Roughness optimization method and system for ultrasonic vibration-assisted magnetorheological deterministic polishing

Abstract

The present invention discloses a roughness optimization method and system for ultrasonic vibration-assisted magnetorheological deterministic polishing. The present invention includes placing an ultrasonic vibration table on the workpiece rotating axis of a magnetorheological machine tool, connecting and fixing the workpiece to be processed with the fixture of the ultrasonic vibration table; adjusting the position and posture of the workpiece to be processed by the leveling mechanism and the centering mechanism of the magnetorheological machine tool to ensure that the pressing position and the pressing depth of the magnetorheological polishing ribbon formed on the polishing wheel during the magnetorheological processing are consistent; maintaining the viscosity and flow rate of the magnetorheological polishing liquid stable; using a wavefront interferometer to detect the surface shape error data of the workpiece to be processed and generate a processing code; inputting the obtained processing code into the magnetorheological machine tool, so that the magnetorheological polishing ribbon performs deterministic polishing on the workpiece to be processed based on the fixed pressing position and pressing depth. The present invention aims to achieve the optimization of roughness of ultrasonic vibration-assisted magnetorheological deterministic polishing, promote the uniformity of material removal, and effectively reduce the roughness of the workpiece.

Description

Technical Field

[0001] The present invention relates to the technical field of deterministic polishing of optical elements, and in particular to a roughness optimization method and system for ultrasonic vibration-assisted magnetorheological deterministic polishing. Background Art

[0002] With the continuous development of modern manufacturing, the surface quality of products has an important impact on their performance and service life. Especially in the fields of optics, aerospace, microelectronics, etc., the control of surface roughness is particularly critical. Traditional polishing methods usually rely on physical grinding or chemical corrosion, but these methods have certain limitations in terms of accuracy, efficiency and adaptability. In recent years, ultrasonic vibration technology, as an emerging processing method, has gradually attracted the attention of researchers. The working principle of ultrasonic vibration assistance is that the piezoelectric ceramic piece resonates at the resonant frequency, driving the load to reciprocate at the ultrasonic frequency. The deterministic magnetorheological finishing technology (Magnetorheological Finishing, MRF) controls the magnetorheological polishing liquid ribbon to move on the workpiece surface at a specific trajectory and speed through a computer, and controls the residence time in each area with the error surface distribution of the optical element as a reference, so as to correct the surface error and improve the surface accuracy. Combining ultrasonic vibration technology with deterministic magnetorheological finishing technology (Magnetorheological Finishing, MRF) can effectively enhance the interaction between the abrasive and the workpiece, improve processing efficiency and improve polishing effect. In the polishing process, roughness is an important parameter for evaluating surface quality. At present, the research on the optimization of polishing roughness is still relatively limited. Most existing technologies only focus on the influence of a single factor, while ignoring the comprehensive effect of multiple factors. Summary of the invention

[0003] Technical problem to be solved by the present invention: In view of the above-mentioned problems in the prior art, a roughness optimization method and system for ultrasonic vibration assisted magnetorheological deterministic polishing are provided. The present invention aims to achieve roughness optimization of ultrasonic vibration assisted magnetorheological deterministic polishing, promote the uniformity of material removal, and effectively reduce the roughness of the workpiece.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0005] A roughness optimization method for ultrasonic vibration-assisted magnetorheological deterministic polishing comprises the following steps:

[0006] S1, placing an ultrasonic vibration table on a workpiece rotation axis of a magnetorheological machine tool, and the ultrasonic vibration table is not associated with an input or output system of a polishing wheel of the magnetorheological machine tool so that a magnetorheological polishing ribbon formed on the polishing wheel is not affected by the ultrasonic vibration table;

[0007] S2, connecting and fixing the workpiece to be processed to the fixture of the ultrasonic vibration table;

[0008] S3, adjusting the position and posture of the workpiece to be processed by the leveling mechanism and the centering mechanism of the magnetorheological machine tool to ensure that the pressing position and the pressing depth of the magnetorheological polishing ribbon formed on the polishing wheel during the magnetorheological processing are consistent;

[0009] S4, using a viscometer and a flowmeter to detect the viscosity and flow of the magnetorheological polishing fluid, controlling the output and recovery of the magnetorheological polishing fluid through a numerical control system, and maintaining the viscosity and flow of the magnetorheological polishing fluid stable based on the viscosity and flow closed-loop control;

[0010] S5, inputting the surface error data of the workpiece to be processed detected by the wavefront interferometer into the magnetorheological polishing process control software, and solving the residence time of the magnetorheological polishing wheel on each mirror surface area of ​​the workpiece to be processed in combination with the optimal process parameter combination and outputting it as a processing code;

[0011] S6, input the obtained processing code into the magnetorheological machine tool, so that the magnetorheological polishing ribbon performs deterministic polishing on the workpiece to be processed based on the fixed pressing position and pressing depth, and in the deterministic polishing, the trajectory of the abrasive particles in the magnetorheological polishing liquid is controlled by adjusting the power supply of the ultrasonic vibration table to adjust the process parameters of the ultrasonic vibration to achieve roughness optimization of the ultrasonic vibration-assisted magnetorheological deterministic polishing, and the function expression of the trajectory of the abrasive particles is:

[0012] ,

[0013] In the above formula, is the trajectory of the abrasive particles, is the amplitude of ultrasonic vibration, is the frequency of ultrasonic vibration, is the radius of the polishing wheel, is the speed of the polishing wheel, For time, is the phase of ultrasonic vibration.

[0014] Optionally, before step S6, the process further includes constructing a trajectory equation of abrasive particles: establishing an abrasive particle motion model under the independent action of magnetorheology:

[0015] ,

[0016] ,

[0017] In the above formula, is the movement path of the abrasive particles, is the moving speed of the abrasive particles, is the radius of the polishing wheel, is the speed of the polishing wheel, is time; establish the ultrasonic vibration model under the independent action of ultrasonic vibration:

[0018] ,

[0019] ,

[0020] In the above formula, is the path of ultrasonic vibration, is the amplitude of ultrasonic vibration, is the frequency of ultrasonic vibration, is the phase of ultrasonic vibration, is the speed of ultrasonic vibration, is time; the abrasive particle motion model under the independent action of magnetorheology and the ultrasonic vibration model under the independent action of ultrasonic vibration are combined to obtain the abrasive particle trajectory equation under the action of ultrasonic vibration-assisted magnetorheology as shown in the following formula:

[0021] ,

[0022] In the above formula, The wear particle track.

[0023] Optionally, the process parameters in the optimal process parameter combination in step S5 include process parameters of the magnetorheological process and process parameters of the ultrasonic vibration. The process parameters of the magnetorheological process include the rotation speed of the polishing wheel, the magnetic field current, the viscosity of the magnetorheological polishing liquid, the flow rate of the magnetorheological polishing liquid, and the indentation depth coefficient of the magnetorheological polishing ribbon. The process parameters of the ultrasonic vibration include the amplitude of the ultrasonic vibration, the frequency of the ultrasonic vibration, and the phase of the ultrasonic vibration.

[0024] Optionally, before step S5, the method further includes testing a sample of the workpiece to be processed to obtain an optimal combination of process parameters, and the goal of obtaining the optimal combination of process parameters is to optimize the ratio of the surface roughness of the sample of the workpiece to be processed divided by the peak removal rate.

[0025] Optionally, maintaining the viscosity and flow rate of the magnetorheological polishing fluid stable based on the closed-loop control of viscosity and flow rate in step S4 means maintaining the fluctuation of the viscosity and flow rate of the magnetorheological polishing fluid within 5%.

[0026] Optionally, maintaining the viscosity and flow rate of the magnetorheological polishing liquid stable based on the closed-loop control of viscosity and flow rate in step S4 includes:

[0027] The viscosity difference between the viscosity obtained by detection and the target viscosity is calculated, and the viscosity difference is input into the PID controller to obtain the valve opening control instruction. The valve opening for adding saturated magnetorheological polishing fluid is controlled by the valve opening control instruction to keep the viscosity of the magnetorheological polishing fluid stable. The flow difference between the flow obtained by detection and the target flow is calculated, and the flow difference is input into the PID controller to obtain the circulation pump control instruction. The circulation pump for circulating the magnetorheological polishing fluid is controlled by the circulation pump control instruction to keep the viscosity of the magnetorheological polishing fluid stable.

[0028] In addition, the present invention also provides a roughness optimization system for ultrasonic vibration-assisted magnetorheological deterministic polishing, comprising a microprocessor and a memory connected to each other, wherein the microprocessor is programmed or configured to execute the roughness optimization method for ultrasonic vibration-assisted magnetorheological deterministic polishing.

[0029] In addition, the present invention also provides a computer-readable storage medium, which stores a computer program or instruction, and the computer program or instruction is programmed or configured to execute the roughness optimization method of ultrasonic vibration-assisted magnetorheological deterministic polishing through a processor.

[0030] In addition, the present invention also provides a computer program product, including a computer program or instructions, which are programmed or configured to execute the roughness optimization method of ultrasonic vibration-assisted magnetorheological deterministic polishing through a processor.

[0031] Compared with the prior art, the present invention mainly has the following advantages: the present invention comprises placing an ultrasonic vibration table on the workpiece rotating axis of a magnetorheological machine tool, connecting and fixing the workpiece to be processed with a fixture of the ultrasonic vibration table; adjusting the position and posture of the workpiece to be processed by a leveling mechanism and a centering mechanism of the magnetorheological machine tool to ensure that the pressing position and the pressing depth of the magnetorheological polishing ribbon formed on the polishing wheel during the magnetorheological processing are consistent; maintaining the viscosity and flow rate of the magnetorheological polishing liquid stable; using a wavefront interferometer to detect the surface shape error data of the workpiece to be processed and generate a processing code; and inputting the obtained processing code into the magnetorheological machine tool. In the bed, the magnetorheological polishing ribbon is used to perform deterministic polishing on the workpiece to be processed based on a fixed pressing position and a pressing depth. Through the above steps, the present invention can realize the roughness optimization of ultrasonic vibration-assisted magnetorheological deterministic polishing, promote the uniformity of material removal, and effectively reduce the roughness of the workpiece. The roughness optimization of magnetorheological deterministic polishing is assisted by ultrasonic vibration. The larger the ultrasonic amplitude, the larger the scratching distance of the abrasive particles, thereby changing the motion trajectory and speed of the magnetorheological processing abrasive, allowing the abrasive to produce a "random line" effect, thereby improving the uniformity of material removal and thus improving the roughness. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 Schematic diagram of the basic flow of the method of the embodiment of the present invention.

[0033] Figure 2 Schematic diagram of the installation structure of the magnetorheological machine tool in an embodiment of the present invention.

[0034] Figure 3 Comparison of abrasive particle trajectories with and without ultrasonic vibration assistance in the embodiments of the present invention.

[0035] Figure 4 The enlarged views of the surface microstructure of the workpiece processed by magnetorheological machining with and without the assistance of ultrasonic vibration in the embodiments of the present invention are shown, wherein (a) is without the assistance of ultrasonic vibration, and (b) is with the assistance of ultrasonic vibration.

[0036] Figure 5 Surface detection results of workpieces processed by magnetorheological machining without ultrasonic vibration assistance in the embodiments of the present invention are compared.

[0037] Figure 6 This is the surface detection result of the workpiece after magnetorheological machining assisted by ultrasonic vibration in an embodiment of the present invention.

[0038] Figure 7 1 is a square area distribution diagram of magnetorheological processing with and without ultrasonic vibration assistance in an embodiment of the present invention, wherein (a) is without ultrasonic vibration assistance, and (b) is with ultrasonic vibration assistance.

[0039] Figure 8 This is a schematic diagram of the optimal process parameter combination results obtained by optimization in an embodiment of the present invention.

[0040] Fig. 9 This is the surface detection result of the workpiece processed when the ultrasonic power is 20% of the rated power in the embodiment of the present invention.

[0041] Fig.10 This is the surface detection result of the workpiece processed when the ultrasonic power is 30% of the rated power in the embodiment of the present invention.

[0042] Fig.11 This is the surface detection result of the workpiece processed when the ultrasonic power is 40% of the rated power in the embodiment of the present invention.

[0043] Fig.12 This is the surface detection result of the workpiece processed when the ultrasonic power is 50% of the rated power in the embodiment of the present invention.

[0044] Fig.13 This is the surface detection result of the workpiece processed when the ultrasonic power is 60% of the rated power in the embodiment of the present invention.

[0045] Fig.14 It is the cross-section profile detection result of the workpiece in the embodiment of the present invention. DETAILED DESCRIPTION

[0046] The present invention aims to achieve ultrasonic vibration assisted magnetorheological deterministic polishing roughness optimization, promote the uniformity of material removal, and effectively reduce the roughness of the workpiece. Figure 1 As shown, this embodiment provides a roughness optimization method for ultrasonic vibration assisted magnetorheological deterministic polishing, comprising the following steps:

[0047] S1, placing an ultrasonic vibration table on a workpiece rotation axis of a magnetorheological machine tool, and the ultrasonic vibration table is not associated with an input or output system of a polishing wheel of the magnetorheological machine tool so that a magnetorheological polishing ribbon formed on the polishing wheel is not affected by the ultrasonic vibration table;

[0048] S2, connect and fix the workpiece to be processed with the fixture of the ultrasonic vibration table; see Figure 2 In this embodiment, a magnetorheological machine tool is provided with a three-dimensional motion table 1, a bracket 2 is provided on the three-dimensional motion table 1, a polishing wheel 3 and a driving motor 4 for driving the polishing wheel 3 are installed on the bracket 2, a nozzle 5 and a recovery device 6 are provided on one side of the polishing wheel 3 for outputting and recovering the magnetorheological polishing liquid, an ultrasonic vibration table 7 is placed on the workpiece rotating shaft (not shown in the figure) of the magnetorheological machine tool, a workpiece 8 to be processed is connected and fixed to a fixture (not shown in the figure) of the ultrasonic vibration table 7, and the workpiece rotating shaft is installed on the magnetorheological machine tool through a leveling mechanism and a centering mechanism for adjusting the position and posture of the workpiece 8 to be processed;

[0049] S3, adjusting the position and posture of the workpiece to be processed by the leveling mechanism and the centering mechanism of the magnetorheological machine tool to ensure that the pressing position and the pressing depth of the magnetorheological polishing ribbon formed on the polishing wheel during the magnetorheological processing are consistent;

[0050] S4, using a viscometer and a flowmeter to detect the viscosity and flow of the magnetorheological polishing fluid, controlling the output and recovery of the magnetorheological polishing fluid through a numerical control system, and maintaining the viscosity and flow of the magnetorheological polishing fluid stable based on the viscosity and flow closed-loop control;

[0051] S5, inputting the surface error data of the workpiece to be processed detected by the wavefront interferometer into the magnetorheological polishing process control software, and solving the residence time of the magnetorheological polishing wheel on each mirror surface area of ​​the workpiece to be processed in combination with the optimal process parameter combination and outputting it as a processing code;

[0052] S6, inputting the obtained processing code into the magnetorheological machine tool, so that the magnetorheological polishing ribbon performs deterministic polishing on the workpiece to be processed based on a fixed pressing position and pressing depth, and in the deterministic polishing, the power supply of the ultrasonic vibration table is adjusted to control the process parameters of the ultrasonic vibration to control the trajectory of the abrasive particles in the magnetorheological polishing liquid to achieve roughness optimization of ultrasonic vibration-assisted magnetorheological deterministic polishing.

[0053] In step S6 of this embodiment, when the trajectory of the abrasive particles in the magnetorheological polishing liquid is controlled by adjusting the power supply of the ultrasonic vibration table to adjust the process parameters of the ultrasonic vibration in the deterministic polishing, the function expression of the trajectory of the abrasive particles is:

[0054] ,

[0055] In the above formula, is the trajectory of the abrasive particles, is the amplitude of ultrasonic vibration, is the frequency of ultrasonic vibration, is the radius of the polishing wheel, is the speed of the polishing wheel, For time, is the phase of ultrasonic vibration.

[0056] Before step S6 of this embodiment, the trajectory equation of the abrasive particles is constructed: the abrasive particle motion model under the independent action of magnetorheology is established:

[0057] ,

[0058] ,

[0059] In the above formula, is the movement path of the abrasive particles, is the moving speed of the abrasive particles, is the radius of the polishing wheel, is the speed of the polishing wheel, is time; establish the ultrasonic vibration model under the independent action of ultrasonic vibration:

[0060] ,

[0061] ,

[0062] In the above formula, is the path of ultrasonic vibration, is the amplitude of ultrasonic vibration, is the frequency of ultrasonic vibration, is the phase of ultrasonic vibration, is the speed of ultrasonic vibration, is time; the abrasive particle motion model under the independent action of magnetorheology and the ultrasonic vibration model under the independent action of ultrasonic vibration are combined to obtain the abrasive particle trajectory equation under the action of ultrasonic vibration-assisted magnetorheology as shown in the following formula:

[0063] ,

[0064] In the above formula, The wear particle track.

[0065] The process parameters in the optimal process parameter combination in step S5 of this embodiment include process parameters of the magnetorheological process and process parameters of the ultrasonic vibration. The process parameters of the magnetorheological process include the rotation speed of the polishing wheel, the magnetic field current, the viscosity of the magnetorheological polishing liquid, the flow rate of the magnetorheological polishing liquid, and the indentation depth coefficient of the magnetorheological polishing ribbon. The process parameters of the ultrasonic vibration include the amplitude of the ultrasonic vibration, the frequency of the ultrasonic vibration, and the phase of the ultrasonic vibration.

[0066] Before step S5 of this embodiment, the process also includes testing the sample of the workpiece to be processed to obtain the optimal process parameter combination, and the goal of obtaining the optimal process parameter combination is to make the surface roughness of the sample of the workpiece to be processed Divided by the peak removal rate The obtained ratio is the best, where the surface roughness is The ratio has the property of being small, and the peak removal rate has the property of being large, so finding the maximum value of the ratio is the optimization goal of the algorithm, and its function expression is:

[0067] ,

[0068] In the above formula, is the objective function, is the number of process parameter combinations in the process parameter combination, is the surface roughness of the i-th process parameter combination Divided by the peak removal rate As an optional implementation, in this embodiment, a multi-objective particle swarm MOPSO algorithm is specifically used to optimize the process parameter combination. In addition, other optimization algorithms, such as genetic algorithms, etc., may also be used as needed. Figure 8 This is a schematic diagram of the optimal process parameter combination results obtained by optimizing the multi-objective particle swarm MOPSO algorithm in an embodiment of the present invention. The values ​​in the middle table are the optimal process parameter combinations composed of various process parameters.

[0069] In step S4 of this embodiment, maintaining the viscosity and flow rate of the magnetorheological polishing liquid stable based on the closed-loop control of viscosity and flow rate means maintaining the fluctuation of the viscosity and flow rate of the magnetorheological polishing liquid within 5%. In step S4 of this embodiment, maintaining the viscosity and flow rate of the magnetorheological polishing liquid stable based on the closed-loop control of viscosity and flow rate includes: calculating the viscosity difference between the viscosity obtained by detection and the target viscosity, inputting the viscosity difference into the PID controller to obtain the valve opening control instruction, and controlling the valve opening for adding the saturated magnetorheological polishing liquid through the valve opening control instruction to maintain the viscosity of the magnetorheological polishing liquid stable; calculating the flow difference between the flow obtained by detection and the target flow, inputting the flow difference into the PID controller to obtain the circulation pump control instruction, and controlling the circulation pump for circulating the magnetorheological polishing liquid through the circulation pump control instruction to maintain the viscosity of the magnetorheological polishing liquid stable.

[0070] Since the ultrasonic vibration produces a disturbance with an amplitude of A on the abrasive particles, and since all the abrasive particles have motion consistency, the array abrasive particles are taken for information entropy analysis. Figure 3 1 is a comparison of the abrasive particle tracks with and without ultrasonic vibration assistance in this embodiment, wherein the solid line is the abrasive particle track under ultrasonic vibration, and the dotted line is the abrasive particle track without ultrasonic vibration. Figure 4 It is an enlarged view of the surface microstructure of a workpiece after magnetorheological machining with or without the assistance of ultrasonic vibration in an embodiment of the present invention. Figure 5 Surface detection results of workpieces processed by magnetorheological machining without ultrasonic vibration assistance in the embodiments of the present invention are compared. Figure 6 is the surface detection result of the workpiece processed by magnetorheological machining assisted by ultrasonic vibration in the embodiment of the present invention, wherein x , y The coordinates are all positions, in mm. Figure 3 , Figure 4 , Figure 5 and Figure 6 It can be seen that the ultrasonic effect changes the movement trajectory of the abrasive particles.

[0071] The amplitude of ultrasonic vibration The impact range is defined as The square area of ​​​​ The square area , the square area Divide into grids The nodes of the area are recorded as According to the Preston equation, assuming that a node in the region Material removal in time T for:

[0072] ,

[0073] In the above formula, is the material removal rate coefficient, for The relative pressure, is the relative speed of motion, for time. The sum of the material removal over the area for:

[0074] ,

[0075] So we can get the node The amount of material removed during time T is relative to The sum of the material removal over the area Material removal ratio for:

[0076] ,

[0077] node Material removal ratio It can also be called probability density, introducing Describe the distribution of material removal. In order to comprehensively reflect the distribution of abrasive material removal on the workpiece surface, the magnetorheological material removal information entropy function is defined for:

[0078] .

[0079] Figure 7 The square area distribution diagram of magnetorheological machining with and without ultrasonic vibration assistance in this embodiment, where (a) is without ultrasonic vibration assistance (MRF) and (b) is with ultrasonic vibration assistance (U-MRF). The probability distribution density and information entropy of MRF and U-MRF in the single abrasive action area are:

[0080] ,

[0081] ,

[0082] From the above formula, it can be seen that the assistance of ultrasonic vibration increases times the information entropy value of magnetorheological machining, the amplitude of ultrasonic vibration under initial conditions The impact range is defined as square area, so the amplitude of the ultrasonic vibration applied The larger the value, the greater the information entropy value and the more uniform the material removal. The amplitude of ultrasonic vibration It is directly related to the ultrasonic power. Therefore, in this embodiment, the ultrasonic power is 20% to 60% of the rated power to achieve different ultrasonic vibration amplitudes. Effect on uniformity of material removal. Fig. 9 This is the surface inspection result of the workpiece processed when the ultrasonic power is 20% of the rated power in this embodiment. Fig.10 This is the surface inspection result of the workpiece processed when the ultrasonic power is 30% of the rated power in this embodiment. Fig.11 This is the surface inspection result of the workpiece processed when the ultrasonic power is 40% of the rated power in this embodiment. Fig.12 This is the surface inspection result of the workpiece processed when the ultrasonic power is 50% of the rated power in this embodiment. Fig.13 This is the surface inspection result of the workpiece processed when the ultrasonic power is 60% of the rated power in this embodiment. Fig.14 This is the cross-section profile detection result of the workpiece in the embodiment of the present invention. Figures 9 to 14It can be seen that with the increase of ultrasonic power, the greater the information entropy value, the more uniform the material removal, and the better the surface roughness.

[0083] To sum up, the method of this embodiment can achieve ultrasonic vibration assisted magnetorheological deterministic polishing roughness optimization, promote the uniformity of material removal, and effectively reduce the roughness of the workpiece. Through ultrasonic vibration assisted magnetorheological deterministic polishing roughness optimization, the larger the ultrasonic amplitude, the larger the scratching distance of the abrasive, thereby changing the motion trajectory and speed of the magnetorheological processing abrasive, making the abrasive produce a "random line" effect, improving the uniformity of material removal, and then improving the roughness.

[0084] In addition, the present embodiment also provides a roughness optimization system for ultrasonic vibration-assisted magnetorheological deterministic polishing, comprising a microprocessor and a memory connected to each other, wherein the microprocessor is programmed or configured to execute the roughness optimization method for ultrasonic vibration-assisted magnetorheological deterministic polishing. In addition, the present embodiment also provides a computer-readable storage medium, wherein a computer program or instruction is stored in the computer-readable storage medium, wherein the computer program or instruction is programmed or configured to execute the roughness optimization method for ultrasonic vibration-assisted magnetorheological deterministic polishing through a processor. In addition, the present embodiment also provides a computer program product, comprising a computer program or instruction, wherein the computer program or instruction is programmed or configured to execute the roughness optimization method for ultrasonic vibration-assisted magnetorheological deterministic polishing through a processor.

[0085] Those skilled in the art should understand that the technical solutions provided by the embodiments of the present application may be in the form of methods, systems, or computer program products. Therefore, the present application may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the present application may take the form of a computer program product implemented on one or more computer-readable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes. The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the process Figure 1 A process or multiple processes and / or boxes Figure 1These computer program instructions can also be stored in a computer-readable memory that can guide a computer or other programmable data processing device to work in a specific way, so that the instructions stored in the computer-readable memory produce a product including an instruction device, which implements the functions specified in the process. Figure 1 A process or multiple processes and / or boxes Figure 1 These computer program instructions can also be loaded onto a computer or other programmable data processing device, so that a series of operation steps are executed on the computer or other programmable device to produce a computer-implemented process, so that the instructions executed on the computer or other programmable device provide for implementing the process in the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0086] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A roughness optimization method for ultrasonic vibration-assisted magnetorheological deterministic polishing, characterized in that: The steps include: S1, placing an ultrasonic vibration table on a workpiece rotation axis of a magnetorheological machine tool, and the ultrasonic vibration table is not associated with an input or output system of a polishing wheel of the magnetorheological machine tool so that a magnetorheological polishing ribbon formed on the polishing wheel is not affected by the ultrasonic vibration table; S2, connecting and fixing the workpiece to be processed to the fixture of the ultrasonic vibration table; S3, adjusting the position and posture of the workpiece to be processed by the leveling mechanism and the centering mechanism of the magnetorheological machine tool to ensure that the pressing position and the pressing depth of the magnetorheological polishing ribbon formed on the polishing wheel during the magnetorheological processing are consistent; S4, using a viscometer and a flowmeter to detect the viscosity and flow of the magnetorheological polishing fluid, controlling the output and recovery of the magnetorheological polishing fluid through a numerical control system, and maintaining the viscosity and flow of the magnetorheological polishing fluid stable based on the viscosity and flow closed-loop control; S5, inputting the surface error data of the workpiece to be processed detected by the wavefront interferometer into the magnetorheological polishing process control software, and solving the residence time of the magnetorheological polishing wheel on each mirror surface area of ​​the workpiece to be processed in combination with the optimal process parameter combination and outputting it as a processing code; S6, input the obtained processing code into the magnetorheological machine tool, so that the magnetorheological polishing ribbon performs deterministic polishing on the workpiece to be processed based on the fixed pressing position and pressing depth, and in the deterministic polishing, the trajectory of the abrasive particles in the magnetorheological polishing liquid is controlled by adjusting the power supply of the ultrasonic vibration table to adjust the process parameters of the ultrasonic vibration to achieve roughness optimization of the ultrasonic vibration-assisted magnetorheological deterministic polishing, and the function expression of the trajectory of the abrasive particles is: ， In the above formula, is the trajectory of the abrasive particles, is the amplitude of ultrasonic vibration, is the frequency of ultrasonic vibration, is the radius of the polishing wheel, is the speed of the polishing wheel, For time, is the phase of ultrasonic vibration.

2. The roughness optimization method of ultrasonic vibration assisted magnetorheological deterministic polishing according to claim 1 is characterized in that: Before step S6, the process also includes constructing the trajectory equation of the abrasive particles: establishing the abrasive particle motion model under the independent action of magnetorheology: ， ， In the above formula, is the movement path of the abrasive particles, is the moving speed of the abrasive particles, is the radius of the polishing wheel, is the speed of the polishing wheel, is time; establish the ultrasonic vibration model under the independent action of ultrasonic vibration: ， ， In the above formula, is the path of ultrasonic vibration, is the amplitude of ultrasonic vibration, is the frequency of ultrasonic vibration, is the phase of ultrasonic vibration, is the speed of ultrasonic vibration, is time; the abrasive particle motion model under the independent action of magnetorheology and the ultrasonic vibration model under the independent action of ultrasonic vibration are combined to obtain the abrasive particle trajectory equation under the action of ultrasonic vibration-assisted magnetorheology as shown in the following formula: ， In the above formula, The wear particle track.

3. The roughness optimization method of ultrasonic vibration assisted magnetorheological deterministic polishing according to claim 1 is characterized in that: The process parameters in the optimal process parameter combination in step S5 include process parameters of the magnetorheological process and process parameters of the ultrasonic vibration. The process parameters of the magnetorheological process include the rotation speed of the polishing wheel, the magnetic field current, the viscosity of the magnetorheological polishing liquid, the flow rate of the magnetorheological polishing liquid, and the indentation depth coefficient of the magnetorheological polishing ribbon. The process parameters of the ultrasonic vibration include the amplitude of the ultrasonic vibration, the frequency of the ultrasonic vibration, and the phase of the ultrasonic vibration.

4. The roughness optimization method of ultrasonic vibration assisted magnetorheological deterministic polishing according to claim 3 is characterized in that: Before step S5, the method also includes testing a sample of the workpiece to be processed to obtain an optimal combination of process parameters, and the goal of obtaining the optimal combination of process parameters is to optimize the ratio of the surface roughness of the sample of the workpiece to be processed divided by the peak removal rate.

5. The roughness optimization method of ultrasonic vibration assisted magnetorheological deterministic polishing according to claim 1, characterized in that: Maintaining the stability of the viscosity and flow rate of the magnetorheological polishing fluid based on the closed-loop control of viscosity and flow rate in step S4 means maintaining the fluctuation of the viscosity and flow rate of the magnetorheological polishing fluid within 5%.

6. The roughness optimization method of ultrasonic vibration assisted magnetorheological deterministic polishing according to claim 1, characterized in that: In step S4, maintaining the viscosity and flow rate of the magnetorheological polishing fluid stable based on the closed-loop control of viscosity and flow rate includes: calculating the viscosity difference between the detected viscosity and the target viscosity, inputting the viscosity difference into the PID controller to obtain a valve opening control instruction, and controlling the valve opening for adding saturated magnetorheological polishing fluid through the valve opening control instruction to maintain the viscosity of the magnetorheological polishing fluid stable; calculating the flow rate difference between the detected flow rate and the target flow rate, inputting the flow rate difference into the PID controller to obtain a circulation pump control instruction, and controlling the circulation pump for circulating the magnetorheological polishing fluid through the circulation pump control instruction to maintain the viscosity of the magnetorheological polishing fluid stable.

7. A roughness optimization system for ultrasonic vibration-assisted magnetorheological deterministic polishing, comprising a microprocessor and a memory connected to each other, characterized in that: The microprocessor is programmed or configured to execute the roughness optimization method of ultrasonic vibration-assisted magnetorheological deterministic polishing as claimed in any one of claims 1 to 6.

8. A computer-readable storage medium having a computer program or instruction stored therein, characterized in that: The computer program or instruction is programmed or configured to execute the roughness optimization method of ultrasonic vibration-assisted magnetorheological deterministic polishing as claimed in any one of claims 1 to 6 through a processor.

9. A computer program product comprising a computer program or instructions, characterized in that The computer program or instruction is programmed or configured to execute the roughness optimization method of ultrasonic vibration-assisted magnetorheological deterministic polishing as claimed in any one of claims 1 to 6 through a processor.

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