Safety control circuit, system and semiconductor device

Abstract

The invention provides a safety control circuit, a safety control system and a semiconductor device, the safety control circuit comprises a line concentration module, the line concentration module comprises a second connector and a signal connector, the signal connector at least comprises a plurality of first connectors, and the first connectors and the second connector are in serial cascade connection; the plurality of switch modules are configured to be in one-to-one correspondence with the first connectors in the line concentration module, each switch module comprises a third connector, and the third connectors are used for being connected with the corresponding first connectors; wherein the first connector is used for receiving a state detection signal of the corresponding switch module, and the second connector is used for outputting a state detection signal of the triggered switch module. By adopting the technical scheme, independent control among a plurality of switch modules can be realized, and the operation safety of equipment is improved.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of intelligent control technology, and in particular to a safety control circuit, system and semiconductor device. Background Art

[0002] With the development of industrial automation, a large number of automation equipment are applied to processing and manufacturing. In the actual operation process, these automation equipment may fail or have other adverse conditions, so it is necessary to stop these automation equipment quickly to avoid personal injury or equipment damage.

[0003] In order to meet this demand, the emergency stop safety control switch came into being. When the emergency stop safety control switch is triggered, the connection between the equipment and the power supply will be disconnected and the equipment will stop running.

[0004] However, in the current emergency stop scheme, during the actual working process, the control circuit has multiple emergency stop safety control switches. When one of the emergency stop safety control switches is triggered or fails, it will affect the operating status of other emergency stop safety control switches, and there is a situation where other emergency stop safety control switches malfunction or do not work. Therefore, the current emergency stop scheme needs to be improved. Summary of the invention

[0005] In view of this, an embodiment of the present invention provides a safety control circuit, system and semiconductor device, which can realize independent control between multiple switch modules and improve the safety of equipment operation.

[0006] An embodiment of the present invention provides a safety control circuit, comprising: a wiring hub module, the wiring hub module including a second connector and a signal connector, the signal connector including at least a plurality of first connectors, and the plurality of first connectors and the second connectors are serially cascaded; a plurality of switch modules, configured to correspond one-to-one to the first connectors in the wiring hub module, the switch module including a third connector, the third connector being used to connect to the corresponding first connector; wherein the first connector is used to receive a status detection signal of the corresponding switch module, and the second connector is used to output a status detection signal of the triggered switch module.

[0007] An embodiment of the present invention further provides a safety control system, comprising: the safety control circuit described in any of the aforementioned examples; and a processor, electrically connected to the safety control circuit, for processing the status detection signal.

[0008] An embodiment of the present invention further provides a semiconductor device, comprising a safety control system as described in any of the foregoing examples.

[0009] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0010] In the safety control circuit provided by the embodiment of the present invention, the line hub module includes a second connector and a signal connector, the signal connector includes at least multiple first connectors, and the multiple first connectors and the second connectors are serially cascaded, multiple switch modules correspond one-to-one to the first connectors in the line hub module, and the third connector in the switch module is connected to the corresponding first connector, so that when the switch module is triggered or fails, the second connector can output a status detection signal of the triggered switch module, and the untriggered switch module will not output a status detection signal through the second connector, thereby realizing independent control between multiple switch modules, which can reduce or avoid erroneous operation caused by mutual influence between switch modules, thereby improving the safety of equipment operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the drawings required for use in the embodiments of this specification or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0012] Figure 1 A schematic diagram of the structure of a safety control circuit in an embodiment of the present invention is shown;

[0013] Figure 2 A specific structural schematic diagram of a safety control circuit in an embodiment of the present invention is shown;

[0014] Figure 3 A specific structural schematic diagram of another safety control circuit in an embodiment of the present invention is shown;

[0015] Figure 4 A specific structural schematic diagram of another safety control circuit in an embodiment of the present invention is shown;

[0016] Figure 5 A specific structural schematic diagram of another safety control circuit in an embodiment of the present invention is shown;

[0017] Figure 6 A schematic structural diagram of a safety control system in an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0018] As described in the background technology, the current emergency stop solution needs to be improved. This is because multiple emergency stop safety control switches in a control loop are usually connected in serial cascade. When one of the emergency stop safety control switches is triggered or fails, it will affect the operating status of other emergency stop safety control switches in the serial cascade loop, causing other emergency stop safety control switches to malfunction or not work.

[0019] In order to solve the above technical problems, an embodiment of the present invention provides a safety control circuit, including: a wiring hub module, the wiring hub module includes a second connector and a signal connector, the signal connector includes at least a plurality of first connectors, and the plurality of first connectors and the second connectors are serially cascaded; a plurality of switch modules, configured to correspond one-to-one to the first connectors in the wiring hub module, the switch module includes a third connector, and the third connector is used to connect to the corresponding first connector; wherein the first connector is used to receive a status detection signal of the corresponding switch module, and the second connector is used to output a status detection signal of the triggered switch module.

[0020] By adopting the safety control circuit provided in the embodiment of the present invention, multiple switch modules correspond one-to-one to the first connector in the hub module, and the third connector in the switch module is connected to the corresponding first connector. In this way, when the switch module is triggered or fails, the second connector can output a status detection signal of the triggered switch module, and the untriggered switch module will not output a status detection signal through the second connector, thereby achieving independent control between multiple switch modules, which can reduce or avoid erroneous operations caused by mutual influence between switch modules, and thus can improve the safety of equipment operation.

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the present invention is described below with reference to the accompanying drawings.

[0022] See also Figure 1 A schematic diagram of a safety control circuit in an embodiment of the present invention is shown in FIG. Figure 1 As shown, the safety control circuit may include:

[0023] The line hub module 110 includes a second connector CN2 and a signal connector (not shown).

[0024] In this embodiment, the signal connector is used to receive the status detection signal of the switch module, and the second connector CN2 is used to output the status detection signal of the triggered switch module. By setting the connection method between the second connector CN2 and the signal connector, the status detection signal of the switch module in the triggered state can be transmitted.

[0025] In this embodiment, the signal connector at least includes a plurality of first connectors (eg, first connectors CN11, ..., CN1i, where i is an integer greater than 1), and the plurality of first connectors and the second connector CN2 are serially cascaded.

[0026] For ease of understanding and explanation, the first connector CN1q represents any one of the first connectors CN11, CN12, CN13, ..., CN1i, where q is any integer from 1 to i.

[0027] In this case, the first connector CN1q is connected to the first connector CN1q+1, and CN1i is connected to the second connector CN2.

[0028] A plurality of switch modules are configured to correspond one-to-one with the first connector in the line hub module 110 , and the switch module includes a third connector, and the third connector is used to connect with the corresponding first connector.

[0029] In this embodiment, the safety control circuit may include switch modules 121, 122, 123, ..., 12i, wherein switch module 121 corresponds to the first connector CN11, switch module 122 corresponds to the first connector CN12, switch module 123 corresponds to the first connector CN13, ..., switch module 12i corresponds to the first connector CN1i.

[0030] In this embodiment, the switch module 121 may include a third connector CN31, and the third connector CN31 is connected to the corresponding first connector CN11; the switch module 122 may include a third connector CN32, and the third connector CN32 is connected to the corresponding first connector CN12; the switch module 123 may include a third connector CN33, and the third connector CN33 is connected to the corresponding first connector CN13;…; the switch module 12i may include a third connector CN3i, and the third connector CN3i is connected to the corresponding first connector CN1i.

[0031] It should be noted that, for ease of understanding and explanation, the third connector CN3u represents any third connector among the third connectors CN31, CN32, CN33, ..., CN3i, wherein u is any integer from 1 to i.

[0032] In this embodiment, the first connector CN1q is used to receive a state detection signal of a corresponding switch module, and the second connector CN2 is used to output a state detection signal of a triggered switch module.

[0033] In a specific embodiment, the first connector CN11 is used to receive the status detection signal of the switch module 121, the second connector CN12 is used to receive the status detection signal of the switch module 122,…, the first connector CN1i is used to receive the status detection signal of the switch module 12i, and when the corresponding switch module is triggered, the status detection signal of the triggered switch module can be output through the second connector CN2.

[0034] To facilitate understanding of the working principle of the safety control circuit in this embodiment, the working process of the switch modules 121 and 122 in the safety control circuit is taken as an example for schematic description.

[0035] In this embodiment, under normal working conditions, one end of the first connector CN11 is connected to the second connector CN2, the other end of the first connector CN11 is connected to the third connector CN31, one end of the first connector CN12 is connected to the second connector CN2, and the other end of the first connector CN12 is connected to the third connector CN32. When the switch module 121 is triggered and the switch module 122 is not triggered, the second connector CN2 only transmits the status detection signal generated by the switch module 121, and the switch module 122 is still in the initial state. In this way, independent control between the switch modules 121 and 122 can be achieved, and the working state of the switch module 122 will not be affected by the triggering of the switch module 121.

[0036] In other words, this embodiment connects the third connector in the switch module to the corresponding first connector, so that when the switch module is triggered or fails, the second connector can only output the status detection signal of the triggered switch module, and the untriggered switch module will not output the status detection signal through the second connector, thereby achieving independent control between multiple switch modules, reducing or avoiding erroneous operations caused by mutual influence between switch modules, and thus improving the safety of equipment operation.

[0037] It should be noted that, first, Figure 1 The layout of the first connector, the second connector, the third connector, and the switch module is only an example, which is used to indicate that by setting the first connector and the third connector connected in a one-to-one correspondence, when the switch module is triggered, the state detection signal can be output through the second connector connected to the first connector, and it should not be understood as a limitation of the present invention; second, Figure 1 The connection relationship between the first connector and the third connector is also an example for illustrating a one-to-one correspondence between the first connector and the third connector, and does not represent an actual connection relationship between the first connector and the third connector. For example, Figure 1The diagram shows that the first connector CN11 is connected to the third connector CN31, which does not mean that the first connector CN11 can only be connected to the third connector CN31. In some examples, the first connector CN11 can be connected to the third connector CN32 as long as there is a one-to-one correspondence between the first connector and the third connector; Figure 1 The number of the first connector and the third connector shown is also an example. In practical applications, the number of the first connector and the third connector can be flexibly set according to needs. For example, the number of the first connector and the third connector can be 6 to 8.

[0038] In this embodiment, the line hub module may include a line hub circuit board, and the state detection signal of the corresponding switch module received by the first connector may be transmitted to the second connector through the line inside the line hub circuit board.

[0039] Furthermore, by adopting a wiring hub circuit board, the integration of the wiring hub module can be improved and the stability of the electrical connection can be improved.

[0040] In this embodiment, the switch module may further include: a first type switch. By setting the first type switch, the state change of the switch module can be sensed in real time, so that when it is determined that the state of the first type switch has changed, it can be determined that there is a triggered switch module.

[0041] In this embodiment, the type of the first type switch can be a normally closed switch or a normally open switch. If the first type switch is a normally closed switch, when it is determined that the first type switch is in an off state, it can be determined that the corresponding switch module is triggered; or, if the first type switch is a normally open switch, when it is determined that the first type switch is in an on state, it can be determined that the corresponding switch module is triggered.

[0042] In a specific embodiment, the first type of switch can be a normally closed switch. Under normal circumstances, the first type of switch is closed, and it can be determined that the device is in a normal operating state; when the switch module is triggered, the first type of switch can be quickly disconnected, and the device can quickly switch from a running state to a stopped state, thereby improving the stability of the device operation.

[0043] In this embodiment, the first type switch may include a control end, a first end, and a second end, wherein the control end is used to receive a control signal to change the switching state of the first type switch; the first end and the second end are used to electrically connect the first type switch to the third connector of the corresponding switch module.

[0044] More specifically, the third connector may include: a first type terminal pair corresponding one-to-one to the first type switch.

[0045] In other words, the first end and the second end of the first type switch can be connected one-to-one with the first type terminal pair, so that the first type switch can be electrically connected to the loop of the switch module to realize the connection and disconnection of the line between the switch module and the line hub module.

[0046] In this embodiment, the first type terminal pair includes a third connection terminal, one of the third connection terminals in the first type terminal pair is connected to the first end of the first type switch, and the other third connection terminal is connected to the second end of the first type switch.

[0047] By using the first type of terminal pair to connect the first type of switch, a standardized connection can be achieved, making the electrical connection between the switch and the device more standardized and unified, improving the stability of the electrical connection; and simplifying the wiring process, enabling quick access to the first type of switch. In addition, the terminal pairs can be compactly arranged, saving space for the wiring module.

[0048] For ease of understanding, the connection relationship between the first type switch and the third connector in the present embodiment is described by way of a specific example.

[0049] See also Figure 2 A specific structural diagram of a safety control circuit in an embodiment of the present invention is shown in FIG. Figure 2 As shown, the switch module 12i may include first type switches Ki1 and Ki2. Thus, when it is determined that the states of the first type switches Ki1 and Ki2 have changed, it indicates that at least one switch module among the multiple switch modules 12i is triggered.

[0050] In this embodiment, the switch module 12i may include the first type switches Ki1 and Ki2.

[0051] When the switch states of the first type switches Ki1 and Ki2 are inconsistent (for example, the first type switch Ki1 is in the off state, while the first type switch Ki2 is still in the on state), or when the switch states of the first type switches Ki1 and Ki2 are inconsistent with the initial state, it indicates that the switch module 12i is triggered.

[0052] Furthermore, by using two first type switches Ki1 and Ki2, a double-circuit connection can be achieved between the first connector CN1q, so as to improve the safety level of the switch module 12i.

[0053] It should be noted that this embodiment is described with the number of first-type switches in a switch module being two. In some other embodiments, the number of first-type switches may also be one, for example, the switch module may include a first-type switch Ki1 or Ki2. The embodiment of the present invention does not impose any restriction on the number of first-type switches, as long as the triggering state of the switch module can be identified.

[0054] In this embodiment, the first type switches Ki1 and Ki2 are both normally closed switches. Under normal circumstances, the first type switches Ki1 and Ki2 are closed, which indicates that the device is in normal operation. When the switch module is triggered, the first type switches Ki1 and Ki2 can be quickly disconnected, and the device can quickly switch from running to stopping state, and can reduce the possibility of misoperation and improve the stability of device operation.

[0055] In some other embodiments, the first type switches Ki1 and Ki2 may also be normally open switches. The embodiment of the present invention does not limit the type of the first type switches.

[0056] In this embodiment, the first type switches Ki1 and Ki2 may share a control terminal, so that the switch states between the first type switches Ki1 and Ki2 may be controlled simultaneously, thereby achieving the unification of the switch states between the first type switches Ki1 and Ki2.

[0057] In a specific example, if Figure 2 As shown, the switch module 12i may further include: a driving mechanism Ei, connected to the control end, for changing the state of the switch (eg, the first type switches Ki1 and Ki2).

[0058] It should be noted that, in this embodiment, the driving mechanism Ei is used to represent one driving mechanism among the driving mechanisms E1, E2, E3, ..., Ei.

[0059] More specifically, when the driving mechanism Ei is in an untouched state, the first type switches Ki1 and Ki2 are in a closed state; when the driving mechanism Ei is in a touched state, the first type switches Ki1 and Ki2 are in an open state, so the on-off state of the first type switches Ki1 and Ki2 can be changed by operating the driving mechanism Ei.

[0060] In a specific implementation example, the driving mechanism Ei can be an emergency stop switch (EMO). When the EMO switch is not pressed, the first type switches Ki1 and Ki2 are in a closed state; when the EMO switch is pressed, the first type switches Ki1 and Ki2 are in an open state, so the on-off state of the first type switches Ki1 and Ki2 can be changed by operating the EMO switch. In some other embodiments, the first type switches Ki1 and Ki2 are controlled by different control terminals respectively, and the embodiment of the present invention is not limited to this, as long as the on-off state between the first type switches Ki1 and Ki2 can be changed synchronously.

[0061] In this embodiment, the third connector CN3u may include a first type terminal pair consisting of third connection terminals n1 and n4, and a first type terminal pair consisting of third connection terminals n2 and n3, that is, the number of first type terminal pairs in the third connector CN3u is two.

[0062] In this case, the third connection terminal n1 in one of the first type terminal pairs is connected to the first end of the first type switch Ki1, and the third connection terminal n4 is connected to the second end of the first type switch Ki1; the third connection terminal n2 in the other first type terminal pair is connected to the first end of the first type switch Ki2, and the third connection terminal n3 is connected to the second end of the first type switch Ki2.

[0063] It should be noted that, first, the switch module 12i in the above example can represent any switch module, and the structure and connection relationship of any switch module can refer to the description of the switch module 12i, or in other words, any switch module has the same structure, and the difference lies in the specific connection relationship between the first type switch and the first type terminal pair in the switch module; second, the number and distribution position of the third connection terminal are only examples, which are used to indicate that the first type switch can be connected to the circuit of the switch module by setting the connection terminal, and cannot be understood as a limitation of the present invention; third, Figure 2 The distribution positions of the third connection terminals included in the illustrated first type terminal pair are also illustrative, and it is sufficient as long as there is a corresponding relationship between the two third connection terminals in the first type terminal pair.

[0064] In this embodiment, when the third connector includes a first type terminal pair, the first connector may include multiple second type terminal pairs corresponding one-to-one to the first type terminal pairs, and the second type terminal pairs include a first connecting terminal, that is, the first connecting terminal is used to connect one-to-one with the third connecting terminal in the third connector.

[0065] By adopting a one-to-one connection method of connecting the first connection terminal to the third connection terminal, new components can be added by adding more terminals and connecting wires, thereby enhancing the scalability of the safety control circuit to facilitate the connection of new devices, and adopting the form of terminal pairs for easy plugging and unplugging.

[0066] See also Figure 2 , the first connector CN1q may include a second type terminal pair consisting of the first connection terminals p1 and p4, and a second type terminal pair consisting of the first connection terminals p2 and p3.

[0067] The first connection terminal p1 is connected to the third connection terminal n1, the first connection terminal p2 is connected to the third connection terminal n2, the first connection terminal p3 is connected to the third connection terminal n3, and the first connection terminal p4 is connected to the third connection terminal n4.

[0068] In this embodiment, one of the first type switches in each switch module and the second type terminal pair corresponding to the first type switch constitute a control loop, and different first connectors on the same control loop are connected via the first connection terminals.

[0069] See also Figure 2 The first type switches K11, K21, K31, ..., Ki1, and the first connection terminals corresponding to the first type switches Ki1 respectively form a control loop, and the first connectors CN11 and CN12 are connected through the first connection terminal p4 and the first connection terminal p1.

[0070] The first type switches K12, K22, K32, . . . , Ki2, and the first connection terminals corresponding to the first type switches Ki2 respectively form another control loop, and the first connectors CN11 and CN12 are connected via the first connection terminal p3 and the first connection terminal p2.

[0071] It should be noted that, first, Figure 2 The number and distribution positions of the first connection terminals are only examples, which are used to indicate that a one-to-one connection with the third connection terminals can be achieved by setting the first connection terminals, and should not be understood as a limitation of the present invention; secondly, the first connector CN1q in the above example can represent any first connector, and the structure and connection relationship of any first connector can refer to the description of the first connector CN1q, or in other words, any first connector has the same structure, and the difference is that the third connector connected to the first connection terminal in the first connector is different.

[0072] In this embodiment, when any switch module is triggered, a state detection signal is output through the second connector, so the second connector includes a plurality of first aggregation connection terminals corresponding to the first type terminals at both ends of each of the control loops.

[0073] In this embodiment, see Figure 2When the safety control circuit includes two control loops, the second connector CN2 may include first summary connection terminals m1 to m4, wherein the first summary connection terminal m1 is connected to the first type terminal p1 at one end of the first control loop, the first summary connection terminal m4 is connected to the first type terminal p4 at the other end of the first control loop, the first summary connection terminal m2 is connected to the first type terminal p2 at one end of the second control loop, and the first summary connection terminal m3 is connected to the first type terminal p3 at the other end of the second control loop.

[0074] In this embodiment, in order to transmit the status detection signal obtained by the second connector CN2 to other devices or equipment with processing capabilities, see Figure 2 The hub module may further include a summary output connector CN6 having one end connected to the second connector CN2 and the other end connected to the processor. Accordingly, the summary output connector CN6 may include first summary output connection terminals j1 to j4, wherein the first summary output connection terminal j1 is connected to the first summary connection terminal m1, the first summary output connection terminal j2 is connected to the first summary connection terminal m2, the first summary output connection terminal j3 is connected to the first summary connection terminal m3, and the first summary output connection terminal j4 is connected to the first summary connection terminal m4.

[0075] In this embodiment, the first aggregate output connection terminals j1 to j4 are connected at one end away from the second connector CN2.

[0076] The present invention also provides a safety control circuit of a second embodiment. The similarities can be found in the above-mentioned example, and the difference is that the switch module can also include: a second type switch, the second type switch is different from the first type switch in type, and the second type switch and the first type switch constitute a linkage switch.

[0077] By adopting a second type switch that is different from the first type switch, when the switch module is triggered, the states of the first type switch and the second type switch both change, and because the second type switch and the first type switch form a linkage switch, when the switch module is triggered, the states of the first type switch and the second type switch are different, while the state of the second type switch in the untriggered switch module is still in the initial state, so that the triggered switch module can be determined by detecting the switch state of the second type switch, so that the abnormal switch module can be accurately and quickly located.

[0078] That is, by using a switch module having a first type of switch and a second type of switch, the position of the triggered switch module can be determined based on the state change of the first type of switch.

[0079] In this embodiment, the second type switch may include a control end, a first end, and a second end, wherein the control end is used to receive a control signal to change the switching state of the second type switch; the first end and the second end are used to electrically connect the second type switch to the third connector of the corresponding switch module.

[0080] More specifically, the third connector may further include: a third type terminal pair corresponding one-to-one to the second type switch.

[0081] In other words, the first end and the second end of the second type switch can be connected to the third type terminal pair in a one-to-one correspondence, so that the second type switch can be electrically connected to the loop of the switch module.

[0082] In this embodiment, the third type terminal pair includes a fourth connection terminal, one of the fourth connection terminals in the third type terminal pair is connected to the first end of the second type switch, and the other fourth connection terminal is connected to the second end of the second type switch.

[0083] By using the third type of terminal pair to connect the second type of switch, a standardized connection can be achieved, making the electrical connection between the switch and the device more standardized and unified, improving the stability of the electrical connection; and simplifying the wiring process, enabling quick access to the first type of switch. In addition, the terminal pairs can be arranged compactly, saving space for the wiring module.

[0084] For ease of understanding, the connection relationship between the second type switch and the third connector in the second embodiment is described by using a specific example.

[0085] See also Figure 3 FIG. 1 is a schematic diagram of another specific structure of a safety control circuit in an embodiment of the present invention. Figure 3 As shown, the switch module 12i may further include a second type switch Ki3, so that when it is determined that the state of the second type switch Ki3 changes, it is determined that the switch module 12i is triggered.

[0086] In this embodiment, the second type switch Ki3 is a normally open switch. Under normal circumstances, the second type switch Ki3 is disconnected, indicating that there is no triggered switch module and the device is in normal operation; when the switch module is triggered, the second type switch Ki3 can be quickly selected, so that one of the triggered switch modules 12i can be determined from multiple switch modules 12i based on the detected state of the second type switch Ki3.

[0087] In some other embodiments, the second type switch may also be a normally closed switch. The embodiment of the present invention does not limit the type of the second type switch, as long as the type of the second type switch is different from the type of the first type switch.

[0088] In this embodiment, the second type switch Ki3 and the first type switches Ki1 and Ki2 can share a control terminal, so that the switching state of the second type switch Ki3 and the first type switches Ki1 and Ki2 can be controlled simultaneously, so that the second type switch Ki3 and the first type switches Ki1 and Ki2 have completely different states.

[0089] In short, the first type switches Ki1 and Ki2 are used to generate a state detection signal of the switch module, and the second type switch Ki3 is used to indicate a triggered switch module.

[0090] In a specific example, if Figure 3 As shown, the switch module 12i may further include: a driving mechanism Ei, connected to the control end, for changing the state of the switch (eg, the first type switches Ki1 and Ki2, and the second type switch Ki3).

[0091] More specifically, when the driving mechanism Ei is in an untouched state, the first type switches Ki1 and Ki2 are in a closed state, and the second type switch Ki3 is in an open state; when the driving mechanism Ei is in a touched state, the first type switches Ki1 and Ki2 are in an open state, and the second type switch Ki3 is in a closed state. Therefore, the triggered switch module can be determined by the states of the first type switches Ki1 and Ki2 and the second type switch Ki3.

[0092] In a specific implementation example, the driving mechanism Ei can be an emergency stop switch EMO. When the EMO switch is not pressed, the first type switches Ki1 and Ki2 are in a closed state, and the second type switch Ki3 is in an open state; when the EMO switch is pressed, the second type switch Ki3 is in a closed state.

[0093] In some other embodiments, the second type switch Ki3 and the first type switches Ki1 and Ki2 can be controlled through different control terminals respectively. The embodiment of the present invention is not limited to this, as long as the state of the second type switch Ki3 can be different from that of the first type switches K11 and K12.

[0094] In this embodiment, the third connector CN3u may include a third type terminal pair consisting of fourth connection terminals n5 and n6, wherein the fourth connection terminal n5 is connected to the first end of the second type switch Ki3, and the other fourth connection terminal n6 is connected to the second end of the second type switch Ki3.

[0095] In this embodiment, the number of the third type terminal pairs is the same as the number of the second type switches, and both are one.

[0096] It should be noted that, first, the third connector CN3u in the above example can represent any switch module, and the structure and connection relationship of any third connector can refer to the description of the third connector CN3u, or in other words, any third connector has the same structure, the difference is that the third connector is connected to a different second type switch; second, the number and distribution position of the fourth connection terminals are only examples, which are used to indicate that the second type switch can be connected to the circuit of the switch module by setting the connection terminals, and cannot be understood as a limitation of the present invention.

[0097] In this embodiment, when the third connector includes a third type terminal pair, the first connector may further include a plurality of second connection terminals, where the second connection terminals are used to be connected in a one-to-one correspondence with the fourth connection terminals in the third connector.

[0098] See also Figure 3 , the first connector CN1q may include second connection terminals p5 and p6, wherein the second connection terminal p5 is connected to the fourth connection terminal n5, and the second connection terminal p6 is connected to the fourth connection terminal n6.

[0099] In this embodiment, Figure 3 It can be seen that when the switch module includes the first type switches Ki1 and Ki2 and the second type switch Ki3, the first connector CN1i has at least 6 connection terminals p1 to p6, and the third connector CN3i has at least 6 connection terminals n1 to n6.

[0100] In this embodiment, the first connector CN1i and the third connector CN3i may be connectors with six terminals, so that the volume of the hub module can be reduced when simultaneously receiving the status detection signal and determining the triggered switch module.

[0101] In a specific implementation embodiment, the first connector CN1i can be an M12 female connector, and the third connector CN3i can be an M12 male connector. In this way, the first connector CN1i and the third connector CN3i can be connected using a standard end-to-end cable, and both the M12 female connector and the M12 male connector are standard connectors, which can improve the connection stability between the first connector CN1i and the third connector CN3i, and improve the reliability of the electrical connection between the switch module and the hub module.

[0102] In some other embodiments, the first connector and the third connector may also be other types of connectors, as long as the first connector and the third connector are compatible.

[0103] It should be noted that, first, Figure 3The number and distribution positions of the second connection terminals are only examples, which are used to indicate that a one-to-one connection with the fourth connection terminal can be achieved by setting the second connection terminal, and should not be understood as a limitation of the present invention; secondly, the first connector CN1q in the above example can represent any first connector, and the structure and connection relationship of any first connector can refer to the description of the first connector CN1q, or in other words, any first connector has the same structure, the difference being that the fourth connection terminal connected to the second connection terminal in the first connector is different.

[0104] In this embodiment, when any switch module is triggered, a status detection signal is output through the second connector. Therefore, when the switch module includes a second type switch, the second connector includes a second aggregation connection terminal, which is connected to one of the corresponding fourth connection terminals in all the first connectors; and multiple third aggregation connection terminals correspond one-to-one to the first connectors and are connected to another fourth connection terminal in the first connector.

[0105] See also Figure 3 The second connector CN2 includes a second aggregate connection terminal m5, and the second aggregate connection terminal m5 is connected to one of the fourth connection terminals p5 of the first connectors CN13 to CN1i.

[0106] The second connector CN2 includes third aggregate connection terminals m6 to mi, wherein the third aggregate connection terminal m6 is connected to the second connection terminal p6 of the first connector CN11, the third aggregate connection terminal m7 is connected to the second connection terminal p6 of the first connector CN12, the third aggregate connection terminal m8 is connected to the second connection terminal p6 of the first connector CN13,…, the third aggregate connection terminal mi is connected to the second connection terminal p6 of the first connector CN1i.

[0107] In this embodiment, when the second connector includes a second aggregate connection terminal and multiple third aggregate connection terminals, the aggregate output connector CN6 may also include multiple second aggregate output connection terminals j5 to ji, wherein the second aggregate output connection terminal j5 is connected to the second aggregate connection terminal m5, the second aggregate output connection terminal j6 is connected to the third aggregate connection terminal m6, the second aggregate output connection terminal j7 is connected to the third aggregate connection terminal m7, the second aggregate output connection terminal j8 is connected to the third aggregate connection terminal m8,… the second aggregate output connection terminal ji is connected to the third aggregate connection terminal mi.

[0108] In this embodiment, the first aggregate output connection terminals j1 to j4 and the second aggregate output connection terminals j5 to j6 are connected at their ends away from the second connector CN2.

[0109] The present invention also provides a safety control circuit of a third embodiment. Specifically, the safety control circuit has multiple switch modules, and one switch module usually corresponds to one processing chamber. In order to achieve the ability to operate multiple switch modules simultaneously, the distance between the multiple switch modules can meet the requirement that the distance between each switch and the operator does not exceed a set value (for example, 3m, or other values).

[0110] In this case, the safety control circuit may further include: an extension line, one end of the extension line having a fourth connector and the other end of the extension line having a fifth connector, the fourth connector being connected to the first connector, and the fifth connector being connected to the third connector.

[0111] By providing an extension line in the safety control circuit, the distance between each switch module and the first connector corresponding to each switch module can be extended, thereby shortening the distance between the multiple switch modules, so that the multiple switch modules can be operated simultaneously.

[0112] In a specific embodiment, see Figure 4 FIG. 1 is a schematic diagram of another specific structure of a safety control circuit in an embodiment of the present invention. Figure 4 As shown, one end of the extension line has a fourth connector CN4i connected to the first connector CN1q, and the other end has a fifth connector CN5i connected to the third connector CN3i.

[0113] In this embodiment, the fourth connector CN4i can have the same number of fifth connection terminals as the third connection terminals and is adapted thereto, wherein the fifth connection terminal s1 is connected to the third connection terminal p1, the fifth connection terminal s2 is connected to the third connection terminal p2, the fifth connection terminal s3 is connected to the third connection terminal p3, the fifth connection terminal s4 is connected to the third connection terminal p4, the fifth connection terminal s5 is connected to the third connection terminal p5, and the fifth connection terminal s6 is connected to the third connection terminal p6.

[0114] The fifth connector CN5i can have the same number of adapted sixth connection terminals r1 to r6 as the fourth connection terminals, wherein the sixth connection terminal r1 is connected to the fourth connection terminal n1, the sixth connection terminal r2 is connected to the fourth connection terminal n2, the sixth connection terminal r3 is connected to the fourth connection terminal n3, the sixth connection terminal r4 is connected to the fourth connection terminal n4, the sixth connection terminal r5 is connected to the fourth connection terminal n5, and the sixth connection terminal r6 is connected to the fourth connection terminal n6.

[0115] It should be noted that, first, Figure 4The schematic fourth connector CN4i can represent a fourth connector connected to the first connector on any extension line, and the fifth connector CN5i can represent a fifth connector connected to the third connector on any extension line, and the structures of the fourth connectors are the same, and the difference is that the first connectors connected to the fourth connectors are different, and the structures of the fifth connectors are the same, and the difference is that the third connectors connected to the fifth connectors are different; second, Figure 4 The number and distribution positions of the fifth connection terminal and the sixth connection terminal are only for illustration and are used to indicate a one-to-one correspondence between the fifth connection terminal and the third connection terminal, and a one-to-one correspondence between the sixth connection terminal and the fourth connection terminal; Figure 4 The schematic diagram shows that an extension line is configured for each first connector. In some other embodiments, an extension line may be configured for only some of the first connectors.

[0116] The present invention also provides a safety control circuit of a fourth embodiment, which is similar to the above-mentioned examples, except that Figure 5 As shown in the specific structural diagram of another safety control circuit in the embodiment of the present invention, the signal connector may also include: a spare connector CN7, so that when more switch modules need to be added, the switch module 12i can be directly electrically connected to the spare connector CN7, which is easy to operate.

[0117] In this embodiment, the standby connector CN7 is the same as the first connector CN1q.

[0118] More specifically, the standby connector includes a second type terminal pair, and the first connection terminals in the same second type terminal pair are short-circuited by a connection line and connected in series to the control loop.

[0119] For example, see Figure 5 The spare connector CN7 is composed of a second type terminal pair consisting of first connection terminals p1 and p4, and is connected in series to a control circuit including first type switches K11, K21, K31, ..., Ki1; and a second type terminal pair consisting of first connection terminals p2 and p3, and is connected in series to a control circuit including first type switches K12, K22, K32, ..., Ki2.

[0120] The first connection terminals p1 and p4 of the standby connector CN7 are short-circuited by a connection line, and the first connection terminals p2 and p3 of the standby connector CN7 are short-circuited by a connection line.

[0121] By short-circuiting the first connection terminal in the second type terminal pair, mis-connection of the standby connector can be avoided, thereby improving the safety of the safety control circuit.

[0122] In this embodiment, one end of the connection line may include a third type terminal pair connected to the first type terminal pair in a one-to-one correspondence.

[0123] For example, one end of the connecting line has third connecting terminals n1 to n4 corresponding one-to-one to the first connecting terminals p1 to p4, wherein the first connecting terminal p1 is connected to the third connecting terminal n1, the first connecting terminal p2 is connected to the third connecting terminal n2, the first connecting terminal p4 is connected to the third connecting terminal n4, and the first connecting terminal p4 is connected to the third connecting terminal n4. In this way, when the third connecting terminals p1 and p4 are short-circuited, and the third connecting terminals p2 and p3 are short-circuited, the short-circuiting between the first connecting terminals in the same second type terminal pair in the spare connector is achieved.

[0124] In this embodiment, the backup connector CN7 may further include: a second type terminal pair consisting of first connection terminals p5 and p6, so that when a switch module is connected to the backup connector CN7, a second type switch can be connected through the first connection terminals p5 and p6, thereby facilitating determination of whether the switch module connected to the backup connector CN7 is triggered.

[0125] In this case, one end of the connection line may include a fourth type terminal n5 connected to the first connection terminal p5, and a fourth type terminal n6 connected to the first connection terminal p6.

[0126] In this embodiment, when the hub module also includes a spare connector, the spare connector can also be connected to the second connector, so that when the first connector is connected to the spare connector, the status detection signal of the newly connected first connector can be obtained.

[0127] In this embodiment, see Figure 5 The second connector CN2 may further include a fourth aggregate connection terminal m9 connected to the first connection terminal p6 of the standby connector CN7, and the first connection terminal p5 of the standby connector CN7 is connected to the second aggregate connection terminal m5.

[0128] It should be noted that when the spare connector CN7 is located Figure 5 When the output terminal p4 of the standby connector CN7 is in the position shown, the first connection terminal p4 of the standby connector CN7 is connected to the first summary connection terminal m4, the first connection terminal p3 of the standby connector CN7 is connected to the first summary connection terminal m3, the first connection terminal p1 of the standby connector CN7 is connected to the first connection terminal p4 of the first connector Cni, and the first connection terminal p2 of the standby connector CN7 is connected to the first connection terminal p3 of the first connector Cni. Correspondingly, the summary output connector CN6 may further include a third summary output connection terminal j9 connected to the fourth summary connection terminal m9.

[0129] In this embodiment, the signal connector 110 may further include: an expansion connector CN8.

[0130] By providing the expansion connector CN8, the communication connection between the hub module 110 and other hub modules can be realized, so that multiple hub modules can output the status detection signal of the triggered switch module through the same second connector, thereby improving the integration.

[0131] In this embodiment, the structure of the extension connector CN8 is the same as that of the first connector CN1q.

[0132] Specifically, the expansion connector CN8 may include: a second type terminal pair consisting of first connection terminals p1 and p4, and connected in series to a control circuit including first type switches K11, K21, K31, ..., Ki1; and a second type terminal pair consisting of first connection terminals p2 and p3, and connected in series to a control circuit including first type switches K12, K22, K32, ..., Ki2.

[0133] In this embodiment, in order to realize communication between the expansion connector CN8 and other hub modules, the security control circuit may also include: an additional connector CN9 adapted to the expansion connector CN8, wherein the additional connector CN9 may include a first type terminal pair consisting of third connection terminals n1 and n4, and a first type terminal pair consisting of third connection terminals n2 and n3, wherein the first connection terminal p1 is connected to the third connection terminal n1, the first connection terminal p2 is connected to the third connection terminal n2, the first connection terminal p3 is connected to the third connection terminal n3, the first connection terminal p4 is connected to the third connection terminal n4, and the third connection terminals n1 to n4 are connected by wires and connected to other hub modules.

[0134] In this embodiment, the expansion connector CN8 can also include first connection terminals p5 and p6. In this way, when the expansion connector CN8 is connected to other hub modules, the signal flowing through the first connection terminals p5 and p6 can be used to determine that other switch modules have abnormalities without changing the state of the hub module 110.

[0135] In this case, the additional connector CN9 may also include a third type terminal pair consisting of fourth connection terminals n5 and n6, so that when the switch module is connected to the expansion connector CN8, the second type switch can be connected through the fourth connection terminals n5 and n6, which can be used to determine that the switch module in other hub modules connected to the expansion connector CN8 is triggered.

[0136] In this embodiment, when the hub module 110 includes the expansion connector CN8, the second connector CN2 may further include a fifth aggregation connection terminal m10 connected to the first connection terminal p6 of the expansion connector CN8, and the first connection terminal p5 of the expansion connector CN8 is connected to the second aggregation connection terminal m5.

[0137] It should be noted that when the expansion connector CN8 is located Figure 5 When in the position shown, the first connection terminal p1 of the expansion connector CN8 is connected to the first aggregate connection terminal m1, the first connection terminal p2 of the expansion connector CN8 is connected to the first aggregate connection terminal m2, and the first connection terminal p3 of the expansion connector CN8 is connected to the first connection terminal p2 of the first connector Cn1, and the first connection terminal p4 of the expansion connector CN8 is connected to the first connection terminal p1 of the first connector Cn1.

[0138] Correspondingly, the aggregate output connector CN6 may further include a fourth aggregate output connection terminal j10 connected to the fifth aggregate connection terminal m10.

[0139] This embodiment also provides a safety control system, see Figure 6 A structural diagram of a safety control system is shown in FIG. Figure 6 As shown, the safety control system 300 may include the safety control circuit 100 and the processor 200 described in any of the aforementioned embodiments, and the processor 200 is electrically connected to the safety control circuit 100 for processing the state detection signal.

[0140] The specific structure and working principle of the safety control circuit can be found in the above examples and will not be described in detail here.

[0141] The processor can be implemented by a processing chip such as a central processing unit (CPU), a field programmable gate array (FPGA), or an application specific integrated circuit (ASIC), a programmable logic controller (PLC), or one or more integrated circuits configured to implement the embodiments of this specification.

[0142] Specifically, when the processor receives a status detection signal from the safety control circuit, it can determine the presence of a triggered switch module by processing the status detection signal, thereby reminding the operator to perform maintenance and reset operations.

[0143] This embodiment further provides a semiconductor device, which may include the safety control system described in any of the above embodiments.

[0144] In this embodiment, the semiconductor equipment includes a plurality of processing chambers, and the plurality of processing chambers are all electrically connected to the safety control system.

[0145] More specifically, a safety control system includes multiple switch modules, and the multiple switch modules are electrically connected to multiple processing chambers one by one. Therefore, when an abnormality occurs in a processing chamber, the corresponding switch module can be triggered to cut off the power supply to the processing chamber, thereby improving the safety of the processing chamber during operation.

[0146] Although the present specification is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A safety control circuit, characterized in that: include: A line hub module, the line hub module comprising a second connector and a signal connector, the signal connector comprising at least a plurality of first connectors, and the plurality of first connectors and the second connectors are serially cascaded; A plurality of switch modules are configured to correspond one-to-one with the first connectors in the line hub module, the switch module comprising a third connector, the third connector being used to connect with the corresponding first connector; The first connector is used to receive a status detection signal of a corresponding switch module, and the second connector is used to output a status detection signal of a triggered switch module.

2. The safety control circuit according to claim 1, characterized in that: The switch module further includes: a first type switch, the first type switch includes a normally closed switch or a normally open switch, and the first type switch includes a control end, a first end, and a second end; The third connector includes: a first type terminal pair, corresponding one-to-one to the first type switch, the first type terminal pair including a third connection terminal, one of the third connection terminals in the first type terminal pair is connected to the first end of the first type switch, and the other third connection terminal is connected to the second end of the first type switch.

3. The safety control circuit according to claim 2, characterized in that: The number of the first type switches is two.

4. The safety control circuit according to claim 2, characterized in that: The first connector includes a plurality of second type terminal pairs corresponding one-to-one to the first type terminal pairs, and the second type terminal pairs include first connecting terminals; Among them, one of the first type switches in each switch module and the second type terminal pair corresponding to the first type switch constitute a control loop, and different first connectors on the same control loop are connected through the first connection terminals.

5. The safety control circuit according to claim 4, characterized in that: The signal connector further includes: a spare connector, the spare connector includes the second type terminal pair, and the first connection terminals in the same second type terminal pair are short-circuited through a connecting line and connected in series to the control loop.

6. The safety control circuit according to claim 4, characterized in that: The second connector includes a plurality of first aggregate connection terminals corresponding to the first type terminals at both ends of each of the control loops.

7. The safety control circuit according to claim 2, characterized in that: The switch module further includes: a second type switch, the second type switch is different from the first type switch in type, and the second type switch and the first type switch form a linkage switch, the second type switch includes a control end, a first end, and a second end; The third connector includes: a third type terminal pair, corresponding one-to-one to the second type switch, the third type terminal pair including a fourth connection terminal, one of the fourth connection terminals in the third type terminal pair is connected to the first end of the second type switch, and the other fourth connection terminal is connected to the second end of the second type switch.

8. The safety control circuit according to claim 7, characterized in that: The first connector includes a plurality of second connection terminals, and the second connection terminals are used for one-to-one connection with the fourth connection terminals in the third connector.

9. The safety control circuit according to claim 8, characterized in that: The second connector comprises: a second aggregation connection terminal, the second aggregation connection terminal being connected to a corresponding one of the fourth connection terminals in all the first connectors; A plurality of third aggregate connection terminals correspond to the first connectors one by one and are connected to another fourth connection terminal in the first connector.

10. The safety control circuit according to claim 7, characterized in that: The number of the first type terminal pairs is two, and the number of the third type terminal pairs is one.

11. The safety control circuit according to claim 2 or 7, characterized in that: The switch module also includes: a driving mechanism connected to the control end and used for changing the switch state.

12. The safety control circuit according to claim 1, characterized in that: The safety control circuit further includes: an extension line, one end of the extension line has a fourth connector, and the other end of the extension line has a fifth connector, the fourth connector is connected to the first connector, and the fifth connector is connected to the third connector.

13. The safety control circuit according to claim 1, characterized in that: The signal connector further includes: one or both of a spare connector and an expansion connector, and the spare connector, the expansion connector and the first connector are the same.

14. The safety control circuit according to claim 1, characterized in that: The line hub module includes a line hub circuit board.

15. A safety control system, characterized in that: include: The safety control circuit according to any one of claims 1 to 14; A processor is electrically connected to the safety control circuit and is used to process the status detection signal.

16. A semiconductor device, characterized in that: Comprising the safety control system as claimed in claim 15.

17. The semiconductor device according to claim 16, wherein: The semiconductor device includes a plurality of processing chambers, and the plurality of processing chambers are all electrically connected to the safety control system and correspond one-to-one to the switch modules.

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