043] A second sleeve, disposed between the first moving ring and the second moving ring and fixed to the bottom of the second moving ring;

[0044] A sliding plate, sliding in the second sleeve and fixed above the first moving ring through a second set of rods;

[0045] A working pipe is arranged at one side of the second sleeve and is connected with the second sleeve through a connecting pipe. The working pipe is filled with hydraulic oil, and a counterweight is slidably connected in the working pipe.

[0046] Preferably, the rotating mechanism further comprises:

[0047] A second pushing mechanism is disposed between the second L-shaped plate and the disc and is used to push the disc to rotate;

[0048] The second driving mechanism comprises:

[0049] A rotating ring is fixed on the upper side of the rotating block through a first connecting plate, and a first sliding groove arranged in a spiral is formed on a side wall of the rotating ring;

[0050] The first push pin is inserted into the first sliding groove and fixed to the side wall of the second L-shaped plate through the second L-shaped connecting plate.

[0051] Preferably, the detection mechanism further comprises:

[0052] A third pushing mechanism is disposed above the mounting block and is used to push the pointer to rotate;

[0053] The third driving mechanism comprises:

[0054] A strip-shaped opening is provided at the top of the mounting block and passes through the bottom of the mounting block;

[0055] A first push plate is inserted into the strip-shaped opening and the lower end of the first push plate is fixed to the top of the second U-shaped plate;

[0056] A second sliding groove is provided on the side wall of the pointer and is arranged through the pointer;

[0057] The second pushing pin is inserted into the second sliding groove and fixed to the side wall of the first pushing plate.

[0058] Preferably, the liquid supply mechanism further comprises:

[0059] An opening and closing mechanism, disposed on a side wall of the liquid supply pipe and used to control the opening and closing of the liquid supply pipe;

[0060] The opening and closing mechanism comprises:

[0061] A working cover, fixedly inserted on the side wall of the liquid supply pipe and communicated with the liquid supply pipe;

[0062] The moving mechanism is arranged on the side wall of the working cover, and a sealing plate is connected to the moving mechanism for moving the sealing plate, and a through hole is opened on the upper side of the sealing plate.

[0063] Preferably, the moving mechanism comprises:

[0064] A push rod, fixed to the side wall of the sealing plate, wherein the sealing plate is connected to the side wall of the working cover via a third spring;

[0065] The second push plate is fixed to the side wall of the second L-shaped plate through the third connecting plate. The second push plate includes an inclined surface, and the end of the push rod away from the sealing plate can slide on the inclined surface.

[0066] Preferably, the telescopic mechanism comprises:

[0067] Two third sleeves, disposed between the second L-shaped plate and the disc and fixed below the second L-shaped plate;

[0068] Two third rods are inserted into the third sleeve and the lower ends of the third rods are fixed to the upper side of the disc;

[0069] The first spring is sleeved on the side walls of the third sleeve and the third sleeve rod, and the two ends of the first spring are respectively fixed to the bottom of the second L-shaped plate and the top of the disc.

[0070] Preferably, the reset mechanism comprises:

[0071] Two fourth sleeves, disposed between the mounting block and the second U-shaped plate and fixed below the mounting block;

[0072] Two fourth rods are inserted into the fourth sleeve and the lower ends of the fourth rods are fixed to the upper part of the second U-shaped plate;

[0073] The second spring is sleeved on the side walls of the fourth sleeve and the fourth sleeve rod, and the two ends of the second spring are respectively fixed to the bottom of the mounting block and the top of the second U-shaped plate.

[0074] Preferably, the protection mechanism further comprises:

[0075] A scraper, fixed to the side wall of the mounting block and arranged in an inclined downward direction;

[0076] The collecting box is arranged below the scraper and is detachably connected to the side wall of the scraper through a connecting block.

[0077] Preferably, the driving mechanism comprises:

[0078] A gear ring, fixedly sleeved on the side wall of the adsorption workbench;

[0079] The motor is fixed below the mounting plate through an L-shaped block. The output end of the motor is fixedly connected with a gear, and the gear is meshed with a gear ring.

[0080] Preferably, the movement adjustment mechanism comprises:

[0081] A second cylinder is fixed to the bottom of the mounting plate through a first L-shaped plate, and a moving block is fixedly connected to a telescopic end of the second cylinder;

[0082] The third cylinder is fixed to the side wall of the moving block, and the telescopic end of the third cylinder is fixed to the side wall of the second L-shaped plate.

[0083] Compared with the prior art, the present invention has the following beneficial effects:

[0084] (1) The sealing device for the coating and developing equipment is provided with a protective mechanism, etc. When the wafer needs to be spin-coated, the second L-shaped plate is first driven to move by the third cylinder, and the disc is moved to the top of the adsorption workbench. Then, the second L-shaped plate and the disc are driven to move downward by the second cylinder. When the disc abuts against the top of the adsorption workbench and the second L-shaped plate continues to move downward, the first spring is gradually compressed. At the same time, the first push pin slides downward along the first sliding groove, thereby driving the rotating ring to rotate. At the same time, the rotating block rotates along the annular guide rail and drives the mounting block and the cleaning block to rotate synchronously. At this time, the cleaning block can automatically clean the surface of the sealing ring, thereby improving its sealing effect. At the same time, the scraper can automatically scrape and clean the excess paint on the surface of the adsorption workbench and flow it into the collection box for cleaning. The collection and use effect is better, and when the mounting block rotates, the first U-shaped plate is driven to rotate synchronously through the fixed block. At this time, the adsorption cotton can roll on the surface of the sealing ring. At the same time, after the disc is against the top of the adsorption workbench, when the second L-shaped plate continues to move downward, the distance between the second L-shaped plate and the disc becomes smaller. At this time, the second push plate is driven to move downward, so that the inclined surface is against the end of the push rod, which can push the sealing plate to slide into the working cover. At the same time, the third spring is compressed, so that the through hole overlaps. At this time, the antioxidant in the liquid storage tank enters the fixed cover through the liquid supply pipe and the through hole and flows to the adsorption cotton through the liquid outlet hole, so that when the rotating roller rotates, the antioxidant on the surface of the adsorption cotton can be coated on the surface of the sealing ring to avoid its oxidation, protect it, and ensure its sealing effect and service life.

[0085] (2) The sealing device for the coating and developing equipment is provided with a detection mechanism, etc. When the mounting block rotates, the reset mechanism drives the second U-shaped plate to rotate synchronously, and under the action of the second spring, the detection roller is abutted against the top of the sealing ring, so that the detection roller can roll on the top of the sealing ring. At this time, the pointer can point to a certain scale on the scale plate. When there are pits or protrusion defects on the surface of the sealing ring, the detection roller and the second U-shaped plate can be moved down or up. At this time, the second push pin is driven by the first push plate to slide in the second sliding groove, so that the pointer can be pushed to rotate along the rotating pin. At this time, the scale on the scale plate indicated by the pointer changes and is detected by the visual sensor, so that the surface of the sealing ring can be automatically detected to ensure its sealing effect, thereby making the sealing effect of the wafer better, more stable and reliable when it is adsorbed on the adsorption workbench, thereby ensuring the quality of spin coating.

[0086] (3) The sealing device for the coating and developing equipment is provided with a first pushing mechanism, etc. After cleaning and inspection are completed, the second L-shaped plate and the disc are driven to move and reset by the second cylinder and the third cylinder. Then, the first cylinder is started to move the first moving ring upward, and the second moving ring and the push rod are driven to move upward by the electromagnet and the iron block. Then, the wafer is placed above the push rod. Then, the first moving ring and the second moving ring are moved downward and reset by the first cylinder, and the wafer is driven downward by the push rod to make the wafer contact with the sealing ring. Then, the vacuum pump is started to perform the exhaust operation, so that a negative pressure is formed between the wafer and the adsorption workbench, so that the wafer can be adsorbed and fixed. Then, Cut off the power to the electromagnet. At this time, the hydraulic oil can be squeezed under the action of the counterweight block, which can push the second sleeve to move upward, thereby pushing the second movable ring to move upward, and then pushing the push rod to move upward and against the bottom of the wafer. If the adsorption force of the adsorption workbench on the wafer is not enough, the wafer and the sealing ring will be pushed to offset under the action of the push rod. At this time, leakage will occur at the sealing ring, and the pressure sensor will detect that the pressure is increasing. When the pressure sensor detects that the pressure is increasing, it means that the adsorption force on the wafer is insufficient, and maintenance or parameter adjustment is required. After the wafer is adsorbed, its adsorption force can be automatically detected to ensure the adsorption effect, which is more stable and reliable, thereby ensuring the quality of subsequent spin coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0087] Figure 1 It is a schematic diagram of the overall structure of the glue-splitting mechanism in the present invention;

[0088] Figure 2 It is a structural schematic diagram of the driving mechanism in the present invention;

[0089] Figure 3 It is a structural schematic diagram of the protection mechanism in the present invention;

[0090] Figure 4 It is a schematic diagram of the position of the detection mechanism in the present invention;

[0091] Figure 5 It is a partial cross-sectional structural schematic diagram of the fixed cover in the present invention;

[0092] Figure 6 for Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0093] Figure 7 for Figure 2 A schematic diagram of the enlarged structure at B in the middle;

[0094] Figure 8 for Figure 3 Schematic diagram of the enlarged structure at C in the middle;

[0095] Fig. 9 for Figure 4 Schematic diagram of the enlarged structure at D in the middle;

[0096] Fig.10 for Figure 6 Schematic diagram of the enlarged structure at E in the middle;

[0097] Fig.11 for Figure 7 The enlarged structural diagram at F in the middle;

[0098] Fig.12 for Figure 8 Schematic diagram of the enlarged structure at G in the middle;

[0099] Fig.13 for Fig.10 Schematic diagram of the enlarged structure at H in the middle.

[0100] In the figure: 201, first sleeve; 202, first set of rods; 203, second sleeve; 204, sliding plate; 205, second set of rods; 206, connecting pipe; 207, working pipe; 208, counterweight; 301, strip opening; 302, first push plate; 303, second sliding groove; 304, second push pin; 401, fixed plate; 402, liquid storage tank; 403, liquid supply pipe; 404, fixed cover; 405, liquid outlet; 501, third sleeve; 502, third set of rods; 503, first spring; 601, first connecting plate; 602, rotating ring; 603, first sliding groove; 604, second connecting plate; 605, first push pin; 701, scraper; 702, connecting block; 703, collecting box; 801, working cover; 802, sealing plate; 803, through hole; 901, third spring; 902, push rod; 903, second push plate; 904, inclined surface; 905, third connecting plate; 1001, gear ring; 1002, L-shaped block; 1003, motor; 1004, gear; 1101, mounting plate; 1102, moving module; 1103 , glue spray head; 1104, adsorption workbench; 1105, first cylinder; 1106, first moving ring; 1107, second moving ring; 1108, push rod; 1109, iron block; 1110, exhaust pipe; 1111, vacuum pump; 1112, vent valve; 1113, pressure sensor; 1114, sealing ring; 1115, electromagnet; 1201, first L-shaped plate; 1202, second cylinder; 1203, moving block; 1204, third cylinder; 1205, second L-shaped plate; 1206, disc; 1207, Annular guide rail; 1208, rotating block; 1209, mounting block; 1210, cleaning block; 1211, rotating roller; 1212, adsorption cotton; 1213, fixing block; 1214, first U-shaped plate; 1215, first rotating shaft; 1301, second U-shaped plate; 1302, second rotating shaft; 1303, detection roller; 1304, supporting plate; 1305, rotating pin; 1306, pointer; 1307, scale plate; 1308, visual sensor; 2401, fourth sleeve; 2402, fourth set of rods; 2403, second spring. DETAILED DESCRIPTION

[0101] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0102] See also Figure 1-Figure 13The present invention provides a sealing device for a glue coating and developing device, comprising a glue spreading mechanism arranged on the glue coating and developing device, the glue spreading mechanism comprising a mounting plate 1101 fixedly connected to the inner side wall of the glue coating and developing device, and a glue spreading nozzle 1103 is connected to the top of the mounting plate 1101 through a moving module 1102, an adsorption workbench 1104 is rotatably connected to the top of the mounting plate 1101 through a driving mechanism, and a sealing ring 1114 is arranged above the adsorption workbench 1104, an exhaust pipe 1110 is fixedly inserted at the bottom of the adsorption workbench 1104, and a vacuum pump 1111 is fixedly connected to the lower end of the exhaust pipe 1110, a vent valve 1112 is fixedly connected to the side wall of the exhaust pipe 1110, and the side wall of the exhaust pipe 1110 is fixedly connected to the side wall of the exhaust pipe 1110. A pressure sensor 1113 is fixedly provided, a first cylinder 1105 is fixedly connected to the bottom of the adsorption workbench 1104, and a first movable ring 1106 is fixedly connected to the telescopic end of the first cylinder 1105, a second movable ring 1107 is connected to the top of the first movable ring 1106 through a first pushing mechanism, and a plurality of array-arranged push rods 1108 are fixedly connected to the top of the second movable ring 1107, and the push rods 1108 pass through the top of the adsorption workbench 1104, an electromagnet 1115 is fixedly connected to the top of the first movable ring 1106, and an iron block 1109 is fixedly connected to the bottom of the second movable ring 1107, and a protective mechanism for protecting the sealing ring 1114 is provided on the side wall of the mounting plate 1101.

[0103] The protection mechanism includes a first L-shaped plate 1201 fixedly connected to the bottom of the mounting plate 1101, and a second cylinder 1202 is fixedly connected to the top of the first L-shaped plate 1201, a moving block 1203 is fixedly connected to the telescopic end of the second cylinder 1202, and a side wall of the moving block 1203 is fixedly connected to the third cylinder 1204, a second L-shaped plate 1205 is fixedly connected to the telescopic end of the third cylinder 1204, and a disc 1206 is connected to the bottom of the second L-shaped plate 1205 through a telescopic mechanism, a side wall of the disc 1206 is fixedly sleeved with an annular guide rail 1207, and a rotating block 1208 is slidably connected to the side wall of the annular guide rail 1207, the other end of the rotating block 1208 is fixedly connected to a mounting block 1209, and a cleaning block 1210 is fixedly connected to the bottom of the mounting block 1209, and the mounting block 1210 is fixedly connected to the bottom of the mounting block 1210. 09 is fixedly connected to a fixed block 1213 at the bottom, and a first U-shaped plate 1214 is fixedly connected to the bottom of the fixed block 1213, the side wall of the first U-shaped plate 1214 is rotatably connected to a rotating roller 1211 through a first rotating shaft 1215, and the side wall of the rotating roller 1211 is fixedly sleeved with an adsorption cotton 1212, the side wall of the mounting block 1209 is fixedly connected to a scraper 701, and the side wall of the scraper 701 is detachably connected to a connecting block 702, a fan-shaped collecting box 703 is fixedly connected to the bottom of the connecting block 702, and a liquid supply mechanism for supplying antioxidant to the adsorption cotton 1212 is provided above the mounting block 1209, a detection mechanism for detecting the sealing ring 1114 is provided at the bottom of the mounting block 1209, and the rotation of the rotating block 1208 is driven by a second driving mechanism.

[0104] The detection mechanism includes two symmetrically arranged support plates 1304 fixedly connected above the mounting block 1209, and the side wall of the support plate 1304 is rotatably connected to a pointer 1306 through a rotating pin 1305, an arc-shaped scale plate 1307 is fixedly connected above the mounting block 1209, and a visual sensor 1308 is fixedly connected above the mounting block 1209, the bottom of the mounting block 1209 is connected to a second U-shaped plate 1301 through a reset mechanism, and the side wall of the second U-shaped plate 1301 is rotatably connected to a detection roller 1303 through a second rotating shaft 1302, and The rotation of the pointer 1306 is driven by the third driving mechanism, which can automatically clean the surface of the sealing ring 1114. At the same time, the antioxidant on the surface of the adsorption cotton 1212 can be coated on the surface of the sealing ring 1114 to prevent it from oxidation and protect it to ensure its sealing effect and service life; it can automatically detect pits or protrusion defects on the surface of the sealing ring 1114, and can automatically detect the adsorption force of the adsorption workbench 1104 on the wafer to ensure the adsorption effect, which is more stable and reliable, thereby ensuring the quality of subsequent spin coating.

[0105] The first pushing mechanism includes a plurality of first sleeves 201 fixedly connected to the top of the first moving ring 1106, and a first rod 202 is inserted into each first sleeve 201, the upper end of the first rod 202 is fixed to the bottom of the second moving ring 1107, and the bottom of the second moving ring 1107 is fixedly connected to a second sleeve 203, and a sliding disk 204 is slidably connected in the second sleeve 203, the bottom of the sliding disk 204 is fixedly connected to a second rod 205, and the lower end of the second rod 205 is fixed to the top of the first moving ring 1106, the side wall of the second sleeve 203 is fixedly connected to a connecting pipe 206, and the other end of the connecting pipe 206 is fixedly connected to an L The working tube 207 is arranged in a shape, and the working tube 207 is filled with hydraulic oil. The working tube 207 is slidably connected with a counterweight block 208, which can automatically clean the surface of the sealing ring 1114. At the same time, the antioxidant on the surface of the adsorption cotton 1212 can be coated on the surface of the sealing ring 1114 to avoid its oxidation, and can protect it to ensure its sealing effect and service life; it can automatically detect pits or protrusion defects on the surface of the sealing ring 1114 to ensure its sealing effect, and can automatically detect the adsorption force of the adsorption workbench 1104 on the wafer to ensure the adsorption effect, which is more stable and reliable, thereby ensuring the quality of subsequent spin coating.

[0106] The second pushing mechanism includes a first connecting plate 601 fixedly connected to the top of the rotating block 1208, and a rotating ring 602 is fixedly connected to the top of the first connecting plate 601, a first spiral sliding groove 603 is opened on the side wall of the rotating ring 602, and an L-shaped second connecting plate 604 is fixedly connected to the side wall of the second L-shaped plate 1205, a first pushing pin 605 is fixedly connected to the side wall of the second connecting plate 604, and the first pushing pin 605 is inserted in the first sliding groove 603. When the disc 1206 is against the top of the adsorption workbench 1104, when the second L-shaped plate 1205 continues to move downward, the first pushing pin 605 slides downward along the first sliding groove 603, thereby pushing the rotating ring 602 to rotate. At the same time, the rotating block 1208 rotates along the annular guide rail 1207, and drives the mounting block 1209 and the cleaning block 1210 to rotate synchronously.

[0107] The third pushing mechanism includes a strip opening 301 opened above the mounting block 1209, and a first pushing plate 302 is slidably connected in the strip opening 301, the lower end of the first pushing plate 302 is fixed to the side wall of the second U-shaped plate 1301, and a second sliding groove 303 is opened on the side wall of the pointer 1306, and a second pushing pin 304 is fixedly connected to the side wall of the first pushing plate 302, and the second pushing pin 304 is inserted in the second sliding groove 303. When there are pits or protrusion defects on the surface of the sealing ring 1114, the detection roller 1303 and the second U-shaped plate 1301 can be moved down or up. At this time, the second pushing pin 304 is driven by the first pushing plate 302 to slide in the second sliding groove 303, so that the pointer 1306 can be pushed to rotate along the rotating pin 1305. At this time, the scale on the scale plate 1307 indicated by the pointer 1306 changes.

[0108] The liquid supply mechanism includes a fixed plate 401 fixedly connected to the top of the mounting block 1209, and a liquid storage tank 402 is fixedly connected to the top of the fixed plate 401, a fixed cover 404 is fixedly connected to the two opposite side walls of the first U-shaped plate 1214, and a plurality of liquid outlet holes 405 arranged in an array are provided at the bottom of the fixed cover 404, a liquid supply pipe 403 is fixedly connected to the bottom of the liquid storage tank 402, the lower end of the liquid supply pipe 403 is fixedly inserted in the fixed cover 404, and an opening and closing mechanism is provided on the side wall of the liquid supply pipe 403. When the disc 1206 is aligned with the upper surface of the adsorption workbench 1104, the liquid supply pipe 403 is opened. After the two sides collide with each other, when the second L-shaped plate 1205 continues to move downward, the distance between the second L-shaped plate 1205 and the disc 1206 becomes smaller. At this time, the opening and closing mechanism opens, and the antioxidant in the liquid storage tank 402 enters the fixed cover 404 through the liquid supply pipe 403 and the through hole 803 and flows to the adsorbent cotton 1212 through the liquid outlet 405. Therefore, when the rotating roller 1211 rotates, the antioxidant on the surface of the adsorbent cotton 1212 can be coated on the surface of the sealing ring 1114 to avoid its oxidation, thereby protecting it and ensuring its sealing effect and service life.

[0109] The telescopic mechanism includes two symmetrically arranged third sleeves 501 fixedly connected to the bottom of the second L-shaped plate 1205, and a third rod 502 is inserted in the third sleeve 501. The lower end of the third rod 502 is fixed to the top of the disc 1206, and the side wall of each third sleeve 501 is provided with a first spring 503. When the disc 1206 is in contact with the top of the adsorption workbench 1104, when the second L-shaped plate 1205 continues to move downward, the first spring 503 is gradually compressed.

[0110] The reset mechanism includes two symmetrically arranged fourth sleeves 2401 fixedly connected to the bottom of the mounting block 1209, and a fourth rod 2402 is inserted in the fourth sleeve 2401, the lower end of the fourth rod 2402 is fixed to the top of the second U-shaped plate 1301, and the side wall of each fourth sleeve 2401 is sleeved with a second spring 2403, which guides and resets the movement of the second U-shaped plate 1301.

[0111] The opening and closing mechanism includes a working cover 801 fixedly inserted on the side wall of the liquid supply pipe 403, and a sealing plate 802 is slidably connected inside the working cover 801, a through hole 803 is opened above the sealing plate 802, and a moving mechanism is arranged between the sealing plate 802 and the working cover 801, and the sealing plate 802 is pushed to slide into the working cover 801 through the moving mechanism, so that the through hole 803 overlaps. At this time, the antioxidant in the liquid storage tank 402 enters the fixed cover 404 through the liquid supply pipe 403 and the through hole 803 and flows to the adsorbent cotton 1212 through the liquid outlet 405.

[0112] The moving mechanism includes a pushing rod 902 fixedly connected to the side wall of the sealing plate 802, and a third spring 901 is fixedly connected between the sealing plate 802 and the working cover 801, and a third connecting plate 905 is fixedly connected to the side wall of the second L-shaped plate 1205, and a second pushing plate 903 is fixedly connected to the bottom of the third connecting plate 905, and the second pushing plate 903 includes an inclined surface 904. When the disc 1206 abuts against the top of the adsorption workbench 1104, when the second L-shaped plate 1205 continues to move downward, the distance between the second L-shaped plate 1205 and the disc 1206 becomes smaller. At this time, the second pushing plate 903 is driven to move downward, so that the inclined surface 904 abuts against the end of the pushing rod 902, which can push the sealing plate 802 to slide into the working cover 801.

[0113] The driving mechanism includes a gear ring 1001 fixedly mounted on the side wall of the adsorption workbench 1104, and an L-shaped block 1002 is fixedly connected to the bottom of the mounting plate 1101, a motor 1003 is fixedly connected to the bottom of the L-shaped block 1002, a gear 1004 is fixedly connected to the output end of the motor 1003, and the gear 1004 is meshed with the gear ring 1001. When the motor 1003 is started, the rotation of the motor 1003 drives the gear 1004 and the gear ring 1001 to rotate, thereby driving the adsorption workbench 1104 and the wafer to rotate.

[0114] Working principle: When the wafer needs to be spin-coated, the third cylinder 1204 first drives the second L-shaped plate 1205 to move, and moves the disc 1206 to the top of the adsorption workbench 1104. Then, the second cylinder 1202 drives the second L-shaped plate 1205 and the disc 1206 to move downward. When the disc 1206 contacts the top of the adsorption workbench 1104, and the second L-shaped plate 1205 continues to move downward, the first spring 503 is gradually compressed, and at the same time, the first push pin 605 moves along the first The sliding groove 603 slides downward, thereby pushing the rotating ring 602 to rotate. At the same time, the rotating block 1208 rotates along the annular guide rail 1207, and drives the mounting block 1209 and the cleaning block 1210 to rotate synchronously. At this time, the cleaning block 1210 can automatically clean the surface of the sealing ring 1114, so that its sealing effect is better. At the same time, the scraper 701 can automatically scrape and clean the excess paint on the surface of the adsorption workbench 1104 and flow it into the collection box 703 for collection, so that the use effect is better.

[0115] When the mounting block 1209 rotates, the first U-shaped plate 1214 is driven to rotate synchronously through the fixing block 1213. At this time, the adsorption cotton 1212 can roll on the surface of the sealing ring 1114. At the same time, when the disc 1206 abuts against the top of the adsorption workbench 1104, when the second L-shaped plate 1205 continues to move downward, the distance between the second L-shaped plate 1205 and the disc 1206 becomes smaller. At this time, the second push plate 903 is driven to move downward, so that the inclined surface 904 abuts against the end of the push rod 902. , which can push the sealing plate 802 to slide into the working cover 801. At the same time, the third spring 901 is compressed, so that the through hole 803 overlaps. At this time, the antioxidant in the liquid storage tank 402 enters the fixed cover 404 through the liquid supply pipe 403 and the through hole 803 and flows to the adsorbent cotton 1212 through the liquid outlet 405. Therefore, when the rotating roller 1211 rotates, the antioxidant on the surface of the adsorbent cotton 1212 can be coated on the surface of the sealing ring 1114 to avoid its oxidation, thereby protecting it and ensuring its sealing effect and service life.

[0116] At the same time, when the mounting block 1209 rotates, the second U-shaped plate 1301 is driven to rotate synchronously through the reset mechanism, and under the action of the second spring 2403, the detection roller 1303 is abutted against the top of the sealing ring 1114, so that the detection roller 1303 can roll above the sealing ring 1114. At this time, the pointer 1306 can point to a certain scale on the scale plate 1307. When there are pits or convex defects on the surface of the sealing ring 1114, the detection roller 1303 and the second U-shaped plate 1301 can be lowered or raised. The first push plate 302 drives the second push pin 304 to slide in the second sliding groove 303, thereby pushing the pointer 1306 to rotate along the rotating pin 1305. At this time, the scale on the scale plate 1307 indicated by the pointer 1306 changes and is detected by the visual sensor 1308, so that the surface of the sealing ring 1114 can be automatically detected to ensure its sealing effect, thereby making the sealing effect of the wafer when being adsorbed on the adsorption workbench 1104 better, more stable and reliable, thereby ensuring the quality of spin coating.

[0117] After cleaning and inspection are completed, the second L-shaped plate 1205 and the disc 1206 are moved and reset by the second cylinder 1202 and the third cylinder 1204. Then, the first cylinder 1105 is started to move the first movable ring 1106 upward, and the second movable ring 1107 and the push rod 1108 are driven to move upward by the electromagnet 1115 and the iron block 1109. Then, the wafer is placed above the push rod 1108. Then, the first movable ring 1106 and the second movable ring 1107 are moved downward and reset by the first cylinder 1105, and the wafer is driven downward by the push rod 1108, and the wafer is brought into contact with the sealing ring 1114. Then, the vacuum pump 1111 is started to perform vacuum operation to form a negative pressure between the wafer and the adsorption workbench 1104, so that the wafer can be adsorbed and fixed.

[0118] Next, the electromagnet 1115 is powered off. At this time, the hydraulic oil can be squeezed under the action of the counterweight 208, and the second sleeve 203 can be pushed to move upward, thereby pushing the second movable ring 1107 to move upward, and then pushing the push rod 1108 to move upward and against the bottom of the wafer. If the adsorption force of the adsorption workbench 1104 on the wafer is insufficient, the wafer and the sealing ring 1114 will be pushed to offset under the action of the push rod 1108. At this time, leakage will occur at the sealing ring 1114, and the pressure sensor 1113 will detect that the pressure is increased. When the pressure sensor 1113 detects that the pressure is increased, it means that the adsorption force on the wafer is insufficient, and maintenance or parameter adjustment is required. After the wafer is adsorbed, its adsorption force can be automatically detected to ensure the adsorption effect, which is more stable and reliable, thereby ensuring the quality of subsequent spin coating.

[0119] After the inspection is completed, start the motor 1003. The rotation of the motor 1003 drives the gear 1004 and the ring gear 1001 to rotate, and then drives the adsorption workbench 1104 and the wafer to rotate. In addition, the glue nozzle 1103 is moved to the upper center of the wafer through the moving module 1102 for spin coating. After the spin coating is completed, open the vent valve 1112 so that the wafer and the adsorption workbench 1104 are no longer in a negative pressure state. Then, the wafer after spin coating can be lifted up and removed by the push rod 1108.

Claims

1. A sealing device for a coating and developing device, comprising a mounting plate (1101) arranged on a coating mechanism, characterized in that: Also includes: An adsorption workbench (1104) is rotated above the mounting plate (1101), and a sealing ring (1114) is provided above the adsorption workbench (1104); A protection mechanism, arranged above the mounting plate (1101) and used for protecting the sealing ring (1114); The protection mechanism comprises: A movable adjustment mechanism is arranged above the mounting plate (1101), and a second L-shaped plate (1205) is connected to the movable adjustment mechanism, and is used to perform movable adjustment on the second L-shaped plate (1205); a rotating mechanism, arranged below the second L-shaped plate (1205), and a mounting block (1209) is connected to the rotating mechanism, and the rotating mechanism is used to rotate the mounting block (1209); A cleaning block (1210), fixed below the mounting block (1209), and used for cleaning the sealing ring (1114); A coating mechanism is arranged below the mounting block (1209), so that the coating mechanism can slide on the surface of the sealing ring (1114) and is used to coat the surface of the sealing ring (1114) with an antioxidant; The glue spreading mechanism also includes: A glue spray nozzle (1103) is connected to the top of the mounting plate (1101) via a moving module (1102); A vacuum pump (1111) is arranged below the adsorption workbench (1104) and is connected to the adsorption workbench (1104) via an exhaust pipe (1110); a ventilation valve (1112) is fixedly connected to the side wall of the exhaust pipe (1110); and a pressure sensor (1113) is fixedly inserted into the side wall of the exhaust pipe (1110); A first movable ring (1106) is connected to the lower side of the adsorption workbench (1104) via a first cylinder (1105); A first pushing mechanism is arranged above the first moving ring (1106), and the first pushing mechanism is connected to a second moving ring (1107) and is used to push the second moving ring (1107) to move; A plurality of push rods (1108) are fixed above the second movable ring (1107) and are arranged to penetrate above the adsorption workbench (1104); The electromagnet (1115) is fixed above the first movable ring (1106), and an iron block (1109) is fixedly connected to a position of the bottom of the second movable ring (1107) opposite to the electromagnet (1115); A driving mechanism, disposed above the mounting plate (1101), and used for driving the adsorption workbench (1104) to rotate; The first driving mechanism comprises: A plurality of first sleeves (201) are fixed to the upper end of the first movable ring (1106), a first rod (202) is inserted into each of the first sleeves (201), and the upper end of the first rod (202) is fixed to the bottom of the second movable ring (1107); A second sleeve (203) is disposed between the first movable ring (1106) and the second movable ring (1107) and is fixed to the bottom of the second movable ring (1107); A sliding plate (204) slides in the second sleeve (203) and is fixed above the first movable ring (1106) via a second sleeve rod (205); A working pipe (207) is arranged on one side of the second sleeve (203) and is connected to the second sleeve (203) via a connecting pipe (206); the working pipe (207) is filled with hydraulic oil, and a counterweight (208) is slidably connected to the working pipe (207).

2. A sealing device for a gum coating and developing device according to claim 1, characterized in that: The rotating mechanism comprises: A telescopic mechanism is arranged below the second L-shaped plate (1205), and a disc (1206) is connected to the telescopic mechanism for guiding and resetting the disc (1206); The annular guide rail (1207) is fixedly sleeved on the side wall of the disc (1206), and the rotating block (1208) rotates on the side wall of the annular guide rail (1207).

3. A sealing device for a gum coating and developing device according to claim 1, characterized in that: The smearing mechanism comprises: A first U-shaped plate (1214) is fixed below the mounting block (1209) via a fixing block (1213); A rotating roller (1211) rotates on two opposite side walls of the first U-shaped plate (1214) via a first rotating shaft (1215); Adsorption cotton (1212), fixedly sleeved on the side wall of the rotating roller (1211); A liquid supply mechanism is disposed above the mounting block (1209) and is used to supply an antioxidant to the adsorption cotton (1212).

4. A sealing device for a gum coating and developing device according to claim 3, characterized in that: The liquid supply mechanism comprises: A liquid storage tank (402) is fixed above the mounting block (1209) via a fixing plate (401); A fixed cover (404) is arranged between the adsorbent cotton (1212) and the first U-shaped plate (1214), and the fixed cover (404) is fixed to two opposite side walls of the first U-shaped plate (1214). A plurality of liquid outlet holes (405) arranged in an array are provided at the bottom of the fixed cover (404), and the fixed cover (404) is connected to the liquid storage tank (402) via a liquid supply pipe (403).

5. A sealing device for a gum coating and developing device according to claim 1, characterized in that: Also includes: A detection mechanism, disposed below the mounting block (1209), and used for detecting the sealing ring (1114); The detection mechanism includes: A reset mechanism is arranged below the mounting block (1209), and a second U-shaped plate (1301) is connected to the reset mechanism, and is used for guiding and resetting the movement of the second U-shaped plate (1301); A detection roller (1303) is arranged in the second U-shaped plate (1301) and rotates on two opposite side walls of the second U-shaped plate (1301) via a second rotating shaft (1302); Two support plates (1304) are fixed above the mounting block (1209); A pointer (1306) is disposed between the two support plates (1304) and rotates on opposite side walls of the two support plates (1304) via a rotating pin (1305); A scale plate (1307) is fixed above the mounting block (1209) and is arranged in an arc shape so that the pointer (1306) can slide on the side wall of the scale plate (1307); The visual sensor (1308) is fixed above the mounting block (1209) and is located on one side of the scale plate (1307).

6. A sealing device for a gum coating and developing device according to claim 2, characterized in that: The rotating mechanism also includes: A second pushing mechanism is disposed between the second L-shaped plate (1205) and the disc (1206), and is used to push the disc (1206) to rotate; The second driving mechanism comprises: A rotating ring (602) is fixed on the top of the rotating block (1208) via a first connecting plate (601), and a first sliding groove (603) arranged in a spiral is formed on the side wall of the rotating ring (602); The first push pin (605) is inserted into the first sliding groove (603) and fixed to the side wall of the second L-shaped plate (1205) via the second L-shaped connecting plate (604).

7. A sealing device for a gum coating and developing device according to claim 5, characterized in that: The detection mechanism also includes: A third pushing mechanism, disposed above the mounting block (1209) and used to push the pointer (1306) to rotate; The third driving mechanism comprises: A strip-shaped opening (301) is provided at the top of the mounting block (1209) and passes through the bottom of the mounting block (1209); A first push plate (302) is inserted into the strip-shaped opening (301) and the lower end of the first push plate (302) is fixed to the top of the second U-shaped plate (1301); A second sliding groove (303) is provided on the side wall of the pointer (1306) and is arranged to penetrate through the pointer (1306); The second pushing pin (304) is inserted into the second sliding groove (303) and fixed to the side wall of the first pushing plate (302).

8. A sealing device for a gum coating and developing device according to claim 4, characterized in that: The liquid supply mechanism also includes: An opening and closing mechanism, arranged on a side wall of the liquid supply pipe (403) and used to control the opening and closing of the liquid supply pipe (403); The opening and closing mechanism comprises: A working cover (801) is fixedly inserted into a side wall of the liquid supply pipe (403) and is in communication with the liquid supply pipe (403); The moving mechanism is arranged on the side wall of the working cover (801), and a sealing plate (802) is connected to the moving mechanism for moving the sealing plate (802), and a through hole (803) is provided above the sealing plate (802).

9. A sealing device for a gum coating and developing device according to claim 8, characterized in that: The moving mechanism comprises: A push rod (902) is fixed to a side wall of the sealing plate (802); the sealing plate (802) is connected to the side wall of the working cover (801) via a third spring (901); The second push plate (903) is fixed to the side wall of the second L-shaped plate (1205) via a third connecting plate (905); the second push plate (903) comprises an inclined surface (904), and an end of the push rod (902) away from the sealing plate (802) is capable of sliding on the inclined surface (904).

10. A sealing device for a gum coating and developing device according to claim 2, characterized in that: The telescopic mechanism comprises: Two third sleeves (501) are disposed between the second L-shaped plate (1205) and the disc (1206) and fixed below the second L-shaped plate (1205); Two third rods (502) are inserted into the third sleeve (501) and the lower ends of the third rods (502) are fixed to the top of the disc (1206); The first spring (503) is sleeved on the side walls of the third sleeve (501) and the third sleeve rod (502), and the two ends of the first spring (503) are respectively fixed to the bottom of the second L-shaped plate (1205) and the top of the disc (1206).

11. A sealing device for a gum coating and developing device according to claim 5, characterized in that: The reset mechanism comprises: Two fourth sleeves (2401) are arranged between the mounting block (1209) and the second U-shaped plate (1301) and fixed below the mounting block (1209); Two fourth rods (2402) are inserted into the fourth sleeve (2401) and the lower ends of the fourth rods (2402) are fixed to the upper part of the second U-shaped plate (1301); The second spring (2403) is sleeved on the side walls of the fourth sleeve (2401) and the fourth sleeve rod (2402), and the two ends of the second spring (2403) are respectively fixed to the bottom of the mounting block (1209) and the top of the second U-shaped plate (1301).

12. A sealing device for a gum coating and developing device according to claim 1, characterized in that: The protection mechanism also includes: A scraper (701) is fixed to the side wall of the mounting block (1209) and is arranged to be inclined downward; The collecting box (703) is arranged below the scraper (701) and is detachably connected to the side wall of the scraper (701) via a connecting block (702).

13. A sealing device for a gum coating and developing device according to claim 1, characterized in that: The driving mechanism comprises: A gear ring (1001) is fixedly sleeved on the side wall of the adsorption workbench (1104); The motor (1003) is fixed below the mounting plate (1101) via an L-shaped block (1002); the output end of the motor (1003) is fixedly connected to a gear (1004), and the gear (1004) is meshed with the gear ring (1001).

14. A sealing device for a gum coating and developing device according to claim 1, characterized in that: The mobile adjustment mechanism comprises: A second cylinder (1202) is fixed to the bottom of the mounting plate (1101) via a first L-shaped plate (1201), and a moving block (1203) is fixedly connected to a telescopic end of the second cylinder (1202); The third cylinder (1204) is fixed to the side wall of the moving block (1203), and the telescopic end of the third cylinder (1204) is fixed to the side wall of the second L-shaped plate (1205).

Images